JP2000293114A - Production system of flat panel display and heater - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the reduction of a production cost, the reduction, etc., of electric power consumption of process apparatus, environment equipment, etc., by concentrically arranging a plurality of heaters used in at least two stages at one or plural points, thereby integrating the heating stages in production of flat panel displays. SOLUTION: After lower wiring, insulating layers and upper wiring are formed by a screen printing method, ink is dried and is subjected to baking for a prescribed time by baking furnaces 11 in the respective stages, by which the lower wiring, the insulating layers and the upper wiring are formed. These baking furnaces 11 are assembled at one point and plural units of the baking furnaces 11 are covered by covers 12 manufactured by material having a high thermally insulating effect. At this time, the spaces created between the outer side of the baking furnaces 11 and the covers 12 are made as small as possible, by which the heating regions as well as the auxiliary heated spaces are diminished and, therefore, the smaller energy fed for the purpose of heating is necessitated and the production cost in the production of the flat panel displays may be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display (Flat Panel Display).
The present invention relates to a production system and a heating device (hereinafter abbreviated as FPD), and particularly to a technology for efficiently producing.

[0002]

2. Description of the Related Art In the conventional FPD manufacturing, for example, a plasma display panel (hereinafter, referred to as a PDP), which is a kind of FPD, is used.
In DP, the PDP is manufactured through a number of steps such as an electrode forming step, an insulating layer forming step, a partition wall forming step, a bonding step, and a vacuum step for a substrate.

In forming an electrode by a printing method, an electrode material is prepared in a paste-like ink, and is printed in a shape of an electrode on a substrate by, for example, screen printing. Next, the electrode is formed by heating it to about 100 ° C. on a hot plate or the like and drying it, and then baking it in a furnace at a high temperature (a temperature at which the organic components of the ink are burned off).

Similarly, in the insulating layer forming step, an insulating material in the form of a paste is formed into a desired shape by screen printing or the like, dried, and fired in a furnace to obtain an insulating layer film.

[0005]

In the current FPD manufacturing method, a hot plate for drying and a furnace for baking are installed in each process, so that the processing capacity of other apparatuses in the same process is balanced. May not be available and the device is not being used effectively.

[0006] Further, a device that uses heat is installed for each process, and when viewed in the entire FPD manufacturing facility, the thermal process devices are scattered. For this reason, in a place where a substrate before panel bonding or a process apparatus for applying heat to a panel is used, a powerful cooling and air-conditioning facility is required for a person to perform work, and energy efficiency is low.

An object of the present invention is to solve the above-mentioned problems of the prior art. It is an object of the present invention to reduce the manufacturing cost by consolidating the heating process in the manufacture of a flat panel display, and to reduce the process equipment and environmental equipment. It is an object of the present invention to provide a production system and a heating device capable of reducing costs such as cost, improving the operation rate of a process device, and reducing power consumption.

[0008]

According to the present invention, there is provided a flat panel which is applicable to the manufacture of a flat panel display which requires a plurality of heating steps on a substrate or a panel before the panels are bonded. A display production system, wherein a plurality of heating devices provided for at least two of the heating steps are intensively arranged at one or a plurality of locations.

It is also preferable that a plurality of heating regions are formed by the plurality of concentratedly arranged heating devices, and the plurality of heating regions are covered with a cover having a heating region dividing means capable of maintaining the independence of the plurality of heating regions.

[0010] It is also preferable that a plurality of heating regions are formed by the concentratedly arranged heating devices, and a heating region dividing means for changing the size of the plurality of heating regions by moving the heating region is preferable. .

It is preferable that the heating area dividing means has a heating source.

Further, in manufacturing a flat panel display, only the inside of a device for performing each process, through which a substrate or a panel passes before a panel is bonded, has a clean room specification, and the outside of the device is a normal building facility.

In a heating area for heating a work and a heating device, the heating area is divided into a plurality of heating areas, and the size of the divided heating area can be changed by moving the heating area. Means.

It is preferable that the heating area dividing means has a heating source.

