CN108292621B

CN108292621B - Load port

Info

Publication number: CN108292621B
Application number: CN201680069222.6A
Authority: CN
Inventors: 森鼻俊光; 大泽真弘; 松本祐贵
Original assignee: Sinfonia Technology Co Ltd
Current assignee: Sinfonia Technology Co Ltd
Priority date: 2015-11-30
Filing date: 2016-11-29
Publication date: 2023-08-18
Anticipated expiration: 2036-11-29
Also published as: KR102701094B1; WO2017094694A1; CN117038541A; KR20180087260A; CN108292621A; TW201740495A

Abstract

The mapping sensor (30) provided in the load port (1) is a sensor for mapping an FFC (an example of an object to be processed) stored in a cassette (51 (52)). The mapping sensor (30) has a sensor unit (31) and a lifting unit (32) for lifting and lowering the sensor unit (31). The mapping sensor (30) is disposed on the opposite side of the susceptor (10) of the load port (1) from the side of the transport space.

Description

Load port

Technical Field

The present invention relates to a load port for placing a container for accommodating an object to be processed such as a wafer in and out of a transport space.

Background

The above-mentioned containers include a closed container having an openable lid called FOUP (Front-Opening Unified Pod) and an open container called an open type cartridge. A plurality of shelves are provided inside these containers, and a plurality of objects to be processed such as wafers are stored in the containers in a horizontal posture with a constant interval in the vertical direction. Here, in general, the load port has a mapping function. The mapping function is a function of detecting the presence or absence of a plurality of objects to be processed, such as wafers, stored in the container, in a storage state such as a tilt state.

As a technique related to the mapping function described above, there is a technique described in patent document 1, for example. The conventional technology is configured as follows. A mapping device with a mapping sensor is arranged on the back side (in a conveying chamber) of the loading port and can move up and down together with a door (a door of the loading port) for separating the conveying space from the outside. The mapping device has a swing frame, and the mapping sensor is inserted into the container by swinging the swing frame toward the container side such as the open cassette or the FOUP.

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2015-50410

Disclosure of Invention

Problems to be solved by the invention

The above-described conventional techniques have the following problems. Since the elevating mechanism and the swinging mechanism constituting the mapping device described in patent document 1 are located on the back side (in the transfer chamber) of the load port, particles (minute dust) are generated from these mechanism parts. Further, particles adhering to the door and the transport chamber are caused to fly in the transport chamber by an air flow generated by the lifting and swinging of the mapping device. Since a clean environment (clean environment) must be maintained in the transfer chamber, generation and flying of particles in the transfer chamber are not preferable. Furthermore, based on the result of the mapping, once an error is found, the open door must be closed again. The container storing the processed object in which the error is found in the map is replaced, but the replacement of the container is delayed by an amount corresponding to the operation of closing the opened door again, compared with the case where there is no door closing operation.

The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a load port having a mapping function capable of avoiding generation of particles in a transport space (in a transport chamber) due to a mapping operation and eliminating the need for opening and closing a door of the load port due to the mapping operation.

Solution for solving the problem

The load port of the present invention comprises: a base which is arranged vertically, forms a part of a partition wall for dividing a conveying space, and has a base opening for carrying in and out an object to be processed with respect to the conveying space; a mounting table provided on a side of the base opposite to the side of the conveying space, the mounting table being configured to mount a container for accommodating a plurality of objects to be processed; and a door for opening and closing the base opening. The load port includes a mapping sensor having a sensor portion and a lifting portion for lifting and lowering the sensor portion, the mapping sensor being disposed on a side of the base opposite to the side of the transport space, for mapping the object to be processed stored in the container.

With this configuration, since the mapping sensor including the sensor unit and the lifting unit for lifting and lowering the sensor unit is disposed outside the conveyance space, no fine particles are generated in the conveyance space by the mapping operation. Further, since the opening and closing of the door of the load port are separated from the mapping operation, the opening and closing of the door by the mapping operation can be unnecessary.

In addition, the following effects can be obtained by adopting the above-described configuration. The conveying area for conveying the processed object by the processed object conveying robot arranged in the conveying space is not narrowed by the mapping sensor.

In the present invention, it is preferable that the container has an opening on a side closer to the transport space than on a side opposite thereto in a state of being placed on the placement table, the sensor unit has a light emitting element unit and a light receiving element unit which are disposed outside the container in a state of being placed on the placement table and are located at positions sandwiching the object to be processed stored in the container in a plan view, and light is irradiated from the light emitting element unit to the light receiving element unit through the opening of the container.

With this configuration, light from the mapping sensor is passed through the opening of the container, and therefore, the light is prevented from being diffusely reflected, and the mapping accuracy is improved. Further, since the light emitting element portion and the light receiving element portion of the sensor portion that move up and down can be mapped while being arranged outside the container that houses the object to be processed, the mapping can be performed regardless of the type and size of the container. In other words, even a plurality of containers or containers of different sizes can be mapped without replacing the mapping sensor.

