JP2000251700A - Patterning method and patterning device of screen board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the positional accuracy of a screen plate and to cope with high accuracy and a large area. SOLUTION: This device is provided with a contact roller 5a, 5b for bringing a screen plate 3 into surface contact with a glass mask 2, a reeling-out roller 6a and a reeling roller 6b for imparting tension to the screen board 3; supporting rollers 7a, 7b for supporting the screen board 3, an exposure machine 1 for exposing a pattern to the screen board 3 which is given the tension by a rotation mechanism formed in the reeling-out roller 6a and the reeling roller 6b and transported, and a developing bath 8 for performing the development of the pattern exposed to and photographed on the screen board 3 by the exposure machine 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel screen printing plate patterning method and patterning apparatus, and more particularly, to a method of manufacturing a matrix substrate using a plate formed by the patterning method and an image display apparatus. It relates to a manufacturing method.

[0002]

2. Description of the Related Art At present, a flat, thin, light, large-screen image display device replacing a CRT is expected. One example of such a flat image display device is a self-luminous image display. For example, a plasma display panel (PD) that irradiates a phosphor with ultraviolet light to excite the phosphor and emit light.
P), using a field emission type electron emission element (FE) or a surface conduction type electron emission element as an electron source, and irradiating the phosphor with electrons emitted from the electron emission element, thereby exciting the phosphor and emitting light. There is a flat-panel type image display device. Above all, PDPs having a size of about 40 inches have begun to be marketed.

The present applicant has paid attention to an image display device using a surface conduction electron-emitting device, among self-luminous flat plate image display devices. This is because the structure is relatively simple,
This is because it is suitable for forming a large area.

A surface conduction electron-emitting device is a device in which a voltage is applied to a conductive thin film formed of a fine particle film formed on a substrate from a pair of electrodes called device electrodes to the conductive thin film. Electrons are emitted from the electron emission portion formed in the portion. The image display device can be realized by irradiating the phosphor with the electrons emitted from the electron-emitting device and obtaining light emission.

[0005] The present applicant has previously disclosed in Japanese Patent Laid-Open No. 6-342636.
Japanese Patent Application Laid-Open Publication No. Hei 11 (1995) discloses an example of an image display device using such a surface conduction electron-emitting device.

FIG. 9 is a schematic diagram showing an example of an image display device using a surface conduction electron-emitting device. In FIG. 9, 105 is a rear plate, 106 is an outer frame, and 107 is a face plate. Outer frame 106, rear plate 1
05, each connection portion of the face plate 107 is sealed with an adhesive such as a low melting point glass frit (not shown) to form an envelope for maintaining the inside of the image display device in a vacuum. The substrate 101 is fixed to the rear plate 105. The surface conduction electron-emitting device 10 is provided on the substrate 101.
2 are formed in an n × m array (n and m are positive integers equal to or greater than 2 and are appropriately set according to the target display device).

Further, as shown in FIG. 9, the surface conduction electron-emitting device 102 is wired by m row-directional wirings and n column-directional wirings. The substrate 101, the plurality of surface conduction electron-emitting devices 102, and the row direction wirings Dx1 to Dx
m and the column direction wirings Dy1 to Dyn constitute a multi-electron beam source. At least at the intersection of the row direction wiring and the column direction wiring, an interlayer insulating layer (not shown) is formed between the two wirings, and the electrical connection between the row direction wirings Dx1 to Dxm and the column direction wirings Dy1 to Dyn. Insulation is maintained.

To form the image display device, the electron-emitting device 102, the row wirings Dx1 to Dxm, and the column wiring Dy
It is necessary to form a large number of 1 to Dyn. However, in the case of forming an image display device having a large screen of several tens of inches, for example, a large-sized manufacturing apparatus corresponding to a large substrate of several tens of inches in diagonal is required. In particular, when the photolithography technique is used, there are problems such as difficulty in handling in the manufacturing process and high cost.

