JP2000226217A - Heating furnace for dehydrative sintering of porous glass preform - Google Patents
Heating furnace for dehydrative sintering of porous glass preformInfo
- Publication number
- JP2000226217A JP2000226217A JP11027238A JP2723899A JP2000226217A JP 2000226217 A JP2000226217 A JP 2000226217A JP 11027238 A JP11027238 A JP 11027238A JP 2723899 A JP2723899 A JP 2723899A JP 2000226217 A JP2000226217 A JP 2000226217A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- furnace
- core tube
- porous glass
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Thermal Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、多孔質ガラス母材
を脱水し、焼結して透明ガラス化するための多孔質ガラ
ス母材の脱水焼結用加熱炉に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating furnace for dehydrating and sintering a porous glass base material for dehydrating a porous glass base material and sintering the glass base material into a transparent glass.
【0002】[0002]
【従来の技術】図4及び図5は、従来のこの種の多孔質
ガラス母材の脱水焼結用加熱炉の2種の構造を示したも
のである。2. Description of the Related Art FIGS. 4 and 5 show two types of conventional heating furnaces for dehydrating and sintering a porous glass base material of this kind.
【0003】これらの多孔質ガラス母材の脱水焼結用加
熱炉は、炉体1の中心部を貫通していて内部に多孔質ガ
ラス母材2を収容する石英ガラス等よりなる炉心管3
と、炉体1内で炉心管3の周囲に配置されて該炉心管3
内の多孔質ガラス母材2を加熱する電気ヒータの如き発
熱体4と、炉心管3と発熱体4との間で炉心管3の外周
を包囲して配置されたマッフル管5と、このマッフル管
5の外側で炉体1の内壁に沿って配置された断熱材6と
を主体として構成されている。図4に示す脱水焼結用加
熱炉においては発熱体4が1個の場合の例を示し、図5
に示す脱水焼結用加熱炉においては発熱体4が複数個
(この例では、5個)の場合の例を示している。炉心管
3は、その上部外周に一体に突設された石英製の環状の
鍔部7が炉体1の上面1aに載ることにより、またその
下部外周に一体に突設された石英製の環状の鍔部7が炉
体1の底面1bに載ることにより、炉体1に支持されて
いる。炉心管3の上端は上蓋8により塞がれており、こ
の上蓋8には多孔質ガラス母材2の出発母材2aを貫通
させる孔9があけられている。炉心管3の下端には処理
ガス導入口10が設けられ、炉心管3内にHeガスやC
l2 ガス等が供給されるようになっている。炉心管3の
上部には、炉心管3内の排気ガスを排出する排気口11
が設けられている。炉体1内には、ArガスやN2 ガス
等の不活性ガスが供給させるようになっている。[0003] These heating furnaces for dehydrating and sintering a porous glass preform are provided with a furnace tube 3 made of quartz glass or the like which penetrates a central portion of a furnace body 1 and accommodates a porous glass preform 2 therein.
Is disposed around the furnace tube 3 in the furnace body 1 and
A heating element 4 such as an electric heater for heating the porous glass preform 2 therein; a muffle tube 5 disposed between the furnace tube 3 and the heating element 4 so as to surround the outer periphery of the furnace tube 3; A heat insulating material 6 disposed outside the tube 5 along the inner wall of the furnace body 1 is mainly constituted. In the heating furnace for dehydration sintering shown in FIG. 4, an example in which one heating element 4 is provided is shown, and FIG.
In the heating furnace for dehydration sintering shown in FIG. 1, there is shown an example in which the number of heating elements 4 is plural (five in this example). The furnace tube 3 has a quartz annular flange 7 integrally projecting from the upper periphery thereof mounted on the upper surface 1a of the furnace body 1 and a quartz annular flange integrally projecting from the lower periphery thereof. Is supported on the furnace body 1 by being placed on the bottom surface 1b of the furnace body 1. The upper end of the furnace tube 3 is closed by an upper lid 8, and the upper lid 8 is provided with a hole 9 through which the starting base material 2 a of the porous glass base material 2 penetrates. A processing gas inlet 10 is provided at the lower end of the furnace tube 3, and He gas or C
l 2 gas or the like is supplied. An exhaust port 11 for discharging exhaust gas in the core tube 3 is provided at an upper portion of the core tube 3.
