JP2000168043A - Screen printer, method for screen printing and manufacture of image forming apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a lack of a printing pattern when a plate is released. SOLUTION: In the screen printer or a method for screen printing by disposing a screen plate 3 and a material 2 to be printed at a distance substantially zero therebetween, filling an ink in an opening of the plate and separating the plate, an ultraviolet ray is applied to the filled ink by an ultraviolet applying means 8 before the plate is separated after the ink is filled.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen printing machine and method, and a method of manufacturing an image forming apparatus, and more particularly, to screen printing that can be used for manufacturing electrodes, wiring, electronic circuit boards, electron source boards, image display devices, and the like. The present invention relates to an apparatus and a method, and a method for manufacturing an image forming apparatus using the same.

[0002]

2. Description of the Related Art Conventionally, a cathode ray tube (CRT) has been widely and generally used as an image display device. Recently, CRTs with a display screen exceeding 30 inches have appeared. However, in the case of a cathode ray tube, in order to enlarge the display screen, it is necessary to increase the depth according to the screen, and it becomes heavy. Therefore, in order to respond to a consumer's desire to view a powerful image on a larger screen, a cathode ray tube requires a larger installation space, and it is hard to say that it is suitable. Therefore, a thin, light, large-screen flat panel image display device with low power consumption, which can be mounted on a wall in place of a large and heavy cathode ray tube (CRT), is expected.

As a flat panel image display device, a liquid crystal display device (LCD) has been actively researched and developed.
Is not a self-luminous type, it requires a light source called a backlight, and most of the power consumption is used for the backlight. Further, LCDs still have problems such as low image efficiency due to low light use efficiency, limited view angle, and difficulty in increasing the screen size to over 20 inches.

[0004] Instead of the LCD having the above-mentioned problems, a thin self-luminous image display device is receiving attention.
As such a display device, for example, a plasma display panel (PDP) that excites a phosphor by irradiating the phosphor with ultraviolet light to emit light, a field emission electron-emitting device (FE), and a surface conduction electron emission There is a flat panel image display device or the like in which an element is used as an electron source, and electrons emitted from the electron-emitting element are irradiated on the phosphor to excite the phosphor to emit light. PDPs with a large screen of about 40 inches have begun to be marketed. Such a self-luminous image display device can obtain a brighter image than an LCD and has no problem of a viewing angle. However, the PDP is suitable for a large screen, but is inferior in emission luminance and contrast as compared with a cathode ray tube. On the other hand, the light emission principle of a display device using FE or a surface conduction electron-emitting device is basically the same as that of a cathode ray tube. Therefore, there is a possibility that brightness and contrast can be achieved equivalent to those of a cathode ray tube.

The present applicant has paid attention to an image display device using a surface conduction electron-emitting device, among self-luminous flat plate image display devices. This is because the structure is relatively simple,
This is because it is suitable for forming a large area.

[0006] A surface conduction electron-emitting device applies a voltage to a conductive thin film composed of fine particles formed on a substrate through a pair of electrodes called device electrodes.
Electrons are emitted into a vacuum from an electron emission portion formed on a part of the conductive thin film. The principle of an image display device using a surface conduction electron-emitting device is to emit light by irradiating a phosphor with electrons emitted from the surface conduction electron-emitting device.

The applicant of the present invention has previously described Japanese Patent Application Laid-Open No. 6-3426.
No. 36 discloses an example of an image display device using a surface conduction electron-emitting device as an electron source. FIG.
1 shows a schematic configuration of a surface conduction electron-emitting device disclosed in this publication. FIG. 9 shows a schematic configuration of an image display device using the surface conduction electron-emitting device disclosed in this publication. FIG. 8A is a plan view showing a configuration of a surface conduction electron-emitting device, and FIG. 8B is a cross-sectional view thereof.

In FIG. 8, 10001 is an insulating substrate,
Reference numeral 10004 denotes a conductive thin film made of fine particles formed on an insulating substrate 10001;
Denotes a pair of device electrodes for obtaining electrical connection with the conductive thin film 10004, and 10005 denotes an electron emission portion formed on the conductive thin film 10004.

In this surface conduction electron-emitting device, the distance L between the pair of device electrodes 10002 and 10003 is set to several thousand to several hundred μm.
The length W of the element 10003 is 10002, 1000
The thickness is set to several μm to several hundred μm in consideration of the resistance value of No. 3 and the electron emission characteristics. Also, the device electrodes 10002, 100
03 is a conductive thin film 10004 composed of fine particles.
The distance is set in the range of several hundreds of .mu.m to several .mu.m in order to maintain electrical connection. The device electrodes 10002 and 10003 are, for example,
It is formed by a photolithography technique.

The thickness of the conductive thin film 10004 made of fine particles is appropriately set in consideration of the step coverage of the device electrodes 10002 and 10003, the resistance between the device electrodes 10002 and 10003, forming conditions, and the like. It is preferable to set the angle in the range of 〜 to several thousand degrees, and it is more preferable to set the angle in the range of 10 to 500 °. It is preferable that the resistance value of the conductive thin film 10004 be set so that Rs is 10 ² to 10 ⁷ Ω / □. In addition,
Rs is represented by R = Rs (l / w), where R is the resistance measured in the length direction of a thin film having a thickness t, a width w, and a length l. When the thickness t and the resistivity ρ are constant, R
It is represented by s = ρ / t.

