JP2000346549A - Apparatus and method for rotatably drying substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove particles in a drying apparatus and to improve quality by rotating a substrate chuck, blowing a high-pressure gas onto the substrate, and exhausting the gas blown from its air knife. SOLUTION: An air knife 1 and an exhaust pipe 2 are provided on a spinning cup 9, and a high-pressure air from the knife 1 is blown at about 45 degrees to a substrate surface while horizontally moving by a slide mechanism 4 and then integrally moving perpendicularly by a vertical driving mechanism 5. The pipe 2 is disposed at a position for efficiently exhausting the air blown from the knife 1, and a part of a mist generated during removing and drying pure water on the substrate by the knife 1 together with the air blown from the knife 1 by an exhaust hose attached to the pipe 2 is exhausted out of a dryer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary substrate drying apparatus utilizing centrifugal force and a substrate drying method.

[0002]

2. Description of the Related Art In a manufacturing process of a TFT (thin film transistor) panel used in a liquid crystal display device, washing and drying with pure water are performed between each process. For this drying, a rotary substrate drying apparatus is usually used. FIG.
FIG. 1 is a sectional view schematically showing a conventional general rotary substrate drying apparatus. In FIG. 8, a substrate 6 includes a substrate chuck 7
It is held horizontally above and is rotated together with the substrate chuck 7 by the drive of the spin motor 8. Also, the substrate chuck 7
A nozzle 17 for blowing an inert gas such as nitrogen gas from directly above toward the center of the main surface of the substrate 6 is provided above. The pure water 14 on the substrate 6 is shaken off by centrifugal force due to rotation. Further, by blowing the inert gas from the nozzle 17, the pure water remaining near the center of the substrate having a weak centrifugal force is dried. The spin cup 9 is for preventing the pure water 14 from scattering from the substrate 6 and for efficiently draining and exhausting the same, and has a cylindrical shape covering the outer periphery of the substrate chuck 7. Pure water scattered from the substrate 6 by the centrifugal force hits the inner wall of the spin cup 9 and rebounds. Spin cup 9
Pure water is drained from a drain port 12 below the spin cup, and gas is exhausted from an exhaust port 13 below the spin cup by the function of a bounce prevention ring 10 and a flow straightening plate 11 provided therein.

A general drying procedure using the above-described conventional rotary substrate drying apparatus will be described below. After fixing the substrate 6 to which the pure water 14 has adhered to the substrate chuck 7, the substrate is first rotated at a low speed (about 500 rpm or less), and the pure water 14
Shake off lightly. After that, high-speed rotation (about 1000 to 1500 rpm) is performed after the amount of pure water on the surface is reduced, and at the same time, an inert gas is sprayed and dried on the center of the substrate where centrifugal force does not easily work.

[0004]

However, when drying is performed by the above-described general procedure using a conventional rotary substrate drying apparatus, the following problems cannot be solved by the above-described conventional techniques. There is a problem. When shaking off at low speed, a large amount of pure water on the substrate
It scatters from the substrate, hits the spin cup and rebounds and re-adheres to the substrate. During high-speed rotation, a large amount of mist is generated from pure water remaining on the substrate. During high-speed rotation, airflow with a constant flow is generated in the cup due to wind-off of the substrate, but at the same time, the gas is blown from the nozzle to disturb the flow, and efficient exhaust cannot be performed, and the mist spins. Remains in the cup,
Reattach to the dried substrate. In particular, since the size of liquid crystal-related substrates has been increasing in recent years, this problem tends to be more remarkable, and the conventional rotary substrate drying apparatus is susceptible to reattachment of pure water and mist. The re-adhered pure water or mist causes a pattern defect, resulting in a decrease in yield and quality.

