JP2000240979A - Dehumidifier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance dehumidification performance of a dehumidifier effectively. SOLUTION: Outer air OA is dehumidified through ventilation to an adsorbent layer X and the previously dehumidified outer air OA' or a mixture gas thereof with return air RA from a low dehumidification zone 1 is subjected to main dehumidification through ventilation to the adsorbent layer X. The adsorbent layer X used for previous dehumidification and main dehumidification is subjected to regeneration with high temperature regeneration air HA and regenerated adsorbent layer X is subjected to purging with purge air PA. In such a dehumidifier being reused for previous dehumidification and main dehumidification, a part OA" of the outer air OA' after previous dehumidification, a part of air SA after main dehumidification or a part of return air RA from the low dehumidification zone 1 is passed, as purge gas PA, to the adsorbent layer X being used for previous dehumidification and main dehumidification in purging process.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dehumidifying device used for forming a low humidity environment (low dew point environment) in an environmental test room, a manufacturing facility for articles that do not like the presence of moisture in the air, and the like. Pre-dehumidification is performed by ventilation to the adsorbent layer, and the outside air after the pre-dehumidification, or the mixture of the outside air after the pre-dehumidification and the return air from the low-humidification target area is separated from the adsorbent layer used for the pre-humidification. The main dehumidification is also performed by supplying air to the adsorbent layer that has a high adsorption capacity, the air after the main dehumidification is supplied to the area to be dehumidified, and the adsorbent layer used for each of the pre-dehumidification and the main dehumidification is used. Is reused in each of pre-dehumidification and main dehumidification through a regeneration process in which a high-temperature gas for regeneration is passed through the adsorbent layer and a purge process in which a purge gas is passed through the adsorbent layer after the regeneration process. It relates to a dehumidifier.

[0002]

2. Description of the Related Art Conventionally, in this type of dehumidifier, as shown in FIG. 6, two adsorbing rotors 3a and 3b, which are made up of an adsorbent layer X, are provided. Regarding 3a, a pre-processing area 5a through which the outside air OA passes through the rotor during the passage process, a regeneration processing area 6a through which the high-temperature regeneration gas HA passes through the rotor during the passage, and the outside air OA sent to the pre-processing area 5 And a purging process area 7a that passes through the rotor portion in the process of passing the diverted outside air oa as the purging gas PA and arranges them in the rotor rotation path in the rotor rotation direction in that order. A mixture MA of the outside air OA 'that has passed through the pre-treatment region 5a of the adsorption rotor 3a and the return air RA from the low-humidification target region 1
The main processing area 4b that ventilates the rotor part in the passage process, the regeneration processing area 6b that ventilates the rotor part in the passage of the high-temperature regeneration gas HA, and the diverted air ma from the air-fuel mixture MA that is sent to the main processing area 4b. The purging process area 7b that ventilates the rotor portion in the process of passing as the purging gas PA is arranged in the rotor rotation direction in that order and disposed on the rotor rotation path.

[0003] That is, the outside air OA is passed through the adsorbent layer X of the passing rotor portion in the pre-treatment area 5a of the pre-adsorption rotor 3a to pre-dehumidify by moisture absorption, and to reduce the outside air OA 'after the pre-dehumidification. Return RA from target area 1
The mixture MA with the main processing area 4b of the subsequent suction rotor 3b
In this case, the air is passed through the adsorbent layer X in the passage rotor portion to perform the main dehumidification by moisture adsorption, and the air SA after the main dehumidification is supplied to the low humidity target area 1.

In the pre-adsorption rotor 3a, the adsorbent layer X (rotor portion) used for the pre-dehumidification of the outside air OA in the pre-processing area 5a is regenerated in the regenerating processing area 6a following the pre-processing area 5a. And the purge processing area 7a following the regeneration processing area 6a.
Purge processing by the ventilation of
a, the adsorbent layer X (rotor part) used for the main dehumidification of the air-fuel mixture MA in the main processing area 4b is connected to the main processing area 4b in the latter-stage adsorption rotor 3b. In the regeneration processing zone 6b, the regeneration process is performed by the ventilation of the high-temperature gas HA for regeneration, and in the purge processing zone 7b subsequent to the regeneration processing zone 6b, the purge processing is performed by the ventilation of the divided air-fuel mixture ma, and then, again in the main processing zone 4b. The mixture was used for the main dehumidification of MA.

In FIG. 6, reference numeral 24 denotes a precooler for cooling the air-fuel mixture MA to be dehumidified so as to enhance the main dehumidifying effect in the latter-stage suction rotor 3b. Air SA after heated main dehumidification
After-coolers 26 and 27 are provided for the regeneration processing areas 6b and 6b of the rear-stage suction rotor 3b and the front-stage suction rotor 3a, respectively.
A regeneration heater that heats and generates the regeneration high-temperature gas HA supplied to 6a.