Therefore, it is conceivable to form a large number of the above-described electron-emitting devices, row-direction and column-direction wirings by using a printing technique that is relatively inexpensive, does not require a vacuum device, and can handle a large area.

The present applicant has previously disclosed in Japanese Patent Application Laid-Open No. 8-34110 that a large number of rows and columns are formed in an array using a screen printing technique.

In screen printing, for example, an ink mixed with metal particles is used as a mask with a plate having an opening of a desired pattern as a mask, and the ink is printed and formed on the substrate as a printing medium from the opening, followed by baking. Thus, a conductor wiring having a desired pattern is formed.

FIGS. 10 and 1 show an example of a screen printing machine.
1 will be described below.

FIG. 10 is a perspective view of a conventional screen printer, and FIG. 11 is a sectional view of the conventional screen printer.
10 and 11, reference numeral 111 denotes a plate frame, 112 denotes a screen mesh, 113 denotes a squeegee, 114 denotes a work (substrate to be printed), 121 denotes a pressing portion, 115 denotes a plate pattern,
116 is an ink pattern, 117 is ink, 122 is tension, and 123 is a gap. Screen mesh 11
Numeral 2 is formed on a mesh made of a material such as stainless steel, and is held on the plate frame with appropriately set tension.

Next, the procedure of screen printing will be described below with reference to the drawings.

First, as shown in FIG. 11, the surface of the screen mesh 112 and the work are set in a predetermined gap 123. Next, the squeegee 113 is lowered until the screen mesh 112 contacts the work 114 at the pressing portion. Next, the ink 117 is placed before the squeegee 113. Next, the screen mesh 112 is
While keeping the squeegee 113 down, the squeegee 113 is operated in the direction of the arrow in FIG.
I scrape 17. Then, as shown in FIG.
3 causes the ink 117 to be transferred to the plate pattern 115.
Is discharged onto the workpiece 114 through the As described above, at the same time as the ejection of the ink 117, the screen mesh 112 is separated from the work 114 by the restoring force derived from the vertical component of the tension of the screen pressing portion shown in FIG. A desired ink pattern 116 shown in FIG. 10 is formed.

In the conventional screen printing as described above,
The features are as follows. (1) A screen mesh 112 having four sides fixed on a frame is used as an original. (2) A gap 123 exists between the original and the work 114.
Print while keeping

Because of these, in screen printing, the original pattern on the screen plate that has been set in advance is printed after being stretched, so that a two-dimensionally distorted error is added to the dimensions of the original pattern. It will be printed with the specified dimensions. The above-described deterioration in positional accuracy becomes a size that cannot be ignored as the area becomes larger (NHK Giken R & D No. 37).
August 1995, "Study on Plasma Display for Hi-Vision").

[0018]

As described above, in the conventional screen printing method, as described above, there is a gap between the printing plate and the work, and when the printing ink is printed on the work with a squeegee, the printing plate elongates. appear. Further, when printing is repeated, the screen plate elongates differently depending on the position of the screen plate, and the pattern position accuracy deteriorates. Furthermore, the occurrence of these elongations differs depending on each pattern. That is, since printing is performed using different screen plates according to each pattern, the positional accuracy between the patterns is greatly reduced.

In particular, at least the first wiring in the x-axis direction, the second wiring in the y-axis direction orthogonal to the first wiring, and the intersection of the first and second wirings are arranged at least. In a matrix substrate composed of insulating layers, not only the positional accuracy of each pattern but also the relative positional accuracy between the patterns are important.

An object of the present invention is to provide a patterning method and a patterning apparatus for a screen printing plate, which can improve the positional accuracy of the screen plate, and can handle a large area with high accuracy.

[0021]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned object, and in a method of patterning a screen plate, a screen plate is formed by a roll-to-roll configuration in which two opposite sides of the screen plate are wound around rolls. A patterning method of a screen plate characterized by patterning at least one or more types of patterns under tension. The screen plate used in the present invention is preferably a non-elastic screen plate.

