JP2000168084A - Ink-jet head and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink-jet head and its manufacture whereby an ink leak and an air invasion from a joining part between a manifold and, an actuator substrate and a cover plate are lessened. SOLUTION: An actuator substrate 2 has a plurality of jet channels 3A opened to a rear end face 2d and also a rise part 2a for shutting end parts of a plurality of non jet channels 3B. A conductor layer 12 connected to electrodes 11 in the plurality of jet channels 3A is formed to a top part of the rise part 2a. The conductor layer 12 is connected to a common connecting terminal at a lower face of the actuator substrate 2 through a conductive layer in a dummy groove 3C and a longitudinal groove 6. Electrodes 14 in the non jet channels 3B are connected to connecting terminals at the lower face through conductive layers in longitudinal grooves 5 at front ends. Rear end faces of the actuator substrate 2 and a cover plate 7 are processed to be even, with a manifold 8 being joined to the rear end faces.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an ink jet head and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, an ink jet recording apparatus is provided with an ink jet head having a large number of nozzles for ejecting ink droplets so that characters and figures can be recorded on recording paper. As such an inkjet head,
By alternately providing ejection channels connected to the nozzles to eject ink, and non-ejection channels that do not eject ink, the partition between both channels is bent by a driving electric field to change the volume of the ejection channel,
An apparatus configured to perform ink ejection is known.

When manufacturing such an ink jet head, first, as shown in FIG. 13, a plurality of ink jet heads for ejecting ink from the front end surface to the rear end surface of the actuator substrate 101 made of a piezoelectric material. The ejection channel 102 is formed, and a plurality of non-ejection channels 103 that do not eject ink are formed on both sides of the ejection channel 102 from the front end face to a position that does not reach the rear end face. The vertical groove 1 extending to the lower surface of the actuator substrate 101 continuously to the front end of the non-ejection channel 103
04 is formed. After this, both channels 102, 103
And actuator substrate 101 including inside vertical groove 104
A conductive layer (metal thin film) is formed on the entire surface of the substrate. And
By removing the conductive layer on the upper surface of the actuator substrate 101,
The conductive layers on the inner surfaces of both channels 102 and 103 are made independent from each other when viewed from above.

Further, by forming a dividing groove 106a for linearly removing the conductive layer from the bottom surface of the non-ejecting channel 103 to the bottom surface of the vertical groove 104, the conductive layers on both side surfaces of the non-ejecting channel 103 are made independent. Electrode 1
07. As shown in FIGS. 16 and 17, a plurality of divided grooves 1 are formed in the conductive layer on the lower surface of the actuator substrate 101.
A plurality of connection terminals 108 are formed by forming 06b and 106c. Each connection terminal 108 is connected to two electrodes 107 sandwiching one ejection channel 102 via two conductive layers in the vertical groove 104. On the other hand, the electrode 109 on the inner surface of the ejection channel 102 is connected to the conductive layer 110 on the rear end surface of the actuator substrate 101 as shown in FIG.
Through one common terminal 11 around the connection terminal 108.
Connected to 1.

[0005] As shown in FIGS. 14 and 15, a cover plate 123 is adhered on the upper surface of the actuator substrate 101 so as to cover the plurality of ejection channels 102 and the non-ejection channels 103.
01 and the front end face of the cover plate 123 are ground to make them uniform, and the conductive layer on the front end face of the actuator substrate 101 is removed to make the conductive layers on the inner surfaces of both channels 102 and 103 completely independent. Actuator substrate 10
1 and a front end face of the cover plate 123, a nozzle plate 122 having a nozzle hole 122a corresponding to the ejection channel 102 is adhered, and a rear end face is attached to the ejection channel 102.
Is bonded to the manifold 121 for supplying the ink. 14 and 15, reference numeral 124 denotes an adhesive layer.

The connection terminal 108 and the common terminal 111
Through a conductive pattern 112a of the flexible wiring board 112, the flexible wiring board 112 is connected to a control unit of a printing apparatus that supplies a drive voltage. Then, by grounding the electrode 109 in the ejection channel 102 and applying a voltage to the electrode 107 in the non-ejection channel 103 on both sides of the ejection channel 102, the partition walls on both sides of the ejection channel 102 are deformed, Ink can be ejected.

[0007]

As described above, in order to connect the electrode 109 of each injection channel 102 to the common terminal 111, the conductive layer 110 on the rear end face to which the manifold 121 is joined is used. Cover plate 12
After bonding 3 to the actuator substrate 101, it is not possible to perform processing for aligning the rear end surfaces of the cover plate 123 and the actuator substrate 101 with a flat surface. For this reason, steps or irregularities are formed between the cover plate 123 and the actuator substrate 101, and when the manifold 121 is bonded, a gap is easily formed between the rear end face and the end face of the manifold 121, and ink leaks, Air enters.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ink jet head and a method for manufacturing the same, which reduce ink leakage and air intrusion from a joint between a manifold and an actuator substrate and a cover plate. Aim.

