JP2000246617A - Magnetic disk substrate texture machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce scratches and the abrasion grains stuck to the surface of a hard disk. SOLUTION: A polishing tape 3 passed round the rollers 1 and 2 of a polishing supply device comprising Langevin type vibrators 12 and a polishing tape 6 passed round the rollers 4 and 5 are secured above a hard disk 7. The polishing liquid supplied from a polishing liquid tank 20, when passing through a supply pipe 19 and the polishing liquid supply passage 18 of the Langevin type vibrators 12 and goes out of a horn 16a, is atomized to be sprayed, but since this atomized slurry is uniformly stuck to the surfaces of the polishing tapes 3 and 6, texture is uniformly machined by a small quantity of slurry. In addition, since abrasive grains comprising diamonds and alumina condensed are scattered by ultrasonic vibration, the scratches and the abrasion grains stuck on the surface of the hard disk 7 are reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk substrate texturing apparatus for uniformly texturing a magnetic disk substrate. More specifically, the present invention relates to a method for uniformly depositing slurry abrasive grains on a polishing tape surface. The present invention relates to a magnetic disk substrate texture processing apparatus for uniformly texturing a magnetic disk substrate.

[0002]

2. Description of the Related Art Conventionally, as a texturing method, for example, tape grinding using a fixed abrasive type polishing tape or slurry grinding in which a slurry of free abrasive grains is adhered to the surface of a polishing tape for grinding is known. ing.

[0003] Among the above-mentioned conventional texturing processes, slurry grinding is preferably employed because it can reduce the occurrence of clutches on the substrate surface as compared with the case of tape grinding.

In the above-mentioned slurry grinding, as shown in FIG. 4 and FIG. 5, a total of four polishing tables 2a to 2
A texture processing device has been proposed in which d is fed out of the polishing tape rolls 3a to 3d in parallel and pressed against the substrate 1 by four contact rolls 4a to 4d having a rotation axis on the diametrical line of the substrate 1. At this time, the contact rolls 4a to 4d are pressed against the surface of the substrate 1 with a predetermined pressure by the roll holding cylinder 5 and the rods 6a to 6b.

In the above-mentioned texture processing apparatus, the polishing tapes 2a to 2d are supplied from the polishing tape rolls 3a to 3d and run in the direction of arrow B so that a new surface always comes into contact with the substrate 1. Polishing tape 2a-2d
Is wound on winding rolls 9a to 9d, and the contact rolls 4a to 4d are configured to vibrate in the direction of arrow C by a vibrating device (not shown).

Further, the polishing tapes 2a to 2d are in the vicinity of the position where the polishing tapes 2a to 2d are in contact with the base 1, generally the running polishing tapes 2a to 2d.
Polishing nozzles 7a and 7b are provided upstream of the contact portion d.
The polishing slurry is configured to be discharged and adhered toward the surfaces of the polishing tapes 2a to 2d. Therefore, the polishing tapes 2a to 2d are supplied from the tape rolls 3a to 3d, and the polishing tapes 2a to 2d are supplied by the contact rolls 4a to 4d.
d is pressed against the rotating base 1 and the polishing liquid is supplied from the polishing nozzles 7a to 7d to form the contact roll 4a.
When 〜4d is vibrated, the substrate 1 is ground and textured.

[0007]

However, in such a texture processing apparatus, there is a problem that the slurry to be dropped is not uniformly attached to the polishing tape, so that uniform texturing cannot be performed.

Further, abrasive grains such as diamond and alumina condensed in the slurry, and the condensed grains sometimes scratched the surface of the substrate, called a scratch, or pierced the surface of the substrate.

Further, in the above-mentioned conventional texture processing apparatus, in order to obtain a more uniform slurry adhesion state, an excessive amount of slurry must be dripped in excess of the amount actually contributing to the processing.

[0010]

SUMMARY OF THE INVENTION According to the present invention, after a slurry is applied to a polishing tape by a slurry supply device,
The magnetic disk substrate is textured by pressing the polishing tape on which the slurry adheres to both surfaces of the rotating magnetic disk substrate by rollers. The slurry is atomized by a vibrator, and the slurry supply device may be one in which a passage for passing the slurry is formed at the center of the Langevin type vibrator, or the slurry supply device may be a Langevin type vibrator. The slurry may be supplied to the vibrating surface.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, the slurry is atomized by an ultrasonic vibrator, so that the slurry is uniformly adhered to the surface of the polishing tape to perform uniform texturing, and the abrasive grains condensed in the slurry are formed. Can be dispersed by ultrasonic vibration to reduce scratches on the substrate surface.

By atomizing the slurry, even a small amount of slurry can be uniformly adhered to the polishing tape.
The amount of slurry used can be reduced.

[0013]

FIG. 1 is a block diagram of a slurry supply apparatus according to an embodiment of the present invention. In a Langevin type vibrator 12, ultrasonic vibrators 13 and 14 are formed of a metal block 15 having a metal block 15 and a tip horn 16a. The power supply device 17 is connected to the ultrasonic vibrators 13 and 14, and further passes through substantially the centers of the ultrasonic vibrators 13 and 14 and the metal blocks 15 and 16. A slurry supply passage 18 is formed, and a supply pipe 19 is connected to the slurry supply passage 18, and a slurry tank 20 is connected to the supply pipe 19.

