JP2000267021A - Laser optical axis alignment mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a laser optical axis alignment mechanism constituted so that only the confirmation of the emitting port of a laser oscillator is required by aligning the optical axes of an incident light beam and a reflected light beam by using a three-dimensional solid-structure reflector, and the operability and accuracy are enhanced while reducing the burden on a worker. SOLUTION: The three-dimensional solid-structure reflector Rf having an apex part by which the reflected light beam can be aligned with the incident light beam is arranged at a position just before an irradiation target on the optical path of the laser light beam LB through a single or plural movable mirrors (M1) and (M2). Then, the reflector Rf is attached to a movable type holding member Hr and the holding member Hr is axially supported to a device base aligning the optical axis of the beam LB.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a laser optical axis alignment mechanism in a laser oscillation device.

[0002]

2. Description of the Related Art Conventionally, in a laser oscillating apparatus, for example, when an alignment operation is performed using a He-Ne laser, which is a typical visible light laser, the irradiation target position is adjusted using the reflection of a movable mirror. are doing.
Japanese Utility Model Publication No. 4-51499 is known as an example using an alignment plate that can be operated from the outside.

[0003]

However, in the above-mentioned prior art, since the movable mirror and the laser irradiation target position are separated from each other, the operator moves to the laser irradiation target position while operating the movable mirror to perform irradiation. The position must be confirmed, and, as shown in FIG. 5, in the alignment within the laser oscillator, the laser irradiation position must be confirmed from the viewing window and the movable mirrors M1 and M2 must be operated. There was a problem in operability such as.

The present invention has been made by paying attention to the points described above. By using a three-dimensional three-dimensional structure reflector to match the optical axes of incident light and reflected light, it is possible to confirm only the exit of the laser oscillator. It is an object of the present invention to provide a laser optical axis alignment mechanism capable of reducing the burden on an operator and improving operability and accuracy.

[0005]

The present invention can solve the above-mentioned problems by providing the following constitution.

(1) On the optical path of a laser beam, via a single or a plurality of movable mirrors, at a position immediately before an irradiation target,
A three-dimensional three-dimensional structure reflector having an apex capable of matching a reflected light beam on an incident light beam is arranged, the reflector is mounted on a movable holding member, and the movable holding member is pivotally supported on a laser beam optical axis alignment device base. A laser optical axis alignment mechanism, comprising:

(2) The movable holding member comprises an elongated body and a support shaft, and a three-dimensional three-dimensional structure reflector is provided at one end of the elongated body, and one top of the reflector faces backward on the optical axis of the laser beam. The laser optical axis alignment mechanism according to the above item (1), wherein a support shaft that enables the optical axis alignment operation of the laser beam is provided rotatably at the other end of the elongated body. .

(3) The laser optical axis alignment mechanism according to any one of the above (1) or (2), wherein the three-dimensional three-dimensional structure reflector is a corner cube-shaped reflector.

(4) The laser optical axis alignment mechanism according to any one of the above (1) or (2), wherein the three-dimensional three-dimensional structure reflector is a regular quadrangular pyramid-shaped reflector.

(5) The laser optical axis alignment mechanism according to any one of (1) and (2), wherein the three-dimensional three-dimensional structure reflector is a right conical reflector.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below.

FIG. 1A is an explanatory view showing a three-dimensional structure of a main part of an embodiment of a laser optical axis alignment mechanism according to the present invention, FIG. 1B is a perspective explanatory view of a corner cube reflector, and FIG. ) Is a perspective view of a movable holding member, FIGS. 2A and 2B are explanatory views showing an operation example of a corner cube-shaped reflector, FIG. 3A is a perspective view of a regular quadrangular pyramid-shaped reflector, and FIG. FIG. 4 is a perspective view of a straight conical reflector, FIG. 4 is an explanatory view showing an operation state of a movable mirror, and FIG. 5 is a perspective view showing an example of a configuration of an alignment mechanism of a conventional laser oscillation device.

Referring to the drawings, on the optical path of a laser beam LB emitted from a visible laser oscillator LG,
A three-dimensional three-dimensional structure reflector Rf having an apex capable of matching a reflected light beam on an incident light beam is disposed at a position immediately before the irradiation target via one or a plurality of movable mirrors M1 and M2,
The reflector Rf is mounted on a movable holding member Hr, and the movable holding member Hr is pivotally supported on the optical axis alignment device base of the laser beam LB. That is, the movable holding member Hr includes an elongated body p and a support shaft Sh, and the elongated body p
Is mounted on one end of the three-dimensional structure reflector Rf such that the top of the reflector Rf faces backward on the optical axis of the laser beam LB, and the other end of the elongated body p is aligned with the optical axis of the laser beam LB. The structure is such that a support shaft Sh that enables operation is provided so as to be freely rotatable.

