JP2000294617A - Device for detecting board inside cassette - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for detecting a board inside a cassette which can detect the presence or absence of a board inside a cassette and also detect the insertion of the board into the stepped groove of the cassette. SOLUTION: In this device for detecting a board inside a cassette, a slit groove corresponding to a groove inside a cassette is provided to a slit member. A slit sensor to detect a slit groove outputs a signal corresponding to the slit groove. A board detecting sensor, which emits a light into the cassette and outputs a signal according to light reception and light shielding, moves synchronizing with the slit sensor. Boards are normally inserted into grooves of groove numbers 1, 4 and 6 in the cassette, boards are inserted stepped into grooves of groove numbers 2 and 3, and no board is inserted into a groove of groove number 5. The turning-on or turning-off of an output signal of a board detecting sensor is detected at the rising and falling point of an output of the slit sensor. Thus, the presence or absence of the board, abnormal insertion, or gapped state in each of the grooves inside the cassette can be judged.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-cassette substrate detecting apparatus for detecting a substrate stored in a cassette.

[0002]

2. Description of the Related Art Semiconductor wafers, glass substrates for liquid crystal displays,
A substrate processing apparatus is used to perform various processes on a glass substrate for a photomask, a glass substrate for an optical disk, and the like. For example, in a semiconductor device manufacturing process, a substrate processing apparatus in which each of a series of processes is unitized and a plurality of units are integrated is used in order to increase production efficiency. Further, in order to measure the thickness of a thin film formed on a substrate by a series of processes in a substrate processing apparatus, a film thickness measuring apparatus including a plurality of units is used.

The loading and unloading of substrates to and from the substrate processing apparatus and the film thickness measuring apparatus is performed by mounting a cassette for accommodating a plurality of substrates on the substrate loading and unloading apparatus.

FIG. 11 is a perspective view showing an example of a substrate processing apparatus provided with a conventional substrate loading / unloading device.

As shown in FIG. 11, the substrate processing apparatus 30 includes processing areas A and B and a transport area C. Processing area A
A rotary coating unit (spin coater) 21a for applying a resist solution to a substrate and a rotary developing unit (spin developer) 21b for performing a developing process on the substrate are provided side by side. In the processing region B, a heating unit (hot plate) HP for performing a heating process on the substrate and a cooling unit (cooling plate) CP for performing a cooling process on the substrate
Are arranged in a plurality of stages.

In the transfer area C, there is provided a transfer unit 22 for transferring the substrate in the direction of the arrow S and for carrying the substrate in and out of each unit in the processing areas A and B.

At one end of the substrate processing apparatus 30, a substrate W
And a substrate loading / unloading device (indexer) ID for loading and unloading the substrate W. The substrate loading / unloading device ID includes a cassette mounting table 24, a transfer robot 23, and a plurality of substrate detection devices 20. On the cassette mounting table 24, a cassette 101 for storing the substrate W is provided.
Is placed.

The transfer robot 23 is configured to be movable in the direction of the arrow U by a ball screw (not shown) provided in the direction of the arrow U. The transfer robot 23 includes a hand 23a that can move up and down and move back and forth. This allows
The transfer robot 23 moves in front of the cassette 101 in which the target substrate W is stored, and takes out the target substrate W using the hand 23a. A projection 23b for preventing the substrate W from dropping is provided at the tip of the hand 23a.

The substrate detecting device 20 includes a holding frame 20c surrounding the cassette 101 in a U-shape. Board detection sensors 200 are attached to both ends of the holding frame 20c. The substrate detection sensor 200 includes a light emitting unit 20a that emits light and a light receiving unit 20b that receives light emitted from the light emitting unit 20a.

A downwardly extending vertical frame 20d is attached to the holding frame 20c. The vertical frame 20d is driven up and down by driving means (not shown).

FIGS. 12 (a), 12 (b) and 12 (c) are a front view and a sectional view of the cassette 101 shown in FIG. 11, and a waveform diagram showing an output signal of the light receiving section 20b when the substrate detection sensor 200 is raised. .

As shown in FIGS. 12 (a) and 12 (b), the cassette 101 is provided with a plurality of grooves 101a. The substrate W is inserted in the groove 101a in a horizontal state, and the substrates W1 and W2 are inserted in a state of being inclined forward and protruding.

12 (b) and 12 (c), when the substrate detection sensor 200 is raised from the lowermost stage to the uppermost stage of the cassette 101, the output signal SL from the light receiving section 20b becomes the signal of the substrate W, W1, W2. It changes depending on the presence or absence.
This output signal SL is provided to a control unit (not shown).
The output signal SL is turned on when the light emitted from the light projecting unit 20a is blocked by the substrates W, W1, and W2 and does not reach the light receiving unit 20b, and is emitted without the substrates W, W1, W2. The light emitted from the section 20a is received by the light receiving section 20b.
Is turned off when it reaches.

Further, by associating the output signal SL with the output signal of a position detecting device (not shown) attached to the vertical frame 20d in FIG. 11, the time axis of the output signal SL is set to the height position of the cassette 101. Can be assigned. The output signal SL in FIG. 12C is drawn in association with the height of the cassette 101 in FIGS. 12A and 12B.

