JP2000208882A - Metal base circuit board and its manufacture - Google Patents

Metal base circuit board and its manufacture

Info

Publication number
JP2000208882A
JP2000208882A JP11004773A JP477399A JP2000208882A JP 2000208882 A JP2000208882 A JP 2000208882A JP 11004773 A JP11004773 A JP 11004773A JP 477399 A JP477399 A JP 477399A JP 2000208882 A JP2000208882 A JP 2000208882A
Authority
JP
Japan
Prior art keywords
circuit
circuit board
metal
copper
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11004773A
Other languages
Japanese (ja)
Other versions
JP3631028B2 (en
Inventor
Tomohiro Miyakoshi
智寛 宮腰
Kazuhiko Kosugi
和彦 小杉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP00477399A priority Critical patent/JP3631028B2/en
Publication of JP2000208882A publication Critical patent/JP2000208882A/en
Application granted granted Critical
Publication of JP3631028B2 publication Critical patent/JP3631028B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To miniaturize a circuit board for high-density by providing, on a metal plate, a circuit which, comprising a composite layer of aluminum and copper, comprises an upper layer part whose cross-section is triangular through an insulating layer. SOLUTION: A circuit 3 comprising a composite layer of aluminum 4 and copper 5 is formed on a metal plate 1 of aluminum, copper, stainless, etc., having thickness, for example, about 0.5-4.0 mm through an insulating layer 2 of a resin comprising an inorganic filler, with the copper surface of the circuit 3 comprising the composite layer of aluminum and copper contacting the insulating layer 2. Here, at least, a part of the circuit comprising the composite layer of aluminum and copper comprises an upper layer part whose cross-section is triangular. Since the current value flowing a circuit is relatively low and a cross-section area is large if the current value is equal, a narrower conductor width and conductor interval are achieved.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、高発熱性電子部品
或いは高発熱性電子部品と制御回路電子部品とが高密度
に実装される混成集積回路に適した、高い放熱性と耐熱
衝撃性に優れ、それ故に信頼性に優れる高密度混成集積
回路を得ることができる混成集積回路用の金属ベース回
路基板とその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high heat-generating electronic component or a hybrid integrated circuit in which a high heat-generating electronic component and a control circuit electronic component are mounted at high density. The present invention relates to a metal-based circuit board for a hybrid integrated circuit capable of obtaining a high-density hybrid integrated circuit that is excellent in reliability and therefore excellent in reliability, and a method of manufacturing the same.

【0002】[0002]

【従来の技術】高発熱性電子部品を実装する回路基板と
して、熱伝導性の良好な金属、例えば、アルミニウム、
銅等の金属板を基材に用い、該金属板上に数十μm程度
の厚さの無機フィラー含有樹脂からなる絶縁層を設け、
更に前記絶縁層上に導電箔からなる回路が積層された金
属ベース回路基板が用いられている。金属ベース回路基
板は、高い熱伝導性を有し、発熱量の大きな電子部品を
搭載し利用できることから、ハイパワー分野の用途等に
好ましく用いられている。
2. Description of the Related Art As a circuit board for mounting a high heat-generating electronic component, a metal having good heat conductivity, for example, aluminum,
Using a metal plate such as copper as a base material, an insulating layer made of an inorganic filler-containing resin having a thickness of about several tens of μm is provided on the metal plate,
Further, a metal base circuit board in which a circuit made of a conductive foil is laminated on the insulating layer is used. BACKGROUND ART A metal-based circuit board has high thermal conductivity and can be used by mounting electronic components that generate a large amount of heat, and is therefore preferably used for applications in the field of high power.

【0003】しかし、前記用途分野向け金属ベース回路
基板に関しては、機能の高度化と共に、基板内に実装さ
れる素子数及び入出力数が増大し、これに伴って入出力
及び素子間の配線数が増加している。そのために、回路
基板内の配線数の増大に伴って、配線に必要な面積が増
大化していて、回路基板の大型化とコストアップが産業
上の解決するべき課題となってきている。
However, with respect to the metal-based circuit board for the application field, the number of elements and the number of inputs and outputs mounted on the board have increased with the advancement of functions, and accordingly, the number of inputs and outputs and the number of wirings between the elements have increased. Is increasing. For this reason, the area required for wiring is increasing with the increase in the number of wirings in the circuit board, and increasing the size and cost of the circuit board has become an industrial problem to be solved.