In a screen plate patterning apparatus composed of a gauze and an emulsion, there is provided a means for applying tension to the screen plate by a roll-to-roll configuration in which the screen plate is wound around two opposite rolls. A patterning apparatus characterized in that at least one or more types of patterns can be exposed and developed by moving the roller by rotating the roll in a state where the voltage is applied.

In a screen plate patterning apparatus comprising a metal and an emulsion, there is provided a means for applying tension to the screen plate by a roll-to-roll configuration in which the screen plate is wound around two opposite rolls. A patterning apparatus characterized in that at least one or more types of patterns can be exposed, developed, and etched by moving the roller by rotating a roll in a state in which is applied.

Further, in a screen plate patterning device made of metal or plastic, there is provided a means for applying tension to the screen plate by a roll-to-roll configuration in which the screen plate is wound around two opposite rolls, A patterning apparatus characterized in that at least one or more types of patterns are etched by a laser by moving the rolls while rotating under a tension.

Further, a plurality of pattern portions of the plate formed by the above-described patterning method are less in the first wiring, the second wiring orthogonal to the first wiring, and the intersection of the first wiring and the second wiring. Is a method for manufacturing a matrix substrate, which is constituted by an insulating layer disposed thereon, and is printed by using the plate. A plurality of pattern portions of the plate formed by the patterning method have phosphors and black lines each having three primary colors. And a method of manufacturing a substrate having a fluorescent film printed using the plate, and also a method of manufacturing an image display device characterized by being manufactured using these.

[Operation] The patterning apparatus of the present invention has a means for applying tension to the screen plate by means of a roll-to-roll configuration in which two opposing sides of the screen plate are wound around rolls. A tension similar to the tension can be set and applied. In addition, since the roll-to-roll method is used, a constant and uniform tension can be applied.For this reason, when performing multiple patterning, the screen plate is sequentially put on rolls, and the tension between each pattern is kept constant during patterning. It is possible to carry out high-precision patterning.

The screen plate is preferably an inelastic screen plate. Here, what is called an inelastic screen plate is a rigidized screen plate created by applying nickel plating to a conventional polyester screen or stainless steel screen, a screen plate created by an electroforming method, A screen plate or the like created by etching a metal plate or a plastic plate. However, the screen plate that can be used in the present invention is not limited to this.

Since the screen plate produced by the patterning apparatus of the present invention is patterned with the same tension even in different patterns, the relative positional accuracy between the patterns is good, which is suitable for forming a matrix substrate or the like. .

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments according to the present invention will be described.
This will be described in detail with reference to the drawings.

[First Embodiment] A patterning method and a patterning apparatus for a screen plate according to the present embodiment will be described with reference to FIGS.

FIG. 1 is a perspective view showing a patterning apparatus according to this embodiment.

FIG. 1 is a perspective view showing a patterning apparatus for realizing a method of patterning a screen plate according to a first embodiment of the present invention.

In FIG. 1, the patterning apparatus includes an exposure machine 1, a glass mask 2, contact rollers 5a and 5b, an unwind roller 6a, a take-up roller 6b, and a support roller 7.
a, 7 b and a developing tank 8. In the drawing, reference numeral 4 denotes a patterning region of the screen plate 3. Here, the unwinding roller 6a is a tension roller, and can apply a constant torque in a direction opposite to the unwinding direction. As the torque, for example, an electromagnetic clutch or the like is used. On the other hand, the winding roller 6b is for winding, and can control the winding speed. The speed of the take-up roller 6b is controlled by a motor that drives the roller.
All the rollers between a and the take-up roller 6b are free rolls. With the above-described mechanism, it is possible to wind at a desired speed at a desired tension.