Thus, the ON period of the output signal SL indicates the vertical existence range of the substrates W, W1, and W2, and the OFF period of the output signal SL indicates the vertical clearance between the substrates W, W1, and W2 ( Gap).

Therefore, by moving the hand 23a of the transfer robot 23 in accordance with the clearance between the substrates W, W1, W2, the substrates W, W1, W1, W1 and W2 do not collide with the hand 23a. W2 to cassette 1
01 can be taken out.

Next, of the operation of the transfer robot 23 for taking out the inclined substrate W1 from the cassette 101, the operation up to lifting the substrate W1 in the cassette 101 will be described. The hand 23a is controlled based on the output signal SL of the light receiving section 20b.

FIG. 13 is a view for explaining the movement of the hand 23a until the substrate W1 of FIG. 12 is lifted.

As shown in FIG. 13A, when the hand 23a of the transfer robot 23 is inserted between the substrate W1 and the substrate W2, the upper surface of the projection 23b has a small gap with the lower surface of the substrate W1. Thus, the height position of the hand 23a is determined. Then, the control unit keeps the hand 23 at that height position.
When it is determined that advancing a collides with the substrate W2,
The hand 23a is moved obliquely upward as indicated by the arrow E. Then, as shown in FIG. 13B, after moving the hand 23a obliquely upward, the substrate 23 is lifted in the direction shown by the arrow F to lift the substrate W1.

[0020]

However, FIG.
In the case where the substrate W is inserted into the stepped groove 101a and tilted, the ON period of the output signal SL of the light receiving unit 20b is turned on when the substrate W is horizontally inserted into the groove 101a of the same step. It is almost the same as the period. Therefore, the control unit cannot distinguish between the substrate W inserted in the stepped groove 101a and the substrate W inserted horizontally. Therefore, when the hand 23a moves forward to take out the substrate W inserted into the stepped groove 101a, the hand 23a may collide with the substrate W and damage the substrate W.

An object of the present invention is to provide an in-cassette substrate detecting device capable of detecting the presence or absence of a substrate in a cassette and detecting that the substrate is inserted into a stepped groove of the cassette.

[0022]

Means for Solving the Problems and Effects of the Invention A substrate detecting device in a cassette according to the first invention detects a substrate in a cassette in which substrates are inserted into grooves provided in a plurality of stages. An apparatus, comprising: a substrate detection sensor that emits light into a cassette, receives light passing through the cassette, and outputs a detection signal corresponding to light reception and light blocking; and a plurality of substrates corresponding to a plurality of grooves in the cassette. A reference member having a portion to be detected, a reference member detection sensor that outputs a detection signal in accordance with detection and non-detection of the detected portion of the reference member, and a substrate detection sensor which is moved in the vertical direction of the cassette and detects the substrate. Moving means for moving the reference member detection sensor along the reference member in synchronization with the movement of the sensor;
The cassette based on the state of the detection signal of the substrate detection sensor at the first timing of the detection signal of the reference member detection sensor and the state of the detection signal of the substrate detection sensor at the second timing of the detection signal of the reference member detection sensor And a determination means for determining the presence or absence of the substrate in each groove in the inside and the normal insertion state or the stepwise insertion state of each substrate in the cassette.

In the in-cassette substrate detecting apparatus according to the first aspect of the present invention, by driving the moving means, the substrate detecting sensor moves up and down the cassette and emits light into the cassette. And outputs a detection signal corresponding to the light reception and the light shielding. The reference member detection sensor is
The detector moves along the reference member in synchronization with the substrate detection sensor, and outputs detection signals corresponding to detection and non-detection of a plurality of detected portions of the reference member. The judging means sets the state of the detection signal of the substrate detection sensor at the first timing of the detection signal of the reference member detection sensor and the state of the detection signal of the substrate detection sensor at the second timing of the detection signal of the reference member detection sensor. Then, the presence or absence of the substrate in each groove in the cassette and the normal or improper insertion state of each substrate in the cassette are determined.

This makes it possible to determine the presence or absence of a substrate in each groove in the cassette and to determine the normal or stepped insertion state of each substrate in the cassette.

According to a second aspect of the present invention, there is provided a substrate detecting apparatus in a cassette according to the first aspect of the present invention, wherein the detection signal of the substrate detecting sensor is in a first state when light is shielded and a second signal when light is received. State, the detection signal of the reference member detection sensor is in the third state when the detected part of the reference member is detected, and is in the fourth state when the detected part is not detected, and the substrate is normal in the plurality of grooves in the cassette. When the detection signal of the reference member detection sensor changes from the fourth state to the third state, the detection signal of the substrate detection sensor is in the first state and the reference member is detected. The positional relationship of the reference member with respect to the cassette is set such that the detection signal of the substrate detection sensor is in the second state when the detection signal of the sensor changes from the third state to the fourth state.

In this case, the detection signal of the reference member detection sensor changes from the fourth state to the third state when the substrate is properly inserted into the plurality of grooves in the cassette in the cassette. At the time, the detection signal of the substrate detection sensor is in the first state, and when the detection signal of the reference member detection sensor changes from the third state to the fourth state, the detection signal of the substrate detection sensor is in the second state. Is set as in.