As a conventional apparatus using dehumidifying means other than the adsorption rotor for pre-dehumidification of the outside air OA, as shown in FIG. 7, instead of the pre-adsorption rotor 3a, the dehumidification for cooling the outside air OA below the dew point temperature is performed. In some cases, a cooling coil 28 is provided, and the outside air OA is pre-dehumidified by cooling and dehumidifying by the cooling coil 28 for dehumidification.

[0007]

However, in the latter conventional device (FIG. 7) using the dehumidifying cooling coil 28 for pre-dehumidifying the outside air OA, the cooling medium (for example, cold water or low-temperature brine) used in the dehumidifying cooling coil 28 is used. , The cooling temperature of the outside air OA is limited by the temperature of the outside air OA, so that the outside air OA cannot be pre-dehumidified to a sufficiently low humidity.
In order to obtain the air of the required low humidity as A, a large-sized and large-capacity post-suction rotor 3b is required, and there is a problem that the entire apparatus becomes large and the cost of the apparatus is increased. Even if the rotor 3b is used, there is a limit, and there is also a problem that it is not possible to cope with the demand for the generation of lower-humidity air.

[0008] The two suction rotors 3 of the former stage and the latter stage are used.
In the former conventional apparatus (FIG. 6) using a and b, outside air O
As compared with the apparatus using the dehumidifying cooling coil 28 for the pre-dehumidification of A, the outside air OA can be pre-dehumidified to a lower humidity, but in any case, the adsorbent layer is used as the purge gas PA in the purge processing area 7a of the pre-stage adsorption rotor 3a. X (the passing rotor portion) is affected by the retained moisture of the diverted outside air oa
The adsorbent layer X (rotor portion) adsorbed to the pre-treatment zone 5a after the purge treatment zone 7a has a considerably high amount of adsorbed moisture, and therefore the amount of dehumidification from the ventilated outside air OA in the pre-treatment zone 5a is low. However, the same type of problem still remains that a large-sized and large-capacity post-stage suction rotor 3b is required, and that it is not possible to cope with the requirement of producing lower-humidity air.

In view of this situation, a first object of the present invention is to
In order to be able to more effectively pre-dehumidify the outside air, the dehumidification performance of the entire device is greatly improved.
A second object of the present invention is to make it possible to effectively reduce the size of the entire apparatus while obtaining high dehumidifying performance.

[0010]

Means for Solving the Problems [1] In the invention according to claim 1, the outside air is pre-dehumidified by ventilating the adsorbent layer, and the outside air after the pre-dehumidification or the outside air after the pre-dehumidification is removed. The air-fuel mixture with the return air from the dehumidification target area is mainly dehumidified by ventilating the adsorbent layer in a state where the adsorption capacity is higher than the adsorbent layer used for the pre-dehumidification, and the air after the main dehumidification is removed. A regeneration process in which the adsorbent layer used for the pre-dehumidification and the main dehumidification is supplied to the low-humidity target area, and a high-temperature gas for regeneration is passed through the adsorbent layer, and the adsorbent after the regeneration process In a dehumidifier that reuses each of the pre-dehumidification and the main dehumidification through a purge process of passing a purge gas through a layer, the adsorbent used for each of the pre-dehumidification and the main dehumidification as the purge treatment In the layer, part of the outside air after the pre-dehumidification, or before Some of the air after the main dehumidification, or, a configuration of ventilating a portion of return air from the humidity-target area as the purge gas.

In other words, in this configuration, the air which has been dehumidified to have a lower humidity than the diverted outside air before pre-dehumidification used as the purging gas in the pre-adsorption rotor of the conventional apparatus described above (that is, one of the above-mentioned outside air after pre-humidification). Part, or a part of the air after the main dehumidification, or a part of the return air from the dehumidification target area) as the purge gas, and the adsorbent layer used for the pre-dehumidification of the outside air is purged. The adsorbent layer used for pre-dehumidification has a large amount of adsorbed water due to the effect of the water content of the purge gas, which effectively eliminates the limitation of the amount of dehumidification from outside air being low. The pre-dehumidification of the outside air can be performed by the adsorbent layer in a low state, and thus the pre-dehumidification of the outside air can be performed more effectively than the conventional devices described above. Humidity can be greatly reduced.

