JP2000169244A - Production of ceramic sintered compact - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production method, etc., by which a ceramic sintered compact in the tabular shape without warp and surge is efficiently produced. SOLUTION: This production method of a ceramic sintered compact comprises a step for making an oxide green sheet 3 by dispersing oxide particles which have higher melting points than the baking temperature, in a resin, and forming a ceramic green body 2 into a thinner sheet shape, a step for making a green laminated body by laminating the oxide green seats 3 on the main face of the ceramic green body 2, and forming oxide particle-dispersed resin layers 3 on the main face of the ceramic green body, a step for laminating two or more sheets of the green laminated body, and a step for obtaining a ceramic sintered compact by baking the laminated two or more pieces of the green laminated body at a prescribed baking temperature, and a step for dividing the ceramic sintered compact at the oxide layers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-shaped ceramic sintered body and a method for producing the same.

[0002]

2. Description of the Related Art Thin elements, such as piezoelectric ceramics, which convert stress into electrical output are required to increase output or sensitivity. In addition, wiring boards such as glass ceramics have been similarly made thinner in terms of miniaturization of output devices and mounting of semiconductors. In general, when firing plate-shaped ceramics, for example, magnesia or zirconia particles having a relatively large particle size of several tens of μm are fired using swarf in order to prevent fusion of the sample and the sheath during sintering.

[0003]

However, firing of a thin plate-shaped ceramic is caused by relatively large undulations corresponding to the particle size of magnesia or zirconia particles used as swarf powder, fusion with fired pods, and the like. Warpage occurs, and it is difficult to obtain a ceramic sintered body with small warpage and undulation. In particular, it was difficult to obtain a ceramic sintered body having a laminated structure in which electrodes were formed on the internal electrodes and the surface and having a thickness of 500 μm or less.

An object of the present invention is to provide a manufacturing method and the like for efficiently obtaining a plate-shaped ceramic sintered body without warpage or undulation in consideration of the conventional problems as described above.

[0005]

Means for Solving the Problems The present invention has the following features to attain the above object.

A first method for manufacturing a ceramic sintered body according to the present invention is a method for manufacturing a ceramic sintered body by firing a plate-shaped ceramic green body at a predetermined firing temperature. By dispersing the oxide particles having the above in a resin, and forming into a sheet shape thinner than the ceramic green body, a step of producing an oxide green sheet, and the oxide green sheet on the main surface of the ceramic green body Forming a green laminate in which an oxide particle-dispersed resin layer composed of the oxide green sheet is formed on at least one main surface of the ceramic green body by laminating; and laminating a plurality of the green laminates And firing the plurality of green laminates at the predetermined firing temperature to obtain a ceramic sintered body. , Characterized in that it comprises a step of dividing the sintered ceramic oxide layer.

By manufacturing a ceramic sintered body by the above-described method, the oxide particles dispersed in the above-mentioned oxide particle-dispersed resin layer can prevent fusion with the fired pod, By sintering the sintered bodies through the oxide layer, the sintering can be performed at once, and by dividing the sintering by the oxide layer, a ceramic sintered body with less warpage and undulation and good flatness is efficiently manufactured. be able to.

A second method for manufacturing a ceramic sintered body according to the present invention is a method for manufacturing a ceramic sintered body by firing a plate-shaped ceramic green body at a predetermined firing temperature. By printing a paste obtained by dispersing an oxide having a high melting point in a resin, a step of producing a green laminate in which an oxide particle-dispersed resin layer is laminated on at least one main surface of the ceramic green body, The method includes a step of firing a plurality of the green laminates at the predetermined firing temperature to obtain a ceramic sintered body, and a step of dividing the ceramic sintered body by an oxide layer.