[0009]

According to the first aspect of the present invention, a plurality of ejection channels for ejecting ink to the upper surface side and a plurality of non-ejection channels provided on both sides of the ejection channel and not ejecting ink are polarized. Actuator substrates formed at least partially apart from each other by a partition made of a piezoelectric material, electrodes formed on both side surfaces of the partition, and covering the plurality of ejection channels and the non-ejection channels. A cover plate fixed to the upper surface side of the actuator substrate; and a manifold joined to one end of the actuator substrate and the cover plate for distributing ink to the plurality of ejection channels. By applying, the partition is deformed, and pressure is applied to the ink in the ejection channel. In the inkjet head that ejects ink, the actuator substrate, as well as opening the plurality of ejection channels on the one end,
The actuator includes a rising portion closing the ends of the plurality of non-injection channels at one end, and a conductor layer connected to electrodes in the plurality of injection channels at the top of the rising portion. The substrate is connected to the upper surface side and one side surface excluding the one end portion through the conductive layer and the electrodes in the plurality of ejection channels, and to a plurality of connections connected to the electrodes in the plurality of non-ejection channels. An ink jet head having terminals.

According to the first aspect of the present invention, the manifold is joined to the actuator substrate and one end of the cover plate, and distributes the ink to the plurality of ejection channels. The electrodes in the plurality of ejection channels are connected to one of the plurality of connection terminals provided on one side surface of the actuator substrate via the conductor layer provided on the top of the rising portion. Is connected to another connection terminal, and deforms the partition wall by the voltage applied through both electrodes to eject ink. At one end of the actuator substrate to which the manifold is joined, a conductor layer connected to electrodes in a plurality of ejection channels and a plurality of connection terminals connected to electrodes in a plurality of non-ejection channels are not provided. One end can be aligned with the cover plate,
It is possible to reduce the gap at the junction of the manifold.

Preferably, in the ink jet head according to the first aspect, one side surface of the actuator substrate is a lower surface opposite to the upper surface side, and one side surface of the actuator substrate is provided in the plurality of non-ejection channels. The electrode is connected to the connection terminal via an end opposite to the one end.

According to a third aspect of the present invention, in the ink jet head according to the first or second aspect, preferably, the top of the rising portion has a groove extending in a direction intersecting the plurality of ejection channels. Has the conductor layer.

[0013] Further, as described in claim 4, claim 1 is as follows.
Preferably, in the ink-jet head of any one of the above-described items, the conductive layer may be provided through a groove provided separately from the plurality of ejection channels and the non-ejection channel, or through one inner surface of the non-ejection channel. Connect to

According to a fifth aspect of the present invention, a plurality of ejection channels for ejecting ink to the upper surface and a plurality of non-ejection channels provided on both sides of the ejection channel and not ejecting ink are at least made of a polarized piezoelectric material. Actuator substrates formed apart from each other by partition walls partially configured, electrodes formed on both side surfaces of the partition walls, and on the upper surface side of the actuator substrate covering the plurality of ejection channels and the non-ejection channels. A fixed cover plate, comprising a manifold joined to one end of the actuator substrate and the cover plate and distributing ink to the plurality of ejection channels, by applying a voltage to the partition through the electrodes, The partition is deformed, and pressure is applied to the ink in the ejection channel to eject the ink. A method of manufacturing an inkjet head, comprising: forming, on an upper surface of the actuator substrate, the plurality of ejection channels so as to open to the one end of the actuator substrate; and attaching the plurality of non-ejection channels to the one end. The first to not reach
And a second step of forming electrodes on the side surfaces of the plurality of ejection channels and the non-ejection channels; and forming the plurality of electrodes on a portion of the upper surface of the actuator substrate between the one end and the non-ejection channels. A third step of forming a conductive layer connected to the electrodes in the ejection channels of the plurality of ejection channels, and forming the conductive layer in one of the plurality of ejection channels on one side surface of the actuator substrate except for the upper surface and the one end. A fourth step of forming a plurality of connection terminals connected through a body layer and connected to electrodes in the plurality of non-ejection channels, and covering the plurality of ejection channels and the non-ejection channels; A fifth step of joining the cover plate to the upper surface side, and one end of the actuator substrate and one end of the same side of the cover plate. A sixth step of forming a portion in a plane, and after the sixth step, a seventh step of joining the manifold to one end of the actuator substrate and one end of the cover plate. A method of manufacturing an ink jet head.

Here, the first to seventh steps do not necessarily have to be performed in this order, and the order can be changed as appropriate.