As the three-dimensional reflector Rf, a regular quadrangular pyramid reflector (FIG. 3A), a right cone reflector (FIG. 3B), and the like are considered in addition to the corner cube reflector CC.

The elongated body p constituting the movable holding member Hr to which the three-dimensional three-dimensional reflector Rf is attached can be finely adjusted around the support shaft Sh, and can be adjusted between the movable mirror and the irradiation target. A stopper St for stopping the movable holding member Hr so that the top of the corner cube-shaped reflector CC forming the three-dimensional three-dimensional structure reflector Rf is aligned with the alignment axis immediately before the irradiation target.
Is provided.

The operation will be described based on the above configuration.

For example, an irradiation target using a visible laser beam such as a He-Ne laser, that is, a three-dimensional three-dimensional structure reflector Rf such as a corner cube reflector CC.
When the visible laser beam emitted from the visible laser oscillator LG is not irradiated due to positional deviation, the reflected light passes through an optical path different from that of the incident light and returns to the exit of the laser oscillator LG. No (see FIG. 2A).

The movable mirrors M1 and M2 are adjusted so that the three-dimensional three-dimensional structure reflector Rf (for example, a corner cube-shaped reflector CC) is aligned with the top of the three-dimensional three-dimensional structure reflector Rf so as to be aligned with the alignment axis. The elongate body p forming the holding member Hr is supported by the support shaft Sh.
And the stopper St between the movable mirror M or M2 and the irradiation target and immediately before the irradiation target.
Is used to stop the movable holding member Hr.

Thus, the three-dimensional three-dimensional structure reflector Rf
When the movable mirrors M1 and M2 are adjusted in a state where the top of the target and the irradiation target coincide with each other on the alignment axis, and the irradiation target is irradiated with the laser beam LB, the reflected light moves on the same optical axis as the incident light. The light returns to the exit of the visible laser oscillator LG via the order of M1 in reverse (see FIG. 2B).

Therefore, it is not necessary for an operator to move to the irradiation target and check it only by checking the emission port of the laser beam LB, and it is possible to reduce the burden by reducing the labor, and to perform accurate and highly accurate alignment. .

[0021]

According to the present invention, it is possible to confirm only the emission port of the laser oscillator by using the three-dimensional three-dimensional structure reflector to make the optical axes of the incident light and the reflected light coincide with each other.
The present invention has the effect of reducing the burden on the operator and improving the operability and accuracy.

[Brief description of the drawings]

FIG. 1A is an explanatory view showing a three-dimensional structure of a main part of an embodiment of a laser optical axis alignment mechanism according to the present invention, FIG. 1B is a perspective explanatory view of a corner cube reflector, and FIG. 1C is a movable reflector. Perspective view of the holding member

FIGS. 2A and 2B are explanatory views showing an operation example of a corner cube-shaped reflector; FIGS.

FIG. 3 (a) is a perspective view of a regular pyramid-shaped reflector,
(B) Perspective view of a right conical reflector

FIG. 4 is an explanatory diagram showing an operation state of a movable mirror.

FIG. 5 is a perspective view showing a configuration example of an alignment mechanism of a conventional laser oscillation device.

[Explanation of symbols]

 LG Visible laser oscillator LB Laser beam M, M1, M2 Movable mirror Hr Movable holding member Rf Three-dimensional three-dimensional structure reflector CC Corner cube-shaped reflector p Slender body Sh spindle St Stopper

Claims (5)

[Claims] 1. A three-dimensional three-dimensional structure reflector having an apex capable of matching a reflected light beam on an incident light beam is disposed on an optical path of a laser beam immediately before an irradiation target via one or a plurality of movable mirrors, A laser optical axis alignment mechanism comprising: mounting the reflector on a movable holding member; and supporting the movable holding member on an optical axis alignment device base for a laser beam. 2. The movable holding member comprises an elongated body and a support shaft. A three-dimensional three-dimensional structure reflector is provided at one end of the elongated body so that one top of the reflector faces backward on the optical axis of the laser beam. 2. A laser optical axis alignment mechanism according to claim 1, further comprising a support shaft mounted on the other end of the elongated body, the support shaft being capable of rotating and adjusting the optical axis of the laser beam. 3. The laser optical axis alignment mechanism according to claim 1, wherein the reflector having the three-dimensional structure is a corner cube-shaped reflector. 4. The laser beam axis alignment mechanism according to claim 1, wherein the three-dimensional three-dimensional structure reflector is a regular pyramid-shaped reflector. 5. The laser optical axis alignment mechanism according to claim 1, wherein the three-dimensional three-dimensional structure reflector is a right conical reflector.