Japanese Patent Application Laid-Open No. 9-152272 discloses one known technique for preventing contamination of the substrate surface due to traces of water droplets remaining on the dried substrate. In the same publication, while rotating a substrate, in a rotary substrate drying apparatus for injecting gas to the substrate to dry the substrate, the substrate is rotated at a high speed after uniformly wetting the main surface of the substrate, and after a predetermined time has elapsed. At the timing (in a state where the liquid layer adhering to the main surface of the substrate is substantially uniform and thin), water or gas is blown out to the central region of the upper surface and the lower surface of the substrate (blowing process), thereby adhering water droplets. A rotary substrate drying method and apparatus capable of drying with high cleaning properties without leaving traces is disclosed. Further, as one of the known techniques for preventing contamination or the like due to re-adhesion of mist to a substrate, Japanese Unexamined Patent Publication No.
No. 0-64875. In this publication, while rotating a substrate, a gas is blown from a nozzle to the main surface of the substrate, and the nozzle is moved in a parallel or arc shape from the center of rotation of the substrate to the outside, thereby rotating the substrate. A rotary substrate drying apparatus and a substrate drying method for preventing mist from re-adhering to a substrate are disclosed.

However, any of the methods described in these publications performs high-speed rotation and gas blowing while a large amount of liquid adheres to the substrate, causing a large amount of mist to be generated. However, the above problems could not be effectively solved. It is an object of the present invention to solve the above-mentioned problems of the prior art and to make it possible to remove particles inside a drying device, and an object of the present invention is to provide a rotating device capable of improving yield and quality. An object of the present invention is to provide an apparatus and a method for drying a substrate.

[0007]

According to the present invention, there is provided a rotary substrate drying apparatus comprising: a substrate chuck for holding a substrate horizontally; a spin motor for rotating the substrate chuck about a center of the chuck as a rotation center; It is characterized by having an air knife capable of blowing out high-pressure gas, and an exhaust pipe which is provided near and integrally with the air knife and exhausts high-pressure gas blown out from the air knife. Preferably, the apparatus further includes a vertical drive mechanism for vertically moving the air knife and the exhaust pipe, and a horizontal movement mechanism for horizontally moving the air knife and the exhaust pipe. Preferably, a plurality of sets of the air knife and the exhaust pipe are arranged in parallel.

Further, in the rotary substrate drying method according to the present invention, (1) in a state in which the substrate is stopped, high-pressure gas is blown onto the surface of the substrate from an air knife close to the substrate, and the substrate is arranged close to the air knife. A first drying step of exhausting air through an exhaust pipe, (2) a second drying step of rotating the substrate at a low speed, and (3) a third drying step of rotating the substrate at a high speed. Features.

Further, another method of drying a rotary substrate according to the present invention is as follows. (1) In a spin cup which is a closed space, a high-pressure gas is down-flowed by an air knife while exhausting air, so that the atmosphere in the spin cup is reduced. A cleaning process, (2) a process of mounting a wet substrate in the spin cup, and (3) a high-pressure gas on the substrate surface by the air knife close to the substrate while the substrate is stopped. (1) a first drying step of spraying air and exhausting air through an exhaust pipe arranged close to the air knife;
A second drying step of rotating the substrate at a low speed; and (5) a third drying step of rotating the substrate at a high speed.

[0010]

Next, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a cross-sectional view of a rotary substrate drying apparatus showing a first embodiment of the present invention, and FIG. 2 is a plan view thereof. In FIG. 1, the configuration and functions of the substrate 6, the substrate chuck 7, the spin motor 8 and the like in the spin cup 9 are the same as those of the conventional example shown in FIG. In this embodiment, an air knife 1 and an exhaust pipe 2 are provided on a spin cup 9, which are horizontally moved by a slide mechanism 4 and vertically by a vertical drive mechanism 5.
They move together. As shown in FIG. 1, the angle at which the air knife is attached is preferably about 45 degrees at which high-pressure air from the air knife effectively acts on the substrate surface. The exhaust pipe 2 is disposed at a position where the high-pressure air blown from the air knife 1 can be efficiently exhausted. With the exhaust pipe 2 and the exhaust hose 3 attached to the exhaust pipe shown in FIG. 2, together with the high-pressure air blown out of the air knife 1, a part of the mist generated during the removal and drying of the pure water on the substrate by the air knife 1 is removed. Exhaust outside the dryer.

