JP2000298141A - Inspection device for probe card - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate exchanging work of a probe card. SOLUTION: This probe card inspection device 10 has a frame forming a space above a contact plate contacted with needle tips of a probe card; a card holder 114 having an opening in a position corresponding to the contact plate, disposed in the space; and a connection device connected to probes of the probe card, disposed on the probe card. The card holder 114 is installed in the frame by an installing means to move between a first position allowing positioning of the opening above the contact plate and a second position allowing positioning of the probe card at least outside the space at a horizontal interval from the first position. Thereby, the probe card can be changed outside the space.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an apparatus for inspecting a probe card used for a conduction test of an object to be inspected such as an integrated circuit.

[0002]

2. Description of the Related Art Generally, a probe card is inspected during manufacture, after manufacture, during use, and the like, for variations in the height position of the probe tip and for the quality of contact with electrodes.

In this type of conventional inspection apparatus, a base plate having an opening is provided in parallel with the contact plate above a contact plate with which a needle tip contacts, and a test board is provided with a plurality of hook-shaped so as to close the opening of the base frame. The probe card is mounted on the base frame in parallel with the base frame by the board holder, and the probe card is mounted on the lower side of the test board via an electrical connection device.

[0004] The test board is mounted on the base frame at a plurality of locations on the outer peripheral portion by board holding.
At the time of inspection, the probe card and the contact plate are relatively pressed, and the probe tip of the probe contacts the contact plate. At this time, the reaction force acting on the probe card (that is, the reaction force against the stylus pressure) is transmitted to the base frame via the electrical connection device, the test board, and the board holder.

[0005] In the above inspection apparatus, the replacement of the probe card is performed by removing the test board from the base frame, removing the probe card from the electrical connection device and the test board, and then inserting a new probe card into the electrical connection device and the test board. Assembling is performed by assembling the test board to the base frame.

[0006]

Therefore, in the above-described inspection apparatus, the replacement work of the probe card is troublesome. In particular, in the case of a large probe card having a large number of probes, the electrical connection device and the test board also become large, and the inspection device itself becomes large. Therefore, it is difficult to handle the probe card, the electrical connection device, and the test board, which is difficult for an operator. It is a danger.

Therefore, in the probe card inspection apparatus, it is important to easily replace the probe card.

[0008]

A probe card inspection apparatus according to the present invention includes a contact plate with which a probe tip of a probe card is in contact, a frame forming a space above the contact plate, and a frame disposed in the space. A card holder having an opening at a position corresponding to the contact plate and having a receiving portion for receiving the probe card around the opening; and a card holder disposed on the probe card arranged in the card holder. A connection device connected to a probe of the probe card, a first position in which the card holder is in the frame, the opening is located above the contact plate, and at least the probe card is A second position located outside of the space and movable to a second position horizontally spaced from the first position. Attach assembly and means.

[0009] The probe card is arranged in the receiving portion of the card holder with the probe tip of the probe protruding from the opening of the card holder toward the contact plate, and the card holder is moved to the first position. In that state,
The probe card is pressed against the contact plate.

When replacing the probe card, the card holder is moved from the first position to the second position. As a result, the probe card is moved out of the space, so that the probe card can be lifted and removed from the card holder, and a new probe card can be placed in the card holder from above.

As a result, according to the inspection apparatus of the present invention,
Compared to the conventional apparatus, the workability of replacing the probe card is better, the replacement work is safer, the replacement work can be performed quickly, and no skill is required.

[0012] The inspection device may further include a second base located above the contact plate, the second base being removably receiving the card holder and corresponding to the contact plate.
The card holder can be arranged in a state where a part of the card holder is located in the second opening. With this configuration, the needle tip can be made to approach the contact plate.

[0013] The assembling means includes a pair of rails which are arranged on the frame at an interval and extend horizontally.
A slide tray movably arranged along the rail, an elevating ring rotatably arranged on the slide tray, and an elevating tray movably arranged inside the elevating ring, wherein the card An elevating tray on which a holder is disposed, one of the elevating tray and the elevating ring has a locking portion, and the other of the elevating tray and the elevating ring is slidably locked by the locking portion Can be provided. In this case, a probe card can be placed on the lifting tray. With this configuration, the elevating tray can be raised and lowered by rotating the elevating ring, so that the elevating tray is always lowered so that the probe tip of the probe protrudes from the opening, and when the probe card is replaced. Can raise the elevating tray to position the probe tip above the opening, the result being that the probe tip does not hinder the slide tray withdrawal, thus making the replacement operation easier.