【0004】金属ベース回路基板において、その回路形
成するための方法の一つとして、金属板上の絶縁層上に
設けた導体箔をエッチングして回路形成する方法が知ら
れているが、この方法においては、スクリーン印刷法に
よりエッチングレジストインクを所望の回路となる部分
の導体箔表面に印刷し、前記インクを硬化した後、前記
導体箔を可溶なエッチング液に浸漬することでエッチン
グを行うが、スクリーン印刷におけるインク量の調整が
容易でなく、容易に回路間隔のせまいものが得られなか
った(特開平7−44087号公報参照)。即ち、前記
インク量を少なくしようとすると、断線や、導体欠損が
生じ、満足な製品を得ることが出来ないという問題があ
り、従来は最小回路間隔は250μm程度のものしか得
られなかった。
As a method for forming a circuit on a metal-based circuit board, a method of forming a circuit by etching a conductive foil provided on an insulating layer on a metal plate is known. In the method, an etching resist ink is printed on the surface of the conductive foil in a portion to be a desired circuit by a screen printing method, and after the ink is cured, etching is performed by immersing the conductive foil in a soluble etching solution. In addition, the adjustment of the amount of ink in screen printing was not easy, and a narrow circuit interval could not be easily obtained (see JP-A-7-44087). That is, if the ink amount is reduced, there is a problem that a disconnection or a conductor defect occurs, and a satisfactory product cannot be obtained. Conventionally, a minimum circuit interval of only about 250 μm has been obtained.

【0005】また、前記技術的な問題のために、回路基
板における回路の機能に応じた設計が行われず、微小信
号のみが流れる回路に関しても、比較的大きな電流を流
す回路と同様な形状(一般的には回路断面が台形又は矩
形)とせざるをえず、回路のピッチが小さくできず、そ
の結果、回路基板の小型化と高密度化を図る上での障害
となっている。
Also, due to the above technical problem, a design corresponding to the function of the circuit on the circuit board is not performed, and a circuit in which only a small signal flows has the same shape as a circuit in which a relatively large current flows (generally, In practice, the cross section of the circuit must be trapezoidal or rectangular, and the pitch of the circuit cannot be reduced. As a result, this is an obstacle to reducing the size and density of the circuit board.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上記の事情
に鑑みてなされたものであり、その目的は、導体間隔を
細くする事により、回路基板の小型化と高密度化を図る
ものである。また、本発明の他の目的は、更に微小信号
回路の導体幅を小さくし、回路基板の一層の小型化と高
密度化を達成することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to reduce the size of a circuit board and increase the density of the circuit board by reducing the distance between conductors. is there. Another object of the present invention is to further reduce the conductor width of the minute signal circuit and achieve further downsizing and higher density of the circuit board.

【0007】[0007]

【課題を解決するための手段】即ち、本発明は、金属板
上に絶縁層を介してアルミニウムと銅の複合層からなる
回路を設けてなる金属ベース回路基板であって、前記回
路が三角形の断面形状の上層部を有する部分を有してい
ることを特徴とする金属ベース回路基板であり、好まし
くは、回路の絶縁層側に銅が設けられていることを特徴
とする前記の金属ベース回路基板である。
That is, the present invention is a metal-based circuit board comprising a metal plate and a circuit comprising a composite layer of aluminum and copper provided on a metal plate with an insulating layer interposed therebetween. A metal-based circuit board having a portion having an upper layer of a cross-sectional shape, preferably the metal-based circuit, wherein copper is provided on an insulating layer side of the circuit. It is a substrate.

