JP2000277401A - Substrate processing device, simulation device therefor and computer readable recording media of simulation program thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to simulate progressing conditions of substrate processing without actual operation of a substrate processing device, and guide to optimum input order. SOLUTION: Firstly a recipe for each substrate group is obtained, and each processing schedule is calculated according to the responding substrate group. A processing schedule for a substrate group which is the first input subject is set at a specified position of the axis of time, and the processing schedule for other input subjects are set successively. As a result of comparing each processing schedule of a plurality of substrate groups with others and then modifying them, a modified schedule is generated (Step S15). At the time of modification, whether the commanded time in processing schedule is overlapped or not is checked. When overlapping of commanded time is found out, the overlapping is resolved by shifting the counter schedule of the processing schedule according to the overlapped time range. As a result, the optimum schedule of each substrate group can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a semiconductor wafer,
A substrate processing apparatus that sequentially performs predetermined processing on a precision substrate (hereinafter, simply referred to as a “substrate”) such as a glass substrate for a liquid crystal display or a plasma display panel by a plurality of processing units, and such a substrate processing apparatus. And a computer-readable recording medium recording a simulation program of the substrate processing apparatus.

[0002]

2. Description of the Related Art As one of substrate processing apparatuses for performing processing on a substrate, an apparatus having a so-called in-line type is known. The loader sequentially pays out substrates to be processed from a predetermined carrier (container),
A plurality of processing units provided for performing predetermined processing on the substrate are arranged in a line between the unloader that stores the processed substrate in a predetermined carrier, and the substrate is moved from the loader side to the unloader side. By carrying in one direction, a predetermined process for the substrate is sequentially performed in each processing unit in the carrying process.

In some cases, different processing contents are set for a substrate discharged from a loader for each lot. In such a case, the processing time in each processing unit is set to be different for each lot. The processing content for each lot is managed as a recipe associated with each lot.

[0004] When sequentially loading substrates of different lots from the loader to the respective processing units from the loader, the timing of loading the substrates of the next lot from the loader into the processing unit is determined based on the timing of the lot loaded first. It is necessary to make settings so that a substrate of a later lot will not catch up with a substrate of the same lot.

For example, when each processing unit has a processing tank and a substrate is subjected to substrate processing such as etching by immersing the substrate in a chemical solution in the processing tank, a substrate of a later lot is used. When the immersion process in the chemical solution is completed and the substrate is transported to the next processing unit (processing tank), and the substrate of the earlier lot is still being processed in the processing unit of the transfer destination, The substrate cannot be transported to the next processing unit, and excessive processing such as over-etching is performed, thereby generating a defective substrate.

That is, if a substrate of a later lot catches up with a substrate of a previously input lot, congestion of the substrate occurs inside the substrate processing apparatus. Therefore, the substrate is sequentially transferred to each processing unit according to a recipe. Therefore, the substrate cannot be properly processed.

[0007] Therefore, when the substrate of the lot put in later has caught up with the substrate of the lot put in earlier, the latter substrate is temporarily immersed in the washing treatment tank,
It is conceivable to wait until the processing unit serving as the next transport destination becomes in a processable state.

However, while the substrate is immersed in the washing tank, the overflow of pure water cannot be stopped, and the consumption of pure water increases. Further, when a substrate of a further lot is transported to the washing tank, the substrate cannot be transported, and the problem of congestion of the substrate inside the substrate processing apparatus further increases.

Therefore, when loading the substrate from the loader,
A predetermined time interval must be provided after the previous substrate is loaded. If this interval is longer than necessary, the operating rate of the substrate processing apparatus will be reduced, so it is preferable to set the interval to the minimum.

Conventionally, in order to derive an optimum loading interval, that is, a loading timing for each lot, the substrate processing for each lot is performed manually by taking into account the processing time of each processing section in the substrate processing apparatus and the operation of the transfer robot. Is created as a time chart, and the input timing of a new lot is determined based on the time chart created artificially.

[0011]

However, the creation of a time chart by manual operation as described above requires a great deal of labor and work time since the calculation is very complicated. is there. In the case of such a work, when a large number of substrates of lots having different processing contents are mixed, the calculation becomes more complicated and the work efficiency becomes extremely poor.

In some cases, the configuration of the substrate processing apparatus itself may be changed. In such a case, however, there is a problem that a new time chart must be created with a large amount of labor and work time.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and can simulate a moving state of a substrate and an operating state of a transfer robot without actually operating a substrate processing apparatus. It is an object of the present invention to provide a substrate processing apparatus, a simulation apparatus for a substrate processing apparatus, and a computer-readable recording medium on which a simulation program for the substrate processing apparatus is recorded, which can guide a proper input timing and an input order.

[0014]

According to a first aspect of the present invention, a plurality of processing units and a plurality of substrate groups each including one or a plurality of substrates are provided. A transporting means for sequentially transporting the plurality of substrate groups as functional means, and sequentially performing processing in accordance with a recipe defined in advance for each of the plurality of substrate groups, (a) a recipe for each substrate group Processing schedule calculation means for calculating a processing schedule according to the above as a chain of occupation time zones of the respective functional means by the board group;
(b) comparing the occupation time zones among the processing schedules of the plurality of substrate groups, and when there is an overlap in any of the occupation time zones, correcting the processing schedule to avoid the overlap. Comparing and correcting means for obtaining a corrected schedule.

According to a second aspect of the present invention, in the substrate processing apparatus of the first aspect, the comparing and correcting means comprises: (b-1)
A plurality of processing schedules obtained for each substrate group to be compared, a sequential comparing means for comparing the occupied time zones with each other in accordance with the time progression order, and (b-2) each time an overlap of the occupied time zones is found. Shift means for temporally shifting any of the plurality of processing schedules according to the overlapping time width, and (b-3) the shifted processing schedule as a new comparison target, and A repetition means for repeatedly activating the sequential comparison means and the shift means until all are eliminated, wherein a processing schedule obtained in a state in which the duplication is completely eliminated is obtained as the corrected schedule. I have.

According to a third aspect of the present invention, a plurality of processing units and a transfer unit for sequentially transferring a plurality of substrate groups each including one or a plurality of substrates to the plurality of processing units are provided as functional units. A substrate processing apparatus that sequentially performs a process according to a recipe defined in advance for each of the plurality of substrate groups, and (a) a buffer unit that waits before inputting the plurality of substrate groups, and (b) Schedule determining means for determining an optimal schedule of the substrate group, and (c) optimal time control means for controlling a movement timing of each substrate group between positions of the substrate processing apparatus according to the optimal schedule, further comprising: The deciding means (b-1) sets a processing schedule according to the recipe for each substrate group, assuming the charging sequence and the charging timing of each substrate group. A processing schedule calculating means for calculating as a chain of occupation time period of each function means, (b-
2) The occupation time zone is compared between the processing schedules of the plurality of substrate groups, and if any of the occupation time zones has an overlap, the processing schedule is corrected to correct the overlap. Comparing and correcting means for obtaining a completed schedule, (b-3) a total processing time calculating means for calculating a total processing time required for all the processing of the plurality of substrate groups based on the corrected schedule, and (b-4) An optimal schedule for identifying the modified schedule in which the total processing time is minimized as the optimal schedule by comparing the total processing times in each of the loading orders while changing the assumption of the input order of each substrate group. Identification means.

