JP2000277823A - Laminated piezoelectric vibrator, ultrasonic motor and piezoelectric actuator using the vibrator, and electronic apparatus using the motor and actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laminated piezoelectric vibrator which can be assembled easily, and at the same time, can be reduced in size and thickness, an ultrasonic motor and a piezoelectric actuator using the vibrator, and electronic apparatus using the motor and actuator. SOLUTION: A laminated piezoelectric vibrator 100 is constituted by alternately laminating a plurality of first piezoelectric electrode bodies 110 and a plurality of second piezoelectric electrode bodies upon another. In the vibrator 100, first electrodes 112, 112, etc., are short-circuited to each other via an outer short-circuiting electrode 130 formed on the outer peripheral surface 100a of the vibrator 100 and second electrodes 122, 122, etc,. are short-circuited to each other via an inner short-circuiting electrode 140 formed on the inner peripheral surface of the vibrator 100.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a laminated piezoelectric vibrator that can be reduced in size and thickness, an ultrasonic motor and a piezoelectric actuator using the same, and electronic equipment using the ultrasonic motor and the piezoelectric actuator. It is about.

[0002]

2. Description of the Related Art Ultrasonic motors have been actively studied at present, and various ultrasonic motors have been proposed. Ultrasonic motors are roughly classified into a standing wave method and a traveling wave method from the drive method. The rotating body is rotated by the frictional force caused by contact with the body. The present invention relates to a laminated piezoelectric vibrator suitable for use in this ultrasonic motor, piezoelectric actuator, and various electronic devices.

Conventionally, a plurality of piezoelectric elements having electrodes formed thereon, and a laminated piezoelectric vibrator having a laminated structure have been used for an ultrasonic motor,
Piezoelectric actuators are used as drive sources in various electronic devices. This type of laminated piezoelectric vibrator is formed by laminating a plurality of single-plate piezoelectric elements by bonding means such as bonding or bolting.

As this kind of laminated piezoelectric vibrator, as disclosed in Japanese Patent Application Laid-Open No. 3-289375, a plurality of disk-shaped single-plate piezoelectric elements are fastened by cylindrical fasteners. Some are laminated. That is, a large-diameter hole is formed in the center of each of the plurality of single-plate piezoelectric elements, electrodes are provided on the surfaces thereof, and polarization processing is performed. Is inserted, lamination and fastening are performed.

In a conventional laminated piezoelectric vibrator,
There is one in which a piezoelectric element and an electrode are integrally formed by sintering or joining, a through hole is formed through each piezoelectric element and each electrode, and the electrodes of each layer are electrically connected through the through hole. . As disclosed in Japanese Patent Application Laid-Open No. 6-120580, for example, a laminated piezoelectric vibrator of this type is obtained by integrally laminating a plurality of sheet-shaped thin plate piezoelectric elements by sintering or joining and integrating them. The electrodes formed on the thin-plate piezoelectric element are electrically connected to each other through through holes penetrating from the front surface to the back surface of the multilayer structure.

[0006]

By the way, in a conventional laminated piezoelectric vibrator (Japanese Patent Laid-Open No. 3-289375), the lamination between single-plate piezoelectric elements is performed by using a fastener without using an adhesive. However, since the thickness of the single-plate piezoelectric element must be increased to withstand the tightening by the fastener, there is a disadvantage that the size of the single-plate piezoelectric element naturally increases. Further, in the conventional laminated piezoelectric vibrator, since the fastening is performed by the fastener, a plurality of single-plate piezoelectric elements are provided one by one for the fastener.
Since it takes time to perform operations such as inserting sheets, there is a disadvantage that assembling requires a long time.

A conventional laminated piezoelectric vibrator (Japanese Unexamined Patent Publication No.
JP-A-120580) can solve the above-described problem relating to the assembling time, but since a through-hole needs to have a diameter of a certain size, particularly when using finely divided electrodes, Problems such as a short circuit between the electrodes due to the through holes occur. Therefore, the conventional laminated piezoelectric vibrator has a disadvantage that it is difficult to reduce the size of the through-hole because the diameter of the through-hole cannot be reduced to a predetermined value or less.

Further, since the conventional laminated piezoelectric vibrator is also used as a drive source for a piezoelectric actuator, an ultrasonic motor, and various electronic devices, the above-described laminated piezoelectric vibrator is applied to these devices. Due to the problem, the device becomes large.

The present invention has been made under such a background, and a laminated piezoelectric vibrator which can be easily assembled, and can be reduced in size and thickness, and an ultrasonic motor using the same. And an electronic device using the ultrasonic motor and the piezoelectric actuator.

[0010]

In order to achieve the above object, according to the first aspect of the present invention, there is provided a thin plate having a first electrode pattern formed on a surface and a hole formed in a central portion. A first piezoelectric element, and a second electrode pattern different from the first electrode pattern are formed on the surface, and a second piezoelectric element having the same shape as the first piezoelectric element is provided. The first piezoelectric element and the plurality of second piezoelectric elements are alternately laminated and integrally sintered or joined to form a laminated structure, and are formed on an outer peripheral surface of the laminated structure. A first short-circuit electrode for short-circuiting between the first electrode patterns, and a second short-circuit electrode formed on the inner peripheral surface of the multilayer structure and short-circuiting between the plurality of second electrode patterns. It is characterized by the following.

According to the first aspect of the present invention, the first
When a voltage is applied between the short-circuit electrode and the second short-circuit electrode, the first piezoelectric element and the second piezoelectric element are distorted and vibrate according to the AC voltage. Thus, claim 1
According to the invention described in (1), since the first and second short-circuit electrodes are formed on the outer peripheral surface and the inner peripheral surface of the laminated structure, through holes and large holes are not required as in the related art. .

According to the first aspect of the present invention, since the laminated structure is formed by lamination and integral sintering or joining, the first electrode pattern and the second electrode pattern are adjacent to each other. And the second piezoelectric element act as a common electrode.

Further, the laminated piezoelectric vibrator according to claim 2 is the laminated piezoelectric vibrator according to claim 1, formed on the same plane and connected to the first short-circuit electrode.
And a third electrode pattern comprising a second extraction electrode connected to the second short-circuit electrode. According to the second aspect of the invention, the same effect as that of the first aspect is obtained, and the third electrode pattern including the first extraction electrode and the second extraction electrode is formed on the same plane. In addition, the wiring can be easily arranged when the power supply is connected.

According to a third aspect of the present invention, there is provided a thin plate-shaped first piezoelectric element having a first electrode pattern formed on a surface thereof and having a hole formed in a central portion thereof, Unlike the electrode pattern, a second electrode pattern including a plurality of electrodes is formed on the surface, and includes a second piezoelectric element having the same shape as the first piezoelectric element. A plurality of the second piezoelectric elements are alternately laminated and integrally sintered or joined to form a laminated structure. The laminated structure is formed on the outer peripheral surface of the laminated structure, and a gap between the first electrode patterns is formed. A first short-circuit electrode to be short-circuited, and a plurality of second short-circuit electrodes formed on the outer peripheral surface of the laminated structure and short-circuiting between the plurality of electrodes of the second electrode pattern between the plurality of second piezoelectric elements. And a short-circuit electrode.

