JP2000314606A - Linear position detector - Google Patents

Linear position detector

Info

Publication number
JP2000314606A
JP2000314606A JP11123840A JP12384099A JP2000314606A JP 2000314606 A JP2000314606 A JP 2000314606A JP 11123840 A JP11123840 A JP 11123840A JP 12384099 A JP12384099 A JP 12384099A JP 2000314606 A JP2000314606 A JP 2000314606A
Authority
JP
Japan
Prior art keywords
stator
winding
output
rotor
output voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11123840A
Other languages
Japanese (ja)
Inventor
Kanji Kitazawa
完治 北沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP11123840A priority Critical patent/JP2000314606A/en
Publication of JP2000314606A publication Critical patent/JP2000314606A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To detect signal even with a large gap between a stator and a rotor by providing a surface of the rotor facing to the stator with a waveform part which the gap permeance to the stator varies as sine wave against moving distance. SOLUTION: To a stator 1 having a plurality of projected magnetic poles 2 placed by exciting winding 3 and two-phase output winding 4, a long rotor 5 reciprocally movable is provided. On the opposite side of the rotor 5 to the stator 1, a waveform part 6 repeating with a specific period is formed so that the gap permeance to the stator 1 varies in sine wave to the moving distance. With this constitution, by impressing a specific exciting signal to the exciting winding 3 of the stator 1 and linearly moving the rotor 5, SIN output voltage and COS output voltage are output from the two-phase output winding 4 and so with this two-phase output voltage. By calculating tan-1 (SIN output/COS output) from the two-phase output voltage, linear position signal is detected.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、直線位置検出装置
に関し、特に、長手形状の可動子に固定子とのギャップ
パーミアンスが正弦波状に変化する波形部を形成し、こ
の可動子の直線位置変化を非接触で検出するための新規
な改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear position detecting device, and more particularly, to a linearly movable member having a longitudinally extending movable member having a sinusoidal wave-shaped portion whose gap permeance with a stator varies sinusoidally. And a new improvement for detecting contactlessly.

【0002】[0002]

【従来の技術】従来、用いられていたこの種の直線位置
検出装置としては、リニアエンコーダ、マグネスケー
ル、アブソコーダ(登録商標)等が採用されている。
2. Description of the Related Art A linear encoder, a magnescale, an Absocoder (registered trademark) and the like are conventionally used as this kind of linear position detecting device.

【0003】[0003]

【発明が解決しようとする課題】従来の直線位置検出装
置は、以上のように構成されていたため、次のような課
題が存在していた。すなわち、リニアエンコーダ及びマ
グネスケール共、可動側と固定側のクリアランスが小さ
くないと分解能が得られないか、又は出力信号が小さく
て検出不能となるため、用途が限定されていた。また、
アブソコーダは、可動側(固定側)が固定側(可動側)
のコイルの中を通る構造であるため、用途が限定される
ことになっていた。従って、リニアモータを高速で使用
すると、発熱等によってモータ機構部の寸法が変化して
くるため、リニアテーブル等の可動側と固定側との間の
間隙が変化するため、前述の従来構成のリニアエンコー
ダ及びマグネスケールでは検出が困難であった。また、
接触タイプのセンサでは、高速使用時の耐久性に問題が
あった。
Since the conventional linear position detecting device is configured as described above, there are the following problems. That is, for both the linear encoder and the magnescale, the resolution cannot be obtained unless the clearance between the movable side and the fixed side is small, or the output signal is too small to detect, so the use is limited. Also,
For the ABSOCODER, the movable side (fixed side) is fixed side (movable side)
Because of the structure that passes through the coil, the use is limited. Therefore, when a linear motor is used at a high speed, the dimensions of the motor mechanism change due to heat generation and the like, and the gap between the movable side and the fixed side of a linear table or the like changes. Detection was difficult with an encoder and a magnescale. Also,
The contact type sensor has a problem in durability at the time of high-speed use.

