JP2000223027A - Sealed container, method and apparatus for sealing thereof, sealing apparatus and sealing tool structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sealing container and a sealing method thereof capable of exhausting up to a high vacuum degree and of sealing under high vacuum. SOLUTION: In this sealing method wherein air is exhausted from an exhaust hole of a container to be sealed 1 by an exhausting means 10, the inside of the container 1 is a predetermined vacuum degree and then the exhaust hole is sealed, the sealing method comprises steps of air-tightly joining an exhausting member 7 communicated with the exhausting means 10 to an exhaust port member 2 disposed on the exhaust hole of the container 1, reducing pressure to be a predetermined vacuum degree by exhausting the container 1 with the exhausting means 10 through the exhaust port member 2 and the exhausting member 7, joining and sealing a sealing cover 3 to the exhaust port member 2, and separating the exhausting member 7 from the exhaust port member 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention mainly relates to a hermetically sealed container, such as a plasma display or a flat panel display using a cold cathode electron source such as a field emission type, which is hermetically sealed under reduced pressure. The present invention relates to a method for sealing a container to be hermetically sealed, a sealing device thereof, and a sealing device.

[0002]

2. Description of the Related Art In recent years, flat panel displays (hereinafter, referred to as FPDs) using liquid crystal, plasma, fluorescent display tubes, electroluminescence, cold cathode type electron-emitting devices, etc. have been developed from displays using CRT tubes. In.

[0003] FPDs are in great demand because of their small depth and light weight. In particular, among information devices, display devices are becoming thinner and more sophisticated, and a display function is provided by arranging a large number of fine fluorescent lamps, electron-emitting devices, and ultraviolet-emitting devices on a flat plate following a liquid crystal display panel. FPDs have been developed.

Here, the liquid crystal display panel device does not emit light by itself, but displays characters and symbols using the role of a shutter, whereas other FPD devices emit light themselves. In addition, it is said that high-luminance, high-contrast performance characteristics are excellent.

In particular, in recent years, a flat panel display using a cold cathode electron source such as a field emission type, a surface conduction emission type, or an MIM type uses a self-luminous type fluorescent material equivalent to that of a CRT tube, so that it has high brightness. , High contrast, and a wide viewing angle, the expectations are high.

[0006] On the other hand, conventionally, an exhaust hole is formed by machining a flat glass constituting a flat panel, and a frit glass is adhered to the exhaust hole made of a tubular glass whose hole is substantially concentric. As a material, the panel is connected to a vacuum pump and evacuated via this glass exhaust port member, and when the exhaust is completed, this exhaust port member is heated and melted by a burner, etc., welded and sealed. I was However, the exhaust port member after sealing protrudes from the outer surface of the flat panel container and is completely obstructive. In addition, since the exhaust port member is a glass tube, cracks may occur due to impact and vacuum leakage may occur.

In order to solve such problems, Japanese Patent Application Laid-Open Nos. 4-298944 and 6-13
As described in JP-A-9935 and JP-A-6-302279, in a method of manufacturing a display device, a display tube, and a flat display panel, an exhaust hole of a vacuum container (a container reduced in pressure to a required degree of vacuum). A sealing method has been proposed in which the sealing is performed using a lid member.

However, in the sealing method using the lid member described in each of the above publications, when the exhaust hole is sealed by the lid member, the periphery of the exhaust hole is formed by using an O-ring on the exhaust device side. Since the inside of the vacuum vessel is evacuated while being in close contact with the tubular exhaust member, this method is unsuitable especially for a vacuum vessel that requires evacuation to a high degree of vacuum.

[0009]

SUMMARY OF THE INVENTION The present invention has been made based on the above circumstances, and more particularly, to a sealed container capable of evacuating to a high degree of vacuum and sealing under a high vacuum, and a sealing container therefor. It is intended to provide a stopping method.

It is another object of the present invention to provide a sealing device with extremely low risk of vacuum leakage after sealing, a vacuum sealing device used for the sealing device, and the like.