Is provided. An inert gas such as an Ar gas or a N 2 gas is supplied into the furnace body 1.
【0004】このような脱水焼結用加熱炉を用いた多孔
質ガラス母材2の脱水,焼結は、図4に示す発熱体4が
1個の場合には、該発熱体4を炉体1内の上下方向に動
かすか、固定された発熱体4に対して多孔質ガラス母材
2を上下方向に動かすことにより行われ、図5に示す発
熱体4が複数個の場合には、各発熱体4への通電を切り
換えて各発熱体4がそれぞれ作る加熱ゾーンを上下方向
に動かすことにより行われる。[0004] When the porous glass base material 2 is dehydrated and sintered by using such a heating furnace for dehydration and sintering, when the heating element 4 shown in FIG. 1 or by moving the porous glass base material 2 in the vertical direction with respect to the fixed heating element 4. In the case where there are a plurality of heating elements 4 shown in FIG. This is performed by switching the power supply to the heating elements 4 and moving the heating zones created by the respective heating elements 4 in the vertical direction.
【0005】[0005]
【発明が解決しようとする課題】近年、光ファイバの需
要増加に伴い、光ファイバ用の多孔質ガラス母材2の大
型化と長尺化が進み、これを脱水焼結してガラス化する
ための大型の加熱炉が必要になってきている。しかしな
がら、大型で長尺の多孔質ガラス母材2を脱水焼結する
際には、石英製の炉心管3が広範囲に渡って1500 ℃以
上に加熱されるため、石英が軟化して炉心管3が自重で
座屈変形してしまう問題点があった。In recent years, as the demand for optical fibers has increased, the size and length of the porous glass preform 2 for optical fibers has been increasing. Large heating furnaces are becoming necessary. However, when the large and long porous glass base material 2 is dehydrated and sintered, the quartz core tube 3 is heated to 1500 ° C. or more over a wide range, so that the quartz softens and the core tube 3 is heated. However, there is a problem that buckling deformation occurs due to its own weight.
【0006】本発明の目的は、高温加熱時に炉心管が自
重により座屈変形するのを防止できる多孔質ガラス母材
の脱水焼結用加熱炉を提供することにある。An object of the present invention is to provide a heating furnace for dehydrating and sintering a porous glass base material, which can prevent the core tube from buckling under its own weight during high-temperature heating.
【0007】本発明の他の目的は、高温加熱時に炉心管
が自重により座屈変形するのをマッフル管を利用して防
止できる多孔質ガラス母材の脱水焼結用加熱炉を提供す
ることにある。Another object of the present invention is to provide a heating furnace for dehydrating and sintering a porous glass base material, which can prevent the core tube from being buckled and deformed by its own weight during high-temperature heating by using a muffle tube. is there.
【0008】[0008]
【課題を解決するための手段】本発明は、炉体の中心部
を貫通していて内部に多孔質ガラス母材を収容する炉心
管と、炉体内で炉心管の周囲に配置されて該炉心管内の
多孔質ガラス母材を加熱する発熱体とを備えた多孔質ガ
ラス母材の脱水焼結用加熱炉を改良するものである。According to the present invention, there is provided a furnace tube penetrating a central portion of a furnace body and accommodating a porous glass base material therein, and the furnace tube disposed around the furnace tube in the furnace body. An object of the present invention is to improve a heating furnace for dehydrating and sintering a porous glass base material, comprising a heating element for heating a porous glass base material in a tube.
【0009】請求項1に記載の多孔質ガラス母材の脱水
焼結用加熱炉は、炉心管の外周には該炉心管自身の自重
をその長手方向に分割負担する炉心管自重分割負担手段
が設けられていることを特徴とする。The heating furnace for dehydrating and sintering a porous glass base material according to the first aspect of the present invention is characterized in that the outer periphery of the furnace tube is provided with a furnace tube self-weight dividing means for dividing the own weight of the furnace tube itself in the longitudinal direction. It is characterized by being provided.