【0008】また、本発明は、隣接する回路同士の距離
の最小値が50〜240μmであることを特徴とする前
記の金属ベース回路基板であり、更に好ましくは、回路
が50〜240μmの回路幅の部分を有することを特徴
とする前記の金属ベース回路基板である。
Further, the present invention is the above metal-based circuit board, wherein the minimum value of the distance between adjacent circuits is 50 to 240 μm, and more preferably, the circuit has a circuit width of 50 to 240 μm. The metal-based circuit board described above, comprising:

【0009】更に、本発明は、金属板上に絶縁層を塗布
し、更に、銅層とアルミニウム層とからなる複合箔を前
記絶縁層上に貼着し、加熱硬化させ、しかる後に前記複
合箔上にスクリーン印刷法にてエッチングレジストイン
クを塗布し、該エッチングレジストインクを硬化し、該
エッチングレジストに覆われていない前記複合箔をエッ
チングして回路形成する金属ベース基板の製造方法であ
って、前記複合箔の表面が消失するまでエッチングし回
路形成することを特徴とする金属ベース回路基板の製造
方法であり、好ましくは、前記エッチングレジストイン
クをスクリーン印刷するに際して、エッチングレジスト
インクをスコッパー方式で印刷前の位置に戻すことを特
徴とする前記の金属ベース回路基板の製造方法である。
Further, the present invention provides a method for applying an insulating layer on a metal plate, further comprising attaching a composite foil composed of a copper layer and an aluminum layer on the insulating layer and curing by heating. A method for producing a metal base substrate, in which an etching resist ink is applied by a screen printing method, the etching resist ink is cured, and a circuit is formed by etching the composite foil that is not covered with the etching resist, A method of manufacturing a metal-based circuit board, characterized in that a circuit is formed by etching until the surface of the composite foil disappears, and preferably, when the etching resist ink is screen-printed, the etching resist ink is printed by a copper method. The method for manufacturing a metal-based circuit board according to claim 1, wherein the metal-based circuit board is returned to a previous position.

【0010】[0010]

【発明の実施の形態】以下、本発明につき図をもって説
明する。図1は、本発明の金属ベース回路基板の一例を
示す回路の断面拡大図である。本発明の金属ベース回路
基板は、アルミニウム、銅、ステンレス等の厚さ0.5
〜4.0mm程度の金属板1上に無機充填材を含有する
樹脂からなる絶縁層2を介してアルミニウム4と銅5と
の複合層からなる回路3が形成されている。図1におい
てはアルミニウムと銅の複合層からなる回路3の銅面が
絶縁層2に接して設けられている。本発明において、ア
ルミニウム面が絶縁層2に接して設けられていても構わ
ないが、銅層が絶縁層2に接して設けるほうが、絶縁層
2と回路3との接合強度を大きくすることが容易であ
り、好ましい。然るに、銅層上に無電解或いは電解メッ
キで針状或いは粒状の銅粒子からなる層を設けたり、化
学薬品による処理で前記表面を粗化する公知技術を容易
に適用できるからである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is an enlarged sectional view of a circuit showing an example of the metal-based circuit board of the present invention. The metal base circuit board of the present invention has a thickness of 0.5, such as aluminum, copper, and stainless steel.
A circuit 3 made of a composite layer of aluminum 4 and copper 5 is formed on a metal plate 1 having a thickness of about 4.0 mm via an insulating layer 2 made of a resin containing an inorganic filler. In FIG. 1, a copper surface of a circuit 3 composed of a composite layer of aluminum and copper is provided in contact with an insulating layer 2. In the present invention, although the aluminum surface may be provided in contact with the insulating layer 2, the bonding strength between the insulating layer 2 and the circuit 3 can be easily increased by providing the copper layer in contact with the insulating layer 2. Is preferred. This is because a known technique of providing a layer made of acicular or granular copper particles on the copper layer by electroless or electrolytic plating or roughening the surface by treatment with a chemical agent can be easily applied.

