JP2000325702A - Device for sterilizing and degassing - Google Patents

Abstract

PROBLEM TO BE SOLVED: To excellently degas and sterilize water without using chemicals, a filter membrane or an ion exchange membrane by installing a vacuum degassing device in which water to treat is boiled at a low temperature with the aid of ultrasonic wave energy and a circulation-type degassing device in which the degassed water is pressurized and expanded adiabatically in a reduced pressure chamber. SOLUTION: Water is taken into an introducing cylinder 3 after being descaled in an electrode cylinder 1 when a stop valve 23 and a inlet solenoid valve 24 is opened with a degassing chamber 8 kept in a high vacuum state by a vacuum pump 22. Gases in the water are separated as bubbles from ultrasonic wave vibration elements 31 by radiating ultrasonic waves onto the water in the introducing cylinder 3. Such degassed water is stored in a water storing space which is interconnected with an inner circumferential chamber 8a and an outer circumferential chamber 8b at the respective bottoms in the degassing chamber 8, and the water is overflowed into a circulating degassing tank 19 when the level of the water is over an overflow outlet 9. After the degassed water is fed by pressure to an injection nozzle 18 by a circulating pump 13, the degassed water is expanded adiabatically by colliding against the inner wall surface of a circulating degassing tank 19, resulting in sterilization to break down microorganism in the water.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a degassing / sterilizing apparatus for highly degassing volatile gas components dissolved in water and highly sterilizing microorganisms in water. Prevention, sterilization of bacteria that induce food poisoning, prevention of food spoilage in the catering industry, prevention of unpleasant smell in sake brewing, prevention of corrosion of cooling systems of engines and machines, prevention of washing water contamination in semiconductor wafer and semiconductor device manufacturing TECHNICAL FIELD The present invention relates to a deaeration / sterilization device for water useful for various uses such as non-chemical injection of various treated waters.

[0002]

2. Description of the Related Art It is well known that water is passed through an ion-exchange resin cylinder to reduce carbonate hardness and soften water, for example, in a boiler water supply system. In this case, if dissolved oxides are present, the ion-exchange resin will be degraded by oxidation.If there is a possibility that oxides may be present in the water when passing water, descaling and corrosion will occur in the water before passing through the ion-exchange resin. It is common sense to perform pretreatment for the purpose of prevention or the like.

[0003] The most common pretreatment of this type is a chemical injection method in which a chemical compounding a deoxidizing agent such as hydrazine, which is highly toxic for removing dissolved oxygen, and a cleaning agent for increasing pH, is added to water. It is. In addition, as a method that does not depend on chemical injection, a vacuum degassing method that degass oxygen, carbon dioxide, free chlorine, etc. dissolved in water in a container with a high vacuum degree is also known. There is also known a multi-stage continuous vacuum degassing method combining an ejector and a cyclone for mass processing.

[0004] In addition, a hollow fiber membrane deaeration system and an ultrasonic vibration deaeration system are also known.
No. 19, Japanese Patent Publication No. 2-1640 or Japanese Patent Publication No. 6-3
As disclosed in Japanese Patent No. 8959, it is also known that when a mineral component in water is ion-dissociated in a tank that applies an electrostatic field or an oscillating electric field to precipitate and remove as a floating scale, the tank is depressurized and degassed. Have been.

[0005]

The chemical injection method is not suitable for use in hospitals and food factories because of the toxicity of the deoxidizing agent. Due to the increased amount of impurities in water, not only increases the load on ion-exchange resins, but also the tendency to naturally increase the amount of chemical injection, monitoring the appropriate amount of chemical input involves management difficulties. In addition, it is not common except for uses in strictly controlled factories or the like where added value is expected for use of drugs because of problems such as increased amount of used drugs.

[0006] The vacuum degassing method is a method that does not pose a problem from a sanitary point of view. However, there are difficulties in controlling the degree of vacuum as a treatment of domestic water supply and a measure against red water in a building or the like. Since the atmospheric pressure and the water temperature or the temperature greatly change depending on the season, it is not possible to maintain a constant deaeration performance only by adjusting the vacuum pressure. For this reason, the vacuum deaeration system has not yet become widespread, but a batch processing type vacuum deaerator can be relatively easily handled. However, the batch processing type vacuum deaerator has a limited amount of processing because the processing is discontinuous, and when a large amount of water needs to be processed, it must be a large-scale equipment, and equipment maintenance cost is required. It is not common because it is expensive.

