JP2000343392A - Chamfering device for board - Google Patents

Chamfering device for board

Info

Publication number
JP2000343392A
JP2000343392A JP11150673A JP15067399A JP2000343392A JP 2000343392 A JP2000343392 A JP 2000343392A JP 11150673 A JP11150673 A JP 11150673A JP 15067399 A JP15067399 A JP 15067399A JP 2000343392 A JP2000343392 A JP 2000343392A
Authority
JP
Japan
Prior art keywords
substrate
substrate holding
chamfering
grinding wheel
polishing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11150673A
Other languages
Japanese (ja)
Inventor
Hitoshi Endo
仁志 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP11150673A priority Critical patent/JP2000343392A/en
Publication of JP2000343392A publication Critical patent/JP2000343392A/en
Pending legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PROBLEM TO BE SOLVED: To save space and reduce a tact time by setting the dimension of a grinding wheel, such that there is no need for sliding the grinding wheel or a substrate in chamfering, and connecting or moving the grinding wheel directly to or close to a rotation driving mechanism. SOLUTION: A chamfering device includes a disc grinding wheel 1 capable of chamfering the ridge line of a substrate 12 to be chamfered at a time, a substrate holder 4 for moving the ridge line 12a of the substrate 12 close to or away from the grinding wheel and a motor 2 connected or moved directly to or close to the grinding wheel 1. The grinding wheel 1 is installed in horizontal, the substrate holding part 4 is pivotally mounted on a support 6 installed near the grinding wheel in a rocking manner and has a substrate holding stage 7 capable of pushing the ridge line of the substrate 1 against the upper face of the grinding wheel, and a stopper 10 is provided for stopping the rocking of the substrate holding plane of the stage 7 in contact therewith.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は液晶表示装置、EL
表示装置、プラズマ表示装置等のガラス基板の面取りを
行う面取り装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display,
The present invention relates to a chamfering device for chamfering a glass substrate such as a display device and a plasma display device.

【0002】[0002]

【従来の技術】液晶表示装置、EL表示装置、プラズマ
表示装置等の一連の製造工程において、電極パターンが
形成されたガラス基板を切断により所定の寸法に分断す
る工程が設けられているが、分断後のガラス基板の稜線
部は鋭いエッジを形成して危険である等の理由により、
例えば特開平4−278917号公報に示されているよ
うに稜線部の面取りが行われている。
2. Description of the Related Art In a series of manufacturing processes of a liquid crystal display device, an EL display device, a plasma display device, and the like, a process of cutting a glass substrate on which an electrode pattern is formed into predetermined dimensions by cutting is provided. The ridgeline part of the later glass substrate forms a sharp edge and is dangerous,
For example, as shown in Japanese Patent Application Laid-Open No. 4-278917, a ridge is chamfered.

【0003】面取りは自動機または手動機で行われてい
るが、いずれの場合も保管カセットからガラス基板を一
枚づつ取り出して、これを研磨部へ投入して面取し、面
取り後のガラス基板は再び保管カセットへ挿入するとい
う動作を繰り返すことで複数のガラス基板の面取りを実
施している。研磨部を構成する面取り装置には、ディス
ク型砥石の面取り装置と、回転ベルト型の面取り装置と
がある。
[0003] The chamfering is performed by an automatic machine or a manual machine. In each case, the glass substrates are taken out one by one from a storage cassette, and are put into a polishing section to be chamfered. Has repeatedly chamfered a plurality of glass substrates by repeating the operation of inserting the glass substrates into the storage cassette. As the chamfering device constituting the polishing section, there are a chamfering device for a disk-type grindstone and a chamfering device for a rotating belt type.

【0004】[0004]

【発明が解決しようとする課題】しかながら、ディスク
型砥石の面取り装置は砥石が基板より小さいため、砥石
または基板のどちらかを面取り方向へスライドさせなけ
ればならず、このため少なくとも1軸のスライドユニッ
トが必要となり装置が大型化せざるを得なかった。
However, in the disk-type grinding wheel chamfering device, since the grinding wheel is smaller than the substrate, either the grinding wheel or the substrate must be slid in the direction of chamfering. A unit was required, and the device had to be enlarged.