[0014] The inspection device may further include a pressing plate disposed above the connection device and movably disposed in the frame in a vertical direction, and a pressing device supported by the frame and pressing the pressing plate against the connection device. Body. With this configuration, the reaction force generated when the needle tip is pressed against the contact plate can be transmitted to the frame via the connection device, the pressing plate, and the pressing body.

[0015] The connection device is a plate-shaped connection device disposed above the probe card, the connection device having a plurality of first conductors connected to the probes of the probe card, and the connection device. A plurality of second conductors connected to the first conductor, a repeater disposed on the frame, the connector, and the And a coupling mechanism for releasably coupling the repeater, wherein the connector may be assembled to the pressing plate. By doing so, the engagement between the connector and the repeater is released,
By raising the pressure plate, the connector can be disconnected from the repeater, so that the probe can be replaced without having to pull out the repeater with both the slide and the rate. In addition, by using the repeater in common for various probe cards, by replacing the connection device with a connection device corresponding to a new probe card when replacing the probe card,
The same inspection apparatus can be used to inspect a plurality of types of probe cards.

The relay and the pressing plate are respectively
It can be assembled to the pressing plate and the pressing body.
With this configuration, the relay can be separated from the connector by raising the pressing body.

The coupling mechanism includes a ring disposed on the pressing plate or the repeater so as to be rotatable around the connection device at an angle, and a ring that receives the connection device relatively movably; A drive mechanism disposed on the pressing plate or the relay to rotate the connector angularly with respect to the connecting device, wherein the connector can be released from the ring with the angular rotation of the ring. It may be stopped.
With this configuration, the connector can be attached to and detached from the pressing plate by rotating the ring.

The coupling mechanism may further include a plurality of rollers disposed on one of the connector and the rotation ring at an interval in the rotation direction of the rotation ring, and a plurality of rollers at an interval in the rotation direction of the rotation. A plurality of locking pieces disposed on the other of the connector and the rotating ring, the locking pieces being releasably locked to the roller, and the rotating ring is rotated angularly with respect to the connecting device. A drive mechanism disposed on the pressing plate. With this configuration, the roller and the engaging piece can be engaged and released only by slightly rotating the rotating ring.

The frame is an upper frame disposed on the lower frame so as to form the space in cooperation with a lower frame disposed on the base at an interval in the left-right direction. An upper frame that supports and opens the space upward, the card holder being able to enter and exit the space via a forward opening of the lower frame.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a horizontal direction in which a slide tray described later is taken in and out is referred to as a front-back direction (Y direction), and a horizontal direction perpendicular to the front-back direction is referred to as a left-right direction (X direction).

Referring to FIGS. 1 to 4, a probe card inspection device 10 is used for inspecting a probe card 12. As shown in FIG. 4, the probe card 12 has a plurality of needle-type probes 14 made of conductive thin metal wires mounted on a wiring board 16 with their needle tips protruding downward. The probe tip of each probe 14 is pressed against the electrode portion of the device under test during a power-on test of the device under test such as an integrated circuit. The probe card 12 includes a probe 14
A plurality of tester lands 18 (see FIG. 10) for connecting to a tester (not shown) are provided on the outer peripheral edge of the wiring board 16.

The inspection apparatus 10 uses a rectangular parallelepiped casing 20 as a carriage, and uses an upper plate thereof as a plate-like base, that is, a base plate 22. The housing 20 is two-dimensionally movable by a plurality of casters 24. An operation panel 26 for inputting various information and commands is provided on the base 22.
And a monitor 28 for displaying an inspection state, and a frame 30 for forming an arrangement space for various devices described later.

The base 22 has a circular opening 32 at the center. The frame 30 includes a pair of lower frames 34 spaced apart in the front-rear direction (the left-right direction in FIG. 4) and a U-shaped upper frame 36 that opens downward. Both lower frames 34 are arranged on the base 22 such that the space above the opening 32 enters between them. The upper frame 36 is provided with a shaft 38 on top of one lower frame 34.
For pivotal movement.

The upper frame 36 always has the frame 30
The shaft 38 is rotated by a motor 40 when the inner space is opened and closed. While closing the inner space, the upper frame 36 is prevented from opening the inner space by a hook 42 provided on the lower frame 34. Hook 42
The hook 42 is moved by a suitable driving mechanism 43 such as an air cylinder to a position where the hook 42 prevents the upper frame 36 from opening the inner space and a position where the opening is permitted.

