JP2000208048A - Sealing method, and airtight container and exhausting device using same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To exhaust air to a high degree of vacuum and seal under a high vacuum, and maintain the high degree of vacuum for a long time. SOLUTION: An evacuating method of a container made up of a rectangular front plate, a rectangular back plate and a support frame 3 for supporting the peripheries of the front plate and back plate, one or more opening parts 3a being provided in the support frame 3, has a process for causing an exhaust pipe to abut on each of opening regions in side faces of the support frame, a process for exhausting air via the exhaust pipes, and a process for sealing off the container while the exhaust pipes are separated therefrom. In an airtight container 1 made up of a rectangular front plate, a rectangular back plate and a support frame 3 for supporting the peripheries of the front plate and back plate, one or more opening parts 3a are provided in the support frame 3 and the opening parts 3a are sealed off with a seal material having a thermal expansion coefficient substantially the same as those of the front plate, back plate, and support frame.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an airtight container such as a plasma display, a flat panel display using a cold cathode electron source such as a field emission type or a surface conduction emission type, and particularly preferably a display which requires a high vacuum. The present invention relates to a sealing method for hermetically sealing a hermetic container, a vacuum sealing device used in the method, a vacuum exhaust device, and a vacuum hermetic container formed by the method.

[0002]

2. Description of the Related Art In recent years, flat panel displays (hereinafter, referred to as FPDs) using liquid crystal, plasma, fluorescent display tubes, electroluminescence, cold cathode type electron-emitting devices, etc. have been developed from displays using CRT tubes. In. The demand for FPD is great because it is thin and lightweight. In addition, especially among information devices, display devices are becoming thinner and more sophisticated, and following a liquid crystal display panel, a number of fine fluorescent lamps, electron-emitting devices, and ultraviolet-emitting devices are arranged on a flat plate to provide a display function. Granted FPDs have been developed. Here, the liquid crystal display panel device does not emit light by itself, and displays characters and symbols using the role of a shutter.
The device emits light itself and is said to be excellent in performance characteristics of high brightness and high contrast.

In particular, in recent years, a field emission type, a surface conduction type,
A flat panel display using a cold cathode electron source such as an IM type is a self-luminous type and uses a phosphor equivalent to that of a CRT tube. Therefore, the flat panel display has high brightness, high contrast, and a wide viewing angle. .

The present applicant disposes a substrate on which an electron-emitting device is disposed (hereinafter, referred to as a rear plate) and a substrate on which a phosphor is disposed (hereinafter, referred to as a face plate) so as to face each other.
Japanese Patent Application Laid-Open No. 2-299136 proposes a flat image forming apparatus that forms an image by irradiating a phosphor with an electron beam emitted from an electron-emitting device while reducing the pressure between both substrates.

In such a flat image forming apparatus, since the interval between the panels is narrow, the exhaust conductance required to create a high vacuum in the airtight container is reduced. In addition, when an anti-atmospheric pressure support member is disposed in the container to maintain the vacuum container, the member may become an obstacle and the exhaust conductance may be further reduced.

[0006]

As a conventional example for solving such a problem, Japanese Patent Application Laid-Open No. Hei 8-236045 and the like describe a method of evacuating using a horizontally long exhaust pipe from the side of the panel. However, after sealing, the above-described protruding portion of the exhaust pipe remains on the side surface of the panel, and when the panel is housed in a housing or the like, the protruding portion of the exhaust pipe sometimes hinders the panel.

In view of the above prior art, the present invention provides a method for vacuum sealing a vacuum vessel which enables exhaustion to a high degree of vacuum and sealing under a high vacuum, and maintains the high degree of vacuum for a long time. Another object of the present invention is to provide an airtight device and an exhaust device using the same.

[0008]

The present invention achieves the above object and comprises a rectangular front plate, a rectangular back plate, and a support frame for supporting the periphery between the front plate and the back plate. In the method for evacuating an airtight container, one or more openings are provided in the support frame, and a step of contacting an exhaust pipe with a side portion of the support frame to be opened is provided through the exhaust pipe. An exhausting step of exhausting the inside of the airtight container, and a step of sealing while separating an exhaust pipe from the airtight container,
It is characterized by having.