[0011]

According to the present invention, in order to achieve the above object, the air is exhausted from an exhaust hole of a sealed container by an exhaust means, and the inside of the container is evacuated to a predetermined degree of vacuum. In the sealing method for sealing, a step of airtightly joining an exhaust member communicated with the exhaust unit to an exhaust port member provided in an exhaust hole of the container, and the exhaust unit evacuates the inside of the container by the exhaust unit. A pressure reducing step of exhausting the gas through the member and the exhaust member to a predetermined degree of vacuum, a step of joining and sealing a sealing lid to the exhaust port member, and a step of detaching the exhaust member from the exhaust port member. It is characterized by having.

[0012] In this case, as an embodiment of the present invention, for the mutual joining of the exhaust port member and the exhaust member, heat fusion using a remeltable adhesive is used. The solder is used, and the operation of joining, sealing and detaching the exhaust member to the exhaust port member is performed at a temperature lower than the operating temperature of the sealing lid to the exhaust port member, The joining of the sealing lid to the exhaust port member is performed at a working temperature that does not affect the connection point of the exhaust port member to the exhaust port of the sealed container, and further, the sealing to the exhaust port member is performed. It is preferable that the joining of the lid includes a work of fitting and sealing the sealing lid to the exhaust port member, and a cooling work of both thereafter.

Further, in the present invention, in the hermetically sealed container sealing device for sealing the exhaust hole after exhausting air from the exhaust hole of the container to be hermetically closed by an exhaust means to set the inside of the container to a predetermined degree of vacuum. Sealing lid holding means for holding a sealing lid for an exhaust hole, and a fitting / sealing provided for fitting / sealing the sealing lid to an exhaust port member provided in the exhaust hole. A stopping means, an exhaust member which is connected to the exhaust port member at least with the sealing lid and the exhaust port of the exhaust port member located inside the exhaust port member, and which is separated from the exhaust port member. And an attaching / detaching means for joining / sealing and detaching the exhaust member.

In this case, as an embodiment of the present invention, the attaching / detaching means has a heat generating means for heating at least a portion of the exhaust member that is joined, sealed, and separated from the exhaust port member. The attachment / detachment means includes
A portion for sealing and detaching, having a cooling means for cooling, the fitting and sealing means having a heat generating means for airtightly joining the sealing lid to an exhaust port of the exhaust port member, Further, it is preferable that the fitting / sealing means has a cooling means for cooling the sealing lid fitted and sealed to the exhaust port.

Further, for joining / sealing and detaching the exhaust member to / from the exhaust port member, and / or
The attachment / detachment means and / or the fitting / sealing means includes an operation of the sealing lid with respect to the exhaust port member so as to fit and seal the sealing lid with an exhaust port of the exhaust port member.
And / or an operation control means for controlling the operation of the exhaust member with respect to the exhaust port member is provided, and at a temperature lower than the working temperature of the sealing lid for the exhaust port member, Preferably, a temperature control means for controlling the temperature of the exhaust member is provided, so that the operation of joining, sealing and detaching the exhaust member to the exhaust port member is performed. It is preferable that the sealing lid, the exhaust port member and / or the exhaust member are made of a metal material, and a heat-sealing adhesive is used for joining and sealing.

Further, in the present invention, when the inside of the container is evacuated to a predetermined degree of vacuum from the exhaust hole of the hermetically sealed container, the sealing member structure for forming the closed container by sealing the exhaust hole. And an exhaust port member connected to the exhaust port of the container, and a sealing lid fitted and sealed to the exhaust port of the exhaust port member.

In this case, as an embodiment of the present invention, the exhaust port member includes a first joining flange portion provided on a peripheral edge of the exhaust port to which the sealing lid is fitted and sealed, and an outer periphery thereof. A second joining flange portion joined and sealed to the exhaust member of the exhaust means on the side, and an adhesive material for fitting and sealing the sealing lid to the first joining flange portion. Is attached,
The second joining flange portion is provided with a re-meltable adhesive that can be joined, sealed, and detached from the exhaust member. In particular, the re-meltable adhesive is a solder. It is preferred that

Further, a groove on which the adhesive is provided is formed in the first joint flange portion, and the first joint flange portion and the portion of the sealing lid in contact with the first joint flange portion are provided. The exhaust ports have openings that communicate with the exhaust ports connected to the sealing lid and communicate with the exhaust holes of the container. In a preferred embodiment, the opening is bonded to the peripheral edge of the exhaust hole via an adhesive.