In the present invention, it is preferable that the door is operated to open the base opening after the object to be processed stored in the container is mapped by the mapping sensor.

With this configuration, since mapping can be performed before the base opening (door opening) is opened, a container having an error can be replaced at an early stage.

It is also preferred that the mapping parameters corresponding to the containers are automatically selected.

With this configuration, even a plurality of containers and containers of different sizes can be mapped promptly.

In the present invention, it is preferable that the load port includes an openable/closable cover for covering the container and the mapping sensor mounted on the mounting table, and the object to be processed stored in the container is mapped by the mapping sensor after the container and the mapping sensor mounted on the mounting table are covered with the cover.

With this configuration, the hand can be prevented from touching the container or the mapping sensor during the mapping operation.

In the present invention, it is preferable that the cover includes a plurality of divided covers in divided form, and the plurality of divided covers are configured to be capable of being retracted to a space above the mounting table and a space below the mounting table.

Here, for example, the cover provided in the load port described in japanese patent application laid-open No. 4474922 and japanese patent application laid-open No. 2003-249535 is configured to be entirely retracted below the mounting table of the load port. With the cover having such a structure, it is difficult to secure a storage space for mechanical mechanisms and electrical equipment below the mounting table. Even if the storage space can be ensured, the storage space becomes complicated.

On the other hand, in the above-described configuration of the present invention, the openable/closable cover covering the container and the mapping sensor is provided as a plurality of divided covers in divided form, so that the degree of freedom in arrangement of the cover and the shape of the cover increases. Since the plurality of divided covers are retracted to the space above the mounting table and below the mounting table, not to the space below the mounting table, it is easy to secure the mechanical mechanism and the storage space for the electrical equipment required for the load port below the mounting table of the load port, compared with the case where the covers are all retracted to the space below the mounting table.

In the present invention, it is also preferable that the plurality of division covers have: a 1 st cover which covers the front side of the mounting table and can be lifted and lowered to retract into a space below the mounting table when the cover is opened; and a 2 nd cover which is placed on the 1 st cover and covers the upper side of the placement table, and which can perform a rotation operation so as to retract to the upper side of the placement table when the placement table is in the open state.

In this configuration, in particular, the division cover retracted into the space below the mounting table is configured to move up and down, so that it is easier to secure the storage space for the mechanical mechanism and the electrical equipment required for the load port below the mounting table of the load port.

In the present invention, it is preferable that a driving device for operating the plurality of division covers is provided in each of the plurality of division covers.

With this configuration, the division cover can be automatically opened and closed. Accordingly, it is possible to control such as automatically opening only the necessary division cover or automatically opening the division cover within a minimum necessary range depending on the method of conveying the container or the type of container.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, it is possible to provide a load port having a mapping function capable of avoiding generation of particles in a transport space (in a transport chamber) due to a mapping operation and eliminating the need for opening and closing a door of the load port due to the mapping operation.

Drawings

Fig. 1 is a schematic plan view of an entire apparatus for manufacturing a semiconductor including a load port according to an embodiment of the present invention.

Fig. 2A is a perspective view of the load port shown in fig. 1, and is a perspective view of the load port showing a state in which the cover is closed.

Fig. 2B is a perspective view of the load port shown in fig. 1, and is a perspective view of the load port showing a state in which the cover is opened.

Fig. 3 is a top view of the load port shown in fig. 2B from above.

Fig. 4 is a perspective view showing an adapter and a cassette mounted on a mounting table of a load port.

Fig. 5 is a perspective view showing an adapter and a cassette mounted on a mounting table of a load port.

Fig. 6 is a perspective view showing an internal structure of the load port (the state in which the 1 st cover is lowered) of the load port shown in fig. 2A and 2B with the cover, the base, and the 2 nd cover removed.

Fig. 7 is a perspective view showing an internal structure of the load port (the state in which the 1 st cover is raised) of the load port shown in fig. 2A and 2B with the outer cover, the base, and the 2 nd cover removed.

Fig. 8 is a perspective view showing an upper portion of the load port shown in fig. 7 (a state where the 2 nd cover is attached).

Fig. 9 is a right side view of fig. 8.

Fig. 10 is a left side view of fig. 8.

Fig. 11 is a perspective view of the mapping sensor.

Fig. 12 is a perspective view showing a modification of the openable and closable cover covering the container and the mapping sensor.

Fig. 13 is a perspective view showing a modification of the openable and closable cover covering the container and the mapping sensor.

Detailed Description

The mode for carrying out the present invention will be described below with reference to the accompanying drawings.

(Structure of the device as a whole including the load port)

The apparatus shown in fig. 1, which includes a plurality of load ports 1 (3 in this embodiment), a transfer chamber 2, and a processing apparatus 3, can be used for semiconductor manufacturing. The load port 1 is a device for placing a container (for example, cassettes 51 and 52 (see fig. 4 and 5)) for accommodating an object to be processed such as a Wafer (Wafer) to be processed in a space (a transfer space S) in the transfer chamber 2. In addition, the wafer may be stored in the container only by the wafer (wafer directly), or may be stored in the container in a state of being attached to an adhesive tape attached to an upper surface (or a lower surface) of a FFC (Film Flame Carrier) or Hoop (loop Ring). Hereinafter, the term "FFC" refers to an FFC in which a wafer is attached to an adhesive tape attached to the upper surface (or lower surface) of FFC (Film Flame Carrier).

