JP2000183508A - Collet for mounting electronic component - Google Patents

Collet for mounting electronic component

Info

Publication number
JP2000183508A
JP2000183508A JP10375457A JP37545798A JP2000183508A JP 2000183508 A JP2000183508 A JP 2000183508A JP 10375457 A JP10375457 A JP 10375457A JP 37545798 A JP37545798 A JP 37545798A JP 2000183508 A JP2000183508 A JP 2000183508A
Authority
JP
Japan
Prior art keywords
collet
electronic component
mounting
bonding material
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10375457A
Other languages
Japanese (ja)
Inventor
Masakazu Yamazoe
正和 山添
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP10375457A priority Critical patent/JP2000183508A/en
Publication of JP2000183508A publication Critical patent/JP2000183508A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a collet for mounting an electronic component, such as a bear chip and a chip part or the like in normalized height without inclination. SOLUTION: Plural protrusions 10 are formed at the top end of a collect main body 3 whose top end is used as an absorption face 3a of a bear chip 4, and a channel 11 for supplying cooling air or the like is formed inside the collet main body 3. Then, at the bringing of the bear chip 4 into contact with connecting materials (solder) 6 on a substrate 5 through pressurizing it, the protrusions 10 are butted against the substrate 5 so that the held height of the bear chip 4 can be made fixed, and the cooling air is injected through the channel 11 in this state so that fused solder can be quickly solidified. Thus, even if the collet 1 is separated from the bear chip 4 in a fast timing, the bear chip 4 will not be displaced.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ベアチップ、チッ
プ部品等の電子部品を基板、リードフレーム等の装着対
象物に接合材を介して装着するためのコレットに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a collet for mounting an electronic component such as a bare chip or a chip component on a mounting object such as a substrate or a lead frame via a bonding material.

【0002】[0002]

【従来の技術】この種のコレットは、図3に符号1にて
示すように、真空引き用通路2を有するコレット本体3
の先端を電子部品4の吸着面3aとして用いる構造とな
っている。そして、この種のコレット1は、通常専用の
部品装着装置(図示略)に組込まれて部品供給ステーシ
ョンと装着ステーションとの間を移動し、例えば、装着
ステーションに位置決めされた基板(装着対象物)5に
上方から接近して、その先端の吸着面3aに吸着保持し
た電子部品(ここでは、ベアチップ)4を該基板5上に
予め形成されたはんだ、接着剤等の接合材6に対して押
圧接触させるように動作する。なお、コレット1として
は、図示のように先端を平坦形状とした平コレットの他
に、先端を凹形状とした角錐コレットがある。
2. Description of the Related Art As shown by a reference numeral 1 in FIG.
Is used as the suction surface 3a of the electronic component 4. This type of collet 1 is usually incorporated in a dedicated component mounting device (not shown) and moves between a component supply station and a mounting station. For example, a substrate (mounting target) positioned at the mounting station is used. The electronic component (in this case, a bare chip) 4 sucked and held on the suction surface 3a at the tip thereof is pressed against a bonding material 6 such as a solder or an adhesive formed in advance on the substrate 5 by approaching the upper surface 5 from above. Operate to make contact. In addition, as the collet 1, there is a pyramid collet having a concave tip in addition to a flat collet having a flat tip as shown in the figure.

【0003】[0003]

【発明が解決しようとする課題】ところで、上記した電
子部品の実装プロセスによれば、基板5上への電子部品
4の装着高さは、コレット1を移動させる部品装着装置
側の高さ制御に依存しており、このため、基板5や接合
材6の厚み誤差、部品装着装置の制御精度あるいは部品
装着装置に対するコレット1の組付誤差によっては、接
合材6に対する電子部品4の接触圧力が不均衡になり、
図4に示すように接合材6が不均等に変形して、基板5
に対して電子部品4が傾斜して装着されてしまうことが
あった。
According to the above-described electronic component mounting process, the mounting height of the electronic component 4 on the substrate 5 is controlled by the height control of the component mounting apparatus for moving the collet 1. Therefore, depending on the thickness error of the substrate 5 and the bonding material 6, the control accuracy of the component mounting device, or the mounting error of the collet 1 with the component mounting device, the contact pressure of the electronic component 4 with the bonding material 6 is not sufficient. Equilibrium,
As shown in FIG. 4, the bonding material 6 is deformed unevenly,
In some cases, the electronic component 4 may be mounted obliquely.