Thus, when the substrate is properly inserted into the plurality of grooves in the cassette, the detection signal of the reference member detection sensor has different timings when the detection signal of the substrate detection sensor is shielded and received. Can be provided.

A substrate detecting device in a cassette according to a third aspect of the present invention is the configuration of the substrate detecting device in a cassette according to the second aspect, wherein the first timing is such that the detection signal of the reference member detection sensor is changed from the fourth state. The second timing is a point in time when the detection signal of the reference member detection sensor changes from the third state to the fourth state.
When the detection signal of the substrate detection sensor is in the first state at the first timing and the detection signal of the substrate detection sensor is in the second state at the second timing, the determination means determines whether the substrate is in the corresponding groove of the cassette. Is present, the detection signal of the substrate detection sensor is in the second state at the first timing, and the detection signal of the substrate detection sensor is the second signal at the second timing.
It is determined that the substrate does not exist in the corresponding groove in the cassette when the state is in the state, and the detection signal of the substrate detection sensor is in the second state at the first timing and the detection signal of the substrate detection sensor is detected at the second timing. When the signal is in the first state, it is determined that the substrate is inserted into the stepped groove in the cassette.

In this case, when the detection signal of the reference member detection sensor changes from the fourth state to the third state,
The state of the detection signal of the substrate detection sensor is detected at two points when the state changes from the state to the fourth state. This makes it possible to determine the presence or absence of a substrate in each groove in the cassette and the normal or stepped insertion state of each substrate in the cassette.

A substrate detecting device in a cassette according to a fourth aspect of the present invention is the substrate detecting device according to the first aspect of the present invention, wherein the detection signal of the substrate detecting sensor is in a first state when light is blocked, and is in a second state when light is received. State, the detection signal of the reference member detection sensor is in the third state when the detected part of the reference member is detected, and is in the fourth state when the detected part is not detected, and the substrate is normal in the plurality of grooves in the cassette. If the detection signal of the substrate detection sensor is in the first state at a predetermined timing within the period in which the detection signal of the reference member detection sensor is in the third state, and the reference member detection sensor The detection signal of the substrate detection sensor is in the second state at a predetermined timing within the period in which the detection signal is in the fourth state,
The positional relationship of the reference member with respect to the cassette is set.

In this case, when the substrate is inserted in a plurality of grooves in the cassette in a normal state, the reference member has a predetermined timing within a period when the detection signal of the reference member detection sensor is in the third state. , The detection signal of the substrate detection sensor is in the first state, and the detection signal of the reference member detection sensor is in the fourth state.
Is set so that the detection signal of the substrate detection sensor is in the second state at a predetermined timing within the period in the state.

Accordingly, the detection signal of the reference member detection sensor has different timings when the substrate detection sensor detects light and receives light when the substrate is properly inserted into the plurality of grooves in the cassette. Can be provided.

According to a fifth aspect of the present invention, in the configuration of the in-cassette substrate detecting apparatus according to the fourth aspect of the present invention, at the first timing, the detection signal of the reference member detecting sensor is set to the third state. The second timing is a predetermined timing within a certain period, the second timing is a predetermined timing within a period in which the detection signal of the reference member detection sensor is in the fourth state, and the determination unit detects the substrate detection at the first timing. When the detection signal of the sensor is in the first state and the detection signal of the substrate detection sensor is in the second state at the second timing, it is determined that the substrate is present in the corresponding groove of the cassette. When the detection signal of the substrate detection sensor is in the second state and the detection signal of the substrate detection sensor is in the second state at the second timing, it is determined that the substrate does not exist in the corresponding groove in the cassette. Then, when the detection signal of the substrate detection sensor is in the second state at the first timing and the detection signal of the substrate detection sensor is in the first state at the second timing, the substrate is inserted into the stepped groove in the cassette. It is determined that it has been inserted.

In this case, the detection signal of the substrate detection sensor is detected at two points: a predetermined timing in the period when the reference member detection sensor is in the third state and a predetermined timing in the period in the fourth state. State detection is performed. This makes it possible to determine the presence or absence of a substrate in each groove in the cassette and the normal or stepped insertion state of each substrate in the cassette.

A substrate detecting device in a cassette according to a sixth aspect of the present invention is the same as the substrate detecting device in a cassette according to any one of the first to fifth aspects, wherein the cassette is placed and the cassette to be placed is sandwiched. A cassette mounting portion having a pair of openings at positions, and a sensor support member having a pair of support portions provided in the pair of openings of the cassette mounting portion so as to be inserted from below and to be movable in the vertical direction. The substrate detection sensor is provided at an upper end of one of the support portions of the sensor support member, and emits light, and is provided at an upper end of the other support portion of the sensor support member. A light receiving unit that receives light emitted from the light unit; and the moving unit includes a sensor supporting unit such that the pair of supporting units of the sensor supporting member protrude upward from the pair of openings of the cassette mounting unit. Moving members vertically A.

