JP2000338063A - Fluorescent x-ray analyzing apparatus and method - Google Patents

Fluorescent x-ray analyzing apparatus and method

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Publication number
JP2000338063A
JP2000338063A JP11152329A JP15232999A JP2000338063A JP 2000338063 A JP2000338063 A JP 2000338063A JP 11152329 A JP11152329 A JP 11152329A JP 15232999 A JP15232999 A JP 15232999A JP 2000338063 A JP2000338063 A JP 2000338063A
Authority
JP
Japan
Prior art keywords
ray
sample
rays
passage
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11152329A
Other languages
Japanese (ja)
Inventor
Takao Arai
貴雄 新井
Kazuhiko Kobayashi
和彦 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Newly Corp
Original Assignee
Newly Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Newly Corp filed Critical Newly Corp
Priority to JP11152329A priority Critical patent/JP2000338063A/en
Publication of JP2000338063A publication Critical patent/JP2000338063A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To enhance measuring accuracy by sufficiently substituting air of an X-ray passing route with inert gas while reducing measuring cost. SOLUTION: The sample housing space A formed to a container 7 and an X-ray passing route 5 of primary X-rays irradiating a sample and secondary X-rays discharged from the sample are demarated by an X-ray transmitting member 29 and a sample is analyzed on the basis of secondary X-rays. In this fluorescent X-ray analyzing method, inert gas is introduced into the X-ray passing route 5 and the samaple is analyzed in such a state that the X-ray passing route 5 is hemetically closed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、例えば、原油中に
含まれる硫黄分の含有量の測定、鋼材の種類の判別,あ
るいはメッキ組成の分析などに用いられる蛍光X線分析
装置およびその方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluorescence analyzer and a method thereof for use in, for example, measuring the content of sulfur contained in crude oil, determining the type of steel, or analyzing the plating composition. .

【0002】[0002]

【従来の技術】従来のこの種蛍光X線分析装置は、X線
検出器およびX線発生器が取り付けられた取付台と、該
取付台の一面に形成された開口周縁部に設けられた試料
収容容器とを有している。そして、取付台には、X線発
生器から試料に対して照射される一次X線および試料か
ら放出される二次X線が通過する空間、すなわちX線通
過経路が形成されている。また、取付台には、ヘリウ
ム,窒素などの不活性ガスをX線通過経路に導入するガ
ス導入孔が形成されており、X線通過経路の空気による
X線の吸収や前記空気中のアルゴンによる測定の妨害を
阻止している。
2. Description of the Related Art A conventional X-ray fluorescence spectrometer of this type includes a mounting base on which an X-ray detector and an X-ray generator are mounted, and a sample provided on the periphery of an opening formed on one surface of the mounting base. And a storage container. The mounting base is formed with a space through which primary X-rays emitted from the X-ray generator to the sample and secondary X-rays emitted from the sample pass, that is, an X-ray passage path. Further, the mounting base is formed with a gas introduction hole for introducing an inert gas such as helium or nitrogen into the X-ray passage, so that X-rays can be absorbed by air in the X-ray passage or argon in the air. Prevents measurement interference.

【0003】そして、前記試料収容容器に、例えば、原
油,鋼材などの試料を収容し、この試料に対してX線発
生器から一次X線を照射し、試料から放出される二次X
線をX線検出器により分析している。この際、ガス導入
孔からX線通過経路に不活性ガスを連続的に導入してい
る。
[0003] A sample such as crude oil or steel material is stored in the sample storage container, and the sample is irradiated with primary X-rays from an X-ray generator, and secondary X-rays emitted from the sample are radiated.
The lines are analyzed by an X-ray detector. At this time, an inert gas is continuously introduced from the gas introduction hole into the X-ray passage.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、従来の
前記蛍光X線分析装置の場合、測定の際、ガス導入孔か
らX線通過経路に不活性ガスを導入しているが、X線通
過経路の空気を不活性ガスに充分に置換できないため、
測定精度が低いという問題がある。また、不活性ガスを
連続的に導入しているため、コスト高になるという問題
がある。
However, in the case of the above-mentioned conventional X-ray fluorescence spectrometer, an inert gas is introduced into the X-ray passage through the gas introduction hole at the time of measurement. Since air cannot be sufficiently replaced with inert gas,
There is a problem that measurement accuracy is low. Further, since the inert gas is continuously introduced, there is a problem that the cost is increased.

