JP2000162800A - Electrophotographic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the scattering or fusion of developer, or the uneven shaving of a surface layer or image flowing under any environmental condition and to prevent the image flowing without providing a means for directly heating a photoreceptive member. SOLUTION: This electrophotographic device has such constitution that the developer whose average particle diameter is 5 to 8 μm is scraped and removed by an elastic rubber blade whose impact resilience is >=10% and <=50%. The device is constituted to use the photoreceptive member whose abrasion loss after performing a copying process for A4 size to 10,000 sheets of transfer paper is >=0.1 Å and <=100 Å whose dynamic hardness is within the range of 10 to 500 kgf/mm2, and further which is provided with an amorphous fluorinated carbon film whose content of fluorine atoms is 5 to 50 atomic % as the surface layer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an electrophotographic apparatus, and more particularly, to an electrophotographic apparatus having an improved light receiving member.

[0002]

2. Description of the Related Art Conventionally, many electrophotographic methods have been known as described in U.S. Pat. No. 2,297,692, Japanese Patent Publication No. 42-23910 and Japanese Patent Publication No. 43-24748. ing. Generally, using a light receiving member, an electric latent image is formed on the light receiving member by various means, and then the latent image is developed using a developer,
After the developer image is electrically transferred to a transfer material such as paper selected as necessary, it is fixed by heating, pressurizing, heating and pressurizing, or solvent vapor or the like to obtain a copy.

In the above process, a residual developer remains on the surface of the light receiving member even after the transfer of the developer image to the transfer material. Therefore, a cleaning blade is brought into contact with the residual developer to remove the residual developer. Drained outside.

Various materials such as inorganic materials such as selenium, cadmium sulfide, zinc oxide, amorphous silicon (hereinafter referred to as a-Si), and organic materials have been proposed as materials for the light receiving member used in the electrophotographic photosensitive member. Have been. Among these, non-single-crystal deposited films containing silicon atoms typified by a-Si as main components, for example, hydrogen and / or
Amorphous films such as a-Si containing halogen (eg, fluorine, chlorine, etc.) (eg, compensating for hydrogen or dangling bonds) have been proposed as high performance, highly durable, pollution-free photoreceptors, some of which have been proposed. Has been put to practical use. JP-A-54-86341, USP 4.265.99
No. 1 discloses a technique of an electrophotographic photosensitive member in which a photoconductive layer is mainly formed of a-Si. Japanese Patent Laid-Open No. 60-
No. 12554 discloses a surface layer containing carbon and halogen atoms on the surface of a photoconductive layer made of amorphous silicon containing silicon atoms.
No. 62 discloses a photoreceptor in which a surface protective lubricating layer is provided on an a-Si: H or aC: H photosensitive layer.
Both are techniques for improving water repellency and abrasion resistance, and there is no description about the relationship between the electrophotographic process and the shaving property of the surface layer.

An a-Si photosensitive member represented by a-Si exhibits excellent sensitivity to long-wavelength light such as a semiconductor laser (700 nm to 800 nm), and exhibits little deterioration due to repeated use. Because it has a point,
For example, it is widely used as a photoconductor for electrophotography such as a high-speed copying machine and an LBP (laser beam printer).

As a method of forming a silicon-based non-single-crystal deposited film, there are a sputtering method, a method of decomposing a source gas by heat (thermal CVD method), a method of decomposing a source gas by light (photo CVD method), and a method of decomposing a source gas by plasma. Many methods are known, such as a method of decomposing gas (plasma CVD method). Above all, the plasma CVD method, that is, the raw material gas is decomposed by direct current or high frequency (RF, VHF) or glow discharge generated by using microwaves, and is made of glass, quartz, heat-resistant synthetic resin film, stainless steel, aluminum, etc. The method of forming a deposited film on a desired substrate is not limited to the method of forming an amorphous silicon deposited film for electrophotography and the like, and the method of forming a deposited film for other uses is currently in very practical use. Various devices have been proposed for this purpose.

As the light receiving member is required to have improved electrophotographic characteristics corresponding to high speed and to require finer image quality, recently, not only the characteristics of the photosensitive member but also the small particle size of the developer have been improved. The use of those having a weight average particle size of 5 to 8 μm as measured by a Coulter counter is often used.

[0008]

As a means for charging and discharging various conventional light receiving members including an a-Si based light receiving member, a wire electrode (such as a gold-plated tungsten wire of 50 to 100 μmφ, etc.) is used in most cases. Corona chargers (corotrons, scorotrons) mainly including a metal wire and a shield plate are used. That is, a high voltage (about 4 to 8 kv) is applied to the wire electrode of this corona charger.
Is applied to the photoreceptor member to cause charging and discharging of the photoreceptor member, and the corona charger is excellent in uniform charging and discharging.

However, a considerable amount of ozone (O ₃ ) is generated by corona discharge. This ozone oxidizes nitrogen in the air to produce nitrogen oxides (NOx). further,
This nitrogen oxide reacts with moisture in the air to produce nitric acid and the like.

[0010] Corona discharge products such as nitrogen oxides and nitric acid adhere to and accumulate on the surface of the light receiving member and peripheral equipment.
Since the corona discharge product has a strong hygroscopic property, when it is deposited on the surface of the light receiving member, the resistance of the corona discharge product due to moisture absorption is reduced, and the charge holding ability of the light receiving member is substantially or partially improved. As a result, an image defect called image deletion (a state in which the charge on the surface of the photoreceptor leaks in the surface direction and the electrostatic latent image pattern is broken or not formed) may occur.

