JP2001052949A - Manufacture of metalized film for capacitor and apparatus for manufacturing metalized film for capacitor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a method and apparatus for manufacturing a metalized film for capacitors which exhibits superior capacitor element forming properties, pulse current resisting properties, and moisture resisting properties by forming a metalized film which is hard to have damages, flaking, and loss due to chemical reactions, and by increasing adhesion between respective layers. SOLUTION: This method of manufacturing a metalized film for capacitors comprises a first step of forming a masking oil layer on at least a portion of high molecular film 11, a second step of forming a metal-deposited layer on the portion of the film 11 other than the portion where the masking oil layer is formed by deposition a metal on the film 11, and a third step of removing the masking oil layer from the film 11. In the third step, it is prefereble to remove the masking oil layer by subjecting the film 11 to a discharge step, and as the discharge step, glow discharge step is preferable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a metal-deposited film for a capacitor. More specifically, the present invention relates to a so-called oil margin method for removing masking oil remaining on a polymer film by a discharge treatment. The present invention relates to a method and an apparatus for manufacturing a metal-deposited film for a capacitor, which can exhibit excellent element adhesive strength, pulse current resistance, and moisture resistance when used in a capacitor.

[0002]

2. Description of the Related Art As shown in FIGS. 1 to 3, a capacitor generally has a dielectric layer other than a non-deposited portion 13 serving as an insulating portion set at one end of a dielectric layer made of a polymer film 11. A metal layer 2 by depositing a metal on layer 1
And a laminated film 6 made of polyester or the like are sequentially laminated (see FIG. 3), and then the laminated body thus produced is laminated. It is formed by pressing from above and below, and then spraying a metal on both side surfaces to form external electrodes 7.

[0003] On the other hand, as a general method of manufacturing a metal-deposited film 1 used for making a capacitor, aluminum, zinc, or the like is applied under vacuum to a surface of a strip-like polymer film having a thickness of about 1 to 20 µm supplied from an unwinding roller. A winding type vacuum evaporation method in which a metal material such as the above is evaporated and wound around a winding roller is known.

As described above, when preparing the metallized film 1 used for the capacitor, the polymer film 1 is used.
Since it is necessary to set the non-evaporated portion 13 forming an insulating portion at one end of the metal film 1, when the metal-deposited film 1 is formed by the roll-to-roll vacuum evaporation method, a part of the polymer film 11 is masked. It is necessary to deposit metal.

As a means for forming the non-evaporated portion 13 in the conventionally known roll-to-roll vacuum evaporation method, there are a tape margin method in which a strip-shaped masking tape is run in parallel with a polymer film to deposit metal, and An oil margin method is known in which a masking material such as paraffin oil or perfluoroalkyl polyether (hereinafter referred to as "masking oil") is deposited or applied on a polymer film to form a masking oil layer, and then a metal is deposited. I have.

[0006]

In the case where the non-deposited portion 13 is formed by the tape margin method, the masking tape meanders in the width direction, so that the formation accuracy of the non-deposited portion 13 is limited. For example, if the production speed is 350 m / min,
The masking tape meanders in the width direction by about 1.2 mm. Furthermore, the dimension of the non-evaporated portion 13 in the width direction is restricted, and the limit is about 2.5 mm.

On the other hand, in the case of the oil margin method, the non-deposition portion 13 can be formed with high accuracy. For example, even when the production speed is 600 m / min, the masking oil meanders only about 0.6 mm in the width direction. Further, the portion to be deposited can be formed in a flexible shape, and its dimensional accuracy can be as small as 0.1 mm. As described above, the oil margin method is superior to the tape margin method in terms of productivity, non-deposition portion formation accuracy, manufacturing cost, and the like, and thus has become the mainstream in the vapor deposition process of a capacitor vapor deposition film.

However, the masking oil applied to the polymer film 11 to set the non-deposited portion 13 is
Part of the metal evaporates due to the heat generated when the metal is deposited. However, as shown in FIG.
3 and on the deposited metal layer 2. In this way, the residual masking oil in the capacitor-evaporated film produced by the oil margin method is, for example, when paraffin oil is used as the masking oil,
It has a thickness of about 30 nm to 80 nm on the non-deposited portion 13 and about 2 nm to 10 nm on the deposited metal surface 2.