FIG. 9 is a schematic diagram showing an example of an image display device using a surface conduction electron-emitting device. In the figure, 5
Reference numeral 005 denotes a rear plate, 5006 denotes an outer frame, and 5007 denotes a face plate. These connection portions are sealed with an adhesive such as a low melting point glass frit (not shown).
An envelope (airtight container) for maintaining the inside of the image display device in a vacuum is constituted. The substrate 5001 is fixed to the rear plate 5005. On this substrate 5001, N × M surface conduction electron-emitting devices 5002 are arranged. N and M are positive integers of 2 or more, and are appropriately set according to the target number of display pixels. As shown in FIG. 9, the surface conduction electron-emitting device 5002
The row wirings 5003 and the N column wirings 5004 are wired. The row wiring 5003 and the column wiring 5004 are formed by, for example, a photolithography technique. A portion constituted by the substrate 5001, a plurality of electron-emitting devices such as the surface conduction electron-emitting device 5002, the row-direction wiring 5003, and the column-direction wiring 5004 is called a multi-electron beam source. Also, at least,
At a portion where the row wiring 5003 and the column wiring 5004 intersect, an interlayer insulating layer (not shown) is formed between the two wirings, so that electrical insulation between the row wiring 5003 and the column wiring 5004 is maintained. I have.

A fluorescent film 5008 made of a phosphor is formed on the lower surface of the face plate 5007, and phosphors (not shown) of three primary colors of red (R), green (G), and blue (B) are applied. Divided. Further, a black body (not shown) is arranged between the phosphors of the respective colors constituting the fluorescent film 5008. Further, a rear plate 5005 of the fluorescent film 5008
A metal back 5009 made of Al or the like is formed on the side surface.

Dx1 to Dxm, Dy1 to Dyn and H
“v” is an electric connection terminal having an airtight structure provided for electrically connecting the image display device and an electric circuit (not shown). The terminals Dx1 to Dxm are electrically connected to the row direction wiring 5003 of the multi electron beam source. Terminals Dy1
Similarly, Dyn is also provided in the column direction wiring 500 of the multi-electron beam source.
4 is electrically connected. The terminal Hv is electrically connected to the metal back 5009.

The inside of the envelope (airtight container) is 10 ⁻⁶ T.
The vacuum is maintained at or or more. Therefore, the larger the display screen of the image display device, the larger the envelope (airtight container)
A means for preventing deformation or destruction of the rear plate 5005 and the face plate 5007 due to a pressure difference between the inside and the outside is required. Therefore, the face plate 5
In some cases, a support member (not shown) called a spacer or a rib for supporting atmospheric pressure resistance may be arranged between 007 and the rear plate 5005. The substrate 5001 on which the electron-emitting devices 5002 are formed and the fluorescent film 5008
Is generally maintained at several hundred μm to several mm, and the inside of the envelope (airtight container) is maintained at a high vacuum.

The above-described image display device includes the external terminals Dx1 to Dxm, Dy1 to Dyn, and the row wiring 5
003, by applying a voltage to each surface conduction electron-emitting device 5002 through the column wiring 5004, electrons are emitted from each surface conduction electron-emitting device 5002.
At the same time, the metal back 5009 is connected to the external terminal Hv
By applying a high voltage of several hundreds of volts to several kV, the electrons emitted from the surface conduction electron-emitting device 5002 are accelerated and collide with the phosphors of the respective colors formed on the inner surface of the face plate 5007. As a result, the phosphor is excited to emit light, and an image is displayed.

In order to form the above-mentioned image display device, the electron-emitting device 5002, the row and column wirings 5003, 5
004 must be formed in a large number. As the method, a photolithography technique, an etching technique, and the like can be given. However, for example, when forming an image display device having a large screen of several tens of inches using surface conduction electron-emitting devices, if photolithography technology and etching technology are used, it corresponds to a large substrate with a diagonal size of several tens of inches. Large-scale manufacturing equipment such as an exposure apparatus and an etching apparatus is required in addition to a vapor deposition apparatus and a spin coater, and there are problems such as difficulty in handling in a manufacturing process and high cost. Therefore, it is conceivable to form a large number of electron-emitting devices 5002 and a large number of row-direction and column-direction wirings 5003 and 5004 by using a printing technique that is relatively inexpensive, does not require a vacuum device, and can cope with a large area.

In screen printing, for example, a printing pattern is formed on a substrate, which is a printing medium, by filling the openings with an ink mixed with metal particles, using a plate having openings of a desired pattern as a mask. Then, baking is performed to form a conductor wiring or the like having a desired pattern. 10 and 11 are a perspective view and a side view showing an example of a conventional screen printing machine. In these figures, 1002 is a plate frame, 1003 is a screen mesh stretched over the plate frame 1002, 1007 is a squeegee, 1
016 is a work (substrate to be printed), 1017 is a pressing portion, 10
Reference numeral 18 denotes an opening provided in the screen mesh 1003, 1019 denotes an ink pattern formed on the work 1016, 1020 denotes ink, 1024 denotes tension generated in the screen mesh 1003, and 1023 denotes a gap between the plate frame 1002 and the work 1016. . The screen mesh 1003 is formed by forming a resin film on a mesh of a material such as stainless steel, and is formed by removing an opening 1018 for discharging the ink 1020. The screen mesh 1003 is formed on the plate frame 1002 with appropriately set tension. It is stretched.