According to the third aspect of the present invention, the first
When a voltage is applied between the short-circuit electrode and the second short-circuit electrode, the first piezoelectric element and the second piezoelectric element generate strain and vibration according to the voltage. As described above, according to the third aspect of the present invention, the first and second short-circuit electrodes are formed on the outer peripheral surface of the laminated structure. It becomes unnecessary.

Further, the invention according to claim 4 is the same as the invention according to claim 3.
Wherein the second electrode pattern is composed of a plurality of divided electrodes having different polarization directions. According to the fourth aspect of the present invention, the forward / reverse rotation can be easily controlled by appropriately selecting the application of the drive signal to the second electrode pattern.

The invention described in claim 5 is the third invention.
Or the multilayer piezoelectric vibrator according to 4, wherein a first extraction electrode formed on the same plane and connected to the first short-circuit electrode, and a plurality of first extraction electrodes connected to the plurality of second short-circuit electrodes. A third electrode pattern comprising two extraction electrodes is provided. According to the fifth aspect of the present invention, the third electrode comprising the first extraction electrode and the second extraction electrode.
Since the electrode patterns are formed on the same plane, wiring can be easily routed.

The invention according to claim 6 is the same as the invention according to claim 3.
Or the laminated piezoelectric vibrator according to 4, wherein in the second electrode pattern, a first conduction electrode that conducts a predetermined one of the plurality of electrodes, and in the second electrode pattern, the first conduction electrode And a second conductive electrode that conducts electricity that is not conducted by the conducting electrode.

As described above, according to the sixth aspect of the present invention, the provision of the first conductive electrode and the second conductive electrode facilitates the routing of the wiring when the power is connected.

The invention described in claim 7 is the third invention.
Or the laminated piezoelectric vibrator according to 4, wherein the first electrode pattern formed on one surface of the laminated structure is formed so as to have a smaller area than the other first electrode patterns. It is characterized by. According to the seventh aspect of the present invention, the area of the first electrode pattern on one surface is reduced, so that it can be used as a dummy electrode.

In addition, the laminated piezoelectric vibrator can be applied to various applications.
Claim 10 is applied to a piezoelectric actuator. In claim 9, the ultrasonic motor is further applied to an electronic device, and in claim 11, the piezoelectric actuator is applied to an electronic device.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments 1 to 5 of a laminated piezoelectric vibrator according to the present invention will be described in detail with reference to the drawings.

(Embodiment 1) FIG. 1 is a side sectional view showing a configuration of a laminated piezoelectric vibrator 100 according to Embodiment 1 of the present invention. The laminated piezoelectric vibrator 100 shown in this figure has piezoelectric electrode bodies 110 and piezoelectric electrode bodies 120 alternately laminated and integrated by sintering or joining. The piezoelectric electrode body 110 is a piezoelectric element 11 shown in FIG.
1 and an electrode 112.

The piezoelectric element 111 is formed of a ferroelectric material, for example, barium titanate or lead zirconate titanate in a thin disk shape, and has a hole 111a in the center. The electrode 112 (first electrode pattern)
A metal is formed on the entire surface of the piezoelectric electrode body 110 except for the inner peripheral edge thereof by printing, vapor deposition, sputtering, or the like, and serves as a common electrode.

On the other hand, the piezoelectric electrode body 120 shown in FIG.
Is composed of a piezoelectric element 121 and an electrode 122 (second electrode pattern). The piezoelectric element 121 is made of the same material as the piezoelectric element 111 and is formed to have the same shape. The center of the piezoelectric element 121 is provided with a hole 11 of the piezoelectric element 111 (see FIG. 2A).
A hole 121a having the same diameter as 1a is formed. Electrode 122
Is formed on a surface of the piezoelectric element 121, except for the outer peripheral edge, by forming a thin film of metal by means such as printing, vapor deposition, and sputtering.

As described above, the pattern of the electrode 112 (see FIG. 2A) and the pattern of the electrode 122 (see FIG. 2B) are different. That is, while the pattern of the electrode 112 is a pattern in which the inner peripheral edge is missing,
The pattern of No. 22 lacks the outer peripheral edge.

Returning to FIG. 1, the laminated piezoelectric vibrator 100 includes a first piezoelectric electrode body 110, a second piezoelectric electrode body 120, a third piezoelectric electrode body 110, and a fourth piezoelectric The electrode bodies 120 are laminated in this order, and are integrally sintered or joined in the laminated state. Therefore, in the laminated piezoelectric vibrator 100, the second electrode 122 of the second piezoelectric electrode body 120 is in close contact with both the back surface of the first piezoelectric element 111 and the front surface of the second piezoelectric element 121. Therefore, it is a common electrode.

Similarly, in the laminated piezoelectric vibrator 100, the third electrode 11 of the third piezoelectric electrode body 110 is formed.
2 is in contact with both the back surface of the second piezoelectric element 121 and the front surface of the third piezoelectric element 111, and is thus a common electrode.

In the laminated piezoelectric vibrator 100,
Since the piezoelectric electrode bodies 110 and the piezoelectric electrode bodies 120 are alternately stacked, the holes 111a (see FIG. 2A) and the holes 121a (see FIG. 2B) are respectively located on the same cylinder. , Through holes 100c. The outer short-circuit electrode 130 is provided on the outer peripheral surface 1 of the laminated piezoelectric vibrator 100.
00a, the first electrode 112, the third electrode
Electrode 112 is short-circuited. This outer short-circuit electrode 130
Is formed as an extraction electrode 130a on the outer peripheral edge of the back surface of the fourth piezoelectric element 121.

The inner short-circuit electrode 140 is connected to the laminated piezoelectric vibrator 1.
The second electrode 122 and the fourth electrode 122 are short-circuited on the inner peripheral surface 100b of the second electrode 122. The end of the inner short-circuit electrode 140 is connected to the second piezoelectric element 12 of the fourth layer.
An extraction electrode 140a is formed on the inner peripheral edge of the back surface of the first electrode. In other words, while the first electrode 112 and the third electrode 112 are short-circuited via the outer short-circuit electrode 130 formed on the outer peripheral surface 100a, the second electrode 12
The second and fourth electrodes 122 are short-circuited via the inner short-circuit electrode 140 formed on the inner peripheral surface 100b.

In the above configuration, when a power source (not shown) is connected to the extraction electrode 130a and the extraction electrode 140a,
The first electrode 112 and the third electrode 112 function as common electrodes, and the first piezoelectric element 111, the second piezoelectric element 121, and the third piezoelectric element 111 flex in the axial direction according to the applied AC voltage, respectively. Thus, the entire laminated piezoelectric vibrator 100 vibrates according to the power supply frequency.

