JPS5286771A - Abnormality warning unit of electron microscope or that resemblane uni t - Google Patents

Abnormality warning unit of electron microscope or that resemblane uni t

Info

Publication number
JPS5286771A
JPS5286771A JP286876A JP286876A JPS5286771A JP S5286771 A JPS5286771 A JP S5286771A JP 286876 A JP286876 A JP 286876A JP 286876 A JP286876 A JP 286876A JP S5286771 A JPS5286771 A JP S5286771A
Authority
JP
Japan
Prior art keywords
resemblane
uni
electron microscope
warning unit
abnormality warning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP286876A
Other languages
Japanese (ja)
Inventor
Masahiro Tomita
Yoshihisa Namikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP286876A priority Critical patent/JPS5286771A/en
Publication of JPS5286771A publication Critical patent/JPS5286771A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To find the abnormal point easily by not only alarming the abnormality in use of one sound generator but also noticing the abnormal point in use of the lamps gathered at one area.
COPYRIGHT: (C)1977,JPO&Japio
JP286876A 1976-01-14 1976-01-14 Abnormality warning unit of electron microscope or that resemblane uni t Pending JPS5286771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP286876A JPS5286771A (en) 1976-01-14 1976-01-14 Abnormality warning unit of electron microscope or that resemblane uni t

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP286876A JPS5286771A (en) 1976-01-14 1976-01-14 Abnormality warning unit of electron microscope or that resemblane uni t

Publications (1)

Publication Number Publication Date
JPS5286771A true JPS5286771A (en) 1977-07-19

Family

ID=11541327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP286876A Pending JPS5286771A (en) 1976-01-14 1976-01-14 Abnormality warning unit of electron microscope or that resemblane uni t

Country Status (1)

Country Link
JP (1) JPS5286771A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017179137A1 (en) * 2016-04-13 2017-10-19 株式会社 日立ハイテクノロジーズ Charged particle beam device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017179137A1 (en) * 2016-04-13 2017-10-19 株式会社 日立ハイテクノロジーズ Charged particle beam device
JPWO2017179137A1 (en) * 2016-04-13 2018-10-18 株式会社日立ハイテクノロジーズ Charged particle beam equipment

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