【0004】また、電子部品の実装プロセスにおいて
は、上記した基板5をヒータプレート7上に載置して、
電子部品4を接合材6としてのはんだに押圧接触させる
前にヒータプレート7の熱ではんだを溶融させ、あるい
は電子部品4を接合材6としての接着剤(通常、熱硬化
性樹脂)に押圧接触させた後、ヒータプレート7の熱で
接着剤を加熱固化させて、一工程内で実装を完了させる
場合がある。この場合、サイクルタイムの短縮を図るた
め、基板5上の接合材6に電子部品4を押圧接触させた
後、接合材6の完全固化を待たずにコレット1を電子部
品4から離すようにしているが、コレット1を電子部品
4から離してから接合材6が完全固化するまでの間に、
電子部品4の重量アンバランスによって、その重い方が
より大きく沈降し、上記したと同様に基板5に対して電
子部品4が傾斜して装着されてしまうことがあった。
In the electronic component mounting process, the substrate 5 is placed on the heater plate 7 and
Before the electronic component 4 is pressed into contact with the solder as the bonding material 6, the solder is melted by the heat of the heater plate 7, or the electronic component 4 is pressed into contact with an adhesive (usually a thermosetting resin) as the bonding material 6. Then, the adhesive may be heated and solidified by the heat of the heater plate 7 to complete the mounting in one process. In this case, in order to shorten the cycle time, after the electronic component 4 is pressed against the bonding material 6 on the substrate 5, the collet 1 is separated from the electronic component 4 without waiting for the bonding material 6 to be completely solidified. However, between the time when the collet 1 is separated from the electronic component 4 and the time when the bonding material 6 is completely solidified,
Due to the weight imbalance of the electronic component 4, the heavier one sinks more, and the electronic component 4 may be inclinedly mounted on the substrate 5 as described above.

【0005】なお、例えば、特開平8−335774号
公報には、リフローはんだ付けにより電子部品を実装す
る技術分野において、電子部品と基板との間にスペーサ
プレートを介在させて、両者の間隔を一定に維持する対
策を採っているが、このような対策によれば、スペーサ
プレートの設置ための余分なスペースを確保しなければ
ならないため、高密度実装が困難となり、その上、スペ
ーサを挿脱する面倒な作業が必要なため、製造能率の低
下が避けられないようになる。
[0005] For example, in Japanese Patent Application Laid-Open No. 8-335774, in a technical field of mounting an electronic component by reflow soldering, a spacer plate is interposed between the electronic component and a substrate so that the distance between the two is fixed. However, according to such a measure, extra space for installing the spacer plate must be secured, which makes high-density mounting difficult, and furthermore, the spacer is inserted and removed. Since a troublesome operation is required, a decrease in manufacturing efficiency is inevitable.

【0006】本発明は、上記した従来の問題点に鑑みて
なされたもので、その目的とするところは、高密度実装
並びに製造能率を犠牲にすることなく電子部品を規定の
高さに傾きなく装着することができる部品装着用コレッ
トを提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and has as its object to provide electronic components without tilting to a prescribed height without sacrificing high-density mounting and manufacturing efficiency. An object of the present invention is to provide a component mounting collet that can be mounted.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
の第1の発明は、真空引き通路を有するコレット本体の
先端を電子部品の吸着面として用い、該吸着面に吸着保
持した電子部品を装着対象物に接合材を介して装着する
コレットにおいて、コレット本体の先端に、装着対象物
に当接し該装着対象物に対する電子部品の保持高さを一
定とする複数の突起を設ける構成としたことを特徴とす
る。
According to a first aspect of the present invention, there is provided an electronic component having a collet body having a vacuum passage as a suction surface of an electronic component, the electronic component being held by suction on the suction surface. In a collet to be mounted on a mounting target via a bonding material, a plurality of projections are provided at the tip of the collet main body, the projections being in contact with the mounting target and holding the electronic component at a fixed height with respect to the mounting target. It is characterized by.

【0008】この第1の発明においては、コレット本体
の先端に設けた突起が装着対象物に当接して、電子部品
の保持高さを機械的に一定とするので、装着対象物や接
合材の厚み誤差、部品装着装置の制御精度、コレットの
組付誤差などによらず接合材の厚さは均等となる。
In the first aspect of the present invention, the projection provided at the tip of the collet body comes into contact with the object to be mounted, and the holding height of the electronic component is made mechanically constant. The thickness of the joining material is uniform regardless of the thickness error, the control accuracy of the component mounting device, the assembly error of the collet, and the like.