【0010】このように炉心管の外周に、該炉心管自身
の自重をその長手方向に分割負担する炉心管自重分割負
担手段を設けると、炉心管自身の自重が該炉心管の長手
方向の複数箇所で分割負担されるので、高温加熱時に炉
心管が自重により座屈変形するのを防止することができ
る。As described above, when the core tube own weight dividing / loading means is provided on the outer periphery of the core tube so as to divide the own weight of the core tube itself in the longitudinal direction thereof, the own weight of the core tube itself becomes plural in the longitudinal direction of the core tube. Since the parts are divided and burdened, it is possible to prevent the core tube from being buckled and deformed by its own weight during high-temperature heating.
【0011】請求項2に記載の多孔質ガラス母材の脱水
焼結用加熱炉は、請求項1において、炉心管自重分割負
担手段が、炉心管の外周にその長手方向に所定間隔で突
設された複数の鍔部と、炉心管の外周で各鍔部を支える
炉心管自重受け手段とで構成されていることを特徴とす
る。According to a second aspect of the present invention, in the heating furnace for dehydrating and sintering a porous glass base material, the self-weight split bearing means for the core tube protrudes from the outer periphery of the core tube at predetermined intervals in the longitudinal direction thereof. And a plurality of flange portions provided, and core tube own weight receiving means for supporting each flange portion on the outer periphery of the core tube.
【0012】このように炉心管の外周にその長手方向に
所定間隔で突設された複数の鍔部と、炉心管の外周で各
鍔部を支える炉心管自重受け手段とで炉心管自重分割負
担手段を構成すると、炉心管自身の自重をその長手方向
の複数箇所で容易に分割負担させることができる。A plurality of flanges protruding from the outer periphery of the core tube at predetermined intervals in the longitudinal direction and the core tube own weight receiving means supporting each flange at the outer periphery of the core tube as described above. By configuring the means, the own weight of the core tube itself can be easily divided and loaded at a plurality of locations in the longitudinal direction.
【0013】請求項3に記載の多孔質ガラス母材の脱水
焼結用加熱炉は、請求項2において、炉心管自重受け手
段が、上下に隣接する各鍔部の間で炉心管の外周にそれ
ぞれ介在されて上側の鍔部に作用する炉心管の自重を負
担するマッフル管により構成されていることを特徴とす
る。According to a third aspect of the present invention, in the heating furnace for dehydrating and sintering a porous glass base material, the self-weight receiving means for the core tube may be provided on the outer periphery of the core tube between the vertically adjacent flanges. It is characterized by being constituted by a muffle tube which bears the own weight of the furnace tube which is interposed and acts on the upper flange portion.
【0014】このように炉心管自重受け手段を構成する
と、短尺の複数のマッフル管を利用して炉心管自重受け
手段を構成することができる。When the core tube self-weight receiving means is constituted as described above, the core tube self-weight receiving means can be constituted using a plurality of short muffle tubes.
【0015】請求項4に記載の多孔質ガラス母材の脱水
焼結用加熱炉は、請求項2において、炉心管自重受け手
段が、炉心管の外周に沿って配置されたマッフル管と、
炉心管の各鍔部に対応してマッフル管にそれぞれ設けら
れて各鍔部を支える複数の支え部とにより構成されてい
ることを特徴とする。According to a fourth aspect of the present invention, in the heating furnace for dehydrating and sintering a porous glass base material, the muffle tube is arranged such that the core tube own weight receiving means is arranged along the outer periphery of the core tube.
The muffle tube is provided corresponding to each flange portion of the furnace tube, and is constituted by a plurality of support portions that support each flange portion.
【0016】このように炉心管自重受け手段を構成する
と、長手方向に所定間隔で支え部を設けたマッフル管を
利用して炉心管自重受け手段を構成することができる。When the core tube self-weight receiving means is constituted as described above, the core tube self-weight receiving means can be constituted using a muffle tube provided with supporting portions at predetermined intervals in the longitudinal direction.