【0005】一方、回転ベルト型の面取り装置は、エン
ドレスベルトに基板の一辺を一度に接触させて面取りを
行うものの、エンドレスベルトが面取り角度分だけ傾斜
して基板保持ステージ上に覆いかぶさっているため、基
板が供給される位置からベルトへ接触される位置までの
スライドストロークを長くせざるを得ず、また、エンド
レスベルトはモータに連結部材を介して連結され、直接
に連結されていないため上記同様に装置が大型化せざる
を得なかった。
On the other hand, the rotating belt type chamfering apparatus performs chamfering by bringing one side of the substrate into contact with the endless belt at one time. However, since the endless belt is inclined by the chamfering angle and covers the substrate holding stage. Therefore, the slide stroke from the position where the substrate is supplied to the position where the substrate is brought into contact with the belt has to be lengthened, and the endless belt is connected to the motor via a connecting member, and is not directly connected, so the same as above. The device had to be enlarged.

【0006】本発明は、前記の問題点を解消するためな
されたものであって、面取り時に、砥石または基板をス
ライドさせる必要がない程度に砥石の寸法を設定すると
共に、砥石にモータ等の回転駆動機構を直結又は近接し
て設けることにより、省スペース化とタクトタイムの短
縮化を図ることを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is intended to set the dimensions of the grinding stone so that it is not necessary to slide the grinding stone or the substrate at the time of chamfering. It is an object of the present invention to save space and shorten tact time by directly connecting or providing a drive mechanism.

【0007】[0007]

【課題を解決するための手段】本発明は、上記の目的を
達成するため、次の構成を有する。請求項1の発明は、
面取りをすべき基板の稜線部を一度に面取りすることが
できる円盤状の研磨部材と、該研磨部材に対して基板の
稜線部を接近・離間させる基板保持部と、前記研磨部材
へ直結または近接した回転駆動機構とを有することを特
徴とする基板の面取り装置である。
The present invention has the following configuration to achieve the above object. The invention of claim 1 is
A disk-shaped polishing member capable of chamfering a ridge portion of a substrate to be chamfered at a time, a substrate holding portion for moving the ridge portion of the substrate closer to or away from the polishing member, and directly connected to or adjacent to the polishing member And a rotary drive mechanism.

【0008】請求項2の発明は、前記基板保持部は、研
磨部材近傍に設置された支持部へ揺動自在に設けられ、
かつ基板の稜線部を研磨部材へ押当可能な基板保持ステ
ージを有し、さらに該基板保持ステージの基板保持面に
当接して揺動を停止させるストッパを設けたことを特徴
とする請求項1記載の基板の面取り装置である。
According to a second aspect of the present invention, the substrate holding portion is swingably provided on a support portion provided near the polishing member.
And a stopper for stopping the swing by contacting the substrate holding surface of the substrate holding stage with the substrate holding stage capable of pressing the ridge portion of the substrate against the polishing member. It is a substrate chamfering apparatus as described in the above.

【0009】請求項3の発明は、前記基板保持部は、研
磨部材近傍に設置された支持部へ摺動自在に設けられ、
かつ基板を研磨部材に対して傾斜させてその稜線部を研
磨部材へ押当可能な基板保持ステージを有し、さらに該
基板保持ステージを往復動させる駆動部を設けたことを
特徴とする請求項1記載の基板の面取り装置である。
According to a third aspect of the present invention, the substrate holding portion is slidably provided on a support portion provided near the polishing member.
And a substrate holding stage capable of inclining the substrate with respect to the polishing member and pressing a ridge portion thereof against the polishing member, and further comprising a drive unit for reciprocating the substrate holding stage. 1 is a substrate chamfering apparatus.