FIG. 3 shows the residual masking oil 4
No adhesive strength between the films can be obtained at the contact surface 9 between the laminated film 6 and the vapor-deposited metal layer 2 shown in the sectional view of the capacitor element shown in FIG. For this reason, the element adhesive strength of a capacitor manufactured from a metal-deposited film obtained by using the masking oil method is inferior to that of the tape margin method.

Further, after the external electrode 7 is formed by thermal spraying from both side surfaces, the masking oil 4 remaining on the contact surface 8 between the external electrode 7 and the deposited metal layer 2 allows the external electrode 7 to be formed.
And the deposited metal layer 2 are not sufficiently contacted. For this reason, the pulse current resistance of the capacitor deteriorates, and furthermore, it is impossible to obtain a desired electric capacity.

By the way, in the roll-to-roll vacuum evaporation method,
After forming the vapor-deposited metal layer 2, the protective film 2a is not easily formed on the interface between the vapor-deposited metal layer 2 and the polymer film 11.
Therefore, the hardness of the vapor-deposited metal layer 2 is low, and the surface of the vapor-deposited metal layer 2 is easily scratched due to scratches, dirt, etc. of rolls such as an expander roll and an intermediate roll. Further, when the metallized film 1 is released in the atmosphere after the formation of the vacuum deposited layer 2, a protective film 2a is formed on the surface of the deposited metal layer 2, but the thickness is as thin as about 1 nm to 4 nm.
Further, no protective film is formed on the interface between the polymer film 11 and the vapor-deposited metal layer 2. For this reason, when the metallized film 1 for a capacitor is used in a high humidity atmosphere,
The deposited metal layer 2 tends to disappear due to the chemical reaction, which leads to a decrease in electric capacity.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to form a vapor-deposited metal film which is less likely to be scratched, peeled off, and disappeared by a chemical reaction.
It is an object of the present invention to provide a method and an apparatus for manufacturing a metal-deposited film for a capacitor which is excellent in forming property of a capacitor element, pulse current resistance, and humidity resistance by enhancing the adhesive force between layers.

[0013]

Means for Solving the Problems A method for producing a metal-deposited film for a capacitor according to the present invention, which solves the above-mentioned problems, comprises:
A first step of forming a masking oil layer on at least a portion of the polymer film 11; depositing a metal on the polymer film 11 to deposit a metal on the polymer film 11 other than the portion where the masking oil layer is formed; A second step of forming the layer 2 and a third step of removing the masking oil layer from the polymer film 11 are included.

The third step is preferably a step of removing the masking oil layer by subjecting the polymer film 11 to a discharge treatment. The discharge treatment is preferably glow discharge. It is also preferable to form the protective film 2a on the surface of the vapor-deposited metal layer 2 by the discharge treatment in the third step. Furthermore, before the second step, the polymer film 11
It is preferable to perform a discharge treatment in advance, and to form a protective film 2a between the polymer film 11 and the vapor-deposited metal layer 2 after the second step. This discharge treatment is also preferably a glow discharge. In one embodiment, the polymer film 11 is supplied from the unwind roller 31 and is wound around the wind roller 37,
The discharge treatment is to blow the discharge gas subjected to the discharge treatment to the polymer film 11 passing between the cooler 38 and the discharge device 36, and the blown discharge gas is directed to the traveling direction of the polymer film 11. Out of the discharge device 36 in parallel.

Further, the apparatus for manufacturing a metal-deposited film for a capacitor according to the present invention, which solves the above problems, comprises a masking oil layer forming means 35 for forming a masking oil layer on at least a part of the polymer film 11, A vapor deposition unit 34 for vapor-depositing a metal on the film 11 to form the vapor-deposited metal layer 2 on the polymer film 11 other than the portion where the masking oil layer is formed, and a masking device for removing the masking oil layer from the polymer film 11 Oil layer removing means 36.