【0017】[0017]
【発明の実施の形態】図1(A)(B)は本発明に係る
多孔質ガラス母材の脱水焼結用加熱炉における実施の形
態の第1例を示したもので、図1(A)は該脱水焼結用
加熱炉の縦断端面図、図1(B)は該脱水焼結用加熱炉
で用いている炉心管自重分割負担手段の構成を示す斜視
図である。本例は、前述した図5に示す複数の発熱体4
を有するタイプの脱水焼結用加熱炉に本発明を適用した
例を示したもので、該図5と対応する部分には、同一符
号を付けて示している。1A and 1B show a first example of an embodiment of a heating furnace for dehydrating and sintering a porous glass base material according to the present invention. FIG. 1) is a longitudinal sectional view of the heating furnace for dehydration and sintering, and FIG. 1 (B) is a perspective view showing the structure of a core tube self-weight split burden means used in the heating furnace for dehydration and sintering. In this example, the plurality of heating elements 4 shown in FIG.
5 shows an example in which the present invention is applied to a heating furnace for dehydration sintering of the type having the following. In FIG. 5, portions corresponding to those in FIG.
【0018】本例の多孔質ガラス母材の脱水焼結用加熱
炉においては、石英製の炉心管3の外周に、該炉心管3
自身の自重をその長手方向に分割負担する炉心管自重分
割負担手段13が設けられている。この炉心管自重分割
負担手段13は、炉心管3の中間部の外周にその長手方
向に所定間隔で一体に環状に突設された石英製の複数の
鍔部7と、炉心管3の外周で各鍔部7を支える炉心管自
重受け手段14とで構成されている。本例では、炉心管
自重受け手段14は、上下に隣接する各鍔部7の間で炉
心管3の外周にそれぞれ介在されて上側の鍔部7に作用
する炉心管3の自重を負担する短尺のマッフル管5によ
り構成されている。これら短尺のマッフル管5は、上下
に隣接する各鍔部7間の長さに設定され、その装着を容
易にするために長手方向に沿って割り部5aが設けられ
た2つ割り構造になっている。これらマッフル管5は、
炭素繊維強化炭素等により構成されている。In the heating furnace for dehydrating and sintering the porous glass base material of the present embodiment, the furnace tube 3
A core tube own weight dividing / loading means 13 is provided, which divides its own weight in the longitudinal direction. The core tube own weight dividing / loading means 13 includes a plurality of quartz flanges 7 integrally and annularly projecting at predetermined intervals in the longitudinal direction on the outer periphery of an intermediate portion of the furnace tube 3, and the outer periphery of the furnace tube 3. It comprises a core tube own weight receiving means 14 for supporting each flange 7. In this example, the core tube self-weight receiving means 14 is a short length which is interposed between the upper and lower adjacent flange portions 7 on the outer periphery of the core tube 3 and acts on the upper flange portion 7 to bear its own weight. Of the muffle tube 5. These short muffle tubes 5 are set to the length between the flanges 7 vertically adjacent to each other, and have a split structure in which a split portion 5a is provided along the longitudinal direction to facilitate the installation. ing. These muffle tubes 5
It is made of carbon fiber reinforced carbon or the like.
【0019】このように炉心管3の外周に、該炉心管3
自身の自重をその長手方向に分割負担する炉心管自重分
割負担手段13を設けると、炉心管3自身の自重が該炉
心管3の長手方向の複数箇所で分割負担されるので、高
温加熱時に炉心管3が自重により座屈変形するのを防止
することができる。As described above, the core tube 3 is provided around the outer periphery of the core tube 3.
When the core tube own weight dividing / loading means 13 which divides its own weight in the longitudinal direction is provided, the own weight of the core tube 3 itself is divided and loaded at a plurality of locations in the longitudinal direction of the core tube 3, so that the core is not heated during high temperature heating. The tube 3 can be prevented from being buckled and deformed by its own weight.