Further, the corona discharge products adhering to the inner surface of the shield plate of the corona charger are volatilized and released not only during the operation of the electrophotographic apparatus but also during the stoppage of the apparatus at night or the like. By adhering to the surface of the corresponding light receiving member and absorbing moisture, the surface of the light receiving member is reduced in resistance.

As a result, in the first or several subsequent output images output first when the electrophotographic apparatus is restarted, image deletion is likely to occur in the area corresponding to the opening of the charger.

Further, since the a-Si type light receiving member has extremely higher surface hardness than other light receiving members, in the ordinary cleaning step, the corona discharge products adhered to the surface of the light receiving member are not removed and the light receiving member is not removed. It tends to remain on the surface.

Therefore, conventionally, a heater for directly heating the light receiving member is provided, or warm air is blown to the light receiving member by a hot air blowing device to heat the surface of the light receiving member (30 to 5).
0 ° C.) to maintain a dry state, thereby preventing the corona discharge products adhering to the surface of the light receiving member from absorbing moisture and substantially reducing the resistance of the surface of the light receiving member, and causing an image deletion phenomenon. Measures have been taken to prevent In particular, a-Si
In the case of a system light receiving member, the heating and drying means is incorporated in an electrophotographic apparatus as indispensable.

Conventionally, such an electrophotographic apparatus is provided with a rotating cylindrical developer carrier having a movable magnet and the like built therein, and a developer, that is, a toner or a mixture of a toner and a carrier is thinned on the carrier. After forming the layer,
A system in which these are electrostatically transferred onto a light receiving member on which an electrostatic latent image is formed is widely used. JP-A-54-43
037, JP-A-58-144865, JP-A-60-74
No. 51 and the like disclose these methods, and as a developer, a developer containing magnetic particles, that is, a mixture of a toner and a carrier or a developer containing magnetite in a toner and containing no carrier is disclosed.

A drawback of such a developing method is that, while the electrophotographic apparatus is at rest, the portion of the rotating cylindrical developer carrier opposed to the light receiving member expands due to the heat of the light receiving member, and the rotating cylindrical developer carrier in the developing portion has a cylindrical shape. The distance between the developer carrier and the light receiving member is reduced.

As a result, the electric field becomes stronger and the developer is more easily transferred than usual. In addition, the area on the opposite side of this area becomes longer due to the influence of the influence, so that the electric field becomes smaller and the transfer of the developer becomes difficult. As a result, a problem such as partial image density unevenness may occur in the rotation cycle of the rotating cylindrical developer carrier, so that there is an electrophotographic apparatus in which image flow does not occur without heating the light receiving member. Was sought.

Further, charging, exposure, development, transfer, separation,
In an electrophotographic apparatus in which each step of cleaning is sequentially repeated to perform scrape cleaning with a blade, the frictional resistance on the surface of the light receiving member may gradually increase due to repeated operations. When the frictional resistance on the surface of the light receiving member increases, the deterioration of the cleaning blade is promoted, and the cleaning property of the residual phenomenon agent (hereinafter, referred to as residual toner) decreases.

When the copying process is repeated in such a state, the phenomena agent and the external additives (strontium titanate, silica, etc.) contained in the phenomena agent are scattered in the corona charger, and the corona charger is scattered. To a wire electrode (hereinafter, referred to as a charged wire), which may cause uneven discharge. If the discharge unevenness occurs due to the charger wire contamination, in the positive phenomenon method (a method of developing a non-exposed portion on the surface of the light receiving member), a streak-like white spot on an image, a scale-like black haze on the entire image, and a period. In some cases, image defects such as black spots (0.1 to 0.3 mmφ) that occur locally without any problem may occur.

Further, when the charger wire becomes dirty, abnormal discharge is induced between the stained portion of the wire and the light receiving member, which may destroy the surface of the light receiving member and cause white spot image defects.

Further, in the blade-type cleaning system, the amount of the developer remaining on the blade surface varies due to the difference in the character pattern of the document chart, and the receiving member surface may be scraped unevenly. When such shaving unevenness occurs, the sensitivity becomes uneven as an electrophotographic characteristic, and the unevenness occurs in the image. In particular, this phenomenon is more remarkable as the particle size of the developer is smaller.

In recent years, there has been a demand for higher image quality in image characteristics, and under such circumstances, the particle size of the developer has been reduced. Although reducing the particle size of the developer improves the image quality, it tends to increase the rubbing force, and the increase in the rubbing force causes the residual developer (residual toner) to pass through due to chatter of the cleaning blade. Arises
Black line-shaped cleaning failure may occur.

Further, when the frictional resistance is high, frictional heat is generated between the light receiving member and the cleaning blade to increase the temperature, and the residual developer used for heat fixing is firmly adhered to the surface of the light receiving member by the frictional heat. In some cases, a fusion phenomenon that adheres to the surface may occur. In particular, this fusing phenomenon appears remarkably in proportion to the reduction in the particle size of the developer, and is small enough not to affect the image in the initial stage. And gradually grows into black streak-like image defects in the image.

As a solution to such a situation, a method of increasing the pressing pressure of the cleaning blade or a method of increasing the hardness of the elastic rubber blade by increasing the hardness of the elastic rubber blade in order to increase the force of scraping the phenomenon agent attached to the surface of the light receiving member. And other measures are needed. Increasing the hardness of the blade is a characteristic of the blade, as it approaches a glassy state from a rubbery state, so the material becomes brittle and the life of the blade is shortened.These methods are based on friction with the light receiving member surface. Since the force is in the rising direction, there is a high possibility that uneven shaving of the surface layer or the like will become remarkable.