The screen plate 3 is made of a glass mask 2
Are brought into close contact with the contact rollers 5a and 5b. Further, the screen plate 3 is composed of gauze and emulsion in this example, and is controlled to a constant tension by the unwind roller 6a and the take-up roller 6b.

At both ends of the screen plate 3, readers (not shown) are provided for routing. Unwind roller 6
a, a rotating mechanism (not shown) is provided on the winding roller 6b, and the screen plate 3
Can be transported. Also, the contact rollers 5a, 5b
Is provided with a vertical mechanism (not shown) for bringing the screen plate 3 into surface contact with the glass mask 2.

FIG. 2 is a schematic view of a patterning apparatus according to the first embodiment of the present invention. In FIG. 2, reference numeral 8a denotes a nozzle for discharging the developer, 8b denotes an air knife for drying,
It is arranged inside the developing tank 8. 1 and 2 are denoted by the same reference numerals.

(Explanation of Operation) Next, the patterning procedure according to the first embodiment of the present invention will be described with reference to FIGS.
This will be described in detail with reference to FIG.

First, the setting of the screen on the patterning device will be described. In this example, a rigidized screen plate made by nickel plating a stainless steel screen was used as the screen plate 3. One end of the screen plate 3 is fixed to the tension roller 6a.
Next, the screen plate 3 is passed through various support rollers 7a and 7b, contact rollers 5a and 5b, and the developing tank 8, and is fixed to the other tension roller 6b. Support rollers 7a, 7
b can be appropriately provided according to the layout of the screen plate 3.

As described above, leaders are provided at both ends of the screen plate 3 for routing, and the screen plate 3 does not necessarily need to be wound around the tension rollers 6a and 6b. The rotation mechanism is provided on the tension rollers 6a and 6b as described above, and while applying a constant tension,
The screen plate can be transported. The contact rollers 5a and 5b are provided with the vertical mechanism (not shown) as described above, and can bring the screen plate 3 into surface contact with the glass mask 2.

After setting the screen plate 3 in the patterning device, the patterning region 4 is
The screen plate 3 is transported until it comes to the top. After being conveyed to a predetermined position, the patterning area (pattern forming area) 4 where the pattern on the screen plate 3 is formed by the contact roller 5 is brought into surface contact with the glass mask 2 and exposed by the exposing machine 1.

After the exposure, the screen plate 3 is separated from the glass mask 2 by the contact rollers 5a and 5b, and the screen plate 3 is conveyed.

Next, the screen plate 3 is put into the developing tank 8. In the developing tank 8, the developing solution is discharged from the nozzle 8a in a shower shape to perform the development. The number of nozzles 8a and the amount of the developing solution are selected according to the developing conditions. Rinsing and cleaning after development are also performed in the developing tank 8 in the same manner. The screen plate 3 after washing is dried by the air knife 8b and comes out of the developing tank 8.

During this time, the screen plate 3 is always kept at a constant tension. In this example, the tension was 2 kg / cm.

By repeating the above steps, a plurality of patterning operations can be performed.

In this embodiment, in order to check the printing accuracy, the screen plate was patterned so that the first pattern portion and the second pattern portion constituted a dot pattern. FIG. 3 shows an arrangement pattern of the first dots 13 and the second dots 14.

In FIG. 3, the substrate 11 has a diagonal of 20 inches, and the print pattern section 12 has a diagonal of 15 inches. The dot patterns are arranged at an equal pitch with reference to the alignment marker 15 shown in FIG. 3B, and the first dots 13 and the second dots 14 are alternately arranged.

The screen plate 3 having the above-described pattern was set on the roll-to-roll type printing press 1 for printing. At this time, the tension of the screen plate 3 is 2 kg / c.
m. First, the first pattern portion is printed on the substrate 11, and then the screen plate is sent to the second pattern portion and positioned on the work, and then printed in the same manner as the first pattern portion, and the dot pattern is printed. Was formed. The paste used was a silver paste.