【0020】また、炉心管自重分割負担手段13が、炉
心管3の外周にその長手方向に所定間隔で突設された複
数の鍔部7と、炉心管3の外周で各鍔部7を支える炉心
管自重受け手段14とで構成されていると、炉心管3自
身の自重をその長手方向の複数箇所で容易に分割負担さ
せることができる。Further, the core tube own weight dividing / loading means 13 supports a plurality of flanges 7 protruding from the outer periphery of the core tube 3 at predetermined intervals in the longitudinal direction thereof, and supports the respective flange portions 7 on the outer periphery of the core tube 3. With the core tube own weight receiving means 14, the own weight of the core tube 3 itself can be easily divided and loaded at a plurality of locations in the longitudinal direction.
【0021】特に、本例のように炉心管自重受け手段1
4が、上下に隣接する各鍔部7の間で炉心管3の外周に
それぞれ介在されて上側の鍔部7に作用する炉心管3の
自重を負担するマッフル管5により構成されていると、
短尺の複数のマッフル管5を利用して炉心管自重受け手
段14を構成することができる。In particular, the core tube own weight receiving means 1 as in this embodiment
4 is constituted by the muffle tube 5 which is interposed between the upper and lower adjacent flange portions 7 on the outer periphery of the core tube 3 and bears the weight of the core tube 3 acting on the upper flange portion 7,
The core tube own weight receiving means 14 can be constituted by using a plurality of short muffle tubes 5.
【0022】図2(A)(B)は本発明に係る多孔質ガ
ラス母材の脱水焼結用加熱炉における実施の形態の第2
例を示したもので、図2(A)は該脱水焼結用加熱炉の
縦断端面図、図2(B)は該脱水焼結用加熱炉で用いて
いる炉心管自重分割負担手段の構成を示す斜視図であ
る。本例も、前述した図5に示す複数の発熱体4を有す
るタイプの脱水焼結用加熱炉に本発明を適用した例を示
したものである。なお、前述した図1(A)(B)と対
応する部分には、同一符号を付けて示している。FIGS. 2A and 2B show a second embodiment of a heating furnace for dehydrating and sintering a porous glass base material according to the present invention.
FIG. 2 (A) is a longitudinal sectional view of the heating furnace for dehydration and sintering, and FIG. 2 (B) is a configuration of a furnace tube self-weight split burden means used in the heating furnace for dehydration and sintering. FIG. This example also shows an example in which the present invention is applied to a heating furnace for dehydration sintering of the type having a plurality of heating elements 4 shown in FIG. Note that parts corresponding to those in FIGS. 1A and 1B are denoted by the same reference numerals.
【0023】本例の多孔質ガラス母材の脱水焼結用加熱
炉においては、石英製の炉心管3の外周に、該炉心管3
自身の自重をその長手方向に分割負担する炉心管自重分
割負担手段13が設けられ、この炉心管自重分割負担手
段13が、炉心管3の中間部の外周にその長手方向に所
定間隔で一体に環状に突設された石英製の複数の鍔部7
と、炉心管3の外周で各鍔部7を支える炉心管自重受け
手段14とで構成されている点は、第1例と同様であ
る。In the heating furnace for dehydrating and sintering the porous glass base material of the present embodiment, the furnace tube 3
There is provided a core tube own weight dividing / loading means 13 for dividing the own weight in the longitudinal direction thereof, and the furnace tube own weight dividing / loading means 13 is integrally provided on the outer periphery of an intermediate portion of the furnace tube 3 at predetermined intervals in the longitudinal direction. A plurality of flanges 7 made of quartz protruding in a ring shape
It is the same as the first example in that it is constituted by core tube own weight receiving means 14 for supporting each flange portion 7 on the outer periphery of the core tube 3.