Here, the term "position" refers to a position, such as a buffer unit or a processing unit, which is set so that the movement of the substrate group temporarily stops in a series of processing steps of the substrate group.

According to a fourth aspect of the present invention, a plurality of processing units and a transfer unit for sequentially transferring a plurality of substrate groups each including one or a plurality of substrates to the plurality of processing units are provided as functional units. A simulation apparatus of a substrate processing apparatus that sequentially performs processing according to a recipe defined in advance for each of the plurality of substrate groups, and (a) an arrangement configuration of the substrate processing apparatus and a recipe for each substrate group. The corresponding processing schedule, processing schedule calculation means to calculate as a chain of occupation time zones of each functional means by the board group, (b) comparing the occupation time zone between the processing schedules of the plurality of board groups, When there is an overlap in any of the occupation time zones, there is provided a comparing and correcting means for obtaining the corrected schedule avoiding the duplication by correcting the processing schedule. , And characterized in that it is constructed as a separate body from said substrate processing apparatus.

According to a fifth aspect of the present invention, there is provided a buffer unit for holding a plurality of substrate groups each consisting of one or a plurality of substrates before loading, a plurality of processing units, and A transport device for sequentially transporting the plurality of substrate groups as a functional unit, a simulation device of a substrate processing apparatus that sequentially performs a process according to a recipe defined in advance for each of the plurality of substrate groups, (a) each substrate Processing for calculating a processing schedule according to the arrangement configuration of the substrate processing apparatus and a recipe for each substrate group as a chain of occupation time periods of the respective functional units by the substrate group, assuming a group input sequence and a group timing. Schedule calculating means;
(b) comparing the occupation time zones among the processing schedules of the plurality of substrate groups, and when there is an overlap in any of the occupation time zones, correcting the processing schedule to avoid the overlap. Comparing and correcting means for obtaining a corrected schedule, (c) based on the corrected schedule,
A total processing time calculating means for calculating a total processing time required for all the processing of the plurality of substrate groups, and (d) changing the total processing time in each input order while changing the assumption of the input order of each substrate group. And an optimum schedule specifying means for specifying the corrected schedule that minimizes the total processing time as an optimum schedule, and is configured separately from the substrate processing apparatus.

According to a sixth aspect of the present invention, there is provided a simulation of a substrate processing apparatus for operating a computer as a simulation apparatus of the substrate processing apparatus according to the fourth or fifth aspect on a computer-readable recording medium. The program is recorded.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

<1. Overview of Substrate Processing Apparatus> FIG. 1 is a plan view showing a configuration of a substrate processing apparatus 1 of the present embodiment. Note that FIG. 1 defines three-dimensional coordinates including an X axis, a Y axis, and a Z axis.

As shown in FIG. 1, the substrate processing apparatus 1 includes a buffer unit 10, a transfer robot 20, a transfer robot 30,
A processing unit group 40 and a control unit CL are provided.

The buffer section 10 functions as a standby buffer for accommodating a plurality of carriers C accommodating a plurality of substrates W and an external device (for example, an AGV) of the substrate processing apparatus 1.
And the like) as a loader and an unloader for loading and unloading the carrier C. Also,
A buffer transport section 11 is provided inside the buffer section 10, and the buffer transport section 11 stores a carrier C in which a substrate W to be loaded is stored from among a plurality of carriers C in a predetermined loading order. And transports the carrier C to a predetermined transfer position TP.

The transfer robot 20 accesses the transfer position TP to take out a group of one or more substrates W as a processing unit from the carrier C,
Transfer mechanism 20a for accommodating a group of substrates in the apparatus, and a posture conversion mechanism 20 for converting the posture of the group of substrates between a horizontal posture and a vertical posture
b, and an elevating mechanism 20 c for elevating and lowering the substrate group in a vertical posture, and configured to transfer the substrate group between the buffer unit 10 and the transfer robot 30.

The transfer robot 30 is capable of horizontal movement along the X-axis and up-and-down movement along the Z-axis. The transfer robot 30 transfers the substrate group while holding the substrate group in a vertical posture by a pair of holding mechanisms 31. The transfer robot 30 transfers a group of substrates to and from the lifting mechanism 20c. In addition, the transfer of the substrate group between each of the first lifter 35, the second lifter 36, and the third lifter 37 provided in the processing unit group 40 can be performed.

The processing section group 40 is provided with a plurality of processing sections for performing predetermined processing on the substrate group. In particular,
A drying section 41 for performing reduced-pressure drying on the substrate group, and a first washing section 42 having a washing tank WB1 containing pure water.
A first chemical processing section 43 having a chemical tank CB1 for storing a chemical, a second cleaning processing section 44 having a washing tank WB2 for storing pure water, and a second chemical processing having a chemical tank CB2 for storing a chemical. A part 43. The plurality of processing units are linearly arranged in the X direction, and the transport path of the transport robot 30 is formed along the linear array.

The first lifter 3 is located behind the drying section 41.
5, the first lifter 35 is vertically moved (Z
Direction), and transports the group of substrates received from the transport robot 30 to the inside of the drying processing unit 41.

A second lifter 36 is disposed behind the first washing section 42 and the first chemical processing section 43, and is located behind the second washing section 44 and the second chemical processing section 45. Is provided with a third lifter 37. Second lifter 3
The sixth and third lifters 37 can move up and down (Z direction) and traverse (X direction). And the second lifter 36 is
The substrate group received from the transfer robot 30 is immersed in the chemical tank CB1 of the first chemical processing section 43,
2 is immersed in the washing tank WB1. Further, the third lifter 37 transfers the substrate group received from the transfer robot 30 to the second lifter 37.
It is immersed in the chemical tank CB2 of the chemical processing section 45 or immersed in the washing tank WB2 of the second washing processing section 44.

In this embodiment, the processing units 41 to 45 for the substrate group, and the substrate group including the buffer transfer unit 11, the transfer robot 20, the transfer robot 30, and the first to third lifters 35 to 37 are used. The transfer means forms an essential functional means when performing substrate processing in the substrate processing apparatus 1. The operation of these functional units is controlled by the control unit CL.
Done by

With such a configuration, each substrate group to be processed is sequentially conveyed to each processing unit according to a recipe specified in advance, and a predetermined process is performed in each processing unit. become. The group of substrates on which the processing according to the recipe has been completed is returned to the buffer unit 10 again by the transport means, and is stored in the carrier C.

Here, an example of a substrate processing procedure by the substrate processing apparatus 1 will be described. The transport unit 11 in the buffer
The plurality of carriers C stored in the buffer unit 10 and in a standby state are sequentially conveyed to the transfer position TP in accordance with a loading order determined by a loading order determination method described later or a preset loading order.

The transfer robot 20 takes out one or a plurality of substrates W from the carrier C for each substrate group, which is a processing unit, converts the horizontal posture to the vertical posture, and transfers the substrate group to the transfer robot 30.