Next, the procedure of screen printing will be described with reference to FIGS. First, as shown in FIG. 10, a gap 1023 between the plate frame 1002, that is, the surface of the screen mesh 1003 and the work (substrate to be printed) 1016 is set to a predetermined value. Next, the screen mesh 100
Reference numeral 3 denotes a work (substrate to be printed) 101 at the pressing portion 1017.
The squeegee 1007 is lowered until it touches 6. Next, the ink 1020 is set before the squeegee 1007. Next, the screen mesh 1003 is used for the work (substrate to be printed).
While the squeegee 1007 is being lowered so as to always come into contact with 1016, the squeegee 1007 is steered in the direction of arrow 1021 to scrape ink. At that time, as shown in FIG. 10, the ink 1020 is discharged onto the work (substrate to be printed) 1016 through the opening 1018 by the pressure from the squeegee 1007. At the same time as the ejection of the ink, the screen mesh 1003 is separated from the work (printed material) 1016 by the restoring force derived from the vertical component of the tension 1024 of the screen pressing unit 1017 shown in FIG. A desired ink pattern 1019 shown in FIG.

In the conventional screen printing as described above,
It has the following features. That is, a screen mesh 1003 whose four sides are fixed to a frame 1002 is used as an original, and printing is performed with the gap between the original and the work 1016 kept at a certain gap 1023.

However, this has the following problems. In other words, due to the above-described features of the conventional screen printing, in the screen printing, since an original pattern on a screen plate that has been set in advance is printed by extending, an error that is two-dimensionally distorted with respect to the dimension of the original pattern is added. Printed in the specified dimensions. This deterioration in positional accuracy becomes a size that cannot be ignored as the area becomes larger (NHK Giken R & D)
NO. 37 August 1995, "Research on Plasma Displays for Hi-Vision"). That is, the deterioration of the printing position accuracy becomes more remarkable as the area becomes larger. For example, in the case of forming the row-direction and column-direction wirings of the above-described flat display device, alignment with the electron-emitting device is deteriorated, and pixel defects and This may contribute to crosstalk. Such deterioration of the alignment becomes a problem particularly when pixels are formed at a high density that cannot be escaped by increasing the design margin.

In order to solve this problem, contact printing is proposed, which is a printing method in which a squeegee is moved to scrape ink while a gap (gap) between a printing medium on which a printing pattern is formed and a screen surface is almost zero. Have been. In this method, since the printing is performed without extending the long dimension of the original pattern of the screen plate, the position of the pattern formed on the work and the position of the original pattern of the screen plate substantially coincide with each other. Printing with controlled length and position accuracy becomes possible. In this contact printing method, ink is filled over the entire surface of the screen in a concave region formed by the side wall of the opening of the screen and the surface of the substrate as a printing medium, and then the screen plate is separated from the substrate to perform plate separation.

[0022]

However, at this time, since the ink filled in the opening has fluidity,
A part of the ink is dragged by the inner wall of the opening, and the filling ink in the opening is divided, and as a result, the pattern on the substrate may be chipped.

As a method for improving the problem at the time of plate separation, a printing machine disclosed in Japanese Patent Application Laid-Open No. 7-1705 has been proposed. Such a proposal uses a rigid body as a reinforcing member to make the frame of the screen plate seemingly smaller, so that even if the gap setting for contact printing is set to a small gap, the screen plate is set as in the case of a large gap setting. The restoring force is increased.

However, since this method does not improve the fluidity of the ink in the opening of the screen plate at all, the problem that the print pattern is lost may occur as described above.

An object of the present invention is to provide a screen printing machine and method, and a method of manufacturing an image forming apparatus, in which a printed pattern is prevented from being lost when a plate is separated, in view of the problems of the related art.

[0026]

In order to achieve this object, a screen printing machine according to the present invention is arranged such that a distance between a screen plate and a printing material is substantially zero, and an opening of the screen plate is provided. A screen printing machine for performing printing by filling an ink with a squeegee in a part and separating the plate, and irradiating the filled ink with ultraviolet light after filling the ink and before separating the plate. Means is provided.

Further, in the screen printing method of the present invention, both are arranged so that the distance between the screen plate and the printing material is substantially zero, and the opening of the screen plate is filled with ink with a squeegee; A screen printing method for performing printing by separating a plate, wherein the filled ink is irradiated with ultraviolet light after filling the ink and before separating the plate.

Further, in the method of manufacturing an image forming apparatus using the electron-emitting device according to the present invention, the above-mentioned screen printing method of the present invention is applied to a substrate on which device electrodes for forming electron-emitting devices are formed. A step of forming a wiring for the element electrode.

According to the present invention, the ink filled in the opening of the screen plate is irradiated with ultraviolet light, so that the ultraviolet light curable ink in the opening is cured to suppress its fluidity. Therefore, it is possible to suppress the phenomenon that ink remains in the openings at the time of subsequent separation of the plate, and to prevent chipping of the pattern on the printing material.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In a preferred embodiment of the present invention, the ink is a negative type ultraviolet light sensitive ink. The screen plate shields or transmits ultraviolet light (a part other than the opening) or transmits ultraviolet light, and the ultraviolet light irradiating means irradiates the screen plate with ultraviolet light from the squeegee side or the printing medium side.

Alternatively, the screen plate has a half-bridge structure in part, and this half-bridge structure is a structure in which the squeegee side is connected and transmits ultraviolet light. The light is shielded, and the ultraviolet light irradiation means irradiates the screen plate with ultraviolet light from the squeegee side.

The ultraviolet light irradiating means irradiates the entire surface of the screen plate with ultraviolet light or irradiates the ultraviolet light by moving the irradiation position in conjunction with the movement of the squeegee. In this case, when irradiating the portion of the half bridge structure, the ultraviolet light irradiating means increases the illuminance of the ultraviolet light to be irradiated.