【0005】そこで、本発明は、上記問題点に鑑み、X
線通過経路の空気を不活性ガスに充分に置換して測定精
度を向上できる安価な蛍光X線分析装置およびその方法
を提供することを課題とする。
Accordingly, the present invention has been made in view of the above problems, and
It is an object of the present invention to provide an inexpensive X-ray fluorescence analyzer and a method thereof capable of improving measurement accuracy by sufficiently replacing air in a line passage with an inert gas.

【0006】[0006]

【課題を解決するための手段】前記課題を解決するため
に、請求項1記載の蛍光X線分析方法は、容器7に形成
された試料の収容空間Aと、前記試料に対して照射され
る一次X線および前記試料から放出される二次X線のX
線通過経路5とをX線透過部材29により区画し、前記
二次X線に基づいて試料分析を行う蛍光X線分析方法に
おいて、前記X線通過経路5に不活性ガスを導入し、前
記X線通過経路5を密閉した状態で試料分析を行うよう
にしたものである。
According to a first aspect of the present invention, there is provided a fluorescent X-ray analysis method according to the first aspect of the present invention. X of primary X-rays and secondary X-rays emitted from the sample
In the fluorescent X-ray analysis method in which the X-ray passage 5 is partitioned by the X-ray transmitting member 29 and the sample is analyzed based on the secondary X-rays, an inert gas is introduced into the X-ray passage 5, The sample analysis is performed with the line passage 5 closed.

【0007】また、請求項2記載の蛍光X線分析装置
は、試料を収容する収容空間Aが形成された容器7と、
前記試料に対して一次X線を照射するX線発生器3と、
前記試料から放出される二次X線に基づいて試料分析を
行うX線検出器2と、前記収容空間Aと前記両X線のX
線通過経路5とを区画するX線透過部材29とを有する
蛍光X線分析装置1において、前記X線通過経路5に不
活性ガスを導入し、前記X線通過経路5を密閉したもの
である。
[0007] The X-ray fluorescence spectrometer according to the second aspect of the present invention comprises a container 7 having a housing space A for housing a sample;
An X-ray generator 3 for irradiating the sample with primary X-rays;
An X-ray detector 2 for performing sample analysis based on secondary X-rays emitted from the sample, an X-ray of the accommodation space A and X-rays of both X-rays
In the X-ray fluorescence analyzer 1 having the X-ray transmitting member 29 for dividing the X-ray passage 5, an inert gas is introduced into the X-ray passage 5, and the X-ray passage 5 is sealed. .

【0008】したがって、試料に照射される一次X線お
よび試料から放出される二次X線のX線通過経路5を密
閉することにより外部との空気の流通がなくなり、空気
によるX線の吸収や空気中のアルゴンによる妨害を阻止
することができる。しかも、X線通過経路5に不活性ガ
スを封入したため、不活性ガスの雰囲気内において試料
分析が行われることになり、測定精度を向上するのに非
常に有効である。さらに、不活性ガスを連続的に導入す
るのではなく、一定量の不活性ガスを封入しているた
め、安価である。
Therefore, by closing the X-ray passage 5 for the primary X-ray radiated to the sample and the secondary X-ray emitted from the sample, the flow of air to the outside is eliminated, and the absorption of X-rays by air and Interference due to argon in the air can be prevented. In addition, since the inert gas is sealed in the X-ray passage 5, the sample analysis is performed in the atmosphere of the inert gas, which is very effective in improving the measurement accuracy. In addition, since a certain amount of inert gas is sealed instead of continuously introducing inert gas, the cost is low.