On the other hand, when continuous large-volume treatment is required, for example, in a food factory, a multistage continuous vacuum degassing system combining an ejector and a cyclone, which requires specialized complicated operation and maintenance, is used. Equipment that has been adopted and has a sufficient amount of processing per hour has been put to practical use.However, since the installation area is large, the equipment cost and maintenance cost are large, it is suitable for industrial use where added value can be expected by processing, and it is suitable for general apartments. As a deaerator for water treatment facilities in offices and office buildings, etc., it is not practical to adopt it economically, including in terms of management.

It is also known to carry out a hollow fiber membrane deaeration method upstream of an ion exchange resin cylinder. In this case, metal ions in water are oxidized on the surface of the hollow fiber membrane, and this oxide is removed. As a result, the membrane adheres to the membrane and malfunctions due to obstruction of the deaeration passage, and frequent replacement of the membrane is required. As a result, running costs are high except for high value-added applications, and there is a drawback that it cannot be economically justified.

The use of a hollow fiber membrane downstream of an ion exchange resin is also effective for simply removing dissolved oxygen.
The dissolved gas concentration after degassing in the one-pass treatment is an average value of at most about 0.9 to 0.6 ppm, and a plurality of devices are connected in series to reduce this to an extremely low concentration of, for example, 0.1 ppm or less. However, there is a disadvantage that the equipment cost and the maintenance cost are enormous.

[0010] It is also known that a certain degree of sterilization is carried out when the deaeration is promoted by applying ultrasonic vibration to the treated water, but this principle is based on the principle that the vibration energy increases the pressure and temperature of the water. Ultrasonic waves have a lower wave energy level than microwaves, and thus cannot provide a sufficient bactericidal effect due to the generated thermal energy.

[0011] In recent years, water treatment facilities that can sterilize or sterilize various microorganisms in the water as well as degassing and descaling, particularly sterilization of food-causing bacteria such as Salmonella, toxic Escherichia coli, and Vibrio parahaemolyticus use a lot of groundwater. The food industry, precision electronic parts industry, tourism industry, school lunches, etc. are strongly demanded, but there is still no known structure and operation that is relatively simple and can clear both cost and environmental measures. .

By heating and boiling the treated water in combination with the vacuum degassing treatment, a carcinogenic substance such as trihalomethane or trichlorethylene in the water or O-15 is produced.
It is also known that harmful bacteria such as 7 can be removed at the same time. However, even if boiling in a hot water supply system is possible, in a water supply system that supplies cold water, considering the energy consumption of boiling and cooling, it is realistic. poor.

[0013] Accordingly, the object of the present invention is not only the chemical injection treatment,
It is an object of the present invention to provide a deaeration / sterilization device as a simple water treatment device capable of effectively performing a high degree of deaeration and sterilization without using a filtration membrane such as a hollow fiber membrane or an ion exchange membrane.

[0014]

In order to solve the above-mentioned problems, a deaeration / sterilization apparatus according to the present invention comprises: a vacuum deaeration apparatus with low-temperature boiling of water to be treated by applying ultrasonic energy;
A circulating deaerator for pressurizing the degassed water degassed by the vacuum deaerator and adiabatically expanding the degassed water in a decompression vessel.

According to a preferred aspect of the present invention, the vacuum degassing device has a cylindrical degassing chamber depressurized by a vacuum pump, and is coaxially arranged in the degassing chamber and introduced from a water supply port. A water guide tube that gives the depressurized low-temperature boiling and cavitation phenomenon to the water that has been filled and overflows into the degassing chamber, and an ultrasonic wave that irradiates the water inside the water guide tube with an ultrasonic wave for inducing a cavitation phenomenon. A sonic vibrator, and a partition tube for partitioning an inner peripheral chamber and an outer peripheral chamber communicating with each other at a lower portion of the deaeration chamber, wherein the deaeration water stored in the outer circumference chamber is sent to the circulation deaerator. Means, for example an overflow, are provided.