The upper frame 36 has a rectangular pressing plate 4
4 are arranged. The pressing plate 44 is connected to the upper frame 36.
Is moved in the up-down direction (Z direction) by a driving mechanism 46 such as an air cylinder provided in the camera. The pressing plate 44 includes a plurality of guide rails 4 provided inside the upper frame 36.
The upper frame 36 has a plurality of openings 50 around the drive mechanism 46.

As shown in FIGS. 5 and 6, a contact plate 52 made of a conductive material is assembled on a stage 54 arranged in the housing 20. The stage 54 is a plate-like stage base 5 provided in the housing 20.
6.

The stage 54 is movable along a plurality of Y guide rails 58 extending in the left-right direction (left-right direction in FIG. 6), and is moved in the front-rear direction (left-right direction in FIG. 5). X arranged as possible
The stage includes a stage 62, a Z stage 64 that is moved in the vertical direction by the movement of the X stage 62, and a moving mechanism 66 that moves the X stage 62 in the X direction.

The Y stage 60 is in the form of a box that is open upward, and has a plurality of guide rails 68 extending vertically. The Z stage 64 has its guide portion 64a slidably fitted on the guide rail 68.

As shown in FIG. 4 to FIG.
Includes a disc-shaped connector 70 for electrically connecting the probes of the probe card 12 and a disc-shaped repeater 72 for connecting the connector 70 to a tester (not shown). The connecting device 70 and the repeater 72 are combined with each other to form a connecting device.

The connector 70 arranges a plurality of elongated first conductors 74 individually connected to the probes 14 of the probe card 12 on a disc-shaped connection plate 76 made of an electrically insulating material. A disk-shaped connection board 78 for connecting the body 74 to the repeater 72 is assembled on the connection plate 76 by a plurality of screw members.

The repeater 72 includes a plurality of elongated second conductors 80 individually connected to the probe 14 by the connector 70.
Are arranged on a disc-shaped relay plate 82 made of an electrically insulating material,
A disc-shaped relay board 84 for connecting the second conductor 80 to the tester is assembled on the relay board 82 with a plurality of screw members, and a plurality of connectors 86 are assembled on the relay board 84. The repeater 72 is attached to the lower side of the pressing plate 44 by a plurality of screw members.

The first conductor 74 is connected to the corresponding probe 1
4 is arranged on the connection plate 76 so as to face the tester land 18 and penetrates the connection plate 76 in the thickness direction and slightly protrudes up and down. The connection board 78 is a wiring board having a plurality of wiring sections for connecting the first and second conductors 74 and 80 to each other.

The second conductor 80 is disposed on the relay plate 82 so as to face the corresponding wiring portion of the connection board 78, and penetrates the relay plate 82 in the thickness direction to slightly project upward and downward. ing. The relay board 84 is a wiring board having a plurality of wiring portions for interconnecting the second conductor 80 and the connector 86.

As the first and second conductors 74 and 80, so-called pogo pins in which a coil spring and a pin are arranged in a cylindrical member can be used. However, the first and second conductors 74 and 80 may be other members such as conductive metal wires.

As shown in FIGS. 7 and 8, the connector 70 and the relay 72 are connected to each other by receiving a plurality of positioning pins 88 provided on the relay plate 82 into holes 90 provided on the connection board 78. Are positioned relative to each other. Connector 7
0 and the repeater 72 are releasably coupled by the coupling mechanism as described above to form a connection device.

Such a coupling mechanism, as shown in FIGS. 7 to 9, comprises a coupling ring 92 which is rotatable angularly around the connection device.

The rotating ring, or coupling ring 92,
A plurality of support rollers 94 that receive the ring 92 and a plurality of side rollers 96 that are in contact with the outer peripheral surface of the ring 92 are supported by the pressing plate 44 and have their rotational positions regulated. Support roller 94 and side roller 96
Is mounted on the lower side of the pressing plate 44.

The coupling ring 92 is also angularly rotated about an axis extending in the vertical direction by a plurality of link arms 98 and a driving mechanism 100 such as an air cylinder for swinging each link arm 98. .

The link arm 98 is mounted on the lower surface of the pressing plate 44 so as to be angularly rotatable about an axis extending in the vertical direction, and a pin 93 provided on the coupling ring 92 and a pin 93 are activated. It is engaged with the coupling ring 92 by an elongated hole 95 formed in the link arm 98 so that it can be engaged.