A transfer robot 22 is disposed in the transfer chamber 2, and the transfer robot 22 transfers the objects to be processed between the load port 1 and the processing apparatus 3. The transfer robot 22 takes out the object to be processed from the container placed on the load port 1, and supplies the object to be processed to the processing apparatus 3 through the transfer space S. Since the inside of the transport chamber 2 (transport space S) must be kept in a clean environment (clean environment) as described above, generation and flying of particles in the transport chamber 2 are not preferable. The conveyance space S is a space formed by dividing the conveyance chamber 2 laterally by a partition wall 21 that is an outer wall of the conveyance chamber 2.

The operation of the load port 1 is controlled by the control device 4. The control device 4 may control not only the load port 1 but also the equipment in the transfer chamber 2 such as the transfer robot 22. The illustration of the control device 4 in fig. 1 is an illustration for showing a case where the load port 1 is controlled by the control device 4, and does not show the arrangement position of the control device 4. The control device 4 may be incorporated into the load port 1 (space below the mounting table 11 (see fig. 2, etc.), or the control device including control of the transfer robot 22, etc. may be disposed in the transfer chamber 2.

The direction of the side to which the load port 1 is connected when viewed from the transfer chamber 2 (transfer space S) is defined as the front, the opposite direction is defined as the rear, and the direction orthogonal to the front-rear direction and the vertical direction is defined as the side, and these directions are shown in fig. 1. The front, rear, and side directions shown in the drawings after fig. 2 coincide with the front, rear, and side directions shown in fig. 1.

(Structure of load port)

The structure of the load port 1 will be described with reference to fig. 2A to 11. As shown in fig. 2A and 2B, the load port 1 has a plate-shaped susceptor 10, and the susceptor 10 constitutes a part of a partition wall 21 that divides the conveyance space S. The susceptor 10 is disposed upright, and the susceptor 10 is provided with a susceptor opening 10a (see fig. 2B) as an opening for carrying in and carrying out the object to be processed in the conveying space S. In order to keep the conveyance space S in a clean state, the base opening 10a is normally closed by the door 12.

A mounting table 11 is provided on the opposite side of the base 10 from the side of the conveyance space S, that is, in front of the base 10, and the mounting table 11 mounts a container for accommodating a plurality of objects to be processed.

Fig. 4 and 5 show an example of a container for storing an object to be processed. The cassette 51 shown in fig. 4 and the cassette 52 shown in fig. 5 are containers for accommodating a plurality of FFCs, respectively, and the cassette 51 shown in fig. 4 is a container for accommodating an FFC having a smaller diameter than the FFC accommodated in the cassette 52 shown in fig. 5. Fig. 4 and 5 each show only 1 FFC, but a plurality of FFCs are stored in the cassettes 51 and 52 in a horizontal posture with a constant interval in the vertical direction. The cassette 51 has an opening 51a at the rear (on the side of the conveying space S) and an opening 51b at the front (on the opposite side) in a state of being placed on the placement table 11, and the cassette 52 has an opening 52a at the rear (on the side of the conveying space S) and an opening 52b at the front (on the opposite side) in a state of being placed on the placement table 11.

Here, the cassettes 51 and 52 are placed on the placement table 11 with the FFC adapter 20 commonly used for the cassettes 51 and 52 interposed therebetween. The FFC adapter 20 includes optical cassette size detection sensors 42 (42 a, 42 b). The cassette size detection sensor 42, which is composed of two sets of sensors, is a sensor for detecting which cassette 51, 52 is mounted on the FFC adapter 20. When the inner cassette size detection sensor 42a is on (light shielding state) but the outer cassette size detection sensor 42b is not on (light projecting state), a small cassette 51 (fig. 4) is mounted on the FFC adapter 20. In contrast, when both of the cassette size detection sensors 42a and 42b are on, a large cassette 52 (fig. 5) is mounted on the FFC adapter 20. It is needless to say that, when both of the cassette size detection sensors 42a and 42b are not on, no cassette is placed on the FFC adapter 20.

Since the size of the cartridge is in one-to-one relationship with the size of the FFC, detecting the size of the cartridge is also detecting the size of the FFC. That is, the size of the FFC is detected by the cassette size detection sensor 42.

The cartridge size detection sensors 42 (42 a, 42 b) are connected to the connector 20a provided in the FFC adapter 20 by a cable or the like, and signals from the cartridge size detection sensors 42 (42 a, 42 b) are transmitted to the control device 4 via the connector 20 a. That is, the FFC adapter 20 transmits the FFC size information into the control device 4.

