JPS5286771A - Abnormality warning unit of electron microscope or that resemblane uni t - Google Patents
Abnormality warning unit of electron microscope or that resemblane uni tInfo
- Publication number
- JPS5286771A JPS5286771A JP286876A JP286876A JPS5286771A JP S5286771 A JPS5286771 A JP S5286771A JP 286876 A JP286876 A JP 286876A JP 286876 A JP286876 A JP 286876A JP S5286771 A JPS5286771 A JP S5286771A
- Authority
- JP
- Japan
- Prior art keywords
- resemblane
- uni
- electron microscope
- warning unit
- abnormality warning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To find the abnormal point easily by not only alarming the abnormality in use of one sound generator but also noticing the abnormal point in use of the lamps gathered at one area.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP286876A JPS5286771A (en) | 1976-01-14 | 1976-01-14 | Abnormality warning unit of electron microscope or that resemblane uni t |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP286876A JPS5286771A (en) | 1976-01-14 | 1976-01-14 | Abnormality warning unit of electron microscope or that resemblane uni t |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5286771A true JPS5286771A (en) | 1977-07-19 |
Family
ID=11541327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP286876A Pending JPS5286771A (en) | 1976-01-14 | 1976-01-14 | Abnormality warning unit of electron microscope or that resemblane uni t |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5286771A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017179137A1 (en) * | 2016-04-13 | 2017-10-19 | 株式会社 日立ハイテクノロジーズ | Charged particle beam device |
-
1976
- 1976-01-14 JP JP286876A patent/JPS5286771A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017179137A1 (en) * | 2016-04-13 | 2017-10-19 | 株式会社 日立ハイテクノロジーズ | Charged particle beam device |
JPWO2017179137A1 (en) * | 2016-04-13 | 2018-10-18 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
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