JP2000337289A5 - - Google Patents

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Publication number
JP2000337289A5
JP2000337289A5 JP1999142577A JP14257799A JP2000337289A5 JP 2000337289 A5 JP2000337289 A5 JP 2000337289A5 JP 1999142577 A JP1999142577 A JP 1999142577A JP 14257799 A JP14257799 A JP 14257799A JP 2000337289 A5 JP2000337289 A5 JP 2000337289A5
Authority
JP
Japan
Prior art keywords
thread groove
vacuum pump
rotor member
exhaust port
axial direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999142577A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000337289A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11142577A priority Critical patent/JP2000337289A/ja
Priority claimed from JP11142577A external-priority patent/JP2000337289A/ja
Priority to TW089109287A priority patent/TW464731B/zh
Priority to US09/572,743 priority patent/US6419444B1/en
Priority to KR1020000028117A priority patent/KR20000077405A/ko
Publication of JP2000337289A publication Critical patent/JP2000337289A/ja
Publication of JP2000337289A5 publication Critical patent/JP2000337289A5/ja
Pending legal-status Critical Current

Links

JP11142577A 1999-05-24 1999-05-24 ねじ溝式真空ポンプ、複合真空ポンプ、及び真空ポンプシステム Pending JP2000337289A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP11142577A JP2000337289A (ja) 1999-05-24 1999-05-24 ねじ溝式真空ポンプ、複合真空ポンプ、及び真空ポンプシステム
TW089109287A TW464731B (en) 1999-05-24 2000-05-15 Screw groove type vacuum pump, complex vacuum pump and vacuum pump system
US09/572,743 US6419444B1 (en) 1999-05-24 2000-05-16 Screw groove type vacuum pump, complex vacuum pump and vacuum pump system
KR1020000028117A KR20000077405A (ko) 1999-05-24 2000-05-24 나사홈식 진공펌프, 복합 진공펌프 및 진공펌프 시스템

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11142577A JP2000337289A (ja) 1999-05-24 1999-05-24 ねじ溝式真空ポンプ、複合真空ポンプ、及び真空ポンプシステム
US09/572,743 US6419444B1 (en) 1999-05-24 2000-05-16 Screw groove type vacuum pump, complex vacuum pump and vacuum pump system

Publications (2)

Publication Number Publication Date
JP2000337289A JP2000337289A (ja) 2000-12-05
JP2000337289A5 true JP2000337289A5 (OSRAM) 2005-10-27

Family

ID=26474533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11142577A Pending JP2000337289A (ja) 1999-05-24 1999-05-24 ねじ溝式真空ポンプ、複合真空ポンプ、及び真空ポンプシステム

Country Status (3)

Country Link
US (1) US6419444B1 (OSRAM)
JP (1) JP2000337289A (OSRAM)
TW (1) TW464731B (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000077405A (ko) * 1999-05-24 2000-12-26 다카키도시요시 나사홈식 진공펌프, 복합 진공펌프 및 진공펌프 시스템
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
CN102725535B (zh) * 2010-06-24 2016-05-11 埃地沃兹日本有限公司 真空泵
GB2482861B (en) 2010-07-30 2014-12-17 Hivis Pumps As Pump/motor assembly
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627642C3 (de) * 1985-08-14 1996-03-21 Rikagaku Kenkyusho Vakuumpumpe mit Gewindekanal
US6217278B1 (en) * 1997-07-25 2001-04-17 Ebara Corporation Turbomolecular pump

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