Mapping sensor

The load port 1 includes a mapping sensor 30, and the mapping sensor 30 is configured to map a plurality of FFCs stored in the cassettes 51 and 52. As shown in fig. 2B and 3, the mapping sensor 30 is disposed on the opposite side of the base 10 from the conveyance space S, that is, in front of the base 10. The mapping sensor 30 is an optical sensor. The optical sensor includes a laser sensor.

As shown in fig. 11, the mapping sensor 30 includes a sensor unit 31 and a lifting unit 32 for lifting and lowering the sensor unit 31.

The sensor unit 31 includes a light emitting element unit 33a and a light receiving element unit 33b at both end distal end portions of a sensor support member 34 having a japanese katakana コ shape in plan view. The sensor 33 is constituted by 1 group of light emitting element sections 33a and light receiving element sections 33b. A cable 35 is connected to the light emitting element portion 33a and the light receiving element portion 33b, and a signal from the sensor 33 is transmitted to the control device 4 via the cable 35. The cable drag chain (registered trademark) 39 shown in fig. 11 is a cable drag chain for the sensor 33.

The lifting portion 32 has a sensor portion support member 36 whose end is fixed to the central portion of the sensor support member 34, a ball screw 37 for lifting the sensor portion support member 36, and a motor 38 for rotating the ball screw 37.

As shown in fig. 3, the light emitting element portion 33a is disposed in front of the mounting table 11, and the light receiving element portion 33b is disposed behind the mounting table 11. That is, in a state in which the cassette 51 or the cassette 52 is mounted on the mounting table 11 via the FFC adapter 20, the light emitting element portion 33a and the light receiving element portion 33b are disposed outside the cassettes 51 and 52 and are positioned so as to sandwich the plurality of FFCs stored in the cassettes 51 and 52 in a plan view.

The map sensor 30 is retracted to a predetermined retracted position when not mapped. The retracted position is set in advance at a position which does not interfere with the cartridges 51, 52 and the FFC adapter 20 in the movable range of the mapping sensor 30. In the present embodiment, since the retracted position is set below the mounting table 11, interference between the mapping sensor 30 and the cassette 51, 52 or the FFC adapter 20 can be prevented when the cassette 51, 52 or the FFC adapter 20 is mounted on the mounting table 11.

In the present embodiment, the distance between the light emitting element portion 33a and the light receiving element portion 33b is set to a distance at which the mount 11 does not interfere with the light emitting element portion 33a and the light receiving element portion 33b, regardless of whether the mount 11 is in the abutting (dock) position or the non-abutting position. Therefore, when the mapping sensor 30 is at the retracted position (below the mounting table 11), the mounting table 11 can freely perform the docking and undocking operations without interfering with the mapping sensor 30. Even if the retracted position is set at a position higher than the cassettes 51 and 52 and the FFC adapter 20 mounted on the mounting table 11, interference between the mounting table 11 and the mapping sensor 30 can be prevented during the docking and undocking operations.

The distance between the light emitting element portion 33a and the light receiving element portion 33b of the sensor portion 31 of the mapping sensor 30 is preferably set in advance to a distance that can accommodate the largest cartridge and cartridge adapter among the cartridges and cartridge adapters mounted on the mounting table 11. As a result, a plurality of cartridges and cartridge adapters can be mapped.

< cover >

As shown in fig. 2, the mounting table 11 and the mapping sensor 30 are accommodated in the housing 13 (fixed housing) of the load port 1. In the present embodiment, the front side cover of the cover 13 is constituted by covers 13a, 13b, 13c, and the side cover is constituted by a pair of left and right covers 13d, 13 e. The susceptor 10 functions as a cover with respect to the back side of the load port 1. Further, the casters 14 are attached to the bottom of the load port 1, whereby the load port 1 can be easily moved.

Openable cover covering container and mapping sensor

The load port 1 of the present embodiment further includes covers 15 and 16, and the covers 15 and 16 are openable and closable to cover the cassettes 51 and 52 mounted on the mounting table 11 via the FFC adapter 20, and the mapping sensor 30 having the sensor unit 31 that moves up and down.

The cover 15 and the cover 16 constitute 1 cover which can be opened and closed. That is, the covers 15 and 16 are an example of a plurality of divided covers in divided form.

The 1 st cover 15 is a cover in the shape of japanese katakana コ in plan view composed of a front side cover 15a and a pair of left and right side covers 15b, and moves up and down (moves up and down) by a cylinder 61 as a driving device shown in fig. 6 and 7 in accordance with a command from the control device 4.

The number of cylinders 61 is 1 below the pair of left and right side covers 15b, and the upper end (cylinder rod 61 a) of the cylinder 61 is attached to the lower side cover 15b and the lower end (cylinder body 61 b) is attached to the frame of the load port 1.

Further, a guide rail 62 extending linearly in the up-down direction is provided on the outer surface of the inner cover 19 (19 a, 19 b) described later, and the 1 st cover 15 moves up and down along the guide rail 62.