The driving mechanism 100 is mounted on the lower surface of the pressing plate 44 so as to rotate the link arm 98 at an angle. The connector 70 has a plurality of engaging pieces 102 provided at an outer peripheral portion thereof at an angular interval, and includes a coupling ring 92.
Is connected to the repeater 72 by being received by the connecting roller 104 provided at

The connecting roller 104 is mounted on the connecting ring 92 by a bracket 108. One or more of the coupling ring 92, the support roller 94, the side roller 96, the link arm 98, and the drive mechanism 100 may be assembled to the repeater 72. Further, the engagement piece 102 and the coupling roller 104 may be disposed on the coupling ring 92 and the connector 70, respectively.

FIG. 8 shows a state where the connector 70 and the repeater 72 are connected with a solid line, and a state where such connection is released with a dotted line. Therefore, the connecting device 70 and the repeater 72 are coupled by moving the coupling ring 92 to one side, and the coupling is released by moving to the other.

As shown in FIG. 7, each connector 86 has:
The ends of the cable 110 connected to the tester are joined. The cable 110 is connected to the opening 1 formed in the pressing plate 44.
12 and an opening 50 formed in the upper frame 36.

As shown in FIGS. 9 to 13, the probe card 12 is received in a circular card holder 114, and the card holder 114 is a short cylindrical lifting tray 1.
16, and the lifting tray 116 is disposed on a drawer-like slide tray 120 via a rotating ring 118 disposed therearound.
Reference numeral 20 is supported by a pair of slide rails 122 so as to be able to be taken in and out of the lower frame 34.

The card holder 114 holds the contact plate 52
The probe card 1 has an opening 124 at a location corresponding to
2 has a receiving portion 126 around the opening 124.
The receiving portion 126 is a lower step portion than the surrounding portion. The outer periphery of the card holder 114 is received by an inward flange 128 provided at the lower end of the lifting tray 116.

The positioning and maintenance of the probe card 12 and the connector 70 with respect to the card holder 114 are performed by using a plurality of pins 13 provided on the card holder 114, respectively.
This is done by fitting 0 and 132 into holes 134 and 136 formed in probe card 12 and connector 70.

Card holder 1 for lifting tray 116
Positioning and maintenance of 14 are performed by fitting a plurality of pins 138 provided on lifting tray 116 into holes 140 formed in card holder 114.

Rotating ring, elevating ring 118
Includes a plurality of under rollers 142 for receiving the ring 118.
And a plurality of side rollers 144 that are in contact with the outer peripheral surface of the ring 144, are assembled to the slide tray 120 and the rotation position is regulated. The rollers 142 and 144 are attached to the slide tray 120.

The lifting ring 118 is mounted on the slide tray 1.
A rotating grip 146 extending forwardly of 20 allows rotation about the axis of the lifting ring 118 within a predetermined angular range.

The elevating tray 116 has an elevating groove 148 on the outer peripheral surface thereof, and the elevating ring 118 has a Z-up roller 15 which moves in the groove 148 with its angular rotation.
Has zero. The elevating groove 148 is, as shown in FIG.
It is inclined at the center so that one end is low and the other end is high.

The lifting tray 116 includes a lifting ring 118.
Is rotated from one position to a higher position by being rotated in one direction, and is lowered from a higher position to a lower position by rotating the elevating ring 118 in the other direction. Thereby, the card holder 114 is also raised and lowered.

The elevating tray 116 is moved up and down by the bracket 1
A plurality of guide rails 154 are attached to the slide tray 120 so as to extend in the vertical direction by 52, and guides 156 slidably fitted to the respective guide rails 154. The guide 156 is connected to the lifting tray 116.
It is provided in.

The slide tray 120 has a handle 158 for taking in and out protruding forward from an inner space formed by the frame 30. For this reason, the slide tray 12
0 can be moved in and out of the inner space using the handle 158.

In the inspection apparatus 10, as shown in FIG. 7, the connector 70 and the repeater 72 are pre-assembled and connected to each other, and the repeater 72 is screwed to the pressing plate 44. I have.

As shown in FIG. 5, the slide tray 120 holds the probe card 12 in the card holder 114 while the probe card 12 is in contact with the contact plate 5.
2 has been moved to a position above
6 is lowered to a state of being received in the opening 32 of the base 22. For this reason, the probe 14 has its needle tip projected below the base 22.

