JP2000233360A - ポリッシング装置 - Google Patents
ポリッシング装置Info
- Publication number
- JP2000233360A JP2000233360A JP3564099A JP3564099A JP2000233360A JP 2000233360 A JP2000233360 A JP 2000233360A JP 3564099 A JP3564099 A JP 3564099A JP 3564099 A JP3564099 A JP 3564099A JP 2000233360 A JP2000233360 A JP 2000233360A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- top ring
- polished
- turntable
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3564099A JP2000233360A (ja) | 1999-02-15 | 1999-02-15 | ポリッシング装置 |
US09/504,619 US6425809B1 (en) | 1999-02-15 | 2000-02-15 | Polishing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3564099A JP2000233360A (ja) | 1999-02-15 | 1999-02-15 | ポリッシング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000233360A true JP2000233360A (ja) | 2000-08-29 |
JP2000233360A5 JP2000233360A5 (de) | 2004-12-02 |
Family
ID=12447486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3564099A Pending JP2000233360A (ja) | 1999-02-15 | 1999-02-15 | ポリッシング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000233360A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002056356A1 (fr) * | 2001-01-15 | 2002-07-18 | Nikon Corporation | Procede de polissage, dispositif de polissage, et dispositif semi-conducteur permettant de produire ledit procede |
-
1999
- 1999-02-15 JP JP3564099A patent/JP2000233360A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002056356A1 (fr) * | 2001-01-15 | 2002-07-18 | Nikon Corporation | Procede de polissage, dispositif de polissage, et dispositif semi-conducteur permettant de produire ledit procede |
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Legal Events
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