【0011】本発明の金属ベース回路基板は、前記アル
ミニウムと銅とからなる複合層で構成された回路の少な
くとも一部が三角形の断面形状の上層部分を有している
ことを特徴とする。従来の混成集積回路では回路が一般
に台形状(図2参照)あるいは矩形状の断面を有するの
に対して、本発明の金属ベース回路基板は前記構成を採
用しているので、回路に流す電流値が比較的に小さく、
しかも電流値が同じ場合には、断面積を大きくとれるこ
とから、導体幅を小さく、また導体間隔を小さくするこ
とができる。その結果、本発明の金属ベース回路用基板
では、回路を高密度にする事が出来、更に高発熱性電子
部品を搭載することができるという特徴を有する。
The metal-based circuit board according to the present invention is characterized in that at least a part of the circuit composed of the composite layer made of aluminum and copper has an upper layer having a triangular cross section. In a conventional hybrid integrated circuit, a circuit generally has a trapezoidal shape (see FIG. 2) or a rectangular cross section. On the other hand, the metal base circuit board of the present invention employs the above-described configuration, so that a current value flowing through the circuit is reduced. Is relatively small,
In addition, when the current value is the same, the cross-sectional area can be increased, so that the conductor width and the conductor interval can be reduced. As a result, the metal-based circuit board of the present invention has a feature that the circuit can have a high density and a high heat-generating electronic component can be mounted.

【0012】本発明の金属ベース回路基板は、隣接する
回路同士の距離の最小値が50〜240μmであり、好
ましくは、回路が50〜240μmの回路幅の部分を有
することを特徴とする。回路同士の距離の最小値が50
μm未満では、時として、実使用時に前記隣接回路同士
の電気絶縁性が満足できなくなる用途があるし、240
μmを超える場合には、本発明を適用するべき理由がな
くなり、従来公知のもので充分であるからである。ま
た、同じ理由で、本発明においては、回路が50〜24
0μmの回路幅の部分を有することが好ましい。
The metal-based circuit board of the present invention is characterized in that the minimum value of the distance between adjacent circuits is 50 to 240 μm, and preferably, the circuit has a portion having a circuit width of 50 to 240 μm. The minimum value of the distance between circuits is 50
If the thickness is less than μm, there are occasions where the electrical insulation between the adjacent circuits cannot be satisfied when actually used,
If it exceeds μm, there is no reason to apply the present invention, and conventionally known ones are sufficient. For the same reason, in the present invention, the circuit is 50 to 24.
It is preferable to have a portion having a circuit width of 0 μm.

【0013】本発明の金属ベース回路基板において、絶
縁層2に用いる樹脂としては、エポキシ樹脂、シリコー
ン樹脂、ポリイミド樹脂、BTレジン等が用いられる
が、金属板1或いは回路3との接合強度が高いことから
エポキシ樹脂が好ましい。また、絶縁層2に含有される
無機充填材としては、電気絶縁性で熱伝導性のものが用
いられ、例えばシリカ、アルミナ、窒化アルミニウム、
窒化珪素、窒化硼素等のセラミックス粉末が用いられ
る。また、絶縁層2の厚さは40〜300μmが一般的
である。
In the metal-based circuit board of the present invention, the resin used for the insulating layer 2 is epoxy resin, silicone resin, polyimide resin, BT resin or the like, but has a high bonding strength to the metal plate 1 or the circuit 3. For this reason, epoxy resins are preferred. As the inorganic filler contained in the insulating layer 2, an electrically insulating and thermally conductive material is used, such as silica, alumina, aluminum nitride, or the like.
Ceramic powder such as silicon nitride and boron nitride is used. The thickness of the insulating layer 2 is generally 40 to 300 μm.

【0014】本発明に用いるアルミニウムと銅とからな
る複合層は、圧延法、メッキ法等の従来公知の方法で得
られるいずれの方法のもので構わない。その厚みについ
ては、全体厚みが20〜85μmが好ましく、そのうち
アルミニウム厚みは10〜50μmが好ましい。全体厚
みが20μm未満では、充分な電流値を回路に流すこと
ができないし、85μmを超えるものは50〜240μ
mの回路幅や回路間隔の製造が困難であるからである。
また、アルミニウム厚さが10μm未満では、安定した
ワイヤーボンディング性が確保できないことがあるし、
50μmを超えてはアルミのエッチング時にエッチング
レジストの剥離が発生し、回路の製造が困難であるから
である。
The composite layer composed of aluminum and copper used in the present invention may be any of those obtained by a conventionally known method such as a rolling method and a plating method. As for its thickness, the total thickness is preferably from 20 to 85 μm, of which the aluminum thickness is preferably from 10 to 50 μm. If the total thickness is less than 20 μm, a sufficient current value cannot be passed through the circuit.
This is because it is difficult to manufacture a circuit width of m or a circuit interval.
If the aluminum thickness is less than 10 μm, stable wire bonding may not be ensured,
If the thickness exceeds 50 μm, peeling of the etching resist occurs at the time of etching of aluminum, and it is difficult to manufacture a circuit.