By manufacturing a ceramic sintered body by the above-described method, the oxide particles dispersed in the oxide particle-dispersed resin layer can prevent fusion with the fired pod, and furthermore, the ceramic sintered body can be used. By sintering the sintered bodies through the oxide layer, the sintering can be performed at once, and by dividing the sintering by the oxide layer, a ceramic sintered body with less warpage and undulation and good flatness is efficiently manufactured. be able to.

A third method for manufacturing a ceramic sintered body according to the present invention is the same as the first and second method for manufacturing a ceramic sintered body according to the present invention, and is provided so as to face each other at a predetermined interval. By arranging the green laminate between the fired pods and firing at the predetermined firing temperature, it is possible to efficiently manufacture a ceramic sintered body having less flatness and less warpage and undulation. In the first to third methods for producing a ceramic sintered body of the present invention, it is preferable that the oxide particle-dispersed resin layer is formed to a thickness of 0.5 μm to 5 μm.

Further, the first to third methods for producing a ceramic sintered body of the present invention may include a step of laminating ceramic green sheets to produce the ceramic green body.

In this case, the method may further include a step of forming an electrode on the ceramic green sheet, and the ceramic green body may include an electrode layer therein.

Further, in the step of manufacturing the ceramic green body, the electrode layer is laminated so that an electrode layer is formed on the uppermost layer of the ceramic green body, and the oxide particle-dispersed resin layer is formed on the electrode. Is also good.

Further, in the first to third methods for producing a ceramic sintered body of the present invention, the ceramic green body may contain a lead-based piezoelectric material as a main component, and in particular, thinning is required recently. It is very advantageous that the present invention can be applied to the production of a piezoelectric ceramic sintered body.

In the first to third methods for producing a ceramic sintered body according to the present invention, the particle diameter of the oxide particles is preferably 2 μm or less, whereby the ceramic sintered body having even better flatness is obtained. Can be manufactured.

Further, in the first and second methods for producing a ceramic sintered body of the present invention, the oxide particles may be composed of magnesia (MgO), zirconia (ZrO) and alumina (Al
It is preferable that the ceramic sintered body has at least one member selected from the group consisting of 2O3), which can effectively prevent fusion with fired pods during firing, and provide a more flat ceramic sintered body. Can be manufactured.

Further, in the first to third methods for producing a ceramic sintered body of the present invention, it is preferable that the oxide particle-dispersed resin layer is formed so as to have a thickness of 5 μm or less. Thereby, it is possible to prevent the sintering during sintering or the fusion of the ceramic sintered bodies with each other, and not to substantially affect the characteristics of the fired ceramic sintered bodies.

Further, in the first to third methods for producing a ceramic sintered body of the present invention, the ceramic sintered body has a thickness of 50%.
The ceramic green body may be manufactured so as to have a thickness of 0 μm or less. As a result, a ceramic sintered body having a thickness of 500 μm or less, in which it is difficult to reduce warpage and undulation, can be efficiently manufactured with good flatness.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. (Embodiment 1) A method of manufacturing a ceramic sintered body according to Embodiment 1 of the present invention is characterized in that a green laminate 1 shown in FIG. That is, the green laminate 1 shown in FIG. 1 is composed of, for example, a ceramic green body 2 containing lead-based piezoelectric ceramic powder and oxide particle dispersed resin layers 3 formed on both surfaces of the ceramic green body 2.

FIG. 2 shows a green laminate 4 in which a plurality of such green laminates 1 are laminated. The green laminate 4 is fired at a predetermined temperature on a fired sheath 12 shown in FIG.
The burned sheath 12 is made of, for example, magnesia.

Here, the oxide particle-dispersed resin layer 3 is made of an oxide powder having a melting point higher than the above-mentioned firing temperature so that the resin has a sufficient powder density and a coarser powder density than the ceramic green body 2. Are dispersed. In this oxide particle-dispersed resin layer 3, the oxide powders are separated from each other to such an extent that the oxide powders do not sinter at the above-mentioned firing temperature,
It is preferable that the oxide powder is substantially uniformly dispersed.
And the sintered body 4a (see FIG. 5) after firing of the ceramic green body 2 are divided by an oxide layer, and a ceramic having excellent flatness can be prevented. The production of the sintered body 1a (see FIG. 4) becomes possible. Further, as shown in FIG. 4, the oxide powder 3a is dispersed and adhered to the surface of the ceramic sintered body 1a after the firing division so as not to affect the characteristics of the piezoelectric ceramic sintered body 2a. I have.