The cylinder body 61b has two pressure chambers, not shown, inside thereof. When air is supplied to one pressure chamber, the cylinder rod 61a is extended, and the 1 st cover 15 is lifted. When air is supplied to the other pressure chamber, the cylinder rod 61b contracts, and the 1 st cover 15 descends. By adjusting the pressure in the cylinder main body 61b in this way, the 1 st cover 15 is lifted and lowered. A damper 63 and an elastic stopper 64 (e.g., a rubber plate) are disposed below the 1 st cover 15 to absorb the impact of the 1 st cover 15 falling down. When one pressure chamber is supplied with air, the other pressure chamber is exhausted.

The 2 nd cover 16 will be described mainly with reference to fig. 8 to 10. The 2 nd cover 16 is a cover for covering the cassette 51 (52) and the upper plate shape of the mapping sensor 30, and is placed on the 1 st cover 15 pushed out to the upper side. The 2 nd cover 16 rotates about a hinge 18 as a fulcrum by a cylinder 17 as a driving device in accordance with a command from the control device 4. As shown in fig. 2B and 3, fixed inner covers 19 (19 a and 19B) are provided on both sides of the mounting table 11, and the cylinder 17 is disposed between the inner cover 19B and the outer cover 13 d. The space between the inner cover 19a and the inner cover 19b ensures a space that does not interfere with the containers such as the cassettes 51 and 52 mounted on the mounting table 11.

The cylinder 17 is disposed below one side end portion of the 2 nd cover 16, and an upper end portion (cylinder rod 17 a) of the cylinder 17 is attached to a rear surface of the 2 nd cover 16, and a lower end portion (cylinder body 17 b) is attached to a frame of the load port 1.

Further, a damper 65 is disposed below the other side end portion of the 2 nd cover 16 as a safety device. The upper end of the damper 65 is attached to the back surface of the 2 nd housing 16, and the lower end is attached to the frame of the load port 1. The damper 65 always biases the 2 nd cover 16 upward with a force weaker than the force (closing direction) for rotating the 2 nd cover 16. The biasing force of the damper 65 is set to be higher than the weight of the 2 nd cover 16 when the rotation angle is set in advance. The rotation angle is preferably 10 degrees to 45 degrees. In the present embodiment, the rotation angle is set to 15 degrees.

The cylinder body 17b has two pressure chambers, not shown, inside thereof. The cylinder body 17b is rotatably disposed about the lower end portion. When air is supplied to one pressure chamber of the cylinder body 17b, the cylinder rod 17a is extended and rotated centering on the lower end portion, and the cylinder body 17b is rotated from the upright state of fig. 7 to the tilted state of fig. 8. The force of the cylinder body 17b to extend the cylinder rod 17a is converted into a force to rotate the 2 nd cover 16 upward. When air is supplied to the other pressure chamber in the cylinder main body 17b, the cylinder rod 17a contracts and rotates in the opposite direction about the lower end portion. Thereby, the force of the cylinder body 17b contracting the cylinder body 17b is converted into the force of rotating the 2 nd cover 16 downward. By adjusting the pressure in the cylinder body 17b in this way, the 2 nd cover 16 is rotated by the force of lifting and lowering the cylinder rod 17 a. In addition, when air is supplied to one pressure chamber, the air in the other pressure chamber is discharged. The damper 65 is also configured to rotate about its lower end.

Here, if the cylinder 17 serving as a driving unit for rotating the 2 nd cover 16 fails during operation due to some cause (such as air leakage of the cylinder 17), and the cylinder 17 becomes inactive, the biasing force of the damper 65 is greater than the weight of the 2 nd cover 16 when the rotation angle is 15 degrees or more, and therefore the 2 nd cover 16 returns to the retracted position. On the other hand, when the rotation angle is smaller than 15 degrees, the urging force of the damper 65 is smaller than the self weight of the 2 nd cover 16, and therefore the 2 nd cover 16 slowly falls down.

As a result, even if the cylinder 17 fails due to some cause, the 2 nd cover 16 is moved to the retracted position by the damper 65 or gradually falls down, so that the 2 nd cover 16 can be prevented from closing strongly due to its own weight.

Here, as is clear from fig. 2B, the upper end portion of the cover 13d constituting the upper side of the side cover in the outer cover 13 is set to a height dimension such that the cylinder 17 and the damper 65 are not exposed to the outside. Since the cylinder 17 and the damper 65 are movable components, the movable components are not exposed to the outside, and thus the safety is excellent.

Further, since the cylinder 17 and the damper 65, which are movable components, are disposed between the outer cover 13d and the inner cover 19 (19 a, 19 b), respectively, it is possible to prevent particles (minute dust) from these movable components from diffusing to the upper space of the mounting table 11 provided with the cassette outside the load port 1.