【0015】以下、実施例、比較例をもって、本発明を
更に詳細に説明する。
Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples.

【0016】[0016]

【実施例】〔実施例1〕厚さ1.5mmのアルミニウム
板上に、酸化アルミニウム(昭和電工社製;SRW)を
55体積%含有するビスフェノールA型エポキシ樹脂
(油化シェル社製;EP828)を絶縁層の厚さが50
μmになるように塗布し、更にアルミニウム層と銅層と
の複合層からなる金属箔を銅層が前記絶縁層に接するよ
うに配置し、加圧下で加熱することで前記絶縁層を硬化
して金属ベース基板を作製した。このとき、アルミニウ
ム層の厚さが40μmであり、銅層の厚さは10μmで
あった。
EXAMPLES Example 1 Bisphenol A type epoxy resin containing 55% by volume of aluminum oxide (manufactured by Showa Denko; SRW) on an aluminum plate having a thickness of 1.5 mm (manufactured by Yuka Shell Co .; EP828) When the thickness of the insulating layer is 50
μm, and a metal foil composed of a composite layer of an aluminum layer and a copper layer is further arranged so that the copper layer is in contact with the insulating layer, and the insulating layer is cured by heating under pressure. A metal base substrate was manufactured. At this time, the thickness of the aluminum layer was 40 μm, and the thickness of the copper layer was 10 μm.

【0017】前記金属ベース基板のアルミニウム板の裏
面にポリプロピレンからなる保護シートを貼った後、ア
ルミニウムと銅の複合層からなる金属箔のアルミニウム
上に、スクリーン印刷法を用いて所望の位置にエッチン
グレジストをマスクした後、苛性ソーダ水溶液を用いて
アルミニウムをエッチングした。
After attaching a protective sheet made of polypropylene to the back surface of the aluminum plate of the metal base substrate, an etching resist is formed at a desired position on a metal foil made of a composite layer of aluminum and copper by using a screen printing method. Then, aluminum was etched using an aqueous solution of caustic soda.

【0018】前記スクリーン印刷法においては、レジス
トインクをスコッパー方式(前回の印刷を終了したとき
にスクリーン上に残っているインクを、すくい上げて、
スクリーンに触れることなく、空中を通過させることで
印刷前の位置に戻し、しかる後次回の印刷を行う方式)
により、スクリーンからのインク量を限定し、制御し
た。
In the above-mentioned screen printing method, a resist ink is used in a copper method (scooping up the ink remaining on the screen when the previous printing is completed,
(The method of returning to the position before printing by passing through the air without touching the screen, and then performing the next printing)
, The amount of ink from the screen was limited and controlled.

【0019】次に、前記レジストを除去後、銅層の所望
部分にレジストを再度塗布し、また、前記のアルミニウ
ムを用いて、エッチングレジストとし、硫酸120g/
lと過酸化水素45g/lとの混液により銅層をエッチ
ングした。その後、エッチングレジスト並びに保護シー
トを除去することで金属ベース回路基板を得た。
Next, after removing the resist, a resist is applied again to a desired portion of the copper layer, and an etching resist is formed by using the above-mentioned aluminum.
The copper layer was etched with a mixed solution of 1 and 45 g / l of hydrogen peroxide. Then, a metal base circuit board was obtained by removing an etching resist and a protection sheet.

【0020】この金属ベース回路基板は、信号回路部分
において、最小の回路幅100μmで、最小の導体間隔
が100μmであった。また、信号回路部分について
は、その面積を、従来の金属ベース回路基板の場合に要
した面積の2.5分の1に縮小することができ、その結
果として、金属ベース回路基板の全体面積が従来のもの
の約50%に縮小され、高密度化が達成された。
This metal base circuit board had a minimum circuit width of 100 μm and a minimum conductor interval of 100 μm in the signal circuit portion. Further, the area of the signal circuit portion can be reduced to one-half of the area required for the conventional metal base circuit board, and as a result, the entire area of the metal base circuit board can be reduced. The density was reduced to about 50% of the conventional one, and a high density was achieved.