According to a further preferred aspect of the present invention, the circulating deaerator includes a cylinder surrounding the outer periphery of the deaeration chamber and receiving the deaerated water from the deaeration chamber via the water guiding means. Circulating deaeration tank, a circulating pump that pressurizes and sends deaerated water stored in the circulating deaeration tank, and a deaerated water pressurized by the circulating pump is applied to a wall surface in the circulating deaeration tank. And an injection nozzle device for instantaneously adiabatic expansion by injection collision. The inside of the circulation deaeration tank is preferably depressurized by a common vacuum pump with a deaeration chamber of a vacuum deaerator.

In a further preferred aspect of the present invention, a cylindrical water retention tank surrounding the periphery of the circulation deaeration tank,
It further comprises valve means such as an electromagnetic valve for switching the discharge line of the circulating pump between the injection nozzle device and the water retention tank, wherein the water retention tank is connected to a treated water extraction system, and the inside of the water retention tank is preferably The pressure is reduced by a vacuum pump common to the deaeration chamber of the vacuum deaerator.

In the degassing / sterilizing apparatus according to the present invention, for example, when a certain required amount of water is received, the water supply and the water supply to the outside are stopped, and the circulation pump is operated at a preset flow rate to perform the circulation for a plurality of times. The deaeration is controlled by a timer such as a timer, and when the circulation deaeration is completed a predetermined number of times, the discharge line of the circulation pump is switched from the injection nozzle device to the water holding tank by the timer. As a result, a high degree of degassing is achieved by multiple circulation degassing, and at the same time, multiple depressurizations to high pressure in the circulation degassing system and cell destruction of microorganisms in degassed water by instantaneous adiabatic expansion are achieved. The present invention can provide a deaeration / sterilization apparatus that hardly requires consumable maintenance parts in addition to vacuum deaeration by ultrasonic low-temperature boiling in the preceding stage.

In the degassing / sterilizing apparatus of the present invention, firstly, the water in the water guide cylinder is induced to decompressed / low-temperature boil and cavitation by ultrasonic waves in the degassing chamber depressurized by the vacuum degassing apparatus, thereby dissolving the dissolved gas in the water. Air is released into the degassing chamber together with water as air bubbles, and the air is collected by suction from the degassing chamber with a vacuum pump to degas, so that decompression for degassing can be used for introducing water and also for boiling treated water. No heating energy is required.

When the water temperature in the water pipe is low, as in winter, the viscosity of the water increases, and the bubbles and water generated in the low-temperature water have a strong viscous force. Although it tends to be difficult, in the present invention, the vacuum deaerator irradiates ultrasonic vibration energy for inducing cavitation in water in the water guide tube by the ultrasonic vibrator, and from the water supply pipe into the water guide tube. Cavitation occurs in the introduced water.

Therefore, even if the degree of the pressure reduction is smaller than the case where the water causes boiling under reduced pressure only by the vacuum pressure, the cavitation phenomenon by the ultrasonic vibration energy induces a cavitation phenomenon in the water, and the dissolved gas in the water is introduced into the cavity. It is trapped as bubbles and is released into the degassing chamber as a gas by being released into the degassing chamber under reduced pressure along with the upward flow, so it is effective from the vacuum pump connected to the degassing chamber Can be degassed. Of course, it is effective to use ultrasonic irradiation together when the pressure in the degassing chamber is reduced to a sufficiently low pressure and the water in the water guide tube itself boils under reduced pressure.

In general, cavitation by ultrasonic waves
Occurs when sound pressure exceeds atmospheric pressure. Therefore, if the sound pressure of the ultrasonic wave is (p), the density of the water to be treated is (ρ), the vibration speed of the particles is (u), and the propagation speed of the wave is (c), p
= Ρcu. Also, the intensity of the sound wave, that is, the power density (I) is I = ρcu ² .