(action of load port)

The operation of the load port 1 (control of the load port 1 by the control device 4) will be described. Here, as an example, the FFC adapter 20 shown in fig. 4 and 5 is set to be mounted on the mounting table 11 of the load port 1. First, the covers 15 and 16 are opened, and the sensor unit 31 of the mapping sensor 30 is lowered to a level lower than the height level of the mounting table 11 (standby state, see fig. 2B). The mounting table 11 is located at a position (=undock position) shown in fig. 2B and 3. Although not described, the load port 1 (control device 4) recognizes that the processing target is the FFC by attaching the FFC adapter 20 to the mounting table 11 of the load port 1. The movement of each part of the load port 1 described below is performed based on an instruction from the control device 4. The UNDOCK position is a position where the adaptor or the container is placed in a range where the placement stage 11 is movable. The UNDOCK position may also be referred to as a mounting position.

Typically, the supply of the FFC stored in the small cassette 51 to the conveyance space S will be described. When the cassette 51 shown in fig. 4 storing a plurality of FFCs is placed on the FFC adapter 20, the 1 st cover 15 is lifted up and the 2 nd cover 16 is fallen down, so that the covers 15 and 16 are closed (the cassette 51 and the mapping sensor 30 are covered with the covers 15 and 16). The size of the FFC to be processed is identified by detecting the size of the cassette 51 by the cassette size detection sensor 42 provided in the adapter 20 for FFC. The control device 4 automatically selects a map parameter corresponding to the size of the cassette 51, that is, a map parameter corresponding to the size of the FFC.

After that, the sensor unit 31 of the mapping sensor 30 is lifted up, and the FFCs stored in the cassette 51 in multiple layers are mapped (the mapping sensor moves in the space covered by the covers 15 and 16). The mapping means detecting (checking) whether or not the FFC stored in the cassette 51 is stored in each layer, such as whether or not it is tilted. When light is irradiated from the light emitting element portion 33a to the light receiving element portion 33b through the opening portion of the cartridge 51, the FFC is shielded from light in the case where the FFC is present, whereby the presence of the FFC is detected. On the other hand, when the FFC is not present, the irradiated light reaches the light receiving element 33b, and the FFC is detected as not present. When the mapping is completed, the sensor unit 31 of the mapping sensor 30 is lowered to a level lower than the height level of the mounting table 11.

When the door 12 separating the transport space S of the transport chamber 2 is opened (the door 12 moves downward) and the stage 11 is horizontally moved toward the door 12 by a predetermined distance (moved to the DOCK position) if the door is judged to be normal based on the mapping result. The FFC in the cassette 51 is placed into the conveyance space S from the base opening 10a by the conveyance robot 22 (see fig. 1). The DOCK position is a position where the transfer robot 22 is moved to and from the container within a movable range of the mounting table 11. The DOCK position may also be referred to as a transport position.

When all FFCs are placed into the transport space S (or introduced after placement), the door 12 is closed (the door 12 moves upward), and the mounting table 11 is moved to the UNDOCK position. After that, the covers 15, 16 are opened. The empty cassette 51 is taken out of the load port 1 by a conveying member not shown.

On the other hand, if the result of the mapping is determined to be incorrect, the covers 15, 16 are opened without opening the door 12. The cassette 51 accommodating the FFC is taken out from the load port 1 by a conveying member not shown. The 1 st cover 15 descends to the right below and retreats to the inside of the cover 13, which is the corner of the space below the mounting table 11. The 2 nd cover 16 is rotated upward and retracted above the mounting table 11.

On the other hand, if the result of the mapping is determined to be incorrect, the covers 15, 16 are opened without opening the door 12. The cassette 51 accommodating the FFC is taken out from the load port 1 by a conveying member not shown.

Here, since the light emitting element portion 33a and the light receiving element portion 33b constituting the mapping sensor 30 of the present embodiment are disposed outside the cassettes 51 and 52 in a state of being mounted on the mounting table 11, mapping can be performed without changing the mapping sensor regardless of the smaller FFC or the larger FFC, that is, even the FFC having different sizes.

The map parameter is information about the operation of the map, such as a map start position, a map end position, a map speed, a sensor output discrimination method/discrimination reference (a reference for determining whether or not a predetermined number of objects to be processed have been changed by the sensor because the thickness and the groove pitch are different depending on FFC, hoopRing, wafer). These map parameters may be stored in the control device 4 in advance, or may be received from the outside by wired or wireless means. Further, if the mapping parameters for FFC, hooping, and wafer are prepared based on the difference in wafer size, the mapping parameters can be automatically selected.

The mapping start position is set at a position equal to or higher than the height of the FFC at the highest position among the FFCs stored in the cassette. On the other hand, the map end position is set at the same position as or lower than the FFC (object to be processed) at the lowest position among the FFCs. The mapping start position and the mapping end position may be exchanged. Further, since the number of FFCs stored in the cassette may be different, the height of the mapping start position or the mapping end position may be changed for each cassette.

Here, in the present embodiment, the cover for covering the container is constituted by a plurality of divided covers in divided form, like the 1 st cover 15 and the 2 nd cover 16. This increases the degree of freedom in the arrangement of the cover and the shape of the cover, and as a result, the cover volume can be increased. Therefore, the load port 1 of the present embodiment can cover the container and the map sensor as a whole.