When the transfer robot 30 receives the substrate group, it moves in the X direction and transfers the substrate group to the second lifter 36 or the third lifter 37. The second or third lifters 36 and 37 are
When the group of substrates to be processed is received, the group of substrates is lowered, and the group of substrates is immersed in a predetermined chemical solution in the chemical solution layers CB1 and CB2. As a result, the chemical treatment for the substrate group is started. It should be noted that the second or third lifters 36 and 37 maintain the state in which the substrate group is held in the vertical posture even during the immersion processing on the substrate group.

When the chemical processing time based on the recipe has elapsed, the second or third lifters 36 and 37 are taken out of the chemical by raising the substrate group, and are taken out of the chemical tank.
After moving onto the WB2, the substrate group is immersed in pure water. As a result, a cleaning process is performed on the substrate group. In the washing process for the substrate group, the washing tanks WB1, WB2
From which the pure water overflows.

When the chemical treatment and the pure water treatment for the substrate group are completed, the transfer robot 30 moves to the second or third lifter 3.
The substrate group is taken out from the first and second lifters 35 and 37.
Pass to. Then, the first lifter 41 dries the substrate group by transferring the group of substrates received from the transfer robot 30 into the drying processing unit 41.

When the drying is completed, the transport robot 30 takes out the dried substrate group from the first lifter 35, and
The group of substrates on which all processing has been completed is transferred to the transfer robot 20. The transfer robot 20 converts the processed substrate group from the vertical position to the horizontal position, and stores it in the carrier C at the transfer position TP of the buffer unit 10.

Thus, a series of substrate processing is completed. However, when one substrate group is being processed by a specific processing unit, an empty state occurs in another processing unit, the transfer robot 30, and the like. In the present embodiment, a schedule relating to substrate processing is set so as to carry or process another substrate group by utilizing such an empty state, thereby improving the efficiency of substrate processing.

<2. Control Mechanism of Substrate Processing Apparatus> FIG.
FIG. 3 is a block diagram illustrating details of a control unit CL of the substrate processing apparatus 1 as described above. As shown in FIG.
Is provided with three control units: a master control unit 2, a processing control unit 3, and a transport control unit 4.

The master control unit 2 is a control unit that comprehensively controls and manages the overall operation of each unit in the substrate processing apparatus 1. The master control unit 2 has a memory 5 for storing recipes relating to processing contents set for each substrate or lot and data relating to the configuration of the substrate processing apparatus 1, and various types of information such as substrate processing status for the operator. A display unit 6 for displaying, a keyboard 7 for inputting predetermined information by an operation input by an operator, a processing control unit 3
And the transport control unit 4 are connected to each other.

The processing control section 3 controls each processing section by individually transmitting parameters and the like relating to the operation of each processing section in the processing section group 40. The drying processing section 41, the first washing processing Section 42, first chemical liquid processing section 4
3. The second washing section 44 and the second chemical processing section 45 are communicably connected to each other.

The transfer control unit 4 individually controls each transfer unit by transmitting a transfer command or the like to each transfer unit in the substrate processing apparatus 1. Robot 20, transfer robot 3
0, first lifter 35, second lifter 36, third lifter 37
Are communicable with each other.

When processing a group of substrates in the substrate processing apparatus 1, first, a carrier C containing a plurality of substrates W to be processed is loaded into the buffer unit 10. Almost simultaneously with the loading of the carrier C, a recipe relating to the processing content of the substrate group stored in the carrier C is input as data,
The data is stored in the memory 5 by the master control unit 2. In addition,
The input of the recipe may be input from the keyboard 7 by the operator, or may be input from another computer (for example, a management computer provided in a factory) via data input means (not shown).

The recipe describes what processing is to be performed on the group of substrates. For example, the drying processing unit 41
The substrate such as the pressure value at the time of decompression and the drying processing time, the rinsing processing time in the first rinsing processing unit 42 and the second rinsing processing unit 44, and the chemical processing time in the first chemical processing unit 43 and the second chemical processing unit 45 A processing procedure for the group is described.

When processing is performed on a substrate group, the master control unit 2 reads out a recipe for the substrate group from the memory 5 and provides various parameters to the processing control unit 3 and the transfer control unit 4, so that the transfer control unit 4 provides a drive command to each transport unit to cause the substrate group to be transported in an order according to the processing procedure, and the processing control unit 3 to perform management control such that the processing unit 3 appropriately processes the substrate group in each processing unit. I do.

In this embodiment, in order to avoid the occurrence of defective substrates due to excessive processing and the like and to carry out efficient substrate processing, actual processing of a group of substrates is started based on an instruction from an operator. Master control unit 2 prior to
Determines the optimal loading order and the like of the plurality of substrate groups waiting in the buffer unit 10. In addition, when the loading order is determined in advance, the optimal loading timing of each substrate group is determined.

FIG. 3 is a diagram schematically showing the functions included in master control unit 2.

As described above, the master control unit 2 operates as the schedule determination unit 25 prior to the actual substrate processing to specify the optimal schedule for processing each substrate group.

When actually performing substrate processing, the master control unit 2
Operates as the optimal time control unit 26 to control the movement timing of each substrate group between each position based on the optimal schedule specified in advance. That is, an operation command is given to the processing control unit 3 and the transfer control unit 4 so that the substrate group is loaded from the buffer unit 10 at a predetermined loading timing or transferred between the processing units at a predetermined transfer timing. Control it.

The schedule determining unit 25 for specifying the optimum schedule further includes the processing schedule calculating unit 2
5a, a comparison / correction unit 25b, a total processing time calculation unit 25c, and an optimum schedule identification unit 25d.

The processing schedule calculation section 25a obtains a processing schedule for each substrate group according to a recipe defined for each substrate group. The processing schedule expresses a processing procedure performed on the substrate group over time, and is represented as a chain of occupation time zones of the respective functional units by the substrate.

The comparison / correction unit 25b verifies the occupation time zones of the processing schedule obtained for each substrate group with each other along the time axis, and corrects the processing schedule when any of the occupation time zones overlaps. Thus, a corrected schedule that avoids duplication is generated.

The total processing time calculation section 25c calculates the total processing time required for all the processing of a plurality of substrate groups based on the corrected schedule.

The optimum schedule specifying unit 25d compares the total processing times calculated for different input orders with each other, selects a corrected schedule that minimizes the total processing time, and specifies the corrected schedule as the optimum schedule.

Since these parts are closely related to each other, an optimal schedule for processing each substrate group can be specified prior to the substrate processing, so that the substrate processing apparatus 1 can be operated efficiently. And avoids excessive substrate processing.

Hereinafter, details of the processing in the master control unit 2 will be described.

<3. Determination of Optimum Schedule when Supply Order is Not Defined> First, processing related to determination of the supply order will be described. When a plurality of carriers C are on standby in the buffer unit 10 and the order of loading the carriers C is not particularly defined, the substrate processing apparatus 1 may be used in accordance with the order of loading the group of substrates stored in each carrier C. Processing efficiency changes significantly. Therefore, in order to avoid the occurrence of defective substrates due to excessive processing and to perform efficient substrate processing, it is necessary to determine an optimal schedule including an optimal loading order.

In the following description, a case where three board groups A, B, and C having different processing contents are in a standby state in the buffer unit 10 will be described as an example for easy understanding of each procedure. . Also, it is assumed that recipes a, b, and c are set for each of the substrate groups A, B, and C, respectively.