Since the density of water to be treated is greatly affected by the content of impurities such as volatile components and organic substances in the water, in the present invention, a plurality of ultrasonic vibrators are preferably mounted on the bottom surface of the water pipe, and The ultrasonic intensity is controlled by controlling the number of operating elements and the voltage and current of the driving power supply, and cavitation is generated in the water column in the water pipe before the degree of vacuum reaches the saturated water vapor pressure of the water in the degassing chamber. The gas is efficiently bubbled, and the bubbles are drawn into the upward rotating vortex by the vortex pump and converge on the axial center of the gas. The fine bubbles contained are removed by vacuum degassing in a degassing chamber.Thus, such degassing forms degassed water with extremely weak oxidizing power and then, for example, into an ion exchange resin cylinder. By Komu Ri, it is possible to effectively prevent deterioration of the ion exchange resin.

The improvement of the degassing effect by the ultrasonic vibration is remarkable, and unlike the conventional ultrasonic vibration method in which the water surface in a general water receiving tank is open to the atmosphere, the present invention employs a water pipe. Since the degassing chamber communicating with the upper part of the inside is performed under reduced pressure conditions, the gas corresponding to the equilibrium partial pressure does not dissolve again in the degassed water from the atmosphere, and the chlorine odor It is possible to obtain high-purity degassed water which is not nearly pure water.

Particularly preferably, the dimensions of the water guide tube and the frequency of the ultrasonic vibration are selected so that the standing wave of the ultrasonic vibration is given to the water filled in the water guide tube from the bottom of the water guide tube in the upright state. As a result, a standing wave of ultrasonic waves is formed in the water column filling the water pipe, and the maximum ultrasonic vibration energy is transmitted because the ultrasonic waves are completely reflected on the water surface, thereby instantaneously generating cavitation and dissolving The gas vigorously becomes bubbles and ruptures on the water surface, and is collected and removed from the depressurized upper degassing space in the water pipe, thereby further improving the degassing efficiency.

The deaerated water thus deaerated by the vacuum deaerator overflows into the inner peripheral chamber of the deaeration chamber surrounding the water pipe, and the gas generated by the deaeration is removed from the upper space by a vacuum pump. In the inner peripheral chamber, the deaerated water flows into the outer peripheral chamber through the communication passage at the bottom, and the deaerated water is calmed while being stored therein, so that the residual bubbles rise to the upper part. It is released into the space and is similarly collected by suction by a vacuum pump.

The degassed water in the outer peripheral chamber is sent to a circulating degassing tank surrounding the outer periphery of the degassing chamber by a water guiding means such as an overflow port or a piping system provided on the outermost wall of the degassing chamber, and further from there. It is sucked by the circulation pump and pressurized to high pressure. The degassed water pressurized to a high pressure by the circulation pump has already been compressed by pressurization because most of the gas content in the water has already been removed by the vacuum deaerator, and the water in the discharge line of the circulation pump has compressibility. Therefore, the cells of microorganisms that lived at 1 atm are filled with high-pressure water without obtaining a cushioning effect due to dissolved gas in water. In such a state, the high-pressure water reaches the injection nozzle, is injected from the nozzle into the circulating deaeration tank under reduced pressure at a high speed and a high pressure, and collides with the abutment wall in the circulating deaeration tank. Since the cells undergo adiabatic expansion, the cells of the microorganisms in the water are also rapidly expanded from the high-pressure state and must be destroyed instantaneously.

As described above, the circulating deaeration tank has an abutting wall against the jet water so as to face the outlet of the injection nozzle device, and this wall may use the inner wall of the circulating deaeration tank itself. Alternatively, a separate abutment member may be arranged and configured. When water jetted at high pressure and high speed from the injection nozzle collides with the abutment wall, the ultrafine bubbles remaining in the water are also instantaneously destroyed by the adiabatic expansion and collision energy, thereby causing the gas in the bubbles to degas. Gas is effectively collected by decompression, and for example, 0.1 ppm by performing multiple circulation degassing as described below.
A high degree of degassing to the following extremely low residual gas concentrations is possible.

The gas separated by the rupture of the bubbles is sucked and collected by the vacuum pump from the upper space in the circulation degassing tank.
Highly degassed water is stored in the circulating deaeration tank by natural fall.In this case, a guide gutter for sedation is installed in the circulating deaeration tank so that the deaerated water is gently introduced into the lower reservoir. May be arranged.