As an example of the dividing method, by applying thermal shock or vibration such as ultrasonic waves in a solution, the ceramic sintered body 1a is divided at the portion of the oxide that is not strongly bonded.

The ceramic sintered body 1a according to the first embodiment manufactured as described above is combined with the ceramic sintered body 1a by the oxide powder contained in the oxide particle dispersed resin layer 3 during firing. Since fusion between the sheath 12 and the ceramic sintered bodies 1a can be prevented, warpage can be prevented and flatness can be improved.

In addition, by using the oxide particle-dispersed resin layer 3, oxide particles having a relatively small particle diameter can be uniformly dispersed on the surface of the ceramic green body 2, so that a large-sized swarf can be removed. Compared with the conventional example used, the warpage can be reduced, and the flatness can be further improved.

In the above description of the first embodiment, a sintered body using a lead-based piezoelectric ceramic has been described as an example. However, a lead-based piezoelectric ceramic mainly containing lead zirconate, Those containing lead oxide, lead lanthanate and the like as main components are included.

The present invention is not limited to lead-based piezoelectric ceramics, but can be applied to other ceramic sintered bodies made of alumina or the like. For example, if magnesia (melting point: 2800 ° C.) is used, it is possible to fire a ceramic sintered body such as alumina having a relatively high firing temperature.

That is, according to the present invention, a ceramic green body containing desired ceramic raw material powder can be combined with an oxide powder having a melting point higher than the firing temperature of the ceramic green body.

Although the present invention is not limited to the thickness of the ceramic sintered body, its effect is particularly remarkable when applied to a ceramic sintered body having a thickness of 500 μm or less. Even a laminate can be fired without warping.

Although the present invention is not limited to the thickness of the oxide particle-dispersed resin layer, if it is 0.5 μm or more, it is possible to prevent sintering and fusion with 12 and to obtain good flatness. Can be produced. Also, the thickness of the oxide particle-dispersed resin layer is preferably set to 5 μm or less. The effect on the properties of the sintered body can be substantially eliminated.

Further, in the first embodiment, the particle size of the oxide particles dispersed in the oxide particle-dispersed resin layer is preferably 2 μm or less, whereby the flatness of the sintered body can be further improved. it can.

As described above, the ceramic sintered body according to the first embodiment has a structure in which the surface is coated with the oxide particle-dispersed resin layer and is fired. In addition, the ceramic sintered bodies can be divided after sintering, and ceramics without warpage can be fired, and ceramics excellent in mass productivity can be provided with high yield. (Embodiment 2) FIG. 5 is a diagram of a firing method for manufacturing a lead-based piezoelectric ceramic sintered body according to Embodiment 2 of the present invention. As shown in FIG. 5, the green laminate 4 in which a plurality of green laminates 1 are laminated is disposed between the baked sheaths 12 sandwiched with the spacer 13 for gap adjustment therebetween and baked at a predetermined calcination temperature. Other than the above, the configuration is the same as that of the first embodiment.

A method of arranging the green laminate 4 between the fired sheaths 12 provided so as to face each other at a predetermined interval and firing at the predetermined firing temperature,
Furthermore, warpage and swell can be reduced. It is preferable that the same material as the ceramic green body 2 is used for the spacer 13. In the second embodiment, the same material as the ceramic green body 2 is used for the spacer 13. Further, the thickness of the spacer 13 is set to be 0.05 mm to 0.2 mm thicker than the thickness of the laminated green laminate 2, and between the green laminate 2 and the fired sheath 12 positioned above, It is preferable to secure a gap of about 0.05 mm to 0.2 mm.