【0010】[0010]

【発明の実施の形態】以下、本発明に係る基板の面取り
装置の実施の形態について図面を参照しながら説明す
る。図1および図2は第1の実施形態を示すもので、砥
石1はドーナツ状の円盤からなり、軸線が上下方向を向
くように水平に設置させ、かつ、回転駆動用のモータ2
の駆動軸3を砥石1の中心孔へ直接に連結させている。
尚、モータ2を駆動ギア等を介して砥石1に近接状態に
て接続してもよい。砥石2の上面を形成する円盤状又は
ドーナツ状の研磨部1aの半径は、後述のガラス基板1
2の長辺よりも大きく設定している。なお、図2では砥
石1の半径はガラス基板12の長辺よりも小さくなって
いるが、これは短辺だけを面取りする場合を示すためで
ある。砥石1としては、ダイヤモンド砥石や布・紙等に
砥粒を接着剤等で固着させた研磨材を使用する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a substrate chamfering apparatus according to the present invention will be described with reference to the drawings. FIGS. 1 and 2 show a first embodiment, in which a grinding wheel 1 is formed of a donut-shaped disk, is set horizontally so that its axis is directed vertically, and a motor 2 for rotational driving is provided.
Is directly connected to the center hole of the grinding wheel 1.
Note that the motor 2 may be connected to the grinding wheel 1 via a driving gear or the like in a close state. The radius of the disk-shaped or donut-shaped polishing portion 1a forming the upper surface of the whetstone 2 is equal to the radius of the glass substrate 1 described later.
2 is set larger than the long side. In FIG. 2, the radius of the grindstone 1 is smaller than the long side of the glass substrate 12, but this is for the case where only the short side is chamfered. As the grindstone 1, a polishing material in which abrasive grains are fixed to a diamond grindstone, cloth, paper, or the like with an adhesive or the like is used.

【0011】符号4は、砥石1でガラス基板を研磨する
為にガラス基板を保持する揺動式の基板保持部4を示し
ている。揺動式の基板保持部4は、砥石1の側部上方に
設けた台板5と、該台板5から起立状に固着した支持台
6と、該支持台6の上部近傍に貫通係合する円柱状のシ
ャフト8と、該シャフト8に対して回動自在に軸着する
とともに他端を後述する基板保持ステージ7の一端に固
着されている支持部8Bと、該支持部8Bに固定される
側を基端として先端に位置決め板9を固着する平板状の
基板保持ステージ7とから概ね構成されている。
Reference numeral 4 denotes an oscillating substrate holder 4 for holding the glass substrate for polishing the glass substrate with the grindstone 1. The oscillating substrate holding unit 4 includes a base plate 5 provided above the side of the grindstone 1, a support base 6 fixed to the base plate 5 in an upright state, and penetrating engagement near the upper part of the support base 6. A supporting shaft 8B rotatably mounted on the shaft 8 and having the other end fixed to one end of a substrate holding stage 7, which will be described later, and fixed to the supporting portion 8B. And a plate-like substrate holding stage 7 to which a positioning plate 9 is fixedly attached to the distal end with the base side as the base end.

【0012】符号10は、台板5上の砥石1の中心方向
の端部近傍の両側に一対設置(一方は図示せず)された
柱状のストッパ10であり、先端が基板保持ステージ7
の基板保持面7aへ当接して基板保持ステージ7の反時
計方向への揺動を停止させることでガラス基板12と砥
石1の研磨部1aとの接触量を制限するものである。ス
トッパ10の先端は、ガラス基板12と研磨部1aとの
接触量を制御可能とするため伸縮調整可能なゲージ11
が設けられている。従って、ゲージ11の伸縮調整を行
うことで、研磨部1aに対するガラス基板12の接触
量、角度が変化し、所望の面取り量、面取り角の調整が
可能となっている。また、各々のゲージ11の伸縮調整
することでガラス基板12の1辺が研磨部1a対して平
行に支持されるので斜め面取りを防止することができ
る。
Reference numeral 10 denotes a pair of columnar stoppers 10 (one is not shown) on both sides near the end of the grindstone 1 on the base plate 5 in the direction of the center.
By stopping the swinging of the substrate holding stage 7 in the counterclockwise direction by contacting the substrate holding surface 7a, the amount of contact between the glass substrate 12 and the polishing portion 1a of the grindstone 1 is limited. The tip of the stopper 10 has a gauge 11 that can be adjusted to expand and contract in order to control the amount of contact between the glass substrate 12 and the polishing section 1a.
Is provided. Therefore, by adjusting the expansion and contraction of the gauge 11, the contact amount and the angle of the glass substrate 12 with respect to the polishing section 1a are changed, and the desired chamfer amount and chamfer angle can be adjusted. Further, by adjusting the expansion and contraction of each gauge 11, one side of the glass substrate 12 is supported in parallel with the polishing portion 1a, so that oblique chamfering can be prevented.