In recent years, miniaturization, low cost, and maintenance-free are important issues with the personal use of copiers and printers. Means for directly or indirectly heating the light receiving member from the viewpoint of energy saving and ecology. It is desirable that the design is not provided.

Under such circumstances, no image deletion occurs without the provision of the heating means. The light receiving member and no uneven shaving are generated under any electrophotographic process conditions. There has been a demand for an electrophotographic apparatus capable of stably supplying a high-quality electrophotograph without any problem for a long period of time.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to repeatedly perform each of the steps of charging, exposure, development, transfer, separation, and cleaning in order to perform scrape cleaning with a blade. In the electrophotographic apparatus, the frictional resistance is small, the toner is prevented from scattering, and a light receiving member that does not generate a charger wire stain is provided, and the corona discharge product is hardly adhered, and the corona discharge product is further adhered. By providing an electrophotographic apparatus capable of easily removing attached matter even in the case of performing the above, a high quality image without image deletion can be obtained without providing a heating means for the light receiving member under any environment. An object of the present invention is to provide an electrophotographic apparatus which can be provided for a long time.

[0028]

The present inventors have focused on the relationship between the electrophotographic process and the amount of wear of the surface layer of the light receiving member, and have determined the water repellency and abrasion of the surface of the light receiving member in the electrophotographic process. Tried to improve. As a result, by combining the electrophotographic process of the present invention and the light receiving member using the non-single-crystalline fluorinated carbon film of the present invention as the surface layer of the light receiving member, the surface layer contains fluorine atoms, whereby Improves the water repellency of the surface, prevents the adhesion of corona discharge products, and further increases the dynamic hardness of the surface layer from 10 to 500 k.
gf / mm ^{2 The} amount of wear when transferring 10,000 sheets to transfer paper is 0.1%.
By setting the thickness to 100 ° or less, it is possible to make the surface containing fluorine atoms at any time without desorbing only fluorine on the outermost surface, and to reduce the frictional resistance of the surface by including fluorine in the surface layer. It improves the slipperiness and prevents uneven scraping of the surface layer, poor cleaning and fusing, and image flow occurs without providing a heating means for the light receiving member under any environmental conditions. I found that I would not.

That is, the present invention is as follows.

1. By rotating the light receiving member, charging, exposure,
In an electrophotographic apparatus in which development, transfer, and cleaning steps are sequentially repeated, the light receiving member develops a developer having an average particle size of 5 to 8 μm on the light receiving member, transfers the developer to a transfer material, and after the developer is transferred. The surface of the light receiving member is scraped and cleaned with an elastic rubber blade having a rebound resilience of 10% or more and 50% or less. An electrophotographic apparatus comprising: a surface layer formed of a non-single-crystalline fluorinated carbon film; 2. 2. The light receiving member according to the above item 1, wherein the light receiving member comprises a photoconductive layer formed of a non-single-crystal material having silicon atoms as a base on a conductive substrate and a surface layer formed of a non-single-crystal material. Electrophotographic equipment. 3. The surface layer has a dynamic hardness of 10 to 500 kg.
3. The electrophotographic apparatus according to the above 1 or 2, wherein the f / mm ² is f / mm ² . 4. Fluorine content of the non-single crystalline fluorinated carbon film ((F / (C
+ F)) is from 5 to 50 atomic%. 5. 5. The electrophotography according to any one of claims 1 to 4, wherein the surface layer is formed by depositing a film by decomposing at least a hydrocarbon-based gas and / or a fluorine-based gas by a plasma CVD method using a high frequency of 1 to 450 MHz. apparatus. 6. 6. The electrophotographic apparatus according to any one of the above items 1 to 5, wherein the light receiving member is composed of three layers: a charge injection blocking layer, a photoconductive layer, and a surface layer. 7. (1) The light-receiving member comprises a charge transport layer, a charge generation layer, and a surface layer.
7. The electrophotographic apparatus according to any one of items 6 to 6.

[0031]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The cleaning blade used in the electrophotographic apparatus of the present invention may be made of urethane rubber, silicon rubber, butadiene rubber, isoprene rubber, or the like.
There are nitrile rubber and natural rubber. In particular, urethane rubber and silicone rubber, which are generally widely used in electrophotographic apparatuses, are preferable from the viewpoint of hardness and ease of processing.

If the rebound resilience of the cleaning blade used in the electrophotographic apparatus is lower than 10%, the blade characteristic changes from a rubbery state to a glassy state, so that the material becomes brittle and the life of the blade is shortened. Also, if the rebound resilience of the cleaning blade exceeds 50%, problems such as the occurrence of chatter on the blade and deterioration of the cleaning property, and the fact that the blade is turned up and damages the surface of the light receiving member occur. Therefore, the rebound resilience of the cleaning blade is 10% or more and 50
% Or less is preferred.

On the other hand, in order to improve the cleaning property, a blade with a groove as described in JP-A-54-143149 and a blade with a projection as described in JP-A-57-124777 have been proposed. However, an electrophotographic apparatus using a developer having a small particle diameter and not providing a heating means for the light receiving member and an abrasion amount of the surface of the light receiving member provided with the amorphous fluorinated carbon film on the surface layer are compared. No mention is made of the relationship.

In the present invention, a
-C: The dynamic hardness of the F surface layer is 10 to 500 kg.
f / mm ² is preferable, and the dynamic hardness is 10 kgf.
When the value is smaller than / mm ² , the mechanical hardness is impaired,
When the value of the dynamic hardness is more than 500 kgf / mm ² , the abrasion of the surface layer is reduced, so that the surface layer is hardly abraded, and the effect of scraping off the corona discharge product is reduced, which may cause image deletion. Further, the amount of fluorine contained in the surface layer film is 5 to 50 at%, preferably 10 to 30 at% in terms of F / (C + F). If the fluorine content is less than 5%, water repellency and abrasion may not be maintained.
If it exceeds 50%, the adhesion and densification of the film will be impaired,
Mechanical strength may be impaired.