【0004】本発明は、以上のような課題を検出するた
めになされたもので、特に、長手形状の可動子に固定子
とのギャップパーミアンスが正弦波状に変化する波形部
を形成し、この可動子の直線位置変化を非接触で検出す
るようにした直線位置検出装置を提供することを目的と
する。
SUMMARY OF THE INVENTION The present invention has been made in order to detect the above-described problems. In particular, a wave-shaped portion in which a gap permeance with a stator changes in a sinusoidal manner is formed on a longitudinal movable element. It is an object of the present invention to provide a linear position detecting device that detects a change in the linear position of a child without contact.

【0005】[0005]

【課題を解決するための手段】本発明による直線位置検
出装置は、直線長手形状の可動子と、前記可動子の一面
に対応して励磁巻線とn相の出力巻線を有する固定子
と、前記可動子の前記固定子と対面する一面に形成され
前記固定子とのギャップパーミアンスが移動距離に対し
て正弦波状に変化する波形部とを有し、前記励磁巻線に
励磁信号を入力した状態で前記可動子を移動させること
により、前記出力巻線から直線位置信号を出力する構成
である。
According to the present invention, there is provided a linear position detecting device comprising: a movable member having a linear longitudinal shape; and a stator having an exciting winding and an n-phase output winding corresponding to one surface of the movable member. A wave portion formed on one surface of the mover facing the stator and having a gap permeance with the stator that changes in a sinusoidal manner with respect to a moving distance, and an excitation signal is input to the excitation winding. By moving the mover in the state, a linear position signal is output from the output winding.

【0006】[0006]

【発明の実施の形態】以下、図面と共に本発明による直
線位置検出装置の好適な実施の形態について説明する。
図1において符号1で示されるものは複数の突出した磁
極2を有する固定子であり、この各磁極2には図2の励
磁巻線3及び2相の出力巻線4が設けられている。前記
固定子1に対応して長手形状の可動子5が直線往復自在
に設けられ、この可動子5の固定子1と対面する一面に
は、所定の周期で反覆する波形部6が形成されている。
この波形部6は、固定子1とのギャップパーミアンスが
移動距離に対して正弦波状に変化するように構成されて
いる。なお、固定子1の下端と可動子5の上端との間に
は間隙dが形成されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a linear position detecting device according to the present invention will be described below with reference to the drawings.
In FIG. 1, reference numeral 1 denotes a stator having a plurality of projecting magnetic poles 2. Each magnetic pole 2 is provided with an exciting winding 3 and a two-phase output winding 4 shown in FIG. Corresponding to the stator 1, a longitudinal movable element 5 is provided so as to freely reciprocate linearly. On one surface of the movable element 5 facing the stator 1, a corrugated portion 6 that repeats at a predetermined cycle is formed. I have.
The waveform portion 6 is configured so that the gap permeance with the stator 1 changes in a sinusoidal manner with respect to the moving distance. Note that a gap d is formed between the lower end of the stator 1 and the upper end of the mover 5.

【0007】前記波形部6は、さらに詳細に説明する
と、図4に示されるように、固定子1の長さをLとし、
4分割して、L/4,L/2,L×3/4及びLとする
と共に、可動子5の長さをL/4,x,Lと設定する
と、固定子1と可動子5のギャップ式は、次の数1の第
1式の通りである。
More specifically, as shown in FIG. 4, the corrugated portion 6 has a length L of the stator 1,
When the length is set to L / 4, L / 2, L × 3/4 and L, and the length of the mover 5 is set to L / 4, x, L, the stator 1 and the mover 5 are divided into four. The gap equation is as the first equation of the following equation 1.