【0009】さらに、請求項3記載の蛍光X線分析装置
は、容器7に形成された試料の収容空間Aと、前記試料
に対して照射される一次X線および前記試料から放出さ
れる二次X線のX線通過経路5とをX線透過部材29に
より区画し、前記二次X線に基づいて試料分析を行う蛍
光X線分析方法において、前記X線通過経路5を真空状
態にして試料分析を行うようにしたものである。
Further, the X-ray fluorescence spectrometer according to the third aspect of the present invention comprises a sample accommodating space A formed in the container 7, a primary X-ray radiated to the sample and a secondary X-ray emitted from the sample. In the X-ray fluorescence analysis method in which the X-ray passage 5 and the X-ray passage 5 are partitioned by the X-ray transmitting member 29 and the sample is analyzed based on the secondary X-ray, the X-ray passage 5 is evacuated to a sample. An analysis is performed.

【0010】したがって、X線通過経路5を真空状態に
し、真空の雰囲気内において試料分析を行うようにした
ため、測定精度の向上を有効に図ることができると共
に、不活性ガスを用いていないため、安価になる。
Therefore, since the X-ray passage 5 is evacuated and the sample analysis is performed in a vacuum atmosphere, the accuracy of measurement can be effectively improved, and no inert gas is used. Become cheap.

【0011】[0011]

【発明の実施の形態】以下、実施の1形態につき、蛍光
X線分析装置の一例として、原油中に含まれる硫黄分の
含有量を測定する硫黄分析計について図1を参照して説
明する。同図において、1は硫黄分析装置(蛍光X線分
析装置)であり、プロポーションカウンタからなるX線
検出器2およびX線発生器3が取り付けられた取付台4
と、該取付台4に装着され、後述するX線通過経路5を
気密に閉塞する蓋体6と、該蓋体6に設けられた試料収
容容器7とを有している。
BEST MODE FOR CARRYING OUT THE INVENTION One embodiment of a sulfur analyzer for measuring the content of sulfur contained in crude oil will be described below as an example of an X-ray fluorescence analyzer with reference to FIG. In FIG. 1, reference numeral 1 denotes a sulfur analyzer (fluorescent X-ray analyzer), and a mounting table 4 on which an X-ray detector 2 and a X-ray generator 3 each composed of a proportion counter are mounted.
And a lid 6 mounted on the mounting base 4 and hermetically closing an X-ray passage 5 to be described later, and a sample container 7 provided on the lid 6.

【0012】前記取付台4には、左右方向にX線検出器
2が取り付けられ、取付台4の両側部に形成された溝4
aにリング状のガスシール材8がそれぞれ装着されてい
る。また、後方に傾斜した取付台4の上面に環状のガス
シール材9を介してX線発生器3が取り付けられてい
る。さらに、取付台4の前面中央部には円形状の凹部1
0が形成され、凹部10の底面に前記凹部10より小径
の透孔11が形成され、この透孔11はX線検出器2の
検出部に位置している。そして、透孔11の上方に連通
孔12が形成され、連通孔12の一端はX線発生器3の
出力部に位置し、他端は透孔11に連通している。
An X-ray detector 2 is mounted on the mounting base 4 in the left-right direction, and grooves 4 formed on both sides of the mounting base 4 are provided.
The ring-shaped gas seal material 8 is attached to each of a. Further, the X-ray generator 3 is mounted on the upper surface of the mounting table 4 inclined rearward via an annular gas seal material 9. Further, a circular concave portion 1 is provided at the center of the front surface of the mounting base 4.
0 is formed, and a through hole 11 having a smaller diameter than the concave portion 10 is formed on the bottom surface of the concave portion 10, and the through hole 11 is located at a detection portion of the X-ray detector 2. A communication hole 12 is formed above the through hole 11, and one end of the communication hole 12 is located at an output portion of the X-ray generator 3, and the other end communicates with the through hole 11.