In the above-mentioned range of the fluorine atom content and the dynamic hardness, the surface layer is selected to have an abrasion amount of 0.1 to 100 mm after the copying process of A4 plate is performed on 10,000 sheets of transfer paper. As a result, chattering of the blade due to friction is reduced, and partial stress on the blade surface is suppressed, so that partial stagnation of the developer is reduced. As a result, the surface layer is uniformly worn without uneven shaving,
It has excellent cleaning properties, does not scatter toner, and can prevent wire fouling and fusing due to shaving effects. In addition, since the surface layer is uniformly worn, the corona discharge products adhered to the surface of the light receiving member can be efficiently scraped off without unevenness. Therefore, without providing a means for heating the light receiving member, under any environmental conditions. Also, no image deletion occurs.

If the amount of wear of the surface layer of the light receiving member used in the present invention is greater than 100 °, mechanical strength may be impaired. If the amount of wear is less than 0.1 °, the surface layer is less likely to be worn. The effect of scraping off corona discharge products is reduced, and image deletion may occur.

Further, the optimum thickness of the surface layer used in the light receiving member of the present invention can be determined from the relationship between the amount of wear of the surface layer and the life of the electrophotographic apparatus. Generally 0.0
A range of 1 μm to 10 μm, preferably 0.1 μm to 1 μm is desirable. If the film thickness of the surface layer is 0.01 μm or less, the mechanical strength is impaired, and if it is 10 μm or more, the residual potential may increase.

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIGS. 1A and 1B are examples of a schematic cross-sectional view of a light receiving member according to the present invention. In FIG. 1A, a photoconductive layer is formed from a single layer whose function is not separated. Is a single-layer light receiving member. (B) is a function-separated type light-receiving member in which a photoconductive layer is separated into a charge generation layer and a charge transport layer.

The a-Si light receiving member shown in FIG. 1A is made of a conductive substrate 101 such as aluminum and a conductive substrate 10.
The charge injection blocking layer 102, the photoconductive layer 103, and the surface layer 104 are sequentially laminated on the surface of the substrate 1. Here, the charge injection blocking layer 102 is formed from the conductive substrate 101 to the photoconductive layer 103.
This is to prevent the injection of electric charge into the device, and is provided as needed. The photoconductive layer 103 is made of an amorphous material containing at least silicon atoms, and has photoconductivity. Further, the surface layer 104 is made of an amorphous material containing at least carbon atoms and fluorine atoms, and has a capability of maintaining a visible image in an electrophotographic apparatus.

In the following, the charge injection blocking layer 10 is used except when the effect differs depending on the presence or absence of the charge injection blocking layer 102.
2 will be described as being present.

The a-Si light receiving member shown in FIG. 1B has a charge transport layer 106 in which the photoconductive layer 103 is made of an amorphous material containing at least silicon atoms and carbon atoms.
This is a function-separated type light receiving member having a configuration in which a charge generation layer 105 made of a non-quality material containing at least silicon atoms is sequentially stacked. When the light receiving member is irradiated with light, carriers mainly generated in the charge generation layer 105 pass through the charge transport layer 106 and reach the conductive substrate 101.

The film forming gas for the surface layer 104 is as follows.
Fluorinated gases such as CF ₄ , C ₂ F ₆ , CHF ₃ , CH ₂ F ₂ and CH ₃ F, and H ₂ and hydrocarbons such as CH ₄ , C ₂ H ₆ , C ₃ H ₈ and C ₄ H ₁₀ The gas can be used effectively. Further, these source gases for supplying fluorine may be diluted with an inert gas such as He, Ar, Ne or the like, if necessary.

FIG. 2 shows a plasma CVD method (PCVD method).
FIG. 1 is a view schematically showing an example of a general deposition apparatus for a light receiving member according to the present invention.

This apparatus is roughly classified into a deposition apparatus 210
0, a source gas supply device 2200, and an exhaust device (not shown) for reducing the pressure inside the reaction vessel 2110. A cylindrical deposition substrate 2112 connected to the ground, a heater 2113 for heating the cylindrical deposition substrate, a source gas introduction pipe 2 are provided in a reaction vessel 2110 in the deposition apparatus 2100.
114, and a high-frequency matching box 2
A high frequency power supply 2120 is connected via 115.

The raw material gas supply device 2200 includes SiH ₄ ,
Source gas cylinders 2221 to 2226 such as H ₂ , CH ₄ , NO, B ₂ H ₆ , CF _4, and valves 2231 to 2236, 22
41 to 2246, 2251 to 2256, and mass flow controllers 2211 to 2216. The gas cylinders for the respective constituent gases are supplied via the valve 2260 to the reaction vessel 211.
0 is connected to a gas introduction pipe 2114.

The cylindrical film-forming substrate 2112 is connected to the ground by being placed on the conductive support 2123.

An example of a procedure of a method for forming a light receiving member using the apparatus shown in FIG. 2 will be described below.