FIG. 4, FIG. 5, and FIG. 6 are flowcharts in the case where the order of loading the substrate groups is determined prior to the substrate processing.

As shown in FIG. 4, prior to the actual substrate processing (step S2), the master controller 2
When there are a plurality of substrate groups waiting at zero, an optimal schedule including the order of loading the substrate groups is determined (step S1). That is, when the master control unit 2 performs the process of step S1, it functions as the schedule determination unit 25.

When there is only one substrate group in the buffer unit 10, there is only one substrate to be loaded. Therefore, it is necessary to determine an optimal schedule in relation to other substrate groups. Therefore, the processing in step S1 may not be performed.

Determination of Optimal Schedule (Step S1)
5 is a flowchart of FIG. 5 and FIG.

The master controller 2 assumes the order and timing of loading a plurality of substrate groups waiting in the buffer 10 (step S11). For example, it is assumed that the loading order of the substrate groups A, B, and C is “A → B → C”.

Then, the master control unit 2 accesses the memory 5 and acquires the recipe set for each substrate group waiting in the buffer unit 10 (step S12). Thereby, the master control unit 2 can clarify the processing content for each board group. For example, in the case of the above example, the substrate groups A,
Recipe a, which is individually set for each of B and C,
b and c are obtained.

Then, the master controller 2 calculates a processing schedule according to the recipe for each substrate group (step S13). The above recipe describes the time required for processing in each processing unit, but the time required for transporting the substrate group from the transport source to the destination is unknown. Therefore, in this processing schedule, the time required for the transfer is also calculated based on the distance from the transfer source to the transfer destination of the substrate group based on the arrangement configuration of the substrate processing apparatus 1, and the like.
A processing schedule including that is generated.

For example, the recipe “a” for the substrate group A includes the procedure “first chemical processing section 43, first rinsing processing section 42, second chemical processing section 45, second rinsing processing section 44, drying processing section 41”. Is described, and the recipe b for the substrate group B describes the processing contents in the procedure of “first chemical processing section 43, first rinsing processing section 42, drying processing section 41”. The recipe c for the substrate group C includes “the second chemical processing section 45, the second rinsing processing section 44, and the drying processing section 4”.
It is assumed that the processing content in the procedure “1” is described.
When the master control unit 2 calculates the processing schedules SA, SB, SC for these board groups A, B, C, the result is as shown in FIG.

The master controller 2 determines in steps S12 and S1
When performing the processing of No. 3, it functions as the processing schedule calculation unit 25a described above.

Then, in step S14, step S
In the loading sequence assumed in 11, the processing schedule of the substrate group to be loaded first is set at a predetermined position on the time axis. In the case of the above example, since the first input target is the substrate group A, the processing schedule SA for the substrate group A is set to a predetermined position on the time axis (for example, the time axis origin position t = 0).

In step S15, the master control unit 2 sequentially sets processing schedules on the time axis according to the assumed loading order, and compares and corrects processing schedules of a plurality of substrate groups. In addition, a corrected schedule for avoiding generation of a defective substrate due to excessive processing or the like and performing efficient substrate processing is generated. That is,
In this step S15, the master control unit 2 functions as the comparison correction unit 25b.

FIG. 6 is a flowchart showing details of the processing in step S15.

In step S21, the next group of substrates to be loaded is specified based on the loading sequence assumed in step S11, and the processing schedule for the group of substrates is additionally set at a predetermined position on the time axis. In the case of the above example, since the substrate group A is already set on the time axis, the processing schedule SB for the substrate group B to be loaded next to the substrate group A is set on the time axis. The setting position when setting on the time axis is assumed to be a position after the input time of the substrate group A because the input order that the substrate group B is input later than the substrate group A is assumed.

As described above, the processing schedule SA for the substrate group A and the processing schedule SB for the substrate group B
FIG. 8 shows the concept when the and are set on the time axis. In addition,
The upper ends of the processing schedules SA and SB indicate the input times of the substrate groups A and B, respectively. In FIG. 8, the input times of the substrate groups A and B match at t = 0.

Then, the process proceeds to step S22, where the inspection is performed along the traveling direction of the time axis, and it is determined whether or not the same functional means is occupied at the same time in a plurality of processing schedules set on the time axis. I do.

The occupation of the same functional unit at the same time indicates that different groups of substrates are processed or transported by the same functional unit at the same time.
However, the substrate processing apparatus 1 according to this embodiment
Thus, any of the functional units cannot simultaneously process (including transport) a plurality of substrate groups. As a result, one of the substrate groups cannot move to the next destination, so that it is in a standby state inevitably, which causes an excessive processing or the like.

Therefore, in this embodiment, the following steps S23 to S24 are executed in order to eliminate the overlap of the occupation time occurring in the processing schedule obtained for each substrate group.

In step S23, it is checked whether or not an overlap of the occupation times of the processing schedules is found. If there is an overlap, the process proceeds to step S24 to determine an overlap time width of the occupation times.

Then, the process proceeds to step S25, where one of the processing schedules is temporally shifted according to the overlapping time width.

For example, in FIG. 8, when the inspection is performed in the order of progress from time t = 0, the transfer of the substrate group A by the transfer unit 11 in the buffer of the processing schedule SA and the transfer unit 11 in the buffer of the processing schedule SB And the transfer of the substrate group B overlaps in the same time zone. Therefore, in such a processing schedule, the substrate group B cannot be appropriately processed according to the processing schedule, and it is necessary to shift one of them along the time axis by the overlapping time width t1.

The order of loading the substrate groups A and B is based on the assumption that the substrate group B is loaded after the substrate group A.
Shifting the processing schedule SA forward by time;
Alternatively, the overlapping of the occupation times by the in-buffer transport unit 11 can be resolved by shifting the processing schedule SB backward in time.

In this embodiment, an example will be described in which the processing schedule for a substrate group to be inserted later is shifted to the time rear side in accordance with the input order. FIG. 9 is a diagram illustrating a concept when the processing schedule SB is shifted backward in time based on the overlapping time width t1 occurring between the processing schedules SA and SB in FIG. As shown in FIG. 9, the processing schedule SB
Is shifted backward by the time corresponding to the overlap time width t1, thereby eliminating the overlap of the occupation times by the in-buffer transport unit 11.

As described above, in the processing of steps S22 to S25, the duplication of the occupation time is checked, and if the duplication has occurred, the duplication time width of the occupation time is obtained. By shifting one of them temporally, it is possible to eliminate the overlapping portion that is first found along the traveling direction of the time axis.

Thereafter, the flow returns to step S22 to check whether or not the occupied time overlaps along the traveling direction of the time axis. Here, the inspection is performed in a state after the shift of one processing schedule.

For example, as shown in FIG.
When B is in the shifted state, the inspection may be performed toward the time rear side from the input time of the processing schedule SB. This is because before the input time of the processing schedule SB, the overlapping of the occupation times has been eliminated by shifting the processing schedule.

