JP2000164164A5 - - Google Patents

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Publication number
JP2000164164A5
JP2000164164A5 JP1998336862A JP33686298A JP2000164164A5 JP 2000164164 A5 JP2000164164 A5 JP 2000164164A5 JP 1998336862 A JP1998336862 A JP 1998336862A JP 33686298 A JP33686298 A JP 33686298A JP 2000164164 A5 JP2000164164 A5 JP 2000164164A5
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JP
Japan
Prior art keywords
electron source
beam apparatus
electron beam
usage time
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998336862A
Other languages
English (en)
Japanese (ja)
Other versions
JP3700424B2 (ja
JP2000164164A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP33686298A priority Critical patent/JP3700424B2/ja
Priority claimed from JP33686298A external-priority patent/JP3700424B2/ja
Publication of JP2000164164A publication Critical patent/JP2000164164A/ja
Publication of JP2000164164A5 publication Critical patent/JP2000164164A5/ja
Application granted granted Critical
Publication of JP3700424B2 publication Critical patent/JP3700424B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP33686298A 1998-11-27 1998-11-27 電子線装置 Expired - Fee Related JP3700424B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33686298A JP3700424B2 (ja) 1998-11-27 1998-11-27 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33686298A JP3700424B2 (ja) 1998-11-27 1998-11-27 電子線装置

Publications (3)

Publication Number Publication Date
JP2000164164A JP2000164164A (ja) 2000-06-16
JP2000164164A5 true JP2000164164A5 (de) 2005-01-13
JP3700424B2 JP3700424B2 (ja) 2005-09-28

Family

ID=18303351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33686298A Expired - Fee Related JP3700424B2 (ja) 1998-11-27 1998-11-27 電子線装置

Country Status (1)

Country Link
JP (1) JP3700424B2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002271488A (ja) * 2001-03-14 2002-09-20 Hitachi Telecom Technol Ltd 電話交換装置
JP5290108B2 (ja) * 2009-09-24 2013-09-18 日本光電工業株式会社 一時退室タイマー表示機能付き生体情報モニタ装置
JP7095174B2 (ja) 2019-02-22 2022-07-04 株式会社日立ハイテク 荷電粒子線装置

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