Further, according to the present invention, there is provided an airtight container which is hermetically sealed in a state of being evacuated and decompressed to a required degree of vacuum,
An exhaust port member is provided in the exhaust port of the container before sealing, and a sealing lid is fitted and sealed to the exhaust port of the exhaust port member.

In this embodiment, the exhaust port member is formed as a separate member connected to the exhaust hole via an adhesive, and has the sealing member structure together with the sealing lid. In this closed container, the inside of the container is provided with a plurality of electron-emitting devices and a phosphor to which electrons from the electron-emitting devices are irradiated, and constitutes an image display device. The container has a fluorescent display surface on at least one surface, and a plurality of electron-emitting devices for irradiating the fluorescent display surface with electrons are arranged at a position in the container facing the fluorescent display surface to constitute a flat panel display. Is an object to be implemented.

[0021]

Embodiments of the present invention will be described below in detail with reference to the drawings.

(First Embodiment) FIG. 1 shows a sealed portion of a closed container according to the present invention, in which (a) is a plan view and (b) is an AA ′ line. It is sectional drawing. In the figure, reference numeral 1 denotes an internal display having a required degree of vacuum, such as an image display device having an electron-emitting device and a phosphor or the like on its opposite side, or a plasma display panel having a plasma generating portion and a phosphor or the like on its opposite side. A depressurized sealed container, a so-called "vacuum sealed container" (hereinafter, referred to as a container), which is made of a material such as soda glass, and which has upper and lower face plates and a rear plate adhered to side walls with frit glass. , In a sealed state.

Reference numeral 2 denotes an exhaust hole 1-1 of the sealed container 1.
An exhaust port member constituting a part of a sealing tool for sealing
Reference numeral 3 denotes a sealing lid that forms a part of a sealing tool for closing the exhaust hole 1-1 of the container 1 via the exhaust port member 2. As shown in FIGS. 1A and 1B, the exhaust port member 2 is formed by concentrically forming openings 2-1 and 2-2 having different sizes from each other. The side communicates with the exhaust port 1-1 of the container 1 and has a flange portion 5 formed therearound, to which the sealing lid 3 is joined. As will be described later, the opening 2-1 side is connected to an exhaust port member (cylindrical) on the exhaust means (described later) side when the container 1 is exhausted.

As shown in FIG. 1B, the cross-sectional shape of the joining portion between the sealing lid 3 and the flange 5 is such that the sealing lid 3 holds the flange 5 with a knife edge. The shape is adapted to be fitted to the hole, and the adhesion strength of the vacuum sealing after the joining is enhanced. The exhaust port member 2 here
At least, the flange portion 5 is made of an alloy mainly composed of iron, nickel and chromium, and the sealing lid 3 is made of a stainless alloy in this embodiment.
As described above, the fact that the sealing lid 3 is made of a metal having a larger thermal expansion coefficient than that of the exhaust port member 2 means that the fitting operation between the flange portion 5 and the sealing lid 3 is performed at a high temperature. When cooled,
This is important for increasing the adhesion strength between the flange portion 5 and the sealing lid 3.

The height of the exhaust port member 2 from the outer surface of the container 1 can be, for example, about 10 mm, which is advantageous in that it does not hinder the handling of the container 1 after sealing. It is preferable in terms of strength that the exhaust port member 2 is a metal tube body against impact or the like. In addition, the sealing lid 3
0.1mm to 3m in thickness for airtight maintenance and handling
m, preferably about 0.2 mm to 2 mm, and more preferably made of metal together with the exhaust port member 2 from the viewpoint of maintaining the airtightness of the container 1.

The thickness and the shape of the exhaust port member 2 and the sealing lid 3 are not limited to those described above, and can be appropriately selected as needed. Further, for example, water glass, B ₂ O ₂ —PbO—ZnO, or B ₂ O ₂ —
A crystalline or non-crystalline frit glass such as PbO—SiO ₂ is used. In particular, from the viewpoint of adhesive strength,
It is desirable to use crystalline frit glass. In addition, a method of directly casting the seal 2 into the container 1 may be employed for bonding the container 1 and the exhaust port member 2 of the seal. Note that as another embodiment, the exhaust port member 2 is
It may be formed in advance integrally with the top plate of the container 1.