As described above, according to the laminated piezoelectric vibrator 100 of the first embodiment, the outer peripheral surface 100
a and the inner peripheral surface 100b,
a through the outer short-circuit electrode 130 formed on the first electrode 1
12 and the third 112 are short-circuited, the second electrode 122 and the fourth 122 are short-circuited via the inner short-circuit electrode 140 formed on the other inner peripheral surface 100b, and the integrated firing is performed. Since the laminated structure is formed by knotting or joining, there is no need to form a through hole or a large hole for a fastener as in the related art. Therefore, according to the laminated piezoelectric vibrator 100 according to the above-described first embodiment, the assembly can be easily performed by lamination by integral sintering or joining, and the size and thickness can be reduced.

Further, according to the laminated piezoelectric vibrator 100 according to the first embodiment, the piezoelectric element (piezoelectric element 1) having the electrodes (electrodes 112 and 122) formed on the surface thereof as a thin film.
11, the piezoelectric elements 121) are laminated by integral sintering or bonding, so that the second electrode 122 and the third electrode 112 can be used as common electrodes as shown in FIG. Can be easily achieved.
In this embodiment, the first electrode 112 and the third electrode 11
2 is short-circuited on the outer peripheral surface, and the second electrode 122 and the fourth electrode 1 are short-circuited.
22 is short-circuited on the inner peripheral surface, the first electrode 1
The second electrode 122 and the third electrode 112 may be short-circuited on the inner peripheral surface, and the second electrode 122 and the fourth electrode 122 may be short-circuited on the outer peripheral surface.

(Embodiment 2) FIG. 3 shows an ultrasonic motor 200 using a laminated piezoelectric vibrator according to Embodiment 2 of the present invention.
FIG. 3 is an exploded perspective view showing the configuration of FIG. FIG. 4 shows the second embodiment.
FIG. 2 is a cross-sectional view illustrating a configuration of an ultrasonic motor 200 according to the first embodiment.
FIG. 5 is an assembly diagram showing a configuration of an ultrasonic motor 200 according to the second embodiment. The ultrasonic motor 2 shown in these figures
At 00, a fixed shaft 220 is provided at an end of the ultrasonic stator unit 210, and a holding spring seat 230 is inserted through the fixed shaft 220.

At a substantially central portion of the ultrasonic stator unit 210, a central shaft 240 is provided. This central axis 24
At 0, a disk-shaped vibrating body 250 is fixed. The laminated piezoelectric vibrator 2 shown in FIG.
60 is attached. For the laminated piezoelectric vibrator 260, a ferroelectric material, for example, barium titanate or lead zirconate titanate is used.

The laminated piezoelectric vibrator 260 is subjected to a polarization treatment, and is supplied with a power (not shown) through a piezoelectric element lead 270.
It is connected to the. Here, for example, in the case of a traveling wave type ultrasonic motor, the power supply generates AC voltages having different phases. In the case of a standing wave type ultrasonic motor,
An AC voltage is selectively supplied to the piezoelectric element lead electrode 270. A plurality of protrusions 290, 290,... Are formed on the surface of the vibrating body 250 at a certain angle in the circumferential direction. These projections 290, 290, ...
The ultrasonic rotor unit 280 is in contact.

Here, the configuration of the above-described laminated piezoelectric vibrator 260 will be described in detail with reference to FIGS. 6 and 7A to 7D. FIG. 6 is a side sectional view showing the configuration of the vibrating body 250 and the laminated piezoelectric vibrator 260 shown in FIG. However, in FIG. 6, the laminated piezoelectric vibrator 260 is illustrated such that its thickness is larger than the actual thickness (see FIG. 4). FIGS. 7A to 7C are diagrams showing each component of the laminated piezoelectric vibrator 260 shown in FIG. FIG.
7A to 7D are plan views, and FIG. 7D is a rear view. Further, FIG.
FIG. 8 is a cross-sectional view taken along the line AA ′ shown in FIGS.

The laminated piezoelectric vibrator 260 shown in FIG. 6 includes a first piezoelectric electrode body 40 between the uppermost layer and the lowermost layer.
0 (see FIG. 7A), the second piezoelectric electrode body 410 (see FIG. 7A).
(B)) and a third piezoelectric electrode body 420 (see FIGS. 7 (c) and (d)) are laminated and integrated by sintering or joining.

The first piezoelectric electrode body 400 shown in FIG.
Are the first piezoelectric element 401 and the first common electrode 40
2 (first electrode pattern). The first piezoelectric element 401 is formed of a ferroelectric material, for example, barium titanate or lead zirconate titanate in a thin disk shape, and has a hole 401a in the center. The first common electrode 402 includes a first piezoelectric element 401
The metal is formed as a thin film on the entire surface except for the outer peripheral edge, and has a protruding portion 402a formed as a thin film on a part of the outer peripheral edge.

The second piezoelectric electrode body 410 shown in FIG. 7B is composed of a second piezoelectric element 411 and a plurality of first electrodes 4 forming a second electrode pattern divided into 12 equal-angles.
12 and a second electrode 413. This second electrode pattern is different from the above-described first electrode pattern (first common electrode 402). The second piezoelectric element 411 is made of the same material as the first piezoelectric element 401 described above, and is formed to have the same shape. A hole 411a having the same diameter as the hole 401a of the first piezoelectric element 401 (see FIG. 7A) is formed at the center of the second piezoelectric element 411.

Further, the first electrode constituting the second electrode pattern
, 412,... And the second electrode 41
, 413,... Are formed on the surface of the second piezoelectric element 411, and the metal is formed in a substantially sector shape in a 1/12 divided region excluding the outer peripheral edge. Further, these first electrodes 412, 412,...
, And 413 are formed as thin films on a part of the outer peripheral edge.
a, 413a,... respectively.

Here, in the second electrode pattern, as an example, the first electrode 412
May be a positive electrode, and the second electrode 413 may be a negative electrode. The combination of these positive and negative electrodes is
In addition to alternate positive and negative electrodes, the positive electrode,
A positive electrode, a negative electrode, a negative electrode, etc.
Set arbitrarily. The same applies to Embodiments 3 to 5 described later.

The third piezoelectric electrode body 420 shown in FIGS. 7C and 7D includes a third piezoelectric element 421.
The third piezoelectric element 421 is formed of a thin disk made of a ferroelectric material, and has a hole 421a in the center. The surface of the third piezoelectric element 421 is
As shown in (c), the second common electrode 422 is formed as a thin film on the entire surface of the third piezoelectric element 421 except for the outer peripheral edge. This second common electrode 422 is
It has the same shape as the first pattern described above, and has a projection 422a formed as a thin film on a part of the outer peripheral edge.