【0013】符号12は液晶パネルを構成するガラス基
板で、2枚の矩形状のガラス板からなり、ステージ7の
基板保持面7aへ保持させる。ガラス基板12のステー
ジ7への保持方法は、図2に示すように真空吸着によっ
て行う。すなわち、所定厚みを有する基板保持ステージ
7の内部には、被研磨部であるガラス基板12の稜線部
に平行に、一端を閉鎖する縦穴13を所定の間隔をおい
て複数列形成すると共に、基板保持面7aから縦穴13
に連通する吸着孔14を各縦穴13毎に複数形成し、さ
らに、各縦穴13の開口部には先端閉塞になるよう切替
コック16を介してパイプ15を接続し、図示しない真
空源へ連結させ、切替コック16で選択させた吸着孔1
4により吸着力を発生させることで、基板保持面7a上
のガラス基板12を所定位置に吸着保持する。異なる基
板サイズの段取替は、切替コック16によって吸着孔1
4を選択することによって行う。このとき吸着孔14の
列は個々に使用する縦穴13での最短辺基板より短くす
ることで最大基板にも対応できる。
Reference numeral 12 denotes a glass substrate constituting a liquid crystal panel, which is formed of two rectangular glass plates and is held on the substrate holding surface 7a of the stage 7. The method of holding the glass substrate 12 on the stage 7 is performed by vacuum suction as shown in FIG. That is, in the inside of the substrate holding stage 7 having a predetermined thickness, a plurality of rows of vertical holes 13 closing one end are formed at predetermined intervals in parallel with the ridge line portion of the glass substrate 12 which is the portion to be polished. Vertical hole 13 from holding surface 7a
A plurality of suction holes 14 communicating with the vertical holes 13 are formed for each vertical hole 13. Further, a pipe 15 is connected to the opening of each vertical hole 13 via a switching cock 16 so as to be closed at the end, and connected to a vacuum source (not shown). , Suction hole 1 selected by switching cock 16
By generating an attraction force by 4, the glass substrate 12 on the substrate holding surface 7 a is attracted and held at a predetermined position. The changeover of a different substrate size is performed by the switching cock 16 using the suction hole 1.
This is done by selecting 4. At this time, by making the row of the suction holes 14 shorter than the shortest side substrate of the vertical hole 13 used individually, it is possible to cope with the maximum substrate.

【0014】また、基板保持ステージ7の基板保持面7
aの裏面側には、基板保持ステージ7をオペレータが操
作する為の把手17を設けている。18は冷却ノズル
で、水または冷却剤を砥石1やガラス基板12に供給す
るためのものである。
The substrate holding surface 7 of the substrate holding stage 7
A handle 17 for an operator to operate the substrate holding stage 7 is provided on the back side of “a”. Reference numeral 18 denotes a cooling nozzle for supplying water or a coolant to the grindstone 1 and the glass substrate 12.

【0015】次に本実施形態の作用について説明する。
ガラス基板12を基板保持ステージ7に保持するため
に、図1に破線で示すように基板保持ステージ7の基板
保持面7aを上向きにし、この保持面7a上にガラス基
板12を載置させて先端(被研磨側)を位置決め板9へ
当接させた後、ガラス基板12を真空吸着させる。次い
で、把手17をもって基板保持ステージ7をシャフト8
を軸に回転し、ガラス基板12の稜線部12aを回転す
る砥石1上面の研磨部1aへ押当させることで研磨し、
1辺全域(稜線部12a)の面取りを行う。
Next, the operation of the present embodiment will be described.
In order to hold the glass substrate 12 on the substrate holding stage 7, the substrate holding surface 7a of the substrate holding stage 7 is turned upward as shown by a broken line in FIG. After the (polished side) is brought into contact with the positioning plate 9, the glass substrate 12 is vacuum-sucked. Then, the substrate holding stage 7 is held by the handle 17 with the shaft 8.
, The ridge 12a of the glass substrate 12 is pressed against the polishing portion 1a of the upper surface of the rotating grindstone 1 to perform polishing.
The entire area of one side (ridge 12a) is chamfered.