【0009】また、上記の目的を達成するための第2の
発明は、真空引き通路を有するコレット本体の先端を電
子部品の吸着面として用い、該吸着面に吸着保持させた
電子部部品を装着対象物に接合材を介して装着するコレ
ットにおいて、コレット本体に、その先端から熱媒体を
噴出させる熱媒体用通路を設ける構成としたことを特徴
とする。
According to a second aspect of the present invention, the tip of a collet main body having a vacuum passage is used as a suction surface of an electronic component, and the electronic component which is sucked and held on the suction surface is mounted. A collet to be mounted on an object via a bonding material is characterized in that a collet main body is provided with a heat medium passage for ejecting a heat medium from its tip.

【0010】この第2の発明においては、電子部品を接
合材に押圧接触させた後、適当なタイミングで該通路に
冷気または暖気を供給することで、接合材が急速に固化
し、電子部品の不均一な沈降が防止される。
In the second aspect of the invention, after the electronic component is brought into contact with the bonding material, cold or warm air is supplied to the passage at an appropriate timing, whereby the bonding material is rapidly solidified, and the electronic component is hardened. Uneven settling is prevented.

【0011】[0011]

【発明の実施の形態】以下、本発明の実施の形態を添付
図面に基いて説明する。
Embodiments of the present invention will be described below with reference to the accompanying drawings.

【0012】図1および図2は、本発明の1つの実施の
形態としての電子部品装着用コレットを示したものであ
る。なお、本実施の形態は、前出図3に示したものと同
様、ベアチップ(電子部品)4を基板(装着対象物)5
に装着するためのもので、その基本構造は、図3に示し
たものと同じであるので、ここでは同一部分に同一符号
を付すこととする。本実施の形態において、コレット本
体3は四角柱状をなしており、その先端には、4つの辺
に沿って同一高さの壁状の突起10が突設されている。
各突起10は、基板5上に予め形成された接合材(はん
だ、接着剤等)6と干渉しないように、相対向する同士
で十分なる間隔を開けて配置されている。また、各突起
10の高さは、基板5上に予め形成された接合材6の厚
さとベアチップ4の厚さとを合算した値よりもわずか小
さな値となるように設定されている。
FIG. 1 and FIG. 2 show an electronic component mounting collet as one embodiment of the present invention. In this embodiment, a bare chip (electronic component) 4 is attached to a substrate (mounting object) 5 in the same manner as shown in FIG.
Since the basic structure is the same as that shown in FIG. 3, the same parts are denoted by the same reference numerals. In the present embodiment, the collet main body 3 has a quadrangular prism shape, and a wall-shaped projection 10 having the same height protrudes from the tip of the collet main body 3 along four sides.
The projections 10 are arranged facing each other at a sufficient interval so as not to interfere with the bonding material (solder, adhesive, or the like) 6 formed on the substrate 5 in advance. The height of each projection 10 is set to be slightly smaller than the sum of the thickness of the bonding material 6 formed in advance on the substrate 5 and the thickness of the bare chip 4.

【0013】上記コレット本体3にはまた、真空引き通
路2を囲む配置で複数(こゝでは、4つ)の熱媒体用通
路11が設けられている。この熱媒体用通路11には、
図示を略す暖気発生源または冷気発生源から冷気または
暖気が選択的に供給されるようになっており、この冷気
または暖気は、コレット本体3の先端から電子部品4の
周りに噴出する。なお、前記した突起10および通路1
1の数、大きさ、設置部位等は任意である。
The collet body 3 is also provided with a plurality (here, four) of heat medium passages 11 arranged so as to surround the evacuation passage 2. In this heat medium passage 11,
Cool air or warm air is selectively supplied from a warm air source or a cold air source (not shown), and the cool air or warm air blows out around the electronic component 4 from the tip of the collet body 3. The protrusion 10 and the passage 1
The number, size, location, etc. of 1 are arbitrary.