The masking oil layer removing means 36 is preferably a discharge device for performing a discharge treatment on the polymer film 11. This discharge device is preferably a glow discharge device. In one embodiment, the polymer film 11 is supplied from the unwinding roller 31 and wound on the winding roller 37, and the polymer film 11 provided to the vapor deposition unit 34 is subjected to a discharge treatment in advance. 33 may be provided. This second discharge device 33 is also preferably a glow discharge device. Further, the polymer film 11 to be subjected to the discharge treatment is sandwiched between the discharge device 36 and the cooler 38, and the discharge gas blown from the discharge device 36 is discharged in parallel with the traveling direction of the polymer film 11. May be spilled from.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 4A shows an apparatus 30 for manufacturing a metal-deposited film for a capacitor according to the present invention. This manufacturing device 3
0 is a winding type vacuum deposition apparatus, and the degree of vacuum in the device 30, 1 × 10 ^-3 torr or higher by the deposition unit 34, at required to be 1 × 10 ^-2 torr or more other portions is there. The speed of the polymer film 11 supplied from the unwind roller 31 (hereinafter, abbreviated as “winding speed”)
Is about 100 m / min or more and about 1000 m / min or less,
Preferably it is from about 200 m / min to about 800 m / min, more preferably from about 250 m / min to about 400 m / min.

The polymer film 11 supplied from the unwinding roller 31 reaches a vapor deposition section 34 via a discharge device 33. The discharge device 33 is supplied with an active gas, and discharges the active gas to ionize the active gas and attach the active gas ions to the polymer film 11. In this way, when the polymer film 11 is subjected to a discharge treatment before the metal is deposited, the deposited metal layer 2 deposited on the polymer film 11 is formed. 11, a protective film 2a is formed. With this protective film 2a, the adhesive strength between the vapor-deposited metal layer 2 and the polymer film 11 can be improved, and the hardness of the vapor-deposited metal layer 2 increases, so that the surface is less likely to be scratched.

Oxygen or the like is used as the active gas, and the discharge treatment may be performed by discharging only the active gas.
In order to stabilize the discharge, it is preferable to use an inert gas such as argon, neon, or nitrogen together with the active gas.

Masking oil is injected from an oil nozzle 35 onto the surface of the polymer film 11 which has been subjected to the discharge treatment by the discharge device 33 to form a masking oil layer. The amount of the masking oil to be injected depends on the type of the masking oil layer, the type of the polymer film 11, and the like.
The thickness is about nm. The masking oil layer may be formed by depositing a masking oil on the polymer film 11. As the polymer film 11 used in the present invention, a polyolefin film such as a polyethylene film, a polyester film such as polyethylene terephthalate, and the like are used.
For example, when a polyester film such as polyethylene terephthalate is used, it is preferable to use paraffin oil as the masking oil. Similarly, when a polyolefin film such as a polyethylene film is used, it is preferable to use paraffin oil or perchloroalkyl ether as the masking oil.

Next, a metal is deposited on the polymer film 11 having a masking oil layer formed on the surface thereof in a deposition section 34. Since the temperature of this metal deposition is about 900 ° C. to about 1300 ° C., a part of the masking oil layer on the polymer film 11 volatilizes, but the masking oil layer is still formed on the polymer film 11 even after the metal is deposited. Part of the oil layer (hereinafter, simply referred to as “residual masking oil layer”) remains. As described above, if the polymer film 11 is subjected to a discharge treatment before the metal vapor deposition, the vapor deposition section 34 forms the metal vapor-deposited layer 2 on the polymer film 11 with a high vapor deposition metal layer 2. The protective film 2a is formed between the protective film 2a and the molecular film 11. This protective film 2a
Depends on the type of metal to be deposited and the type of active gas used for discharge. For example, when a discharge treatment using oxygen is performed and aluminum is deposited, the protective film 2a is formed from an aluminum oxide film. become.

Next, the polymer film 11 on which the metal is deposited is subjected to a discharge treatment by a discharge device 36. By performing this discharge treatment, the residual masking oil layer is removed. This mechanism is considered to be due to the chemical decomposition of the masking oil component due to the discharge of the active gas, the sputtering effect due to the kinetic energy of the discharge gas, and the re-evaporation of the masking oil due to heat generation. In addition, by this discharge treatment, the protective film 2a can be surely formed on the surface of the deposited metal layer 2.

