JP2000294363A - Carbon heater - Google Patents
Carbon heaterInfo
- Publication number
- JP2000294363A JP2000294363A JP11099024A JP9902499A JP2000294363A JP 2000294363 A JP2000294363 A JP 2000294363A JP 11099024 A JP11099024 A JP 11099024A JP 9902499 A JP9902499 A JP 9902499A JP 2000294363 A JP2000294363 A JP 2000294363A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- carbon heater
- coating
- film
- titanium oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
- Resistance Heating (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、基板その他のワー
クを加熱するために用いられるカーボンヒータに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carbon heater used for heating a substrate and other works.
【０００２】[0002]
【従来の技術】カーボンヒータは、一般に、急加熱、急
冷却に対する応答性が高く、また表面の温度分布が均一
であるという長所から、金属その他の材料の焼成、半導
体装置に用いられる基板の加熱等における加熱部材とし
て広く用いられている。2. Description of the Related Art Generally, carbon heaters have high responsiveness to rapid heating and rapid cooling, and have a uniform surface temperature distribution. Therefore, carbon heaters are used for firing metals and other materials and for heating substrates used in semiconductor devices. Widely used as a heating member in such as.
【０００３】従来からカーボンヒータは、その耐熱性や
耐用寿命を高めるため、その表面に、一般には炭素C
を、また炭化けい素SiC、窒化けい素SiN、窒化ホウ素B
N、窒化アルミニウムAlN等（特開平５−１３５８５８号
公報）をコーティングすることが行われている。[0003] Conventionally, carbon heaters are generally provided with carbon carbon on their surfaces in order to increase their heat resistance and service life.
And silicon carbide SiC, silicon nitride SiN, boron nitride B
N, aluminum nitride AlN, etc. (JP-A-5-135858) are being coated.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前記コ
ーティングを施した従来のカーボンヒータにおいては、
特定の用途において以下のような問題が生じていた。However, in the conventional carbon heater provided with the coating,
The following problems have occurred in specific applications.
【０００５】（１）ある種の加熱装置（例えば、特開平
１０−２８１６５１号公報）においては、板状のカーボ
ンヒータ上に、直接又は治具を介して、加熱するワーク
を搭載することがある。この場合、ワークの出し入れに
よるカーボンヒータとワーク（又は治具）との間の摩擦
により、カーボンヒータの表面に施したコーティングが
剥離又は摩耗することがある。また、カーボンヒータの
急加熱又は急冷却の繰り返しによって、前記コーディン
グが剥離した部分からカーボンが析出することがある。
これら剥離した表面のコーティング材や析出したカーボ
ンは、微少粒子となって加熱装置内に拡散し、該雰囲気
を汚染し、それによりワーク（製品）の歩留まりが悪化
する。(1) In a certain type of heating device (for example, Japanese Patent Application Laid-Open No. 10-281651), a work to be heated may be mounted on a plate-like carbon heater directly or via a jig. . In this case, the coating applied to the surface of the carbon heater may peel or wear due to friction between the carbon heater and the workpiece (or jig) due to the loading and unloading of the workpiece. In addition, due to repeated rapid heating or rapid cooling of the carbon heater, carbon may be precipitated from a portion where the coding has peeled off.
The coating material and the carbon deposited on the peeled surface become fine particles and diffuse into the heating device, thereby contaminating the atmosphere, thereby deteriorating the yield of the work (product).
【０００６】（２）また、ある種の加熱装置において
は、搭載したワークの抵抗値その他の電気的特性の測定
等、電極の一方としてカーボンヒータを機能させる等の
ために、そのコーティング材に導電性を持たせる必要が
ある。しかしながら、前記炭素C以外のコーティング材
では、所望の目的を達成するための十分な導電性能が得
られない。(2) In a certain type of heating device, a conductive material is applied to a coating material of a carbon heater in order to function a carbon heater as one of electrodes, such as measurement of a resistance value and other electrical characteristics of a mounted work. It is necessary to have sex. However, a coating material other than carbon C does not provide sufficient conductive performance to achieve a desired purpose.
【０００７】本発明の目的は、前記従来の課題を解決
し、カーボンヒータ本来の性能を損なうことなく、その
耐摩耗性、剥離強度、導電性等に優れたコーティングを
施したカーボンヒータを提供することにある。An object of the present invention is to solve the above-mentioned conventional problems and to provide a carbon heater provided with a coating having excellent wear resistance, peel strength, conductivity and the like without impairing the inherent performance of the carbon heater. It is in.