The positional accuracy of the dot pattern printed by the above method was measured. The position accuracy was measured using the alignment markers 15 at the upper right and lower right in the figure as the origin.

(First Embodiment and Comparative Example) Next, differences between the first embodiment and the comparative example will be described.

The same pattern as that of the first embodiment was formed by two ordinary screen plates, and printed using the screen printer described in the prior art, and the positional accuracy was measured.

FIG. 4 shows measurement results of the positional accuracy of the first embodiment and the comparative example. FIG. 4 shows the distribution of the shift amount of the position coordinates after printing with respect to the design coordinates of each dot. First
In the embodiment, the distribution of the deviation amount of the first dot and the distribution of the deviation amount of the second dot are almost the same and overlap. On the other hand, it can be seen that the comparative example shows a tendency that the shift amount of the first dot and the shift amount of the second dot are different.

As described above, in the first embodiment of the present invention, the tension at the time of patterning the screen plate can be kept constant for different patterns, so that the relative positional accuracy between the different patterns is improved. be able to.

[Second Embodiment] Next, a second embodiment of the present invention will be described in detail with reference to the drawings.

(1) Description of Configuration In the second embodiment of the present invention, a case of a screen plate patterning device composed of a metal and an emulsion will be described.

FIG. 5 is an explanatory view showing a schematic configuration of the patterning apparatus according to the first embodiment of the present invention.

In FIG. 5, the patterning apparatus includes an exposing machine 1, a glass mask 2, contact rollers 5a and 5b, tension rollers 6a and 6b, support rollers 7a and 7b, a developing tank 8, and an etching tank 9. The same reference numerals as those in FIGS. 1 and 2 denote the same components.

The configuration of the screen plate of the first embodiment is as follows.
Metal is used for the gauze of the first embodiment. Since the metal is used, the etching tank 9 is used for the metal etching step after the emulsion developing step.
Is provided. As the metal, there are various materials, and SUS304, nickel and the like are often used. The thickness of the metal foil is 10 to 300 μm.

(2) Description of Operation Next, a patterning procedure according to the second embodiment of the present invention will be described in detail with reference to FIG.

In the patterning procedure, metal etching was performed in the etching tank 9 after the development of the emulsion was performed in the same manner as in the first embodiment. In the etching tank 9, a metal etching liquid, a cleaning liquid, an emulsion stripping liquid, and a cleaning liquid are sequentially supplied from a nozzle, and finally blower is performed, thereby completing the etching process.

As described above, in the second embodiment of the present invention, a printing experiment similar to that of the first embodiment was performed on the screen plate formed as described above.
Printing with good positional accuracy was realized.

[Third Embodiment] Next, a third embodiment of the present invention will be described in detail with reference to the drawings.

(1) Description of Configuration In the third embodiment of the present invention, a patterning apparatus for a screen plate made of metal or plastic will be described.

FIG. 6 is an explanatory view showing a schematic configuration of a patterning apparatus according to a third embodiment of the present invention.

In FIG. 6, the patterning device includes a glass mask 2, contact rollers 5a and 5b, a tension roller 6a,
6b, support rollers 7a and 7b, and a laser irradiation mechanism 10. 1 and 2 denote the same components.

The configuration of the screen plate of the third embodiment is as follows.
Metal or plastic is used for the gauze of the first embodiment.

(2) Description of Operation Next, a patterning procedure according to the third embodiment of the present invention will be described in detail with reference to FIG.

The pattern is drawn directly by the laser light irradiated from the laser irradiation mechanism 10. The laser irradiation mechanism 10 uses YAG (Yttrium-Aluminum-Garmet) or excimer, and may be selected according to the material. In the present invention, metal, for example, SUS304 (stainless steel)
The YAG second harmonic was used. An excimer laser was used for plastics, for example, PET (petrochemicals).