The above-mentioned active gas and, if necessary, an inert gas (hereinafter simply referred to as "gas") are supplied into the discharge device 36. Perform discharge treatment on this gas,
The active gas is ionized to form a discharge gas. Here, it is preferable to use both an active gas and an inert gas in order to improve the efficiency of removing the masking oil by the sputtering effect.

As described above, since the inside of the manufacturing apparatus 30 is substantially vacuum, suitable discharges include glow discharge and plasma discharge. Among these, glow discharge is preferred in the present invention. This is because, when a plasma discharge is used, not only the noise due to the plasma is large, but also the generated plasma flies to members other than the polymer film 11 (for example, an evaporation source) as compared with the glow discharge. This is because, in many cases, the glow discharge can more effectively suppress the influence on other members as compared with the plasma discharge and can perform a stable discharge.

The current applied to the gas in the discharge device 36 may be either AC or DC, and the voltage and frequency are not particularly limited.
The quality of the metal-deposited film obtained can be stabilized by using glow discharge with an AC power supply of 00 kHz or less, more preferably about 100 kHz or more and about 400 kHz or less. The power output is also preferably from about 0.5 KW to about 5 KW, more preferably from about 1 KW to about 3 KW, from the viewpoint that the quality of the obtained metallized film can be stabilized.

The preferable amount of gas supplied to the discharge device 36 is about 200 sccm or more and about 3000 sccm.
Or less, about 500 sccm or more and about 2000 sccm
The following is more preferred. When an active gas and an inert gas are used in combination, the ratio of the active gas to the inert gas is preferably about 0.5 liter or less per liter of the active gas. 0.25
More preferably, one liter of inert gas is used.

The discharging process by the discharging device 36 is preferably performed as follows. As shown in FIG. 4B, the polymer film 11 is slid on the roller while being cooled by the roller-type cooler 38, and is advanced toward the winding roller 37. A cover 39 is provided, and the polymer film 11 that advances is sandwiched between the roller-type cooler 38 and the gas cover 39. More preferably, the flange-like structure of the gas cover 39 is adjusted so that the radius of the roller of the roller-type cooler 38 (generally about 2
From about 1 mm to about 5 m
The gas cover 3 has a curved structure having a radius about
The shape of the collar 9 is extended in parallel with the traveling direction of the polymer film 11. The gap between the flange-shaped gas cover 39 and the roller-type cooler 38 is preferably as small as possible within a range where the flange-shaped gas cover 39 does not contact the polymer film 11, and the gap is about 1 mm or more. About 5mm
The following is preferred.

As a result, the discharge gas blown from the discharge device 36 to the polymer film 11 is
As shown in (b), it flows out in a direction parallel to the traveling direction of the polymer film 11. For this reason, the contact time between the ionized active gas (that is, the discharge gas) and the polymer film 11 can be prolonged, the residual masking oil layer can be reliably removed, and the protective film 2a can be formed on the surface of the deposited metal. It can be formed reliably.

Of course, the discharge device 33 before the metal deposition is also
Needless to say, it is preferable to have a structure similar to the above. As described above, a roller-type cooler is used as the cooler 38, and the gas cover 39 does not necessarily have to be a flange having a curved surface structure.
8 and the gas cover 39 may be linear, and the polymer film 11 may run between them.

In general, in the present invention, the thickness of the residual masking oil layer is substantially constant in the longitudinal direction, and the amount of the residual masking oil layer is not more than the thickness of the deposited metal layer 2.

(Embodiment) In this embodiment, the winding speed is set to 400 m / min, and the winding roller 37 is used to set the winding speed to 400 m / min using a winding type metal vacuum deposition film manufacturing apparatus as shown in FIG. The polymer film 11 made of polyethylene terephthalate (hereinafter abbreviated as “PET”) was advanced.

First, the glow discharge device 33 performed glow discharge treatment on the PET film 11 having a width of 520 mm supplied from the unwind roller 31. Oxygen at a flow rate of 700 sccm and argon at a flow rate of 200 sccm are supplied to the glow discharge device 33, and an AC voltage of about 200 kHz is applied to the mixed gas to ionize the oxygen and blow the PET film 11 from the glow discharge device 33. Was. The unit of the flow rate of oxygen and argon is “s”
"ccm" is a flow rate used in a minute mass flow meter and refers to a volume of gas supplied per minute.