A cylindrical film-forming substrate 2 is
112 is installed, and an exhaust device (not shown) (not shown)
Evacuates the reaction vessel 2110. Subsequently, the temperature of the cylindrical film-forming substrate 2112 is controlled to 20 ° C. to 5 ° C. by the heater 2113 for heating the cylindrical film-forming substrate and a control device (not shown).
Control to the desired temperature of 00 ° C. Next, in order to allow the source gas for forming the light receiving member to flow into the reaction vessel 2110, the valves 2231 to 2236 of the gas cylinder and the leak valve 2117 of the reaction vessel are closed, and the inflow valves 2241 to 2246 and the outflow valve 2251 to 225
6. Confirm that the auxiliary valve 2260 is open,
The main valve 2118 is opened to evacuate the reaction vessel 2110 and the gas supply pipe 2116.

Thereafter, the gauge 2119 reads 0.7P
a, the auxiliary valve 2260 and the outflow valve 22
Close 51-2256. Then the gas cylinder 2221
Each gas is introduced from 2226 by opening valves 2231 to 2236, and each gas pressure is adjusted to 1.96 × 10 ⁵ Pa by pressure regulators 2261 to 2266. After the preparation for the film formation is completed by the above procedure, the cylindrical film formation base 2112 is formed.
First, a photoconductive layer is formed.

That is, when the temperature of the cylindrical film-forming substrate 2112 reaches a desired temperature, each of the outflow valves 2251 to 2251
The necessary one of the 256 and the auxiliary valve 2260 are gradually opened, and a desired raw material gas is supplied from each of the gas cylinders 2221 to 2226 through the gas introduction pipe 2114 to the reaction vessel 211.
Introduce into 0. Next, each mass flow controller 2
According to 211 to 2216, each raw material gas is adjusted so as to have a desired flow rate. At this time, the inside of the reaction vessel 2110 is 1
The vacuum gauge 211 is set to a desired pressure of 33 Pa or less.
9 while adjusting the opening of the main valve 2118.
When the internal pressure is stabilized, the high-frequency power supply 2120 is set to a desired power, for example, a high-frequency power of a frequency of 1 MHz to 450 MHz, and the high-frequency power is set to a high-frequency matching box 211.
5 to the cathode electrode 2111 to generate a high-frequency glow discharge. Each source gas introduced into the reaction vessel 2110 is decomposed by this discharge energy, and a photoconductive layer mainly containing silicon atoms is deposited on the cylindrical substrate 2112. After the formation of the desired film thickness, the supply of the high-frequency power is stopped, and each outflow valve 225
By closing 1-2256, the flow of each source gas into the reaction vessel 2110 is stopped, and the formation of the photoconductive layer is completed.

Known compositions and thicknesses of the photoconductive layer can be applied. In the case of forming a surface layer on the photoconductive layer, the above operation may be basically repeated.

FIG. 3 shows a plasma CV using a high frequency power supply.
It is the figure which showed typically another example of the deposition apparatus of the light receiving member by the D method.

This apparatus is roughly classified into a deposition apparatus 310
0, a source gas supply device 3200, and an exhaust device (not shown) for reducing the pressure inside the reaction vessel 3110. A cylindrical deposition substrate 3112 connected to the ground, a heater 3113 for heating the cylindrical deposition substrate, and a source gas introduction pipe 3 are provided in a reaction vessel 3110 in the deposition apparatus 3100.
114 is installed, and the high-frequency matching box 3
A high frequency power supply 3120 is connected via 115.

The raw material gas supply device 3200 includes SiH ₄ ,
_{H 2, CH 4, NO,} B 2 H 6, a raw material gas cylinder such as CF ₄ 3221 to 3226 and the valve 3231～3236,32
41-3246, 3251-256, and mass flow controllers 3211-216. The constituent gas pumps are connected via a valve 3260 to the reaction vessel 311.
0 is connected to the gas introduction pipe 3114.

The cylindrical substrate 3112 is connected to the ground by being placed on the conductive support 3123. The cathode electrode 3111 is made of a conductive material, and is insulated by the insulating material 3121.

The conductive material used for the conductive support 3123 includes copper, aluminum, gold, silver, silver, lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and materials of these materials. More than two types of composite materials can be used.

As an insulating material for insulating the cathode electrode 3111, ceramics, Teflon, (registered trademark)
Mica, glass, quartz, silicone rubber, polyethylene, polypropylene and the like can be used.

The matching box used is 3115
Any structure can be suitably used as long as it can match the load with the high frequency power supply 3120. As a method for obtaining the matching, automatic adjustment is preferable, but even if it is adjusted manually, the effect of the present invention is not affected at all.

Cathode electrode 31 to which high-frequency power is applied
Materials of 11 include copper, aluminum, gold, silver, platinum,
Lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and composite materials of two or more of these materials can be used. The shape is preferably a cylindrical shape, but an elliptical shape or a polygonal shape may be used if necessary.

The cathode electrode 3111 may be provided with a cooling means if necessary. As a specific cooling medium, water, air, liquid nitrogen Peltier element or the like is used as needed.

The cylindrical substrate 3112 used in the present invention
May have any material or shape according to the purpose of use. For example, the shape is preferably cylindrical when an electrophotographic photoreceptor is manufactured, but may be flat or another shape if necessary. The material is copper, aluminum, gold, silver, silver, lead, nickel, cobalt,
Iron, chromium, molybdenum, titanium, stainless steel and composite materials of two or more of these materials, as well as polyester, polyethylene, polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, glass, quartz, ceramics, An insulating material such as paper coated with conductivity can be used.

An example of a procedure of a method for forming a light receiving member using the apparatus shown in FIG. 3 will be described below.

In the reaction vessel 3110, the cylindrical film-forming substrate 3
112 is installed, and an exhaust device (not shown) (not shown)
To exhaust the reaction vessel 3110. Subsequently, the temperature of the cylindrical film-forming substrate 3112 is raised to 20 ° C. to 50 ° C. by the heater 3113 for heating the cylindrical film-forming substrate and a control device (not shown).
Control to a predetermined temperature of 0 ° C.