Further, there is provided a light shielding means for preventing the ultraviolet light irradiation means from irradiating the ink (standby ink) other than the pattern portion on the screen plate with the ultraviolet light. Further, there is provided a means for irradiating the screen plate or the printing material with infrared light.

Examples of the screen plate in which portions other than the openings have a light-shielding property include a metal plate and a plastic plate whose surface is subjected to a vapor deposition process of metal or the like. The metal plate is generally formed by electroforming or etching, but may be formed by any method. The plastic plate is formed by forming an opening in a plate-like material such as polyester with a laser or the like. Conversely, as the screen plate having the transmittance of ultraviolet light, a plastic plate which is not subjected to a vapor deposition treatment of metal or the like is preferable.

The formation of the half-bridge structure can be easily performed by reducing the laser intensity of laser processing in the case of a plastic plate.

The screen plate may be of a type to which an emulsion is applied. However, it is desirable to form the emulsion with a sufficiently large thickness, for example, so that the ink does not remain on the mesh portion when the ultraviolet ray is irradiated. Further, in order to impart sufficient light-shielding properties to the emulsion portion, for example, carbon may be mixed with the emulsion. Alternatively, a screen plate in which a metal is formed instead of the emulsion may be used.

As the ultraviolet light irradiation means, for example, a mercury lamp can be used. However, in order to prevent the temperature of the irradiation unit from rising, it is desirable to provide a heat ray filter and a cold mirror.

[0038]

[Embodiment 1] FIG. 1 is a sectional view showing a screen printer according to a first embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a work surface plate, 2 denotes a work to be printed placed on the work surface plate 1, 3 denotes a metal screen plate, and 4 denotes a pattern formed by an opening provided in the screen plate 3. Reference numeral 5 denotes a platen vertically moving mechanism for moving the work platen 1 up and down, 6 denotes a squeegee used for screen printing, 7 denotes ink, and 8 denotes an ultraviolet light which is disposed on the squeegee 6 side of the screen plate 3. A high-pressure mercury lamp for performing irradiation and a light shielding member 9 for preventing ultraviolet light irradiation to ink other than the pattern portion 4 are described. Platen vertical mechanism 5
Can make the distance between the screen plate 3 and the work 2 substantially zero.

Using this printing machine, a line-and-space-like pattern is formed on a glass substrate on which a line-and-space-like wiring has already been formed so as to be orthogonal to the first-layer wiring as follows. They were formed in layers. That is, first, as shown in FIG. 1A, the work 2 was set on the work surface plate 1, and the ink 7 was set on the screen plate 3.

Next, as shown in FIG. 1B, the distance between the surface of the pattern portion 4 of the screen plate 3 and the work 2 is set to substantially zero by the platen vertical mechanism 5, and the squeegee 6 is moved in this state. The ink 7 was developed by being operated. In this state, the ink is filled in the opening of the screen plate 3.

Next, as shown in FIG. 1 (c), only the pattern portion 4 of the screen plate 3 was irradiated with ultraviolet light from the high-pressure mercury lamp 8. At this time, by lowering the position of the light shielding member 9, irradiation of the ink other than the pattern portion 4 with ultraviolet light was prevented.

Next, as shown in FIG. 1D, the platen 1 and the work 2 were lowered by the platen up-down mechanism 5, and the plate was separated to obtain a formed pattern. The external dimensions of the formed pattern on the substrate (work 2) are larger than the size of the opening of the screen plate 3. This dimensional difference was due to a so-called bleeding ink in which the ink entered the gap between the screen plate 3 and the substrate.

Next, the substrate was developed with water. As a result, the bleed ink was removed. It is considered that the reason for this is that the screen plate 3 blocked the irradiation of ultraviolet light with respect to the bleeding ink.

In the above steps, the printing pressure applied to the squeegee 6 is 0.1 kg / cm per squeegee length,
The printing speed was 3 cm / sec. The ink is NP manufactured by Noritake Kiki Co., Ltd. as a UV-sensitive glass ink.
-7803 was used. Irradiation with ultraviolet light was performed for 10 seconds at an illuminance of 100 mW / cm ² from a height of 30 cm.

As described above, in this embodiment, since the metal screen plate 3 having a light-shielding property is used, the ink filled in the openings of the screen plate 3 is irradiated with ultraviolet light. It is not irradiated to bleed ink. Therefore, there is an effect peculiar to the present embodiment that the bleeding ink is removed at the time of development so that the pattern size can be formed substantially equal to the size of the opening of the screen plate 3.

As a result, the line & space pattern could be formed with the same pattern width as the opening of the screen plate 3. Further, there was no disconnection of the line pattern, and the length and position accuracy of the pattern were good.

[Embodiment 2] FIG. 2 is a sectional view of a screen printing machine according to a second embodiment of the present invention. In FIG. 1, reference numeral 10 denotes a surface glass part that transmits ultraviolet light, 11 denotes a mirror that reflects ultraviolet light, and 12 denotes an optical path of the ultraviolet light 11.
Other elements are the same as those in FIG. 1, but the light shielding member is not included in the configuration because it is not necessary in the printing press of the present embodiment.

Using this apparatus, the screen plate 3 was irradiated with ultraviolet light from the substrate side, and the ink 7 was an ultraviolet-sensitive silver ink, NP-4 manufactured by Noritake Kiki Co., Ltd.
Screen printing was performed using a glass substrate on which no pattern was formed as the printing substrate 2 and using a metal screen plate as the screen plate 3.