Next, a drying procedure using the rotary substrate drying apparatus according to the first embodiment of the present invention will be briefly described with reference to FIG. As shown in FIG. 1, the air knife 1 and the exhaust pipe 2 are removed from the outside of the spin cup 9 while the substrate 6 before drying having a large amount of pure water adhered to the surface is fixed on the substrate chuck 7 and stopped. The slide mechanism 4 and the vertical drive mechanism 5 move the substrate 6 in the spin cup 9 to the substrate end surface (the position of the right air knife and exhaust pipe shown by the dashed line in FIG. 1) where the substrate is dried by the air knife. Next, high-pressure air whose cleanliness is controlled is blown out from the air knife 1,
The suction mechanism 2 moves the air knife 1 to the opposite end face of the substrate (the position of the left air knife and the exhaust pipe indicated by the dashed line in FIG. 1) by the slide mechanism 4 while sucking the air through the exhaust pipe 2 disposed in front of the traveling direction of the air knife 1. . After that, the air knife 1 and the exhaust pipe 2 stop blowing and exhausting the high-pressure air, and move the high-pressure air to the outside of the spin cup 9 (the position indicated by the solid line in FIG. 1). Since the end surface and the back surface of the substrate 6 cannot be dried only by the air knife 1 and the exhaust pipe 2, the substrate 6 is rotated at a low speed by the spin motor 8, and the water droplets remaining on the end surface and the back surface of the substrate are shaken. Thereafter, drying is performed by high-speed rotation.

The surface (the upper surface of the substrate 6 in FIG. 1) where the amount of pure water adhered is large in the substrate 6 before drying.
By removing and drying a large amount of pure water on the surface with the air knife 1, the amount of mist scattered at low speed and high speed rotation can be suppressed. In addition, it is not necessary to blow an inert gas such as a nitrogen gas to the center of the substrate 6 where the centrifugal force does not easily work, which is required in the conventional rotary substrate drying apparatus, which disturbs a constant flow of air generated during the rotation process. There is no. Therefore, the air can be efficiently exhausted, so that the mist in the spin cup 9 can be removed, and the mist can be prevented from re-adhering to the substrate 6.

Next, a first embodiment of the drying method according to the present invention will be described more specifically along a drying sequence. FIG. 3 shows a drying sequence according to the first embodiment of the drying method of the present invention. The flow rate of high pressure air from the air knife,
The drying time with an air knife, the low-speed rotation, and the high-speed rotation vary depending on the size of the substrate and the like. here,
As an example, a sequence for drying a substrate having a width of 36 cm will be described with reference to FIG. 1 and along the sequence of FIG. Sequence 1 Air Knife Drying With the substrate 6 before drying having a large amount of pure water on its surface fixed on the substrate chuck 7 and stopped, the air knife 1 and the exhaust pipe 2 are moved from outside the spin cup 9 to the slide mechanism 4. And the vertical drive mechanism 5 to move the substrate 6 to the end face of the substrate 6 where drying and drying by the air knife in the spin cup 9 are started.
At this time, the clearance between the air knife 1 and the substrate 6 is, for example, 10
It is set to be parallel in mm or less. The high-pressure air whose cleanness is controlled is blown out from the air knife 1 and is moved to the opposite end face of the substrate by the slide mechanism 4 while being sucked by the exhaust pipe 2 disposed in front of the air knife 1 in the traveling direction. Is dried. The flow rate of the high-pressure air is preferably about 100 to 200 l / min.
As for the exhaust volume, secure the amount corresponding to it. The speed of sliding the air knife is about 100 cm / min, but it is necessary to finally set conditions depending on the dry state. Thereafter, the air knife 1 and the exhaust pipe 2 stop blowing and exhausting the high-pressure air, and move the high-pressure air to the outside of the spin cup 9.