In addition, since the humidity of the outside air after the pre-dehumidification can be greatly reduced, the dehumidification load in the main dehumidification can be reduced, and the humidity of the air after the main dehumidification can be effectively reduced. In addition, due to the decrease in the humidity of the outside air after the pre-dehumidification, the purge gas for the adsorbent layer used for the main dehumidification (that is, a part of the outside air after the pre-dehumidification, or a part of the air after the main dehumidification, or , Part of the return air from the target area), the humidity is also reduced, and the main dehumidification can be performed by the adsorbent layer with a lower amount of adsorbed water, so the air humidity after the main dehumidification is further improved Can be reduced.

That is, from these, the dehumidifying performance of the entire apparatus can be greatly improved as compared with the above-mentioned conventional apparatuses, and the air having the required low humidity can be obtained while reducing the apparatus size and the apparatus cost. Can be obtained, and it is possible to cope with the generation of lower-humidity air which cannot be handled by each conventional device.

[2] In the invention according to claim 2, after using the adsorbent layer in the order of the main dehumidification and the pre-dehumidification, the adsorbent layer is subjected to the regeneration treatment and the purge treatment, and then to the main dehumidification and the pre-dehumidification again. The configuration is used in the order of dehumidification.

In other words, in this configuration, the main dehumidification load is reduced due to a large decrease in the humidity of the outside air after the pre-dehumidification as described above, and the main dehumidification ability itself is improved, so that the adsorbent layer after the main dehumidification is used. The main dehumidification and the pre-dehumidification of the outside air are sequentially performed using the same adsorbent layer that has undergone the regeneration treatment and the purge treatment, paying attention to the fact that it can be sufficiently used for the pre-dehumidification.

According to this configuration, the main dehumidification and the pre-dehumidification of the outside air are sequentially performed using the same adsorbent layer.
When the main dehumidification and the pre-dehumidification are each performed using a dedicated adsorbent layer, it is possible to avoid a difference in the degree of deterioration and a difference in the service life of each adsorbent layer, thereby enabling maintenance management of the adsorbent layer. Can be easier.

[3] In the invention according to claim 3, there is provided an adsorption rotor in which the adsorbent layer is continuously arranged in a rotor rotation direction as a rotor constituent material, and the main dehumidification target is provided in a rotation path of the adsorption rotor. A main processing area for ventilating the rotor portion in the process of passing air, a preprocessing region for ventilating the rotor portion in the process of passing the outside air to be subjected to the pre-dehumidification, and a regeneration in which the high-temperature gas for regeneration passes through the rotor portion in the process of passing. The processing region and the purging region through which the purging gas passes through the rotor during the passage of the purging gas are arranged in the rotor rotation direction in that order.

That is, in this configuration, the main dehumidification is performed by the adsorbent layer of the rotor portion in the process of passing through the main processing area among the one adsorbing rotor having the adsorbent layer as a constituent material. Preliminary dehumidification of the outside air is performed by the adsorbent layer (that is, the adsorbent layer used for the main dehumidification) of the rotor portion in the process of passing through the pretreatment region located in the lower part in the rotor rotation direction.

Further, the adsorbent layer of the rotor portion (that is, the adsorbent layer used for pre-dehumidification) in the process of passing through the regenerating processing region located in the rotor rotation direction on the lower side of the pre-processing region is regenerated. The regenerating process is performed by passing high-temperature gas for use, and the adsorbent layer of the rotor portion in the process of passing through the purging process region located in the rotor rotation direction below the regenerating process region (that is, after the regenerating process is sent to the main processing region) The adsorbent layer) is purged by ventilation of a purge gas, whereby the main adsorbent, the pre-dehumidification of the outside air, the regeneration process, and the purging process are performed in a single adsorber rotor while the adsorbent layer of each part of the rotor is performed. With regard to the above, the same adsorbent layer is used in the order of main dehumidification and pre-dehumidification in accordance with the rotation of the rotor, then subjected to regeneration processing and purge processing, and then used again in the order of main dehumidification and pre-dehumidification.

That is, according to this configuration, since the pre-dehumidification and the main dehumidification are performed by one adsorption rotor while the high dehumidification performance is obtained as described above, the pre-dehumidification and the main dehumidification are performed as in the above-described conventional apparatus. As compared with a configuration using separate suction rotors, the apparatus configuration can be simplified, the entire apparatus can be extremely effectively compacted, and the apparatus cost can be further reduced. Maintenance and management can be further facilitated.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, reference numeral 1 denotes a dry room as a low-humidity target area for manufacturing an article (for example, an optical disk or a chemical) which dislikes the presence of moisture in the air.
A dehumidifier 2 using a suction rotor is provided in the dry room 1.
Is supplied with air SA (for example, 0.013 g / kg (DA) absolute humidity, 13 ° C. dry bulb humidity) produced by the method described above, and the dry room 1 is supplied with the low-humidity air SA to obtain a required low-humidity atmosphere. (For example, 0.07 g / k absolute humidity)
g (DA), dry-bulb temperature 23 ° C.).