Here, the projection 422a of the third piezoelectric electrode body 420 and the projection 402a of the first piezoelectric electrode body 400 (see FIG. 7A) are located at the same position in the circumferential direction. 7B, the protrusions 412a and 412 shown in FIG.
, and the projections 413a, 413a,... are not overlapped in the circumferential direction.

On the back surface of the third piezoelectric element 421,
As shown in FIG. 7 (d), a third part formed by dividing into 12 equal angles
Of the plurality of first extraction electrodes 432 constituting the electrode pattern of FIG.
The second extraction electrode 433 and the common extraction electrode 434 are formed as thin films. The first extraction electrode 43
, And second extraction electrodes 433, 43
.. Are the first electrodes 412, 412,.
(See FIG. 7B) are formed at positions corresponding to the electrodes 413, 413,.
70 (see FIG. 4), and is selectively connected to a power supply (not shown). That is, for example, when the ultrasonic motor is driven to rotate forward, the first extraction electrodes 432, 432,.
Are connected to the power source, while the second extraction electrodes 433 and 43 are used for reverse rotation driving.
, (Second electrodes 413, 413,...) Are connected to a power source.

The common extraction electrode 434 is formed by forming a thin film of metal on the back surface of the third piezoelectric element 421 and in a region sandwiched between the first extraction electrode 432 and the second extraction electrode 433. The common extraction electrode 434 is formed at a position corresponding to the protrusion 402a (see FIG. 7A) and the protrusion 422a (see FIG. 7C) in the circumferential direction.

Returning to FIG. 6, in the laminated piezoelectric vibrator 260, the first common electrode 402 of the uppermost first piezoelectric electrode body 400 is in contact with the vibrating body 250. Also, the second
The first electrode 41 in the second piezoelectric electrode body 410 of the layer
, 412,... And the second electrodes 413, 413,.
Are the back surface of the uppermost first piezoelectric element 401 and the second
Since it is in close contact with both surfaces of the second piezoelectric element 411 of the layer, it is a common electrode.

In the laminated piezoelectric vibrator 260,
Since the first piezoelectric electrode body 400, the second piezoelectric electrode body 410, and the third piezoelectric electrode body 420 are laminated, the hole 4
01a (see FIG. 7 (a)), hole 411a (see FIG. 7 (b)), and hole 421a (see FIG. 7 (c)) are located on the same cylinder, respectively, and constitute a through hole 260a. I have.

The common short-circuit electrode 500 is formed in a thin film in the axial direction on the outer peripheral surface 260b of the laminated piezoelectric vibrator 260, and is connected to the first common electrode 402 and the second common electrode via the protrusions 402a and 422a. Electrode 422
And the common extraction electrode 434 are short-circuited.

The first short-circuit electrodes 510, 510,... Shown in FIGS.
(See FIG. 6). A thin film is formed in the axial direction on the outer peripheral surface 260b of the first electrode 412, 412,.
7) and first extraction electrodes 432, 432,.
(See (d)). Similarly, the second short-circuit electrodes 520, 520,... Are formed on the outer peripheral surface 260b in a thin film in the axial direction, and the second electrodes 413, 41
3,... (See FIG. 7B) and the second extraction electrode 43
3, 433,... (See FIG. 7D).

The ultrasonic rotor unit 280 shown in FIG.
Is rotatably supported on a center shaft 240 via a bush 300. This ultrasonic rotor unit 280
The rotor body 310 includes a cylindrical rotor body 310, an eccentric weight 320 attached to the outer periphery of the rotor body 310, and a fixing plate 330 for fixing the rotor body 310 and the eccentric weight 320. The eccentric weight 320 is provided to generate vibrations due to inertia. For normal rotation, only the rotor body 310 is required.

A pivot 340 is attached to the center of the upper surface of the ultrasonic rotor unit 280. The pivot 340 is pressurized by a cantilevered holding spring 350 fixed to the holding spring seat 230 with screws. As a result, an appropriate frictional force acts between the rotor body 310 and the protrusions 290, 290,... Of the vibrating body 250, and a rotational force is generated.

In the above configuration, when the motor is driven forward,
The first extraction electrodes 432, 432,... Shown in FIG.
Are connected to the first short-circuit electrodes 510, 5
,... Are applied to the first electrodes 412, 412,... Via the... Bending vibration occurs. Thereby, the protrusion 2 of the vibrating body 250
The rotor body 310 is rotationally driven in the forward direction via the projections 90, 290,. Conversely, during reverse rotation driving, the power is connected to the second extraction electrodes 433, 433,... So that the second short-circuit electrodes 520, 520,.
Are applied to the second electrodes 413, 413,... To rotate the rotor body 310 in the reverse direction.

As described above, according to the laminated piezoelectric vibrator of the second embodiment, the outer peripheral surface 2 shown in FIG.
60b, the common short-circuit electrode 500, the first short-circuit electrodes 510, 510,.
.. Are connected to each other via the second short-circuit electrodes 520, 520,..., And have a laminated structure by sintering or joining. There is no need to form holes.

Therefore, according to the laminated piezoelectric vibrator according to the second embodiment described above, assembling can be easily performed by sintering or joining by lamination, and the size and thickness can be reduced. The number of laminations can be increased by the amount that can be achieved. In particular, since lead wiring is performed using only the outer peripheral surface 260b, the through hole 26
0a can be reduced, and the laminated piezoelectric vibrator 26
Since the outer diameter of 0 can be reduced, the size can be further reduced.

Further, according to the laminated piezoelectric vibrator according to the above-described second embodiment, the piezoelectric elements each having a thin film formed on its surface are laminated by integral sintering or bonding, as shown in FIG. In addition, since the first electrode 412 and the second electrode 413 can be used as common electrodes, the thickness can be easily reduced.

Further, according to the laminated piezoelectric vibrator according to the second embodiment described above, the first electrode 412 and the second electrode 413 in the second piezoelectric electrode body 410 shown in FIG.
By arbitrarily selecting the polarization direction in, normal rotation / reverse rotation can be easily controlled. In addition, since the electrodes of the third pattern are formed on the same plane, it is possible to easily route the wiring when connecting the power supply.

(Embodiment 3) Next, an ultrasonic motor using a laminated piezoelectric vibrator according to Embodiment 3 of the present invention will be described with reference to FIGS. 8 and 9A to 9D. In the ultrasonic motor according to the third embodiment,
A laminated piezoelectric vibrator 600 shown in FIG. 8 is provided instead of the laminated piezoelectric vibrator 260 shown in FIG.

FIG. 8 is a side sectional view showing the configuration of a vibrating body 250 and a laminated piezoelectric vibrator 600 used in an ultrasonic motor according to Embodiment 3 of the present invention. FIG. 9 (a)-
FIG. 9D is a plan view illustrating each component of the laminated piezoelectric vibrator 600 illustrated in FIG. 8. FIG. 8 is a cross-sectional view of FIG.
It is a BB 'line sectional view shown to (d).