In this case, the sensor support member moves up and down by driving the moving means so as to protrude upward from the pair of openings of the cassette mounting portion. At this time, in the substrate detection sensor provided at the upper end of the sensor support member, light is emitted from the light projecting unit to the light receiving unit with the cassette mounted on the cassette mounting unit interposed therebetween. With this, the board detection sensor
It can move up and down the cassette and output a detection signal corresponding to light reception and light shielding.

According to a seventh aspect of the present invention, in the cassette substrate detecting apparatus according to any one of the first to sixth aspects, the plurality of detected portions of the reference member include a plurality of openings. Department.

In this case, the reference member detection sensor can output a detection signal corresponding to the detection and non-detection of the opening.

[0039]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a case will be described in which a substrate detecting device in a cassette according to the present invention is applied to a film thickness measuring device for measuring the thickness of a thin film formed on a substrate surface.

FIG. 1 is a plan view of a film thickness measuring device provided with a substrate detecting device in a cassette according to a first embodiment of the present invention.

As shown in FIG. 1, the film thickness measuring device 50
The apparatus includes a substrate loading / unloading device 40, an operation panel 17, a positioning unit 18 for positioning the substrate W before measuring the film thickness, and a film thickness measuring unit 16 for measuring the film thickness. The substrate loading / unloading device 40 includes the cassette substrate detecting device 12 and the transfer robot 15.

The substrate detecting device 12 in the cassette detects the position of the substrate W in the cassette 11 mounted on the cassette mounting plate 10. The transfer robot 15 takes out the substrate W at a predetermined position from the cassette 11, transports the substrate W to the positioning unit 18, and carries the substrate W positioned by the positioning unit 18 into the film thickness measuring unit 16. Then, the transfer robot 15 transfers the substrate W whose film thickness has been measured by the film thickness measuring unit 16 to the film thickness measuring unit 16.
, And stored in the cassette 11.

2 (a) and 2 (b) are a front sectional view and a partially cutaway side view, respectively, of the substrate detecting device 12 in the cassette of FIG. 1, and FIG. 3 is another drawing of the substrate detecting device 12 in the cassette of FIG. FIG. 4 is an exploded perspective view of the substrate detecting device 12 in the cassette shown in FIG.

As shown in FIGS. 2 (a), 2 (b) and 3, the substrate detecting device 12 in the cassette comprises a cassette mounting plate 10 on which the cassette 11 is mounted and a cassette mounting plate 10.
A base plate 1 vertically attached to the lower surface of the base plate. The cassette 11 mounted on the cassette mounting plate 10 has grooves 11a formed in a plurality of stages. A groove 1a is formed in the base plate 1 in the vertical direction, and a pair of bearings 3 are mounted on the upper and lower sides of the groove 1a. A ball screw 4 is rotatably attached to the pair of bearings 3 through a screw member 8.

A motor 5 that can rotate forward and backward is mounted on a motor base 5 a fixed to the base plate 1.
(See FIG. 4B). A driven pulley 6a is attached to the lower end of the ball screw 4, and the driven pulley 6a
Is a drive pulley 6 attached to the rotating shaft of the motor 5.
b and the belt 7.

The screw member 8 is connected to the substrate detecting section 9 by a connecting plate 8a with the base plate 1 interposed therebetween. The substrate detection section 9 has a U-shaped sensor frame section 9a and a rectangular base section 9b (see FIG. 4B).

When the motor 5 is rotated, the ball screw 4 is rotated, and the sensor frame 9a of the substrate detecting section 9 is moved up and down through a plurality of elevating holes 10a provided in the cassette mounting plate 10.

A substrate detection sensor 19 is mounted on the upper end of the U-shaped sensor frame 9a of the substrate detection section 9. The substrate detection sensor 19 includes a light emitting unit 9c that emits light.
And light receiving section 9d for receiving light emitted from light emitting section 9c
Consists of

The light receiving section 9d of the substrate detecting sensor 19
Are covered by an aperture 9e provided with a light receiving hole 9g (see FIGS. 4A and 4B). Thereby, the light receiving unit 9d can receive only the light passing through the light receiving hole 9g among the light emitted from the light projecting unit 9c.

The light emitted from the light projecting section 9c is transmitted to the light receiving section 9d.
Is received, the output signal of the substrate detection sensor 19 is turned off. On the other hand, the light emitted from the light projecting portion 9c is
When the light does not reach the light receiving portion 9d because of being blocked by the sensor, the output signal of the substrate detection sensor 19 is turned on. That is, the output signal of the substrate detection sensor 19 is turned on in a range where the substrate W exists, and is turned off between the substrates W.

As shown in FIG. 4A, a pair of slit members 13 is attached to the upper holding plate 2a on the back surface of the substrate detector 9, and the lower holding plate 2b sandwiches the pair of slit members 13. To the upper holding plate 2a. Each of the pair of slit members 13 is formed of an L-shaped plate member, and a plurality of slit grooves 13a are formed in one side plate portion 13b of the L-shaped plate member.

A pair of slit sensors 9f having a light projecting section 91a and a light receiving section 91b are attached to the base section 9b of the substrate detecting section 9. The upper holding plate 2a is mounted on the cassette mounting plate so that the one-side plate-like portions 13b of the pair of slit members 13 are inserted between the light projecting portion 91a and the light receiving portion 91b of the pair of slit sensors 9f. 10 and the lower holding plate 2b is mounted on the lower surface of the base plate 1 (FIG. 2).
(See (a)).