(Second Embodiment) Next, as a second embodiment, a vacuum sealing method of the present invention and a vacuum sealing apparatus for performing the sealing will be described.

(Entire Sealing Apparatus) FIG. 2 schematically shows a schematic structure of the sealing apparatus. Here, reference numeral 7 denotes a cylindrical exhaust member that is communicated with and connected to the exhaust unit 10, and 12 denotes a holding bracket 12-1 that is located inside the exhaust member 7 and holds the above-described sealing lid 3. This is a holding means for a sealing lid provided with: In this embodiment, the holding means 12
Is provided with a heating means 11 such as a nichrome wire, and this heating means 11
The heating power supply device 15 is connected.

2, a lower drive bearing 16 and an upper drive bearing 17, a drive guide shaft 18 for supporting both drive bearings, and a bellows movable partition provided on a part of the exhaust member 7. Reference numeral 13 denotes a movable means for vertically moving the contact member 8 of the attaching / detaching means provided on the exhaust member 7 and the holding means 12 for the sealing lid 3, and in this case, the lower drive bearing 16 Is a movable part of the attaching / detaching means for joining / sealing / separating the exhaust member 7 to / from the opening 2-1 of the sealing device 2, and the upper drive bearing 17 holds the sealing lid 3 via the holding means 12. It is a movable portion of fitting / sealing means provided for fitting / sealing to the exhaust port member 2.

In the case where such a movable means is an apparatus having another movable means for vertically moving the pedestal 19 (stage) itself on which the vacuum-sealed container 1 is installed, an exhaust member 7 (and the contact member 8 of the attachment / detachment means) and the holding means 12 of the sealing lid 3
The structure of the movable means which moves up and down may be sufficient.

In FIG. 2, the contact member 8 is a main part of attaching / detaching means for joining / sealing the exhaust member 7 to / from the exhaust part and detaching the same, as will be described later. For example, a heating means 8-1 such as a nichrome wire connected to the heating power supply 9 is provided.

Next, a vacuum sealing method using the above sealing device will be described together with the operation of the device.

(Exhaust Preparation) First, in the exhaust preparation stage,
This will be described with reference to FIG. Exhaust to exhaust port 1-1 in advance
The container 1 to which the mouth member 2 is adhered is placed on the base 19 of the sealing device.
Deploy. Here, in the present embodiment, the exhaust port member
2 is made of an alloy mainly composed of iron, nickel and chromium.
Metal to the exhaust port 1-1.
The bonding may be in a form of being directly cast into the container 1,
As shown in FIG.
It may be shaped to adhere to one peripheral edge. Here, the adhesive 4
As, for example, water glass or B_TwoO_Two-Pb
O-ZnO, B _TwoO_Two-PbO-SiO_TwoCrystal
Crystalline or non-crystalline frit glass is used,
Especially, from the viewpoint of adhesive strength, crystalline frit glass is used.
Is desirable. Note that the adhesive 4
The bonding is performed, for example, at 410 ° C. or higher.

The opening 2-1 outside the exhaust port member 2 is also provided.
The adhesive 6 is disposed on the inner surface side of the. Here, the adhesive 6 is made of a remeltable metal such as a binary alloy such as Sn-Pb or Pb-Ag or a ternary alloy such as Sn-Pb-Ag, for example, solder. Used. The bonding by the adhesive 6 is performed, for example, at 180 ° C. or higher.

Next, the aforementioned exhaust member 7 is connected to the exhaust port member 2.
And is bonded via an adhesive 6. Here, the exhaust member 7 is made of iron, nickel,
Metals made of an alloy containing chromium as a main component are used. In particular, in this embodiment, by lowering the lower drive bearing 16 of the sealing device described above, the exhaust member 7 is lowered, and the opening 2-1 outside the exhaust port member 2 and the exhaust port 2-1 are exhausted. To the heat generating means 8-1 provided on the contact member 8 of the attaching / detaching means.
By supplying electric power from the heating power supply device 9 to heat the joint between the exhaust member 7 and the exhaust port member 2 of the sealing tool and melt the adhesive (welding material) 6, as shown in FIG. Then, the exhaust member 7 and the exhaust port member 2 are bonded to each other.