The laminated piezoelectric vibrator 600 shown in FIG. 8 has a first piezoelectric electrode 70 between the uppermost layer and the lowermost layer.
0 (see FIG. 9A), the second piezoelectric electrode body 710 (see FIG. 9A).
(B), the third piezoelectric electrode body 720 (see FIG. 9C), and the fourth piezoelectric electrode body 730 (see FIG. 9D).
Are laminated and integrated by sintering or joining.

The first piezoelectric electrode body 700 shown in FIG.
Has the same configuration as the above-described second piezoelectric electrode body 120 (see FIG. 2B), and includes a first piezoelectric element 701 and a first common electrode 702 (first pattern). I have. That is, a hole 701a is formed in the center of the thin disk-shaped first piezoelectric element 701. The first common electrode 702 is connected to the first piezoelectric element 701
The metal is formed as a thin film on the entire surface except for the outer peripheral edge.

The second piezoelectric electrode body 710 shown in FIG. 9B is the same as the second piezoelectric electrode body 410 (FIG.
(See (b)). That is, the second
The piezoelectric electrode body 710 includes a second piezoelectric element 711 having a hole 711 a formed therein, a plurality of first electrodes 712 and a second electrode 713 forming a second electrode pattern divided into 12 equal angles. Have been. These first electrodes 7
, 712,... And second electrodes 713, 713,.
.. Are projections 712a formed as a thin film on a part of the outer peripheral edge,
, And 713a, 713a,.
Respectively.

The third piezoelectric electrode body 720 shown in FIG.
Has the same configuration as the above-described first piezoelectric electrode body 700 (see FIG. 9A), and includes a third piezoelectric element 721 having a hole 721a formed in the center, and a second common electrode 722. (First electrode pattern).
The fourth piezoelectric electrode body 730 shown in FIG. 9D has the same configuration as the above-described second piezoelectric electrode body 710 (see FIG. 9B). That is, the fourth piezoelectric electrode body 730
Is composed of a fourth piezoelectric element 731 in which a hole 731a is formed, a plurality of first electrodes 732 and a second electrode 733 which form a second electrode pattern divided into 12 equal angles. These first electrodes 732, 732,.
, And the second electrodes 733, 733,... Are formed as projections 732a, 732a formed as a thin film on a part of the outer peripheral edge.
, And projecting portions 733a, 733a,...

Returning to FIG. 8, in the laminated piezoelectric vibrator 600, the first common electrode 70 of the first piezoelectric electrode body 700
2 is in contact with the vibrating body 250. , And the second electrodes 713, 713,... Of the second piezoelectric electrode body 710 are formed on the back surface of the first piezoelectric element 701 and the second piezoelectric element. Since it is in close contact with both surfaces of the 711, it is a common electrode.

Similarly, the second common electrode 722 of the third piezoelectric electrode body 720 is connected to the second piezoelectric element 711.
Are in close contact with both the back surface of the third piezoelectric element 721 and the front surface of the third piezoelectric element 721. In the laminated piezoelectric vibrator 600, the first piezoelectric electrode body 70
0, second piezoelectric electrode body 710, third piezoelectric electrode body 720
And the fourth piezoelectric electrode body 730 are laminated, the holes 701a (see FIG. 9A) and the holes 711a (see FIG. 9A).
(See FIG. 9B), a hole 721a (see FIG. 9C) and a hole 731a (see FIG. 9D) are respectively located on the same cylinder, and constitute a through hole 600c.

The common short-circuit electrode 800 is formed on the inner peripheral surface 600 b of the laminated piezoelectric vibrator 600 in a thin film in the axial direction, and has a first common electrode 702 and a second common electrode 722.
And are short-circuited. 9 (b) and 9 (d).
Are short-circuited electrodes 810, 810,.
9 (see FIG. 8), a thin film is formed in the axial direction on the outer peripheral surface 600a of the first electrode 712, 712,.
(B) and the first electrodes 732 and 732 (FIG. 9D).
See). Similarly, the second short-circuit electrodes 820, 820,... Are formed on the outer peripheral surface 600a in a thin film in the axial direction, and the second electrodes 713, 713,.
(See FIG. 9B) and the second electrodes 733, 733,.
··· (see FIG. 9D).

In the above configuration, when the motor is driven forward,
As in the second embodiment, the first short-circuit electrode 8
Are connected to the first electrodes 712, 712,... (First electrodes 732, 73).
2,...), And the rotor body 310 is driven to rotate in the normal rotation direction. Conversely, when a power source is connected to the second short-circuit electrodes 820, 820,..., The second electrodes 713, 713,.
33,...), And the rotor is rotationally driven in the reverse direction.

As described above, according to the laminated piezoelectric vibrator according to the third embodiment, the outer peripheral surface 6 shown in FIG.
Utilizing the first short-circuit electrode 810, the second short-circuit electrode 820, and the common short-circuit electrode 800 using the first short-circuit electrode 810, the second short-circuit electrode 820, and the common short-circuit electrode 800. Therefore, assembling can be easily performed, and downsizing and thinning can be achieved.

Further, according to the laminated piezoelectric vibrator of the third embodiment described above, the polarization treatment is performed in the second piezoelectric electrode body 710 and the fourth piezoelectric electrode body 730 shown in FIGS. 9B and 9D. Since it is configured to have the electrode structure (second electrode pattern) described above, the forward rotation and the reverse rotation can be easily controlled in the same manner as in the second embodiment.

(Embodiment 4) Next, an ultrasonic motor using a laminated piezoelectric vibrator according to Embodiment 4 of the present invention will be described with reference to FIGS. 10 and 11A to 11D. In the ultrasonic motor using the laminated piezoelectric vibrator according to the fourth embodiment, the laminated piezoelectric vibrator 2 shown in FIG.
Instead of 60, a laminated piezoelectric vibrator 900 shown in FIG.

FIG. 10 is a side sectional view showing the configuration of a vibrating body 250 and a laminated piezoelectric vibrator 900 used in an ultrasonic motor according to Embodiment 4 of the present invention. However, FIG.
(A) to (d) show the laminated piezoelectric vibrator 900 shown in FIG.
It is a top view which shows each component. FIG. 10 is a cross-sectional view taken along the line CC ′ shown in FIGS.

The laminated piezoelectric vibrator 900 shown in FIG. 10 has a first piezoelectric electrode body 1000 (see FIG. 11A), a second piezoelectric electrode body 1010 (see FIG. 11B), and a third piezoelectric electrode body 1010 (see FIG. 11B). An electrode body 1020 (see FIG. 11C) and a fourth piezoelectric electrode body 1030 (see FIG. 11D) are laminated and integrated by sintering or joining.

The first piezoelectric electrode body 10 shown in FIG.
00 is a thin disk-shaped first piezoelectric element 1001 having a hole 1001a formed in the center and a first common electrode 1
002. The first common electrode 10
Reference numeral 02 denotes a surface of the first piezoelectric element 1001, which is formed by forming a thin film of metal on a part other than the outer peripheral edge, and has a protrusion 1002a on a part of the outer peripheral edge. In addition, the common electrode 1002 has a small area and thus acts as a dummy electrode (extraction electrode).