Further, the present invention provides an airtight container comprising a rectangular front plate, a rectangular back plate, and a support frame for supporting the periphery between the front plate and the back plate. One or more openings are provided around the front plate and the back plate, and the openings are formed of a sealing material having substantially the same coefficient of thermal expansion as the front plate, the back plate, and the support frame. It is characterized by being sealed.

In the above-mentioned hermetic container, a plurality of electron-emitting devices for irradiating electrons to the fluorescent display surface are provided at a position in the rear plate facing the fluorescent display surface inside the front plate. It is a flat panel display (FPD) arranged.

In the above-mentioned airtight container, the shape of the spacer disposed inside the airtight container is a flat plate, and the opening provided on a side surface of the support frame is a long axis of the flat plate spacer. It is characterized by being arranged in a direction parallel to the direction.

[0012] The present invention also provides a rectangular front plate, a rectangular rear plate, and a support frame for supporting the periphery between the front plate and the rear plate. In an exhaust device for exhausting an airtight container having a spacer for maintaining an anti-atmospheric pressure therebetween, the support frame is provided with at least one elongated opening around the front plate and the back plate, and An exhaust pipe having an opening member that covers
A sealing material powder-coated at the tip of the tip of the exhaust pipe, heating means for melting the sealing material at the tip, and exhaust means for exhausting the airtight container through the exhaust pipe;
The heating means is operated when covering the opening and when detaching from the opening, and when the exhaust means exhausts, the inside of the airtight container and the exhaust pipe is exhausted with the sealing material, and the detachment is performed. The opening is sealed with the sealant when the opening is performed.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments according to the present invention will be described.
This will be described in detail with reference to the drawings.

[First Embodiment] FIG. 1 is a structural view of a vacuum hermetic container as a first embodiment of the present invention. FIG. 1A is a perspective view of a vacuum-tight container, and FIG.
(B) is an AA sectional view of the sealing portion. The airtight container is basically described as a vacuum airtight container when the inside is vacuum, and simply as an airtight container when the inside is not vacuum, but this is not always the case.

In FIG. 1, reference numeral 1 denotes a vacuum or low pressure chamber for an image display device having an electron-emitting device and a phosphor or the like facing the inside, or a plasma display panel having a plasma generating portion and a phosphor or the like facing the inside. The vacuum airtight container 1 is made of soda glass or the like, is surrounded by a support frame 3, is adhered by frit glass or the like, and is sealed.

A vacuum-tight container 1 shown in FIG. 1 has a rear plate 4 having a plurality of one-dimensional or two-dimensional electron-emitting devices having electron-emitting portions for emitting electrons, a phosphor and / or a high voltage. It comprises a face plate 2 having a transparent electrode and a metal back to be supplied, a rear plate 4 thereof, and a support frame 3 arranged around the face plate 2 so as to cover the face plate 2. Here, the rear plate 4, the face plate 2, and the support frame 3 are preferably made of a glass material such as soda glass. Particularly, the face plate 2 coated with a phosphor is made of highly transparent glass. 3 and between the face plate 2 and the support frame 3 are bonded to each other with an adhesive such as frit glass having a thermal expansion coefficient equivalent to that of the material to form an airtight structure except for the openings. The support frame 3 is disposed between the rear plate 4 and the face plate 2 as shown in FIG. 1, but is not limited to this, and the size of the rear plate 4 is substantially the same as that of the face plate 2. However, the present invention is not limited to the illustrated embodiment.

Further, a rectangular opening 3a is provided on one side surface of the support frame 3, so that evacuation can be performed from the opening 3a. In this embodiment, one side of the support frame 3 is
An opening 3a of 0 mm × 1 mm is provided, and an exhaust pipe is connected to a vacuum-tight container using a sealing material 5 to perform vacuum exhaust. After the evacuation, the opening 3a is closed (sealed) using the sealing material 5 while separating the evacuation pipe from the vacuum airtight container.

When sealing the airtight container 1, the sealing material 5
Because only the side is used, the unevenness of the side surface is at least 10 mm
In the case where an image forming apparatus or an image display apparatus that displays an image by supplying an image signal to the electron-emitting device of the hermetic container 1 and displays the image is not hindered.