【0013】前記蓋体6は、取付台4の凹部10に挿入
されて当接し、蓋体6の中央部に円形状の凹部13が形
成され、凹部13の底面に前記透孔11に連通した前記
凹部13より小径の貫通孔14が形成されている。そし
て、取付台4の透孔11,連通孔12および,蓋体6の
貫通孔14からX線通過経路5が構成されている。ま
た、蓋体6の一側の周面に環状の溝6aが形成され、こ
の溝6aにガスシール材8が装着されている。さらに、
蓋体6の他側の周面にフランジ15が突設され、このフ
ランジ15が取付台4の前面に当接している。
The cover 6 is inserted into the recess 10 of the mounting base 4 and makes contact therewith. A circular recess 13 is formed in the center of the cover 6, and the bottom of the recess 13 communicates with the through hole 11. A through hole 14 having a smaller diameter than the recess 13 is formed. The X-ray passage 5 is constituted by the through hole 11, the communication hole 12 of the mounting base 4, and the through hole 14 of the lid 6. An annular groove 6a is formed on the peripheral surface on one side of the lid 6, and a gas seal material 8 is mounted in the groove 6a. further,
A flange 15 protrudes from the peripheral surface on the other side of the lid 6, and the flange 15 contacts the front surface of the mounting base 4.

【0014】前記試料収容容器7は、大径突出部16
と、該大径突出部16に一体に形成された小径突出部1
7と、両突出部16,17の境界部分の周面に形成され
たフランジ18とからなる。そして、大径突出部16の
端面の上部に原油導入口19が形成され、下部に原油導
出口20が形成され、原油導入口19および原油導出口
20が前記端面の上下方向の中心線上に位置している。
The sample container 7 has a large-diameter projection 16.
And the small-diameter projection 1 formed integrally with the large-diameter projection 16.
7 and a flange 18 formed on the peripheral surface at the boundary between the two projecting portions 16 and 17. A crude oil inlet 19 is formed at the upper part of the end face of the large diameter projecting part 16, and a crude oil outlet 20 is formed at the lower part. The crude oil inlet 19 and the crude oil outlet 20 are located on the vertical center line of the end face. are doing.

【0015】また、小径突出部17の端面の中央部に検
出流路21が形成され、原油導入口19と検出流路21
の一端を連通して導入路22が形成され、原油導出口2
0と検出流路21の他端を連通して導出路23が形成さ
れている。そして、導入口19、導出口20、検出流路
21、導入路22、導出路23より試料収容空間Aが構
成されている。
A detection channel 21 is formed at the center of the end surface of the small-diameter projecting portion 17, and the crude oil introduction port 19 and the detection channel 21 are formed.
An inlet 22 is formed to communicate with one end of the crude oil outlet port 2.
0 and the other end of the detection flow path 21 communicate with each other to form a lead-out path 23. The sample inlet space A is constituted by the inlet 19, the outlet 20, the detection channel 21, the inlet 22, and the outlet 23.

【0016】さらに、小径突出部17は、蓋体6の凹部
13に挿入されて凹部13の壁面に当接している。そし
て、小径突出部17の端面に形成された環状の溝24に
リング状の油シール材25が装着され、フランジ18に
形成された環状の溝26にガスシール材8が装着されて
いる。また、蓋体6のフランジ15および試料収容容器
7のフランジ18を貫通した複数のボルト27が取付台
4の前面の螺孔28に螺合し、取付台4,蓋体6,試料
収容容器7が各ボルト27により一体になっている。
Further, the small-diameter projecting portion 17 is inserted into the concave portion 13 of the lid 6 and is in contact with the wall surface of the concave portion 13. A ring-shaped oil seal material 25 is mounted on an annular groove 24 formed on the end face of the small diameter projecting portion 17, and a gas seal material 8 is mounted on an annular groove 26 formed on the flange 18. Further, a plurality of bolts 27 penetrating through the flange 15 of the lid 6 and the flange 18 of the sample container 7 are screwed into the screw holes 28 on the front surface of the mount 4, and the mount 4, the lid 6, and the sample container 7 Are integrated by each bolt 27.

