JP2000306877A5 - - Google Patents

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Publication number
JP2000306877A5
JP2000306877A5 JP1999117690A JP11769099A JP2000306877A5 JP 2000306877 A5 JP2000306877 A5 JP 2000306877A5 JP 1999117690 A JP1999117690 A JP 1999117690A JP 11769099 A JP11769099 A JP 11769099A JP 2000306877 A5 JP2000306877 A5 JP 2000306877A5
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JP
Japan
Prior art keywords
wafer
manufacturing
semiconductor device
pins
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999117690A
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English (en)
Japanese (ja)
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JP2000306877A (ja
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Publication date
Application filed filed Critical
Priority to JP11769099A priority Critical patent/JP2000306877A/ja
Priority claimed from JP11769099A external-priority patent/JP2000306877A/ja
Publication of JP2000306877A publication Critical patent/JP2000306877A/ja
Publication of JP2000306877A5 publication Critical patent/JP2000306877A5/ja
Pending legal-status Critical Current

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JP11769099A 1999-04-26 1999-04-26 半導体製造装置および半導体装置の製造方法 Pending JP2000306877A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11769099A JP2000306877A (ja) 1999-04-26 1999-04-26 半導体製造装置および半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11769099A JP2000306877A (ja) 1999-04-26 1999-04-26 半導体製造装置および半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2000306877A JP2000306877A (ja) 2000-11-02
JP2000306877A5 true JP2000306877A5 (ko) 2004-11-04

Family

ID=14717895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11769099A Pending JP2000306877A (ja) 1999-04-26 1999-04-26 半導体製造装置および半導体装置の製造方法

Country Status (1)

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JP (1) JP2000306877A (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW490756B (en) 1999-08-31 2002-06-11 Hitachi Ltd Method for mass production of semiconductor integrated circuit device and manufacturing method of electronic components
JP7390142B2 (ja) * 2019-09-20 2023-12-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法
CN112735989B (zh) * 2020-12-31 2022-12-20 至微半导体(上海)有限公司 一种适用于供酸系统的高洁净湿法设备
CN112786493B (zh) * 2020-12-31 2022-12-20 至微半导体(上海)有限公司 一种有效防止晶圆交叉污染的气流控制模组
CN112735985B (zh) * 2020-12-31 2022-12-20 至微半导体(上海)有限公司 一种单片式湿法清洗设备

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