JP2000345318A - Production of vapor deposition film for capacitor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a vapor deposition film for a capacitor in which the dimensional precision of an oil mask pattern with a divided pattern is improved, deterioration in dielectric breakdown at the ends of the pattern is small, protecting functional operability is stable, and the concentration of the colona electric field is reduced. SOLUTION: In a method for producing a vapor deposition film for a capacitor in which an oil mask with a divided pattern is formed on a film by a roll printing system, as a pringing roll 1, the one in which the projecting plate part on the surface of the roll is composed of a photosensitive resin plate having 30 to 65 deg. Shore D hardness is used. As the photosensitive resin plate, desirably, a photosensitive nylon resin plate is used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a vapor-deposited film for a capacitor having a non-deposited portion, in which an oil mask having a divided pattern is formed in advance on a film before vapor deposition and metal vapor deposition is performed.

[0002]

2. Description of the Related Art Conventionally, as a method of forming a non-deposited portion having a divided pattern on a vapor deposition film for a capacitor, an oil mask is formed by roll printing on a film before vapor deposition in a vacuum vapor deposition device, and a metal vapor deposition is formed on the oil mask. For example, Japanese Patent Publication No. 8-26449 and U.S. Pat.
2,983, and the like.

[0003] An oil mask forming machine generally used in the roll printing method includes a transfer roll, an oil nozzle, a printing roll, and a backup roll, and the oil sprayed from the oil nozzle onto the surface of the transfer roll. Apply, press the transfer roll to the printing roll,
An oil film is formed on the convex divisional pattern on the surface of the printing roll, and the oil film is applied to a film running while being pressed against a backup roll provided opposite to the printing roll. It is formed.

As a printing roll, US Pat.
As described in JP-A-832,983, a roll having a rubber letterpress on the roll surface is generally used because of excellent printability.

[0005] However, the rubber letterpress printing roll is expensive and takes many days to manufacture, and when it travels about 4 million meters , the rubber surface is hardened by the oil for oil mask and the wettability deteriorates, and the printability deteriorates. In addition, the edge of the letterpress division pattern is worn, so that the roll must be reproduced. Also, due to the problem of printing roll processing of the letterpress division pattern, the division pattern is not sharpened, and the dimensional accuracy is only about 100 μm. Therefore, the dimensional accuracy of the vapor deposition film using this roll does not become 100 μm or less. .

Further, the rubber surface is easily deformed by pressing between the backup roll and the printing roll, and the divided pattern of the oil mask formed on the film is deformed. However, there is a problem in that the operation of the security function is not stable in the capacitor using, or the withstand voltage at that time is reduced due to the concentration of the corona electric field generated at the time of the divisional pattern, which causes the metal deposited to recede.

[0007] In addition, as a printing roll, a metal roll is used because of its excellent surface wettability or its roll durability. However,
When the film is nipped between the backup roll and the printing roll, the film has a disadvantage that the hardness of the letterpress portion is high, so that the film at the time of the division pattern is easily damaged, and the withstand voltage of the capacitor is easily lowered.

[0008]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-mentioned problems of the prior art, improve the dimensional accuracy of the masked divided pattern, stabilize the security function operability, and improve the corona electric field. It is an object of the present invention to provide a method for producing a vapor-deposited film for a capacitor in which concentration of the film is reduced.

[0009]

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for producing a vapor deposition film for a capacitor in which an oil mask having a divided pattern is formed on a film by a roll printing method. D
This is achieved by a method for producing a vapor-deposited film for a capacitor, characterized by using a roll made of a photosensitive resin plate having a hardness of 30 ° to 65 °. In particular, it is preferable that the photosensitive resin plate be a photosensitive nylon resin plate.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention is to form an oil mask having a divided pattern on a film by a roll printing method. As a specific method of the roll printing method, for example, evaporation oil jetting from an oil applicator is used. The oil vapor for the oil mask is applied and condensed on the surface of the transfer roll, and the oil for the oil mask is transferred and supplied to the printing roll in contact with the transfer roll while forming an oil mask having a divided pattern on the running film. No.

In the present invention, in the roll printing method as described above, the printing roll to be used must be a roll made of a photosensitive resin plate having a Shore D hardness of 30 ° to 65 ° in particular, in the roll surface relief. In addition, by performing metal vapor deposition on a film on which an oil mask is formed using such a printing roll, a vapor-deposited film for a capacitor, which is the object of the present invention, can be produced.

When the Shore D hardness of the photosensitive resin plate is less than 30 °, the relief portion is deformed by the nip pressure between the printing roll and the backup roll, so that it is difficult to control the nip pressure, and the oil mask formed on the film is difficult to control. The divided pattern is deformed, and the capacitor using the capacitor-deposited film on which the deformed divided pattern is formed has an unstable security function operability. Further, when the Shore D hardness exceeds 65 °, there is a problem that the film itself is damaged by the edge of the letterpress portion and the withstand voltage of the capacitor is reduced.