In this embodiment, as the sealing material 5,
Frit glass mainly composed of PbO.B ₂ O ₃ (LS-
3081, manufactured by Nippon Electric Glass Co., Ltd.)
A solder in which a small amount of Zn, Sb, Ti, Si, Al, Cu or the like is added to the alloy may be used, and is preferably softer than an adhesive material such as frit glass to which the face plate 2, the rear plate 4, and the support frame 3 are adhered. What is necessary is just a thing with a low temperature. The sealing material is made of a material having the same thermal expansion coefficient as that of the airtight container 1. For example, Cerasolzer (# 29 manufactured by Asahi Glass Co., Ltd.)
7) may be used. The amount of the sealing material 5 applied to the distal end of the exhaust pipe 21 described later may be an amount that covers the opening at the time of separation after the exhaust.

As described above, the exhaust pipe 21 has an opening member having a shape covering at least one elongated opening 3a provided at a part of the support frame 3 as described above.
A sealing material 5 powder-coated on a tip of a predetermined shape at the tip of the exhaust pipe; and a heating means 24 for melting the sealing material 5 at the tip.
Exhaust means 20 for exhausting the inside of the airtight container 1 through the exhaust pipe 21, and moving means 2 for moving three-dimensionally with the airtight container 1.
And 2. In this way, the exhaust is completed in a short time, in combination with the arrangement of the spacers in the airtight container 1,
Shortening of the process can be achieved, and by sequentially executing the exhaust preparation stage, the exhaust stage, and the separation stage, the sealed hermetic container is reduced in variation, sealed with a high degree of vacuum, and long-time high vacuum. The degree can be maintained.

[Second Embodiment] Next, as a second embodiment, a vacuum sealing method of the present invention and a vacuum evacuation apparatus for performing the sealing will be described.

(Entire Vacuum Sealing Apparatus) FIG. 2 shows a conceptual diagram of a vacuum evacuation apparatus. In FIG. 2, reference numeral 21 denotes an exhaust pipe connected to a vacuum exhaust means 20 such as an ion pump or a sorption pump, and a sealing material 5 as an adhesive is applied to a tip portion. On the other hand, in the airtight container 1, the rear plate 4 and the face plate 2 are sealed by the support frame 3 except for the opening 3a, and the rear plate 4 is fixed on the base 23.

The exhaust pipe 21 is moved by the moving device 22
It is movable in a three-dimensional XYZ direction, and is fixed on a base 23 of the evacuation device. Thus, the exhaust pipe 21 can be connected to and separated from the opening 3a of the vacuum-tight container 1 fixed on the base 23.

In FIG. 2, reference numeral 25 denotes a heating means for allowing the exhaust pipe 21 to be bonded to and separated from the opening 3a, as will be described later. For example, a heating means such as a nichrome wire connected to the heating power supply 24 is used. Heating means 25 is provided.

Next, a vacuum sealing method using the above-described vacuum exhaust device will be described together with the operation of the device.

(Exhaust Preparation) The exhaust preparation stage will be described with reference to FIG. First, a support frame 3 made of soda glass
The container 1 in which the opening 3a is formed by machining or the like is placed on the base 23 of the vacuum exhaust device. In the present embodiment, the opening 3a is polished to a length of 200 mm and a depth of 1 mm.

Next, the moving device 22 is moved in the direction of the opening 3a of the exhaust pipe 21 in which the sealing material 5 is disposed at the tip, and the exhaust pipe 21 is brought into contact with the opening 3a of the airtight container 1. At this time, electric power is supplied from the heating power supply device 24 to the heating means 25 to increase the temperature of the contact portion of the exhaust pipe 21 and melt the sealing material 5 so as to melt the exhaust pipe 21 as shown in FIG.
And the opening 3a of the airtight container 1 are bonded. At this time, the opening 3a of the airtight container 1 is previously heated by a heat supply means provided on the base 23, and the high-temperature exhaust pipe 21 and the adhesive 5 are heated.
To prevent the occurrence of cracks, breakage, etc. due to rapid temperature rise.

In the present embodiment, Cerasolza (# 297 manufactured by Asahi Glass Co., Ltd.) was used as the sealing material 5. Note that the exhaust pipe 21 and the airtight container 1 are bonded at, for example, 300 ° C. or higher.

In this embodiment, a metal exhaust pipe made of an alloy containing iron, nickel and chromium as a main component is used as the exhaust pipe 21 of the above-described vacuum exhaust device.