As a result, as shown in FIG. 5B, deformation and warpage of the green laminate 2 during firing can be effectively suppressed. For example, when the green laminate 2 and the fired sheath 12 are alternately stacked and fired without using the spacer 13, the green laminate 2 is deformed due to the weight of the fired sheath 12 as shown in FIG. As a result, a high-quality ceramic sintered body cannot be obtained, and the gap is too small (0.0%) as shown in FIG.
(5 mm or less), the green laminate 2 is deformed or warped at the time of firing, and fusion with the fired sheath 12 occurs, so that a good ceramic sintered body cannot be obtained. When the gap is 0.2 mm or more, as shown in FIG. 6C, deformation and warpage of the green laminate 2 cannot be effectively suppressed. FIG. 6 shows the green laminate 2
Although the deformation and warpage occurring in FIG. 1 are exaggerated, they are actually so small that they cannot be shown in the drawing.
It is extremely small, less than 2 mm.

In the ceramic sintered body obtained by the firing method according to the second embodiment configured as described above, fusion to the magnesia fired sheath during firing can be prevented, and the ceramic sintered bodies after firing can be connected to each other. It has the same effect as that of the first embodiment in that the ceramics can be divided, the ceramic can be fired without warpage, and ceramics excellent in mass productivity can be provided with good yield. (Embodiment 3) FIG. 7 is a cross-sectional view of a green laminate 11 before firing for producing a lead-based piezoelectric ceramic sintered body according to Embodiment 3 of the present invention. As shown in FIG. 7, the green laminate 11 has a ceramic green body 21.
Except that the surface electrode layer 22 is formed on both surfaces of the first embodiment, the configuration is the same as in the first and second embodiments.

In the third embodiment, the surface electrode layer 22
Silver palladium, gold, chromium, nickel, silver, palladium, copper and alloys thereof can be used, and any other materials that can be co-fired with ceramics can be used.

The green laminate 11 of the third embodiment configured as described above can prevent fusion to the magnesia fired pod during firing by the oxide particle-dispersed resin layer 3 and can also prevent ceramic firing after firing. It becomes possible to divide the unions, which has the same effect as in the first and second embodiments.

In the third embodiment, a lead-based piezoelectric ceramic sintered body has been described as an example. However, the present invention is not limited to this, and the present invention is not limited to this. It is needless to say that the present invention can be applied to the case where In this case, the electrode material is appropriately selected according to the ceramic material used. (Embodiment 4) FIG. 8 is a cross-sectional view of a green laminate 111 before firing for producing a lead-based piezoelectric ceramic sintered body according to Embodiment 4 of the present invention. As shown in FIG. 8, this green laminated body 111 has a structure similar to that of the first and second embodiments except that a ceramic green body 31 including an internal electrode layer 32 is used instead of the ceramic green body 2 of the first and second embodiments. , 2. Here, the ceramic green body 31 is produced, for example, by forming an internal electrode layer on a ceramic green sheet containing a lead-based piezoelectric ceramic powder and laminating the ceramic green sheet.

In the fourth embodiment, the internal electrode layers 32
Various metals such as silver palladium, gold, chromium, nickel, silver, palladium, copper and alloys thereof can be used. That is, any material that can be co-fired with ceramics can be used as the internal electrode layer.

In the green laminate 111 of the fourth embodiment configured as described above, the oxide particle-dispersed resin layer 3 can prevent fusion to the magnesia fired sheath during firing, and can also prevent ceramic firing after firing. It becomes possible to divide the unions, which has the same effect as in the first to third embodiments.