When the substrate detecting section 9 rises, the light projecting section 91a of the slit sensor 9f rises while emitting light, and when the emitted light passes through the slit groove 13a, the light receiving section 91a.
b can receive light.

As described above, the light receiving section 91b is the light emitting section 91a.
When the light emitted from is received, the output signal of the slit sensor 9f is turned on. On the other hand, when the light emitted from the light projecting unit 91a is blocked by the protrusion between the slit grooves 13a and does not reach the light receiving unit 91b, the output signal of the slit sensor 9f is turned off. .

By setting the width of the slits 13a and the interval between the slits 13a in accordance with the pitch of the grooves 13a of the cassette 11, the cycle of the output signal of the substrate detection sensor 19 and the cycle of the output signal of the slit sensor 9f are set. Can be identical. In addition, by changing the mounting position of the slit member 13 in the vertical direction, it is possible to cause a phase shift between the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f.

The interval between the slit grooves 13a of one slit member 13 is the same as that of the groove 11a of one type of cassette 11.
Is set according to the pitch of the other slit member 13
The distance between the slit grooves 13a of the other cassettes 1
It is set in accordance with the pitch of one groove 11a. Thus, one substrate detecting device 12 in a cassette can detect the substrates in two types of cassettes 11 having different pitches of the grooves 11a.

FIG. 5 shows the substrate detecting sensor 19 and the aperture 9.
FIG. 9 is a diagram for explaining the relationship between the light receiving hole e and the light receiving hole 9g.

As shown in FIG. 5, of the light emitted from the light emitting point 91c of the light projecting portion 9c of the substrate detecting sensor 19, the light traveling obliquely upward is received by the light receiving hole 9g of the aperture 9e.
And reaches the light receiving section 9d. When the sensor optical axis Sa connecting the emission point 91c of the light projecting portion 9c and the light receiving hole 9g of the aperture 9e is greatly inclined, the period in which light is blocked by the substrate W becomes longer, and the output signal of the substrate detection sensor 19 becomes longer. The ON period becomes longer. Conversely, when the inclination of the sensor optical axis Sa is small, the period during which light is blocked by the substrate W is short, and the ON period of the output signal of the substrate detection sensor 19 is short.

In this embodiment, the inclination of the sensor optical axis Sa is set such that the ON period and the OFF period of the output signal of the substrate detection sensor 19 are at the same interval.

The sum of the ON period in which the sensor optical axis Sa is blocked by the substrate W and the OFF period in which the sensor optical axis Sa passes between the substrates W is equal to the pitch G of the substrate W.
/ 2 is the ON and OFF period. Pitch G of substrate W
Is the same as the pitch of the grooves 11a in the cassette 11.
Assuming that the diameter of the substrate W is D and the thickness of the substrate W is t, the substrate W
The angle θ between the sensor and the optical axis Sa is tan ⁻¹ ((G / 2
−t) / D).

In the in-cassette substrate detecting device for an 8-inch cassette, the pitch G of the substrates W is 6.35 mm, the thickness t of the substrates W is 0.7 mm, and the diameter D of the substrates W is 200 mm. When those values are substituted into the above equation, the angle θ between the substrate W and the sensor optical axis Sa is 0.71 °. In this embodiment, the diameter of the light receiving hole 9g of the aperture 9e is, for example, 1 mm. Distance L between light emitting unit 9c and light receiving unit 9c
Is 220 mm.

Further, in the present embodiment, the width of the slit groove 13a and the distance between the slit grooves 13a are respectively set to the substrate so that the ON period and the OFF period of the output signal of the slit sensor 9f in FIG. It is 3.2 mm, which is half of the distance G between W.

FIG. 6 is a block diagram showing a control system of the film thickness measuring device 50 of FIG. As shown in FIG. 6, the motor 5, the substrate detection sensor 19 and the slit sensor 9f of the substrate detection device 12 in the cassette, the transfer robot 15, the positioning unit 18, the film thickness measurement unit 16, and the operation panel 1
7 is connected to the control unit 14.

In this embodiment, the substrate detecting sensor 19 corresponds to the substrate detecting sensor, the light projecting portion 9c corresponds to the light projecting portion, the light receiving portion 9d corresponds to the light receiving portion, and the slit groove 13a corresponds to the detected portion and the light receiving portion. The slit member 13a corresponds to the reference member, the slit sensor 9f corresponds to the reference member detection sensor, the ball screw 4, the motor 5, and the drive pulley 6.
b, the driven pulley 6a, the belt 7, and the screw member 8 constitute a moving unit, the control unit 14 corresponds to a determining unit, the elevating hole 10a corresponds to an opening, and the cassette mounting plate 10 corresponds to a cassette mounting unit. Correspondingly, the sensor frame portion 9a corresponds to a support portion, and the sensor frame portion 9a and the base portion 9b constitute a sensor support member.

Next, with reference to the in-cassette substrate detecting device 12, the work flow in the film thickness measuring device 50 and the operation of the film thickness measuring device 50 will be described with reference to FIGS.
A description will be given based on the flowchart of FIG. 7 with reference to FIG.