【0014】本コレット1は、前記したように専用の部
品装着装置(図示略)に組込まれて部品供給ステーショ
ンと装着ステーションとの間を移動するようになってお
り、電子部品装着(実装)に際しては、前記部品供給ス
テーションでそのコレット本体3の先端の吸着面3aに
ベアチップ4を受取った後、前記装着ステーション側に
移動して基板5に対して上方から接近し、前記吸着面3
aに吸着保持したベアチップ4を該基板5上の接合材6
に押圧接触させる。この時、コレット1は、そのコレッ
ト本体3の先端に設けた突起10を基板5に当接させる
まで下動し、これにより電子部品4は規定の高さに傾き
なく位置決め保持される。
The collet 1 is incorporated in a dedicated component mounting device (not shown) as described above, and moves between a component supply station and a mounting station. After receiving the bare chip 4 on the suction surface 3a at the tip of the collet main body 3 at the component supply station, move to the mounting station side, approach the substrate 5 from above, and
a the bonding material 6 on the substrate 5
To make pressure contact. At this time, the collet 1 moves down until the projection 10 provided at the tip of the collet main body 3 comes into contact with the substrate 5, whereby the electronic component 4 is positioned and held at a predetermined height without tilting.

【0015】こゝで、接合材6がはんだからなる場合
は、電子部品4を接合材(はんだ)6に押圧接触させる
前にヒータプレート7の熱ではんだが溶融状態となって
おり、前記した電子部品4の押圧接触に応じて接合材6
も規定の厚さとなる。一方、この電子部品4の押圧接触
と同時にヒータプレート7による加熱が停止され、これ
と同時にコレット本体3の熱媒体用通路11に図示を略
す冷気発生源から冷気が供給される。すると、コレット
本体3の先端から電子部品4および接合材6の周りに冷
気が噴射され、これにより溶融状態にあったはんだが急
速に冷やされて固化(凝固)し、電子部品4が速やかに
不動状態となる。したがって、電子部品4を接合材6に
押圧接触させた後、比較的早いタイミングでコレット本
体3の真空引き用通路2に対する負圧導入を停止し、コ
レット1を電子部品4から離間させても電子部品4の位
置が変化することはなく、電子部品4は規定の高さに傾
きなく装着されるようになる。
When the bonding material 6 is made of solder, the solder is in a molten state by the heat of the heater plate 7 before the electronic component 4 is pressed against the bonding material (solder) 6. The bonding material 6 according to the pressing contact of the electronic component 4
Also has a specified thickness. On the other hand, the heating by the heater plate 7 is stopped simultaneously with the pressing contact of the electronic component 4, and at the same time, cool air is supplied to the heat medium passage 11 of the collet body 3 from a cool air source (not shown). Then, cool air is injected from the tip of the collet main body 3 around the electronic component 4 and the joining material 6, whereby the solder in the molten state is rapidly cooled and solidified (solidified), and the electronic component 4 is quickly immobilized. State. Therefore, after the electronic component 4 is brought into contact with the bonding material 6, the introduction of the negative pressure into the evacuation passage 2 of the collet main body 3 is stopped at a relatively early timing, and even if the collet 1 is separated from the electronic component 4, the electronic The position of the component 4 does not change, and the electronic component 4 is mounted at a specified height without inclination.

【0016】一方、接合材6が接着剤(熱硬化性樹脂)
からなる場合は、コレット1の移動により電子部品4を
接合材(接着剤)6に押圧接触させると同時にヒータプ
レート7による加熱が開始され、これと同時にコレット
本体3の熱媒体用通路11に図示を略す暖気発生源から
暖気が供給される。すると、コレット本体3の先端から
電子部品4および接合材6の周りに暖気が噴射され、こ
れにより接着剤が硬化温度まで急速に加熱されて固化
し、電子部品4が速やかに不動状態となる。したがっ
て、上記接合材6としてはんだを用いた場合と同様に電
子部品4を接合材6に押圧接触させた後、比較的早いタ
イミングでコレット1を電子部品4から離間させても電
子部品4の位置が変化することはなく、電子部品4は規
定の高さに傾きなく装着されるようになる。
On the other hand, the bonding material 6 is made of an adhesive (thermosetting resin).
When the collet 1 is moved, the electronic component 4 is pressed into contact with the bonding material (adhesive) 6 and the heating by the heater plate 7 is started at the same time. The warm air is supplied from a warm air generating source. Then, warm air is injected from the tip of the collet body 3 around the electronic component 4 and the bonding material 6, whereby the adhesive is rapidly heated to the curing temperature and solidified, and the electronic component 4 quickly becomes immobile. Therefore, even when the electronic component 4 is pressed and contacted with the bonding material 6 in the same manner as when the solder is used as the bonding material 6, even if the collet 1 is separated from the electronic component 4 at a relatively early timing, the position of the electronic component 4 can be reduced. Does not change, and the electronic component 4 is mounted at a specified height without inclination.