Sequence 2 Low-speed rotation drying Since the end surface and the back surface of the substrate 6 cannot be dried only by the air knife 1 and the exhaust pipe 2, the substrate 6 is further rotated at a low speed by the spin motor 8 to remove water droplets remaining on the end surface and the back surface of the substrate. Shake it off. The rotation speed at low speed is desirably as low as possible so that water droplets scattered from the substrate 6 do not rebound to the spin cup 9 and re-attach to the substrate 6, and are 500 rpm.
The following degree is preferable. In addition, the drying time T1 due to the low-speed rotation is a time in which water droplets on the end face and the back face of the substrate 6 are shaken off, so that 5 seconds or less is sufficient. Sequence 3 High-speed rotation drying The rotation speed at high speed is desirably as low as possible in consideration of suppressing damage to the substrate due to centrifugal force.
The rotation time T2 by high-speed rotation is about 10 seconds, with about 00 to 1500 rpm as a guide.

Although the drying method of drying the entire surface of the substrate with an air knife has been described so far, the drying is performed not by drying the entire surface but by partially drying the central portion of the substrate, and by rotating in the next step. Sufficient effects can be obtained even when drying is performed on portions other than the central portion of the substrate. As a method of performing partial drying, only the center portion of the air knife shown in FIGS. 1 and 2 may be dried by a slide mechanism. According to this method, the drying time performed by the air knife can be reduced. The number of air knives and the number of exhaust pipes are not limited to one, but a plurality of them may be arranged to perform surface drying before drying by rotation. If a plurality of air knives and exhaust pipes shown in FIG. 2 are arranged side by side so that they can be simultaneously moved by the slide mechanism 4 and the vertical drive mechanism 5, the drying time by the air knives can be reduced. Further, during high-speed rotation drying of the substrate (third drying step), the air knife may be positioned at the center of the substrate, and high-pressure air may be blown to efficiently dry the center of the substrate where centrifugal force is not easily applied. . In this case, after the end of the third drying step, the air knife and the exhaust pipe rise and return to the position shown by the solid line in FIG.

FIG. 4 is a view for explaining an air knife driving mechanism used in a second embodiment of the drying apparatus of the present invention. As shown in FIG. 4, the air knife 1 is rotatably mounted on a vertical drive mechanism 5 about a rotation shaft 15, and is driven by a drive motor (not shown) as shown by a dashed line in FIG. Is configured to be able to be directed directly below. This is because, before drying, the air outlet of the air knife 1 is directed straight down, and high-pressure air can be blown from the air knife.

FIG. 5 is a sectional view showing a rotary substrate drying apparatus according to a second embodiment of the present invention. In FIG. 5, three air knives 1 and three exhaust pipes 2 are arranged in parallel. The slide mechanism 4 and the vertical drive mechanism 5 move the three sets of air knives and the exhaust pipe in the parallel direction and the vertical direction in the figure. The structures and functions in the spin cup such as the spin cup 9, the substrate 6, the substrate chuck 7, and the spin motor 8 are the same as those in the first embodiment shown in FIG. . The air knife 1, the exhaust pipe 2, the slide mechanism 4, and the vertical drive mechanism 5 are surrounded by a cylindrical surrounding plate 16 having a ceiling plate surrounding the outer periphery of the spin cup 9. Here, a drying chamber is constituted by the spin cup 9 and the surrounding plate 16.