【0024】特に、本例の脱水焼結用加熱炉において
は、炉心管自重受け手段14が、炉心管3の外周に沿っ
て配置されたマッフル管5と、炉心管3の各鍔部7に対
応してマッフル管5にそれぞれ設けられて各鍔部7を支
える複数の支え部15とにより構成されている。このマ
ッフル管5も、炭素繊維強化炭素等により構成されてい
る。所要長さのマッフル管5の内周に長手方向に所定間
隔で支え部15を設けるために、本例では短尺のマッフ
ル管5を支え部15を介して交互に連結している。In particular, in the heating furnace for dehydration and sintering of the present embodiment, the furnace core tube own weight receiving means 14 includes the muffle tube 5 arranged along the outer periphery of the furnace tube 3 and the flanges 7 of the furnace tube 3. Correspondingly, it is constituted by a plurality of support portions 15 provided on the muffle tube 5 and supporting the respective flange portions 7. This muffle tube 5 is also made of carbon fiber reinforced carbon or the like. In order to provide the support portions 15 at predetermined intervals in the longitudinal direction on the inner circumference of the muffle tubes 5 of a required length, the short muffle tubes 5 are alternately connected via the support portions 15 in this example.
【0025】このように炉心管自重受け手段14を構成
すると、長手方向に所定間隔で支え部15を設けたマッ
フル管5を利用して炉心管自重受け手段14を構成する
ことができる。When the core tube self-weight receiving means 14 is configured in this manner, the core tube self-weight receiving means 14 can be configured using the muffle tube 5 provided with the support portions 15 at predetermined intervals in the longitudinal direction.
【0026】図3は本発明に係る多孔質ガラス母材の脱
水焼結用加熱炉における実施の形態の第3例を示した縦
断端面図である。本例は、前述した図4に示す1つの発
熱体4を有するタイプの脱水焼結用加熱炉に本発明を適
用した例を示したものである。なお、前述した図1
(A)(B)と対応する部分には、同一符号を付けて示
している。FIG. 3 is a longitudinal sectional end view showing a third embodiment of the heating furnace for dehydrating and sintering a porous glass base material according to the present invention. The present embodiment shows an example in which the present invention is applied to a heating furnace for dehydration sintering of the type having one heating element 4 shown in FIG. Note that FIG.
Parts corresponding to (A) and (B) are denoted by the same reference numerals.
【0027】本例の多孔質ガラス母材の脱水焼結用加熱
炉においては、図1(A)(B)に示す第1例が複数の
発熱体4を有するタイプであるのに対し、本例では1つ
の発熱体4を有するタイプである点で相違し、その他の
構成、特に炉心管自重分割負担手段13の構成は図1
(A)(B)に示す第1例と同様である。In the heating furnace for dehydrating and sintering the porous glass base material of the present embodiment, the first example shown in FIGS. 1A and 1B is a type having a plurality of heating elements 4, The example is different in that it is of a type having one heating element 4, and the other configuration, particularly the configuration of the core tube own weight split burden means 13, is shown in FIG.
(A) Similar to the first example shown in (B).
【0028】従って、炉心管自重分割負担手段13によ
る効果については、図1(A)(B)に示す第1例と同
様である。Therefore, the effect of the core tube self-weight division burden means 13 is the same as that of the first example shown in FIGS. 1 (A) and 1 (B).
【0029】[0029]
【発明の効果】本発明に係る多孔質ガラス母材の脱水焼
結用加熱炉では、炉心管の外周に、該炉心管自身の自重
をその長手方向に分割負担する炉心管自重分割負担手段
を設けているので、炉心管自身の自重が該炉心管の長手
方向の複数箇所で分割負担されるので、高温加熱時に炉
心管が自重により座屈変形するのを防止することができ
る。In the heating furnace for dehydrating and sintering a porous glass base material according to the present invention, a means for dividing the weight of the core tube itself in the longitudinal direction is provided on the outer periphery of the core tube. Since the furnace tube is provided, the own weight of the furnace tube itself is divided and loaded at a plurality of portions in the longitudinal direction of the furnace tube, so that the furnace tube can be prevented from being buckled and deformed by its own weight at the time of high-temperature heating.