【０００８】[0008]
【課題を解決するための手段】前記目的を達成するため
本発明のカーボンヒータは、炭素Cを主成分とする基材
と、前記基材の表面を被覆する酸化チタンTiO2を主成分
とする皮膜とを備えて構成される。In order to achieve the above object, a carbon heater according to the present invention comprises, as a main component, a base material mainly composed of carbon C and titanium oxide TiO 2 covering the surface of the base material. And a film.
【０００９】発明者らの実験により、前記酸化チタンTi
O2を主成分とする皮膜は、従来のカーボンコーティング
に比して、その導電性能では劣るものの、耐摩耗性及び
剥離強度が優れており、一方でカーボンヒータの良好な
熱特性を損なうことがないということが確認された。従
って、ワークとの摩擦による皮膜の剥離や摩耗の程度を
極めて小さくすることができ、皮膜の剥離や摩耗に起因
する前記装置内雰囲気の汚染の危険性を最小にすること
ができる。According to experiments by the inventors, the titanium oxide Ti
O 2 -based coatings have poorer conductive properties than conventional carbon coatings, but have excellent abrasion resistance and peel strength, while impairing the good thermal properties of carbon heaters. It was confirmed that there was not. Therefore, the degree of peeling or abrasion of the film due to friction with the workpiece can be extremely reduced, and the risk of contamination of the atmosphere in the apparatus due to the peeling or abrasion of the film can be minimized.
【００１０】ここで、前記カーボンヒータは、その皮膜
がニッケルNiを含有するものであることが好ましい。発
明者らの実験により、前記皮膜にニッケルNiを含有する
ことによって、カーボンヒータ表面の導電性が向上し、
例えば、カーボンヒータを、ワークに通電するための電
極としても、好適に用いられることが確認された。Here, the carbon heater preferably has a film containing nickel Ni. According to the experiments of the inventors, by containing nickel Ni in the film, the conductivity of the carbon heater surface is improved,
For example, it has been confirmed that the carbon heater can be suitably used also as an electrode for energizing a work.
【００１１】ここで、前記皮膜における酸化チタンTiO2
とニッケルNiの含有率は、好ましくは約７対３の割合で
ある。Here, titanium oxide TiO 2 in the film is used.
The content of nickel and nickel is preferably about 7 to 3.
【００１２】また、前記皮膜の厚さは約１００μｍで十
分な特性（耐摩耗性、耐熱性、温度特性）が得られるこ
とが確認された。また、カーボンヒータ上に直接ワーク
を載置する場合は、熱伝達性を高めるために、前記被膜
の表面をより滑らかにすることがより好ましいが、この
場合、酸化チタンTiO2、もしくは酸化チタンTiO2とニッ
ケルNiを基材表面に溶射した後、比較的大がかりな研磨
等の仕上げ処理を行う必要がある。溶射と簡単な後処理
のみを施すことで得られる表面粗さは、Ｒａ＝４．０〜
６．０μｍ、Ｒmax＝３０〜５０μｍ程度であるが、こ
の程度の表面荒さであっても、十分な温度特性が得られ
ることが確認された。Further, it was confirmed that sufficient characteristics (abrasion resistance, heat resistance, temperature characteristics) were obtained when the thickness of the film was about 100 μm. When a work is directly placed on the carbon heater, it is more preferable to smooth the surface of the coating in order to enhance heat transfer. In this case, titanium oxide TiO 2 or titanium oxide TiO 2 is used . After spraying 2 and nickel Ni onto the surface of the base material, it is necessary to perform a relatively large finishing process such as polishing. The surface roughness obtained by performing only thermal spraying and simple post-treatment is Ra = 4.0 to Ra.
6.0 μm and Rmax = approximately 30 to 50 μm. It was confirmed that sufficient temperature characteristics could be obtained even with such a surface roughness.
【００１３】[0013]
【実施例】発明者らは、本発明に従った２種類のカーボ
ンヒータを作成し、その諸性能を測定した。実験は、一
般にカーボンヒータに用いられるカーボン基材の表面
に、膜厚１００μｍで、酸化チタンTiO2（実施例１）、
酸化チタンTiO2に＋ニッケルNiを３０％含有したもの
（実施例２）をそれぞれ溶射し、その表面抵抗、剥離強
度、耐摩耗性、温度分布特性について測定した。EXAMPLES The inventors made two types of carbon heaters according to the present invention and measured their performances. In the experiment, a titanium oxide TiO 2 (Example 1) having a film thickness of 100 μm was formed on the surface of a carbon base material generally used for a carbon heater.
Each of titanium oxide TiO 2 and + nickel Ni containing 30% (Example 2) was sprayed, and its surface resistance, peel strength, wear resistance, and temperature distribution characteristics were measured.