As described above, in the third embodiment of the present invention, using the screen plate obtained as described above,
When a printing experiment similar to that of the first embodiment was performed, printing was performed with good positional accuracy.

[Fourth Embodiment] Next, a fourth embodiment of the present invention will be described in detail with reference to the drawings.

(1) Description of Configuration In the fourth embodiment of the present invention, row wirings are arranged in a simple matrix in the patterning apparatus of the present invention described in the first embodiment, and are arranged orthogonal to the row wirings. A pattern portion corresponding to an insulating layer disposed at an intersection of a column wiring, a row wiring, and a column wiring is formed into a matrix wiring using a patterned screen plate, and an electron source in which a plurality of surface conduction electron-emitting devices are disposed. The method of manufacturing the used image display device will be described below.

FIGS. 7A to 7E are top views showing steps of manufacturing an electron source substrate of an image display device formed by a screen plate patterned using the patterning device according to the fourth embodiment of the present invention. It is. Here, FIG.
In FIG. 6, the electron emission elements 65 are arranged in a matrix of 3 × 3 in a matrix of 9 on a blue glass substrate (not shown).
This is shown in an example formed with 2, 64.

In FIG. 7E, reference numeral 61 denotes an element electrode formed by offset printing. In this embodiment, a pair of rectangular electrodes with a gap of 20 μm are arranged in a matrix in the element electrode pattern. Reference numeral 62 denotes a lower printed wiring formed by firing the printed silver paste, and reference numeral 63 denotes an insulating layer formed by firing the printed glass paste. Reference numeral 64 denotes an upper printed wiring formed by firing the printed silver paste. Reference numeral 65 denotes a conductive thin film, which is a thin film made of Pd fine particles, and is formed with wiring at a space between the pair of device electrodes 62.

(2) Description of Operation Next, the manufacturing process of the electron source substrate according to the fourth embodiment of the present invention will be described in detail with reference to FIGS.

The pattern of the device electrode 61 is formed by arranging a pair of rectangular electrodes separated by a matrix with a gap of 20 μm. Further, the lower printed wiring 62 is formed by firing the printed silver paste, and the insulating layer 63 is formed by firing the printed glass paste. The upper printed wiring 64 is formed by firing the printed silver paste. These prints were printed by a roll-to-roll printer similar to the patterning apparatus of the present invention.

Further, a conductive thin film 65, which is a thin film made of Pd fine particles, is formed in the space between the pair of device electrodes 62.

Next, the face plate 10 shown in FIG.
7 to 109 are formed. A glass substrate 107, a fluorescent film 108, a metal back 109, and the like are formed on the face plate. FIGS. 8A and 8B are top views showing the fluorescent film 108. FIG. In the case of a color fluorescent film, a black conductive material 71 of a black stripe (FIG. 8A) or a black matrix (FIG. 8B) and a fluorescent material 72 are formed depending on the arrangement of the fluorescent materials.

As a method of applying the phosphor 72 to the glass substrate, a precipitation method or a printing method is used. Also, the fluorescent film 108
Is usually provided with a metal back 109 on the inner surface side. The metal back 109 is formed after the fluorescent film 108 is formed.
Can be formed by performing a smoothing treatment on the inner side surface of the substrate and then depositing aluminum by vacuum evaporation or the like.

In this example, black lines were printed using a paste containing graphite as the black line paste in the fluorescent film 108. After drying, a red phosphor was printed between the black lines. After drying, an insulating phosphor was printed between black lines adjacent to the red phosphor. Similarly, after printing a blue phosphor, main firing was performed to form a face plate.

As described above, the face plate 107 and the rear plate 105 formed as shown in FIG. 9 were sealed via the support frame 106 to constitute an image display device. After sealing, the image display device applies a desired voltage between the device electrodes via the matrix wiring, performs an energization forming process, and an activation process, makes the inside a vacuum state, and applies a scanning signal and an image to the device electrodes. When a signal was applied and a high voltage was applied to the metal back, a high-luminance image could be visually recognized.