Referring to FIG. 5, a description will be given of a second embodiment of the rotary substrate drying method according to the present invention. Before drying, the air knife 1 and the exhaust pipe 2 are arranged in the upper portion of the shroud plate 16 by the slide mechanism 4 and the vertical drive mechanism 5 at the position indicated by the dashed line. At this position, the outlet of the air knife is directed directly downward, and sends high-pressure air having a flow rate of about 30 to 100 l / min, which is smaller than the flow rate of high-pressure air of the air knife performed in the first embodiment described with reference to FIG. . When high-pressure air with a small flow rate is being sent, it is preferable to stop the exhaust of the exhaust pipe 2 in order to stabilize the flow of air in the shroud. The high-pressure air of which cleanness is controlled from the air knife flows down in the shroud 16, passes through the spin cup 9, and is exhausted from the exhaust port 13 on the bottom surface of the spin cup. In this process, particles in the space surrounded by the surrounding plate 16 are discharged from the exhaust port 13 below the spin cup together with the downflow, and the air in the drying chamber is cleaned. At this time, the flow rate of the high-pressure air from the air knife 1 is determined by the distance between the air knife and the substrate, the volume of the space in the partition plate 16, and the like. That is, a down flow is performed in the shroud 16, the air is exhausted sufficiently from the exhaust port below the spin cup, and the flow rate is set to a value that can purify the air in the drying chamber formed by the shroud 16 and the spin cup 9. Is done.

Next, after the blowing of the high-pressure air by the air knife is temporarily stopped, the substrate 6 before drying having a large amount of pure water 14 on its surface is fixed on the substrate chuck 7. Thereafter, the air knife 1 and the exhaust pipe 2 are moved by the slide mechanism 4 and the vertical drive mechanism 5 to a position near the substrate indicated by a solid line in FIG. At the same time, the blowing direction of the high-pressure air from the air knife 1 is tilted from right below in the illustrated direction. Next, the flow rate of the high-pressure air of the air knife is adjusted to a level suitable for drying by the air knife (for example, the above 100 to 200 l).
/ Min). At the same time, the exhaust of the exhaust pipe 2 is started. The slide mechanism 4 moves the air knife 1 and the exhaust pipe 2 to the left in FIG. 5 to execute the drying and removal of pure water on the substrate by the air knife. Subsequent drying by the air knife is basically the same as that described in the first embodiment, and a detailed description thereof will be omitted. However, as compared with the case of the first embodiment in FIG. 1, three sets of the air knife 1 and the exhaust pipe 2 are provided, so that the horizontal moving distance by the slide mechanism can be short, and the drying time by the air knife is short. Can be shortened. Alternatively, the air knife may pass through the same portion of the substrate a plurality of times to perform the drying operation on the same portion with the air knife a plurality of times, so that the drying with the air knife may be performed more completely.

After the drying by the air knife 1, the blowing of the high-pressure air is stopped. The slide mechanism 4 and the vertical drive mechanism 5 return to the upper position in the surrounding plate 16 again at the position shown by the dashed line in FIG. Then, low-speed rotation and high-speed rotation drying are performed in the same manner as in the first embodiment. Thereafter, the dried substrate is transported outside the drying chamber. Next, before the substrate to be dried is carried in, downflow is performed by the air knife 1 to clean the air around the substrate device. In the drying according to the second embodiment performed in this manner, the particles around the substrate setting position are extremely reduced due to the downflow by the air knife before the drying. In addition, since the bounce and mist of pure water take up particles and adhere to each other extremely, the yield and the quality in the subsequent process can be improved. Although FIG. 5 shows a structure in which three sets of the air knife and the exhaust pipe are provided, the number is not particularly limited.

FIG. 6 is a diagram showing the relationship between the drying sequence in the drying method using the drying apparatus shown in FIG. 5 and the flow rate of the high-pressure air from the air knife. Hereinafter, referring to FIG. 5, FIG.
The drying sequence will be described along. Sequence 1 Before Drying Before setting the substrate on which pure water adheres to the substrate chuck 7 of the rotary substrate drying apparatus, a small flow rate, for example, 50 l / min of high-pressure air is blown out from the air knife to downflow the air in the shroud plate 16. I do. This blowing time is preferably as long as possible before the start of the work of the day. In addition, if it is performed between drying and the next drying, an appropriate time (this time is preferably longer, but is determined in consideration of the effect of downflow and work efficiency).