【0016】所定量だけ面取りされると、基板保持ステ
ージ7の基板保持面7aがストッパ10の先端ゲージ1
1へ当接して揺動が止まり1辺全域の面取りが終了す
る。なお、ストッパ10は左右方向に一対設けて基板保
持ステージ7が傾くことを防いでいるので、均一した面
取りが可能となる。また、砥石が偏磨耗した場合はスト
ッパー10の左右を調整することで均一した面取りを行
うことが可能となる。
After a predetermined amount of chamfering, the substrate holding surface 7a of the substrate holding stage 7
1 and stops swinging, and the chamfering of the entire side is completed. In addition, since the stopper 10 is provided in a pair in the left-right direction to prevent the substrate holding stage 7 from tilting, uniform chamfering is possible. Further, when the whetstone is unevenly worn, it is possible to perform uniform chamfering by adjusting the left and right of the stopper 10.

【0017】尚、ストッパ10の先端の構成としては、
例えばゲージ11の基端側にセンサを設けることで、よ
り正確にガラス基板12と研磨部1aとの接触量を制御
するができる。更に、シャフト8に回動量を制御可能と
するシリンダを設け、ストッパ10のセンサー信号によ
り該シリンダの作動を停止し或いはモータ2の回転を停
止して、面取りを終了することも可能となる。
The configuration of the tip of the stopper 10 is as follows.
For example, by providing a sensor on the base end side of the gauge 11, the amount of contact between the glass substrate 12 and the polishing section 1a can be controlled more accurately. Further, it is also possible to provide a cylinder capable of controlling the amount of rotation on the shaft 8 and stop the operation of the cylinder or stop the rotation of the motor 2 according to a sensor signal of the stopper 10 to end the chamfering.

【0018】また、図2では研磨部1aの左右半分の一
方の領域を使用しているが、他方の領域を使用すること
も可能である。この選択に際しては、ガラス基板12が
破損したり、あるいは基板保持ステージ7から外れて飛
散しても作業者に危険が及ばないことを考慮に入れるこ
とも必要である。
In FIG. 2, one of the left and right halves of the polishing section 1a is used, but the other area may be used. In this selection, it is necessary to take into consideration that the glass substrate 12 is not damaged even if the glass substrate 12 is broken or scattered off the substrate holding stage 7.

【0019】なお、糸面取りの場合や、安全カバー等に
より基板の飛散防止が図られている場合には、砥石1の
研磨部1aの左右両部にわたる最長面取り可能部Aで面
取りを行うことができ、より大きなガラス基板の面取り
が可能になる。また、砥石1の左右両側にステージ7を
設け、左右交互に面取りを行うことも可能である。各辺
の面取りは、真空吸着を解除して、基板の方向を変える
ことで可能であり、同様に基板の上下の向きを変えるこ
とで上下両面の面取りが可能である。さらに、吸着孔1
4の形成領域を最小ガラス基板の面積よりも小さくする
ことで最大ガラス基板にも対応させることが可能であ
る。
In the case of chamfering a thread, or in the case where the substrate is prevented from being scattered by a safety cover or the like, the chamfering can be performed at the longest chamferable portion A extending over the left and right portions of the polishing portion 1a of the grindstone 1. And a larger glass substrate can be chamfered. It is also possible to provide stages 7 on both left and right sides of the grindstone 1 and perform chamfering alternately on the left and right. The chamfering of each side can be performed by releasing the vacuum suction and changing the direction of the substrate. Similarly, the upper and lower surfaces can be chamfered by changing the vertical direction of the substrate. Furthermore, the suction hole 1
By making the formation region of 4 smaller than the area of the minimum glass substrate, it is possible to correspond to the maximum glass substrate.