First, in the same manner as in Example 1, the operations up to the point where the squeegee 6 was operated to spread the ink 7 were performed. In this state, bleeding ink is generated between the screen plate 3 and the substrate. Such bleeding ink may exert an adhesive force between the screen plate 3 and the substrate, and the adhesive force inhibits dissociation between the screen plate 3 and the substrate when the plate is released, causing a phenomenon that the screen plate 3 is excessively stretched. The screen plate 3 may be damaged.

Next, the squeegee 6 is operated, and ultraviolet light is irradiated from the substrate surface side to irradiate the ink filled in the opening of the screen plate 3 with the ultraviolet light as well as the bleeding ink to cure it. The adhesive force acting between the screen plate 3 and the substrate was reduced, and the plate was easily separated. At this time, the platen 1 and the work 2 were lowered by the platen up / down mechanism 5 as in the first embodiment, and the plate was separated. Finally, development with water was performed to remove unnecessary ink.

As described above, the present embodiment has a specific effect that the adhesive force between the screen plate 3 and the substrate is reduced by curing the bleed ink, thereby preventing damage to members such as the screen plate 3. As a result, according to the present embodiment,
Plate separation can be performed favorably, disconnection of the line pattern can be prevented, and the length and position accuracy of the pattern can be improved.

[Example 3] A glass substrate without a pattern was prepared as a work 2 by using a plastic mask made of a polyester material as a screen plate 3.
Printing was performed under the same conditions as in Example 1 except that a line-and-space pattern was formed thereon.

At this time, since the screen plate 3 that transmits ultraviolet light was used, the ink in the openings of the screen plate 3 and the bleeding ink were ultraviolet-cured. As a result, the adhesive force between the screen plate 3 and the substrate is reduced, and an effect peculiar to the present embodiment that the members such as the screen plate 3 are prevented from being damaged when the plate is released is produced.

Therefore, no disconnection of the line pattern occurred. Also, the length dimension and position accuracy of the pattern were good.

Embodiment 4 FIG. 3A is a top view of a screen plate used in a screen printer according to a fourth embodiment of the present invention, and FIG. 3B is a top view of FIG. FIG. 3 is a sectional view taken along line AB of FIG. In the figure, 13 is a screen printing plate, 14 is an opening provided on the screen printing plate 13,
Reference numeral 15 denotes a half-bridge portion having a structure connected on the squeegee surface side of the screen printing plate 13, and 16 denotes a light-shielding film provided at a portion other than the opening on the back surface of the screen printing plate 13 and the half-bridge portion 15. The screen plate is obtained by forming an opening 14 with an excimer laser on a plastic lithographic plate having a light shielding film 16 made of a carbon film.
The carbon film is formed on the substrate surface side of the screen plate, and when forming the half-etched portion (half bridge portion 15), the carbon film is removed because the excimer laser irradiation is performed from the substrate surface side. It has ultraviolet light transmittance.

Using this screen plate, printing was performed under the same conditions as in Example 1 except that a line-and-space pattern was formed on a glass substrate on which no pattern was formed. At this time, when the squeegee was operated, a part of the ink filled in the opening 14 flowed into the half etching portion 15 of the screen plate. For this reason, even a screen plate in which a part of the line pattern was not completely opened was obtained on the substrate as a line pattern without disconnection.

According to the present embodiment, since a plastic screen plate having a light-shielding property is used, the ink filled in the openings 14 of the screen plate is irradiated with ultraviolet light, but the bleeding ink is not irradiated. This has the unique effect that the bleeding ink can be removed during development so that the pattern size can be formed substantially equal to the size of the opening 14 of the screen plate.

Further, since the half bridge 15 provided in a part of the opening 14 has transparency, in the present embodiment, the ink under the half bridge 15 is also cured, so that a line pattern without disconnection can be produced. It has the unique effect of being able to.

As a result, according to the present embodiment, it is possible to prevent occurrence of disconnection of the completed line pattern, and it is also possible to improve the length and position accuracy of the pattern.

[Embodiment 5] FIG. 4 is a perspective view showing a main part of a screen printing machine according to a fifth embodiment of the present invention. In the drawing, reference numeral 17 denotes a high-pressure mercury lamp box, 18 denotes a slit provided on the screen plate side of the high-pressure mercury lamp box 17 and emits light to the outside, 19 denotes a squeegee, 20 denotes a screen plate, and 21 denotes a squeegee 19. This is a linear irradiation area irradiated on the screen plate 20 after the scraping. Since the lamp box 17 is linked with the movement of the squeegee 19 at a constant speed, the irradiation area 21 is
On the screen plate 20 that has been scraped in 9, it moves while keeping the distance to the squeegee 19 constant. The ultraviolet light irradiation area 21 on the screen plate 20 has a linear shape parallel to the squeegee 19.

With this configuration, printing was performed under the same conditions as in Example 4 except that the screen plate 20 was irradiated with ultraviolet light while moving the ultraviolet light irradiation area 21 at the same speed as the movement of the squeegee 19.

As a result, since the time from when the ink enters the opening of the screen plate 20 until it is irradiated with ultraviolet rays is the same at any place of the screen plate 20, the spread of the ink at the opening is reduced. Exposure was possible under the same conditions. As a result, an effect peculiar to the present embodiment was obtained in that the uniformity of the printed pattern shape was increased.

Further, since the half bridge provided in a part of the opening has transparency, the ink under the half bridge is also cured, and a line pattern free from disconnection can be produced. It worked.