The raw material gas for forming the light receiving member is supplied to the reaction vessel 3
To allow the gas to flow into 110, the valve 3231 of the gas cylinder is used.
3236, the leak valve 3117 of the reaction vessel is closed, and the inflow valves 3241 to 246, the outflow valves 3251 to 256, and the auxiliary valve 3260 are opened, and the main valve 3118 is opened to open the reaction vessel 3110. Then, the inside of the gas supply pipe 3116 is exhausted.

Next, when the reading of the vacuum gauge 3119 becomes 0.7 Pa, the auxiliary valve 3260 and the outflow valve 3251
Close ~ 3256. Then gas cylinders 3221-32
26, each gas is introduced by opening valves 3231 to 236, and each gas pressure is adjusted to 2 by pressure regulators 3261 to 3266.
Adjust to kg / cm ² . Next, the inflow valves 3241 to 3241
246 is gradually opened to introduce each gas into the mass flow controllers 3211 to 3216. After the preparation for film formation is completed by the above procedure, a photoconductive layer is formed on the cylindrical film-formed substrate 3112.

When the temperature of the cylindrical substrate 3112 reaches a predetermined temperature, a necessary one of the outflow valves 3251 to 256 and the auxiliary valve 3260 are gradually opened.
A predetermined source gas is introduced from each of the gas cylinders 3221 to 226 into the reaction vessel 3110 via the gas introduction pipe 3114. Next, each of the mass flow controllers 3211 to 3211
In step 216, each source gas is adjusted to have a predetermined flow rate. At this time, the opening of the main valve 3118 is adjusted while watching the vacuum gauge 3119 so that the inside of the reaction vessel 3110 has a predetermined pressure of 133 Pa or less. When the internal pressure is stabilized, the high frequency power supply 3120 is set to a desired power, for example, a high frequency power of a frequency of 1 MHz to 450 MHz, and supplied to the cathode electrode 3111 through the high frequency matching box 3115 to generate a high frequency glow discharge. The respective source gases introduced into the reaction vessel 3110 are decomposed by the discharge energy, and the cylindrical substrate 3
A deposited film mainly containing predetermined silicon atoms is formed on 112. After the formation of the desired film thickness, the supply of the high-frequency power is stopped, the outflow valves 3251 to 256 are closed to stop the flow of the source gases into the reaction vessel 3110, and the formation of the deposited film is completed.

In addition, when the surface layer of the present invention is formed, the above operation may be basically repeated. Specifically, a necessary one of the outflow valves 3251 to 256 and the auxiliary valve 3260 are gradually opened, and each gas cylinder 3221 to
The raw material gas necessary for the surface layer is supplied from
Introduced into the reaction vessel 3110 via. Next, each of the mass flow controllers 3211 to 216 adjusts each of the raw material gases to a predetermined flow rate. At this time, the opening of the main valve 3118 is adjusted while watching the vacuum gauge 3119 so that the inside of the reaction vessel 3110 has a predetermined pressure of 133 Pa or less. When the internal pressure is stabilized, the high frequency power supply 3120 is switched to a desired power, for example, a frequency of 1M.
And the high-frequency power is set to about 450 to 450 MHz, and the cathode electrode 3111 is passed through the high-frequency matching box 3115.
To generate high-frequency glow discharge. Each source gas introduced into the reaction vessel 3110 is decomposed by the discharge energy, and a surface layer is formed. After the formation of the desired film thickness, the supply of the high-frequency power is stopped, the outflow valves 3251 to 256 are closed to stop the flow of the source gases into the reaction vessel 3110, and the formation of the surface layer is completed.

During the film formation, the cylindrical substrate 3112 may be rotated at a predetermined speed by a driving device (not shown).

FIG. 4 is a schematic view showing an example of an electrophotographic apparatus for explaining an example of an image forming process of the electrophotographic apparatus. The light receiving member 401 is controlled in temperature by a sheet heater 423 provided inside. It is enabled and rotates in the direction of arrow X as needed. Around the light receiving member 401, a main charger 402, an electrostatic latent image forming portion 403,
Developing device 404, transfer material supply system 405, transfer charger 40
6, separation charger 407, cleaner 425, transport system 40
8, a static elimination light source 409 and the like are provided as needed.

Next, an example of the image forming process will be specifically described. The light receiving member 401 is uniformly charged by the main charger 402 to which a high voltage of +6 to 8 kv is applied. The light emitted from the lamp 410 is reflected on the document 412 placed on the platen glass 411 at the portion of the electrostatic latent image,
13, 414, 415, and the lens unit 417
An image is formed by the lens 418, guided through the mirror 416, projected as light carrying information, and an electrostatic latent image is formed on the light receiving member 401. A developer having a negative polarity is supplied to the latent image from the developing device 404 to form a developer image. This exposure does not depend on the reflection from the original 412,
Light carrying information may be scanned and exposed using an LED array, a laser beam, a liquid crystal shutter, or the like.

On the other hand, a transfer material P such as paper is supplied to a transfer material supply system 40.
5, the leading end supply timing is adjusted by the registration roller 422, and the leading end is supplied toward the light receiving member 401. The transfer material P is provided with a positive electric field having a polarity opposite to that of the developer from the back surface to the back surface in the gap between the transfer charger 406 to which the high voltage of +7 to 8 kv is applied and the light receiving member 401.
As a result, the negative polarity developer image on the surface of the light receiving member is transferred to the transfer material P. Then, 12-14 kVp-p,
It is separated from the light receiving member 401 by a separation charger 407 to which a high AC voltage of 300 to 600 Hz is applied. Subsequently, the transfer material P passes through the transfer conveyance system 408 and is fixed to the fixing device 42.
Then, the developer image is fixed and is carried out of the apparatus.