【図1】(A)(B)は本発明に係る多孔質ガラス母材
の脱水焼結用加熱炉における実施の形態の第1例を示し
たもので、(A)は該脱水焼結用加熱炉の縦断端面図、
(B)は該脱水焼結用加熱炉で用いている炉心管自重分
割負担手段の構成を示す斜視図である。FIGS. 1A and 1B show a first example of an embodiment of a heating furnace for dehydrating and sintering a porous glass base material according to the present invention, and FIG. Longitudinal end view of the heating furnace,
(B) is a perspective view showing a configuration of a furnace core tube own weight division burden means used in the heating furnace for dehydration sintering.
【図2】(A)(B)は本発明に係る多孔質ガラス母材
の脱水焼結用加熱炉における実施の形態の第2例を示し
たもので、(A)は該脱水焼結用加熱炉の縦断端面図、
(B)は該脱水焼結用加熱炉で用いている炉心管自重分
割負担手段の構成を示す斜視図である。FIGS. 2A and 2B show a second example of an embodiment of a heating furnace for dehydration and sintering of a porous glass base material according to the present invention, and FIG. Longitudinal end view of the heating furnace,
(B) is a perspective view showing a configuration of a furnace core tube own weight division burden means used in the heating furnace for dehydration sintering.
【図3】本発明に係る多孔質ガラス母材の脱水焼結用加
熱炉における実施の形態の第3例を示した縦断端面図で
ある。FIG. 3 is a longitudinal sectional view showing a third example of the embodiment of the heating furnace for dehydrating and sintering the porous glass base material according to the present invention.
【図4】発熱体が1個の場合の従来の多孔質ガラス母材
の脱水焼結用加熱炉の構造を示す縦断端面図である。FIG. 4 is a longitudinal sectional view showing the structure of a conventional heating furnace for dehydration and sintering of a porous glass base material in the case of one heating element.
【図5】発熱体が複数個の場合の従来の多孔質ガラス母
材の脱水焼結用加熱炉の構造を示す縦断端面図である。FIG. 5 is a longitudinal sectional view showing the structure of a conventional heating furnace for dehydration and sintering of a porous glass base material when a plurality of heating elements are provided.
1 炉体 1a 上面 1b 底面 2 多孔質ガラス母材 2a 出発母材 3 炉心管 4 発熱体 5 マッフル管 5a 割り部 6 断熱材 7 鍔部 8 上蓋 9 孔 10 処理ガス導入口 11 排気口 13 炉心管自重分割負担手段 14 炉心管自重受け手段 15 支え部 DESCRIPTION OF SYMBOLS 1 Furnace body 1a Top surface 1b Bottom surface 2 Porous glass base material 2a Starting base material 3 Furnace tube 4 Heating element 5 Muffle tube 5a Split part 6 Heat insulating material 7 Flange part 8 Top lid 9 Hole 10 Processing gas inlet 11 Exhaust port 13 Furnace tube Own-weight division bearing means 14 Reactor core tube own-weight receiving means 15 Support
───────────────────────────────────────────────────── フロントページの続き (72)発明者 坂本 昌之 東京都千代田区丸の内2丁目6番1号 古 河電気工業株式会社内 Fターム(参考) 4G014 AH21 4G021 CA12 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Masayuki Sakamoto 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd. F-term (reference) 4G014 AH21 4G021 CA12
Claims (4)
質ガラス母材を収容する炉心管と、前記炉体内で前記炉
心管の周囲に配置されて該炉心管内の前記多孔質ガラス
母材を加熱する発熱体とを備えた多孔質ガラス母材の脱
水焼結用加熱炉において、 前記炉心管の外周には該炉心管自身の自重をその長手方
向に分割負担する炉心管自重分割負担手段が設けられて
いることを特徴とする多孔質ガラス母材の脱水焼結用加
熱炉。1. A furnace tube penetrating a central portion of a furnace body and accommodating a porous glass base material therein, and the porous glass disposed in the furnace body around the furnace tube and inside the furnace tube. A heating furnace for dehydrating and sintering a porous glass base material, comprising: a heating element for heating the base material; a core tube having its own weight divided along its longitudinal direction on the outer periphery of the furnace tube. A heating furnace for dehydrating and sintering a porous glass base material, wherein a heating means is provided.