Further, since the 1 st cover 15 is structured to move up and down (move up and down), and the 2 nd cover 16 does not protrude forward of the housing 13 to rotate, the 1 st cover 15 and the 2 nd cover 16 do not protrude forward of the housing 13 during the operation of the 1 st cover 15 and the 2 nd cover 16. Therefore, these open-close covers do not interfere with the operator who moves in front of the load port 1.

Further, since the mapping is performed in a state where the covers 15 and 16 are closed, light from outside the apparatus is less likely to enter the sensor portion 31 of the mapping sensor 30, and thus the sensor accuracy (mapping accuracy) is increased.

(modification)

In the above-described embodiment, the cassette 51 (52) having a total of two openings 51a, 51b (52 a, 52 b) on the opposite side of the conveyance space S in the state of being placed on the placement table 11 is illustrated as an example of the container, but the number of openings of the container may be 1 or the container may be a container without any opening. The reason for this is that, in the case of using an optical sensor, the sensor function can be exhibited by making a portion of the container located in the light irradiation path (optical axis) transparent.

In addition, if the reflective sensor described below is used, there may be only 1 opening (or transparent portion) of the container.

Examples of the object to be processed include a semiconductor substrate such as a wafer, a glass substrate (a substrate for a display such as a liquid crystal panel or an organic/inorganic EL), a plate in which cells or the like can be stored, a culture dish, and the like. As the container, in addition to the open type containers called open type cassettes such as the cassettes 51 and 52 shown in the above-described embodiment, a closed type container called FOUP having a lid capable of opening and closing can be cited.

Instead of the light emitting element portion 33a and the light receiving element portion 33b disposed at a position sandwiching the object in a plan view, the mapping sensor may be configured as a sensor structure (reflective sensor) in which the light emitting element portion 33a and the light receiving element portion 33b are brought close to each other, and the light receiving element portion 33b detects the light reflected by the object to be processed, thereby detecting the presence or absence of the object to be processed. In the case of the reflective sensor, the light emitting element portion 33a and the light receiving element portion 33b are not required to be arranged so as to face each other with the container interposed therebetween as in the above-described embodiment, and thus the degree of freedom in design of the structure and the installation space of the sensor increases.

The direction of the optical axis connecting the light emitting element portion 33a and the light receiving element portion 33b does not necessarily have to be the front-rear direction of the load port 1, and may be a direction lateral to the load port 1 (left-right direction) or a direction inclined with respect to the front-rear direction of the load port 1. In addition, since the sensor function of the mapping sensor must be ensured, the position of the opening portion of the container and the position of the transparent portion must be determined so that the light from the sensor passes through.

Further, although the driving means including the ball screw 37 and the motor 38 for rotating the ball screw 37 is shown as the driving means for lifting and lowering the sensor portion 31, a linear motor, a cylinder, or the like may be used instead as the driving means for lifting and lowering the sensor portion 31.

The mapping sensor 30 is an optical sensor, but instead, a sensor using a detection wave such as an electromagnetic wave or an ultrasonic wave may be used.

In the above embodiment, the front and side of the container (cassette) and the mapping sensor 30 mounted on the mounting table 11 are covered with the 1 st cover 15 that moves up and down, and the upper side of the container (cassette) and the mapping sensor 30 mounted on the mounting table 11 is covered with the 2 nd cover 16 that rotates, but the 2 nd cover 16 may be omitted.

Also, both the 1 st cover 15 and the 2 nd cover 16 may be omitted.

In the above embodiment, the container (cassette) is placed on the stage of the load port via the adapter, but the load port may be a stage on which the container is directly placed.

When the FOUP is placed on the load port, the door 12 is preferably configured to be capable of fixing and releasing the lid body to and from the container. Specifically, in order to fix and release the lid body to and from the container, a key is provided to the door 12, and the lid body can be attached to and detached from the container by rotating the key after the key is inserted into the key hole of the lid. In the case of removing and attaching the lid, the door 12 is provided with an adsorption portion, and one of the mounting table 11 and the door 12 is moved in the horizontal direction in a state where the lid is adsorbed and held by the door 12, so that the lid can be removed and attached to the container.

Fig. 12 and 13 show modifications of the openable and closable cover for covering the containers (the containers and the mapping sensors) placed on the placement table 11. The openable and closable cover shown in fig. 12 is composed of a cover 66 that performs a rotational operation and 1 set of covers 67 that move up and down. The cover 66 is an L-shaped cover in side view, and rotates around a rotation axis above the mounting table 11. The cover 66 covers the front side and the upper side of the mounting table 11. The cover 67 is a flat plate-shaped cover, and covers the side of the mounting table 11.

The openable and closable cover shown in fig. 13 is composed of 1 set of covers 68 that perform a rotational operation and covers 69 that move up and down. The cover 68 is a flat plate-shaped cover that rotates about a rotation axis above the mounting table 11. The cover 68 covers the upper side of the mounting table 11. The cover 69 is a flat plate-shaped cover that covers the front side of the mounting table 11. Further, shown at 70 is a stationary shroud in an upright configuration.