The adsorbing rotor 3 in the dehumidifying device 2 has an air-permeable adsorbent layer X using an adsorbent such as activated carbon as a rotor constituent material and is continuously arranged in the direction of rotation of the rotor. As shown in the figure, a disk-shaped suction rotor 3 is provided to allow gas to pass in the direction of the rotor rotation axis P.

The rotation path of the suction rotor 3 is divided into four areas in the rotor rotation direction: a main processing area 4, a pre-processing area 5, a regeneration processing area 6, and a purge processing area 7.
Are arranged in the rotation direction of the rotor in the order described above, so that the respective parts of the rotor are divided into the main processing area 4, the pre-processing area 5, the regeneration processing area 6, the purge processing area 7 as the suction rotor 3 rotates.
Transition in the order of

In the main processing area 4, the main dehumidification target air M
By passing air through the rotor portion in the process of passing A (that is, the rotor portion having a high adsorption capacity of the adsorbent layer X after the regeneration process), the main dehumidification target air MA is dehumidified (main dehumidification) by moisture adsorption by the adsorbent. In the pre-processing area 5 subsequent to the main processing area 4, the outside air OA introduced from the outside air introduction path 8 is passed through the rotor part in the passage process in the same ventilation direction as the main processing area 4 as the target air for dehumidification, so that the outside air is introduced. The OA is dehumidified (pre-dehumidified) by moisture adsorption due to the residual adsorption capacity of the adsorbent.

Further, in the regeneration processing zone 6 subsequent to the pre-processing zone 5, the high-temperature gas for regeneration HA is passed through the rotor portion in the passage process in the direction opposite to that of the main processing zone 4 and the pre-processing zone 5, The adsorbent layer X that has adsorbed moisture in the main treatment area 4 and the pretreatment area 5 is subjected to regeneration treatment by desorption of adsorbed moisture by the high-temperature gas for regeneration HA. In the purge treatment area 7 following the regeneration treatment area 6,
The purge gas PA is passed through the rotor portion in the passage process in the same ventilation direction as the main processing area 4 and the pre-processing area 5, so that the regeneration gas remaining in the adsorbent layer X is obtained prior to the transition to the next main processing area 4. The high temperature gas HA for use is eliminated and the adsorbent layer X is cooled.

With respect to the configuration of the air path of the dehumidifier 2, the processed outside air OA 'after passing through the pre-processing area 5 is supplied to the air paths 9 and 10.
And is combined with the return air RA from the dry room 1 guided by the return air passage 11, and the treated outside air O
The combined air-fuel mixture of A ′ and return air RA is sent to the main processing area 4 as the main dehumidifying air MA through the air passage 12, and a part of the processed outside air OA ′ after passing through the pre-processing area 5. O
A "is diverted from the air passages 9 and 10, and the diverted treated outside air OA" is sent to the purge processing area 7 as a purge gas PA through the air passage 13.

That is, the outside air OA introduced from the outside air introduction passage 8
Is pre-dehumidified in the pre-treatment area 5, and the outside air OA 'after this pre-dehumidification
A mixture of air and return air RA from the dry room 1 is mainly dehumidified in the main processing area 4, and the air SA after the main dehumidification is supplied to the dry room 1 through the air passage 14.

In the purging zone 7, a part OA ″ of the outside air OA ′ whose humidity has been reduced by the pre-dehumidification is purged by the purging gas P.
By performing the purging treatment of the adsorbent layer X as A, the amount of adsorbed water of the adsorbent layer X used for the next dehumidification becomes high under the influence of the retained water of the purge gas PA, and the dehumidification in the next dehumidification process In order to avoid that the amount is limited to a low amount, the adsorbent layer X in a state where the amount of adsorbed water is sufficiently low allows the next main dehumidification and pre-dehumidification to be performed.

Reference numeral 15 denotes an aftercooler for cooling the air SA after the main dehumidification, which has been heated by the main dehumidification due to moisture adsorption in the main processing area 4, and 16 is a regeneration for heating and generating the high-temperature gas HA for regeneration sent to the regeneration processing area 6. In this example, the used purge gas PA ′ after passing through the purge processing area 7 (that is, the pre-humidification diverted outside air O used after the purge processing).
A ″) is led to a regeneration heater 16 through an air passage 17 and heated, and the heated air is sent to the regeneration processing area 6 as a regeneration high-temperature gas HA.