First, when the operator turns on the power supply of the substrate detecting device 12 in the cassette, the substrate detecting section 9 moves to the origin position and various setting conditions are initialized (step S1).

Next, the operator places the cassette 11 containing the substrates W on the cassette mounting plate 10 (step S2).

Further, the operator registers recipe data (data indicating measurement conditions) on the operation panel 17 (step S3). Here, as the recipe data, for example, selection of a measurement mode according to the type of a film, selection of an objective lens, setting of autofocus conditions, setting of a correction coefficient for correcting an error of a measurement value, and creation in advance as a template Selected mapping data (data indicating the storage position and the number of stored substrates in the cassette 11), setting output data, and the like.

As a result, the substrate detecting sensor 19 of the substrate detecting section 9 rises from the lowermost groove 11a of the cassette 11 to the uppermost groove 11a. After that, the board detecting section 9 descends to the origin position (Step S4).

As a result, the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f are supplied to the control unit 14, respectively. In the control unit 14, the substrate detection sensor 19
It is determined whether or not the substrate W is inserted into the stepped groove 11a based on the output signal of the slit sensor 9f and the output signal of the slit sensor 9f (step S5). Substrate W has uneven groove 11
If it is determined that it has been inserted into a, an alarm (not shown) is displayed (step S6). The control unit 1
Processing of the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f in Step 4 will be described later in detail.

When it is determined that the substrate W is properly inserted into the groove 11a, the control unit 14 controls each groove 11a in the cassette 11 based on the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f. Then, data (mapping data) indicating the presence or absence of the substrate W is created (step S7).

Then, the control unit 14 compares the mapping data set as the recipe data with the actually detected mapping data for each groove (step S8).
If it is determined that the mapping data set as the recipe data does not match the actually detected mapping data, an alarm is displayed (step S9).

When the control unit 14 determines that the mapping data set as the recipe data and the actually detected mapping data match, the transfer robot 1
5, the substrate W at a predetermined position is taken out of the cassette 11, transported to the positioning unit 18, and the substrate W positioned by the positioning unit 18 is carried into the film thickness measuring unit 16 (step S10).

In the film thickness measuring unit 16, the film thickness on the surface of the substrate W is measured based on the recipe data (step S11). The control unit 14 determines whether the measurement of the film thickness on the surface of the substrate W has been completed (Step S12). When the controller 14 determines that the measurement of the film thickness has been completed, the controller 14 processes the measurement data and outputs the measurement data in an output form based on the recipe data (step S13).

Next, a method for detecting that the substrate W is inserted into the stepped groove 11a in the cassette 11 will be described with reference to an example.

FIG. 8 is a front view of the cassette 11 for explaining a method of detecting a substrate inserted into a stepped groove.

As shown in FIG. 8, grooves 11a are formed in a plurality of stages in the cassette 11, and 1, 2, 3,.
The groove numbers are assigned as 4, 5, 6,.... Groove number 1,
The substrate W is horizontally inserted into the grooves 11a of the fourth and sixth grooves, and the substrate W is not inserted into the groove 11a of the groove number 5. The substrate W is inserted obliquely between the groove 11a having the groove number 3 and the groove 11a having the groove number 2.

FIG. 9 shows an output signal of the substrate detection sensor 19 which has detected the inside of the cassette 11 of FIG.
FIG. 4 is a diagram showing output signals of the first embodiment. Table 1 shows the relationship between the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f in FIG. (Groove number)-(Groove number) in Table 1 indicates between the grooves.

[0079]

[Table 1]

As shown in FIG. 9, the output signal of the slit sensor 9f is out of phase with the output signal of the substrate detection sensor 19. In the case of the groove number 1 in which the substrate W is horizontally inserted into the groove 11a, the output signal of the slit sensor 9f rises from off to on during the period in which the output signal of the substrate detection sensor 19 is on. In the present embodiment, the ON period and the OFF period of the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f are all set to be the same interval.
At the point in time when the output signal of f falls from on to off, the output signal of the substrate detection sensor 19 is off.

As shown in Table 1, the substrate W was horizontally
At the time when the output signal of the slit sensor 9f rises in the groove numbers 1, 4, and 6 inserted into the slot a, the output signal of the substrate detection sensor 19 is on. Then, between groove numbers 1 and 2, between groove numbers 4 and 5, and between groove numbers 6 and 7.
At the time when the output signal of the slit sensor 9f falls, the output signal of the substrate detection sensor 19 is off.

Next, when the substrate W is inserted in a stepped manner between the groove 11a of the groove number 2 and the groove 11a of the groove number 3, the substrate W is detected between the groove numbers 2 and 3. . As a result, at the time when the output signal of the slit sensor 9f rises in the groove number 2, the output signal of the substrate detection sensor 19 is off. Further, between the groove numbers 2 and 3, when the output signal of the slit sensor 9f falls, the output signal of the substrate detection sensor 19 is on. Then, in the groove number 3, when the output signal of the slit sensor 9f rises, the output signal of the substrate detection sensor 19 is off.