In the above state, when the upper frame 36 is displaced to a position for closing the internal space and the pressing plate 44 is lowered, the connecting device combining the connector 70 and the repeater 72 is placed on the probe card 12. They are overlaid and pressed against the probe card 12 by the pressing plate 44 (see FIGS. 5 and 6). In this state, the card holder 114 has its receiving portion 126 positioned at the opening 32 of the base 22,
The probe 14 has its needle point approached to the contact plate.

As a result, the first conductor 7 of the connector 70
4 is pressed against the tester land 18 of the probe card 12. The lowermost position of the pressing plate 44 is restricted by the pressing plate 44 abutting on a plurality of stoppers 160 provided on the slide tray 120. This prevents the connection device and the pressing plate from being excessively pressed against each other and against the card holder 114.

In the above state, the probe 14 is inspected for variations in the height position of the tip thereof and the quality of contact with the electrodes. At the time of inspection, the contact plate 52 is lifted by the stage 54, pressed against the tip of the probe card 12, and receives a predetermined electric signal from the tester.

The reaction force against the needle pressure in the inspection is transmitted from the probe card 12 to the pressing plate 44 via the connecting device.
However, since the probe card 12 and the connecting device, and the connecting device and the pressing plate 44 are in extensive contact with each other, the probe card 12 is received by the receiving portion 126 of the card holder 114, so that the member The required degree of parallelism may be small, and the deflection of the probe card 12, the connecting device and the pressing plate 44 due to the reaction force against the needle pressure is extremely small.

When the inspection is completed, the inspected probe card is taken out of the inspection device 10 to inspect the next probe card, and a new probe card is placed in the inspection device 10 instead.

The replacement of the same type of probe card is performed as follows.

First, the pressing plate 44 is displaced by the driving mechanism 46 to the position shown by the dotted line in FIG. Thereby, the connector 72 and the repeater 72 are moved from the position shown in FIG. 14A to the position shown in FIG. That is, the connector 72 and the repeater 72 are removed from the card holder 114 and are moved to a position where the slide tray 120 is not hindered.

Next, the elevating ring 118 is
Rotated by 46. As a result, the lifting tray 116
Is the probe 1 as shown in FIG. 13 and FIG.
4 is raised to a position where the slide tray 120 is not obstructed.

Next, the slide tray 120 is pulled out as shown in FIG. In this state, replacement of the probe card is performed. The position of the slide tray 120 shown in FIG. 15 can be a position where at least the probe card 12 is outside the internal space formed by the frame 30, and is preferably a position where the card holder 114 is outside the internal space. .

In the state where the slide tray 120 is pulled out as shown in FIG. 15, the probe card 12 which has been inspected is taken out of the card holder 114, and another probe card of the same kind is placed in the card holder 114 instead. .

It is not necessary to remove the cable 110 from the connector 86 when attaching or detaching the probe card or when exchanging the probe card. Further, since the probe card attaching / detaching operation can be performed without being hindered by the frame 30, the pressing plate 44, and the connecting device, the workability of exchanging the probe card is good, the exchanging operation is safe, and the exchanging operation is performed quickly. Can be performed without skill.

The exchange of probe cards of different types is performed as follows.

First, in the state shown in FIG.
The coupling ring 92 is angularly rotated, and the coupling between the connector 70 and the repeater 72 is released by the coupling mechanism.

Next, the pressing plate 44 is displaced by the driving mechanism 46 to the position shown by the dotted line in FIG. Thereby, the connector 72 is connected to the card holder 114 together with the probe card 12.
However, the repeater 72 is moved from the position shown in FIG. 16A to the position shown in FIG. That is, the repeater 72 is removed from the card holder 114 and moved to a position where it does not hinder the insertion and removal of the slide tray 120.

Next, the elevating ring 118 is
Rotated by 46. As a result, the lifting tray 116
Is the probe 1 as shown in FIG. 13 and FIG.
4 is raised to a position where the slide tray 120 is not obstructed.

Next, the slide tray 120 is pulled out as shown in FIG. In this state, replacement of the probe card is performed. The position of the slide tray 120 shown in FIG. 17 can be a position where at least the probe card 12 and the connector 70 are outside the internal space by the frame 30, and preferably a position where the card holder 114 is outside the internal space. can do.

Next, the used probe card 12 and the connector 72 are removed from the card holder 114, and another probe card of the same type and a corresponding connector are placed in the card holder 114 instead.