In the fourth embodiment, a lead-based piezoelectric ceramic sintered body has been described as an example. However, the present invention is not limited to this, and the present invention is not limited to this. It is needless to say that the present invention can be applied to the case where In this case, the electrode material is appropriately selected according to the ceramic material used. (Embodiment 5) FIG. 9 is a cross-sectional view of a green laminate 112 before firing for producing a lead-based piezoelectric ceramic sintered body according to Embodiment 5 of the present invention. This green laminate 112 is different from the ceramic green body 2 of the first and second embodiments in that a ceramic green body 41 having an internal electrode layer 32 and a surface electrode layer 22 inside is used, as shown in FIG. Is configured similarly to the first and second embodiments.
Here, the ceramic green body 41 is produced, for example, by forming an internal electrode layer on a ceramic green sheet containing a lead-based piezoelectric ceramic powder, laminating the ceramic green sheets, and then forming a surface electrode layer. .

In the fifth embodiment, the internal electrode layer 32
For the surface electrode layer 22, various metals such as silver palladium, gold, chromium, nickel, silver, palladium, copper, and alloys thereof can be used. That is, any material that can be co-fired with ceramics can be used as the internal electrode layer and the surface electrode layer.

The green laminate 112 of the fifth embodiment configured as described above can prevent fusion to the magnesia fired pod during firing by the oxide particle-dispersed resin layer 3 and can also prevent ceramic firing after firing. It becomes possible to divide the aggregates, and the same effects as in the first to fourth embodiments can be obtained.

In the fifth embodiment, a lead-based piezoelectric ceramic sintered body has been described as an example. However, the present invention is not limited to this, and a ceramic sintered body using another ceramic material is used. It is needless to say that the present invention can be applied to the case where In this case, the electrode material is appropriately selected according to the ceramic material used.

[0044]

Embodiments of the present invention will be described below. (Example 1) A piezoelectric ceramic sintered body according to Example 1 of the present invention is manufactured as follows.

First, PbO, MgO, Nb ₂ O ₅ , Ti
The oxide powders of O ₂ and ZrO ₂ were mixed at a stoichiometric ratio of 1:
Weigh to 0.042: 0.042: 0.435: 0.440.

Next, the weighed powder is put into a polypot together with zirconia balls for crushing and mixing, and crushed and mixed for 17 hours.

After drying this, at a temperature of 1000 ° C.
After calcining for a time, a piezoelectric powder (calcined powder) is obtained. The calcined powder is put into a polypot together with zirconia balls for grinding, crushed for 12 hours, and then dried.

Next, in order to produce a green sheet, the pulverized powder, an acrylic resin, a plasticizer, and butyl acetate were blended in a ratio of 1: 0.06: 0.03: 0.5.
After mixing for 50 hours, using a doctor blade device, 50 minutes
A piezoelectric green sheet having a thickness of μm was produced.

Then, this piezoelectric green sheet was
A predetermined number of cut green sheets are cut into a cm square, and a predetermined number of the green sheets are stacked and pressed at a pressure of 200 kg / cm ² to produce a piezoelectric ceramic green body having a stacked structure with a thickness of 0.1 mm to 2.5 mm.

In order to form an oxide particle-dispersed resin layer, MgO, an acrylic resin, a plasticizer, and butyl acetate are used.
After mixing at a ratio of 1: 0.6: 0.02: 4 and mixing for 48 hours, an oxide green sheet containing magnesia of 5 μm is prepared using a doctor blade device. As is clear from the above-mentioned mixing ratio, the oxide green sheet is blended so that the resin component is greater than that of the piezoelectric green sheet, and when baked, firing between oxide particles is performed. Do not tie. Here, in Example 1, the oxide particles are MgO. Next, this oxide green sheet was laminated on both sides of the piezoelectric ceramic green body by pressing at a pressure of 200 kg / cm ² to produce a green laminate.

After five green sheet laminates were laminated, the green sheets were laminated by pressing under a pressure of 200 kg / cm ² ,
A green laminate was prepared.