Next, paraffin oil is injected from the oil nozzle 35 into the PET film 11 to which the ionized oxygen has been blown, so that the PET film 1
On top of this, a masking oil layer was formed. The injection amount is set to be about 0.02 mg per 1 m 2 of the PET film 11, and the width of the PET film 11 is 520 m.
One paraffin oil layer per m was laminated. The width of the paraffin oil layer per one is about 0.3m
m. The temperature of the paraffin oil injected from the oil nozzle 35 was about 150 ° C.

The PET film 11 having the masking oil layer formed of paraffin oil is then sent to a vapor deposition section 34 having three high-frequency crucibles, which are heating devices for evaporating aluminum, arranged in parallel in the width direction of the film. Aluminum at about 1200 ° C. was deposited on the surface. The thickness of this aluminum layer 2 was about 30 nm. By depositing aluminum in this manner, an oxide film 2a made of aluminum oxide is formed between the PET film 11 and the aluminum layer 2, and the heat of the deposited aluminum layer 2 causes the masking oil layer Part of paraffin oil volatilizes and becomes PET
The film 11 was removed from above.

The PET film exiting the vapor deposition section 34 was then subjected to a glow discharge treatment by a glow discharge device 36. The glow discharge device 36 has oxygen at a flow rate of 700 sccm and a flow rate of 200 sccm similarly to the glow discharge device 33.
Of argon, and about 200 kHz
An AC voltage of z was applied to ionize oxygen and sprayed the PET film 11 from the glow discharge device 33.

The glow discharge device 36 has the configuration shown in FIG.
As shown in (b), a flange-shaped gas cover 39 is provided, and the PET film 11 is cooled to about 5 ° C. by a roller-type cooler 38 that sandwiches the PET film 11 between the gas cover 39 and the gas film 39. Slided on rollers. The radius of the curved surface structure of the flange-shaped gas cover 39 is equal to the radius of the roller of the roller-type cooler 38 (about 80).
mm), which is about 82 mm, which is 2 mm larger than the above. The overall length of the collar was about 60 mm.

It was confirmed by an oil content measuring device that the thickness of the masking oil layer made of the residual paraffin oil of about 37 nm was reduced to about 2 nm by the glow discharge treatment. In addition, about 2n of this masking oil layer
The thickness of m is a detection limit value of the oil content measuring device, and it is considered that the actual thickness of the masking oil layer is smaller than about 2 nm.

A rolled film capacitor is manufactured using the metal-deposited film 1 obtained as described above, and the capacitor element adhesive strength, the capacitor pulse current resistance,
Then, the capacitor was evaluated for moisture resistance.

(Adhesive Strength of Capacitor Element) With regard to the adhesive strength of the capacitor element, a push-pull gauge is used to pressurize the capacitor element, and the pressure value (Kg · f) indicated by the push-pull gauge when each layer of the capacitor element is separated. ) Was measured.

FIG. 6 shows the measurement results of the element adhesive strength of the film capacitor thus measured. In the graph shown in FIG. 6, the vertical axis represents the capacitor element molding strength (Kg · f), and a capacitor prepared by using the metal-deposited film 1 subjected to the discharge treatment according to the present invention, and a capacitor similar to the present invention. A comparison is made with a metal-deposited film prepared by a conventional oil margin method without discharge treatment.

As can be understood from FIG. 6, in the conventional capacitor, since the masking oil remains on the PET film 11 and the metal deposition layer 2 made of aluminum, the adhesive strength of the capacitor element is about 0.5 kg · f. From about 1.0 Kg · f. On the other hand, the metallized film 1 subjected to the discharge treatment according to the present invention according to the present invention 1
Since the masking oil does not remain in the capacitor prepared using the method described above, the bonding strength of the capacitor element is about 1.0 kg / f or more. This strength value is equivalent to that of a metal vapor deposition method using a tape margin method without using a masking oil. As described above, the capacitor manufactured from the conventional metal-deposited film (hereinafter simply referred to as “conventional product”) and the capacitor manufactured from the metal-deposited film 1 subjected to the discharge treatment according to the present invention (hereinafter referred to as “the present product”). The capacitor element molding strength is improved by an average value of 0.5 Kg · f.