【0017】なお、上記実施の形態においては、コレッ
ト本体3に位置決め用突起10と熱媒体用通路11とを
設けるようにしたが、本発明は、前記突起10と通路1
1とうち、何れか一方のみをコレット本体3に設けるよ
うにしてもよいものである。位置決め用突起10のみを
設けた場合は、基板5や接合材6の寸法誤差、部品装着
装置の制御精度、該部品装着装置に対するコレット1の
組付誤差などによらず、基板5の接合面に対して電子部
品4を規定の高さに傾きなく位置決め保持でき、この結
果、位置決め精度の悪化に起因する電子部品4の傾斜実
装を確実に防止でき、電子部品4の実装精度は向上す
る。また、このような傾斜実装の防止効果は、後にリフ
ローによりはんだ付けを完了させる実装プロセスに適用
しても同様に生じ、したがって、本発明は、リフローは
んだ付けを行う実装プロセスに適用しても有用となる。
一方、熱媒体用通路11のみを設けた場合は、接合材6
の固化遅れに起因する電子部品4の傾斜実装を確実に防
止でき、電子部品4の実装精度は向上する。
In the above-described embodiment, the positioning projection 10 and the heat medium passage 11 are provided on the collet main body 3. However, the present invention is not limited to this.
Only one of them may be provided in the collet body 3. When only the positioning projections 10 are provided, regardless of the dimensional error of the substrate 5 and the bonding material 6, the control accuracy of the component mounting device, the mounting error of the collet 1 with respect to the component mounting device, and the like, On the other hand, the electronic component 4 can be positioned and held at a predetermined height without inclination. As a result, the tilt mounting of the electronic component 4 due to the deterioration of the positioning accuracy can be reliably prevented, and the mounting accuracy of the electronic component 4 is improved. In addition, such an effect of preventing the inclined mounting also occurs when the present invention is applied to a mounting process in which soldering is completed by reflow later. Becomes
On the other hand, when only the heat medium passage 11 is provided, the bonding material 6
The solid mounting of the electronic component 4 due to the solidification delay can be reliably prevented, and the mounting accuracy of the electronic component 4 is improved.

【0018】また、上記実施の形態においては、ベアチ
ップ4を基板5に装着する実装プロセスに適用した場合
を示したが、本発明は、これ以外にも、ベアチップ4を
リードフレームに装着し、あるいはチップ部品を基板に
装着する種々の実装プロセスに適用できることはもちろ
んである。
Further, in the above embodiment, the case where the bare chip 4 is applied to the mounting process of mounting the bare chip 4 on the substrate 5 has been described. However, the present invention is also applicable to mounting the bare chip 4 on a lead frame, or Needless to say, the present invention can be applied to various mounting processes for mounting chip components on a substrate.

【0019】[0019]

【発明の効果】以上、説明したように、本発明に係る電
子部品装着用コレットによれば、コレット本体の先端に
突起を設けあるいはコレット本体に熱媒体用通路を設け
るだけの簡単な対策で、電子部品を規定の高さに傾きな
く装着することができるので、高密度実装や製造能率が
犠牲になることもなく、その利用価値は大なるものがあ
る。
As described above, according to the collet for mounting electronic components according to the present invention, a simple measure of merely providing a projection at the tip of the collet main body or providing a heat medium passage in the collet main body is provided. Since the electronic component can be mounted at a predetermined height without inclination, there is a great value in its use without sacrificing high-density mounting and manufacturing efficiency.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の1つの実施の形態としてのコレットの
構造と使用態様とを示す断面図である。
FIG. 1 is a cross-sectional view showing a structure and a use mode of a collet as one embodiment of the present invention.

【図2】図1に示したコレットの平面図である。FIG. 2 is a plan view of the collet shown in FIG.

【図3】従来のコレットの構造と使用態様を示す断面図
である。
FIG. 3 is a cross-sectional view showing the structure and usage of a conventional collet.

【図4】従来のコレット使用による不具合発生例を示す
断面図である。
FIG. 4 is a cross-sectional view illustrating an example of occurrence of a defect due to use of a conventional collet.

