JP2000227659A5 - - Google Patents

Info

Publication number

JP2000227659A5

JP2000227659A5 JP1999030209A JP3020999A JP2000227659A5 JP 2000227659 A5 JP2000227659 A5 JP 2000227659A5 JP 1999030209 A JP1999030209 A JP 1999030209A JP 3020999 A JP3020999 A JP 3020999A JP 2000227659 A5 JP2000227659 A5 JP 2000227659A5

Authority

JP

Japan

Prior art keywords

group

alicyclic hydrocarbon

hydrocarbon group

positive photoresist

linear

Prior art date

1999-02-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 125000002723 alicyclic group Chemical group 0.000 claims 7
• 125000004432 carbon atoms Chemical group C* 0.000 claims 5
• 229920002120 photoresistant polymer Polymers 0.000 claims 5
• 125000000217 alkyl group Chemical group 0.000 claims 4
• 239000002253 acid Substances 0.000 claims 3
• 150000001875 compounds Chemical class 0.000 claims 2
• -1 alicyclic hydrocarbons Chemical class 0.000 claims 1
• 239000003513 alkali Substances 0.000 claims 1
• 229910052799 carbon Inorganic materials 0.000 claims 1
• 125000000753 cycloalkyl group Chemical group 0.000 claims 1
• 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 1
• 229910052731 fluorine Inorganic materials 0.000 claims 1
• 239000011737 fluorine Substances 0.000 claims 1
• YCKRFDGAMUMZLT-UHFFFAOYSA-N fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
• 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims 1
• 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims 1
• 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
• 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
• 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
• 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
• 239000011347 resin Substances 0.000 claims 1
• 229920005989 resin Polymers 0.000 claims 1
• 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• LSNNMFCWUKXFEE-UHFFFAOYSA-N sulfonic acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 claims 1
• 239000004094 surface-active agent Substances 0.000 claims 1