The second piezoelectric electrode body 1010 shown in FIG. 11B is the same as the second piezoelectric electrode body 410 (FIG. 7).
(See (b)). That is, the second
The piezoelectric electrode body 1010 is composed of a second piezoelectric element 1011 having a hole 1011a formed therein, and a plurality of first electrodes 10 constituting the above-described second electrode pattern formed by dividing into 12 equal-angles.
12 and a second electrode 1013. These first electrodes 1012, 1012,...
Have protrusions 1012a, 1012a,... And protrusions 1013a, 1013a,.

The third piezoelectric electrode body 10 shown in FIG.
Reference numeral 20 denotes the third piezoelectric electrode body 420 (FIG. 7C)
), And has a hole 1021a in the center.
And a second common electrode 1022 (first electrode pattern). Fourth piezoelectric electrode body 1030 shown in FIG.
Corresponds to the above-described second piezoelectric electrode body 1010 (FIG. 11B).
). That is, the fourth piezoelectric electrode body 1030 has the fourth piezoelectric electrode body 1030 in which the hole 1031a is formed.
, And a plurality of first electrodes 1032 and second electrodes 1033 forming a second electrode pattern divided into 12 at equal angles. These first
, And the second electrode 1
, Have projections 1032a, 1032a,... And projections 1033a, 1033a,.

Referring back to FIG. 10, in the laminated piezoelectric vibrator 900, the first common electrode 1002 of the uppermost first piezoelectric electrode body 1000 is in contact with the vibrating body 250. Further, the first electrode 1012 and the second electrode 1013 (second electrode pattern) of the second piezoelectric electrode body 1010 are connected to the back surface of the first piezoelectric element 1001 and the second piezoelectric element 1010.
Since it is in intimate contact with both of the surfaces of No. 11, it is a common electrode. Similarly, the second common electrode 1022 in the third piezoelectric electrode body 1020 is connected to the second piezoelectric element 1
011 and the surface of the third piezoelectric element 1021 are in close contact with each other, so that they are common electrodes.

Further, in the laminated piezoelectric vibrator 900, the first piezoelectric electrode body 1000, the second piezoelectric electrode body 10
10, since the third piezoelectric electrode body 1020 and the fourth piezoelectric electrode body 1030 are stacked, the hole 1001a
(See FIG. 11A), hole 1011a (see FIG. 11B), hole 1021a (see FIG. 11C), and hole 10
31a (see FIG. 11D) are located on the same cylinder, respectively, and constitute a through hole 900a.

The common short-circuit electrode 1100 is formed on the outer peripheral surface 900 b of the laminated piezoelectric vibrator 900 in a thin film in the axial direction, and the first common electrode 1002 and the second common electrode 10
22 is short-circuited. The first short-circuit electrodes 1110, 1110,... Shown in FIGS. 11B and 11D are formed as a thin film in the axial direction on the outer peripheral surface 900b of the laminated piezoelectric vibrator 900 (see FIG. 10). One electrode 1012, 101
2,... (See FIG. 11B) and the first electrode 1032,
1032 (see FIG. 11D). Similarly, the second short-circuit electrodes 1120, 1120,.
(See FIG. 11B) and the second electrodes 1033, 1033,... (See FIG. 11B).
(See (d)).

In the above configuration, when the motor is driven forward,
As in the above-described second embodiment, first short-circuit electrodes 1110, 1110,... Shown in FIGS.
Is connected to the first electrode 1012, 1
(The first electrodes 1032, 1032,...) Are applied with a drive signal to rotate the rotor body 310 in the normal rotation direction. On the other hand, the second short-circuit electrodes 1120 and 112
When a power supply is connected to 0,.
1013,... (Second electrodes 1033, 1033,...)
, And the rotor 310 is driven to rotate in the reverse direction.

As described above, according to the above-described laminated piezoelectric vibrator of the fourth embodiment, the common short-circuit electrode 1100, the first short-circuit electrode 1110, and the second short-circuit electrode 1110 are utilized by utilizing the outer peripheral surface 900b shown in FIG. Since the electrodes are connected to each other via the short-circuit electrode 1120 and a laminated structure is formed by integral sintering or joining, the same effect as that of the laminated piezoelectric vibrator according to the second embodiment can be obtained.

(Embodiment 5) Next, an ultrasonic motor using a laminated piezoelectric vibrator according to Embodiment 5 of the present invention will be described with reference to FIGS. 12 and 13 (a) to 13 (d). In the ultrasonic motor according to the fifth embodiment, the laminated piezoelectric vibrator 260 shown in FIG.
The laminated piezoelectric vibrator 1400 shown in FIG.

FIG. 12 is a side sectional view showing the configuration of a vibrating body 250 and a laminated piezoelectric vibrator 1400 used in an ultrasonic motor according to Embodiment 5 of the present invention. FIG.
In FIG. 2, the first common electrode 1202 is actually much thinner than shown, so that the vibrating body 250 actually
Is adhered to the surface of the piezoelectric electrode body 1200. FIG.
(A) to (d) show the laminated piezoelectric vibrator 140 shown in FIG.
It is a figure which shows each component of 0. FIGS. 13A to 13E
13 (a) to 13 (c) are plan views and FIG.
3D and 3E are rear views. FIG.
Corresponds to DD ′ shown in FIGS. 13 (a) to 13 (c) and (e).
FIG.

The laminated piezoelectric vibrator 1400 shown in FIG.
The first piezoelectric electrode body 1200 (see FIG. 13A), the second
The piezoelectric electrode body 1210 (see FIG. 13B) and the third piezoelectric electrode body 1220 (see FIG. 13C) are stacked and integrated by sintering or joining.

The first piezoelectric electrode body 12 shown in FIG.
00 is a thin disk-shaped first piezoelectric element 1201 having a hole 1201a formed in the center and a first common electrode 1
202. The first common electrode 12
Reference numeral 02 denotes a surface of the first piezoelectric element 1201 which is formed by forming a thin film of metal on a part excluding the outer peripheral edge, and has a protrusion 1202a on a part of the outer peripheral edge. The first common electrode 1202 is a dummy electrode in the same manner as the first common electrode 1002 shown in FIG.

The second piezoelectric electrode body 1210 shown in FIG. 13B has the same configuration as the above-described second piezoelectric electrode body 1010 (see FIG. 11B). That is,
The second piezoelectric electrode body 1210 includes a second piezoelectric element 1211 having a hole 1211 a formed therein, and a plurality of first electrodes 1212 forming a second electrode pattern formed by dividing into equal angles 12.
And a second electrode 1213. A first electrode 1212, 1212,... And a second electrode 121
Are protruding portions 1212a, 1212a,... And protruding portions 1
213a, 1213a,.