(Evacuation Step) Next, the inside of the container 1 is evacuated through the exhaust port member 2 and the exhaust member 7, and the pressure is reduced to a predetermined degree of vacuum. As shown in FIG. 4, such an evacuation step in this embodiment is to exhaust the inside of the container 1 and the interior of the evacuation member 7 by the evacuation means 10 connected to the side of the evacuation member 7. And reduce the pressure (evacuate). At this time, it is preferable to exhaust and reduce the pressure while heating the container 1 itself, because unnecessary gas components in the container 1 can be more efficiently removed. In addition, by using an ion pump or a getter pump for exhaustion, unnecessary gas components can be further removed from the mixture, and a closed container having a high vacuum suitable for a cold cathode electron source requiring a high vacuum can be produced.

(Sealing Lid Bonding Step) Next, the exhaust port member 2
Then, the sealing lid 3 is joined to the container 1 to seal the container. In the sealing step in this embodiment, as shown in FIG. 5, after the inside of the container 1 reaches a predetermined degree of vacuum in the evacuation step, the heating power supply unit 15 supplies the heat to the heating unit 11 of the holding unit 12. Electric power is supplied to heat the sealing lid 3, and then the above-mentioned upper drive bearing 17 is lowered, whereby the bellows 13 is contracted while being held by the holding fitting 12-1 of the holding means 12. The sealing lid 3 is moved downward, fitted into the opening 2-2 inside the exhaust port member 2, and sealed. further,
The supply of power to the heating means 11 of the holding means 12 is stopped, and the sealing lid 3 is cooled. Thereafter, the exhaust by the exhaust means 10 is stopped.

In joining the sealing lid 3 to the exhaust port member 2, it is preferable to employ the following method. That is, FIG. 7 shows another embodiment of the above-mentioned sealing step.
5 in that a cooling means 24 is provided. This cooling means 24 is provided with the cooling introduction means 2
5, when the above-described joint between the sealing lid 3 and the exhaust port member 2 is heated, a coolant such as air or nitrogen gas is supplied to the joint between the sealing lid 3 and the exhaust port member 2. It flows to the vicinity. Thereby, the above-mentioned sealing lid 3 and the exhaust port member 2
When the bonding portion is heated, it is possible to prevent the adhesive material 6 from being thermally melted in the opening 2-1 described above, whereby the vacuum leakage of the bonding / sealing portion after the above-described sealing step is performed. Can be prevented.

(Removal Step of Container and Sealing Device) After the above steps, the exhaust member 7 is detached from the exhaust port member 2.
That is, in the detaching step in this embodiment, as shown in FIG. 6, the joint between the exhaust member 7 and the exhaust port member 2 is re-established by heating the contact member 8 of the attaching / detaching means by the heat generating means 8-1. Heating is performed to melt the adhesive 6 and move the lower drive bearing 16 upward to separate the exhaust member 7 and the exhaust port member 2. In addition, the holding force of the holding bracket 12-1 is released, and then the upper drive bearing 17 is moved upward, so that the sealing lid 3 and the holding means 12 are separated.

In this manner, as shown in FIG. 1, the inside of the container 1 is depressurized to a predetermined degree of vacuum, and the hermetic seal is sealed in the vent hole 1-1 by the vent member 2 and the sealing lid 3. It can be a container.

(Adhesive) As the adhesive used in the sealing as described above, there are water glass, frit glass, and solder. In particular, the container 1 and the exhaust port member 2 of the seal are used.
The frit glass is suitable for the adhesive material 4 for bonding to each other in terms of its sufficient adhesive strength. Further, it is more preferable to use crystalline frit glass from the viewpoint of adhesive strength.

In the above process, if attention is paid to the bonding method, for example, in order to bond the container 1 and the exhaust port member 2 of the sealing tool, B ₂ O ₂ —PbO—Zn is used as the adhesive 4.
Bonding is performed at 410 ° C. or higher using frit glass such as O or B ₂ O ₂ —PbO—SiO ₂ . In addition, Sn is used as an adhesive 6 for bonding the exhaust port member 2 and the exhaust member 7 to each other.
-Binary alloys such as Pb or Pb-Ag, and Sn-
Using solder such as a ternary alloy such as Pb-Ag, 18
Bond at 0 ° C or higher.