The five green laminates were stacked in a 40
After debinding the binder at 0 ° C. for 2 hours, as described in the embodiment, five green laminates were arranged on the fired pod made of magnesium and fired at a temperature of 1100 ° C. for 2 hours.

After the sintered body was immersed in ethanol at 40 ° C. for 24 hours, it was divided into five sintered bodies at an oxide portion by an ultrasonic vibrator.

According to the above-described procedure, a laminated ceramic ceramic green body having various thicknesses is prepared in a thickness of 0.1 mm to 2.5 mm of the sintered body after division, and each of the oxide ceramic green bodies is formed. Sheet (oxide particle dispersed resin layer)
Are laminated and fired, ceramic sinters of any thickness can be sintered without fusing with the magnesia sheath, and a ceramic sintered body with less warpage and excellent flatness can be efficiently obtained. I was able to.

By setting the particle diameter of the oxide powder to 2 μm or less, the surface of the ceramic sintered body was flat, and a particularly excellent ceramic sintered body was obtained. In this example, the piezoelectric ceramic green body contracted about 20% after firing compared to before firing.

On the other hand, in the laminated body prepared without laminating the oxide green sheets prepared for comparison, fusion occurred with the upper and lower magnesia pods during firing, causing warpage and undulation. Since this laminate shrank by 20% during sintering, when fusion occurred with the magnesia sheath, the shrinkage was hindered by that portion becoming the starting point, causing warpage.
Moreover, in the case of the sintered body of the oxide, the sample was integrated after firing, and division was impossible. (Example 2) In the same manner as in Example 1, a piezoelectric ceramic sintered body of Example 2 according to the present invention was produced by laminating five sheets.

After debinding the green laminate at 400 ° C. for 2 hours, as described in the embodiment, five green laminates were laminated between fired magnets formed at predetermined intervals. Place green laminate, 110
Baking was performed at a temperature of 0 ° C. for 2 hours. In addition, as a spacer for the fired sheath, a gap between the fired sheaths was set by arranging a laminate having a thickness of 0.05 mm to 0.2 mm thicker than the green laminate as a spacer at four corners as a spacer. . As a result, a gap of 0.05 mm to 0.2 mm was secured between the green laminate and the fired pod located above.

After the sintered body was immersed in ethanol at 40 ° C. for 24 hours, it was divided into five sintered bodies at an oxide portion by an ultrasonic vibrator.

According to the above-described procedure, the laminated ceramic ceramic green bodies having various thicknesses are prepared at the thickness of the divided sintered body of 0.1 mm to 2.5 mm. Sheet (oxide particle dispersed resin layer)
Are laminated and fired, the ceramic sintered body of any thickness does not cause fusing with the magnesia sheath and is within the set gap (gap between the green laminate and the fired fired layer located above) Sintering was possible with the warp, and a ceramic sintered body with little warp and excellent flatness was efficiently obtained.

By setting the particle diameter of the oxide powder to 2 μm or less, the surface of the ceramic sintered body was flat, and a particularly excellent ceramic sintered body was obtained.

In this example, the piezoelectric ceramic green body shrank by about 20% after firing compared to before firing. In addition, the laminated body (spacer) for gap adjustment of fired sheath also shrinks in the same manner, and the gap between the green laminate and the fired sheath positioned above was kept substantially constant before and after firing.

On the other hand, in the laminated body prepared without laminating the oxide green sheets for comparison, when firing, fusion with the upper and lower magnesia pods occurred, causing warpage and undulation. Since this laminate shrank by 20% during sintering, when fusion occurred with the magnesia sheath, the shrinkage was hindered by that portion becoming the starting point, causing warpage.
Moreover, in the case of the sintered body of the oxide, the sample was integrated after firing, and division was impossible. (Embodiment 3) A piezoelectric ceramic sintered body of Embodiment 3 according to the present invention is produced in the same manner as in Embodiments 1 and 2, after producing a ceramic green body in which green sheets are laminated, the surface of the ceramic green body is formed. Except that a surface electrode was formed on the surface by a printing method using a silver-palladium paste, it was produced in the same manner as in Examples 1 and 2.