(Regarding Capacitor Pulse Current Resistance)
The capacitor withstand pulse current characteristic is obtained by connecting a capacitor to a test circuit as shown in FIG. 7, connecting the switch S to the R1 side to charge the capacitor.
The capacitor was discharged by connecting to the two sides. This charge / discharge is 1
Change rate of capacitance after repeating 000 times (ΔC / C,
%) And dielectric loss tangent (tan δ) were measured.

FIG. 5 shows the pulse current resistance characteristics of the film capacitor measured as described above. In each graph shown in FIG. 5, the horizontal axis represents the pulse current value, the conventional product is represented by black circles, and the capacitor according to the present invention is represented by white circles for comparison. First, as for the rate of change of the capacitance of the capacitor, as shown in FIG. 5A in which the vertical axis represents the rate of change (%) of the capacitance, the rate of change of the conventional product is larger than the current value of around 26 amperes. In ampere, the capacity C is reduced by 15% or more. On the other hand, the change in the capacitance of the capacitor according to the present invention is constant regardless of the current value.

As for the tan δ value (dielectric loss tangent) of the capacitor, the vertical axis shows the tan δ change rate.
As shown in (b) to (d), 1 kHz, 10 kHz
In both the Hz and 100 kHz, when the current value of the conventional product exceeds 26 amps, the rate of change of tan δ becomes very large. On the other hand, in the capacitor according to the present invention, regardless of the frequency and the current value, t
The rate of change of anδ is very small.

The above-mentioned phenomena in the conventional product are represented by P
Due to the masking oil remaining on the ET film 11 and the metal deposition layer 2 made of aluminum, the contact strength between the PET film 11 and the combined film 6 and the external electrode 7 is not sufficient.
Combined film 6 and external electrode 7 with ET film 11
Is in a non-contact state.

However, in the capacitor according to the present invention, since no masking oil remains in the PET film 11 and the metal vapor-deposited film 13 made of aluminum, there is not enough space between the PET film 11 and the combination film 6 and the external electrode 7. The contact strength is obtained, and even at a current value of 65 amperes, both the capacity and the tan δ value show small changes and good characteristics.

(Regarding Capacitor Moisture Resistance Property) The capacitor moisture resistance property is based on 9.5 of JIS C 5102.
It was left still for 000 hours. Thereafter, the capacitance and tan δ of the capacitor were measured, and there was almost no difference before and after standing. Also, the appearance of the capacitor did not change after standing.

[0048]

According to the present invention, the adhesive strength between the films is reduced, the capacitor element is deformed in the element forming press step, and the contact between the external electrode 7 and the deposited metal layer 2 is hindered. A capacitor made from a metal-deposited film from which residual masking oil that causes deterioration has been removed has excellent performance in element adhesion strength, pulse current resistance characteristics, and moisture resistance characteristics.

Further, the production speed of the method and apparatus for producing a metallized film according to the present invention is almost the same as that of the conventional oil margin method, and the present invention does not impair the conventional production rate. Can be produced.

Further, a protective film can be formed on the surface of the vapor-deposited metal layer 2 by removing the residual masking oil by a discharge treatment, whereby the vapor-deposited metal layer 2 can be prevented from being scratched or peeled off. Disappearance due to a chemical reaction in the metal layer 2 hardly occurs.

[Brief description of the drawings]

FIG. 1 is a sectional view of a metal-deposited film subjected to a discharge treatment.

FIG. 2 is a schematic plan view and a sectional view of a metal-deposited film formed by an oil margin method.

FIG. 3 is a schematic exploded simplified cross-sectional view of a film capacitor after an electrode spraying step.

FIG. 4A is a schematic diagram of a manufacturing apparatus according to the present invention, and FIG. 4B is a schematic diagram of a discharge device.

FIG. 5 is a graph showing a result of evaluating a capacitor withstanding pulse current.

FIG. 6 is a graph showing the results of measuring the strength of a capacitor element.