Here, the solder has a Sn-Pb of 180.
C. to about 320.degree. C., Pb-Ag is 300.degree.
In the range of about 0 ° C, Sn-Pb-Ag is 180 ° C to 310 ° C.
Since it can be melted and adhered in the range of about 0 ° C., for example, an Sn—Pb alloy is used as the adhesive 6, and the exhaust port member 2 of the sealing tool and the sealing lid 3 are joined by fitting at about 350 ° C. Then, the bonded portion between the exhaust port member 2 and the exhaust member 7 is again
The two are separated by heating to a temperature of about 300 ° C.

According to such a bonding method, the working temperature at the time of bonding the exhaust member 7 to the exhaust port member 2 is lower than the working temperature of bonding the exhaust port member 2 to the container 1 in the previous process. Therefore, the container 1 and the sealing device are changed depending on the working temperature at the time of joining and sealing by fitting the sealing lid 3 to the exhaust port member 2 and at the time of bonding the exhaust member 7 to the exhaust port member 2. It is possible to prevent the bonded portion from being deteriorated, and to suppress a vacuum leak due to the deterioration.

The working temperature at the time of removing the exhaust member 7 from the exhaust port member 2 is lower than the temperature at the time of joining / sealing work by fitting the sealing lid 3 to the exhaust port member 2 in the previous process. Since the working temperature at the time of detachment of the exhaust member 7 from the exhaust port member 2 can be lowered, the exhaust port member 2
It is possible to prevent the adhesive portion between the sealing lid 3 and the sealing lid 3 from being deteriorated, and to suppress a vacuum leak due to the deterioration.

In practice, the container 1 has an electron-emitting device, an ultraviolet-emitting device and the like formed therein.
Since these elements are used for a display device for forming an image, there are those that evacuate the inside and those that evacuate the inside and fill a specific gas depending on the type of the formed elements. In some cases, the treatment after evacuation may be slightly different from case to case, but the point is that this sealing structure makes it possible to increase the degree of high vacuum inside the sealed container 1 for a long time, or
As a means for filling a specific gas and keeping the pressure constant for a long period of time after exhausting the inside of the container 1, a thin and firm sealing tool composed of an exhaust port member 2 and its sealing lid 3 Accordingly, there is an advantage that the required thickness of the image display device is achieved.

(Third Embodiment) By the above-described method,
The result of examining the airtightness of the sealed container 1 with the sealing device (the exhaust port member 2 and the sealing lid 3) attached thereto will be described below. FIG. 8 is a schematic view of an experimental apparatus when testing the airtightness of the vacuum sealed container provided with the sealing fitting. Here, reference numeral 1 denotes a sealed container as an image display device, 2 denotes an exhaust port member of a sealing device, 3 denotes a sealing lid, 19 denotes an electron-emitting device, and 20 denotes a phosphor and a metal back. The sealed container 1 is connected to a He leak detector 23 and a vacuum pump 24 via a vacuum system 21 and a valve 22.

The vacuum pump 24 is operated to evacuate the inside of the sealed container 1 to 10 ⁻⁷ Pa. Then, He gas is blown around the sealing lid 3 with an air gun, and whether there is any leakage is checked by a He leak detector. Was. At this time, ten sealed containers 1 were prepared, and a leak test was performed for each of them. The results, eight of the sample is 10 ^{-1 0}
No leakage was detected in the range up to Pa · 1 / sec, and it was determined that sufficient vacuum sealing was achieved. In addition, although leakage of 10 ⁻⁶ Pa · 1 / sec was detected in the two samples, the cause of the leakage was examined.
Scratches presumably from the beginning were found to be the cause of the leak. Therefore, all of the vacuum sealing methods using the sealing device (the exhaust port member 2 and the sealing lid 3) of the present invention are determined to be effective.

In the closed container 1 shown in these embodiments, the height of the sealing tool remaining thereon is
Since it only needs to be about 10 mm from the upper surface, it does not hinder the handling. In particular, since all of the sealing members are formed by bonding the exhaust port member 2 made of metal and the sealing lid 3, there is little danger of breakage and little danger of vacuum leakage. Also, without using an O-ring, the exhaust port member and the exhaust member are adhered to each other via a re-fusible adhesive, and the interior of the container 1 is exhausted. Is bonded, the inside of the sealed container 1 used for an image display device or the like can be set to a degree of vacuum of 10 ⁻⁵ Pa or more.