A heating area for heating the work is
It is also preferable to use a clean room. By adopting such a production system, a hot plate for drying, which is a heating device, a furnace for firing, and the like, which are installed for each process, are intensively arranged in one place or a plurality of places. Temperature reduction can be easily performed by reducing the installation space of the apparatus and by mainly performing air conditioning (cooling) only on the installation section, and the energy consumed for air conditioning can be reduced.

Further, by further covering the centrally arranged heating device, the heat insulation effect is further enhanced, and the amount of power input for heating the device can be reduced.

Since the heating area dividing means in the furnace is of a movable type, even if the size of a panel to be manufactured, which is a work, is changed, it can be dealt with without introducing a new apparatus or remodeling. .

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIG.
Heat process device assembly as heating device and F using the same
It is a plane schematic diagram of PD production equipment. FIG.
It is a figure showing the AA 'cross section of a.

Surface-Conduction Electron-Emitting Display (Surface)
-Condition Electron-Emit
In a production process, when forming a matrix wiring on a substrate by a screen printing method, a wiring and an insulating layer are formed by passing through a lower wiring, an insulating layer, and an upper wiring three times in a screen printing process. It is formed.

After the lower wiring, the insulating layer, and the upper wiring are formed by a screen printing method, the ink is dried, and in each step, firing is performed for a predetermined time in a firing furnace 11 to obtain the lower wiring, the insulating wiring. Layer and upper wiring are formed. Inside each of the firing furnaces 11, a conveyor or the like as a transporting means for transporting a substrate, which is a work, is provided to perform a fluidizing step. It is preferable that a conveyor is provided for each heating area, but it is also possible to divide a wide conveyor onto a plurality of areas for use.

The firing furnaces 11 are assembled in one place, and a plurality of firing furnaces 11 are covered with a cover 12 made of a material having a high heat insulating effect. At this time, by making the space between the outside of the firing furnace 11 and the cover 12 as small as possible,
Since the space to be heated (heating region) and the space to be heated secondarily are small, the energy input for heating can be small.

The inside of the baking furnace 11 covered with the cover 12 is of a clean room specification, the entrance of the substrate is provided in the clean room 14, and the exit of the substrate is also provided in the clean room 15.

Therefore, the space 13 in which the furnace body is installed
Since it is sufficient to use ordinary building equipment and it is not necessary to use a clean room, the energy for operating the production equipment can be reduced by the operation amount of the clean room corresponding to the space 13.

(Embodiment 2) FIG. 2 is a schematic plan view of a heat processing apparatus assembly according to a second embodiment and an FPD production facility using the same.

In the SED production process, when forming the matrix wiring by the screen printing method, the lower wiring,
The wiring and the insulating layer are formed by passing the insulating layer and the upper wiring through the screen printing process three times.

After the lower wiring, the insulating layer, and the upper wiring are formed by a screen printing method, the substrate 22 on which the wiring and the like are printed is dried by a printing machine on a substrate transporting trolley 23 using a drying hot plate 21. Transport to

The drying hot plates 21 are gathered in one place and arranged. Also, the drying hot plate 21
Are arranged in a concentrated manner, so that the substrate carrier 23 can efficiently transfer the substrate to an empty hot plate.

At the same time, the number of devices can be reduced by sharing a hot plate between processes as described below.

When the required number of hot plates are installed for each process, the calculation is performed assuming that 10000 sheets are processed per month, and the operation is performed 20 days / month and 8 hours / day. Assuming that the operation rate of the apparatus and the yield of substrate processing are 100% for simplicity of calculation, the number of substrates processed per hour is 10,000 / 20/8 = 62.5.

Assuming that the number of hot plates 21 that can be processed per hour is 10, 62.5 / 10 = 6.25 → 7 hot plates are required. In the entire three processes of the lower wiring, the insulating layer, and the upper wiring, 7 × 3 = 21 hot plates are required.

In the case where the hot plates are centrally arranged at one location and shared as in the second embodiment, the number of processed sheets per hour is 62.5 × 3 = 187.5 in total for three processes.
And the required number of hot plates is 187.5７
10 = 18.75 → 19 units.