According to the fifth aspect of the present invention, in the first step, the plurality of ejection channels are formed on the upper surface of the actuator substrate so as to open at the one end of the actuator substrate, and the plurality of ejection channels are formed on the upper surface of the actuator substrate. The non-injection channel is formed so as not to reach the one end. In a second step, electrodes are formed on side surfaces of the plurality of injection channels and the non-injection channels. In a third step, a conductive layer connected to electrodes in the plurality of ejection channels is formed on a portion of the upper surface of the actuator substrate between the one end and the non-ejection channel. In a fourth step, a plurality of connection terminals for connecting to the conductor layer and the electrodes in the plurality of non-ejecting channels are formed on one side surface of the actuator substrate except the upper surface side and the one end. In a fifth step, the cover plate is joined to the upper surface side of the actuator substrate so as to cover the plurality of ejection channels and the non-ejection channels. In a sixth step, one end of the actuator substrate and one end of the cover plate on the same side as that of the cover plate are formed in a plane. In a seventh step, after the sixth step, the manifold is joined to one end of the actuator substrate and one end of the cover plate, that is, to an end formed in a plane with almost no gap. .

Preferably, in the method for manufacturing an ink jet head according to claim 5, as in claim 6, the second step is performed on the entire upper surface of the actuator substrate including the inside of the ejection channel and the non-ejection channel. After forming the conductive layer over the entire surface, the conductive layer is removed only on the upper surface excluding the inside of the ejection channel and the non-ejection channel, so that the conductive layer for each channel is an independent electrode.

According to a seventh aspect of the present invention, in the method of manufacturing an ink jet head according to the sixth aspect, preferably, the third step is performed on an upper surface of the actuator substrate from which the conductive layer has been removed in the second step. The conductive layer is formed by vapor deposition or sputtering at a portion between the one end and the non-ejection channel.

Preferably, in the method of manufacturing an ink jet head according to the present invention, the third step is performed between the one end and the non-ejection channel on the upper surface of the actuator substrate. Forming a groove extending in a direction intersecting with the plurality of injection channels in a portion, forming a conductive layer also in the groove when forming the conductive layer in the pair 2 process, When the conductive layer is removed in the second step, the conductive layer in the groove is left.

According to a ninth aspect of the present invention, in the method of manufacturing an ink jet head according to the sixth aspect, preferably, the first step further comprises forming a groove outside a row formed by the plurality of ejection channels and the non-ejection channels. Including the step of forming,
The second step forms the conductive layer including the inside of the groove, and removes the conductive layer except for the inside of the groove. The third step includes removing the conductive layer from the conductive layer inside the groove. It is formed by connecting to layers.

According to a tenth aspect of the present invention, in the method of manufacturing an ink jet head according to the fifth aspect, it is preferable that the first step includes: Forming the ejection channels and the non-ejection channels for the two actuator substrates such that the one end portions of the actuator substrates are joined to each other, and the fifth step is performed over the two actuator substrates. The cover plate is joined, and the sixth step includes a step of cutting the substrate material and the cover plate at a position corresponding to the one end of the two actuator substrates.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is an exploded view of the components of the ink jet head. In FIG. 1, an ink-jet head 1 includes an actuator substrate 2 and, on an upper surface thereof, a plurality of ejection channels 3A for ejecting ink, and a plurality of non-ejection channels 3B provided on both sides of the ejection channels 3A and not ejecting ink. Are formed to be separated from each other by the partition wall 4. The actuator substrate 2 includes an upper piezoelectric material layer 2A and a lower piezoelectric material layer 2 made of a lead zirconate titanate (PZT) ceramic material.
B are laminated via an adhesive layer (not shown), and the piezoelectric material of each of the piezoelectric material layers 2A and 2B is polarized in directions opposite to each other (each in the thickness direction of the actuator substrate 2). ing. Therefore, the partition walls 4 are at least partially formed of the polarized piezoelectric material. In addition, a lead titanate (PT) ceramic material can be used as the piezoelectric material.

The injection channel 3A extends from the front end face 2e of the actuator substrate 2 to the rear end face 2d.
The upper and lower piezoelectric material layers 2A, 2B are formed at a depth extending over the layers. On the other hand, the non-injection channel 3B is formed at a depth extending from the front end face to the front end face of the actuator substrate 2 to the upper and lower piezoelectric material layers 2A and 2B, and rises at the rear end. , The rear end is closed. The front end of each non-ejection channel 3B is connected to a vertical groove 5 reaching the lower surface 2c of the actuator substrate. The ejection channels 3A and the non-ejection channels 3B are alternately arranged in parallel with the partition wall 4 interposed therebetween, and the non-ejection channels 3B are arranged at both ends of the channel row. The rising portions 2a are formed so as to be continuous with the partition wall 4 and to have the upper surfaces flush with each other.