Then, in FIG. 9, the processing schedule S
When the inspection is advanced to the time rear side from the input time of B, it is found that there is a time zone in which the second lifter 36 of the functional units is occupied redundantly. Therefore, also in this case, "YES" is determined in step S23, and the overlap time width t2 is derived in step S24. And
In step S25, the processing schedule SB is shifted backward on the time axis according to the overlapping time width t2. As a result, the overlap of the occupation time zones of the second lifter 36 is eliminated, and the process returns to step S22.

As described above, in step S23, it is determined whether or not there is an overlap.
4, S25, and S22 are repeatedly performed. By repeating this processing schedule SA and SB
Overlap of the occupation time with is gradually eliminated.

If no overlap between the processing schedules SA and SB is found in the inspection in step S22, "NO" is determined in step S23, and the process proceeds to step S26.

In the case of the above example, steps S24, S25,
By repeating S22, the processing schedules SA and SB of the substrate group A and the substrate group B are finally in the state as shown in FIG.
The process proceeds to step 6.

In step S26, each processing schedule that is set on the time axis and has no overlapping occupation time is determined as a corrected schedule. Then, the loading timing of each board group is determined based on the corrected schedule that avoids duplication.

In the case of the above example, it is determined that the loading is started at time t = 0 based on the processing schedule SA for the substrate group A, and the processing schedule S is determined for the substrate group B.
Based on B, it is determined that the feeding is started after the time tb has elapsed from the time t = 0 (see FIG. 10). Thus, the substrate group A in the loading sequence assumed in step S11
And the injection timing for B are determined.

The input timing is a timing at which the substrate processing for the substrate groups A and B can be performed most efficiently, and the excessive processing of the substrate groups A and B can be avoided.

Then, the process proceeds to a step S27, where it is checked whether or not there is a group of substrates to be inputted next. If there is, a determination of "YES" is made and the process returns to the step S21.

In the case of the above example, since it is assumed that the substrate group C is loaded next to the substrate groups A and B, step S
At 27, “YES” is determined, and the process returns to step S21.

In step S21, the processing schedule SC for the next substrate group C to be loaded is additionally set at a predetermined position in time. It is assumed that the board groups A and B have already been set on the time axis and fixed as a corrected schedule, and the board group C is assumed to be loaded after the board group B. Therefore, the setting position when setting the processing schedule SC on the time axis is:
This is the position after the loading time for the board group B. For example, the concept when the processing schedule SC for the substrate group C is set at the same time as the input timing of the substrate group B is shown in FIG.
It is shown in FIG.

Then, in this state, steps S22 to S2
5, the processing schedule SA
By detecting whether or not each occupation time of the modified schedule of SB and SB and the added processing schedule SC overlap each other, the processing schedule SC is shifted backward in time, thereby gradually eliminating the occupation time overlap. Go.

As a result, finally, the processing schedule SC
Is obtained so that each occupancy time of the corrected schedules for the substrate groups A and B does not overlap with each occupation time. This state is shown in FIG.

When the state shown in FIG. 12 is reached,
The process exits the repetition loop of steps S22 to S25 and proceeds to step S26 to obtain a corrected schedule in which the processing schedules SA, SB, and SC for the substrate groups A, B, and C are determined on the time axis. Based on this corrected schedule, it turns out that the loading of the substrate group C should be started after the lapse of the time tc after the loading of the substrate group A or after the lapse of the time tc ′ after the loading of the substrate group B. .

Then, in step S27, since there is no substrate group to be inputted next, it is determined as "NO", so that the process proceeds to step S16 (FIG. 5).

In step S16, the master control unit 2 calculates the total time required to complete all the processes for all the substrate groups, that is, the total processing time, based on the corrected schedule obtained in step S15. That is,
At this time, the master control unit 2 sets the total processing time calculation unit 25
It functions as c.

In the case of the example of the substrate groups A, B, and C, since the corrected schedule as shown in FIG. 12 is obtained in step S15, it is necessary for all the processing of the substrate groups A, B, and C. The total processing time tp1 is derived.

The total processing time tp1 derived here is the total processing time in the charging order assumed in step S11. Therefore, when there is another input order (input pattern), it is necessary to repeat the same processing as above for the input order to obtain the total processing time.

For this reason, it is checked in step S17 whether another charging order can exist, and if there is, the process proceeds to step S18 to change the assumed charging order. In the case of the above example, “A → B →
The input order of "C" is assumed, and the process proceeds to step S18 in order to obtain the total processing time for other input orders.

Then, in step S18, the assumption of the charging order is changed. For example, the setting order of the substrate groups A, B, and C is changed to “A → C → B”.

Then, returning to step S14, the processing schedule of the first substrate group to be loaded in the changed loading sequence is set at a predetermined position on the time axis.
You will go to 5.

Then, the processing of the above-described flowchart of FIG. 6 (processing as the comparison and correction unit 25b) is performed again, and
Substrate groups are added on the time axis according to the loading order, and overlapping of occupation time is eliminated. As a result, a corrected schedule as shown in FIG. 13 is obtained for the board groups A, C, and B.

In step S16, the total processing time tp2 required to process all of the substrate groups A, C, and B is obtained from the correction schedule shown in FIG.

Then, the flow advances to step S17 to determine again whether or not another charging order exists. If there is, the flow advances to step S18 again, and if not, the flow advances to step S19.

In step S19, the total processing time calculated for each loading order is compared with each other, and the corrected schedule that minimizes the total processing time is specified as the optimal schedule.

For example, assuming that the corrected schedules obtained for the three substrate groups A, B, and C are the two patterns shown in FIGS. 12 and 13, the total processing time tp1 derived from FIG. When the calculated total processing time tp2 is compared with the total processing time tp2, the minimum one is the total processing time tp2 in FIG.

As shown in FIG. 12, when the substrate groups A, B, and C are loaded in the order of “A → B → C”, the processing of the substrate group C ends only with respect to the substrate groups A and B. After the processing is completed. That is, in the modified schedule shown in FIG. 12, the total processing time tp1 is from the input time for the substrate group A to the end time of the processing for the substrate group C.

On the other hand, as shown in FIG.
When C is input in the order of “A → C → B”, the processing for the substrate group C has already ended when the processing for the substrate group A ends. The input timing for the board group B is determined as the same timing as in FIG. Therefore, the total processing time tp2 derived from the corrected schedule shown in FIG. 13 corresponds to the time until the processing of the substrate group B in the corrected schedule of FIG. 12 ends.

Therefore, when the total processing time tp1 is compared with the total processing time tp2, the total processing time tp2 is obtained as the minimum time.

Then, the master control unit 2 specifies the loading order “A → C → B” in which the processing for each of the board groups A, B, and C can be performed in the minimum total processing time tp2 as the optimum loading order. The input timing (or transport timing) to each functional means is determined based on the optimal schedule. The minimum total processing time means that the time required to process all of the substrate groups to be processed is the shortest. Therefore, each substrate is determined based on the corrected schedule that minimizes the total processing time. When the groups are put in, the substrate processing apparatus 1 can be operated most efficiently.

Then, the master control unit 2 stores the specified optimum schedule in the memory 5 or the like.

Thus, the processing of step S1 in the flowchart of FIG. 4, that is, the processing for determining the optimal schedule performed prior to the substrate processing is completed.