Further, after passing through the regeneration processing area 6, the used high temperature gas for regeneration H discharged to the outside through the air passage 18 is used.
A part of the HA ′ of A ′ is diverted, and the diverted gas HA ″ is merged with the used purge gas PA ′ in the air passage 17 through the return line 19, whereby the high-temperature regeneration gas HA is partially circulated. When used, the amount of heating required by the regeneration heater 16 is reduced, and a large amount of ventilation of the regeneration high-temperature gas HA to the regeneration processing area 6 is ensured.

Numeral 20 denotes an air passage for mixing outside air OA with a mixture of the used purge gas PA 'and the diverted gas HA "guided by the return line 19. The air passage is regenerated by adjusting the amount of outside air mixed. Adjust the humidity of the high-temperature gas HA.
Reference numeral 21 denotes an exhaust path for exhausting room air having an air volume corresponding to the air volume introduced into the dry room 1 to the outside as exhaust air EA.

In FIG. 1, air flow rates (m ³ / H, at 20 ° C.), absolute humidity (g / kg (DA)), and dry-bulb temperature (DB ° C.) are illustrated as examples of the device specifications. It is.

[Another Embodiment] In the above-described embodiment, an example was shown in which part OA "of the outside air OA 'after pre-dehumidification was used as the purge gas PA. However, instead of this, as shown in FIG. Part of the air SA after the main dehumidification SA 'is purged with gas P
A is sent to the purge treatment area 7 through the air passage 22 as A, whereas the whole amount of the outside air OA 'after the pre-dehumidification is combined with the return air RA from the low humidity reduction target area 1 and the combined air-fuel mixture is mainly used. The air MA to be dehumidified may be sent to the main processing area 4.

Further, as shown in FIG.
A part of the return air RA from the air is sent to the purge treatment area 7 through the air passage 23 as the purge gas PA, while the whole amount of the outside air OA 'after the pre-dehumidification is discharged from the area 1 to be dehumidified. The combined air-fuel mixture may be combined with the rest of the return air RA and sent to the main processing area 4 as the main dehumidification target air MA.

In each of the above-described embodiments, a cooling coil for cooling the main dehumidified air MA sent to the main processing area 4, a cooling coil for cooling the purge gas PA sent to the purge processing area 7, or a pre-processing area Pre-humidification target outside air O sent to 5
A cooling coil for cooling A may be provided, and the adsorbing capacity of the adsorbent may be increased by gas cooling by these cooling coils to further improve the dehumidifying performance.

In each of the above-described embodiments, one suction rotor 3
Although an example in which the main dehumidification and the pre-dehumidification of the outside air are performed has been shown in FIG. 5, in some cases, as shown in FIG. 5, the pre-dehumidification of the outside air OA is performed in the pre-treatment area 5a of the pre-adsorption rotor 3a, and In the type in which the main dehumidification is performed in the main processing area 4b of the main adsorption section 3b, the outside air OA after the pre-dehumidification is used as a purge gas PA in each of the purge processing area 7a of the first-stage adsorption rotor 3a and the purge processing area 7b of the second-stage adsorption rotor 3b. ′ And a part MA ′ of a mixed gas mixture MA of the return air RA from the target area 1 (or a part of the air SA after the main dehumidification or a part of the return air RA from the target area 1). May be sent. In FIG. 5, 24 is a precooler, 25 is an aftercooler, and 26 and 27 are heaters for regeneration.

In each of the above embodiments, the outside air O after the pre-dehumidification
Although an example in which a mixture of A ′ and the return air RA from the low-humidification target area 1 is used as the main dehumidification target air MA is shown, only the outside air OA ′ after the pre-dehumidification is used as the main dehumidification target air MA. Alternatively, a whole outside air system may be adopted.

The suction rotor is not limited to a disk-shaped rotor that allows gas to pass in the direction of the axis of the rotary shaft, but a cylindrical rotor that allows gas to pass in the direction of the radius of rotation, or an endless rotor that allows gas to pass in a direction perpendicular to the belt surface. A belt-shaped rotor may be used. Alternatively, instead of using an adsorption rotor, the main dehumidification target air MA, the pre-dehumidification target external air OA, the regeneration high temperature gas HA, and the purge gas PA are switched in this order with respect to the fixed adsorbent layer. Adsorption tower type which ventilates may be adopted.

In the purging process, the purge gas PA, which has been reduced in humidity and flows through the adsorbent layer X used for each of the pre-dehumidification and the main dehumidification, is partially OA ″ of the outside air OA ′ after the pre-dehumidification.
Either part SA 'of the air SA after the main dehumidification or part RA' of the return air RA from the dehumidification target area 1 may be used, and the part of the air OA ", SA ', RA' My 2
It may be a mixture of three or three species.