FIG. 7 is a diagram showing a test circuit of a capacitor withstand current characteristic.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Metal deposition film 2 ... Metal deposition metal layer 2a ... Protective film 6 ... Laminated film 7 ... External electrode 8 ... Contact surface between external electrode 7 and vapor deposition metal layer 2 9 ... Between laminated film 6 and vapor deposition metal layer 2 Contact surface between 11 ... Polymer film (PET film) 13 ... Non-evaporated part 30 ... Metal deposition film production equipment for capacitor 31 ... Unwind roller 33 ... Discharge device (second discharge device) 34 ... Evaporation unit 35 ... Masking Oil layer forming means (oil nozzle) 36 ... discharge device (masking oil layer removing means) 37 ... winding roller 38 ... cooler (roller type cooler) 39 ... gas cover

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akihito Shinohara 1006 Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. 72) Inventor Jun Moriyama 1006 Kadoma, Kadoma, Osaka Prefecture F-term in Matsushita Electric Industrial Co., Ltd. GG10 GG27 JJ04 JJ22 MM09 MM11 MM24

Claims (13)

[Claims] 1. A first step of forming a masking oil layer on at least a part of a polymer film (11), except that a metal is vapor-deposited on the polymer film (11) to form a portion other than the portion where the masking oil layer is formed. A second step of forming a vapor-deposited metal layer (2) on the polymer film (11), and a third step of removing the masking oil layer from the polymer film (11). Manufacturing method of vapor deposition film. 2. The method according to claim 1, wherein the third step is a step of subjecting the polymer film to a discharge treatment to remove the masking oil layer. 3. The method for producing a metal-deposited film for a capacitor according to claim 2, wherein the discharge treatment is glow discharge. 4. The method for producing a metal-deposited film for a capacitor according to claim 2, wherein a protective film is formed on the surface of the vapor-deposited metal layer (2) by the discharge treatment in the third step. 5. The polymer film (11) is also subjected to a discharge treatment before the second step, and the polymer film (11) and the vapor-deposited metal layer (2) are formed after the second step.
The method for producing a metal-deposited film for a capacitor according to claim 4, wherein a protective film is also formed between the film and the protective film. 6. The glow discharge is performed before the second step, wherein the discharge treatment performed on the polymer film (11) is glow discharge.
A method for producing a metal-deposited film for a capacitor according to claim 5. 7. The polymer film (11) is supplied from an unwind roller (31) and is fed from a take-up roller (3).
7) wherein the discharge treatment discharges the discharge-treated discharge gas to the polymer film (11) passing between the cooler (38) and the discharge device (36). Wherein the blown discharge gas is a polymer film (11).
The method for producing a metal-deposited film for a capacitor according to any one of claims 2 to 6, wherein the metal-evaporated film flows out of the discharge device (36) in parallel with the traveling direction of the metal. 8. A masking oil layer forming means (35) for forming a masking oil layer on at least a part of the polymer film (11), and a metal deposited on the polymer film (11) to form a masking oil layer. A vapor deposition section (34) for forming a vapor deposited metal layer (2) on the polymer film (11) other than the portion where the is formed, and the masking oil layer as the polymer film (11).
An apparatus for producing a metallized film for a capacitor, comprising: a masking oil layer removing means (36) for removing from above. 9. The masking oil layer removing means (3)
The apparatus for manufacturing a metal-deposited film for a capacitor according to claim 8, wherein 6) is a discharge device for performing a discharge treatment on the polymer film (11). 10. The apparatus according to claim 9, wherein the discharge device is a glow discharge device. 11. A take-up roller (3) in which a polymer film (11) is supplied from an unwind roller (31).
11. The apparatus according to claim 8, further comprising a second discharge device (33) that performs a discharge treatment on the polymer film (11) wound up by (7) and provided to the vapor deposition section (34). An apparatus for producing a metal-deposited film for a capacitor according to the above. 12. The apparatus according to claim 11, wherein the second discharge device (33) is a glow discharge device. 13. The polymer film (11) to be subjected to a discharge treatment is sandwiched between a discharge device (36) and a cooler (38), and a discharge gas blown from the discharge device (36) is a polymer. The apparatus for producing a metallized film for a capacitor according to any one of claims 8 to 12, wherein the liquid flows out of the discharge device in parallel to a traveling direction of the film (11).