The number of hot plates can be reduced by two as compared with the case where hot plates are installed for each process, so that energy for hot plate operation and installation space can be reduced.

The transfer of substrates from the base carrier 23 to each hot plate is performed by an operator in the case of small-scale production, and by introducing a transfer automatic machine that automatically performs the transfer in mass production. Production efficiency can be improved.

(Embodiment 3) FIG. 3 is a schematic plan view of a heating furnace 32 in which a heating mechanism 31 as a heating area dividing means is movable.

The heating furnace 32 has a movable heating mechanism 31 therein.
By moving the movable heating mechanism 31 in accordance with the size of the substrate 33 or the substrate 34 to be processed, the sizes of the plurality of heating regions are changed, and the substrates having different sizes are optimized under optimal conditions. Processing can be performed simultaneously in the same device.

Further, even when the size of the substrate to be processed is changed, the movable heating mechanism 31 is moved in accordance with the size of the substrate, so that production can be performed without introducing new equipment or modifying the apparatus. I can do it.

The heating mechanism 31 has heaters on both sides as heating sources, and by controlling each heater, it is possible to control the temperature of each divided heating area.

[0038]

According to the present invention described above, the heating process in the manufacture of a flat panel display is centralized to reduce the manufacturing cost, that is, to reduce the cost of a heating process device and environmental equipment, and to reduce the cost of the process device. It is possible to improve the operation rate, reduce the power consumption, and the like.

Further, the heating area dividing means for changing the size of the heating area to be divided by moving the heating area can easily obtain the optimum overheating condition, and can flexibly cope with the size of the work. Becomes

[Brief description of the drawings]

FIG. 1 is a furnace assembly in which firing furnaces are intensively arranged. FIG. 1 (a) is a plan view, and FIG. 1 (b) is a cross-sectional view.

FIG. 2 is a schematic plan view of the embodiment.

FIG. 3 is a schematic plan view of a heating furnace in which a heating area dividing unit is movable.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Firing furnace 12 Cover 13 Space 14 and 15 Clean room 21 Hot plate 22 Substrate 23 Substrate conveyance trolley 31 Heating mechanism 32 Heating furnace 33 and 34 Substrate

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Tetsuya Kaneko 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Fumitaka Yoshimura 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon F term in the company (reference) 4K050 AA01 AA02 BA07 CA12 CF09 5G435 AA00 AA17 EE33 KK05 KK09 KK10

Claims (8)

[Claims] 1. A flat panel display production system applicable to the manufacture of a flat panel display requiring a plurality of heating steps on a substrate or a panel before panel bonding, wherein the system is provided for at least two of the heating steps. Heating equipment,
A flat panel display production system, wherein a plurality of intensively arranged at one or a plurality of places. 2. The method according to claim 1, wherein a plurality of heating regions are formed by the plurality of intensively arranged heating devices, and the plurality of heating regions are covered with a cover having a heating region dividing unit capable of maintaining the independence of the plurality of heating regions. The flat panel display production system according to claim 1. 3. A heating area dividing means for forming a plurality of heating areas by means of the intensively arranged heating devices, and enabling a size of the plurality of heating areas to be changed by moving. The flat panel display production system according to claim 1, wherein 4. The flat panel display production system according to claim 2, wherein said heating area dividing means has a heating source. 5. In a flat panel display manufacturing, a flat panel display is characterized in that only the inside of the apparatus for performing each process, through which a substrate or a panel passes before the panels are bonded, has a clean room specification, and the outside of the apparatus is a normal building facility. Panel display production system. 6. A heating region for heating a workpiece, and a heating region dividing unit that divides the heating region into a plurality of portions and that can change the size of the divided heating region by moving the heating region. A heating device, characterized in that: 7. The heating apparatus according to claim 6, wherein the heating area dividing unit has a heating source. 8. The heating device according to claim 6, wherein a heating area for heating the work has a clean room specification.