Area 1 to be dehumidified to send air SA after main dehumidification
Any specific application and zone configuration may be used. In some cases, the air SA after the main dehumidification may be further dehumidified by another dehumidifying means before use.

[Brief description of the drawings]

FIG. 1 is a diagram showing an overall configuration of an apparatus.

FIG. 2 is a perspective view of a suction rotor.

FIG. 3 is a device configuration diagram showing another embodiment.

FIG. 4 is an apparatus configuration diagram showing another embodiment.

FIG. 5 is a device configuration diagram showing another embodiment.

FIG. 6 is a device configuration diagram of a conventional device.

FIG. 7 is a device configuration diagram of another conventional device.

[Explanation of symbols]

 Reference Signs List 1 Dehumidification target area 3 Adsorption rotor 4 Main processing area 5 Pre-processing area 6 Regeneration processing area 7 Purge processing area HA High-temperature gas for regeneration MA Main dehumidification target air OA External air OA 'External air after pre-dehumidification PA Purging gas RA Return air SA Air after main dehumidification X Adsorbent layer

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[Procedure amendment]

[Submission Date] April 7, 2000 (200.4.7)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0002

[Correction method] Change

[Correction contents]

[0002]

2. Description of the Related Art Conventionally, in this type of dehumidifying apparatus, as shown in FIG. 4 , two adsorbing rotors 3a and 3b having an adsorbent layer X as a constituent material are provided. Regarding 3a, a pre-processing area 5a through which the outside air OA passes through the rotor during the passage process, a regeneration processing area 6a through which the high-temperature regeneration gas HA passes through the rotor during the passage, and the outside air OA sent to the pre-processing area 5 And a purging process area 7a that passes through the rotor portion in the process of passing the diverted outside air oa as the purging gas PA and arranges them in the rotor rotation path in the rotor rotation direction in that order. A mixture MA of the outside air OA 'that has passed through the pre-treatment region 5a of the adsorption rotor 3a and the return air RA from the low-humidification target region 1
The main processing area 4b that ventilates the rotor part in the passage process, the regeneration processing area 6b that ventilates the rotor part in the passage of the high-temperature regeneration gas HA, and the diverted air ma from the air-fuel mixture MA that is sent to the main processing area 4b. The purging process area 7b that ventilates the rotor portion in the process of passing as the purging gas PA is arranged in the rotor rotation direction in that order and disposed on the rotor rotation path.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0005

[Correction method] Change

[Correction contents]

In FIG . 4 , reference numeral 24 denotes a pre-cooler for increasing the main dehumidification effect in the downstream suction rotor 3b by cooling the air-fuel mixture MA to be mainly dehumidified. Air SA after heated main dehumidification
After-coolers 26 and 27 are provided for the regeneration processing areas 6b and 6b of the rear-stage suction rotor 3b and the front-stage suction rotor 3a, respectively.
A regeneration heater that heats and generates the regeneration high-temperature gas HA supplied to 6a.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0006

[Correction method] Change

[Correction contents]

As a conventional apparatus using dehumidifying means other than the adsorption rotor for pre-dehumidification of the outside air OA, as shown in FIG. 5 , instead of the pre-adsorption rotor 3a, the dehumidification for cooling the outside air OA below the dew point temperature is performed. In some cases, a cooling coil 28 is provided, and the outside air OA is pre-dehumidified by cooling and dehumidifying by the cooling coil 28 for dehumidification.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction contents]

[0007]

However, in the latter conventional apparatus ( FIG. 5 ) using the dehumidifying cooling coil 28 for pre-dehumidifying the outside air OA, the cooling medium (for example, cold water or low-temperature brine) used in the dehumidifying cooling coil 28 is used. , The cooling temperature of the outside air OA is limited by the temperature of the outside air OA, so that the outside air OA cannot be pre-dehumidified to a sufficiently low humidity.
In order to obtain the air of the required low humidity as A, a large-sized and large-capacity post-suction rotor 3b is required, and there is a problem that the entire apparatus becomes large and the cost of the apparatus is increased. Even if the rotor 3b is used, there is a limit, and there is also a problem that it is not possible to cope with the demand for the generation of lower-humidity air.

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction contents]

[0008] The two suction rotors 3 of the former stage and the latter stage are used.
In the former device ( FIG. 4 ) using a and b, the outside air O
As compared with the apparatus using the dehumidifying cooling coil 28 for the pre-dehumidification of A, the outside air OA can be pre-dehumidified to a lower humidity, but in any case, the adsorbent layer is used as the purge gas PA in the purge processing area 7a of the pre-stage adsorption rotor 3a. X (the passing rotor portion) is affected by the retained moisture of the diverted outside air oa
The adsorbent layer X (rotor portion) adsorbed to the pre-treatment zone 5a after the purge treatment zone 7a has a considerably high amount of adsorbed moisture, and therefore the amount of dehumidification from the ventilated outside air OA in the pre-treatment zone 5a is low. However, the same type of problem still remains that a large-sized and large-capacity post-stage suction rotor 3b is required, and that it is not possible to cope with the requirement of producing lower-humidity air.