As described above, when the probe card is replaced with a different type of probe card, the connector is also replaced. This is because the arrangement position of the tester lands of the probe card differs depending on the type of the probe card, and the same connector cannot be used in common for different probe cards. Accordingly, the new connector is capable of connecting the tester land 18 of the new probe card to the second conductor 80 of the repeater 72.

It is not necessary to disconnect the cable 110 from the connector 86 even when exchanging different types of probe cards. In addition, since the connecting device and the probe card can be attached and detached without being hindered by the frame 30, the pressing plate 44, and the relay device, the operability of exchanging the connecting device and the probe card is good, and the exchanging operation is safe. In addition, the replacement work can be performed quickly, and no skill is required.

In the above embodiment, the card holder 114
May be integral with the lifting tray 116. Also, the connector and repeater need not be formed from the two members 76, 78 and 82, 84, respectively, which are screwed.

FIG. 18 shows the connection device 170 and the repeater 172.
Are examples formed by wiring boards. The probe card 12 to be inspected using the connector 170 and the repeater 172 has a plurality of connectors 17 each connected to a plurality of probes 14 instead of a tester land.
4 is provided on the upper surface of the wiring board 16.

The connector 170 has on its lower surface a plurality of connectors 176 connected to the connectors 174 of the probe card 12, and has on its upper surface a plurality of connectors 178 connected to the connectors 176 by a wiring pattern. Repeater 172 has a plurality of connectors 180 connected to connector 178 of connector 170 on a lower surface, and has a plurality of connectors 86 connected to connector 180 by a wiring pattern on an upper surface. A cable 110 is connected to each connector 86.

The connectors 174 and 176 and the connectors 178 and 180 are so-called contactless connectors that require little force to connect and disconnect them. One example of such a connector is, for example, Utility Model Registration No. 2576233.
No. However, a general connector may be used instead of such a connector.

In the embodiment shown in FIG. 18, the probe card 12 is inserted into the card holder 114 as shown in FIG.
, The connector 170 and the repeater 172 are overlapped, and the repeater 172 is assembled on the lower surface of the pressing plate 44 with a plurality of screw members, thereby enabling inspection. When connecting the connector 170 and the repeater 172, the connectors 174 and 176 are connected.
178 and 180 are respectively coupled and electrically connected.

The replacement of the probe card 12 may be performed in the same manner as in the above-described embodiment with the connector 170 and the repeater 172 raised by the pressing plate 44. When exchanging the probe and the connection plate 170, use the connector 17
In a state where 0 is separated from the repeater 172, the operation may be performed in the same manner as in the above-described embodiment.

In the above embodiment, the connecting device is formed by the connecting device and the repeater, and the repeating device is commonly used for various probe cards. However, the connecting device is prepared for each type of the probe card. Is also good. In this case, the connection device is provided with the functions of the connection device and the repeater.

The present invention is not limited to the above embodiment. For example, the present invention can be applied to a probe card inspection apparatus using a probe other than the needle type, for example, a probe of another type such as a blade type or a pin type. Therefore, the present invention can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a probe inspection apparatus according to the present invention.

FIG. 2 is a front view of the inspection apparatus shown in FIG.

FIG. 3 is a right side view of the inspection apparatus shown in FIG.

FIG. 4 is a cross-sectional view showing a state where an upper frame of the inspection device is opened.

FIG. 5 is a longitudinal sectional view of a main part of the inspection apparatus.

FIG. 6 is a sectional view taken along line 6-6 in FIG.

FIG. 7 is an enlarged cross-sectional view near the connection device.

FIG. 8 is a bottom view of FIG. 7;

FIG. 9 is an enlarged sectional view of the connection device and the end of the tray.

FIG. 10 is a plan view of a tray portion in a state where a connecting device is removed.

11 is a sectional view taken along line 11-11 in FIG.

FIG. 12 is a plan view showing the relationship between a lifting tray, a lifting ring, and a slide tray.

FIG. 13 shows a lifting tray with the lifting tray raised.
Diagram showing the relationship between the lifting ring and the slide tray

FIG. 14 is a schematic diagram for explaining a replacement operation of a probe card.

FIG. 15 is a schematic diagram showing a state where a slide tray is pulled out from the state shown in FIG. 14;

FIG. 16 is a schematic diagram for explaining an exchange operation of a probe card and a connector.