【0017】そして、蓋体6と試料収容容器7の小径突
出部17との間にベリリウムからなる金属の薄膜のX線
透過用部材29が介在され、X線透過用部材29の一面
が試料収容容器7の検出流路21に面し、他面がX線通
過経路5の貫通孔14に面している。そして、前記X線
通過経路5は、蓋体6および試料収容容器7のガスシー
ル材8と、X線透過用部材29とにより密閉され、この
X線通過経路5に不活性ガス、例えば、ヘリウムガスを
導入している。
An X-ray transmitting member 29 of a metal thin film made of beryllium is interposed between the lid 6 and the small-diameter projecting portion 17 of the sample receiving container 7, and one surface of the X-ray transmitting member 29 is used for storing the sample. The other surface faces the detection channel 21 of the container 7 and the through hole 14 of the X-ray passage 5. The X-ray passage 5 is hermetically sealed by the lid 6, the gas sealing material 8 of the sample container 7, and the X-ray transmitting member 29, and an inert gas such as helium Gas is introduced.

【0018】この不活性ガスの封入方法は、硫黄分析装
置1をチャンバ内に挿入し、X線通過経路5に連通した
細孔(図示せず)を介してX線通過経路5を真空状態に
し、チャンバ内にヘリウムガスを導入し、細孔を介して
X線通過経路5にヘリウムガスを導入し、細孔を栓体に
より閉塞する。
According to this method of filling an inert gas, the sulfur analyzer 1 is inserted into a chamber, and the X-ray passage 5 is evacuated through a pore (not shown) communicating with the X-ray passage 5. Then, helium gas is introduced into the chamber, helium gas is introduced into the X-ray passage 5 through the pores, and the pores are closed with plugs.

【0019】つぎに、原油中に含まれる硫黄分析方法に
ついて説明する。硫黄分析装置1のX線通過経路5にヘ
リウムガスが封入された状態で、試料収容容器7の原油
導入口19から原油を導入し、導入路22,検出流路2
1および導出路23を通って原油導出口20から導出す
る一方、X線発生器3から検出流路21に向けて一次X
線を照射すると、原油中の分析元素が励起されて二次X
線が放出される。この二次X線をX線検出器2により蛍
光X線の強度と散乱X線の強度の比に基づいて分析し、
原油中に含まれる硫黄分の含有量をX線検出器2により
測定する。
Next, a method for analyzing sulfur contained in crude oil will be described. In a state where helium gas is sealed in the X-ray passage 5 of the sulfur analyzer 1, crude oil is introduced from the crude oil introduction port 19 of the sample container 7, and the introduction passage 22 and the detection passage 2
1 and from the crude oil outlet 20 through the outlet 23, while the primary X-ray is directed from the X-ray generator 3 toward the detection channel 21.
Irradiation of X-rays excites the analytical elements in the crude oil to produce secondary X
A line is emitted. The secondary X-rays are analyzed by the X-ray detector 2 based on the ratio between the intensity of the fluorescent X-rays and the intensity of the scattered X-rays,
The content of sulfur contained in the crude oil is measured by the X-ray detector 2.

【0020】この際、X線通過経路5がヘリウムガスに
充分に置換されているため、従来のように、空気による
X線の吸収、あるいは空気中のアルゴンガスによる妨害
がなく、精度の高い測定結果が得られる。
At this time, since the X-ray passage 5 is sufficiently replaced with helium gas, there is no absorption of X-rays by air or interference by argon gas in air as in the prior art, and high-precision measurement is performed. The result is obtained.