【0020】次に、図3を参照しつつ第2実施形態を説
明する。尚、前記した構成と同一部分には同一符号を付
して説明を省略する。前記第1の実施形態では砥石1へ
のガラス基板の離接を揺動式の基板保持部4を用いた
が、本実施形態ではコンパクトな装置とするために往復
動式の基板保持部を用いるものである。
Next, a second embodiment will be described with reference to FIG. Note that the same parts as those described above are denoted by the same reference numerals, and description thereof will be omitted. In the first embodiment, the swinging type substrate holding unit 4 is used for detaching / attaching the glass substrate to / from the whetstone 1. In the present embodiment, a reciprocating type substrate holding unit is used in order to make the apparatus compact. Things.

【0021】図3に示すように、所定幅を有した支持台
6に基板保持ステージ20を台板5に対して前方へ傾斜
させ、かつ摺動(往復動)自在に支持すると共に、基板
保持ステージ20に平行して支持台6に支持させたスラ
イドシリンダ21のピストンロッド22をロッド先端2
2aを介してステージ20下面へ接続している。また、
位置決め板23は台板5上で軸8aにより回動自在に軸
支されたレバー24の一端へ固定されると共に、レバー
24の他端部24aはピストンロッド22のロッド先端
22aへ係合している。
As shown in FIG. 3, the substrate holding stage 20 is tilted forward with respect to the base plate 5 and supported slidably (reciprocally) on a support base 6 having a predetermined width. The piston rod 22 of the slide cylinder 21 supported on the support base 6 in parallel with the
It is connected to the lower surface of the stage 20 via 2a. Also,
The positioning plate 23 is fixed to one end of a lever 24 rotatably supported by the shaft 8 a on the base plate 5, and the other end 24 a of the lever 24 engages with the rod tip 22 a of the piston rod 22. I have.

【0022】次に作用について説明する。ピストンロッ
ド22の収縮状態では位置決め板23が基板保持ステー
ジ20の先端側に位置してガラス基板12の先端の位置
決めに用いられる。ガラス基板12を位置決め板23に
て位置決めして基板保持ステージ20へ吸引手段13〜
15等(図2参照)により保持した後、ピストンロッド
22を伸長させる。これにより、ピストンロッド22を
接続した基板保持ステージ20は支持台6と摺動しなが
ら砥石1へと接近すると共に、係合するレバー24の端
部24aを押圧することで他端側の位置決め板23は上
昇する。よって、位置決め板23の上昇と共にガラス基
板12が前進し、砥石1に所定角度にて押当し、研磨可
能となる。研磨量は、ピストンロッド22の伸長調整、
又はスライドシリンダ21の取り付け位置調整にて予め
決定でき、第1本実施形態で示したストッパ10は不要
となる。このように位置決め板23は面取り時に上昇
し、かつ、ガラス基板12の移動は直線的となるので、
ガラス基板12と砥石1との位置関係を最短距離に設定
することができる。
Next, the operation will be described. When the piston rod 22 is in a contracted state, the positioning plate 23 is located on the front end side of the substrate holding stage 20 and is used for positioning the front end of the glass substrate 12. The glass substrate 12 is positioned by the positioning plate 23 and sucked by the suction means 13 to the substrate holding stage 20.
After holding by 15 etc. (see FIG. 2), the piston rod 22 is extended. As a result, the substrate holding stage 20 to which the piston rod 22 is connected approaches the grindstone 1 while sliding on the support base 6, and presses the end 24 a of the lever 24 to be engaged. 23 rises. Therefore, the glass substrate 12 moves forward with the rise of the positioning plate 23, presses the grindstone 1 at a predetermined angle, and becomes polished. The amount of polishing is adjusted by adjusting the extension of the piston rod 22,
Alternatively, it can be determined in advance by adjusting the mounting position of the slide cylinder 21, and the stopper 10 shown in the first embodiment becomes unnecessary. As described above, since the positioning plate 23 rises at the time of chamfering and the movement of the glass substrate 12 becomes linear,
The positional relationship between the glass substrate 12 and the grindstone 1 can be set to the shortest distance.

【0023】次に、図4を参照しつつ第3実施形態を説
明する。尚、前記した構成と同一部分には同一符号を付
して説明を省略する。前記第2の実施形態では砥石1を
平行にし、ガラス基板12を傾けて接近させる場合を説
明したが、本実施形態では逆に砥石1を傾けることでガ
ラス基板12を平行にして接近可能とするものである。
Next, a third embodiment will be described with reference to FIG. Note that the same parts as those described above are denoted by the same reference numerals, and description thereof will be omitted. In the second embodiment, the case where the grindstone 1 is made parallel and the glass substrate 12 is inclined to approach is described. However, in the present embodiment, the glass substrate 12 is made parallel and approachable by inclining the grindstone 1 in reverse. Things.