Sequence 2 Air Knife Drying After the blowing of high-pressure air by the air knife is once stopped, the substrate 6 to which the pure water 14 has been attached is set on the substrate chuck 7 of the rotary substrate drying apparatus, and then the air knife 1 is blown out by the drive motor. The direction is rotated so as to be at an angle of 45 degrees with respect to the surface of the substrate 6, and the outlet of the air knife 1 is brought close to the vicinity of the substrate surface indicated by the solid line in FIG. 150
1 / min of high-pressure air is blown out of the air knife 1 and, at the same time, the exhaust pipe 2 is started to be exhausted.
Are moved to the left in the figure to dry the surface of the substrate 6 to which the pure water 14 has adhered. The sequence of the low-speed rotation and the high-speed rotation after this is basically the same as the substrate drying sequence by rotation described in the first embodiment. When drying is performed in the above-described sequence using the rotary substrate drying apparatus of the second embodiment having the structure shown in FIG.
Drying can be performed in a highly clean environment.

FIG. 7 is a partial schematic view showing a third embodiment of the drying apparatus of the present invention. As shown in FIG. 7, in the present embodiment, the outlet of the high-pressure air of the air knife 1 always faces directly below, and the exhaust pipes 2 are arranged on both sides of the air knife. When the air knife configured as described above is used, the downflow of high-pressure air and the drying operation by the air knife can be performed without rotating the air knife, so that the apparatus is simplified and the external operation is also simplified. You. In addition, when the operation of blowing high-pressure air to the center of the substrate with an air knife is also used during the drying by the high-speed rotation of the substrate (third drying process), it is more efficient to blow out the high-pressure air vertically because it is preferable. Drying can be performed. Although FIG. 7 shows only one set of the air knife and the exhaust pipe, a plurality of sets may be installed in parallel, as in the second embodiment.

Although the preferred embodiments have been described above, the present invention is not limited to these embodiments, but can be appropriately modified within the scope described in the claims. For example, the high-pressure gas ejected from the air knife may be an inert gas such as nitrogen gas instead of air.

[0025]

According to the present invention, since a large amount of pure water on the substrate surface is removed with an air knife before the spin drying process, the amount of pure water scattered from the substrate during low-speed rotation can be reduced, and the spin cup can be removed. The splash which rebounds on the substrate can be reduced. Further, even after shifting to the high-speed rotation, the amount of mist generation is small because there is almost no pure water on the substrate. Therefore, according to the present invention, it is possible to obtain a uniformly dried substrate with less adhesion of pure water and mist. Further, according to the embodiment in which the high-pressure air is downflowed from the air knife, particles around the substrate setting position can be reduced, and contamination on the substrate surface can be prevented. Therefore, the yield in the subsequent steps can be improved, and high quality can be achieved. Further, when the high-pressure gas is not blown to the center of the substrate at the time of high-speed rotation drying, it is possible to prevent the airflow of a constant flow generated during the rotation process from being disturbed, and it is possible to perform the exhaust efficiently. So
The removal of the mist in the spin cup is more efficient, and the mist re-adhesion to the substrate can be more effectively prevented.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a first embodiment of a rotary substrate drying apparatus according to the present invention.

FIG. 2 is a plan view showing a first embodiment of the rotary substrate drying apparatus of the present invention.

FIG. 3 is a drying sequence showing a first embodiment of the rotary substrate drying method of the present invention.

FIG. 4 is a schematic diagram illustrating an air knife driving mechanism in a second embodiment of the rotary substrate drying apparatus of the present invention.

FIG. 5 is a sectional view showing a second embodiment of the rotary substrate drying apparatus of the present invention.