【0021】なお、前記形態の場合、原油を試料として
原油中に含まれている硫黄分の含有量を測定したが、鋼
材を試料として鋼材の種類の判別,あるいはメッキ組成
を分析してもよい。また、不活性ガスにヘリウムを用い
たが、窒素ガスであってもよい。さらに、X線透過用部
材29にベリリウムからなる金属の薄膜を用いたが、ポ
リエステルなどの樹脂フィルムであってもよく、X線透
過用部材29は、X線透過率のよい部材であればよい。
また、X線検出器2にプロポーションカウンタを用いた
が、ソリッドステート検出器であってもよい。
In the above embodiment, the crude oil was used as a sample to measure the sulfur content contained in the crude oil. However, the steel material may be used as a sample to determine the type of the steel material or to analyze the plating composition. . Although helium is used as the inert gas, nitrogen gas may be used. Furthermore, although a metal thin film made of beryllium is used for the X-ray transmitting member 29, a resin film such as polyester may be used, and the X-ray transmitting member 29 may be a member having a good X-ray transmittance. .
Further, although the proportion counter is used as the X-ray detector 2, a solid state detector may be used.

【0022】また、前記形態の場合、X線通過経路5に
不活性ガスを封入して試料分析を行うようにしたが、X
線通過経路5を真空にした状態で試料分析を行うように
してもよい。この場合も、空気によるX線の吸収,ある
いは空気中のアルゴンによる測定の妨害などがなく、測
定精度の向上が有効に図れる。さらに、不活性ガスを用
いていないため、安価になる。但し、試料収容の際、試
料収容空間Aは大気状態であるため、X線透過部材29
はX線通過経路5側に撓まない厚さを有していることが
条件となる。
Further, in the case of the above-described embodiment, the sample analysis is performed by enclosing the inert gas in the X-ray passage 5.
The sample analysis may be performed in a state where the line passing path 5 is evacuated. In this case as well, there is no absorption of X-rays by air or interference of measurement by argon in the air, and the measurement accuracy can be effectively improved. Further, since no inert gas is used, the cost is low. However, since the sample accommodating space A is in the atmospheric state when the sample is accommodated, the X-ray transmitting member 29
Has a thickness that does not bend toward the X-ray passage path 5 side.

【0023】[0023]

【発明の効果】以上説明したように、本発明によれば、
大気中のX線通過経路に不活性ガスを導入しながら試料
分析するのではなく、X線通過経路に不活性ガスを封入
したり、X線通過経路を真空状態にすることにより、不
活性ガスの雰囲気内,あるいは真空の雰囲気内において
試料分析を行うようにしたため、外部の空気との流通を
阻止し、空気によるX線の吸収や空気中のアルゴンガス
による妨害をなくすことができ、測定精度の向上を有効
に図ることができる。
As described above, according to the present invention,
Rather than conducting a sample analysis while introducing an inert gas into the X-ray passage path in the atmosphere, the inert gas is sealed in the X-ray passage path or the X-ray passage path is evacuated to create an inert gas. The sample analysis is performed in the atmosphere of the atmosphere or in the vacuum, so that the flow with the external air can be stopped, and the absorption of X-rays by the air and the obstruction by the argon gas in the air can be eliminated. Can be effectively improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(イ)は本発明の実施の1形態の切断側面図、
(ロ)は図1(イ)の正面図である。
FIG. 1 (a) is a cut-away side view of one embodiment of the present invention,
FIG. 2B is a front view of FIG.

【符号の説明】[Explanation of symbols]

1…硫黄分析装置(蛍光X線分析装置)、2…X線検出
器、3…X線発生器、5…X線通過経路、29…X線透
過部材、A…試料収容空間。
DESCRIPTION OF SYMBOLS 1 ... Sulfur analyzer (X-ray fluorescence analyzer), 2 ... X-ray detector, 3 ... X-ray generator, 5 ... X-ray passage path, 29 ... X-ray transmission member, A ... Sample accommodation space.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2G001 AA01 BA04 CA01 DA01 FA12 FA30 GA01 JA11 JA14 KA01 KA09 LA02 LA04 MA02 MA05 NA08 PA07 PA18 SA01  ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 2G001 AA01 BA04 CA01 DA01 FA12 FA30 GA01 JA11 JA14 KA01 KA09 LA02 LA04 MA02 MA05 NA08 PA07 PA18 SA01

