JP2000164164A5 - - Google Patents
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- Publication number
- JP2000164164A5 JP2000164164A5 JP1998336862A JP33686298A JP2000164164A5 JP 2000164164 A5 JP2000164164 A5 JP 2000164164A5 JP 1998336862 A JP1998336862 A JP 1998336862A JP 33686298 A JP33686298 A JP 33686298A JP 2000164164 A5 JP2000164164 A5 JP 2000164164A5
- Authority
- JP
- Japan
- Prior art keywords
- electron source
- beam apparatus
- electron beam
- usage time
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 11
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33686298A JP3700424B2 (ja) | 1998-11-27 | 1998-11-27 | 電子線装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33686298A JP3700424B2 (ja) | 1998-11-27 | 1998-11-27 | 電子線装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000164164A JP2000164164A (ja) | 2000-06-16 |
JP2000164164A5 true JP2000164164A5 (de) | 2005-01-13 |
JP3700424B2 JP3700424B2 (ja) | 2005-09-28 |
Family
ID=18303351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33686298A Expired - Fee Related JP3700424B2 (ja) | 1998-11-27 | 1998-11-27 | 電子線装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3700424B2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002271488A (ja) * | 2001-03-14 | 2002-09-20 | Hitachi Telecom Technol Ltd | 電話交換装置 |
JP5290108B2 (ja) * | 2009-09-24 | 2013-09-18 | 日本光電工業株式会社 | 一時退室タイマー表示機能付き生体情報モニタ装置 |
JP7095174B2 (ja) | 2019-02-22 | 2022-07-04 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1998
- 1998-11-27 JP JP33686298A patent/JP3700424B2/ja not_active Expired - Fee Related
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