As the printing roll used in the present invention, a photosensitive resin plate satisfying the above hardness is adhered to the surface of the roll to form a relief portion, and a photosensitive roll having the above hardness having a relief portion formed in advance is used. And a plate made of a conductive resin plate fixed on the entire surface of the roll.

As the material of the photosensitive resin plate, photosensitive nylon resin, polyester resin and the like can be mentioned, but photosensitive nylon resin is preferably used in view of the wettability of the letterpress portion.

The films used in the present invention include polyester films, polypropylene films,
And a polyphenylene sulfide film, but the material is not particularly limited.

Hereinafter, a method for producing a deposited film for a capacitor according to the present invention will be described in detail with reference to the drawings.

FIG. 1 is a sectional view showing an example of a vacuum deposition apparatus preferably used in the method for producing a vapor deposition film for a capacitor according to the present invention. FIG. 2 is an enlarged view of an oil mask forming machine of the vacuum vapor deposition apparatus. FIG.

In FIG. 1, an unwinding roll 5 for a film 8 is provided in a vacuum chamber 11 in a vacuum evaporation apparatus 13, and then a printing roll 1, a transfer roll 2, an oil nozzle 3, An oil mask forming machine including a backup roll 4, a cooling roll 7, and a winding roll 6 are sequentially provided. Further, below the cooling roll 7, there is provided a vapor deposition unit for vaporizing a vapor deposition metal 10 such as aluminum or zinc by a heating boat 9.

In such a vacuum evaporation apparatus 13,
On the film 8 unwound from the unwinding roll 5, oil is printed in a divided pattern by an oil mask forming machine, and then, on the cooling roll 7, the metal vapor melted and evaporated by the heating boat 9 is oil-masked on the film 8. By performing evaporation on portions other than the above portions, an evaporation film for a capacitor is manufactured. The heating method of the evaporation source such as the heating boat 9 shown here is not particularly limited, and a conventionally known method can be used, and for example, a high-frequency heating method using a crucible can be used. The film 8 thus metal-deposited is conveyed by a metal roll for controlling the film thickness at the time of vapor deposition, an expander roll for expanding wrinkles of the film, a guide roll, and the like, and is taken up by the take-up roll 6.

Further, in the oil mask forming machine, the oil sprayed from the oil nozzle 3 is applied to the surface of the transfer roll 2, and the transfer roll 2 is pressed against the printing roll 1,
An oil mask is formed on the surface relief portion of the printing roll, and the oil coating is applied to the film 8 running while being pressed against a backup roll provided opposite to the printing roll, whereby the oil mask 12 is formed. You. In the present invention, it is important that the printing roll 1 of the oil mask forming machine is a roll whose surface letterpress portion is made of resin plate having a Shore D hardness of 30 ° to 65 °.

[0021]

The present invention will be described in more detail with reference to the following examples. In addition, each value of following A to C in this invention is measured by the following method.

A. Shore D hardness Measured according to JIS B7731.

B. Dimension (mm) of divided pattern Measured using a universal projector V-12BSC manufactured by Nikon Corporation.

C. Dielectric breakdown voltage of film (kv) JIS C2330 (Polypropylene film for electricity)
It measured according to 6.3.9.

(Example 1) In the vapor deposition pattern shown in FIG. 3, a lithographic plate made of a photosensitive nylon resin and having a Shore D hardness of 40 ° with a fuse portion 15 having a size of 1.0 mm (Fuji Tref WF95BII manufactured by Fuji Photo Film Co., Ltd.) ) Was prepared, and this lithographic plate was attached to a metal roll to prepare a printing roll. Using this printing roll, a thickness of 5.0 μm
An oil mask was formed on the polypropylene film of No. 1, and the obtained film was subjected to zinc vapor deposition to produce a vapor-deposited film for a capacitor.

With respect to the obtained deposited film for a capacitor, the fuse size 15 which is particularly important for the security function operability was measured for the roll circumference (◆: MAX value ■: Average value ▲: MIN)
Value), the electrode was placed at the center of the oil mask forming portion of the divided pattern, and the dielectric breakdown voltage was measured at 50 points, and the number of points at which dielectric breakdown occurred in the pattern was visually measured. The results are shown in Tables 1 and 2.

Example 2 A printing roll having the same pattern as in Example 1 was applied to a photosensitive nylon resin having a Shore D hardness of 30 °.
A lithographic plate (Fuji Toray Relief WF95BSII manufactured by Fuji Photo Film Co., Ltd.) was used to produce a capacitor deposited film in the same manner as in Example 1, and the same measurement as in Example 1 was performed. The results are shown in Tables 1 and 2.

(Comparative Example 1) The procedure of Example 1 was repeated except that the surface of the printing roll having the same pattern as in Example 1 was made of NBR (nitrile butadiene rubber) having a rubber hardness of 75 °, and was adhered to a metal roll to produce a metal roll. A vapor deposition film for a capacitor was manufactured in the same manner as in Example 1, and the same measurement was performed. The accuracy of the processing of the divided pattern was enhanced by laser engraving as much as possible. The results are shown in Tables 1 and 2.