【００１４】なお、これらの測定前に、溶射された被膜
の表面粗さを測定したところ、 Ｒａ＝４．０〜６．０
μｍ、Ｒmax＝３０〜５０μｍ程度であった。また、表
面抵抗、剥離強度、耐摩耗性、温度分布特性の測定につ
いては、経時的なデータを得るために、各サンプルに対
し、窒素雰囲気中で４５０℃×７ｈのヒートサイクルを
６サイクル実施し、その前後において前記表面抵抗及び
剥離強度を測定した。上記のヒートサイクルの条件は、
従来のカーボンコーティングを施したカーボンヒータ
に、表面のコーティングに剥離した箇所があることが確
認された条件と同程度、もしくはやや厳しいものであ
る。 ヒートサイクルの前後における表面抵抗の測定結
果を表１に示す。Prior to these measurements, the surface roughness of the sprayed coating was measured. Ra = 4.0-6.0
μm, Rmax = about 30 to 50 μm. In addition, regarding the measurement of surface resistance, peel strength, abrasion resistance, and temperature distribution characteristics, each sample was subjected to six heat cycles of 450 ° C. × 7 h in a nitrogen atmosphere in order to obtain data over time. Before and after that, the surface resistance and the peel strength were measured. The conditions of the above heat cycle are
This is comparable or slightly more severe than the condition under which it has been confirmed that a carbon coating with a conventional carbon coating has a portion where the surface coating has peeled off. Table 1 shows the measurement results of the surface resistance before and after the heat cycle.
【００１５】[0015]
【表１】 [Table 1]
【００１６】この結果、実施例１、すなわち酸化チタン
TiO2のみのコーティングによるカーボンヒータでは、十
分な表面抵抗が得られなかったが、実施例２、すなわち
酸化チタンTiO2に＋ニッケルNiを３０％含有したものに
おいては、前記記載の目的に用いるのに十分な結果が得
られた。As a result, Example 1, namely, titanium oxide
Although a sufficient surface resistance could not be obtained with a carbon heater using only TiO 2 coating, in Example 2, that is, titanium oxide TiO 2 containing 30% of + nickel Ni was used for the purpose described above. Sufficient results were obtained.
【００１７】次に、表２に、剥離強度の測定結果を示
す。ここでは、実施例１及び実施例２を施したカーボン
ヒータに、粘着テープ（900g/20mm）を貼付け、これを
剥離してカーボン基材とコーティングとの密着性を確認
した。Next, Table 2 shows the measurement results of the peel strength. Here, an adhesive tape (900 g / 20 mm) was affixed to the carbon heater in which Example 1 and Example 2 were performed, and this was peeled off to confirm the adhesion between the carbon substrate and the coating.
【００１８】[0018]
【表２】 [Table 2]
【００１９】結果、何れの実施例においても、ヒートサ
イクルの前及び後において剥離は見られなかった。ま
た、カーボンヒータを割った際にも、その破断面近傍の
コーティングが剥がれるようなことがなかった。これに
対し、同程度のヒートサイクルを行った後のカーボンコ
ーティングを施したカーボンヒータは、表面が変色し、
更にコーティングが剥離した部分が多く確認されてい
る。また、部分的に基材のカーボンまで損傷していた箇
所も確認されている。従って、従来のカーボンヒータに
施されたカーボンコーティングに比べ、実施例１及び２
のコーティングは、基材と被膜の密着性に優れ、また、
ヒートサイクルを繰り返しても被膜自体が劣化しにくい
ことが確認された。As a result, no peeling was observed before and after the heat cycle in any of the examples. Further, even when the carbon heater was cracked, the coating near the fractured surface did not come off. On the other hand, the carbon heater with carbon coating after performing the same degree of heat cycle, the surface discolors,
Further, many portions where the coating was peeled off were confirmed. In addition, it was confirmed that carbon was partially damaged in the base material. Therefore, as compared with the carbon coating applied to the conventional carbon heater, Examples 1 and 2
Is excellent in adhesion between the substrate and the film,
It was confirmed that the coating itself did not easily deteriorate even when the heat cycle was repeated.
【００２０】また、実施例１及び２のカーボンヒータ上
に、ステンレス鋼板で作られた、重さ約１Ｋｇ程度の板
状の金属治具を摺接させて、その耐摩耗性を確認した。
その結果、何れの実施例においても、１５０往復程度で
は表面のコーティングが摩耗したり剥離したりしないこ
とが確認された。一方、従来のカーボンコーティングで
は、１往復の摺接でカーボンヒータのコーティングが部
分的に摩擦し、剥離することが確認されている。Further, a plate-shaped metal jig made of a stainless steel plate and weighing about 1 kg was brought into sliding contact with the carbon heaters of Examples 1 and 2, and its wear resistance was confirmed.