[Procedure amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

[0010]

Means for Solving the Problems [1] In the invention according to claim 1, the outside air is pre-dehumidified by ventilating the adsorbent layer, and the outside air after the pre-dehumidification or the outside air after the pre-dehumidification is removed. The air-fuel mixture with the return air from the dehumidification target area is mainly dehumidified by ventilating the adsorbent layer in a state where the adsorption capacity is higher than the adsorbent layer used for the pre-dehumidification, and the air after the main dehumidification is removed. A regeneration process in which the adsorbent layer used for the pre-dehumidification and the main dehumidification is supplied to the low-humidity target area, and a high-temperature gas for regeneration is passed through the adsorbent layer, and the adsorbent after the regeneration process In a dehumidifier that reuses each of the pre-dehumidification and the main dehumidification through a purge process of passing a purge gas through a layer, the adsorbent used for each of the pre-dehumidification and the main dehumidification as the purge treatment Main removal after the pre-dehumidification
A configuration is adopted in which a part of the outside air before the humidity is passed as the purge gas .

[Procedure amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0011

[Correction method] Change

[Correction contents]

In other words, in this configuration, air whose dehumidification is lower than that of the diverted outside air before pre-dehumidification used as a purge gas in the pre-adsorption rotor of the conventional apparatus described above (that is, after the pre-dehumidification and before the main dehumidification). Part of the outside air
Since the adsorbent layer used for pre-dehumidification of the outside air is purged using the gas for diluting, the amount of adsorbed water in the adsorbent layer used for pre-dehumidification becomes high due to the moisture retained in the gas for purging, and That the amount of dehumidification of water is limited to a low level can be effectively eliminated, and the pre-dehumidification of the outside air can be performed by the adsorbent layer in a state where the amount of adsorbed moisture is sufficiently low. In addition, the pre-dehumidification of the outside air can be performed more effectively, and the humidity of the outside air after the pre-dehumidification can be greatly reduced.

[Procedure amendment 9]

[Document name to be amended] Statement

[Correction target item name] 0012

[Correction method] Change

[Correction contents]

In addition, since the humidity of the outside air after the pre-dehumidification can be greatly reduced, the dehumidification load in the main dehumidification can be reduced, and the humidity of the air after the main dehumidification can be effectively reduced. In addition, due to the decrease in the humidity of the outside air after the pre-dehumidification, the humidity of the purge gas (that is, a part of the outside air after the above-described pre-dehumidification and before the main dehumidification) for the adsorbent layer used for the main dehumidification also decreases. Since the main dehumidification can be performed by the adsorbent layer having a lower amount of adsorbed water, the humidity of the air after the main dehumidification can be more effectively reduced.

[Procedure amendment 10]

[Document name to be amended] Statement

[Correction target item name] 0028

[Correction method] Change

[Correction contents]

In the purging zone 7, a part OA ″ of the outside air OA ′ whose humidity has been reduced by the pre-dehumidification (main removal after the pre-dehumidification) is performed.
By purging the adsorbent layer X using the part of the outside air OA 'before wet and before return air merging (OA') as the purge gas PA, the amount of adsorbed water in the adsorbent layer X used for dehumidification is purged. To avoid being limited by the influence of the water content of the use gas PA to increase the dehumidification amount in the next dehumidification process. Dehumidification and pre-dehumidification can be performed.

[Procedure amendment 11]

[Document name to be amended] Statement

[Correction target item name] 0033

[Correction method] Deleted

[Procedure amendment 12]

[Document name to be amended] Statement

[Correction target item name] 0034

[Correction method] Deleted

[Procedure amendment 13]

[Document name to be amended] Statement

[Correction target item name] 0035

[Correction method] Change

[Correction contents]

[Another Embodiment] In each of the above embodiments, a cooling coil for cooling the main dehumidification target air MA sent to the main processing area 4, a cooling coil for cooling the purge gas PA sent to the purge processing area 7, or Further, a cooling coil for cooling the outside air OA to be pre-dehumidified to be sent to the pre-treatment area 5 may be provided, and the adsorbing capacity of the adsorbent may be increased by gas cooling by these cooling coils to further improve the dehumidifying performance.