When the image displayed on the image display device was observed, no color shift or variation due to the printing position accuracy was observed.

As described above, in the fourth embodiment of the present invention, it is possible to manufacture a high-quality image display device in which the positional accuracy of each pattern is high, and therefore, there is no color shift or the like.

[0082]

As described above, according to the method for patterning a screen plate of the present invention and the apparatus for patterning a screen plate of the present invention, transport is performed by applying tension to the screen plate wound at both ends in the transport direction. Then, since the pattern is exposed to the screen plate and developed, a screen plate capable of printing with high accuracy and large area can be formed.

According to the method of manufacturing a matrix substrate of the present invention, the method of patterning a screen plate of the present invention
By using a screen plate patterning device,
A matrix substrate with high positional accuracy and no color shift can be manufactured.

Further, according to the method for manufacturing a substrate having a phosphor of the present invention, by using the method for patterning a screen plate and the patterning apparatus for a screen plate of the present invention, a phosphor film having high positional accuracy and no color shift is obtained. Can be manufactured.

Further, according to the method of manufacturing an image display device of the present invention, by using the method of manufacturing a matrix substrate and the method of manufacturing a substrate having a fluorescent film of the present invention, the positional accuracy of each pattern is high and color misregistration is achieved. It is possible to manufacture a high-quality image display device without any problem.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a configuration example of a patterning apparatus according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram illustrating a configuration example of a patterning apparatus according to the first embodiment of the present invention.

FIG. 3 is a top view illustrating a print test pattern according to the first embodiment of the present invention.

FIG. 4 is an explanatory diagram showing evaluation results of position accuracy between the first embodiment of the present invention and a comparative example.

FIG. 5 is a schematic diagram illustrating a configuration example of a patterning apparatus according to a second embodiment of the present invention.

FIG. 6 is a schematic diagram illustrating a configuration example of a patterning apparatus according to a third embodiment of the present invention.

FIG. 7 is a top view illustrating a manufacturing process of a rear plate formed using the manufacturing apparatus according to the fourth embodiment of the present invention.

FIG. 8 is a top view showing a fluorescent film according to a fourth embodiment of the present invention.

FIG. 9 is a perspective view of an image display apparatus using surface conduction electron-emitting devices of the present invention and a conventional example.

FIG. 10 is a perspective view of a conventional screen printing machine.

FIG. 11 is a schematic view of a conventional screen printing machine.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Exposure machine 2 Glass mask 3 Screen plate 4 Patterning area 5a, 5b Contact roller 6a, 6b Tension roller 7a, 7b Contact roller 8 Developing tank 9 Etching tank 10 Laser irradiation mechanism 62 Lower printed wiring 63 Insulating layer 64 Upper printed wiring 71 Black Conductive material 72 Phosphor

Claims (22)