【0008】[0008]

【数1】 (Equation 1)

【0009】また、前述の励磁巻線3及び出力巻線4
は、図5に示されるように、特開平8−178611号
公報にて開示された周知の正弦波分布巻きで構成されて
いる。なお、スロット数としては12個の場合について
説明するが、図1の固定子1ではその数を省略して簡略
化して少ない数で示している。次に、2相で互いに位相
がL/4異なって各スロット2に1スロットピッチ(ス
ロット飛びを伴うことなく、各スロットに順次巻線を入
れる状態)で巻かれた出力巻線4をなすSIN出力巻線
4B及びCOS出力巻線4Aは、図5で示される状態の
ように、その誘起電圧分布が各々正弦波分布となるよう
に分布巻き(その巻線の巻き数(量)も正弦波分布状と
なる)で構成されている。前記各出力巻線4B,4Aの
巻線は、SIN(COS)に比例したターン数でかつそ
の極性(正極又は逆巻」は、SIN出力電圧4BaとC
OS出力電圧4Aaの各スロット位置での極性に合うよ
うに、励磁巻線3の極性を考慮しつつ決定する。
The above-described excitation winding 3 and output winding 4
As shown in FIG. 5, is composed of a well-known sinusoidal distribution winding disclosed in Japanese Patent Application Laid-Open No. 8-178611. Although the case of 12 slots will be described, the stator 1 in FIG. 1 is omitted and simplified to show a small number. Next, the SIN which forms the output winding 4 wound in each slot 2 at a one-slot pitch (a state in which windings are sequentially inserted into each slot without causing any slot skipping) with two phases different in phase from each other by L / 4. As shown in FIG. 5, the output winding 4B and the COS output winding 4A are distributed winding (the number of windings (amount) of the winding is also sinusoidal) such that the induced voltage distribution becomes a sinusoidal distribution. (Distributed). The winding of each of the output windings 4B and 4A has a number of turns proportional to SIN (COS) and its polarity (positive or reverse winding) depends on the SIN output voltage 4Ba and CIN.
The polarity is determined in consideration of the polarity of the exciting winding 3 so as to match the polarity of the OS output voltage 4Aa at each slot position.

【0010】すなわち、図5に示すように、励磁巻線3
が正巻で出力巻線4B,4Aが正巻の場合は同相出力、
励磁巻線3が正巻で出力巻線4B,4Aが逆巻の場合は
逆相出力、励磁巻線3が逆巻で出力巻線4B,4Aが正
巻の場合は逆相出力、励磁巻線3が逆巻で出力巻線4
B,4Aが逆巻の場合は同相出力となる巻線構造を前提
として、SIN出力電圧4Ba及びCOS出力電圧4A
aがSIN状及びCOS状となるように各出力巻線4
B,4Aの極性(正巻か逆巻)を決める。
That is, as shown in FIG.
Is a positive winding and the output windings 4B and 4A are positive windings,
When the exciting winding 3 is normal winding and the output windings 4B and 4A are reverse winding, a negative phase output is provided. When the exciting winding 3 is reverse winding and the output windings 4B and 4A are positive winding, a negative phase output is provided. Wire 3 is reverse winding and output winding 4
When the windings B and 4A are in reverse winding, the SIN output voltage 4Ba and the COS output voltage 4A
a so that each output winding 4 has a SIN shape and a COS shape.
Determine the polarity of B, 4A (forward or reverse).

【0011】従って、SIN用及びCOS用からなる前
記出力巻線4B,4Aは、その誘起電圧分布が各々正弦
波分布となるように前述の周知の分布巻き(その巻数及
び量も正弦波分布状となる)で構成されているため、励
磁巻線3か正巻で出力巻線4B,4Aが正巻の場合は同
相出力、励磁巻線3が正巻で出力巻線4B,4Aが逆巻
の場合は逆相出力、励磁巻線3が逆巻で出力巻線4B,
4Aが正巻の場合は逆相出力、励磁巻線3が逆巻で出力
巻線4B,4Aが逆巻の場合は同相出力となるように設
定されていることによって、SIN出力電圧及びCOS
出力電圧がSIN状及びCOS状となる。
Therefore, the output windings 4B and 4A for SIN and COS are provided with the above-mentioned well-known distributed windings (the number of windings and the amount thereof are also sinusoidally distributed) so that the induced voltage distribution becomes a sinusoidal distribution. ), The output windings 4B and 4A have the same phase output when the exciting winding 3 is in the positive winding and the output windings 4B and 4A are in the positive winding. , The output winding 4B,
The SIN output voltage and the COS output are set when the winding 4A is set to have the opposite phase output when the winding is positive, and when the exciting winding 3 is set to the reverse winding and the output windings 4B and 4A are set to have the same phase output when the windings 4A and 4A are reversed.
The output voltage becomes SIN and COS.