[Procedure amendment 14]

[Document name to be amended] Statement

[Correction target item name] 0036

[Correction method] Change

[Correction contents]

In each of the above-described embodiments, one suction rotor 3
Although an example of performing the main dehumidification and the pre-dehumidification of the outside air is shown in FIG. 3 , depending on the case, as shown in FIG. 3 , the pre-dehumidification of the outside air OA is performed in the pre-treatment area 5a of the pre-adsorption rotor 3a, and in the form of performing main dehumidifying the primary treatment zone 4b of 3b, purge treatment zone 7a of the front adsorption rotor 3a, and, to each of the purge treatment zone 7b of the subsequent adsorption rotor 3b, the main dehumidification予除analyzed is conditioned as a purge gas PA Part of the combined air-fuel mixture MA of the previous outside air OA 'and the return air RA from the target area 1 for dehumidification
MA 'may be sent . In FIG. 3 ,
24 is a precooler, 25 is an aftercooler, 26 and 27
Is a heater for regeneration.

[Procedure amendment 15]

[Document name to be amended] Statement

[Correction target item name] 0039

[Correction method] Change

[Correction contents]

In the purging process, the adsorbent layer X used for each of pre-dehumidification and main dehumidification is used as a purge gas PA.
Part OA "of outside air OA 'after pre-humidification and before main dehumidification
In addition, part of the air SA after the main dehumidification SA 'or the area to be reduced in humidity
A part RA ′ of the return air RA from 1 may be mixed.

[Procedure amendment 16]

[Document name to be amended] Statement

[Correction target item name] Brief description of drawings

[Correction method] Change

[Correction contents]

[Brief description of the drawings]

FIG. 1 is a diagram showing an overall configuration of an apparatus.

FIG. 2 is a perspective view of a suction rotor.

FIG. 3 is a device configuration diagram showing another embodiment.

FIG. 4 is a diagram showing the configuration of a conventional apparatus.

FIG. 5 is a device configuration diagram of another conventional device.

[Description of Signs] 1 Dehumidification target area 3 Adsorption rotor 4 Main processing area 5 Pre-processing area 6 Regeneration processing area 7 Purge processing area HA High-temperature gas for regeneration MA Main dehumidification target air OA Outside air OA 'Outside air after pre-dehumidification PA purge Gas RA Return air SA Air after main dehumidification X Adsorbent layer

[Procedure amendment 17]

[Document name to be amended] Drawing

[Correction target item name] All figures

[Correction method] Change

[Correction contents]

FIG.

FIG. 2

FIG. 3

FIG. 4

FIG. 5

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Naoto Nagayama 2-6-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo Stock Company In-house Company (72) Inventor Yasuyuki Takeshima 2-6-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo Stock Company Daiki company F term (reference) 3L053 BC03

Claims (3)

[Claims] 1. Preliminarily dehumidifying the outside air by passing air through the adsorbent layer, and mixing the outside air after the pre-dehumidification or the mixture of the outside air after the pre-dehumidification and the return air from the low-humidification target area with the air. The main dehumidification is mainly performed by ventilating the adsorbent layer having a higher adsorption capacity than the adsorbent layer used for the pre-dehumidification, and the air after the main dehumidification is supplied to the low-humidification target area. The adsorbent layer used for each of the dehumidification, through a regeneration process of passing a high-temperature regeneration gas through the adsorbent layer, and a purge process of passing a purge gas through the adsorbent layer after the regeneration process, A dehumidifier that reuses each of the pre-dehumidification and the main dehumidification, wherein, as the purging process, the adsorbent layer used for each of the pre-dehumidification and the main dehumidification, a part of the outside air after the pre-dehumidification, Or, a part of the air after the main dehumidification, or the object to be dehumidified Dehumidifier part of the return air are the construction of air as the purge gas from. 2. The method according to claim 1, wherein the adsorbent layer is used in the order of the main dehumidification and the pre-dehumidification, and then used again in the order of the main dehumidification and the pre-dehumidification after the regeneration treatment and the purge treatment. Item 2. A dehumidifier according to Item 1. 3. An adsorbing rotor in which the adsorbent layer is continuously arranged in the direction of rotor rotation using the adsorbent layer as a rotor constituent material, and a rotation path of the adsorbing rotor is passed through a rotor portion in a process of passing the target air for the main dehumidification. A main processing zone, a pre-processing zone for ventilating the rotor portion in the process of passing the target air for pre-dehumidification, a regeneration process zone for ventilating the rotor portion in the process of passing the high-temperature gas for regeneration, and the purging gas. 3. The dehumidifying apparatus according to claim 2, wherein the purging regions that ventilate the rotor portion in the passage process are arranged in the rotor rotation direction in that order.