Outside the row formed by the injection channel 3A and the non-injection channel 3B, that is, further outside the non-injection channel 3B at the end of the row, the non-injection channel 3B
3C having the same shape as that of the non-injection channel 3
Similarly to B, a vertical groove 6 is formed on the front end side.

On the side surfaces of both partition walls 4 facing the injection channel 3A, integrally continuous electrodes 11 are formed. On the upper surface 2b near the rear end surface of the actuator substrate 2, the electrode 11 in the ejection channel 3A is discarded and the conductive layer 24 in the groove 3C is removed.
Is formed to be connected to the conductive layer 12. Conductor layer 1
2 is formed so as to have a small width at the top of the rising portion 2a and to maintain an insulating interval with the electrode in the non-ejection channel 3B, and to have a large width in the vicinity of the disposal groove 3C; It is connected. The conductive layer in the disposal groove 3C is connected to the common connection terminal 16 on the lower surface 2c of the actuator substrate through the conductive layer in the vertical groove 6 as shown in FIG.

Electrodes 14 are respectively formed on the side surfaces of both partition walls 4 facing the non-ejection channel 3B.
Are independent of each other by a first dividing groove 13a along the bottom surface of the non-injection channel 3B. First division groove 13
a is connected to a second dividing groove 13b along the bottom surface of the vertical groove 5, and the second dividing groove 13b is connected to a third dividing groove 13c of the lower surface 2c as shown in FIG. A fourth dividing groove 13d is formed orthogonal to the third dividing groove 13c, and a plurality of individual connection terminals 15 are formed on the lower surface 2c. As a result, the electrodes 14, 14 of both the partition walls 4, 4 sandwiching one injection channel 3A are connected to one individual connection terminal 15 on the lower surface through the conductive layer in the vertical groove 5. The plurality of individual connection terminals 15 and the common connection terminal 16 are separated by third and fourth division grooves 13c and 13d.

As shown in FIG. 2, the individual connection terminals 15 and the common connection terminals 1 on the lower surface 2c of the actuator board are provided.
6, a wiring member, that is, a flexible printed wiring board 17 is connected. The flexible printed circuit board 17 has a board-side connection terminal 17a and a board-side common connection terminal 17b corresponding to the individual connection terminal 15 and the common connection terminal 16. Each terminal 17a, 1
7b is connected to a drive circuit (not shown).

Therefore, the two partitions 4, 4 sandwiching one injection channel 3A and the electrodes 11, 14, 14 on both surfaces thereof are used as a set of actuators, and the electrode 11 is grounded,
By applying a drive voltage to the upper and lower piezoelectric material layers 4A and 4B, a drive electric field is generated in the partition wall 4 as shown in FIG. The partition wall 4 is deformed symmetrically, so that a large change in volume for ejecting ink droplets can be given to the ejection channel 3A.

On the upper surface 2b side of the actuator substrate 2,
Multiple injection channels 3A and non-injection channels 3B
, A flat cover plate 7 made of a ceramic material or a resin material is adhered and fixed in a liquid-tight manner using, for example, an epoxy-based adhesive. Thus, the injection channel 3A is open at both ends, and the non-injection channel 3B has a rising portion 2a at one end, so that the rear end of the non-injection channel 3B is closed and the front end is open.

A manifold 8 for distributing ink to the plurality of ejection channels 3A is bonded to the rear end surfaces of the actuator substrate 2 and the cover plate 7 with an adhesive. An ink supply port 8a is formed in the center of the manifold 8, so that ink is supplied from an ink tank (not shown).

A nozzle plate 9 having a plurality of nozzle holes 9a one-to-one corresponding to each of the ejection channels 3A is bonded to the front end surfaces of the actuator substrate 2 and the cover plate 7 with an adhesive.

Here, since the actuator substrate 2 has a structure in which the partition walls 4 located on both sides of the ejection channel 3A are deformed to eject ink, it is necessary to leave a space between the ejection channels 3A. Injection channel 3B
Is formed, but this non-injection channel 3B
Has a function as an escape of the adhesive when the cover plate 7 is fixed with the adhesive together with the disposal groove 3C. In order to achieve this function, it is desirable that a plurality of discard grooves 3C be provided at intervals.

Next, a method of manufacturing the above-described ink jet head 1 will be described.

First, a flat plate made of lead zirconate titanate (PZT) constituting the piezoelectric material layers 2A, 2B is processed into a size in which one side is slightly larger than twice the length of the injection channel, and an adhesive layer ( (Not shown) to form a substrate material 21 having a size corresponding to the two actuator substrates.

The substrate material 21 thus formed is
As shown in FIG. 5, the rear ends of the two actuator substrates are joined to each other, and both channels are cut with a diamond blade so that the two ejection channels and the non-ejection channels are connected in series. First step). That is, grooves corresponding to the two ejection channels 3A, 3A are formed on the upper surface of the substrate 21 so as to penetrate from one side of the substrate 21 to the other side. On the other hand, the non-injection channels 3B, 3B are provided with rising portions 2a, 2
a is formed while the rear end faces are joined together.