【0012】前述の構成において、固定子1の励磁巻線
3に所定の励磁信号を印加して励磁した状態で、可動子
5を直線移動させると、出力巻線4B,4Aからは、図
5で示されるSIN出力電圧4Ba及びCOS出力電圧
4Aaが出力され、この2相出力電圧からtan-1(S
IN出力/COS出力)を計算することにより、直線位
置信号を得ることができる。なお、この場合、この直線
位置信号はSIN出力とCOS出力の2相出力の比の関
数であるため、固定子1と可動子5間のギャップが種々
変化しても、比自体は変化しないで、直線位置信号も変
化することはない。
In the above-described configuration, when the movable element 5 is moved linearly in a state where a predetermined excitation signal is applied to the excitation winding 3 of the stator 1 and the excitation is performed, the output windings 4B and 4A output signals from FIG. Are output as SIN output voltage 4Ba and COS output voltage 4Aa, and tan −1 (S
By calculating (IN output / COS output), a linear position signal can be obtained. In this case, since the linear position signal is a function of the ratio of the two-phase output of the SIN output and the COS output, even if the gap between the stator 1 and the mover 5 changes variously, the ratio itself does not change. Also, the linear position signal does not change.

【0013】[0013]

【発明の効果】本発明による直線位置検出装置は、以上
のように構成されているため、次のような効果を得るこ
とができる。すなわち、固定子と対面する可動子の一面
に、固定子とのギャップパーミアンスが移動距離に対し
て正弦波状に変化する波形状に形成され、構成自体が周
知の可変リラクタンス型のレゾルバを直線的に展開して
リニア化した形状であるため、固定子と可動子との間の
ギャップが大きくても信号検出が可能である。また、可
動子がコアのみであるため、高速加減速及び振動や衝撃
に強く、悪環境下でも良好な検出を行うことができる。
さらに、2相の出力電圧はレゾルバと等価であるため、
周知のR/D変換器によってデジタル信号化が可能であ
る。
Since the linear position detecting device according to the present invention is configured as described above, the following effects can be obtained. That is, on one surface of the mover facing the stator, a gap permeance with the stator is formed in a wave shape that changes in a sinusoidal manner with respect to the moving distance, and the configuration itself is linearly changed by a variable reluctance type resolver. Since the shape is expanded and linearized, signal detection is possible even if the gap between the stator and the mover is large. Also, since the mover is only the core, it is resistant to high-speed acceleration / deceleration, vibration and impact, and can perform good detection even in a bad environment.
Further, since the two-phase output voltage is equivalent to the resolver,
It can be converted into a digital signal by a known R / D converter.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による直線位置検出装置を示す構成図で
ある。
FIG. 1 is a configuration diagram showing a linear position detecting device according to the present invention.

【図2】図1の固定子の巻線を示す構成図である。FIG. 2 is a configuration diagram illustrating a winding of a stator of FIG. 1;

【図3】図1の右側面図である。FIG. 3 is a right side view of FIG. 1;

【図4】図1の構成の動作説明図である。FIG. 4 is an operation explanatory diagram of the configuration of FIG. 1;

【図5】図1の動作を説明する波形図である。FIG. 5 is a waveform diagram illustrating the operation of FIG.

