JP2000329518A - Method for measuring coordinate - Google Patents
Method for measuring coordinateInfo
- Publication number
- JP2000329518A JP2000329518A JP13553299A JP13553299A JP2000329518A JP 2000329518 A JP2000329518 A JP 2000329518A JP 13553299 A JP13553299 A JP 13553299A JP 13553299 A JP13553299 A JP 13553299A JP 2000329518 A JP2000329518 A JP 2000329518A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- ultraviolet
- shielding
- film
- coordinates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、座標測定方法に関
する。The present invention relates to a coordinate measuring method.
【0002】[0002]
【従来の技術】紫外線感光性材料を使用した製品の座標
測定は、次に示す(a)〜(c)の方法を用いて行って
いた。 (a)紫外線感光性材料を感光させないように、暗室の
ような紫外線を遮断した部屋での座標測定。 (b)必要部分を感光させた後に現像処理を施して、不
要となる紫外線感光性材料を取り除いてからの座標測
定。 (c)製品を感光させることを前提に、破壊試験により
座標測定。2. Description of the Related Art Coordinate measurement of a product using an ultraviolet-sensitive material has been performed by the following methods (a) to (c). (A) Coordinate measurement in a room such as a dark room where ultraviolet rays are blocked so as not to expose the ultraviolet-sensitive material. (B) Coordinate measurement after development is performed after exposing a necessary portion to remove unnecessary UV-sensitive material. (C) Coordinate measurement by a destructive test, assuming that the product is exposed.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、前述し
た(a)〜(c)の3つの方法では、各々に課題を有し
ており、個々に述べると、(a)の方法では、紫外線を
遮断する特別な部屋が必要であり、製品コストを大きく
押し上げるとの課題を有し、(b)の方法では、露光及
び現像を行う工程が必要になるばかりでなく、部分的に
紫外線感光性材料が取り除かれる為に、被測定物自体に
歪みが発生したまま測定を行うことになるとの課題を有
し、(c)の方法では、製品の歩留まりを上げることが
困難となるとの課題を有している。However, each of the above three methods (a) to (c) has a problem, and individually described, the method (a) blocks ultraviolet rays. The method (b) not only requires a step of performing exposure and development, but also partially requires the use of an ultraviolet-sensitive material. In order to be removed, there is a problem that the measurement is to be performed while the object to be measured itself is distorted, and the method (c) has a problem that it is difficult to increase the product yield. I have.
【0004】本発明は、上述した課題に鑑みてなされた
ものであり、製品コストを大きく押し上げず、部分的に
紫外線感光性材料を取り除くことをせずに、しかも破壊
検査を行わない座標測定方法を提供することを目的とす
る。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and a coordinate measuring method which does not greatly increase product cost, does not partially remove an ultraviolet-sensitive material, and does not perform a destructive inspection. The purpose is to provide.
【0005】[0005]
【課題を解決するための手段】本発明は、次のものに関
する。 (1)紫外線感光性材料を用いた被測定物の外層表面又
は外側に、波長400nm以下の紫外線を90%以上遮
蔽する遮蔽材を配置した後に、上記被測定物の座標を測
定することを特徴とする座標測定方法。The present invention relates to the following. (1) A method of measuring the coordinates of the object to be measured after disposing a shielding material for shielding at least 90% of ultraviolet light having a wavelength of 400 nm or less on the outer surface or outside of the object to be measured using an ultraviolet-sensitive material. Coordinate measurement method.
【0006】(2)遮蔽材が、袋形状をしており、その
内面を補強材により補強されているものであることを特
徴とする(1)に記載の座標測定方法。(2) The coordinate measuring method according to (1), wherein the shielding material has a bag shape, and the inner surface thereof is reinforced by a reinforcing material.
【0007】[0007]
【発明の実施の形態】本発明に用いる紫外線感光性材料
は、紫外線(波長4〜400nm)により感光するもの
であり、それ以外の可視光、赤外線等には感光しない特
性を有する材料である。BEST MODE FOR CARRYING OUT THE INVENTION The ultraviolet-sensitive material used in the present invention is a material which is sensitive to ultraviolet rays (wavelength: 4 to 400 nm) and has a characteristic of being insensitive to other visible light, infrared light and the like.
【0008】本発明に用いる遮蔽材は、少なくとも紫外
線を90%以上遮光する必要があり、更には、可視光を
10%以上透過させるものが、取り扱い易く好ましい。
これは、紫外線の遮光率が90%未満になると、徐々に
紫外線感光性材料が感光し始めるためであり、可視光に
関しては、透過率が上昇するにつれて作業性を上げるこ
とができる。The shielding material used in the present invention is required to shield at least 90% of ultraviolet rays, and more preferably, it transmits at least 10% of visible light, because it is easy to handle.
This is because when the light-shielding rate of ultraviolet rays becomes less than 90%, the ultraviolet-sensitive material gradually starts to be exposed. As for the visible light, the workability can be improved as the transmittance increases.
【0009】遮蔽材の形態に関しては、被測定物の外層
表面を覆う樹脂、フィルム、被測定物の外側を覆う袋
等、様々であり、紫外線感光材料を覆うものであれば、
特に限定されない。また前述した袋を使用する場合に
は、袋の外側を遮蔽材となし、内部を補強材としてもよ
い。With respect to the form of the shielding material, there are various types such as a resin and a film covering the outer layer surface of the object to be measured and a bag covering the outside of the object to be measured.
There is no particular limitation. When the above-mentioned bag is used, the outside of the bag may be used as a shielding material and the inside may be used as a reinforcing material.