The third piezoelectric electrode body 1220 shown in FIGS. 13C and 13D includes a third piezoelectric element 1221 having a hole 1221a formed in the center thereof. As shown in FIG. 13 (c), a second common electrode 1222 (first electrode pattern) is formed on the surface of. This second common electrode 122
Reference numeral 2 denotes a surface of the third piezoelectric element 1221, which is formed by forming a thin film of metal on a part other than the outer peripheral edge, and has a protrusion 1222a on a part of the outer peripheral edge.

As shown in FIG. 13D, a plurality of first piezoelectric elements constituting a pattern similar to the second electrode pattern shown in FIG. 11B are formed on the back surface of the third piezoelectric element 1221. The electrode 1232 and the second electrode 1233 are formed as a thin film. The first electrodes 1232, 1232,... And the second electrodes 1233, 1233,.
, And projecting portions 1233a, 1233a,.

Here, in the third piezoelectric electrode body 1220, the first electrodes 1232, 1232,... At the inner peripheral edge of the third piezoelectric element 1221 are connected to the first conductive electrodes 1330.
Is conducted. On the other hand, as shown in FIG. 13E, the second electrodes 1233, 1233,.
Of the second conductive electrode 1340 at the outer peripheral edge of the piezoelectric element 1221
Is conducted. The second conductive electrode 13
Are insulated from each other through an insulator 1350 (see FIG. 12).

Returning to FIG. 12, in the laminated piezoelectric vibrator 1400, since the first piezoelectric electrode body 1200, the second piezoelectric electrode body 1210, and the third piezoelectric electrode body 1220 are laminated, the hole 1201a (See FIG. 13A), hole 1211a (see FIG. 13B), and hole 1
221a (see FIG. 13 (c)) are respectively located on the same cylinder and constitute a through hole 1400a.

The common short-circuit electrode 1300 is formed in a thin film in the axial direction on the outer peripheral surface 1400b of the laminated piezoelectric vibrator 1400, and short-circuits the first common electrode 1202 and the second common electrode 1222. FIGS. 13B and 13D
Are connected to the outer peripheral surface 1400 of the laminated piezoelectric vibrator 1400 (see FIG. 12).
b, a thin film is formed in the axial direction, and the first electrode 121
(See FIG. 13 (b)) and the first electrodes 1232, 1232 (see FIG. 13 (d)). Similarly, the second short-circuit electrodes 1320, 132
Are formed in a thin film in the axial direction on the outer peripheral surface 1400b, and second electrodes 1213, 1213,... (See FIG. 13B) and second electrodes 1233, 1233,.
.. (See FIG. 13D).

In the above configuration, when driving forward rotation,
As in the second embodiment, the first conductive electrode 1
When the power supply is connected to 330, the first electrode 123
2, 1232... And first electrodes 1212, 121
The drive signal is applied to 2,..., And the rotor 310 is driven in the normal rotation direction. On the other hand, at the time of the reverse rotation driving, the power supply is connected to the second conductive electrode 1340, so that the second electrodes 1233, 1233,.
The drive signal is applied to 3, 1213,.
0 is driven in the reverse direction.

As described above, according to the laminated piezoelectric vibrator according to the fifth embodiment described above, in addition to the effect of the laminated piezoelectric vibrator according to the fourth embodiment, FIG.
Are short-circuited by the first conductive electrode 1330, and the second electrodes 1233, 1233,.
Since it is configured to be conductive by 0, it is possible to easily route the wiring from the power supply.

Although the laminated piezoelectric vibrators according to the first to fifth embodiments of the present invention have been described in detail, specific examples of the structure are not limited to the first to fifth embodiments. Even if there is a design change or the like within a range not departing from the gist of the present invention, it is included in the present invention. For example, the second embodiment described above
In the laminated piezoelectric vibrators according to Nos. 5 to 5, the example in which the polarization direction of the second electrode pattern is set to a positive electrode, a positive electrode, a negative electrode, and a negative electrode at every third direction has been described, but the present invention is not limited thereto. The positive electrode and the negative electrode may be alternately arranged, and the arrangement of the polarization electrodes is arbitrary. Further, the laminated piezoelectric vibrators according to Embodiments 2 to 5 described above can be applied to an ultrasonic motor regardless of a standing wave method or a traveling wave method.

Further, the laminated piezoelectric vibrators according to the above-described first to fifth embodiments are not only suitable for use in an ultrasonic motor, but also applicable as a drive source for a piezoelectric actuator and a drive source for an electronic device. . For example, as shown in FIG. 14, an ultrasonic motor 1500 to which the laminated piezoelectric vibrators according to the above-described second to fifth embodiments are applied is incorporated in a movement 1600 of a wristwatch. The power supply consists of a silver oxide or lithium battery 1700 that supplies power to the quartz oscillator. As described above, when the ultrasonic motor 1500 to which the laminated piezoelectric vibrator according to the second to fifth embodiments is applied is used, the movement 1600 can be reduced in size and thickness by the above-described effects.

Further, as another application example, the vibration sound of the ultrasonic motor 1500 can be used instead of the ringing sound of a portable electronic device (such as a mobile phone). In this case, it is possible to prevent noise pollution caused by the ringing tone and to notify the user of the incoming call without increasing the size of the device. Further, as another application example of the above-described ultrasonic motor 1500, for example, the present invention is also applicable to an autofocus of a camera, a memory drive device, a printer drive device, and the like.

[0096]

As described above, according to the first aspect of the present invention, the first and second outer peripheral surfaces of the laminated structure have the first and second peripheral surfaces.
And the second short-circuit electrode is formed,
Since through holes and large holes are not required as in the related art, it is possible to easily perform assembly by sintering / joining / lamination and to achieve an effect of downsizing.

According to the first aspect of the present invention, since the laminated structure is formed by lamination or joining, the first piezoelectric element and the first piezoelectric element in which the first electrode pattern and the second electrode pattern are adjacent to each other are formed. Since the second piezoelectric element acts as a common electrode, an effect of reducing the thickness can be achieved.

According to the second aspect of the present invention, the same effects as those of the first aspect are obtained, and the power source is formed by forming the first extraction electrode and the second extraction electrode on the same plane. There is an effect that the wiring can be easily routed for connection.

According to the third aspect of the present invention, the first and second short-circuit electrodes are formed on the outer peripheral surface of the laminated structure. Becomes unnecessary, and the outer diameter can be reduced. Therefore, according to the third aspect of the invention, there is an effect that the size can be further reduced.

According to the fourth aspect of the present invention, the forward / reverse rotation can be easily controlled by appropriately selecting the application of the drive signal to the second electrode pattern. Play.

According to the fifth aspect of the present invention, since the third electrode pattern including the first extraction electrode and the second extraction electrode is formed on the same plane, the wiring can be routed. There is an effect that it can be easily performed.