【符号の説明】[Explanation of symbols]

1 固定子 3 励磁巻線 4 出力巻線 5 可動子 6 波形部 DESCRIPTION OF SYMBOLS 1 Stator 3 Excitation winding 4 Output winding 5 Mover 6 Waveform part

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F063 AA02 BB03 BC10 CA29 DA01 DA05 DB04 DD06 EA02 GA22 GA33 GA36 GA47 GA69 KA02 LA19 2F077 AA42 FF03 FF11 FF34 FF39 JJ03 JJ06 JJ22 NN05 PP06 PP26 QQ03 RR03 TT05  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F063 AA02 BB03 BC10 CA29 DA01 DA05 DB04 DD06 EA02 GA22 GA33 GA36 GA47 GA69 KA02 LA19 2F077 AA42 FF03 FF11 FF34 FF39 JJ03 JJ06 JJ22 NN05 PP06 PP26 QQ03 RR03 TT05

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 直線長手形状の可動子(5)と、前記可動
子(5)の一面に対応して励磁巻線(3)とn相の出力巻線
(4)を有する固定子(1)と、前記可動子(5)の前記固定子
(1)と対面する一面に形成され前記固定子(1)とのギャッ
プパーミアンスが移動距離に対して正弦波状に変化する
波形部(6)とを有し、前記励磁巻線(3)に励磁信号を入力
した状態で前記可動子(5)を移動させることにより、前
記出力巻線(4)から直線位置信号を出力する構成とした
ことを特徴とする直線位置検出装置。
1. A mover (5) having a linear longitudinal shape, an exciting winding (3) and an n-phase output winding corresponding to one surface of the mover (5).
A stator (1) having (4) and the stator of the mover (5)
(1) having a waveform portion (6) formed on one surface facing the stator and having a gap permeance with the stator (1) that varies sinusoidally with respect to the moving distance, and exciting the excitation winding (3). A linear position detecting device, wherein a linear position signal is output from the output winding (4) by moving the mover (5) while a signal is being input.
JP11123840A 1999-04-30 1999-04-30 Linear position detector Pending JP2000314606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11123840A JP2000314606A (en) 1999-04-30 1999-04-30 Linear position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11123840A JP2000314606A (en) 1999-04-30 1999-04-30 Linear position detector

Publications (1)

Publication Number Publication Date
JP2000314606A true JP2000314606A (en) 2000-11-14

Family

ID=14870696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11123840A Pending JP2000314606A (en) 1999-04-30 1999-04-30 Linear position detector

Country Status (1)

Country Link
JP (1) JP2000314606A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008298676A (en) * 2007-06-01 2008-12-11 Tamagawa Seiki Co Ltd Linear sensor
JP2009002665A (en) * 2007-06-19 2009-01-08 Tamagawa Seiki Co Ltd Redundant type linear sensor
JP2009128134A (en) * 2007-11-21 2009-06-11 Tamagawa Seiki Co Ltd Linear resolver and displacement detecting device
JP2011247592A (en) * 2010-05-21 2011-12-08 Tamagawa Seiki Co Ltd Linear sensor
JP2012032199A (en) * 2010-07-29 2012-02-16 Tamagawa Seiki Co Ltd Rotary sensor
JP2012042273A (en) * 2010-08-17 2012-03-01 Tamagawa Seiki Co Ltd Multiple redundant type linear sensor
WO2021240059A1 (en) * 2020-05-27 2021-12-02 Lappeenrannan-Lahden Teknillinen Yliopisto Lut Variable reluctance position sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008298676A (en) * 2007-06-01 2008-12-11 Tamagawa Seiki Co Ltd Linear sensor
JP2009002665A (en) * 2007-06-19 2009-01-08 Tamagawa Seiki Co Ltd Redundant type linear sensor
JP2009128134A (en) * 2007-11-21 2009-06-11 Tamagawa Seiki Co Ltd Linear resolver and displacement detecting device
JP4654369B2 (en) * 2007-11-21 2011-03-16 多摩川精機株式会社 Linear resolver and displacement detector
JP2011247592A (en) * 2010-05-21 2011-12-08 Tamagawa Seiki Co Ltd Linear sensor
JP2012032199A (en) * 2010-07-29 2012-02-16 Tamagawa Seiki Co Ltd Rotary sensor
JP2012042273A (en) * 2010-08-17 2012-03-01 Tamagawa Seiki Co Ltd Multiple redundant type linear sensor
WO2021240059A1 (en) * 2020-05-27 2021-12-02 Lappeenrannan-Lahden Teknillinen Yliopisto Lut Variable reluctance position sensor

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