FIG. 17 is a schematic diagram showing a state where the slide tray is pulled out from the state shown in FIG. 16;

FIG. 18 is an exploded perspective view showing another embodiment of the connection device used in the present invention.

FIG. 19 is a schematic view showing a state where the connection device of FIG. 18 is arranged in a card holder together with a probe card.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Probe card inspection apparatus 12 Probe 14 Probe 20 Case 22 Base 30 Frame 32 Base opening 34 Lower frame 36 Upper frame 38 Axis 40 Upper frame drive mechanism 44 Press plate 46 Press plate drive mechanism 52 Contact plate 54 Stage 70 , 170 Connector 72, 172 Repeater 74, 80 First and second conductors 76 Connection plate 78 Connection board 82 Relay board 84 Relay board 86 Connector 92 Coupling ring (rotating ring) 94 Support roller 96 Side roller 100 Drive Mechanism 114 Card holder 116 Lifting tray 118 Lifting ring 120 Slide tray 122 Slide rail 124 Card holder opening 126 Receiving part

Claims (9)

[Claims] 1. A contact plate with which a probe tip of a probe card comes into contact, a frame forming a space above the contact plate, and a card holder disposed in the space and corresponding to the contact plate. A card holder having an opening and having a receiving portion for receiving the probe card around the opening; and a connection device arranged on a probe card arranged in the card holder, the connection device being connected to a probe of the probe card. A connection device, a first position where the opening is located above the contact plate, and a second position where at least the probe card is located outside the space. Assembling means movably assembling from the first position to a second position horizontally spaced from the first position. Apparatus. 2. The card holder according to claim 1, further comprising: a base located above the contact plate, the base having a second opening at a position corresponding to the contact plate so as to detachably receive the card holder. The inspection apparatus according to claim 1, wherein the inspection apparatus is disposed on the base with a part thereof being positioned in the second opening. 3. The assembly means comprises: a pair of rails arranged in the frame at intervals and extending in the horizontal direction; a slide tray movably arranged along the rails; and a rotatable slide tray. A lifting / lowering tray disposed on the inside of the lifting / lowering ring, the lifting / lowering tray having the card holder disposed thereon, and one of the lifting / lowering tray and the lifting / lowering ring The inspection device according to claim 1, wherein the inspection device has a locking portion, and the other of the elevating tray and the elevating ring has an inclined groove in which the locking portion is slidably locked. 4. A pressing plate which is located above the connecting device and is movably arranged in the frame in the up-down direction, and a pressing body supported by the frame and pressing the pressing plate against the connecting device. The inspection device according to claim 1, wherein the inspection device includes: 5. The connection device, wherein the connection device is a plate-shaped connection device arranged above the probe card, the connection device having a plurality of first conductors connected to the probes of the probe card; A plate-like repeater disposed above the connector, comprising a plurality of second conductors connected to the first conductor, the repeater disposed on the frame, and the connector The inspection apparatus according to claim 4, further comprising: a coupling mechanism that releasably couples the repeater, wherein the repeater is assembled to the pressing plate. 6. The relay and the pressing plate are assembled to the pressing plate and the pressing body, respectively.
The inspection device according to claim 5. 7. The coupling mechanism is a ring disposed on the pressing plate or the repeater so as to be rotatable around the connection device at an angle, and a ring that relatively movably receives the connection device. A drive mechanism disposed on the pressing plate or the repeater to rotate the ring at an angle with respect to the connection device, wherein the repeater can be released from the ring with the angular rotation of the ring. Is locked to the
The inspection device according to claim 6. 8. The connecting mechanism further includes: a plurality of rollers disposed on one of the connector and the rotating ring at intervals in the rotating direction of the rotating ring; and a gap in the rotating direction of the rotation. A plurality of locking pieces disposed on the other of the connector and the rotating ring, the locking pieces releasably locked to the roller, and the rotating ring is rotated angularly with respect to the connection device. The inspection device according to claim 7, further comprising: a driving mechanism disposed on the pressing plate to perform the driving. 9. The frame according to claim 1, wherein the frame is a lower frame disposed on the base at an interval in the left-right direction, and an upper frame disposed on the lower frame so as to form the space in cooperation with the lower frame. And an upper frame that supports the pressing body and opens the space upward.
The card holder is arranged on the base frame with a part of the card holder being positioned in the second opening, and is capable of entering and exiting the space through a forward opening of the lower frame. Any one of items 2 to 8
The inspection device according to the item.