Comparative Example 2 Example 1 was repeated except that a printing roll having the same pattern as in Example 1 was made of aluminum.
In the same manner as in the above, a vapor-deposited film for a capacitor was manufactured and the same measurement was performed. The results are shown in Tables 1 and 2.

Comparative Example 3 A printing roll having a pattern similar to that of Example 1 was applied to a photosensitive nylon resin having a Shore D hardness of 22 °.
A lithographic plate (Fuji Toray Relief WF95SSII manufactured by Fuji Photo Film Co., Ltd.) was used to produce a capacitor-deposited film in the same manner as in Example 1 and the same measurement was performed. The results are shown in Tables 1 and 2.

(Comparative Example 4) A printing roll having the same pattern as in Example 1 was applied to a photosensitive nylon resin with a Shore D hardness of 70 °.
A lithographic plate (Fuji Toray Relief WF95CHII manufactured by Fuji Photo Film Co., Ltd.) was used to produce a capacitor-deposited film in the same manner as in Example 1 and the same measurement was performed. The results are shown in Tables 1 and 2.

[0032]

[Table 1]

[0033]

[Table 2] From Table 1, it can be seen that in Example 1, the dimensional accuracy was small and the center value (value of ■) was as designed, and the capacitor using this vapor-deposited film showed little variation in the security function operation and very stable security. It can be estimated that it has functional operability. In addition, from Table 2, it is considered that the number of points where the dielectric breakdown occurs in the case of the divided pattern is small, so that the corona starting voltage due to the corona electric field concentrated at this time becomes high.

In the second embodiment, although the number of points where the dielectric breakdown occurs in the case of the divided pattern is small, the pattern is slightly deformed by the nip pressure between the print roll and the backup roll, and the size of the fuse portion is smaller than the design value. It is out of alignment. However,
Since the center value (value of Δ) is close to the design value with little variation from Comparative Example 1, it is considered that the security function operability is stable.

On the other hand, in Comparative Example 1, the nip pressure between the printing roll and the backup roll deforms the surface of the printing roll and shifts the center value of the size of the fuse portion.

In Comparative Example 2, although the dimensional accuracy was excellent,
Since there are many points where the dielectric breakdown occurs at the time of the pattern, it is understood that the capacitor using this vapor-deposited film is inferior in withstand voltage.

Further, in Comparative Example 3, since the dimensional accuracy varies greatly for the same reason as in Comparative Example 1, it can be estimated that the security function operability is not stable.

In Comparative Example 4, since the dimensions of the fuse portion are as designed, the operability of the security function is considered to be stable. However, the MIN value of the dielectric breakdown voltage of the film is as follows.
It is significantly lower than in Examples 1 and 2.

[0039]

As described above, in the method for producing a vapor-deposited film for a capacitor according to the present invention, a photosensitive resin plate having a Shore D hardness of 30 ° to 65 ° is used for the surface relief of the printing roll to be used. Since the dimensional accuracy of the oil mask pattern of the divided pattern to be formed is improved and the insulation breakdown at the time of the pattern is little reduced, a vapor deposition film for capacitors with stable operability of the security function and reduced concentration of the corona electric field is obtained. be able to.

In particular, by using a photosensitive nylon plate as the resin plate, a vapor deposition film for a capacitor having good wettability and excellent printability can be obtained.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing one example of a vacuum evaporation apparatus preferably used in the present invention.

FIG. 2 is an enlarged perspective view of an oil mask forming machine used in the vacuum evaporation apparatus of FIG.

FIG. 3 is a view showing a form of a conventional oil mask division pattern.

[Explanation of symbols]

 1: Printing roll 2: Transfer roll 3: Oil nozzle 4: Backup roll 5: Unwind roll 6: Winding roll 7: Cooling roll 8: Film 9: Heating boat 10: Metal for vapor deposition 11: Vacuum tank 12: Oil mask 13: Oil mask molding machine 14: Vacuum evaporation equipment 15: Fuse section

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01G 13/00 391 (72) Inventor Shinkichi Aihara 33, Nagafushi, Mishima City, Shizuoka Prefecture 1 Toyo Metallizing Co., Ltd. Mishima In-plant F-term (reference) 2H096 AA02 4K029 AA11 AA25 BB03 HA05 JA10 5E082 BC07 BC14 BC38 EE07 EE25 EE47 FG06 FG34 FG35 FG36 PP10

Claims (2)

[Claims] 1. A method for manufacturing a vapor deposition film for a capacitor, wherein a divided pattern oil mask is formed on a film by a roll printing method, wherein the roll surface relief portion is made of a photosensitive resin plate having a Shore D hardness of 30 ° to 65 °. A method for producing a deposited film for a capacitor, comprising using a printing roll. 2. The method according to claim 1, wherein the photosensitive resin plate is a photosensitive nylon resin plate.