[0050]

According to the present invention, it is possible to evacuate to a high degree of vacuum and seal under high vacuum, and to provide a high-vacuum sealed container and a sealing method therefor. In addition, it is possible to provide a sealing device with extremely low risk of vacuum leakage after sealing, a vacuum sealing tool used for the sealing device, and the like.

[0051]

[Brief description of the drawings]

FIG. 1 is a plan view and a sectional view of a sealed portion of a closed container according to an embodiment of the present invention.

FIG. 2 is a schematic view of the sealing device of the present invention.

FIG. 3 is a schematic view of a preparation stage before evacuation in the sealing method of the present invention.

FIG. 4 is a schematic view of an evacuation stage in the sealing method of the present invention.

FIG. 5 is a schematic view of a step of joining and sealing a sealing lid in the sealing method of the present invention.

FIG. 6 is a schematic view of a step of separating a sealing device of the present invention from a sealed airtight container.

FIG. 7 is a schematic view showing a case where a cooling mechanism is provided in a step of joining a sealing lid in the sealing method of the present invention.

FIG. 8 is a diagram for explaining an airtightness test of a sealed container manufactured by the sealing method of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Closed container 2 Exhaust port member (part of sealing device) 2-1 and 2-2 Opening of sealing device 3 Sealing lid 4 Adhesive material 5 Fitting part of exhaust port member 2 with sealing lid 3 (Flange) 6 Adhesive 7 Exhaust member 8 Contact member 8-1 Heating means 9 Heating power supply device 10 Exhaust means 11 Heating means 12 Sealing lid holding means 12-1 Holding metal 13 Movable partition (bellows) 14 Current introduction terminal 15 Heating power supply device 16 Lower drive bearing 17 Upper drive bearing 18 Drive guide shaft 19 Electron emission element 20 Phosphor and metal back 21 Vacuum gauge 22 Valve 23 He leak detector 24 Vacuum pump 25 He probe air gun

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 29/86 H01J 29/86 Z 31/12 31/12 C H01L 21/3065 H01L 21/302 B

Claims (24)