At this time, a vertical groove 5 communicating with each of the non-injection channels 3B is formed at the same time, and a discard groove 3C having the same shape as the non-injection channel 3B and the communication therewith are provided outside the row formed by the grooves 3A and 3B. The vertical groove 6 to be formed is further formed.

Either the groove corresponding to the two injection channels 3A or the non-injection channel 3B, the discard groove 3C, and the vertical grooves 5, 6 may be formed first. Also,
The discard groove 3C is made of a non-injection channel 3B in consideration of workability.
Although the shape is the same as that described above, it goes without saying that the shape can be different.

Next, as shown in FIG. 6, the grooves 3A, 3B, 3
A conductive layer 24 made of a metal thin film of nickel or the like is formed by vacuum evaporation or electroless plating over the entire surface of the substrate material 21 including the insides of C, 5, and 6. And FIG.
As shown in FIG. 5, only the upper surface excluding the inside of the grooves 3A, 3B, 3C, that is, the surface along the upper end surface of the partition wall 4 is ground or polished in a planar shape, and the conductive layer 24 in that portion is removed.
The conductive layer for each of the grooves 3A and 3B is an electrically independent electrode. In addition, the conductive layer 24 in the disposal groove 3C is also electrically independent of them. Thus, an electrode having a length corresponding to the two electrodes 11 is formed in the groove corresponding to the injection channel 3A (second step).

Then, the first and second divided grooves 13a and 13b are formed by linearly removing the conductive layer on the bottom surface of the non-injection channel 3B and the vertical groove 5 by laser processing or a diamond blade. The conductive layer on the inner surface of the injection channel 3B and the vertical groove 5 is divided for each side surface. Thereby, the conductive layer in the non-ejection channel 3B is formed as two independent electrodes 14 on the corresponding side surface (second step). The conductive layer on the lower surface of the substrate material 21 is connected to the electrode 14 in the non-ejection channel 3B and the conductive layer in the dump groove 3C via the conductive layers in the vertical grooves 5 and 6.

The conductive layers 12 and 12 are provided at the center of the upper surface of the substrate material 21 (the portion between the rear ends of the non-ejection channels 3B of the two actuator substrates 2, ie, the portion corresponding to the rear end surfaces of the actuator substrates). (3
Process). As shown in FIG. 8, the conductor layer has a width of two conductor layers across a cutting line described later, extends in a direction traversing a groove corresponding to the plurality of ejection channels 3A, and has a discard groove. Connect to conductive layer in 3C. The conductor layer 1
2 and 12 are substrate materials 2 from which the conductive layer has been removed in the second step.
For example, a conductor layer 12, 1
It is formed by vapor deposition or sputtering using a mask having a shape corresponding to 2. In addition, the 1st-4th division groove 13a-
The step of forming 13d may be performed after forming the conductor layers 12,12.

Then, as shown in FIG. 9, the grooves 3A to 3C
And a cover plate having a size corresponding to two cover plates 7 is joined to the upper surface side of the substrate material 21 (fifth step).

Then, the conductive layer on the lower surface of the substrate material 21 is linearly removed by laser processing or a diamond blade to form third and fourth division grooves 13c to 13d, and a plurality of connection terminals 15 and 16 are formed. It is formed (fourth step). The groove 2 corresponding to the third and fourth divided grooves 13b to 13d
9 denotes a first step and a second division groove 1 in the second step.
It is also possible to form them together when forming 3a and 13b.

Thereafter, as shown in FIG. 10, the substrate material 21 corresponding to the front end surfaces of the actuator substrate 2 and the cover plate 7 and the front and rear ends of the cover plate are polished or ground to form a flat surface. 2 is removed. Thereby, the separation between the electrodes 11 and 14 is completed. Further, the substrate material 21 and the cover plate are cut at a position K corresponding to the rear end surfaces of the two actuator substrates 2. Substrate material 2
1 and the plate member 28 are cut in an overlapped state, so that the rear end surfaces of the actuator substrate 2 and the cover plate 7 become one plane (sixth step).

After the sixth step, the manifold 8 is joined to the rear end surfaces of the actuator substrate 2 and the cover plate 7 (seventh step). Further, the nozzle plate 9 is joined to the front end face.

Thereafter, the ink jet head 1 is assembled by soldering so that the terminals 17a and 17b of the flexible printed circuit board 17 and the connection terminals 15 and the common connection terminals 16 of the actuator board 2 match.