FIG. 6 is a diagram showing a drying sequence for explaining a rotary substrate drying method according to a second embodiment of the present invention and a flow rate of high-pressure air from an air knife.

FIG. 7 is a partial schematic view of a third embodiment of the rotary substrate drying apparatus according to the present invention.

FIG. 8 is a sectional view of a conventional general rotary substrate drying apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Air knife 2 Exhaust pipe 3 Exhaust hose 4 Slide mechanism 5 Vertical drive mechanism 6 Substrate 7 Substrate chuck 8 Spin motor 9 Spin cup 10 Bounce prevention ring 11 Rectifier plate 12 Drain port 13 Exhaust port 14 Pure water 15 Rotating shaft 16 Enclosure plate 17 Nozzle

Claims (13)

[Claims] 1. A substrate chuck for holding a substrate horizontally,
A spin motor that rotates the substrate chuck around the center of the chuck, an air knife that can blow high-pressure gas onto the substrate, and an air knife that is close to and integrally held with the air knife and blows out from the air knife A rotary substrate drying apparatus, comprising: an exhaust pipe for exhausting high-pressure gas. 2. The apparatus according to claim 1, further comprising: a vertical drive mechanism for vertically moving the air knife and the exhaust pipe; and a horizontal moving mechanism for horizontally moving the air knife and the exhaust pipe integrally. The rotary substrate drying apparatus according to claim 1, wherein 3. The substrate chuck and the spin motor are disposed in a bottomed cylindrical spin cup having a drain port and an exhaust port for preventing liquid from scattering from the substrate when the spin motor rotates. 3. The rotary substrate drying apparatus according to claim 1, wherein 4. The rotary substrate drying apparatus according to claim 1, wherein a plurality of sets of the air knife and the exhaust pipe are arranged in parallel. 5. The rotary substrate drying apparatus according to claim 1, further comprising a drive mechanism for changing a direction in which the air knife blows out the high-pressure gas. 6. The apparatus according to claim 1, wherein at least the substrate chuck, the spin motor, the air knife, and the exhaust pipe are disposed in a closed drying chamber. Rotary substrate drying equipment. 7. A first method in which, while the substrate is stopped, high-pressure gas is blown onto the surface of the substrate from an air knife adjacent to the substrate, and exhaust is performed using an exhaust pipe arranged close to the air knife. A rotating process, comprising: (2) a second drying process of rotating the substrate at a low speed; and (3) a third drying process of rotating the substrate at a high speed. 8. A step of purging an atmosphere in the spin cup by down-flowing a high-pressure gas by an air knife while exhausting the air in a drying chamber which is a closed space; and (2) a step of cleaning the spin cup. (3) in a state in which the substrate is stopped, a high-pressure gas is blown onto the surface of the substrate from the air knife adjacent to the substrate, and an exhaust pipe arranged close to the air knife. (4) a second drying step of rotating the substrate at a low speed, and (5) a third drying step of rotating the substrate at a high speed. Rotating substrate drying method. 9. The rotary substrate drying method according to claim 7, wherein in the first drying step, a high-pressure gas is sprayed on the substrate surface by the air knife to a central portion of the substrate. Method. 10. The method according to claim 1, wherein in the first drying step, the air knife blows a high-pressure gas onto the substrate surface while moving the air knife and the exhaust pipe over the substrate. 9. The method for drying a rotary substrate according to 7 or 8. 11. The rotary substrate drying method according to claim 10, wherein the spraying of the high-pressure gas is repeated a plurality of times on at least a part of the substrate portion. 12. The air knife and the exhaust pipe are waiting at a high place before the first drying process starts, and descend at the start of the first drying process, and The method for drying a rotary substrate according to any one of claims 7 to 11, wherein the temperature rises after the drying step is completed. 13. The rotary substrate according to claim 7, wherein the third drying step is performed while blowing a high-pressure gas onto a central portion of the substrate by the air knife. Drying method.