(Evacuation Step) Next, the evacuation step will be described with reference to FIG. The inside of the vacuum airtight container 1 is evacuated and evacuated by a vacuum exhaust means 20 connected to an exhaust pipe 21 joined to the vacuum airtight container 1. At this time, the vacuum tight container 1
By performing while heating itself, unnecessary gas components can be more efficiently removed. Further, by using a vacuum exhaust device such as an ion pump or a sorption pump for exhausting, it is possible to further remove unnecessary gas components from being mixed in, and to provide a high vacuum hermetic container suitable for a cold cathode electron source requiring a high vacuum. Can be made. The cold cathode electron source includes the above-described surface conduction electron-emitting device, electric field electron-emitting device, MIM-type electron-emitting device, and the like, and may include an ultraviolet-emitting device for a plasma display.

(Removal Step of Vacuum-Heat-Resistant Container and Vacuum Exhaust Device) After the above steps, the above-mentioned air-tight container 1 is sealed and the exhaust pipe 21 is detached. As shown in FIG. 4, in the detaching step in the present embodiment, as shown in FIG. Is heated again, the sealing material 5 is melted, and the exhaust pipe 21 is pressed while the airtight container 1 is pressed against the base 23 by pressing means (not shown).
Is moved above the airtight container, and the exhaust pipe 21 and the airtight container 1 are separated from each other. At this time,
Since the space of the opening 3a is narrow, the sealing material 5 that has adhered the exhaust pipe 21 and the airtight container 1 is opened due to its viscosity.
And the vacuum-tight container 1 is formed. In the above embodiment, the height of the opening 3a is about 1 mm, but is preferably about 0.5 to 5 mm. If the viscosity of the sealing material 5 is high, the opening having a larger gap can be covered.

In this manner, as shown in FIG. 1, the inside of the hermetic container 1 has a predetermined degree of vacuum, and a vacuum hermetic container in which the opening 3a is sealed with the sealing material 5 can be obtained.

(Adhesive) In this embodiment, in order to bond the airtight container 1 and the exhaust pipe 21 made of metal, a solder in which a trace amount of Zn, Sb, Ti, Si, Al, Cu or the like is added to a Pb-Sn alloy is used. However, this may be a solder glass mainly composed of PbO.B ₂ O ₃ .

Further, by applying a vapor deposition film to the contact portion of the exhaust pipe 21 of the hermetic container 1, Sn-Pb or Pb-
Solder such as a binary alloy such as Ag or a ternary alloy such as Sn-Pb-Ag can also be used.

(Exhaust Pipe Shape) In this embodiment, the exhaust pipe 2
As the tip shape of 1 (the shape of the interface between the exhaust pipe 21 and the sealing material 5), a tip shape that is perpendicular to the horizontal movement direction of the exhaust pipe 21 was used, but as shown in FIG.
The thing (a) which is slanted as a whole, or the thing (b) which is slanted both up and down inside the exhaust pipe 21 may be used.

When the exhaust pipe 21 having the shape shown in FIG. 5A is used, in the step of detaching the exhaust pipe 21, the force for moving the exhaust pipe 1 upward only by moving the exhaust pipe 21 horizontally in the direction of the airtight container 1. Since it works, it is only necessary to provide the moving device 22 with a space capable of moving in the upper Z direction in FIG. 4, and a power mechanism such as a motor other than the Z direction is not required, and the moving device 22 is simplified.

When the exhaust pipe 21 having the shape shown in FIG. 5B is used,
When the exhaust pipe 21 is moved in the direction of the panel of the airtight container 1, the sealing material 5 can be positioned at the center of the opening 3a, and the airtightness of the airtight container 1 can be improved.

In this case, when the sealing material 5 is melted, the exhaust pipe 2
It is desirable that the sealing material 1 and the sealing material 5 be in a state of being easily peeled.

In this embodiment, as shown in FIG. 6, a rectangular flat spacer 61 is disposed in the support frame 3 of the vacuum-tight container 1 as shown in FIG. 3a is provided at one position. As a result, the evacuation time until reaching a predetermined degree of vacuum could be shortened, and a high vacuum state could be maintained for a long time. In addition, although the opening 3a is merely a rectangular shape having a low height, a plurality of protrusions may be provided in the rectangular shape to have a shape that assists the viscosity of the sealing material 5.