Then, the flow advances to step S2 to start actual substrate processing. At this time, the master control unit 2 functions as the optimum time control unit 26, reads out the optimum schedule from the memory 5, and sequentially inputs the respective board groups in the input sequence and the input timing (transport timing) based on the optimum schedule ( And transport).

Since the optimal schedule is specified as the most efficient schedule in which each substrate group does not enter the standby state in the process, the master control unit 2 controls the operation of each functional unit based on the optimal schedule. If performed, no excessive processing of the substrate group occurs.

The master control unit 2 specifies the optimum schedule prior to the substrate processing, so that the most efficient operation of the substrate processing apparatus 1 can be realized.

Note that the processing up to the determination of the optimum schedule based on the recipes and the like corresponding to the substrate group to be processed does not involve actual operation (physical operation) of the substrate processing apparatus 1, This corresponds to performing a simulation process on the processing status of the group and the operation status of each functional unit based on a recipe or the like.

<4. Determination of Optimum Schedule When Supply Order is Predetermined> When the supply order from the buffer unit 10 in the substrate processing apparatus 1 is predetermined, it is not necessary to determine the supply order as described above. In the case of an apparatus such as the substrate processing apparatus 1 in which the buffer unit 10 is not provided, a group of substrates carried in from an external device must be supplied in the order in which the substrates are carried. In such a case, it is not necessary to determine the order of introduction.

However, even if the order of loading the substrate groups is predetermined, if the loading timing and the transport timing of each substrate group are not set to the optimal timing, the operating rate may decrease or the substrate may be in a standby state inside the apparatus. Occurs and causes excessive processing.

Therefore, it is necessary to determine a schedule such as a loading timing and a transport timing of each substrate group which are optimal in a predetermined loading order.

Here, the procedure for determining the above-mentioned optimal schedule is slightly modified, and the procedure for determining the optimal schedule in the case where the loading order is specified in advance will be described.

It is to be noted that the input order specified in advance is recorded in the memory 5 (see FIG. 2).

FIG. 14 and FIG. 15 are flowcharts in the case where the loading timing of each substrate group is determined prior to the substrate processing.

As shown in FIG. 14, prior to the actual substrate processing (step S4), when there are a plurality of substrate groups to be loaded by the master controller 2, the master controller 2 follows a predetermined loading sequence for the substrate groups. An optimum injection timing is determined based on the input timing (step S3).

FIG. 15 is a flowchart showing the details of the processing for determining the input timing (step S3).

In step S31, the master control unit 2 acquires a predetermined loading order for a plurality of board groups. Specifically, the master control unit 2 accesses the memory 5 to acquire the order of insertion.

Next, the master control unit 2 accesses the memory 5 again, acquires a recipe set for each substrate group to be input (step S32), and sets a processing schedule for each substrate group according to the recipe. Calculate (Step S3
3). Then, the processing schedule of the first substrate group to be loaded is set at a predetermined position on the time axis based on the prescribed loading sequence (step S34). The processing in steps S32 to S34 is substantially the same as the processing in steps S12 to S14 in the flowchart shown in FIG.

Then, the process proceeds to step S35, in which processing schedules for each of the substrate groups go are additionally set in order on the time axis in accordance with the prescribed loading order, and comparison and correction of the processing schedules of a plurality of substrate groups are performed. By going,
The overlapping of the occupation time zones of the functional means by the different substrate groups is eliminated. Then, as a result, a corrected schedule is generated. The details of the processing in step S35 are the same as the processing shown in the flowchart of FIG. 6 described above.

Then, when the processing schedules for all the substrate groups are added, and the corrected schedule in which all the overlapping time zones are eliminated is obtained, the process proceeds to step S36.

In step S36, the total processing time required for all the processing of the substrate group is calculated based on the finally obtained corrected schedule, and the corrected schedule is specified as the optimum schedule. Here, the specified optimum schedule represents the optimum loading timing and the optimal transport timing when performing the substrate processing on each substrate group in a predetermined loading order.

Therefore, in the next step S37, the loading timing and the transport timing of each substrate group are determined based on the optimal schedule.

Thus, the process for determining the input timing (step S3) is completed. This step S
When performing the process 3, the master control unit 2 functions as the schedule determination unit 25 as in the case where the order of insertion is not specified.

Returning to the flowchart of FIG. 14, the process proceeds to step S4. In step S4, the master control unit 2
It functions as the optimum time control unit 26, reads out the optimum schedule from the memory 5, and sequentially transfers each substrate group at a predetermined input timing (transport timing) based on the optimum schedule and a predetermined input order. It is controlled so as to be charged (and transported).

Even if the loading order is specified in advance, the optimum schedule specified as described above is the most efficient schedule in which each substrate group does not enter the standby state in the processing process. If the unit 2 controls the operation of each functional unit based on the optimal schedule, it is possible to realize efficient operation of the apparatus and also to prevent the substrate group from being subjected to excessive processing.

Note that, even in the processing procedure in the case where the loading order described above is specified in advance, the processing up to the determination of the optimum schedule based on the recipe etc. associated with the substrate group to be processed is the same. Since actual operation (physical operation) of the apparatus is not involved, this corresponds to performing a simulation process on the processing status of the substrate group and the operating status of each functional unit based on a recipe or the like.

<5. Simulator for substrate processing equipment>
Since the processing relating to the determination of the optimum schedule (steps S1 and S3) when the above-described loading order is not defined and when the loading order is defined in advance does not involve the actual operation of the substrate processing apparatus 1, the processing is not performed. It is possible to determine the optimal schedule without having the physical configuration of.

That is, if there is data relating to the recipe for each substrate group and data relating to the configuration of the substrate processing apparatus,
It is possible to determine the optimal schedule even with a general computer configured separately from the substrate processing apparatus 1.

The optimal schedule is determined using a computer configured separately from the substrate processing apparatus, so that the processing status of the substrate group and the operation of each functional unit can be determined even at a location remote from the substrate processing apparatus. This is convenient because the situation can be simulated based on a recipe or the like.

Here, a simulation apparatus for a substrate processing apparatus configured separately from the main body of the substrate processing apparatus 1 from the above viewpoint will be described.

FIG. 16 is a diagram showing an example of the configuration of a simulation apparatus 200 for a substrate processing apparatus according to this embodiment. As shown in FIG.
The U 202, the memory 203, the storage unit 204, and the interfaces 205, 206, and 209 are mutually connected via a bus line 210. The input / output device 201 is a device that reads data from and writes data to a computer-readable portable recording medium 211 such as a flexible disk, a magneto-optical disk, and a CD-ROM. The CPU 202 is a processing unit that performs arithmetic processing. The memory 203 is a device for temporarily storing and holding data, and the storage unit 204 is a fixed computer-readable recording medium such as a magnetic disk, and stores an operating system (OS) and a simulation device. A simulation program to be realized, data relating to the configuration of the substrate processing apparatus, recipe data, and the like are stored.

The interface 205 further includes a display device 207 such as a CRT or a liquid crystal display.
Is connected, and a keyboard 208 is connected to the interface 206. In addition, interface 2
Reference numeral 09 denotes an interface for performing communication or the like with an external device (for example, the substrate processing apparatus 1 or the like).