In the above embodiment, the conductive layer 12
Is connected to the connection terminal 16 through the inner surface of a disposal groove 3C, which is a groove provided separately from the plurality of injection channels 3A and the non-injection channels 3B. In addition, as shown in FIG. Non-injection channel 3B at row end
-1, the conductive layer on the side opposite to the injection channel does not constitute an electrode and is connected to the common connection terminal 16, so that the conductive layer 12 can be connected thereto.

FIGS. 11 and 12 show another embodiment of the present invention.

In this embodiment, a groove 25 having a width extending across the cutting line of the substrate material 21 is formed, and two conductor layers 12, 12 are formed in the groove 25.

That is, when forming the groove corresponding to the ejection channel 3A and the non-ejection channel 3B in the substrate material 21, the groove 25 is formed by a diamond blade so as to intersect the groove corresponding to the ejection channel 3A. The discard groove 3C is formed to have a length connected to the groove 25. Then, when the conductive layer 24 is applied over each surface of the substrate material 21, the conductive layer is also formed on the inner surface of the groove 25.

When the conductive layer 24 on the upper surface of the substrate material 21 is planarly removed by grinding or polishing, as shown in FIG. 11, the conductive layer in the groove 25 is removed from the electrode 11 in the ejection channel 3A and the waste groove 3C. It remains in the state of being connected to the conductive layer, and exhibits the same function as the conductive layer 12 of the above embodiment.

After the cover plate 7 is adhered to the substrate member 21, when cutting into one actuator substrate 2 and the cover plate 7, the cutting is performed along the center of the groove 25. Thereafter, bonding the manifold 8 and the nozzle plate 9 is the same as in the above-described embodiment. However, in order to prevent the ink from leaking from the groove 25 to the disposal groove 3C, when the cover plate 7 is bonded to the substrate material 21, the groove corresponding to the outermost ejection channel 3A and the disposal groove 3C The groove 25 in the portion between the two is closed with a sealant. The flow path in the manifold 8 has a size that does not correspond to the position of the disposal groove 3C.

In this embodiment, even if the width of the groove 25 is reduced, the size of the conductive layer 12 can be ensured by the depth of the groove 25, and the groove is securely connected to the electrode 11 in the ejection channel 3A. Insulation can be maintained from the electrodes in the non-injection channel. Further, since the conductor layer 12 can be formed simultaneously in another process, the number of steps can be reduced as compared with the above embodiment.

In each of the above embodiments, the conductor layer 12 may be formed up to the end of the actuator substrate 2 and connected to the common connection terminal 16 through the conductive layer on the side of the actuator substrate.

The connection terminals 15 and 16 can be formed not only on the lower surface but also on other side surfaces except for the upper surface and the rear end surface of the actuator substrate 2.

Further, at least the actuator substrate 2
Although it is manufactured using the substrate material 21 of the size of the individual, it is also possible to use the substrate material of one actuator substrate.

[0057]

The present invention is embodied in the form described above, and has the following effects.

According to the first aspect of the present invention, a conductor layer connected to the electrodes in the plurality of ejection channels is provided on the top of the rising portion for closing the ends of the plurality of non-ejection channels. Since a plurality of connection terminals connected to the electrodes in the non-ejection channel are provided on one side surface excluding the one end surface and the upper surface of the actuator substrate to which the manifold is joined, a conductor layer or the like is provided on the one end portion where the manifold is joined. No connection terminal is provided, and the end can be processed so as to be aligned with the cover plate, the gap between the joining portions of the manifold can be reduced, and ink leakage and air intrusion can be reduced.

According to a second aspect of the present invention, a plurality of connection terminals for connecting to each electrode are provided on the lower surface of the actuator substrate, and in particular, the electrodes in the non-ejection channel are passed through the end opposite to the one end, The connection to the connection terminals on the lower surface does not affect the joining of the manifold to the one end.

According to the third aspect of the present invention, a groove extending in a direction intersecting a plurality of injection channels is provided at the top of the rising portion, and the conductive layer is provided in the groove. Even so, the size of the conductive layer can be ensured by the depth, and the conductor layer can be reliably connected to the electrode in the ejection channel, and can be insulated from the electrode in the non-ejection channel.

According to a fourth aspect of the present invention, the conductive layer connected to the electrodes in the plurality of ejection channels is provided with a groove provided separately from the plurality of ejection channels and the non-ejection channels, or an inner surface of one of the non-ejection channels. Through the connection terminal on one side of the actuator substrate, without using the one end, effectively using the inner surface of the groove or one of the non-ejection channels, and the electrode in the ejection channel Connection with the connection terminal can be made.

According to a fifth aspect of the present invention, a conductor layer connected to the electrodes in the plurality of ejection channels is formed at a portion between one end on the upper surface of the actuator substrate and the non-ejection channel. A plurality of connection terminals for connecting to the conductor layer and the electrodes in the plurality of non-ejection channels are formed on the upper surface side and on one side surface excluding the one end portion, and then, the plurality of ejection channels and the non-ejection channels are covered. Then, the cover plate is joined to the upper surface side of the actuator substrate, and one end thereof is formed in a plane, and then the manifold is joined.Therefore, the manifold can be joined to the one end of the planar shape. This makes it possible to reduce the gap between these joints, thereby reducing ink leakage and air intrusion.