[Claims] 1. In patterning a screen plate,
A patterning method for a screen plate, comprising patterning at least one or more types of patterns while tension is applied to the screen plate by a roll-to-roll configuration in which two opposing sides of the screen plate are wound around rolls. . 2. The patterning method according to claim 1, wherein the screen plate is a non-elastic screen plate. 3. An apparatus for patterning a screen plate comprising a gauze and an emulsion, comprising means for applying tension to the screen plate in a roll-to-roll configuration in which the screen plate is wound around two opposite rolls. A patterning apparatus characterized in that at least one or more types of patterns can be exposed and developed by moving the roll by rotating the roll while applying the tension. 4. A patterning apparatus for a screen plate comprising a metal and an emulsion, comprising means for applying tension to the screen plate in a roll-to-roll configuration in which the screen plate is wound around two opposite rolls. A patterning apparatus characterized in that at least one or more types of patterns can be exposed, developed, and etched by moving by rotating the roll while applying the tension. 5. A patterning apparatus for a screen plate made of metal or plastic, comprising means for applying tension to the screen plate by a roll-to-roll configuration in which the screen plate is wound around two opposite rolls. A patterning apparatus characterized in that at least one type of pattern is etched by a laser by moving the roll by rotating the roll while applying the tension. 6. A plurality of pattern portions of the screen plate formed by the patterning method according to claim 1 or 2, wherein the plurality of pattern portions are a first wiring, a second wiring orthogonal to the first wiring,
A method for manufacturing a matrix substrate, comprising: an insulating layer disposed at least at an intersection of the first wiring and the second wiring, and printed using the screen plate. 7. A plurality of pattern portions of a plate formed by the patterning method according to claim 1 are composed of phosphors of three primary colors and black lines, and a phosphor film printed using the plate is provided. Of manufacturing a substrate having the same. 8. A method of manufacturing an image display device, wherein the method is performed by using the method of manufacturing a matrix substrate according to claim 6 or 7. 9. A screen plate patterning method for forming a pattern on a screen plate, comprising: a conveying step of drawing and conveying the screen plate wound at both ends in the conveying direction, and applying tension to the screen plate. Step, and an exposure step of exposing a pattern on the screen plate conveyed by the conveying step while applying tension by the tension applying step,
A step of developing the screen plate exposed in the exposing step. 10. The method according to claim 9, wherein the screen plate is a screen plate having gauze and emulsion. 11. The method for patterning a screen plate according to claim 9, further comprising an etching step of etching the screen plate developed in the developing step. 12. A screen plate patterning method for forming a pattern on a screen plate, comprising: a conveying step of drawing and conveying the screen plate wound on rolls at both ends in the conveying direction; and applying a tension to the screen plate. And a laser irradiation step of irradiating a laser beam to the screen plate conveyed in the conveying step while applying tension in the tension applying step and etching a pattern. . 13. The method according to claim 12, wherein the screen plate is an inelastic screen plate made of metal or plastic. 14. A screen plate patterning apparatus for forming a pattern on a screen plate, a conveying means for drawing and conveying the screen plate wound at both ends in a conveying direction, and a tension applying device for applying tension to the screen plate. Means, and exposure means for exposing a pattern on the screen plate conveyed by the conveying means while applying tension by the tension applying means,
Developing means for developing the screen plate exposed by the exposure means. 15. The apparatus according to claim 14, wherein the screen plate is a screen plate including gauze and emulsion. 16. The apparatus for patterning a screen plate according to claim 14, further comprising an etching unit for etching the screen plate developed by the developing unit. 17. The apparatus according to claim 14, wherein the screen plate is a non-elastic screen plate having a metal and an emulsion. 18. A screen plate patterning apparatus for forming a pattern on a screen plate, comprising: conveying means for winding and conveying the screen plate wound at both ends in the conveying direction, and applying tension to the screen plate. And a laser irradiation means for irradiating a laser beam to the screen plate conveyed by the conveying means while applying tension by the tension applying means and etching a pattern. . 19. The apparatus according to claim 18, wherein the screen plate is an inelastic screen plate made of metal or plastic. 20. A plurality of pattern portions of the plate formed by the patterning method according to claim 1, wherein the plurality of pattern portions are a first wiring and a second wiring orthogonal to the first wiring. A method of manufacturing a matrix substrate, comprising: an insulating layer disposed at least at an intersection of the first wiring and the second wiring; and printing the substrate using the plate. 21. A plurality of pattern portions of a plate formed by the patterning device according to claim 3, wherein the plurality of pattern portions are formed by a first wiring and a second wiring orthogonal to the first wiring. A method of manufacturing a matrix substrate, comprising: forming a wiring, at least an insulating layer disposed at an intersection of the first wiring and the second wiring, and performing printing on the substrate using the plate. 22. A method of manufacturing an image display device, comprising manufacturing an image display device by using the method of manufacturing a matrix substrate according to claim 20.