[Claims] In a sealing method for exhausting air from an exhaust hole of a hermetically sealed container by an exhaust means to set the inside of the container to a predetermined degree of vacuum and sealing the exhaust hole, the container is provided in the exhaust hole of the container. A step of hermetically joining an exhaust member communicated with the exhaust means to the exhaust port member, and depressurizing the inside of the container by the exhaust means through the exhaust port member and the exhaust member to a predetermined degree of vacuum. A method for sealing an airtight container, comprising: a step; a step of joining and sealing a sealing lid to the exhaust port member; and a step of detaching the exhaust member from the exhaust port member. 2. The sealing of a closed container according to claim 1, wherein the exhaust port member and the exhaust member are joined to each other by heat fusion using a remeltable adhesive. Method. 3. The method according to claim 2, wherein a solder is used as the adhesive. 4. The operation of joining, sealing, and detaching the exhaust member from the exhaust port member at a temperature lower than the operating temperature of the sealing lid to the exhaust port member. The method for sealing a closed container according to claim 1. 5. The method as claimed in claim 5, wherein the joining of the sealing lid to the exhaust port member is performed at a working temperature that does not affect a connection point of the exhaust port member to an exhaust port of the sealed container. Item 5. The method for sealing a closed container according to any one of Items 1 to 4. 6. The joining of the sealing lid to the exhaust port member includes fitting and sealing the sealing lid to the exhaust port member, and then cooling both of them. The method for sealing a closed container according to claim 1. 7. A closed vessel sealing device for evacuating the container to be sealed from an exhaust hole by an exhaust means to reduce the inside of the container to a predetermined degree of vacuum and then sealing the exhaust hole. And a sealing lid holding means for holding the sealing lid, wherein the exhaust port is provided in the exhaust hole, and the exhaust port is communicated with the exhaust means, and at least the exhaust ports of the sealing lid and the exhaust port member are located inside, and the exhaust is performed. A sealing device for a hermetically sealed container, comprising: an exhaust member joined and sealed to and detached from a mouth member, and detachable means for joining, sealing and detaching the exhaust member. 8. The hermetic seal according to claim 7, wherein said attaching / detaching means includes a heat generating means for heating at least a portion of said exhaust member which is joined, sealed, and separated from said exhaust port member. Container sealing device. 9. The sealing device according to claim 8, wherein the attachment / detachment means has a cooling means for cooling the joining / sealing / separating portion. 10. The air conditioner according to claim 7, wherein said fitting / sealing means includes a heat generating means for airtightly joining said sealing lid to an exhaust port of said exhaust port member. The sealing device for an airtight container according to claim 1. 11. The sealed container according to claim 10, wherein said fitting / sealing means has a cooling means for cooling said sealing lid fitted / sealed to said exhaust port. Sealing device. 12. A method for fitting / sealing the sealing lid to an exhaust port of the exhaust port member for joining / sealing and detaching the exhaust member to / from the exhaust port member, and / or for sealing. An operation control for controlling the operation of the sealing lid with respect to the exhaust port member and / or the operation of the exhaust member with respect to the exhaust port member is provided in the attaching / detaching means and / or the fitting / sealing means. The sealing device for a closed container according to any one of claims 7 to 11, further comprising means. 13. The exhaust system so that the operation of joining / sealing and detaching the exhaust member to / from the exhaust port member is performed at a temperature lower than the operation temperature of the sealing lid to the exhaust port member. The sealing device for a closed container according to any one of claims 7 to 12, further comprising temperature control means for controlling the temperature of the member. 14. The sealing lid, the exhaust port member and / or
The sealing member according to any one of claims 7 to 13, wherein the exhaust member is made of a metal material, and a heat-sealing adhesive is used for joining and sealing. Stop device. 15. A sealing structure for forming a closed container by sealing the exhaust hole when the inside of the container is evacuated to a predetermined degree of vacuum from an exhaust hole of the sealed container,
A sealing device structure comprising: an exhaust port member connected to an exhaust port of the container; and a sealing lid fitted and sealed to the exhaust port of the exhaust port member. 16. The exhaust port member includes a first joining flange portion provided on a peripheral edge of the exhaust port to which the sealing lid is fitted and sealed, and an exhaust member of an exhaust unit on an outer peripheral side thereof. Joining
A second joint flange portion to be sealed,
An adhesive material for fitting and sealing the sealing lid is attached to the joining flange portion, and the second joining flange portion is
The sealing structure according to claim 15, wherein a remeltable adhesive material that can be joined, sealed, and separated is attached to the exhaust member. 17. The closure structure according to claim 16, wherein the remeltable adhesive is solder. 18. The sealing structure according to claim 16, wherein a groove on which the adhesive is provided is formed in the first joining flange portion. 19. The method according to claim 16, wherein the first joint flange portion and the portion of the sealing lid in contact with the first joint flange portion are formed with curved surfaces which are in contact with each other with the same size of curvature. The sealing device structure according to any one of the above. 20. The exhaust port member has an opening communicating with the exhaust port connected to the sealing lid and communicating with an exhaust hole of the container, and the opening is formed at a peripheral edge of the exhaust hole. The sealing structure according to any one of claims 15 to 19, wherein the sealing structure is adhered to the base via an adhesive. 21. A sealed container which is hermetically sealed in a state where the container is evacuated and decompressed to a required degree of vacuum, wherein an exhaust port member is provided in an exhaust hole of the container before sealing. A sealed container, wherein a sealing lid is fitted and sealed to an exhaust port of a member. 22. The exhaust port member, via an adhesive,
22. The sealing device according to claim 15, which is configured as a separate member connected to the exhaust hole, and has the sealing member structure according to any one of claims 15 to 20 together with the sealing lid.
A sealed container according to item 1. 23. The sealed container according to claim 21, wherein a plurality of electron-emitting devices and a phosphor to which electrons from the electron-emitting devices are irradiated are provided inside the container, and an image is displayed. An airtight container comprising an apparatus. 24. The sealed container according to claim 21, wherein the container has a fluorescent display surface on at least one surface, and irradiates the fluorescent display surface with electrons at a position in the container facing the fluorescent display surface. A plurality of electron-emitting devices are arranged,
A sealed container comprising a flat panel display.