That is, in the third embodiment, the oxide green sheets are laminated and fired so as to cover the surface electrodes formed on the surface of the ceramic green body.

The piezoelectric ceramic sintered body of Example 3 produced as described above can be divided at the oxide portion, and a ceramic sintered body having excellent flatness as in Example 1 can be obtained. Was. (Embodiment 4) In the piezoelectric ceramic sintered body of Embodiment 4 according to the present invention, similarly to Embodiments 1 and 2, a 10 cm square piezoelectric green sheet was prepared, and a silver palladium paste was applied to each piezoelectric green sheet. After forming electrodes of different patterns by a printing method using
/ mm ^{2 at} a pressure of 0.1mm
Except that a ceramic green body including an internal electrode layer of 2.5 mm was produced, it was produced in the same manner as in Examples 1 and 2.

The piezoelectric ceramic sintered body of Example 4 manufactured as described above was also able to be divided at the oxide portion, and had excellent flatness as in Example 1. Fifth Embodiment A piezoelectric ceramic sintered body according to a fifth embodiment of the present invention is prepared in the same manner as in the fourth embodiment. In the same manner as in Example 2, except that an external electrode was formed and a ceramic green body having an internal electrode layer and a surface electrode layer was manufactured, the same procedure as in Examples 1 to 4 was performed.

The piezoelectric ceramic sintered body of Example 4 manufactured as described above was also able to be divided at the oxide portion, and had excellent flatness as in Example 1. Embodiment 6 A piezoelectric ceramic sintered body according to Embodiment 6 of the present invention is manufactured as follows.

First, a ceramic green body is manufactured in the same manner as in Examples 1 to 5.

Next, MgO, ethyl cellulose, and α-terpineol are mixed at a ratio of 1: 0.06: 0.5, and an oxide paste is prepared using a three-roll mill.

Then, this oxide paste is printed on both sides of the ceramic green body by using a printing method.

Thereafter, the green laminate was fired in the same manner as in Examples 1 to 5.

The piezoelectric ceramic sintered body of Example 6 produced as described above also had excellent flatness as in Examples 1 to 5. In the sixth embodiment as well, the oxide powder can be divided at the oxide portion by setting the particle diameter of the oxide powder to 2 μm or less, and the surface of the ceramic sintered body is flat as in the first to fifth embodiments. And a particularly excellent ceramic sintered body was obtained.

[0072]

As described above, the ceramic sintered body according to the present invention is manufactured by firing the ceramic green body on which the oxide powder resin layer is formed at a predetermined temperature. Plate-shaped ceramic sintering that can prevent fusion with fired pods, can be divided at the oxide portion after firing, has good flatness without warpage or undulation, and has excellent mass productivity It is a manufacturing method that provides a body.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a green laminate before firing according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of a plurality of green laminates before firing according to the first embodiment of the present invention.

FIG. 3 is a side view schematically showing the green laminate placed on the fired sheath in Embodiment 1 of the present invention;

FIG. 4 is a cross-sectional view of the ceramic sintered body according to Embodiment 1 of the present invention.

FIG. 5A is a side view schematically showing a fired sheath before firing and a green laminate housed therein, according to Embodiment 2, and FIG. 5B is a fired sheath after firing and the green laminate. It is a side view which shows typically the ceramic sintered compact accommodated inside.

FIG. 6 is a schematic diagram for explaining a state during firing in the embodiment of the present invention.

FIG. 7 is a cross-sectional view of a green laminate before firing according to a third embodiment of the present invention.

FIG. 8 is a cross-sectional view of a green laminate before firing according to a fourth embodiment of the present invention.

FIG. 9 is a cross-sectional view of a green laminate before firing according to a fifth embodiment of the present invention.