As a result, a good printing result with little variation in the width of the line pattern was obtained. In addition, no disconnection of the completed line pattern occurred, and the length and position accuracy of the pattern were good.

In the present embodiment, the linear irradiation area 21 interlocking with the squeegee 19 is formed on the squeegee side of the screen plate 20. However, the present invention is not limited to this. The irradiation area 21 may be formed on the surface side.

[Embodiment 6] FIG. 5 is a perspective view showing a main part of a screen printing machine according to a sixth embodiment of the present invention. In the figure, reference numerals 17 to 21 denote the same elements as those in FIG. Reference numeral 22 denotes a camera that reads a pattern on the screen plate 20, and 23 denotes a computer that determines the illuminance on the screen plate 20 according to the pattern on the screen plate 20 read by the camera 22. That is, as compared with the fifth embodiment, the irradiation intensity of the ultraviolet rays can be adjusted according to the pattern on the screen plate 20.
When the irradiation area 21 comes on the half bridge 0, the adjustment is performed so that the illuminance on the screen plate 20 is increased. The illuminance adjustment uses a filter (not shown) for lowering the illuminance, and inserts the filter by a filter control mechanism (not shown) in front of the slit 18 of the lamp box 17 when the portion other than the half bridge is the irradiation area 21. This is done by doing.

Using the configuration shown in FIG.
The printing was performed under the same conditions as in Example 5 except that the illuminance was adjusted to be strong when the irradiation area 21 came on the half bridge.

As a result, by changing the illuminance on the half bridge and the opening, the illuminance attenuated by the half bridge is corrected, and the curing degree of the ink over the entire line pattern is made uniform. Was played.

Since the time from when the ink enters the opening to when it is irradiated with ultraviolet rays is the same at any place of the screen plate 20, the spread of the ink at the opening is exposed under the same conditions. As a result, the effect peculiar to the present embodiment that the uniformity of the finished pattern shape is increased.

Further, since the half bridge provided in a part of the opening has transparency, the ink under the half bridge is also cured, and a line pattern free from disconnection can be produced. It worked.

As a result, a good printing result with little variation in the width of the line pattern was obtained. In addition, no disconnection of the completed line pattern occurred, and the length and position accuracy of the pattern were good.

Example 7 After the ink was spread as shown in FIG. 1 (b), the screen plate was irradiated with infrared light from above, and then the ultraviolet light was irradiated from the substrate side. Screen printing was performed under the same conditions. At this time, the infrared irradiation was performed for 20 minutes using a hand-held infrared lamp under the condition that the pattern portion of the screen plate was at 80 ° C.

According to this, since a metal screen plate having a light-shielding property is used, the ink filled in the openings of the screen plate is irradiated with ultraviolet light, but the blurred ink is irradiated with ultraviolet light. Not done. Therefore, there is an effect peculiar to the present embodiment that the blurred ink can be removed at the time of development to form the pattern size substantially equal to the size of the opening of the screen plate.

As a result, the line & space pattern could be formed with the same pattern width as the opening of the screen plate. Also, there was no disconnection of the line pattern, and the length and position accuracy of the pattern were good.

[Embodiment 8] FIG. 6 is a partial sectional view of an image forming apparatus according to an eighth embodiment of the present invention. Example 2
This is an image forming apparatus using an electron source in which wirings and the like are formed by screen printing described above and a plurality of surface conduction electron-emitting devices are arranged. In the figure, reference numeral 401 denotes an electron source substrate made of soda lime glass; and 402, 403, and 404, element electrodes formed by offset printing. 407, 408, 40
Reference numeral 9 denotes a printed wiring having a thickness of about 7 microns, which is obtained by printing Ag ink by the screen printing of Example 2 and then baking it. The device electrodes 402, 403, and 404 are printed wiring 4
07, 408, and 409, respectively. 405, 4
06 is a thickness of about 200 obtained by applying and baking an organic metal solution.
It is a thin film made of Angstrom Pd fine particles, and is formed by patterning into a desired shape as a conductive film by a lift-off method using a Cr mask so as to be disposed at the device electrodes 402, 403, and 404 and a portion between the electrodes. Things.

Reference numeral 415 denotes a glass substrate made of soda lime glass, which faces the electron source substrate 401 at a distance of 5 mm. Reference numerals 416 and 417 denote phosphors, and the substrate 415
The element electrodes 402, 403, and 404 disposed on the opposing electron source substrate 401 are formed at positions corresponding to portions between the electrodes. Phosphors 416, 41
No. 7 is formed by applying a slurry obtained by mixing a phosphor with a photosensitive resin, drying the slurry, and then patterning the slurry by photolithography. 418 performs a filming process on the phosphors 416 and 417,
Approximately 300 Å thick Al by vacuum evaporation
This is a metal back obtained by forming a thin film and firing it to burn out the film layer. The one in which the phosphors 416 and 417 and the metal back 418 are formed on the glass substrate 415 is called a face plate.
419 is a grid electrode arranged between the electron source substrate 401 and the face plate.