According to a sixth aspect of the present invention, after the conductive layer is formed over the entire upper surface of the actuator substrate including the inside of the ejection channel and the non-ejection channel, only the upper surface except the inside of the ejection channel and the non-ejection channel is formed. Since the conductive layer is removed,
The conductive layer for each channel can be an independent electrode.

According to a seventh aspect of the present invention, the conductive layer is formed on the upper surface of the actuator from which the conductive layer has been removed, between the one end and the non-ejection channel by vapor deposition or sputtering. Therefore, the conductor layer connected to the electrode in the ejection channel can be easily formed.

In the invention according to claim 8, a groove extending in a direction intersecting with the plurality of ejection channels is formed in a portion between the one end and the non-ejection channel on the upper surface of the actuator substrate. By forming and removing the conductive layer over the entire upper surface of the actuator substrate as in the invention of the sixth aspect, the conductive layer is formed in the groove, so that the conductive layer is simultaneously formed in another process. And the number of man-hours can be reduced.

According to a ninth aspect of the present invention, a groove is further provided outside a row formed by a plurality of ejection channels and non-ejection channels, and the conductive layer is connected to a conductive layer formed inside the groove. Therefore, the conductor layer can be connected to the connection terminal with good workability and effectively utilizing the conductive layer inside the groove.

According to a tenth aspect of the present invention, the two actuator substrates are arranged such that the one end portions of the two actuator substrates are joined to a substrate material of at least two actuator substrates. Forming the ejection channel and the non-ejection channel, joining the cover plate over the two actuator substrates, and cutting the substrate material and the cover plate at a position corresponding to the one end of the two actuator substrates. Thus, two inkjet heads can be easily manufactured at the same time. In addition, by the above cutting, the surfaces of the actuator substrate and the cover plate to which the manifold is joined are formed in one plane, and the gap at the joint with the manifold can be reduced.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing components of an inkjet head according to an embodiment of the present invention in an exploded manner.

FIG. 2 is an explanatory diagram of a connection between an electrode on a lower surface of an actuator substrate and a flexible printed wiring board.

FIG. 3 is a perspective view of the actuator substrate as viewed from the rear lower surface side.

FIG. 4 is an explanatory diagram of an operation of the inkjet head.

FIG. 5 is an explanatory diagram of a method for manufacturing an ink jet head.

FIG. 6 is an explanatory diagram of a method for manufacturing an ink jet head.

FIG. 7 is an explanatory diagram of the method for manufacturing the ink jet head.

FIG. 8 is an explanatory diagram of a method for manufacturing an ink jet head.

FIG. 9 is an explanatory diagram of a method for manufacturing an ink jet head.

FIG. 10 is an explanatory diagram of the method for manufacturing the ink jet head.

FIG. 11 is an explanatory diagram of a method for manufacturing an ink jet head according to another embodiment.

12 is a perspective view of the actuator substrate of FIG. 11 as viewed from the rear upper surface side.

FIG. 13 is a perspective view of a conventional actuator substrate.

FIG. 14 is a cross-sectional view of a part of an ejection channel of a conventional inkjet head.

FIG. 15 is a cross-sectional view of a non-ejection channel portion of a conventional inkjet head.

FIG. 16 shows an electrode on the lower surface of a conventional actuator substrate,
It is explanatory drawing of connection with the connection terminal of a flexible printed wiring board.

FIG. 17 is a perspective view of a conventional actuator substrate viewed from a rear lower surface side.

[Explanation of symbols]

 2 Actuator substrate 2a Rising portion 2b Upper surface 2c Lower surface 3A Injection channel 3B Non-injection channel 3C Discard groove 4 Partition wall 8 Manifold 9 Nozzle plate 11 Electrode 12 Conductive layer 14 Electrode 15 Connection terminal 16 Common connection terminal

Claims (10)