The developer remaining on the light receiving member 401 is collected by a cleaner blade 421 made of an elastic material such as silicone rubber or urethane rubber of the cleaner 425, and the remaining electrostatic latent image is erased by the charge removing light source 409.

Reference numeral 420 denotes a blank exposure LED, which is a light-receiving member as necessary so that unnecessary developer does not adhere to a non-image area such as a portion of the light-receiving member 401 exceeding the width of the transfer material P and a blank portion. It is provided for exposing 401.

Hereinafter, the present invention will be described specifically with reference to Examples, but the present invention is not limited thereto.

[0076]

Example 1 A lower blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 1 using the plasma CVD apparatus shown in FIG. A light receiving member was manufactured by depositing 0.5 μm.

[0077]

[Table 1]

[0078]

[Table 2] Further, as a sample for measuring the fluorine content of the surface layer, a surface layer of 0.5 μm was deposited on a 7059 glass substrate under the conditions shown in Table 2 to prepare AC to F aC: F surface layer samples.

For the surface layer samples A to C, E
After measuring the fluorine content F / (C + F) by SCA analysis, a dynamic ultra-fine hardness tester (DUH manufactured by Shimadzu Corporation) was used.
-201) was used to measure the dynamic hardness. However,
The indenter used for the dynamic hardness measurement is a value when the indenter is pushed down to a load of 0.1 gf using a triangular cone indenter with a 115 ° edge-to-edge angle (radius of curvature of the tip is 0.1 μm or less).

As a result, the fluorine content and the dynamic hardness of the surface layers laminated on the light receiving members A to C were the values shown in Table 3.

[0081]

[Table 3] Next, the light receiving members A to C were copied by a Canon copier NP-
6085 and the moving speed of the light receiving member is 30
100,000 sheets of A4 size continuous paper were passed at 0 mm / sec, and the cleaning performance was evaluated. The elastic rubber blade 421 used was a urethane rubber blade having a rebound resilience of 10%. The developer used had a particle size of 6.5 μm because the smaller the particle size of the developer, the easier the fusion was to occur. Further, the surface temperature of the light receiving member is set to 60 ° C.
The conditions were set such that fusing easily occurred. Table 3 shows the amount of wear of the surface layer after durability. The amount of wear of the surface layer is obtained by measuring the thickness of the surface layer before the endurance using a reflection spectroscopic interferometer, and converting the change in the thickness of the surface layer into the amount of wear per 10,000 sheets from this value.

Further, 100,000 sheets of the photoreceptors A to C were durable in an environment of 35 ° C. and a relative temperature of 90% without providing a heating means, and the image deletion was evaluated. However, a urethane rubber blade having a rebound resilience of 10% was used as the elastic rubber blade 421, and the blade was set so as to perform scrape cleaning at a pressure of 80% of a normal pressure.

Table 4 shows the results obtained in the above evaluation.

[0084]

[Table 4] Next, a method for evaluating unevenness scraping, a method for evaluating fusion, and a method for evaluating defective cleaning will be described with reference to FIG. (Method of Evaluating Uneven Sharpness) The charging current amount of the main charger 402 is adjusted so that the dark portion potential at the position of the developing device 404 becomes 400 V, the document 412 provided with a solid black vertical line is placed on the document table 411, After providing a portion that is constantly rubbed with the developer and a portion that is not rubbed in the generatrix direction on the member surface to perform durability, the dark portion potential at the position of the developing device 404 becomes 4
After adjusting the charging current amount of the main charger 402 so as to be 00 V, placing the solid white original 412 on the document table 411 and adjusting the lighting voltage of the halogen lamp 410 so that the bright portion potential becomes 50 V, the reflection density was adjusted. Puts the original 412 of 0.3.
The potential unevenness at this time is measured, and the percentage of the potential of the portion where unevenness is reduced with respect to the potential of the normal portion is evaluated. ......: Good image without sensitivity unevenness. Δ: There is potential unevenness of 2.5% or less, but the image is at a level that does not cause any practical problem. X: Potential unevenness exceeding 2.5% occurred, and streak-like density unevenness occurred in the image. (Fusing evaluation method) The amount of charging current of the main charger 402 is adjusted so that the potential of the dark portion at the position of the developing device 404 becomes 400 V, the solid white document 412 is placed on the platen 411, and the potential of the bright portion becomes 50 V. The lighting voltage of the halogen lamp 410 is adjusted as described above to create an A3-size solid white image. The image is used to observe black spots generated by the fusion of the developer, and the surface of the light receiving member is observed using a microscope. ......: Good image without fusing. Δ: No black spots appear on the image, but microscopic fusion of 10 μm or less is observed by microscopic observation (no problem in practical use). × ......... Black spots appear on the image. (Cleaning defect evaluation method) The amount of charging current of the main charger 402 is adjusted so that the potential of the dark portion at the position of the developing device 404 becomes 400 V, the document 412 having a reflection density of 0.3 is placed on the platen 411, and the potential of the bright portion is The lighting voltage of the halogen lamp 410 is adjusted so that the value becomes 200 V, and an A3-size halftone image is created. This image is used to evaluate a cleaning defect that occurs in the form of a stripe. ......: Good image with no poor cleaning. Δ: No cleaning failure within 1 mm in width and 1 cm in length, but no problem in practical use. ×: Three or more cleaning defects within 1 mm in width and 1 cm in length occurred. Or, a cleaning failure exceeding 1 mm in width and 1 cm in length occurs.