[Third Embodiment] An example of an image display device in which the above-mentioned airtight container has been formed will be described with reference to FIG.
FIG. 7 is a schematic view showing an example of a display panel of the image forming apparatus. In the drawing, 70 is an electron source substrate on which a plurality of electron-emitting devices are arranged in a matrix, 71 is a rear plate on which the electron source substrate 70 is fixed, Reference numeral 75 denotes a face plate in which a fluorescent film 73 and a metal back 74 are formed on the inner surface of a glass substrate 72. Reference numeral 76 denotes a support frame, and a rear plate 71 and a face plate 75 are connected to the support frame 76 using frit glass or the like, and constitute a vacuum-tight container 78. In the vacuum hermetic container 78, the opening provided on the side surface of the support frame 76 is sealed with the sealing material 5 by the above-described method using the above-described vacuum exhaust device. In addition, the spacer 77 is arranged such that its major axis is in the X-axis direction in the drawing, and is arranged to improve exhaust efficiency during exhaust through the opening. The length of the spacer 77 may be a predetermined length, and is mounted on the wiring in the X-axis direction of the electron-emitting device to prevent the spacer 77 from being charged.

A spacer 77 for supporting the atmospheric pressure is disposed in the vacuum-tight container, and an opening is provided in the longitudinal direction thereof.

Fourth Embodiment FIG. 8 is a conceptual diagram of a vacuum-tight container according to a fourth embodiment and an exhaust device used for sealing the vacuum-tight container. The difference from the second embodiment is that two openings for exhausting air are provided at opposite positions. Therefore, the evacuation means (20
a, 20b), exhaust pipes (21a, 21b), moving devices (22a, 22b), heating power supplies (24a, 24)
b) and two heating means (25a, 25b) are provided. However, the number of the vacuum exhaust means (20a, 20b) and the heating power supply device (24a, 24b) may be one by using both in cooperation.

In this embodiment, the steps are almost the same as those described in the second embodiment.

In the exhaust preparation step, a length 30
An airtight container 1 provided with openings 3a and 3b polished to 0 mm and 1 mm in depth is placed on a base 23 of a vacuum exhaust device, and an exhaust pipe 21a in which a sealing material 5 is placed at the tip is provided.
21b is opened using the moving devices 22a and 22b.
3b. At this time, the heating power supply devices 24a, 24
b, power is supplied to the heating means 25a and 25b to increase the temperature of the contact portions of the exhaust pipes 21a and 21b, and
Is melted, as shown in FIG. 9, exhaust pipes 21a, 21
b and the container 1 are adhered.

In this embodiment, since solder glass (FT-350 manufactured by Iwaki Glass Co., Ltd.) was used as the sealing material 5, the temperature of the exhaust pipe contact portion was raised to about 350 ° C. to perform the bonding. In this case, it is preferable to prevent the thermal shock to the airtight container by heating the openings 3a and 3b on the airtight container side by a heating means (not shown).

Next, an evacuation step is performed, and the evacuation means 20
A high vacuum of 10 ^-5 Pa or more was set using a and 20b.

Further, in the separation step of the exhaust pipes 21a and 21b, the temperature of the exhaust pipe contact portion is set to about 300 ° C. by using the heating means 25a and 25b to soften the sealing material 5, and the moving devices 22a and 22b are used. By moving the exhaust pipes 21a and 21b above the airtight container 1, the exhaust pipes 21a and 21b are moved.
1b, and at the same time, the opening 3a,
3b is sealed (FIG. 10). At this time, the moving mechanisms 22a and 22b having the up-down elasticity have moved upward.

Next, in this embodiment, as shown in FIG. 11, a flat spacer 111 is arranged in the vacuum-tight container 1, and the openings 3a, 3a are opposed to each other in the longitudinal direction.
b is provided at two places.

By providing two openings 3a and 3b at opposing positions as in this embodiment, it is possible not only to improve the exhaust speed by the exhaust means of the exhaust device, but also to introduce gas or the like into the hermetic container 1. And the introduction time can be shortened.

[0050]

According to the present invention, the opening is provided in the longitudinal direction of the spacer disposed in the airtight container.
Exhaust conductance can be increased and process time can be reduced.