The circulation deaeration sterilization process by the operation of the circulation pump may be started, for example, after the deaeration of a required amount of supplied water by the vacuum deaerator is completed. in this case,
When the required amount of water is received while deaeration is performed by the vacuum deaerator, the water supply system and the water supply system to the outside are deactivated, and the circulating pump is operated at a preset constant discharge rate to perform the circulation deaeration for multiple times. Is managed by a timed device such as a timer. For example, the suction amount Q of the circulation pump is set equal to the sum of the supply amount Q1 of fresh water to the water supply port per unit time and the circulation flow rate Q2 of the circulation water flowing through the circulation system per unit time (that is, Q = Q1
+ Q2), the ratio m between the supply amount Q1 of fresh water and the circulation flow Q2
If the apparatus is operated under the condition that (m = Q2 / Q1) becomes larger than 1, the water accumulated in the circulating degassing tank can be repeatedly degassed, so that the residual dissolved gas concentration is ultimately increased. It is possible to obtain highly degassed water that has been lowered to as low as possible.

When the discharge line of the circulating pump is switched from the injection nozzle device to the water holding tank by the time limit device after a lapse of time sufficient to complete the predetermined number of circulation deaerations, a high degree of deaeration is performed by a plurality of circulation deaerations. The treated water that has been highly sterilized due to cell destruction of microorganisms in the degassed water by pressurization to high pressure and instantaneous adiabatic expansion multiple times in the circulating degassing system is transferred to a water holding tank. The water supply from the water retention tank to the outside can be appropriately performed under the monitoring control of a water supply valve and a water supply pump by a water level sensor or the like. The pressure in the circulation degassing tank and the water holding tank are both reduced by a vacuum pump. Preferably, the pressure in these tanks is reduced by a vacuum pump for reducing the pressure in the degassing chamber.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 schematically shows a preferred embodiment of the present invention. The main device is a vacuum deaerator having a water guide tube 3 and a cylindrical deaeration chamber 8, and a deaerator. It comprises a cylindrical circulating deaeration tank 19 surrounding the outside of the chamber 8 and a circulating deaerator equipped with a circulating pump 13 and an injection nozzle device 18. The water holding tank 20 is a concentric 3 centered on the water pipe 3.
It is formed by an integral multi-cylindrical hermetic tank 4 containing two main annular spaces.

The vacuum deaerator performs vacuum deaeration accompanied by low-temperature boiling of the water to be treated by applying ultrasonic energy to water in the water pipe 3, and a circulating deaerator uses the vacuum deaerator to deaerate. A circulating deaeration process is performed in which the deaerated water is pressurized to a high pressure by the circulating pump 13 and adiabatically expanded in the circulated deaeration tank 19 that has been decompressed.

First, the vacuum deaerator will be described. The vacuum deaerator is provided with a cylindrical deaeration chamber 8 the inside of which is depressurized by a vacuum pump 22, and is vertically arranged coaxially in the deaeration chamber. The water guide tube 3, an ultrasonic vibrator 31 for irradiating ultrasonic waves for inducing cavitation to water in the water guide tube, and an inner peripheral chamber 8 a and an outer peripheral chamber 8 b communicating the lower part of the deaeration chamber 8. The outer peripheral chamber 8b is provided with an overflow port 9 on the outermost wall as a water guiding means for feeding the deaerated water stored therein to the circulating deaerator.

The water pipe 3 is provided with a lower water supply port at a position above the bottom surface thereof, and is provided with a water stop valve 2 from the water supply pipe.
3. Inlet solenoid valve 24 and, for example, Japanese Patent Publication No. 6-38959
The inside is filled with water introduced through a scale removing electrode tube 1 as disclosed in Japanese Unexamined Patent Application Publication No. H10-293, and a low-pressure low-temperature boiling and cavitation phenomenon are given to the water filling the inside. A plurality of ultrasonic transducers 31 for irradiating water in the water guide cylinder with ultrasonic waves to induce a cavitation phenomenon are arranged at the bottom of the water guide cylinder 3, and each of the transducers is an excitation control device (not shown). Driven by the

The head of the water pipe 3 has an end face closed and a plurality of overflow ports 5 opened on the peripheral surface. A tubular collar 6 for prevention is fixed. Therefore, the water that overflows from the water pipe 3 flows into the inner peripheral chamber 8a of the deaeration chamber 8 through the overflow port 5, and further flows into the outer peripheral chamber 8b through the communication gap at the bottom. ing.