As is clear from such a configuration, the simulation apparatus 200 of the substrate processing apparatus is configured separately from the substrate processing apparatus 1.

The simulation apparatus 200 transmits the data relating to the number of substrate groups to be processed, the data relating to the recipe for each substrate group, and the data relating to the arrangement of each functional means of the substrate processing apparatus to the interface 209 or the input / output device 201. To get through. Then, these data are stored in the memory 203 or the storage unit 204.

Thereafter, the CPU of the simulation device 200
The function of the 202 as the schedule determination unit 25 shown in FIG. 3 makes it possible to specify the optimal schedule for each board group. Note that the CPU 202
Are the same as those shown in the flowcharts of FIGS. 5 and 6 or FIG.

As described above, if the simulation device 200 is realized by a general computer that is configured separately from the substrate processing apparatus 1, the processing status of the substrate group and the operation of each functional unit can be performed in a place other than the clean room. It becomes possible to simulate the situation based on a recipe or the like. As a result, for example, a management computer or the like provided in a factory can determine an optimal schedule in the substrate processing apparatus.

Note that the above simulation program is
The information may be read from the portable recording medium 211, or may be stored in the storage unit 204 in advance as described above.
That is, the simulation program is stored regardless of whether it is a portable recording medium or a fixed recording medium.

<6. Modifications> While the preferred embodiments of the present invention have been described above, the present invention is not limited to the contents described above.

For example, the processing mode in the substrate processing apparatus 1 may be a single-wafer processing mode or a batch processing mode. Further, the present invention is not limited to the one in which the substrate group to be processed is immersed in the liquid. That is, the substrate processing apparatus is configured to include, as functional units, a plurality of processing units and a transport unit that sequentially transports a plurality of substrate groups each including one or a plurality of substrates to the plurality of processing units. It is good.

On the other hand, when the substrate processing apparatus 1 performs a predetermined process by immersing a group of substrates in a liquid as shown in FIG. It must be replaced every time. This is because some chemicals have a limit in the lifetime (lifetime of the liquid), and when such a chemical is used, the liquid needs to be changed for each lifetime.

However, when performing the liquid exchange, the chemical tank C
In B1 and CB2, it becomes impossible to perform substrate processing. In other words, the chemical solution tanks CB1 and CB2 are occupied by the schedule of liquid exchange,
It becomes impossible to process the group of substrates.

Therefore, when deciding the above-mentioned optimal schedule, it is preferable to consider liquid exchange as necessary. Here, the cycle of performing the liquid exchange can be calculated based on the lifetime of the chemical, and the time required for the liquid exchange can also be calculated from the liquid exchange capacity of the chemical tanks CB1 and CB2.

Therefore, when comparing and correcting the above-described processing schedules for each substrate group, the processing schedule by the liquid exchange is treated as if it is one of the substrate groups.
It is possible to prevent another substrate group from being transported during the time period in which 2 is occupied.

For example, FIG. 17 shows the first modified schedule obtained for the substrate groups A, B, and C shown in FIG.
Processing schedule S for chemical exchange in chemical processing section 43
An X is additionally set. By treating the chemical exchange as one processing schedule SX as in the example shown in FIG. 17, overlapping of the occupation time zones between the chemical exchange and the processing schedules of the substrate groups A, B, and C is avoided.

Next, the above-described substrate processing apparatus 1 is a so-called stand-alone type apparatus,
The substrate group loaded from 0 was configured to be returned to the buffer unit 10 again at the end of the processing. However,
The present invention is not limited to such a stand-alone type substrate processing apparatus, but may be a conventional so-called in-line type substrate processing apparatus.

However, in the case of a stand-alone type substrate processing apparatus, since the same functional means may be occupied in the forward path and the return path of the substrate group, manual time chart creation is not performed by an in-line type substrate processing apparatus. It becomes more difficult than in the case of Therefore, when the present invention is applied to both types of substrate processing apparatuses, it can be said that the effect when applied to a stand-alone type substrate processing apparatus is greater from the viewpoint of reducing the labor of the operator.

[0157]

As described above, according to the substrate processing apparatus of the first aspect, the processing schedule according to the recipe for each substrate group is set as a chain of the occupation time zones of the respective functional units by the substrate group. Calculate and compare the occupation time zone among the processing schedules of the plurality of substrate groups. If any of the occupation time zones has an overlap, the processing schedule is corrected to obtain a corrected schedule that avoids the overlap. As a result, it is possible to simulate the operation status of each functional unit without actually operating the substrate processing apparatus, to operate the substrate processing apparatus most efficiently, and to perform excessive processing on the substrate group. The avoided optimal schedule can be obtained.

According to the substrate processing apparatus of the second aspect,
Until all the overlaps in the occupation time are eliminated, the comparing means and the shift means are repeatedly activated, and a processing schedule obtained in a state where all the overlaps are eliminated is obtained as a corrected schedule. Overlapping time zones can be properly eliminated, and the substrate processing apparatus can be operated most efficiently, and an optimal corrected schedule that avoids overprocessing of the substrate group can be obtained.

According to the substrate processing apparatus of the third aspect,
A processing schedule according to the recipe for each substrate group is calculated, and as a result of comparing the processing schedules of a plurality of substrate groups with each other, if any of the occupied time zones overlaps, the processing schedule is corrected to correct the overlapping. A corrected schedule that avoids the above is generated, the total processing time required for all the processing of the plurality of substrate groups is calculated based on the corrected schedule, and the total processing time in each loading order is compared with each other. Since the modified schedule that minimizes the processing time is specified as the optimal schedule, and the movement timing of each substrate group is controlled according to the optimal schedule, without actually operating the substrate processing apparatus, Since the operation status of each function means can be simulated, it is possible to operate the substrate processing apparatus most efficiently. It is, it is possible to avoid excessive treatment for the substrate group.

According to the fourth aspect of the present invention, the processing schedule according to the arrangement of the substrate processing apparatus and the recipe for each substrate group is determined by the occupation time of each functional unit by the substrate group. Calculated as a chain of bands, the occupation time zone is compared among the processing schedules of a plurality of substrate groups, and if any of the occupation time zones has an overlap, the processing schedule is corrected to avoid the overlap. Since the configuration for obtaining the corrected schedule is configured separately from the substrate processing apparatus, the processing status of the substrate group and the operation status of each functional unit can be determined based on a recipe or the like even in a place away from the substrate processing device. Simultaneous processing can be performed, and the most efficient operation of the substrate processing equipment and an optimal schedule that avoids excessive processing of the substrate group can be obtained. It is possible.

According to the fifth aspect of the present invention, a processing schedule according to the arrangement of the substrate processing apparatus and a recipe for each substrate group is calculated, and the processing schedule for a plurality of substrate groups is calculated. As a result of the comparison, if any one of the occupied time zones has an overlap, a corrected schedule that avoids the overlap is generated by correcting the processing schedule, and a plurality of board groups are generated based on the corrected schedule. The substrate processing apparatus is configured to calculate the total processing time required for all of the processes, compare the total processing time in each input order with each other, and specify the corrected schedule that minimizes the total processing time as the optimal schedule. Since it is configured separately from the substrate processing equipment, the processing status of the substrate group and the operation status of each function Simulation processing it is possible to perform, causes most operating efficiency of the substrate processing apparatus, it is possible to obtain an optimum schedule to avoid over processing for the substrate groups based on.