Further, since the exhaust pipe separation and the sealing step can be performed at the same time, the steps are simplified. In addition, since the exhaust device is configured to be in contact with and adhere to the opening of the support frame to exhaust and separate, the exhaust conductance in the hermetic container can be improved, and the exhaust / sealing process can be shortened.

[Brief description of the drawings]

FIG. 1 is a perspective view and a sectional view of a vacuum-tight container according to an embodiment of the present invention.

FIG. 2 is an external view of a vacuum sealing device of the present invention.

FIG. 3 is an external view of a preparatory stage before exhaust according to the present invention.

FIG. 4 is an external view of an exhaust pipe detaching and sealing stage according to the present invention.

FIG. 5 is an external view of an exhaust pipe tip shape according to the present invention.

FIG. 6 is a diagram showing a configuration of an airtight container of the present invention.

FIG. 7 is an external view of the image display device of the present invention.

FIG. 8 is an external view of the vacuum sealing device of the present invention.

FIG. 9 is an external view of a preparatory stage before exhaust according to the present invention.

FIG. 10 is an external view of the exhaust pipe at the stage of detaching and sealing the exhaust pipe according to the present invention.

FIG. 11 is a view showing a configuration of an airtight container of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum airtight container or airtight container 2 Face plate 3 Support frame 3a, 3b Opening 4 Rear plate 5 Sealing material 20, 20a, 20b Vacuum exhaust means 21, 21a, 21b Exhaust pipe 22, 22a, 22b Moving device 23 Base 24 , 24a, 24b Heating power supply device 25, 25a, 25b Heating means 61 Spacer 70 Electron source substrate 71 Rear plate 72 Glass substrate 73 Fluorescent film 74 Metal back 75 Face plate 76 Support frame 77 Spacer 78 Vacuum-tight container 111 Spacer

Claims (7)

[Claims] 1. A method for evacuating an airtight container comprising a rectangular front plate, a rectangular rear plate, and a support frame supporting the periphery between the front plate and the rear plate, wherein at least one location is provided on the support frame. A step of contacting an exhaust pipe with a side portion of the support frame having the opening; an exhaust step of exhausting the inside of the hermetic container through the exhaust pipe; and Sealing the exhaust pipe while separating the exhaust pipe. 2. The sealing method according to claim 1, wherein a plurality of spacers are arranged inside the airtight container. 3. A shape of the spacer is a flat plate, and the opening provided on a side surface of the support frame is arranged in a direction parallel to a long axis direction of the flat spacer. The sealing method according to claim 2. 4. A rectangular front plate, a rectangular back plate,
An airtight container, which is internally sealed with a support frame that supports the periphery between the front plate and the back plate, and has a spacer for maintaining atmospheric pressure resistance between the front plate and the back plate, wherein the support frame includes the front plate. And one or more openings are provided around the periphery between the and the back plate, and the openings are sealed with a sealing material having substantially the same coefficient of thermal expansion as the front plate, the back plate, and the support frame. An airtight container characterized by the above-mentioned. 5. The airtight container according to claim 4, having a fluorescent display surface inside the front plate, and irradiating the fluorescent display surface with electrons at a position in the rear plate facing the fluorescent display surface. An airtight container characterized by being a flat panel display on which the electron-emitting devices are arranged. 6. The airtight container according to claim 4, wherein the shape of the spacer is a flat plate, and the opening provided on a side surface of the support frame is parallel to a long axis direction of the flat spacer. An airtight container characterized by being arranged in a direction. 7. A rectangular front plate, a rectangular back plate,
An exhaust device for exhausting an airtight container which is hermetically sealed by a support frame supporting the periphery between the front plate and the back plate and has a spacer for holding atmospheric pressure between the front plate and the back plate; The frame is provided with one or more elongated openings around the front plate and the back plate, and an exhaust pipe having an opening member covering the opening, and powder coating the tip of the tip of the exhaust pipe. Sealing material, heating means for melting the sealing material at the distal end, and exhaust means for exhausting the inside of the airtight container through the exhaust pipe, wherein the heating means covers the opening and the opening Operate when detaching from the part, and when the exhaust means exhausts, the inside of the hermetic container and the exhaust pipe is exhausted with the sealing material, and when opening, the opening is sealed with the sealing material. Is characterized by Exhaust system.