In the operating state, the inside of the deaeration chamber 8 is maintained in a high vacuum state by the vacuum pump 22, and the exhaust from the vacuum pump 22 is radiated into the atmosphere. When the water stop valve 23 and the inlet electromagnetic valve 24 are opened in this state, the water sent from the water tank (not shown) via the water supply pipe is descaled in the electrode tube 1, and then the water guide tube 3 under the reduced pressure state Is sucked into. In the state where the water is filled in the water pipe 3, the water pipe 3
When an ultrasonic wave of a predetermined frequency is irradiated on water in the water guide tube from the ultrasonic transducer 31 disposed at the bottom of the container, a cavitation phenomenon due to cavitation is induced in the water in the water guide tube 3 and the water is dissolved in the water. Gas is separated as bubbles. The low-temperature boiling phenomenon under reduced pressure also contributes to this bubble generation.

An upward flow is generated in the water in the water guide tube 3 by the negative pressure of the vacuum pump 22, and bubbles are entrained in the upward flow from the overflow port 5 at the head of the water guide tube 3 to the inner peripheral chamber 8.
The water blown out to a further flows into the outer peripheral chamber 8b through the communication gap at the bottom. In the upper space of the inner peripheral chamber 8a, the gas generated by the burst and release of bubbles when blown out from the overflow port 5 is sucked and collected by the vacuum pump 22, and similarly, the outer peripheral chamber 8a
In the space above b, the gas that floats in the water and is scattered on the water surface is sucked and collected by the vacuum pump 22 through the overflow port 9.

The water thus degassed is stored in a water storage space which communicates with the inner peripheral chamber 8a and the outer peripheral chamber 8b at the lower part of the deaeration chamber 8 in a high vacuum state. When the overflow exceeds the overflow port 9 opened at the outermost wall of the deaeration chamber 8 at a level substantially equal to the lower edge level of the cylindrical collar 6 for preventing scattering, the overflow from the overflow port 9 into the circulation deaeration tank 19. It is supposed to.

The circulating deaerator comprises a cylindrical circulating deaeration tank 19 which surrounds the outer periphery of the deaeration chamber 8 and receives deaeration water from the deaeration chamber 8 through the overflow port 9. A circulating pump 13 for pressurizing and sending deaerated water stored in the circulating deaeration tank to a high pressure and jetting the deaerated water pressurized by the circulating pump onto the inner wall surface of the circulating deaeration tank 19. An injection nozzle device 18 for instantaneously adiabatic expansion is provided, and the pressure in the circulation deaeration tank 19 is reduced by a common vacuum pump 22 with the deaeration chamber 8 of the vacuum deaeration device.

Further, the outer periphery of the circulation deaeration tank 19 is surrounded by an annular water retention tank 20, and pressurized deaeration water is supplied to the discharge line 14 of the circulation pump by an injection nozzle device 18.
An electromagnetic valve 15 that is opened only when the pressurized degassed water is sent to the water holding tank 20 is disposed. The outlet of the water retention tank 20 is connected to a water supply pump 21 constituting a treated water extraction system.
Is connected to a water supply pipe via a check valve 25 and a gate valve 28, and an expansion tank 26 and a pressure switch 27 are disposed between the check valve 25 and the gate valve 28.
The pressure in the water holding tank 20 is reduced by a vacuum pump 22 common to the deaeration chamber 8 and the circulation deaeration tank 19 of the vacuum deaerator.

The water level in the water storage space 10 in the circulation degassing tank 19 is monitored and controlled at two water levels detected by a water level detector 30a, and the water level in the water retention tank 20 is also detected by water level detectors 30b and 30c. It is monitored and controlled at four levels. An external controller (not shown) controls the inlet solenoid valve 2 based on signals from these water level detectors.
4. Circulation pump 13, solenoid valves 15, 16, water pump 2
1. The overall operation of the gate valve 28 is controlled.