In the above embodiment, the 1 st cover 15 and the 2 nd cover 16 are retracted simultaneously, but the present invention is not limited thereto. For example, when the container is transported to the loading table of the loading port by the ceiling-mounted traveling unmanned transport vehicle such as OHT (Overhead Hoist Transfer), only the 2 nd cover 16 may be moved to the retracted position.

In the case where the container is placed on the loading port by the floor-traveling type unmanned carrier vehicle AGV (Automated Guided Vehicle), only the 1 st cover 15 may be moved to the retracted position.

In addition, the control device 4 receives instructions from the host computer to operate the drive unit of the 1 st cover 15 and the drive unit of the 2 nd cover 16. For example, when a container conveyed by the OHT is approaching the load port, the load port 1 may be put on standby by the OHT so that the container can be placed on the mounting table 11 from above by moving only the 2 nd cover 16 to the retracted position.

Instead of the cylinder 17, the 2 nd cover 16 may be coupled to a rotation shaft, and the 2 nd cover 16 may be retracted to the retracted position by rotating the rotation shaft by a motor.

Instead of the cylinder 61, a driving device having a ball screw and a motor for rotating the ball screw may be used. Instead of the cylinder 61, a hydraulic cylinder may be used (the same applies to the cylinder 17).

Instead of the damper 65, a gas spring may be used. In the above embodiment, the 2 nd cover 16 is rotated by 1 cylinder 17, but the cylinders 17 may be disposed at both side end portions of the 2 nd cover 16, and the 2 nd cover 16 may be rotated by two cylinders 17.

The front side cover 15a of the 1 st cover 15 may be formed of a transparent member, for example. With this arrangement, the inside of the 1 st cover 15 can be visually observed even in a state where the cover is closed, and thus the operation of the mapping sensor 30 and the state where the transfer robot 22 takes out the wafer can be checked by looking into the inside from the transparent front cover 15a.

It is needless to say that various modifications can be made within the scope that can be conceived by those skilled in the art.

Description of the reference numerals

1. A load port; 2. a transport chamber; 3. a processing device; 4. a control device; 10. a base; 10a, a base opening; 11. a mounting table; 12. a door; 15. 1 st cover (cover); 16. 2 nd cover (cover); 17. a cylinder (driving device); 21. a partition wall; 30. mapping the sensor; 31. a sensor section; 32. a lifting part; 33a, a light emitting element section; 33b, a light receiving element section; 51. 52, cartridges (containers); 51a, 51b, 52a, 52b, and an opening; 61. a cylinder (driving device); s, conveying the space.

Claims

1. A load port, comprising:

a base which is arranged vertically, forms a part of a partition wall for dividing a conveying space, and has a base opening for carrying in and out an object to be processed with respect to the conveying space;

a mounting table provided on a side of the base opposite to the side of the conveying space, the mounting table being configured to mount a container for accommodating a plurality of objects to be processed; and

a door for opening and closing the base opening,

the load port is characterized in that,

the load port includes: a mapping sensor having a sensor unit and a lifting unit for lifting and lowering the sensor unit, the mapping sensor being configured to map the object to be processed stored in the container; and an openable/closable cover for covering the container and the mapping sensor mounted on the mounting table,

the mapping sensor is arranged on the opposite side of the base from the side of the conveying space,

mapping is performed without opening the door,

after the container and the mapping sensor mounted on the mounting table are covered with the cover, the object to be processed stored in the container is mapped by the mapping sensor,

the cover comprises a plurality of divided covers in divided form,

the plurality of division covers are configured to be capable of being retracted to a space above the carrying table and below the carrying table,

the plurality of division covers have:

a 1 st cover which covers the front side of the mounting table and can be lifted and lowered to retract into a space below the mounting table when the cover is opened; and

and a 2 nd cover which is placed on the 1 st cover and covers the upper side of the placement table, and which can perform a rotation operation so as to retract to the upper side of the placement table when the cover is in the open state.

2. The load port of claim 1, wherein the load port is configured to receive a load port,

the plurality of division covers are provided with driving devices for operating the plurality of division covers, respectively.

3. The load port of claim 1 or 2, wherein,

the container has an opening on a side of the container closer to the conveying space and an opposite side thereof in a state of being placed on the placement table,

the sensor unit includes a light emitting element unit and a light receiving element unit which are disposed outside the container in a state of being placed on the placement table and which sandwich the object to be processed stored in the container in a plan view,

light is irradiated from the light emitting element portion to the light receiving element portion through the opening of the container.

4. The load port of claim 1 or 2, wherein,

the direction of the optical axis of the mapping sensor is the front-back direction of the load port.

5. The load port of claim 1 or 2, wherein,

after the objects to be processed stored in the container are mapped by the mapping sensor, the door is operated to open the base opening.

6. The load port of claim 1 or 2, wherein,

the load port automatically selects the mapping parameters corresponding to the containers.