According to the recording medium in which the simulation program described in claim 6 is recorded, it becomes possible to operate a computer as a simulation device of a substrate processing apparatus.

[Brief description of the drawings]

FIG. 1 is a plan view illustrating a configuration example of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a block diagram illustrating details of a control unit of the substrate processing apparatus.

FIG. 3 is a diagram schematically showing functions included in a master control unit.

FIG. 4 is a flowchart for determining a loading order of a board group.

FIG. 5 is a flowchart for determining a loading order of a board group.

FIG. 6 is a flowchart for determining a loading order of a board group.

FIG. 7 is a diagram illustrating an example of a processing schedule for each substrate group.

FIG. 8 is a diagram showing a concept when two processing schedules are set on a time axis.

FIG. 9 is a diagram showing a state in which one processing schedule is shifted in FIG. 8;

FIG. 10 is a diagram showing a state where overlapping of occupation time zones between two processing schedules has been eliminated.

11 is a diagram showing a concept when a processing schedule is newly added in FIG.

FIG. 12 is a diagram showing a corrected schedule finally obtained.

FIG. 13 is a view showing a corrected schedule finally obtained in a loading order different from that in FIG. 12;

FIG. 14 is a flowchart for determining the timing of inputting a board group and the like.

FIG. 15 is a flowchart for determining the timing of inputting a board group and the like.

FIG. 16 is a diagram illustrating an example of a configuration of a simulation device of the substrate processing apparatus.

FIG. 17 is a diagram showing a modified schedule obtained when a processing schedule for chemical liquid replacement is additionally set.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Master control part 25 Schedule determination part (schedule determination means) 25a Processing schedule calculation part (processing schedule calculation means) 25b Comparison correction part (comparison correction means) 25c Total processing time calculation part (total processing time calculation means) 25d Optimal schedule specifying unit (optimal schedule specifying unit) 26 Optimal time control unit (optimal time controlling unit) 10 Buffer unit 11 In-buffer transport unit (transporting unit) 20 Transfer robot (transporting unit) 30 Transport robot (transporting unit) 35 First lifter (transportation unit) 36 Second lifter (transportation unit) 37 Third lifter (transportation unit) 41 Drying processing unit (processing unit) 42 First rinsing processing unit (processing unit) 43 First chemical liquid processing unit (processing unit) ) 44 2nd rinsing section (processing section) 45 2nd chemical processing section (processing section) SA, SB, SC, SX Rescheduling 200 simulation device

Claims (6)

[Claims] A plurality of processing units; and a transfer unit configured to sequentially transfer a plurality of substrate groups each including one or a plurality of substrates to the plurality of processing units. A substrate processing apparatus that sequentially performs processing according to a predetermined recipe, and (a) a processing schedule according to a recipe for each substrate group,
(B) comparing the occupation time zones among the processing schedules of the plurality of substrate groups, and calculating any one of the occupation time zones. The substrate processing apparatus further comprises: a correction unit that corrects the processing schedule when there is an overlap to obtain a corrected schedule that avoids the overlap. 2. The substrate processing apparatus according to claim 1, wherein the comparing and correcting means sets: (b-1) a plurality of processing schedules obtained for each of the substrate groups as comparison targets, and the occupation time in accordance with the progression order of time. Sequential comparison means for comparing bands with each other; (b-2) each time an overlap of the occupied time zone is found, one of the plurality of processing schedules is temporally determined according to the overlap time width. Shift means for shifting, (b-3) a processing schedule after the shift as a new comparison target, and a repetition means for repeatedly activating the sequential comparison means and the shift means until all of the overlaps are eliminated, And a processing schedule obtained in a state where all of the duplications have been eliminated is obtained as the corrected schedule. 3. A processing device comprising: a plurality of processing units; and a transport unit that sequentially transports a plurality of substrate groups each including one or a plurality of substrates to the plurality of processing units. What is claimed is: 1. A substrate processing apparatus for sequentially performing a process according to a pre-defined recipe, comprising: (a) a buffer unit for holding the plurality of substrate groups before inputting; and (b) determining an optimal schedule of each substrate group. And (c) an optimal time control unit that controls a movement timing of each substrate group between positions of the substrate processing apparatus in accordance with the optimal schedule. 1) Assuming the loading order and loading timing of each board group, a processing schedule according to the recipe for each board group is set when each functional unit is occupied by the board group. Processing schedule calculation means for calculating as a chain of bands, (b-2) comparing the occupation time period between the processing schedules of the plurality of substrate groups, and if any of the occupation time periods overlaps, Comparing and correcting means for obtaining a corrected schedule that avoids the duplication by correcting the processing schedule; and (b-3) a total processing required for all the processing of the plurality of substrate groups based on the corrected schedule. Total processing time calculating means for calculating the time, (b-4) comparing the total processing time in each input order with each other while changing the assumption of the input order of each substrate group, and An optimum schedule specifying unit for specifying the corrected schedule as the optimum schedule. 4. A processing device comprising: a plurality of processing units; and a transfer unit configured to sequentially transfer a plurality of substrate groups each including one or a plurality of substrates to the plurality of processing units. A simulation apparatus for a substrate processing apparatus that sequentially performs processing according to a recipe defined in advance, and (a) a processing schedule according to an arrangement configuration of the substrate processing apparatus and a recipe for each substrate group, Processing schedule calculation means for calculating as a chain of occupation time zones of the respective functional units by the board group; (b) comparing the occupation time zones among the processing schedules of the plurality of board groups; When there is an overlap, by comparing the processing schedule to obtain a corrected schedule that avoids the overlap; It is characterized in that it is constructed as a separate body, simulating device of the substrate processing apparatus. 5. A buffer unit for holding a plurality of substrate groups each consisting of one or a plurality of substrates before inputting, a plurality of processing units, and a transport unit for sequentially transporting the substrate groups to the plurality of processing units. And a functional unit, a simulation apparatus of a substrate processing apparatus that sequentially performs processing according to a recipe defined in advance for each of the plurality of substrate groups, and (a) the order and timing of input of each substrate group Processing schedule calculation means for calculating a processing schedule according to the arrangement configuration of the substrate processing apparatus and a recipe for each substrate group as a chain of occupation time zones of the respective functional units by the substrate group; The occupation time zone is compared among the processing schedules of the plurality of substrate groups, and if any of the occupation time zones overlaps, the processing schedule is corrected. And (c) a total processing time calculation for calculating a total processing time required for all the processing of the plurality of substrate groups based on the corrected schedule. Means, (d) comparing the total processing time in each input order with each other while changing the assumption of the input order of each substrate group, and setting the corrected schedule in which the total processing time is minimized as an optimal schedule. An optimal schedule identifying means for identifying;
A simulation apparatus for a substrate processing apparatus, comprising: a substrate processing apparatus; 6. A computer readable program recorded with a simulation program of a substrate processing apparatus for causing a computer to operate as the simulation apparatus of the substrate processing apparatus according to claim 4. Recording medium.