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 容器(7 )に形成された試料の収容空間(A
)と、前記試料に対して照射される一次X線および前記
試料から放出される二次X線のX線通過経路(5)とをX
線透過部材(29)により区画し、前記二次X線に基づいて
試料分析を行う蛍光X線分析方法において、前記X線通
過経路(5 )に不活性ガスを導入し、前記X線通過経路(5
)を密閉した状態で試料分析を行うことを特徴とする蛍
光X線分析方法。
1. A sample storage space (A) formed in a container (7).
) And the X-ray passage path (5) of the primary X-ray radiated to the sample and the secondary X-ray emitted from the sample,
In the fluorescent X-ray analysis method in which the sample is analyzed based on the secondary X-ray by partitioning with a X-ray transmitting member (29), an inert gas is introduced into the X-ray passing path (5), (Five
A) performing a sample analysis in a sealed state.
【請求項2】 試料を収容する収容空間(A )が形成され
た容器(7 )と、前記試料に対して一次X線を照射するX
線発生器(3 )と、前記試料から放出される二次X線に基
づいて試料分析を行うX線検出器(2 )と、前記収容空間
(A )と前記両X線のX線通過経路(5 )とを区画するX線
透過部材(29)とを有する蛍光X線分析装置(1 )におい
て、前記X線通過経路(5 )に不活性ガスを導入し、前記
X線通過経路(5 )を密閉してなることを特徴とする蛍光
X線分析装置。
2. A container (7) having an accommodation space (A) for accommodating a sample, and an X-ray for irradiating the sample with primary X-rays.
A radiation generator (3), an X-ray detector (2) for analyzing a sample based on secondary X-rays emitted from the sample, and the accommodation space.
(A) and an X-ray transmissive member (29) for partitioning the X-ray passage path (5) for both X-rays, the X-ray fluorescence analyzer (1) has An X-ray fluorescence analyzer characterized in that an active gas is introduced and the X-ray passage (5) is sealed.
【請求項3】 容器(7 )に形成された試料の収容空間(A
)と、前記試料に対して照射される一次X線および前記
試料から放出される二次X線のX線通過経路(5)とをX
線透過部材(29)により区画し、前記二次X線に基づいて
試料分析を行う蛍光X線分析方法において、前記X線通
過経路(5 )を真空状態にして試料分析を行うことを特徴
とする蛍光X線分析方法。
3. A sample storage space (A) formed in a container (7).
) And the X-ray passage path (5) of the primary X-ray radiated to the sample and the secondary X-ray emitted from the sample,
In a fluorescent X-ray analysis method in which the sample is analyzed based on the secondary X-rays, which is partitioned by a ray transmitting member (29), the X-ray passage path (5) is subjected to a vacuum state and the sample analysis is performed. X-ray fluorescence analysis method.
JP11152329A 1999-05-31 1999-05-31 Fluorescent x-ray analyzing apparatus and method Pending JP2000338063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11152329A JP2000338063A (en) 1999-05-31 1999-05-31 Fluorescent x-ray analyzing apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11152329A JP2000338063A (en) 1999-05-31 1999-05-31 Fluorescent x-ray analyzing apparatus and method

Publications (1)

Publication Number Publication Date
JP2000338063A true JP2000338063A (en) 2000-12-08

Family

ID=15538161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11152329A Pending JP2000338063A (en) 1999-05-31 1999-05-31 Fluorescent x-ray analyzing apparatus and method

Country Status (1)

Country Link
JP (1) JP2000338063A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005024407A1 (en) * 2003-08-27 2005-03-17 Rigaku Industrial Corporation Fluorescent x-ray analyzer
CN102081052A (en) * 2010-12-17 2011-06-01 曹余勤 Photoelectric conversion device for detecting sulfur

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005024407A1 (en) * 2003-08-27 2005-03-17 Rigaku Industrial Corporation Fluorescent x-ray analyzer
CN102081052A (en) * 2010-12-17 2011-06-01 曹余勤 Photoelectric conversion device for detecting sulfur

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