【0024】砥石1は面取り角度にあわせて傾斜され、
基板保持ステージ25は砥石1の下方に水平状態で、か
つ水平に設けられた台板5に対して平行に往復動可能と
なっている。詳しくは、台板5上に起立して設けられた
支持台6に長手方向を砥石1方向に向けて固定されたス
ライドシリンダ26のピストンロッド22の先端部22
aが基板保持ステージ25下面へ固定されており、ピス
トンロッド22の伸縮で支持台6と摺動可能に係合する
ステージ25が前後動する。
The grindstone 1 is inclined according to the chamfer angle,
The substrate holding stage 25 is capable of reciprocating in a horizontal state below the grindstone 1 and in parallel with a horizontally provided base plate 5. More specifically, the distal end portion 22 of the piston rod 22 of the slide cylinder 26 fixed to the support 6 provided upright on the base plate 5 with the longitudinal direction directed toward the grindstone 1.
a is fixed to the lower surface of the substrate holding stage 25, and the stage 25 slidably engaged with the support base 6 moves back and forth by the expansion and contraction of the piston rod 22.

【0025】よって、基板保持ステージ25上に載置さ
れたガラス基板12の先端を位置決め板9にあわせ、図
示しない吸着手段13〜15(図2参照)の制御により
吸着してピストンロッド22を伸長させと、これに伴っ
て基板保持ステージ25が前進し、ガラス基板12の先
端の稜線部分が砥石1の研磨部1aにて一度に所定量、
角度に研磨できる。
Accordingly, the tip of the glass substrate 12 placed on the substrate holding stage 25 is aligned with the positioning plate 9 and is sucked by the control of suction means 13 to 15 (not shown) (see FIG. 2) to extend the piston rod 22. Then, the substrate holding stage 25 advances along with this, and the ridge portion of the tip of the glass substrate 12 is moved by a predetermined amount at a time by the polishing portion 1a of the grindstone 1.
Can be polished to an angle.

【0026】尚、第3実施形態では、台板5を水平状態
とし、その斜め上方に砥石1を設けてガラス基板12と
研磨部1aの所定角度を形成したが、装置の設置環境等
により例えば、台板5と砥石1を共に垂直に立てた状態
とすると共に、砥石1に対してガラス基板12を角度を
つけて離接可能とすることで、同様の効果を得ることが
できる。
In the third embodiment, the base plate 5 is set in a horizontal state, and the grindstone 1 is provided diagonally above the base plate 5 to form a predetermined angle between the glass substrate 12 and the polishing portion 1a. The same effect can be obtained by making both the base plate 5 and the grindstone 1 stand vertically and making the glass substrate 12 attachable to and detachable from the grindstone 1 at an angle.

【0027】[0027]

【発明の効果】請求項1ないし3記載の発明によれば、
研磨部材の半径を基板の稜線部を一度に面取りすること
ができる寸法、例えば基板の短辺よりも大きな寸法に形
成したので、研磨部材または基板を面取り方向へスライ
ドさせる必要がなく、このため省スペース化が可能にな
る。また、研磨部材へ回転駆動機構を直結または近接さ
せたので、余分なスペースが不要となり、上記と相俟っ
てさらなる省スペース化が図れる。さらに、面取り時
に、研磨部材または基板の面取り方向へのスライドが不
要であることからタクトタイムの削減が可能になる。
According to the first to third aspects of the present invention,
Since the radius of the polishing member is set to a dimension that can bevel the edge line portion of the substrate at a time, for example, a dimension larger than the short side of the substrate, there is no need to slide the polishing member or the substrate in the chamfering direction, thereby saving. Space can be provided. Further, since the rotary drive mechanism is directly connected to or brought close to the polishing member, no extra space is required, and further space saving can be achieved in combination with the above. Furthermore, since it is not necessary to slide the polishing member or the substrate in the chamfering direction at the time of chamfering, tact time can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る基板の面取り装置の第1の実施形
態を示す概略側面図である。
FIG. 1 is a schematic side view showing a first embodiment of a substrate chamfering apparatus according to the present invention.