[Explanation of symbols]

 1, 11, 111, 112: green laminate, 1a: ceramic sintered body, 2, 21, 31, 41: ceramic green body, 2a: piezoelectric ceramic sintered body, 3: oxide powder dispersed resin layer, 3a ... Oxide powder, 4 ... Green laminated body in which a plurality of sheets are laminated, 12 ... Fired sheath, 13 ... Spacer, 22 ... Surface electrode layer, 32 ... Surface electrode layer.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) C04B 35/64 K (72) Inventor Mariko Ishikawa 1006 Ojidoma, Kadoma-shi, Osaka Matsushita Electric Industrial Co., Ltd. F Term (reference) 4F100 AA17B AB09 AB09B AB10B AB12 AB19 AB19B AB23 AD00A AK01B AK25 AR00C BA02 BA03 BA07 BA08 BA10C CA04 EJ482 HB31B JA04B JA20B JG10B YY00B 4J002 AA001 BG041 BG051 DE076 DE096 DE146G

Claims (11)

[Claims] 1. A method for producing a ceramic sintered body by firing a plate-shaped ceramic green body at a predetermined firing temperature, comprising: dispersing oxide particles having a melting point higher than the firing temperature in a resin; Forming an oxide green sheet by molding into a sheet shape thinner than the green body; and laminating the oxide green sheet on a main surface of the ceramic green body, thereby forming at least one of the ceramic green bodies. A green laminate production step of forming an oxide particle-dispersed resin layer on the surface, a step of laminating a plurality of the green laminates, and a step of calcining the laminated green laminates at the predetermined firing temperature to obtain a ceramic firing. A step of obtaining a sintered body; and a step of dividing the ceramic sintered body by an oxide layer. Method for producing a sintered body. 2. A method for manufacturing a ceramic sintered body by firing a plate-shaped ceramic green body at a predetermined firing temperature, comprising: disposing a paste obtained by dispersing oxide particles having a melting point higher than the firing temperature in a resin. A step of producing a green laminate in which an oxide particle-dispersed resin layer is laminated on at least one main surface of the ceramic green body by printing; a step of laminating a plurality of the green laminates; Firing the obtained green laminate at the predetermined firing temperature to obtain a ceramic sintered body; and dividing the ceramic sintered body by an oxide layer. Manufacturing method. 3. The calcination step, wherein the green laminate is disposed between calcination sheaths provided so as to face each other at a predetermined interval, and calcination is performed at the predetermined calcination temperature. The method for producing a ceramic sintered body according to claim 1. 4. The method for producing a ceramic sintered body according to claim 1, wherein said oxide particle-dispersed resin layer is formed to a thickness of 5 μm or less. 5. The method for producing a ceramic sintered body according to claim 1, wherein said ceramic green body is produced by laminating a plurality of ceramic green bodies. 6. The ceramic sintered body according to claim 5, further comprising a step of forming an electrode on the ceramic green body before the lamination, wherein the ceramic green body after the lamination includes an electrode layer inside. How to make the body. 7. The step of producing the ceramic green body, wherein an electrode layer is formed on an uppermost layer of the ceramic green body, and the oxide particle-dispersed resin layer is formed on the electrode. 7. The method for producing a ceramic sintered body according to 6. 8. The ceramic green body contains a lead-based piezoelectric material as a main component.
The method for producing a ceramic sintered body according to any one of the above. 9. The method for producing a ceramic sintered body according to claim 1, wherein the particle diameter of the oxide particles is 2 μm or less. 10. The oxide particles are composed of magnesia (Mg).
O), zirconia (ZrO) and alumina (Al ₂ O ₃ )
The method for producing a ceramic sintered body according to any one of claims 1 to 9, comprising one or more members selected from the group consisting of: 11. The ceramic sintered body having a thickness of 500
The method for producing a ceramic sintered body according to any one of claims 1 to 10, wherein the ceramic sintered body is produced so as to be not more than μm.