[Claims] 1. A plurality of ejection channels for ejecting ink on the upper surface side and a plurality of non-ejection channels provided on both sides of the ejection channel and not ejecting ink are at least partially formed of a polarized piezoelectric material. An actuator substrate formed to be separated from each other by a partition wall, electrodes formed on both side surfaces of the partition wall, and a cover plate fixed to an upper surface side of the actuator substrate so as to cover the plurality of ejection channels and the non-ejection channels. And a manifold that is joined to one end of the actuator substrate and the cover plate, and distributes ink to the plurality of ejection channels. By applying a voltage to the partition through the electrode, the partition is deformed, An ink jet for applying pressure to the ink in the ejection channel to eject the ink; In the head, the actuator substrate has the plurality of ejection channels opened at the one end, and has a rising portion closing the ends of the plurality of non-ejection channels at the one end, and a top portion of the rising portion. A conductor layer connected to electrodes in the plurality of ejection channels, and the actuator substrate includes, on one side surface excluding the upper surface and the one end, the electrodes in the plurality of ejection channels and the conductor An ink jet head comprising a plurality of connection terminals connected through layers and connected to electrodes in the plurality of non-ejection channels. 2. A side surface of the actuator substrate is a lower surface opposite to the upper surface side, and electrodes in the plurality of non-ejection channels are connected to each other via an end opposite to the one end. The inkjet head according to claim 1, wherein the inkjet head is connected to a terminal. 3. The method according to claim 1, wherein a top of the rising portion has a groove extending in a direction intersecting the plurality of injection channels, and the conductor layer is provided in the groove. 2. The inkjet head according to 2. 4. The semiconductor device according to claim 1, wherein the conductor layer is connected to the connection terminal via a groove provided separately from the plurality of ejection channels and the non-ejection channel, or via one inner surface of the non-ejection channel. The inkjet head according to any one of claims 1 to 3, wherein: 5. A plurality of ejection channels for ejecting ink to the upper surface side and a plurality of non-ejection channels provided on both sides of the ejection channel and not ejecting ink are at least partially formed of a polarized piezoelectric material. An actuator substrate formed to be separated from each other by a partition wall, electrodes formed on both side surfaces of the partition wall, and a cover plate fixed to an upper surface side of the actuator substrate so as to cover the plurality of ejection channels and the non-ejection channels. And a manifold that is joined to one end of the actuator substrate and the cover plate, and distributes ink to the plurality of ejection channels. By applying a voltage to the partition through the electrode, the partition is deformed, An ink jet for applying pressure to the ink in the ejection channel to eject the ink; A plurality of ejection channels are formed on an upper surface of the actuator substrate so as to open at the one end of the actuator substrate, and the plurality of non-ejection channels do not reach the one end. A second step of forming electrodes on the side surfaces of the plurality of ejection channels and the non-ejection channels, and between the one end and the non-ejection channels on the upper surface of the actuator substrate. Forming a conductive layer connected to the electrodes in the plurality of injection channels in the third portion.
And connecting the electrodes in the plurality of ejection channels and the electrodes in the plurality of non-ejection channels to one side surface of the actuator substrate, excluding the upper surface side and the one end portion, via the conductor layer and the electrodes in the plurality of ejection channels. A fourth step of forming a plurality of connection terminals connected to the actuator, a fifth step of covering the plurality of ejection channels and the non-ejection channels, and joining the cover plate to an upper surface side of the actuator substrate, and the actuator A sixth step of forming one end of the substrate and one end of the cover plate on the same side as the plane, after the sixth step, one end of the actuator substrate and one end of the cover plate And a seventh step of joining the manifold. 6. The step of forming a conductive layer over the entire upper surface of the actuator substrate including the inside of the ejection channel and the non-ejection channel, and then excluding the inside of the ejection channel and the non-ejection channel. 6. The method for manufacturing an ink jet head according to claim 5, wherein the conductive layer is removed only on the upper surface to make the conductive layer for each channel an independent electrode. 7. The method according to claim 7, wherein the conductive layer is formed on a portion of the upper surface of the actuator substrate, from which the conductive layer is removed in the second step, between the one end and the non-ejection channel. 7. The method for manufacturing an ink jet head according to claim 6, wherein is formed by vapor deposition or sputtering. 8. The step of forming a groove extending in a direction intersecting the plurality of ejection channels in a portion of the upper surface of the actuator substrate between the one end and the non-ejection channel. And forming a conductive layer also in the groove when forming the conductive layer in the second step, and further forming a conductive layer in the groove when removing the conductive layer in the second step. 7. The method for manufacturing an ink jet head according to claim 6, wherein: 9. The method according to claim 1, wherein the first step further includes forming a groove outside a row formed by the plurality of injection channels and the non-injection channels, and the second step includes forming the groove in the groove. 2. The method according to claim 1, further comprising: forming a conductive layer, removing the conductive layer except inside the groove, and forming the conductive layer by connecting the conductive layer to a conductive layer inside the groove. 6
The manufacturing method of the inkjet head according to the above. 10. The method according to claim 1, wherein the first step is such that the two end portions of the two actuator substrates are joined to a substrate material of at least two actuator substrates. Forming two ejection channels and non-ejection channels for two, the fifth step of joining a cover plate over the two actuator substrates, and the sixth step of attaching the cover plate to the two actuator substrates. 6. The method according to claim 5, further comprising a step of cutting the substrate material and the cover plate at a position corresponding to one end.