【0021】[0021]

【発明の効果】本発明の金属ベース回路基板は、その回
路の少なくとも一部の上層部を三角形の断面形状とした
結果、高密度に回路形成ができ、比較的小さな電流を流
す回路を効率よく搭載できる特徴があるので、信号回路
を要する混成集積回路用基板として好適である。
According to the metal-based circuit board of the present invention, at least a part of the upper layer of the circuit has a triangular cross-sectional shape, so that a circuit can be formed at a high density and a circuit through which a relatively small current flows can be efficiently formed. Since it has a feature that it can be mounted, it is suitable as a substrate for a hybrid integrated circuit requiring a signal circuit.

【0022】また、本発明の方法によれば、前記断面形
状を有し、回路同士の距離の最小値が50〜240μ
m、更に、回路が50〜240μmの回路幅の部分を有
する金属ベース回路基板を安定して得ることができ、産
業上非常に有用である。
Further, according to the method of the present invention, the circuit has the cross-sectional shape, and the minimum value of the distance between the circuits is 50 to 240 μm.
m, and furthermore, a metal-based circuit board having a circuit having a portion with a circuit width of 50 to 240 μm can be stably obtained, which is industrially very useful.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の金属ベース回路基板の回路の断面拡大
図。
FIG. 1 is an enlarged cross-sectional view of a circuit of a metal-based circuit board according to the present invention.

【図2】従来公知の金属ベース回路基板の回路の断面拡
大図。
FIG. 2 is an enlarged cross-sectional view of a circuit of a conventionally known metal-based circuit board.

【符号の説明】[Explanation of symbols]

1 金属板 2 絶縁層 3 回路 4 アルミニウム 5 銅 DESCRIPTION OF SYMBOLS 1 Metal plate 2 Insulating layer 3 Circuit 4 Aluminum 5 Copper

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4E351 AA03 AA14 BB01 BB23 BB24 BB30 BB35 DD04 DD10 DD54 FF04 FF07 FF08 FF10 GG20 5E315 AA03 BB01 BB03 BB15 BB18 CC01 DD13 DD16 DD17 GG05 GG22 5E338 AA01 AA18 BB63 CC01 CD03 EE02 EE23 5E339 AB07 AD01 BC02 BC03 BD03 BD06 BE13 CE19  ──────────────────────────────────────────────────続 き Continuing on the front page F term (reference) 4E351 AA03 AA14 BB01 BB23 BB24 BB30 BB35 DD04 DD10 DD54 FF04 FF07 FF08 FF10 GG20 5E315 AA03 BB01 BB03 BB15 BB18 CC01 DD13 DD16 DD17 GG05 GG22 5E338 BB01A18A01A AD01 BC02 BC03 BD03 BD06 BE13 CE19