Since the substrate W does not exist between the groove number 5 and the groove numbers 5 and 6, the output signal of the substrate detection sensor 19 is turned off at the rise and fall of the output signal of the slit sensor 9f. It has become.

As described above, in this embodiment, the on-period and the off-period of the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f are set to be substantially the same interval, and the falling time of the output signal of the slit sensor 9f is set. On or off of the output signal of the substrate detection sensor 19 is detected at two points, a time point and a falling time point. This makes it possible to determine the presence / absence of the substrate W in each groove 11a in the cassette 11 and to determine whether the substrate W is normal or uneven.

FIG. 10 is a diagram showing an output signal of the substrate detecting sensor 19 and an output signal of the slit sensor 9f of the substrate detecting device in a cassette according to the second embodiment of the present invention.
Table 2 shows the relationship between the output signal of the substrate detection sensor 19 and the output signal of the slit sensor 9f in FIG. (Groove number)-(Groove number) in Table 2 shows between the grooves. Here, the case where the substrate W in the cassette 11 of FIG. 8 is detected will be described.

[0086]

[Table 2]

The output signal of the board detection sensor 19 of FIG. 10 is the same as the output signal of the board detection sensor 19 of FIG. On the other hand, 1 of the output signal of the slit sensor 9f in FIG.
The length of the cycle is the same as the length of one cycle of the output signal of the slit sensor 9f in FIG. 9, but the ON period is shorter than the OFF period. Further, the intermediate point P of the ON period of the output signal of the slit sensor 9f is set within the ON period of the output signal of the substrate detection sensor 19 when the substrate W is normally inserted into the groove 11a.

In this embodiment, at the intermediate point P of the ON period of the output signal of the slit sensor 9f and at the intermediate point Q of the OFF period, it is detected whether the output signal of the substrate detection sensor 19 is ON or OFF. Based on the result, it is determined whether or not the substrate W is present and whether or not the substrate W is not inserted into the stepped groove 11a.

Therefore, the slit sensor 9f shown in FIG.
10 corresponds to the rising point of the output signal of the slit sensor 9f in FIG.
The midpoint Q in the off period of the output signal of the slit sensor 9f corresponds to the falling point of the output signal of the slit sensor 9f in FIG. Therefore, as shown in Table 2, the output signal of the substrate detection sensor 19 is turned on or off according to
This is the same as the on or off state of the output signal of the substrate detection sensor 19 shown in Table 1.

As described above, the on or off state of the output signal of the substrate detection sensor 19 at the intermediate point P during the ON period of the output signal of the slit sensor 9f and at the intermediate point Q during the OFF period of the output signal of the slit sensor 9f. Is detected, it is possible to determine the presence or absence of the substrate W in each groove 11a in the cassette 11 and to determine whether the substrate W is normal or uneven.

In the above embodiment, the case where the substrate carrying-in / out device of the substrate detecting device in the cassette of the present invention is applied to the film thickness measuring device has been described. However, the present invention relates to a substrate processing device for forming a thin film on the substrate surface. The present invention can also be applied to a substrate loading / unloading device.

[Brief description of the drawings]

FIG. 1 is a plan view of a film thickness measuring device provided with a substrate detecting device in a cassette according to a first embodiment of the present invention.

FIG. 2 is a front sectional view and a partially cutaway side view of the substrate detecting device in a cassette of FIG. 1;

FIG. 3 is another partially cutaway side view of the in-cassette substrate detecting device of FIG. 1;

FIG. 4 is an exploded perspective view of the in-cassette substrate detecting device of FIG. 1;

FIG. 5 is a diagram for explaining a relationship between a substrate detection sensor and a light receiving hole of an aperture.

FIG. 6 is a block diagram showing a control system of the film thickness measuring device of FIG.

FIG. 7 is a flowchart for explaining a work flow and operation in the film thickness measuring device of FIG. 1;

FIG. 8 is a front view of a cassette having a substrate inserted into a stepped groove.

9 is a diagram showing an output signal of a substrate detection sensor and an output signal of a slit sensor in the cassette of FIG.

FIG. 10 is a diagram showing an output signal of a substrate detection sensor and an output signal of a slit sensor of the substrate detection device in a cassette according to the second embodiment of the present invention.

FIG. 11 is a perspective view showing an example of a conventional substrate processing apparatus.

12 is a front view, a cross-sectional view of the cassette shown in FIG. 11, and an output signal of a light receiving unit of the substrate detection sensor.

FIG. 13 is a view for explaining the movement of the hand until the substrate of FIG. 12 is lifted.