The above-mentioned electron source substrate 401, face plate, and grid electrode 419 are arranged in a vacuum envelope, and a voltage is applied between the wirings 407, 408, and 409 to conduct the energization of the thin films 405, 406. Thereby, the electron emission portions 413 and 414 can be obtained. Thereafter, the metal back 418 is used as an anode electrode, and a voltage of 5 kV for extracting electrons is applied to the metal back 418 to form wirings 407, 408, 40
9 through the device electrodes 402 and 403
When a voltage of 14 V is applied to 13, electrons can be emitted. The emitted electrons can be modulated by changing the voltage of the grid 419 to adjust the amount of emitted electrons to irradiate the phosphor 416. This allows the phosphor 416 to emit light arbitrarily. Similarly, electrons can be emitted by applying a voltage of 14 V from the device electrodes 403 and 404 to the electron emission portion 414. The emitted electrons are modulated by changing the voltage of the grid 419, and the amount of emitted electrons applied to the phosphor 417 can be adjusted. Thereby, the phosphor 417
Can be arbitrarily emitted.

Although the configuration for two display pixels has been described in FIG. 6, the number of display pixels is not limited to this. Wiring and grids are formed in a matrix, and a large number of electron-emitting devices are arranged. By driving in this manner, an arbitrary image can be displayed by a large number of display pixels.

[Embodiment 9] FIG. 7 shows a method of manufacturing an image forming apparatus according to a ninth embodiment of the present invention.
FIG. 4 is a top view showing a step of manufacturing a surface conduction electron-emitting device substrate (electron source substrate) of an image forming apparatus by forming wirings using a screen printer such as No. 4; The electron source substrate of the image forming apparatus manufactured as described above can be formed as an image forming apparatus by further arranging a face plate on which a fluorescent substance is arranged to face the electron source substrate and forming a vacuum container. In FIG. 2, 2 is formed on a blue glass substrate (not shown) in the form of a matrix together with wiring.
Although only 4 × 2 electron-emitting devices are shown, a large number of devices are actually formed.

In the figure, reference numeral 501 denotes an element electrode formed by offset printing. This element electrode 501
In this embodiment, the pattern is formed by arranging a pair of rectangular electrodes with a gap of 20 μm in a matrix. Reference numeral 502 denotes a lower printed wiring formed by baking printed Ag ink, and reference numeral 503 denotes a strip-shaped insulating layer formed by baking printed glass ink and orthogonal to the lower printed wiring 502. The insulating layer 503 has a cutout opening 504 at one electrode position of the pair of element electrodes 501. Reference numeral 505 denotes an upper printed wiring formed by baking the printing Ag ink, which is arranged and formed in a strip shape on the insulating layer 503, and has an opening 5 in the insulating layer 503.
The portion 04 is electrically connected to one electrode of the device electrode 501. The lower wiring 502, the insulating layer 503, and the upper wiring 505 are all formed by a screen printing method according to the present invention. Reference numeral 506 denotes a thin film made of Pd fine particles as an electron-emitting material, and is formed on an inter-electrode portion of each pair of the device electrodes 501 and on the electrodes.

To manufacture a surface conduction electron-emitting device substrate, first, as shown in FIG. 7A, a 40 cm square electron source substrate on which a plurality of device electrodes 501 are arranged is prepared. Next, as shown in FIG.
Printing using a silver ink, which is a conductive ink, by the screen printing method described in
A lower wiring 502 having a thickness of 12 μm and a thickness of 12 μm is formed.

Next, as shown in FIG. 7C, an interlayer insulating film 503 is formed in a direction orthogonal to the lower wiring 502 by the screen printing method described in the first embodiment. As an ink material, a glass ink containing lead oxide as a main component and a glass binder and a resin is used. The printing and baking of the glass ink is repeated twice to form the interlayer insulating film 503 in a stripe shape.

Next, as shown in FIG. 7D, an upper layer wiring 505 having a width of 100 μm and a thickness of 12 μm is formed on the interlayer insulating film 503 by the screen printing method described in the first embodiment. As described above, the stripe-shaped lower wiring 502 and the stripe-shaped upper wiring 50 are interposed via the interlayer insulating film 503.
The matrix wiring in which 5 are orthogonal to each other is formed.

Next, an electron emitting portion is formed. First, a droplet of an organic palladium aqueous solution is applied to the substrate on which the element electrode 501 and the wirings 502 and 505 are formed as described above by an inkjet method, and a heat treatment is performed at 300 ° C. for 10 minutes. , Pd having a desired shape is formed. The conductive thin film 506 is made of P
It is composed of fine particles having d as a main element and has a thickness of 10
nm. The fine particle film here is a film in which a plurality of fine particles are aggregated, and refers to not only a state in which the fine particles are individually dispersed and arranged, but also a film in a state in which the fine particles are adjacent to each other or overlapped (including an island shape). The particle diameter refers to the diameter of the fine particles recognizable in the above state. This completes the manufacture of the electron source substrate (surface conduction electron-emitting device substrate) before forming as shown in FIG.

Using this electron source substrate, an image forming apparatus can be manufactured as follows. That is, first,
An electron source substrate in which 480 × 480 electron-emitting devices are arranged in a matrix on a substrate of 40 cm square is placed in a vacuum envelope together with a face plate having phosphors corresponding to R, G and B. Deploy. Next, energization processing such as forming and activation steps of the electron-emitting device is performed. Thus, the manufacture of the image forming apparatus is completed.

An arbitrary voltage signal of 14 V is applied to the upper printed wiring 505 of the electron source substrate of the image forming apparatus manufactured as described above, and a potential of 0 V is sequentially applied to the lower printed wiring 502 to perform scanning and other operations. When the lower printed wiring was set to a potential of 7 V and an anode voltage of 5 kV was applied to the metal back of the face plate, an arbitrary image could be displayed.