【0010】被測定物の座標測定は、通常使用される可
視光を用いた座標測定装置を使用することが可能であ
り、被測定物が遮蔽材により覆われているので、感光さ
せることなく測定をすることができる。For the coordinate measurement of the object to be measured, it is possible to use a commonly used coordinate measuring device using visible light, and since the object to be measured is covered with a shielding material, it can be measured without exposure. Can be.
【0011】[0011]
【実施例】以下、本発明の実施例について図面を用いて
説明する。図1に示すように、ガラス布基材エポキシ樹
脂銅張積層板に、直径1mmの孔を複数箇所あけた後
に、感光性フィルム2(日立化成工業株式会社製、フォ
テックH−N930(商品名)を使用)をラミネート
し、回路形成用のネガフィルムを使用して露光したもの
を被測定基板1とした。Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, a plurality of holes each having a diameter of 1 mm are formed in a glass cloth base epoxy resin copper-clad laminate, and then the photosensitive film 2 (Fotech H-N930 (trade name) manufactured by Hitachi Chemical Co., Ltd.) is formed. Was exposed using a negative film for forming a circuit to obtain a substrate 1 to be measured.
【0012】被測定基板1は、紫外線透過率0.5%以
下であり、可視光線透過率89.7%のUVカットフィ
ルム3(井内盛栄堂社製、Obic C(商品名)を使
用)を、厚さ175μmのPETフィルム4に貼り合わ
せて補強した袋状の感光防止治具6に入れ、図2に示す
二次元座標測定機7のライトテーブルに載置した。The substrate 1 to be measured is a UV-cut film 3 having an ultraviolet transmittance of 0.5% or less and a visible light transmittance of 89.7% (using Obic C (trade name) manufactured by Iuchi Seieido Co., Ltd.). Then, it was put into a bag-shaped photosensitive prevention jig 6 reinforced by bonding it to a PET film 4 having a thickness of 175 μm, and placed on a light table of a two-dimensional coordinate measuring machine 7 shown in FIG.
【0013】感光性フィルム2は、二次元座標測定機7
を使用して先にあけた直径1mmの孔を測定した後で
も、感光することなく、その後の製造工程においても異
常は認められなかった。The photosensitive film 2 is a two-dimensional coordinate measuring machine 7
No sensitivity was observed even after the first hole having a diameter of 1 mm was measured by using No., and no abnormality was observed in the subsequent manufacturing steps.
【0014】[0014]
【発明の効果】本発明は、紫外線を90%以上遮蔽する
遮蔽材を用いて座標測定を行うので、暗室のような特別
な部屋を用意せずとも、紫外線感光性材料を感光させる
ことなく、製品のコストアップを防ぐことができ、且
つ、歩留まりを上げることができる。また、部分的に紫
外線感光性材料を取り除いてから測定するのではないの
で、被測定物自体に歪みを発生させずに精度良く座標測
定を行うことができる。According to the present invention, since the coordinate measurement is performed using a shielding material that blocks ultraviolet rays by 90% or more, the ultraviolet-sensitive material can be exposed without preparing a special room such as a dark room. It is possible to prevent the cost of the product from increasing, and to increase the yield. In addition, since the measurement is not performed after the ultraviolet-sensitive material is partially removed, coordinate measurement can be performed with high accuracy without causing distortion of the measured object itself.
【図1】本発明の1実施例を示す、被測定基板と感光防
止治具との断面図。FIG. 1 is a cross-sectional view of a substrate to be measured and a photosensitive prevention jig, showing one embodiment of the present invention.
【図2】図1に示す被測定基板と感光防止治具とを、二
次元座標測定機に載置した略式側面図。FIG. 2 is a schematic side view in which the substrate to be measured and the photosensitive prevention jig shown in FIG. 1 are mounted on a two-dimensional coordinate measuring machine.
1.被測定基板 2.感光性フィ
ルム 3.UVカットフィルム 4.PETフィ
ルム 6.感光防止治具 7.二次元座標
測定器1. 1. Substrate to be measured 2. photosensitive film UV cut film 4. PET film 6. 6. Exposure prevention jig 2D coordinate measuring instrument
Claims (2)
層表面又は外側に、波長400nm以下の紫外線を90
%以上遮蔽する遮蔽材を配置した後に、上記被測定物の
座標を測定することを特徴とする座標測定方法。1. An ultraviolet ray having a wavelength of 400 nm or less is applied to the surface or outside of an outer layer of an object using an ultraviolet photosensitive material.
%, Wherein the coordinates of the object to be measured are measured after disposing a shielding material that shields at least%.
を補強材により補強されているものであることを特徴と
する請求項1に記載の座標測定方法。2. The coordinate measuring method according to claim 1, wherein the shielding member has a bag shape, and an inner surface thereof is reinforced by a reinforcing material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13553299A JP2000329518A (en) | 1999-05-17 | 1999-05-17 | Method for measuring coordinate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13553299A JP2000329518A (en) | 1999-05-17 | 1999-05-17 | Method for measuring coordinate |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000329518A true JP2000329518A (en) | 2000-11-30 |
Family
ID=15153984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13553299A Pending JP2000329518A (en) | 1999-05-17 | 1999-05-17 | Method for measuring coordinate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000329518A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014069986A (en) * | 2012-09-28 | 2014-04-21 | Via Mechanics Ltd | Laser processing method |
-
1999
- 1999-05-17 JP JP13553299A patent/JP2000329518A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014069986A (en) * | 2012-09-28 | 2014-04-21 | Via Mechanics Ltd | Laser processing method |
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