The deaerated water is sent from the outer peripheral chamber 8b to the circulating deaeration tank through the overflow port 9, and when it reaches a required water level, the circulating pump 13 activates the deaerated water to increase the pressure. Pressed. The degassed water pressurized to a high pressure by the circulation pump 13 is sent from the pump discharge line 14 through the solenoid valve 15 to the injection nozzle device 18. Since most of the microorganisms have been removed and further compressed by pressurization, there is almost no compressible gas in the high-pressure degassed water in the discharge line 14 of the circulation pump 13, and therefore, microorganisms that lived at 1 atm. The cells are filled with high-pressure water without obtaining a cushion effect due to dissolved gas in water. In such a state, the high-pressure water reaches the injection nozzle device 18 via the electromagnetic valve 15, and from the nozzle, the circulating deaeration tank chamber 1 under reduced pressure
9 is injected into the circulation deaeration tank 19 at high speed and high pressure and collides with the inner wall surface of the circulation deaeration tank 19, thereby being subjected to instantaneous adiabatic expansion. It is destroyed and sterilized.

When the water jetted at high pressure and high speed from the jet nozzle device 18 collides with the abutting wall, the ultrafine bubbles remaining in the water are also instantaneously destroyed by the adiabatic expansion and the collision energy. The gas is released to the upper space in the circulation deaeration tank.

The gas separated by the adiabatic expansion is sucked and collected by the vacuum pump 22 from the upper space in the circulation deaeration tank 19.
On the other hand, the highly degassed water is stored in the water storage space of the circulation deaeration tank 19 by natural fall.

The circulating degassing sterilization process by the operation of the circulating pump 13 is started, for example, after the deaeration of a required amount of supplied water by the vacuum deaerator is completed. That is, when the required amount of water is deaerated by the vacuum deaerator, the water supply system and the water supply system to the outside are stopped, and the circulating pump 13 is operated at a preset constant discharge amount to perform a plurality of operations. The circulation deaeration is managed by a timed device such as a timer. For example, the suction amount Q of the circulation pump is set equal to the sum of the water supply amount Q1 of fresh water to the water supply port per unit time and the circulation flow rate Q2 of the circulation water flowing through the circulation system per unit time (that is, Q = Q1 +
Q2), when the circulation pump 13 is operated under the condition that the ratio m (where m = Q2 / Q1) of the supply amount Q1 of fresh water and the circulation flow rate Q2 is larger than 1, the inside of the circulation deaeration tank 19 The accumulated water can be repeatedly degassed, and it is possible to obtain highly degassed water whose residual dissolved gas concentration has been treated to an extremely low value of, for example, 0.1 ppm or less.

For example, assuming that the time required for circulating degassing required for reducing the concentration to the target dissolved gas concentration is T, the electromagnetic valve 15 is closed by the operation of a timed device such as an external sequencer when the time T has elapsed. Instead, the solenoid valve 16 is opened, and the discharge line of the circulation pump 13 is switched from the injection nozzle device 18 to the water holding tank 20. As a result, when the water level detector 30a detects that the water level has dropped to the low water level, the circulation pump 13 is stopped, and the circulation pump 13 is evacuated to a high degree by the required number of circulations and a plurality of times in the circulation deaeration system. Treated water highly sterilized by cell destruction of microorganisms in degassed water by pressurization to high pressure and instantaneous adiabatic expansion is stored in the water retention tank 20. The water supply from the water holding tank 20 to the outside is performed by a water supply pump 2 using water level detectors 30b and 30c.
1 and the gate valve 28 are monitored and controlled properly. In this case, by setting the water storage amount of the water holding tank 20 to at least 2 TQ times or more of the water supply amount per minute,
It is also possible to realize a continuous deaeration / sterilization operation in which the amount of water supplied to the outside and the amount of water supplied are equal.

The inside of the circulation deaeration tank 19 and the inside of the water holding tank 20 are simultaneously depressurized by a common vacuum pump 22, which is connected to the vacuum pump 22 via an independent electromagnetic valve via a branch line. The pressure can be reduced selectively, or separate vacuum pumps can be provided independently of each other, and various modifications can be made.