[0087]

As described above, according to the present invention, a simple pattern can be formed on a printing material with the same dimensional accuracy as that of the original pattern of the screen printing plate. Therefore, a highly accurate screen printing pattern can be obtained. Further, according to the method of manufacturing an image forming apparatus of the present invention which can use such a printing machine, an image forming apparatus having good characteristics can be manufactured.

[Brief description of the drawings]

FIG. 1 is a sectional view of a screen printing machine according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a screen printer according to a second embodiment of the present invention.

FIG. 3 is a top view of a screen plate used in a screen printing machine according to a fourth embodiment of the present invention and its AB
It is a line sectional view.

FIG. 4 is a perspective view showing a main part of a screen printing machine according to a fifth embodiment of the present invention.

FIG. 5 is a perspective view showing a main part of a screen printing machine according to a sixth embodiment of the present invention.

FIG. 6 is a partial sectional view of an image forming apparatus according to an eighth embodiment of the present invention.

FIG. 7 is a top view illustrating a step of manufacturing a surface conduction electron-emitting device substrate (electron source substrate) of an image forming apparatus in a method of manufacturing an image forming apparatus according to a ninth embodiment of the present invention.

FIG. 8 is a diagram showing a schematic configuration of a surface conduction electron-emitting device according to a conventional example.

FIG. 9 is a diagram showing a schematic configuration of an image display device using a surface conduction electron-emitting device according to a conventional example.

FIG. 10 is a perspective view showing an example of a conventional screen printing machine.

FIG. 11 is a side view of FIG.

[Explanation of symbols]

1: Work surface plate, 2: Work, 3: Screen version, 4:
Pattern part, 5: platen vertical mechanism, 6: squeegee, 7: ink, 8: ultraviolet light lamp, 9: light blocking member, 10: glass plate part, 11: mirror, 12: optical path of ultraviolet light, 13: screen Plate lithography, 14: opening, 15: half bridge, 16: light shielding film, 17: high-pressure mercury lamp box, 1
8: slit, 19: squeegee, 20: screen version,
21: irradiation area, 22: camera, 23: computer, 40
1: electron source substrate, 402, 403, 404: device electrode,
405, 406: thin film, 407, 408, 409: printed wiring, 413, 414: electron emitting portion, 415: glass substrate, 416, 417: phosphor, 418: metal back,
419: grid electrode, 501: element electrode, 502: lower printed wiring, 503: insulating layer, 504: opening, 505:
Upper printed wiring, 506: thin film.

Continued on front page F-term (reference) 2C035 AA06 FC07 FD01 FD15 FD52 FD55 FF22 FF26 2H113 AA01 AA05 BA10 BA13 BA47 BB09 BB22 BC12 CA17 FA10 FA35 2H114 AB12 AB15 AB17 BA05 DA03 DA04 DA56 EA05 GA11

Claims (13)

[Claims] 1. A printing method comprising: disposing a screen plate and an object to be printed so that the distance between the screen plate and the printing material is substantially zero; filling an opening in the screen plate with ink with a squeegee; A screen printing machine, comprising: an ultraviolet light irradiating means for irradiating the filled ink with ultraviolet light after filling the ink and before releasing the plate. 2. The screen printing machine according to claim 1, wherein said ink is a negative type ultraviolet light-sensitive ink. 3. The screen plate according to claim 1, wherein the screen plate blocks ultraviolet light, and the ultraviolet light irradiating unit irradiates ultraviolet light from a squeegee side of the screen plate. Screen printing machine as described. 4. The screen plate according to claim 1, wherein said screen plate transmits ultraviolet light, and said ultraviolet light irradiation means irradiates ultraviolet light from a squeegee side of said screen plate. Screen printing machine as described. 5. The screen plate partially has a half-bridge structure, the half-bridge structure is a structure in which a squeegee side is connected and transmits ultraviolet light, and the screen plate has the half-bridge structure. The screen printing according to claim 1 or 2, wherein ultraviolet light is shielded except for a portion, and the ultraviolet light irradiating means irradiates ultraviolet light from a squeegee side of the screen plate. Machine. 6. The screen printing machine according to claim 1, wherein said ultraviolet light irradiating means irradiates ultraviolet light from a printing material side of said screen plate. 7. The screen printer according to claim 1, wherein the ultraviolet light irradiating means irradiates the entire surface of the screen plate with ultraviolet light. . 8. The ultraviolet light irradiation means according to claim 1, wherein the ultraviolet light irradiation means moves the irradiation position in conjunction with the movement of the squeegee to irradiate the ultraviolet light. A screen printing machine according to claim 1. 9. The ultraviolet light irradiating means irradiates ultraviolet light by moving an irradiation position in conjunction with the movement of the squeegee, and irradiates the ultraviolet light when irradiating a portion of the half bridge structure. The screen printer according to claim 5, wherein the illuminance of light is increased. 10. A light shielding means for preventing the ultraviolet light irradiating means from irradiating the ultraviolet light to ink other than the pattern portion on the screen plate.
10. The screen printer according to any one of claims 9 to 9. 11. The screen printing machine according to claim 1, further comprising means for irradiating the screen plate or the printing medium with infrared light. 12. The printing plate is arranged such that the distance between the screen plate and the printing material is substantially zero, the opening of the screen plate is filled with ink with a squeegee, and the plate is released. In the screen printing method to be performed, the filled ink is irradiated with ultraviolet light after the filling of the ink and before separation from the plate. 13. The method according to claim 12, further comprising the step of forming wiring for the device electrodes on a substrate on which device electrodes for forming electron-emitting devices are formed by the screen printing method according to claim 12. A method for manufacturing an image forming apparatus using an emission element.