【図2】図1の概略平面図である。FIG. 2 is a schematic plan view of FIG.

【図3】本発明に係る基板の面取り装置の第2実施形態
を示す概略側面図である。
FIG. 3 is a schematic side view showing a second embodiment of the substrate chamfering apparatus according to the present invention.

【図4】本発明に係る基板の面取り装置の第3実施形態
を示す概略側面図である。
FIG. 4 is a schematic side view showing a third embodiment of the substrate chamfering apparatus according to the present invention.

【符号の説明】[Explanation of symbols]

1 砥石 1a 研磨部 2 モータ 4 基板保持部 7 基板保持ステージ 7a 基板保持面 10 ストッパ 12 ガラス基板 12a 稜線部 21、26 シリンダ DESCRIPTION OF SYMBOLS 1 Whetstone 1a Polishing part 2 Motor 4 Substrate holding part 7 Substrate holding stage 7a Substrate holding surface 10 Stopper 12 Glass substrate 12a Ridge part 21, 26 Cylinder

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 面取りをすべき基板の稜線部を一度に面
取りすることができる円盤状の研磨部材と、該研磨部材
に対して基板の稜線部を接近・離間させる基板保持部
と、前記研磨部材へ直結または近接した回転駆動機構と
を有することを特徴とする基板の面取り装置。
1. A disk-shaped polishing member capable of chamfering a ridge portion of a substrate to be chamfered at a time, a substrate holding portion for moving the ridge portion of the substrate toward and away from the polishing member; A chamfering apparatus for a substrate, comprising: a rotary drive mechanism directly connected to or close to a member.
【請求項2】 前記基板保持部は、研磨部材近傍に設置
された支持部へ揺動自在に設けられ、かつ基板の稜線部
を研磨部材へ押当可能な基板保持ステージを有し、さら
に該基板保持ステージの基板保持面に当接して揺動を停
止させるストッパを設けたことを特徴とする請求項1記
載の基板の面取り装置。
2. The method according to claim 1, wherein the substrate holding section is provided on a supporting section provided near the polishing member so as to be swingable, and has a substrate holding stage capable of pressing a ridge portion of the substrate against the polishing member. 2. The substrate chamfering apparatus according to claim 1, further comprising a stopper that abuts on the substrate holding surface of the substrate holding stage to stop the swing.
【請求項3】 前記基板保持部は、研磨部材近傍に設置
された支持部へ摺動自在に設けられ、かつ基板を研磨部
材に対して傾斜させてその稜線部を研磨部材へ押当可能
な基板保持ステージを有し、さらに該基板保持ステージ
を往復動させる駆動部を設けたことを特徴とする請求項
1記載の基板の面取り装置。
3. The substrate holding portion is slidably provided on a support portion provided near a polishing member, and is capable of inclining the substrate with respect to the polishing member and pressing the ridge portion thereof against the polishing member. 2. The apparatus for chamfering a substrate according to claim 1, further comprising a substrate holding stage, and a driving unit for reciprocating the substrate holding stage.
JP11150673A 1999-05-28 1999-05-28 Chamfering device for board Pending JP2000343392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11150673A JP2000343392A (en) 1999-05-28 1999-05-28 Chamfering device for board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11150673A JP2000343392A (en) 1999-05-28 1999-05-28 Chamfering device for board

Publications (1)

Publication Number Publication Date
JP2000343392A true JP2000343392A (en) 2000-12-12

Family

ID=15501983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11150673A Pending JP2000343392A (en) 1999-05-28 1999-05-28 Chamfering device for board

Country Status (1)

Country Link
JP (1) JP2000343392A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100458728B1 (en) * 2001-11-15 2004-12-03 뉴 테크 에스.알.엘. Tubular workpiece notching machine usable for general grinding operations

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100458728B1 (en) * 2001-11-15 2004-12-03 뉴 테크 에스.알.엘. Tubular workpiece notching machine usable for general grinding operations

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