FIG. 2 is a block diagram of a texture processing apparatus according to an embodiment of the present invention.
Reference numerals 4 and 5 denote rollers, 6 is a polishing tape, 7 is a hard disk, 17 is a power supply device, 19 is a supply pipe, and 20 is a polishing tank. However, in the present embodiment, the polishing tape 3 is applied to the polishing supply device shown in FIG.
The polishing liquid supplied from the polishing liquid tank 20 mounted on the polishing tape 6 and the hard disk 7 wrapped around the rollers 4 and 5 passes through the supply pipe 19 and the Langevin-type vibrator 1
After passing through the polishing liquid supply passage 18 of No. 2 and leaving the horn 16a, it is atomized and sprayed on the surfaces of the polishing tapes 3, 6, and this atomized slurry is uniformly spread on the surfaces of the polishing tapes 3, 6. , And uniform texturing is performed with a small amount of slurry. Further, since abrasive grains such as diamond and alumina condensed by the slurry are dispersed by ultrasonic vibration, scratches on the surface of the hard disk 7 and piercing of the abrasive grains are reduced.

FIG. 3 is a block diagram of a texture processing apparatus according to another embodiment of the present invention, wherein 1 and 2 are rollers, 3 is an abrasive tape, 4 and 5 are rollers, 6 is an abrasive tape, 7 is a hard disk, 17 is a hard disk, , A power supply device; 19, a supply pipe; and 20, a polishing tank. These components are the same as those in the above-described embodiment.
The polishing tape 3 hung on the roller 4, the polishing tape 6 hung on the rollers 4 and 5, and the Langevin-type vibrator 21 provided with the inclined surface 21b at the tip above the hard disk 7 are attached.
The polishing liquid is dripped from the polishing liquid tank 20 through the supply pipe 19 onto the inclined surface 21b of the Langevin type vibrator 21,
The polishing liquid dropped onto the inclined surface 21b of the Langevin type vibrator 21 is atomized by the ultrasonically oscillating inclined surface 21b by the oscillation power from the power supply device 17, and is sprayed on the surfaces of the polishing tapes 3 and 6. However, since the atomized slurry is uniformly attached to the surfaces of the polishing tapes 3, 6, uniform texture processing is performed with a small amount of slurry. or,
Since abrasive grains such as diamond and alumina condensed in the slurry are dispersed by ultrasonic vibration, scratches on the surface of the hard disk 7 and piercing of the abrasive grains are reduced.

In the above-described embodiment, the example in which the Langevin type vibrators 12 and 21 are used as the slurry supply device has been described. However, the Langevin type vibrators may be used obliquely and may be used. Ultrasonic transducers can also be used.

[0017]

As described above, in the texture processing apparatus of the present invention, the slurry is atomized by the ultrasonic vibrator and is uniformly dispersed on the surface of the polishing tape. Processing is performed,
Since the abrasive grains such as diamond and alumina condensed in the slurry are dispersed by the ultrasonic vibration, there is an advantage that the scratches on the surface of the hard disk and the piercing of the abrasive grains are reduced.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an abrasive supply device according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a disk polishing apparatus according to an embodiment of the present invention.

FIG. 3 is a configuration diagram of a disk polishing apparatus according to another embodiment of the present invention.

FIG. 4 is a configuration diagram of a conventional disk polishing apparatus.

FIG. 5 is a configuration diagram of a conventional disk polishing apparatus.

[Explanation of symbols]

 1, 2 roller 3 polishing tape 4, 5 roller 6 polishing tape 7 hard disk 12 Langevin type vibrator 13, 14 ultrasonic vibrator 15, 16 metal block 17 power supply device 18 polishing liquid supply passage 19 supply pipe 20 polishing liquid tank 21 Langevin type vibrator

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Takeshi Yamamoto 20 Oyamacho Oyamazuka, Toyohashi City, Aichi Prefecture Honda Electronics Co., Ltd. (72) Inventor Yoshihiro Funai 20 Oyamazuka Oiwacho, Toyohashi City, Aichi Prefecture, Japan Inside of Ta Electronics Co., Ltd. (72) Inventor Hiroki Miura 20 Oyamazuka, Oiwa-cho, Toyohashi City, Aichi Prefecture Inside of Honda Electronics Co., Ltd. (72) Inventor Yoshihiko Shimada 3-10-6 Musashino, Akishima City, Tokyo F term (reference) 3C047 FF08 GG20 3C058 AA05 AC01 AC04 CA01 CB01 CB02 CB05 DA17

Claims (3)

[Claims] After the slurry is attached to the polishing tape by a slurry supply device, the magnetic tape substrate is textured by pressing the polishing tape to which the slurry is attached by rollers against both surfaces of the rotating magnetic disk substrate. In the texturing of a magnetic disk substrate, the slurry supply device atomizes the slurry by an ultrasonic vibrator. 2. A magnetic disk substrate texture processing apparatus according to claim 1, wherein said slurry supply device has a passage for passing said slurry formed at the center of a Langevin type vibrator. 3. The magnetic disk substrate texture processing apparatus according to claim 1, wherein said slurry supply apparatus supplies slurry to a vibrating surface of a Langevin type vibrator.