[Explanation of symbols]

 Reference Signs List 4 ball screw 5 motor 6a driven pulley 6b drive pulley 7 belt 8 screw member 9 substrate detection section 9a sensor frame section 9b base section 9c light emitting section 9d light receiving section 9f slit sensor 10 cassette mounting plate 10a elevating hole 13 slit member 13a slit groove 14 control unit 19 board detection sensor

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiroyuki Yasui 4-chome Tenjin Kitamachi 1-chome, Horikawa-dori-Teranouchi, Kamigyo-ku, Kyoto Dainippon Screen Mfg. Co., Ltd. (72) Inventor Yoshikazu Sezaki, Kyoto F-term (reference) 5F031 CA02 CA05 DA01 JA05 JA22 JA25

Claims (7)

[Claims] 1. A substrate detecting device in a cassette for detecting a substrate in a cassette in which substrates are inserted into grooves provided in a plurality of stages, wherein the device emits light into the cassette and receives light passing through the cassette. A substrate detection sensor that outputs a detection signal corresponding to light reception and light shielding; a reference member having a plurality of detected portions corresponding to a plurality of grooves in the cassette; and detecting and detecting the detected portion of the reference member. A reference member detection sensor that outputs a detection signal in response to non-detection, and while moving the substrate detection sensor in the vertical direction of the cassette, synchronizing the movement of the substrate detection sensor with the reference member detection sensor to the reference member. Moving means for moving the reference member detection sensor at a first timing of the detection signal of the reference member detection sensor; Based on the state of the detection signal of the substrate detection sensor at the second timing of the detection signal of the substrate, the presence or absence of the substrate in each groove in the cassette and the normal insertion state or the stepped insertion state of each substrate in the cassette are determined. An in-cassette substrate detection device, comprising: a determination unit. 2. The detection signal of the substrate detection sensor is in a first state when light is blocked, and is in a second state when light is received. The detection signal of the reference member detection sensor is a detection signal of the detected portion of the reference member. When the substrate is inserted in a plurality of grooves in the cassette in a normal state, the detection signal of the reference member detection sensor is changed to a third state when the detected portion is not detected. 4th
The time when the detection signal of the substrate detection sensor is in the first state when the state changes from the state to the third state, and the time when the detection signal of the reference member detection sensor changes from the third state to the fourth state 2. The substrate detecting device according to claim 1, wherein the positional relationship of the reference member with respect to the cassette is set so that the detection signal of the substrate detecting sensor is in the second state. 3. The first timing is when the detection signal of the reference member detection sensor changes from a fourth state to a third state, and the second timing is a time when the detection signal of the reference member detection sensor changes. At a time when the detection signal changes from a third state to a fourth state, wherein the determination unit determines that the detection signal of the substrate detection sensor is in the first state at the first timing and the second timing When the detection signal of the substrate detection sensor is in the second state, it is determined that the substrate is present in the corresponding groove of the cassette, and the detection signal of the substrate detection sensor is in the second state at the first timing. When the detection signal of the substrate detection sensor is in the second state at the second timing, it is determined that the substrate is not present in the corresponding groove in the cassette, and the substrate detection sensor is determined at the first timing. When the detection signal is in the second state and the detection signal of the substrate detection sensor is in the first state at the second timing, it is determined that the substrate is inserted into the stepped groove in the cassette. The substrate detecting device in a cassette according to claim 2, wherein: 4. A detection signal of the substrate detection sensor is in a first state when light is shielded, and is in a second state when light is received. The detection signal of the reference member detection sensor is a detection signal of the detected portion of the reference member. When the substrate is inserted in a plurality of grooves in the cassette in a normal state, the detection signal of the reference member detection sensor is changed to a third state when the detected portion is not detected. Third
The detection signal of the substrate detection sensor is in the first state at a predetermined timing within the period of the state, and the detection signal of the reference member detection sensor is at the predetermined timing within the period of the fourth state. The detection signal of the substrate detection sensor is the second
2. The substrate detecting device in a cassette according to claim 1, wherein the positional relationship of the reference member with respect to the cassette is set so as to be in the state described above. 5. The first timing is a predetermined timing within a period when a detection signal of the reference member detection sensor is in a third state, and the second timing is a detection of the reference member detection sensor. A predetermined timing within a period in which the signal is in a fourth state, wherein the determination unit determines that the detection signal of the substrate detection sensor is in the first state at the first timing and the detection signal is at the second timing. When the detection signal of the substrate detection sensor is in the second state, it is determined that the substrate is present in the corresponding groove of the cassette, and the detection signal of the substrate detection sensor is in the second state at the first timing, and When the detection signal of the substrate detection sensor is in the second state at the second timing, it is determined that the substrate does not exist in the corresponding groove in the cassette, and the substrate detection sensor is determined at the first timing. When the detection signal of the substrate is in the second state and the detection signal of the substrate detection sensor is in the first state at the second timing, it is determined that the substrate is inserted into the stepped groove in the cassette. 5. The apparatus for detecting a substrate in a cassette according to claim 4, wherein: 6. A cassette mounting portion on which a cassette is mounted and having a pair of openings at positions sandwiching the mounted cassette, and insertable from below into the pair of openings of the cassette mounting portion. A sensor support member having a pair of support portions movably provided in a vertical direction, wherein the substrate detection sensor is provided at an upper end of one of the support portions of the sensor support member, and emits light. And a light receiving unit provided at an upper end of the other support unit of the sensor support member and receiving light emitted from the light projecting unit. 6. The sensor support member according to claim 1, wherein the sensor support member is moved up and down so that the pair of support portions protrude upward from the pair of openings of the cassette mounting portion. Detector for substrate in cassette as described 7. The plurality of detected parts of the reference member,
The substrate detecting device in a cassette according to any one of claims 1 to 6, wherein the substrate detecting device includes a plurality of openings.