[0049]

As described above, the deaeration / sterilization apparatus according to the present invention is a vacuum deaeration apparatus in which the water to be treated is boiled at a low temperature by applying ultrasonic energy, and a deaeration apparatus using the vacuum deaeration apparatus. The system has a circulation deaerator that pressurizes the degassed water and adiabatically expands it in a decompression vessel. In addition to effective vacuum degassing by ultrasonic low-temperature boiling, advanced degassing by multiple circulation degassing is also provided. A large amount of sterilized sanitary water can be achieved by performing a high degree of sterilization by decomposing microorganisms in deaerated water by applying pressure to high pressure multiple times and instantaneously adiabatic expansion in the circulation deaeration system. It can be said that it is possible to provide a deaeration / sterilization apparatus which contributes to simple environmental preservation of operation and maintenance which requires almost no consumable maintenance parts in addition to vacuum deaeration by ultrasonic low-temperature boiling in the preceding stage. The effect is obtained.

Further, the deaeration / sterilization apparatus according to the present invention is a high-level deaeration that effectively combines circulation deaeration by pressurization and adiabatic expansion in addition to vacuum deaeration treatment using low-temperature boiling by high vacuum and ultrasonic cavitation. And sterilization treatment, it is possible to effectively deaerate not only dissolved oxygen in the water but also volatile gas components together with the sterilization. In addition to contributing to corrosion prevention of pipes and providing sanitary water, it can also be used for the production of highly purified water that is sensitive to dissolved gases and impurities, for example, for the production of semiconductor wafers and IC devices. It can effectively cope with a wide range of use for wastewater purification.

[Brief description of the drawings]

FIG. 1 is a system diagram showing an example of a preferred embodiment of the present invention.

[Explanation of symbols]

 3: water guide tube 7: partition tube 8: deaeration chamber 9: overflow port (water guide means) 13: circulation pump 15: solenoid valve 16: solenoid valve 18: injection nozzle device 19: circulation deaeration tank 20: water retention tank 21 : Water pump 22: Vacuum pump

 ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 4D011 AA16 AA18 AB01 AB05 AB07 AC01 AC03 AC04 AC06 AD01 AD02 AD06 4D037 AA01 AB03 AB11 AB18 BA23 BA24 BA26 BB01 BB02 BB04 BB05 BB07

Claims (5)

[Claims] 1. A vacuum deaerator with low-temperature boiling of water to be treated by applying ultrasonic energy, and a circulation for pressurizing deaerated water deaerated by the vacuum deaerator and adiabatically expanding it in a decompression vessel. A deaeration / sterilization device comprising a deaeration device. 2. The vacuum deaerator is provided with a cylindrical deaeration chamber depressurized by a vacuum pump, and coaxially disposed in the deaeration chamber, and depressurizes water introduced from a water supply port to fill the inside. A water guide tube that gives a low-temperature boiling and hollowing phenomenon to overflow into the degassing chamber, an ultrasonic vibrator that irradiates ultrasonic waves for inducing a hollowing phenomenon to water inside the water guide cylinder, and a degassing chamber. A partition tube for partitioning an inner peripheral chamber and an outer peripheral chamber communicating with each other at a lower portion, wherein the outer peripheral chamber is provided with a water guiding means for sending deaerated water stored therein to the circulation deaerator. The deaeration / sterilization device according to claim 1, wherein 3. A circulating deaeration tank, wherein the circulating deaerator surrounds an outer periphery of the deaeration chamber and receives deaerated water from the deaeration chamber through the water introducing means. A circulating pump that pressurizes and sends degassed water stored in the degassing tank to a high pressure, and instantaneously adiabatic expansion by injecting and colliding degassed water pressurized by the circulating pump with a wall in the circulating degassing tank. The deaeration and sterilization apparatus according to claim 2, further comprising an injection nozzle device for causing the circulation and the deaeration tank to be depressurized by a vacuum pump. 4. A water holding tank having a cylindrical shape surrounding the circulation deaeration tank, and valve means for switching a discharge line of the circulation pump between the injection nozzle device and the water holding tank. 4. The deaeration / sterilization apparatus according to claim 3, wherein the dewatering / sterilizing apparatus is connected to a treated water extraction system, and the inside of the water holding tank is depressurized by a vacuum pump. 5. During the operation of the circulation pump, the water supply and the water supply to the outside are stopped, and when the circulation deaeration for a predetermined number of times is completed during this time, the discharge line of the circulation pump is kept from the injection nozzle device. The deaeration / sterilization apparatus according to claim 4, further comprising a time limiter for switching to a tank.