As a result, it was confirmed that the coating on the surface did not wear or peel off after about 150 reciprocations in any of the examples. On the other hand, it has been confirmed that in the conventional carbon coating, the coating of the carbon heater partially rubs and peels off in one reciprocating sliding contact.
【００２１】表３は、従来のカーボンコーティングと上
記実施例１及び２の温度分布特性を測定したグラフであ
る。測定は、各カーボンヒータ上にシリコンウェハを載
置し、この内部温度を測定することによって行った。Table 3 is a graph showing the measured temperature distribution characteristics of the conventional carbon coating and Examples 1 and 2. The measurement was performed by placing a silicon wafer on each carbon heater and measuring the internal temperature.
【００２２】[0022]
【表３】 [Table 3]
【００２３】これより、本実施例１及び２における温度
特性が、従来のものに劣ることがないことが確認され
た。From this, it was confirmed that the temperature characteristics in Examples 1 and 2 were not inferior to the conventional one.
【００２４】[0024]
【発明の効果】以上の如く本発明によって、カーボンヒ
ータ本来の良好な熱伝導特性を損なわず、耐摩耗性及び
剥離強度が優れたカーボンヒータを提供することができ
る。As described above, according to the present invention, it is possible to provide a carbon heater which is excellent in abrasion resistance and peel strength without deteriorating the good thermal conductivity inherent in the carbon heater.
【００２５】また、酸化チタンTiO2を主成分とした皮膜
に、ニッケルNiを含有したものを用いる本発明において
は、さらにその導電性が良好となり、従って、カーボン
ヒータを電極としても好適に用いることができる。Further, in the present invention in which a film mainly containing titanium oxide TiO 2 and containing nickel Ni is used, the conductivity is further improved. Therefore, the carbon heater is preferably used also as an electrode. Can be.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 宮下 剛 長野県諏訪市大和３丁目３番５号 セイコ ーエプソン株式会社内 (72)発明者 田代 広志 長野県木曽郡上松町大字荻原字川向諸原 1391−３ 株式会社信州セラミックス内 Ｆターム(参考） 3K092 PP20 QB14 VV31 4K031 AA06 AB07 AB08 CB39 CB42 FA04 4K044 AA11 AB10 BA06 BA12 BB11 BC01 BC05 BC11 BC14 CA11 CA67 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Go Miyashita 3-3-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation (72) Inventor Hiroshi Tashiro 1391 Omohara Ogawara, Koji-gun, Kiso-gun, Nagano Prefecture 1391 -3 F-term in Shinshu Ceramics Co., Ltd. (Reference) 3K092 PP20 QB14 VV31 4K031 AA06 AB07 AB08 CB39 CB42 FA04 4K044 AA11 AB10 BA06 BA12 BB11 BC01 BC05 BC11 BC14 CA11 CA67
Claims (3)
る皮膜と、を備えたことを特徴とするカーボンヒータ。1. A carbon heater comprising: a base material mainly composed of carbon C; and a coating mainly composed of titanium oxide TiO 2 covering the surface of the base material.
を特徴とする請求項１記載のカーボンヒータ。2. The carbon heater according to claim 1, wherein the coating contains nickel Ni.
ケルNiの含有率が約７対３の割合であることを特徴とす
る請求項２記載のカーボンヒータ。3. The carbon heater according to claim 2, wherein the content of titanium oxide TiO 2 and nickel Ni in the coating is about 7: 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09902499A JP3968189B2 (en) | 1999-04-06 | 1999-04-06 | Carbon heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09902499A JP3968189B2 (en) | 1999-04-06 | 1999-04-06 | Carbon heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000294363A true JP2000294363A (en) | 2000-10-20 |
| JP3968189B2 JP3968189B2 (en) | 2007-08-29 |
Family
ID=14235684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09902499A Expired - Fee Related JP3968189B2 (en) | 1999-04-06 | 1999-04-06 | Carbon heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3968189B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006236617A (en) * | 2005-02-22 | 2006-09-07 | Ngk Spark Plug Co Ltd | Ceramic heater, heat exchange unit, warm water cleaning toilet seat, and manufacturing method of ceramic heater |
-
1999
- 1999-04-06 JP JP09902499A patent/JP3968189B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006236617A (en) * | 2005-02-22 | 2006-09-07 | Ngk Spark Plug Co Ltd | Ceramic heater, heat exchange unit, warm water cleaning toilet seat, and manufacturing method of ceramic heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3968189B2 (en) | 2007-08-29 |
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