According to the sixth aspect of the present invention, since the first conductive electrode and the second conductive electrode are provided, wiring can be easily routed when connecting a power supply. It works. Further, according to the invention described in claim 7, since the first electrode pattern on one surface is reduced in area, there is an effect that this can be used as a dummy electrode.

Further, in view of the fact that the laminated piezoelectric vibrator is small and thin, the invention according to claim 8 can be applied to an ultrasonic motor, and according to the invention according to claim 10, And piezoelectric actuators. According to the ninth aspect of the present invention, a small ultrasonic motor using a small and thin laminated piezoelectric vibrator can be applied to an electronic device. According to the eleventh aspect of the present invention, A small piezoelectric actuator using a small and thin laminated piezoelectric vibrator can be applied to electronic devices.

[Brief description of the drawings]

FIG. 1 shows a laminated piezoelectric vibrator 1 according to a first embodiment of the present invention.
FIG. 10 is a side sectional view showing the configuration of the 00.

FIG. 2 is a plan view showing a configuration of each component of the laminated piezoelectric vibrator 100 according to the first embodiment.

FIG. 3 is an exploded perspective view showing a configuration of an ultrasonic motor 200 using the laminated piezoelectric vibrator according to the second embodiment.

FIG. 4 is a side sectional view showing a configuration of an ultrasonic motor 200 using the laminated piezoelectric vibrator according to the second embodiment.

FIG. 5 is an assembly diagram showing a configuration of an ultrasonic motor 200 using the laminated piezoelectric vibrator according to the second embodiment.

FIG. 6 is a side sectional view showing a configuration of the laminated piezoelectric vibrator according to the second embodiment.

FIG. 7 is a diagram showing a configuration of each component of the laminated piezoelectric vibrator according to the second embodiment.

FIG. 8 is a side sectional view showing a configuration of the laminated piezoelectric vibrator according to the third embodiment.

FIG. 9 is a diagram showing a configuration of each component of the laminated piezoelectric vibrator according to the third embodiment.

FIG. 10 is a side sectional view showing the configuration of the laminated piezoelectric vibrator according to the fourth embodiment.

FIG. 11 is a plan view showing a configuration of each component of the laminated piezoelectric vibrator according to the fourth embodiment.

FIG. 12 is a side sectional view showing a configuration of the laminated piezoelectric vibrator according to the fifth embodiment.

FIG. 13 is a plan view showing a configuration of each component of the laminated piezoelectric vibrator according to the fifth embodiment.

FIG. 14 is a plan view showing an application example of the laminated piezoelectric vibrator according to the second to fifth embodiments.

[Explanation of symbols]

 Reference Signs List 100 laminated piezoelectric vibrator 130 outer short-circuit electrode 130a extraction electrode 140 inner short-circuit electrode 140a extraction electrode 110, 120 piezoelectric electrode body 260 laminated piezoelectric vibrator 400 first piezoelectric electrode body 410 second piezoelectric electrode body 420 third piezoelectric electrode Body 500 Common short-circuit electrode 510 First short-circuit electrode 520 Second short-circuit electrode 600 Laminated piezoelectric vibrator 700 First piezoelectric electrode body 710 Second piezoelectric electrode body 720 Third piezoelectric electrode body 730 Fourth piezoelectric electrode body 800 common short-circuit electrode 810 first short-circuit electrode 820 second short-circuit electrode 900 laminated piezoelectric vibrator 1000 first piezoelectric electrode body 1010 second piezoelectric electrode body 1020 third piezoelectric electrode body 1030 fourth piezoelectric electrode body 1100 Common short-circuit electrode 1110 First short-circuit electrode 1120 Second short-circuit electrode 1400 Child 1200 first piezoelectric electrode body 1210 second piezoelectric electrode 1220 third piezoelectric electrode body 1300 common short electrode 1310 first short electrode 1320 second short electrode 1330 first conduction electrode 1340 second conducting electrode

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Makoto Suzuki 1-8-8 Nakase, Mihama-ku, Chiba-shi, Chiba F-term (reference) in Seiko Instruments Inc. 5H680 AA19 BC02 BC04 DD23 DD37 DD39 DD40 DD73 FF03 GG02

Claims (11)

[Claims] 1. A thin plate-shaped first piezoelectric element having a first electrode pattern formed on a surface thereof and having a hole formed in a central portion thereof; and a second electrode pattern different from the first electrode pattern. Is formed on the surface, and includes a second piezoelectric element having the same shape as the first piezoelectric element. A plurality of the first piezoelectric elements and a plurality of the second piezoelectric elements are alternately stacked. A first short-circuit electrode formed on an outer peripheral surface of the laminated structure and short-circuiting between the plurality of first electrode patterns; A second short-circuit electrode formed on the inner peripheral surface of the body and short-circuiting the plurality of second electrode patterns. 2. A third electrode formed on the same plane, comprising a first extraction electrode connected to the first short-circuit electrode, and a second extraction electrode connected to the second short-circuit electrode. The multilayer piezoelectric vibrator according to claim 1, further comprising a pattern. 3. A thin plate-shaped first piezoelectric element having a first electrode pattern formed on a surface and a hole formed in a central portion, and a plurality of electrodes different from the first electrode pattern. A second electrode pattern is formed on the surface and includes a second piezoelectric element having the same shape as the first piezoelectric element. Are laminated alternately and integrally sintered or joined to form a laminated structure, a first short-circuit electrode formed on the outer peripheral surface of the laminated structure and short-circuiting between the first electrode patterns, A plurality of second short-circuit electrodes formed on the outer peripheral surface of the multilayer structure and short-circuiting the plurality of electrodes of the second electrode pattern between the plurality of second piezoelectric elements. Laminated piezoelectric vibrator. 4. The laminated piezoelectric vibrator according to claim 3, wherein the second electrode pattern includes a plurality of divided electrodes having different polarization directions. 5. A first extraction electrode formed on the same plane and connected to the first short-circuit electrode, and a plurality of second extraction electrodes connected to the plurality of second short-circuit electrodes. The laminated piezoelectric vibrator according to claim 3, further comprising a third electrode pattern. 6. In the second electrode pattern, a first conduction electrode that conducts a predetermined one of the plurality of electrodes, and in the second electrode pattern, conduction is performed by the first conduction electrode. The laminated piezoelectric vibrator according to claim 3, further comprising: a second conductive electrode that conducts an electric current. 7. The method according to claim 1, wherein the first electrode pattern formed on one surface of the laminated structure has a smaller area than the other first electrode patterns. 5. The laminated piezoelectric vibrator according to 3 or 4. 8. An ultrasonic motor using the laminated piezoelectric vibrator according to claim 1. Description: 9. An electronic apparatus using the ultrasonic motor according to claim 8. 10. A piezoelectric actuator using the laminated piezoelectric vibrator according to claim 1. Description: 11. An electronic apparatus using the piezoelectric actuator according to claim 10.