心管の外周にその長手方向に所定間隔で突設された複数
の鍔部と、前記炉心管の外周で前記各鍔部を支える炉心
管自重受け手段とで構成されていることを特徴とする請
求項1に記載の多孔質ガラス母材の脱水焼結用加熱炉。2. The core tube's own weight dividing and bearing means includes a plurality of flanges protruding from an outer periphery of the core tube at predetermined intervals in a longitudinal direction thereof, and a core supporting the flanges on the outer periphery of the core tube. 2. The heating furnace for dehydrating and sintering a porous glass base material according to claim 1, wherein the heating furnace comprises a tube own weight receiving means.
する前記各鍔部の間で前記炉心管の外周にそれぞれ介在
されて上側の前記鍔部に作用する前記炉心管の自重を負
担するマッフル管により構成されていることを特徴とす
る請求項2に記載の多孔質ガラス母材の脱水焼結用加熱
炉。3. The core tube's own weight receiving means bears the own weight of the core tube acting on the upper flange portion between the respective vertically adjacent flange portions on the outer periphery of the core tube. The heating furnace for dehydrating and sintering a porous glass base material according to claim 2, wherein the heating furnace is constituted by a muffle tube.
の外周に沿って配置されたマッフル管と、前記炉心管の
前記各鍔部に対応して前記マッフル管にそれぞれ設けら
れて前記各鍔部を支える複数の支え部とにより構成され
ていることを特徴とする請求項2に記載の多孔質ガラス
母材の脱水焼結用加熱炉。4. The core tube self-weight receiving means is provided on the muffle tube corresponding to each of the muffle tubes arranged along the outer periphery of the core tube and the flanges of the core tube, respectively. 3. The heating furnace for dehydrating and sintering a porous glass base material according to claim 2, wherein the heating furnace is constituted by a plurality of support portions for supporting a flange portion.
Priority Applications (1)
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---|---|---|---|
JP02723899A JP3682383B2 (en) | 1999-02-04 | 1999-02-04 | Heating furnace for dehydration sintering of porous glass base material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02723899A JP3682383B2 (en) | 1999-02-04 | 1999-02-04 | Heating furnace for dehydration sintering of porous glass base material |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000226217A true JP2000226217A (en) | 2000-08-15 |
JP3682383B2 JP3682383B2 (en) | 2005-08-10 |
Family
ID=12215506
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JP02723899A Expired - Lifetime JP3682383B2 (en) | 1999-02-04 | 1999-02-04 | Heating furnace for dehydration sintering of porous glass base material |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010241674A (en) * | 2009-03-16 | 2010-10-28 | Furukawa Electric Co Ltd:The | Heating furnace for dehydrating and sintering porous glass preform |
JP2013032266A (en) * | 2011-06-27 | 2013-02-14 | Furukawa Electric Co Ltd:The | Heat treatment apparatus for porous glass preform |
JP2013249224A (en) * | 2012-05-31 | 2013-12-12 | Furukawa Electric Co Ltd:The | Heat treatment apparatus for porous glass preform |
-
1999
- 1999-02-04 JP JP02723899A patent/JP3682383B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010241674A (en) * | 2009-03-16 | 2010-10-28 | Furukawa Electric Co Ltd:The | Heating furnace for dehydrating and sintering porous glass preform |
US8897335B2 (en) | 2009-03-16 | 2014-11-25 | Furukawa Electric Co., Ltd. | Furnace for dehydrating and sintering porous glass preform |
JP2013032266A (en) * | 2011-06-27 | 2013-02-14 | Furukawa Electric Co Ltd:The | Heat treatment apparatus for porous glass preform |
JP2013249224A (en) * | 2012-05-31 | 2013-12-12 | Furukawa Electric Co Ltd:The | Heat treatment apparatus for porous glass preform |
Also Published As
Publication number | Publication date |
---|---|
JP3682383B2 (en) | 2005-08-10 |
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