【符号の説明】 1 コレット 2 真空引き用通路 3 コレット本体 3a 吸着面 4 ベアチップ(電子部品) 5 基板(装着対象物) 10 突起 11 熱媒体用通路[Description of Signs] 1 Collet 2 Vacuum passage 3 Collet body 3a Suction surface 4 Bare chip (electronic component) 5 Substrate (object to be mounted) 10 Projection 11 Heat medium passage

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 真空引き通路を有するコレット本体の先
端を電子部品の吸着面として用い、該吸着面に吸着保持
した電子部品を装着対象物に接合材を介して装着するコ
レットにおいて、前記コレット本体の先端に、装着対象
物に当接し該装着対象物に対する電子部品の保持高さを
一定とする複数の突起を設けたことを特徴とする電子部
品装着用コレット。
1. A collet in which an end of a collet main body having a vacuum passage is used as a suction surface of an electronic component, and the electronic component sucked and held on the suction surface is mounted on a mounting object via a bonding material. Characterized in that a plurality of projections are provided at the tip of the mounting member so as to abut on the mounting object and keep the electronic component at a fixed height with respect to the mounting object.
【請求項2】 真空引き通路を有するコレット本体の先
端を電子部品の吸着面として用い、該吸着面に吸着保持
した電子部品を装着対象物に接合材を介して装着するコ
レットにおいて、前記コレット本体に、その先端から熱
媒体を噴出させる熱媒体用通路を設けたことを特徴とす
る電子部品装着用コレット。
2. A collet, wherein a tip of a collet body having a vacuum passage is used as a suction surface of an electronic component, and the electronic component sucked and held on the suction surface is mounted on a mounting object via a bonding material. A collet for mounting an electronic component, wherein a heat medium passage for ejecting the heat medium from the tip is provided.
JP10375457A 1998-12-15 1998-12-15 Collet for mounting electronic component Pending JP2000183508A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10375457A JP2000183508A (en) 1998-12-15 1998-12-15 Collet for mounting electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10375457A JP2000183508A (en) 1998-12-15 1998-12-15 Collet for mounting electronic component

Publications (1)

Publication Number Publication Date
JP2000183508A true JP2000183508A (en) 2000-06-30

Family

ID=18505544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10375457A Pending JP2000183508A (en) 1998-12-15 1998-12-15 Collet for mounting electronic component

Country Status (1)

Country Link
JP (1) JP2000183508A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100562453B1 (en) * 2000-02-15 2006-03-21 가부시키가이샤 히타치세이사쿠쇼 Method of manufacturing a semiconductor integrated circuit device
JP2009164378A (en) * 2008-01-08 2009-07-23 Ricoh Co Ltd Numerical control programming system and substrate manufacturing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100562453B1 (en) * 2000-02-15 2006-03-21 가부시키가이샤 히타치세이사쿠쇼 Method of manufacturing a semiconductor integrated circuit device
JP2009164378A (en) * 2008-01-08 2009-07-23 Ricoh Co Ltd Numerical control programming system and substrate manufacturing equipment

Similar Documents

Publication Publication Date Title
JP3729628B2 (en) Manufacturing method of epoxy molding compound pad
KR100838460B1 (en) Attaching means and attaching apparatus for supporting plate, and attaching method for supporting
US5174021A (en) Device manipulation apparatus and method
TWI728086B (en) Installation device and installation method
JPH05206343A (en) Heat sink, electronic assembly and its assembly method
KR960000696B1 (en) Method of mounting semiconductor elements
TW201705323A (en) Mounting device and mounting method
JP2000294602A (en) Flip chip bonder
KR100971484B1 (en) Manufacturing method of printed circuit board, manufacturing method of printed circuit board assembly, and warpage correcting method of printed circuit board
JP2000183508A (en) Collet for mounting electronic component
JP2005183459A (en) Bonding method and apparatus for electronic component
JP3848893B2 (en) Component pressing and joining device to substrate and joining method
CN109935538B (en) Component joining device and component joining method
JP4056276B2 (en) Component mounting method and apparatus
JPH03225842A (en) Bonding tool
JP3509474B2 (en) Bonding apparatus and bonding method for work with bump
JPH07130795A (en) Semiconductor element connecting method and apparatus therefor
JP7373735B2 (en) Component joining device and method and mounting structure
JP2809207B2 (en) Semiconductor device repair method and repair device
TWI790747B (en) Substrate holder, bonding system, and bonding method
JPH104124A (en) Bonding of work with bump
WO2022038700A1 (en) Substrate holder, bonding system, and bonding method
JPH11186325A (en) Manufacture of semiconductor device
JPH1126513A (en) Bonding tool and bonding apparatus
KR20160090329A (en) Mounting device and mounting method