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】金属板上に絶縁層を介してアルミニウムと
銅との複合層からなる回路を設けてなる金属ベース回路
基板であって、前記回路が三角形の断面形状の上層部を
有する部分を有していることを特徴とする金属ベース回
路基板。
1. A metal base circuit board comprising a metal plate provided with a circuit comprising a composite layer of aluminum and copper via an insulating layer, wherein the circuit has a portion having an upper layer portion having a triangular cross section. A metal-based circuit board, comprising:
【請求項2】前記回路の絶縁層側に銅が設けられている
ことを特徴とする請求項1記載の金属ベース回路基板。
2. The metal-based circuit board according to claim 1, wherein copper is provided on the insulating layer side of the circuit.
【請求項3】隣接する回路同士の距離の最小値が50〜
240μmであることを特徴とする請求項1又は請求項
2記載の金属ベース回路基板。
3. The minimum value of the distance between adjacent circuits is 50 to 50.
The metal-based circuit board according to claim 1, wherein the thickness of the metal-based circuit board is 240 μm.
【請求項4】回路が50〜240μmの回路幅の部分を
有することを特徴とする請求項1、請求項2又は請求項
3記載の金属ベース回路基板。
4. The metal-based circuit board according to claim 1, wherein the circuit has a portion having a circuit width of 50 to 240 μm.
【請求項5】金属板上に絶縁層を塗布し、更に銅層とア
ルミニウム層とからなる複合箔を前記絶縁層上に貼着
し、加熱硬化させ、しかる後に前記複合箔上にスクリー
ン印刷法にてエッチングレジストインクを塗布し、該エ
ッチングレジストインクを硬化し、該エッチングレジス
トに覆われていない前記複合箔をエッチングして回路形
成する金属ベース基板の製造方法であって、前記複合箔
の表面が消失するまでエッチングし回路形成することを
特徴とする金属ベース回路基板の製造方法。
5. An insulating layer is coated on a metal plate, and a composite foil composed of a copper layer and an aluminum layer is pasted on the insulating layer and cured by heating, and then a screen printing method is performed on the composite foil. A method of manufacturing a metal base substrate, comprising applying an etching resist ink, curing the etching resist ink, and etching the composite foil not covered with the etching resist to form a circuit, wherein the surface of the composite foil is And forming a circuit by etching until disappearance of the metal base circuit board.
【請求項6】前記エッチングレジストインクをスクリー
ン印刷するに際し、エッチングレジストインクをスコッ
パー方式で印刷前の位置に戻すことを特徴とする請求項
5記載の金属ベース回路基板の製造方法。
6. The method of manufacturing a metal-based circuit board according to claim 5, wherein, when screen-printing the etching resist ink, the etching resist ink is returned to a position before printing by a scooper method.
JP00477399A 1999-01-12 1999-01-12 Metal base circuit board and manufacturing method thereof Expired - Fee Related JP3631028B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP00477399A JP3631028B2 (en) 1999-01-12 1999-01-12 Metal base circuit board and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00477399A JP3631028B2 (en) 1999-01-12 1999-01-12 Metal base circuit board and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JP2000208882A true JP2000208882A (en) 2000-07-28
JP3631028B2 JP3631028B2 (en) 2005-03-23

Family

ID=11593172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00477399A Expired - Fee Related JP3631028B2 (en) 1999-01-12 1999-01-12 Metal base circuit board and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP3631028B2 (en)

Also Published As

Publication number Publication date
JP3631028B2 (en) 2005-03-23

Similar Documents

Publication Publication Date Title
JP3312723B2 (en) Heat conductive sheet, method of manufacturing the same, heat conductive substrate using the same, and method of manufacturing the same
JP4421081B2 (en) Power module and manufacturing method thereof
JP4172893B2 (en) Method for manufacturing metal-based circuit board
JP3418617B2 (en) Heat conductive substrate and semiconductor module using the same
JP2001223450A (en) Metal base circuit board
JP3156798B2 (en) Circuit board for semiconductor mounting
JP2001217511A (en) Heat-conductive substrate and its manufacturing method
JP2000208882A (en) Metal base circuit board and its manufacture
JP3862454B2 (en) Metal-based multilayer circuit board
JP4591181B2 (en) Printed wiring board
JP3358694B2 (en) Metal-based multilayer circuit board
JP4187082B2 (en) Metal base circuit board and manufacturing method thereof
JP3231295B2 (en) Metal base circuit board
JP4265386B2 (en) Double-sided metal-clad laminate and printed wiring board
JPS60167399A (en) High thermal conductive metal base circuit board
JP2008021817A (en) Heat conducting base board, manufacturing method thereof, power supply unit, and electronic equipment
JPH10233581A (en) Metallic base multilayered circuit board
JPH08148781A (en) Metal base multilayer circuit board
JP3199193B2 (en) Circuit board for mounting semiconductor and method of manufacturing the same
JP3505170B2 (en) Thermal conductive substrate and method of manufacturing the same
JP3167360B2 (en) Manufacturing method of substrate for hybrid integrated circuit
JPS6260286A (en) Printed circuit board
JPS622591A (en) Manufacture of metal base hybrid integrated circuit board
JPH04276686A (en) Multilayer metal base substrate
JPH11112153A (en) Multilayered circuit board having metallic base

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040622

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040816

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20041025

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041116

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20041126

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20041214

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20041215

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071224

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081224

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081224

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091224

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091224

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101224

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111224

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111224

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121224

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121224

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131224

Year of fee payment: 9

LAPS Cancellation because of no payment of annual fees