JP2000233360A - ポリッシング装置 - Google Patents

ポリッシング装置

Info

Publication number
JP2000233360A
JP2000233360A JP3564099A JP3564099A JP2000233360A JP 2000233360 A JP2000233360 A JP 2000233360A JP 3564099 A JP3564099 A JP 3564099A JP 3564099 A JP3564099 A JP 3564099A JP 2000233360 A JP2000233360 A JP 2000233360A
Authority
JP
Japan
Prior art keywords
polishing
top ring
polished
turntable
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3564099A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000233360A5 (de
Inventor
Teruhiko Ichimura
照彦 市村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP3564099A priority Critical patent/JP2000233360A/ja
Priority to US09/504,619 priority patent/US6425809B1/en
Publication of JP2000233360A publication Critical patent/JP2000233360A/ja
Publication of JP2000233360A5 publication Critical patent/JP2000233360A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP3564099A 1999-02-15 1999-02-15 ポリッシング装置 Pending JP2000233360A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3564099A JP2000233360A (ja) 1999-02-15 1999-02-15 ポリッシング装置
US09/504,619 US6425809B1 (en) 1999-02-15 2000-02-15 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3564099A JP2000233360A (ja) 1999-02-15 1999-02-15 ポリッシング装置

Publications (2)

Publication Number Publication Date
JP2000233360A true JP2000233360A (ja) 2000-08-29
JP2000233360A5 JP2000233360A5 (de) 2004-12-02

Family

ID=12447486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3564099A Pending JP2000233360A (ja) 1999-02-15 1999-02-15 ポリッシング装置

Country Status (1)

Country Link
JP (1) JP2000233360A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002056356A1 (fr) * 2001-01-15 2002-07-18 Nikon Corporation Procede de polissage, dispositif de polissage, et dispositif semi-conducteur permettant de produire ledit procede

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002056356A1 (fr) * 2001-01-15 2002-07-18 Nikon Corporation Procede de polissage, dispositif de polissage, et dispositif semi-conducteur permettant de produire ledit procede

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