Table 5 shows the results obtained by the above evaluations.

[0086]

[Table 5] According to Table 5, 1 was obtained for each of the light receiving members A, B, and C.
Even after the endurance of 100,000 sheets, there were no black streak-like image defects caused by uneven scraping, and no image defects such as poor cleaning and fusion occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

Comparative Example 1 In the same manner as in Example 1, a lower blocking layer was formed on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG.
After laminating the photoconductive layer, the surface layer was 0.5 μm thick under the conditions shown in Table 6.
Thus, light receiving members A ′ to C ′ were manufactured.

[0088]

[Table 6] In addition, A ′ ~ on the 7059 glass substrate under the conditions shown in Table 6.
An aC: F surface layer sample of C ′ was prepared, and the fluorine content and dynamic hardness of the surface layers of A ′ to C ′ were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members A ′ to C ′ were the values shown in Table 7.

[0090]

[Table 7] Next, the light receiving members A ′ to C ′ were mounted on a modified copy machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member is 300 mm / sec, and the blade 421 has a rebound resilience of 8%.
A urethane rubber blade was used. Table 7 shows the wear amount of the surface layer after the durability.

Further, Table 8 shows the evaluation results of uneven shaving, fusion, and cleaning failure described in Example 1, and Table 9 shows the evaluation of image deletion.

As shown in these tables, streak-like image defects due to uneven scraping were generated during the durability of 100,000 sheets. Further, with respect to image deletion, there is a case where image deletion occurs in durability under the condition that the heating means of the light receiving member is not provided.

[0093]

[Table 8]

[0094]

[Table 9] Example 2 Similarly to Example 1, a lower blocking layer was formed on a cylindrical conductive substrate by using the plasma CVD apparatus shown in FIG.
After laminating the photoconductive layer, the surface layer was 0.5
The light receiving members of DF were manufactured by depositing μm.

[0095]

[Table 10] Further, on a 7059 glass substrate, D ~
An a-C: F surface layer sample of F was prepared, and the fluorine content and the dynamic hardness of the D-F surface layer were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members DF were the values shown in Table 11.

[0097]

[Table 11] Next, the light receiving members DF are connected to a Canon copier NP.
This was mounted on a modified model of -6085, and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member is 40
The blade 421 was a urethane rubber blade having a rebound resilience of 25% at 0 mm / sec. Table 11 shows the amount of wear of the surface layer after the durability.

Further, 100,000 sheets of the light receiving members D to F were subjected to endurance in an environment of 35 ° C. and 90% relative humidity without providing a heating means, and the image deletion was evaluated. However, the setting was made so that the scrape cleaning was performed at a pressure of 80% of the normal pressure of the blade. Table 4 shows the results obtained by the above evaluation.

Further, Table 5 shows the results of the evaluations of uneven scraping, fusion, and defective cleaning described in Example 1.

According to Tables 4 and 5, the light receiving member D
In any of the light receiving members of Examples F to F, no streak-like image defects caused by uneven shaving were found even after 100,000 sheets had been used, and no image defects such as poor cleaning and fusion occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

Comparative Example 2 In the same manner as in Example 1, a lower blocking layer was formed on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG.
After laminating the photoconductive layer, the surface layer was 0.5
The light receiving members of D ′ to F ′ were manufactured by depositing μm.

[0102]

[Table 12] Furthermore, D ′ was also applied on a 7059 glass substrate under the conditions shown in Table 12.
AC: F surface layer samples of F to F ′ were prepared, and
The amount of fluorine and the dynamic hardness of the surface layers D ′ to F ′ were measured in the same manner as described above.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members D ′ to F ′ were as shown in Table 13.

[0104]

[Table 13] Next, the light receiving members D ′ to F ′ were mounted on a modified copy machine NP-6085 made by Canon, and durability evaluation was performed under the same conditions as in Example 1. However, the moving speed of the light receiving member is 400 mm / sec, and the blade 421 has a rebound resilience of 5%.
A urethane rubber blade was used. Table 13 shows the wear amount of the surface layer after the durability.

Further, Table 8 shows the evaluation results of uneven shaving, fusing and cleaning failure described in Example 1, and Table 9 shows the evaluation of image deletion.

As shown in these tables, there was no practical problem with respect to fusing and image deletion.
In some cases, streak-like image defects due to abrasion and uneven scraping may occur due to the durability of all sheets.

Example 3 In the same manner as in Example 1, the plasma CVD shown in FIG.
After the lower blocking layer, the charge transport layer and the charge generation layer were laminated on the cylindrical conductive substrate under the conditions shown in Table 14 using the apparatus, a surface layer was deposited at a thickness of 0.5 μm under the conditions shown in Table 15 and the light of G to I was applied. A receiving member was manufactured. Further, aC: F surface layer samples of GI were prepared on a 7059 glass substrate under the conditions shown in Table 15, and the fluorine content and the dynamic hardness of the GI surface layer were determined in the same manner as in Example 1. It was measured.

[0108]

[Table 14]

[0109]

[Table 15] As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members GI were the values shown in Table 16.

[0110]

[Table 16] Next, the light receiving members G to I are connected to a Canon copier NP.
It was mounted on a remodeled machine of -6085, and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member is 20
The blade 421 was a silicon rubber blade having a rebound resilience of 35% at 0 mm / sec. Table 16 shows the amount of wear of the surface layer after the durability.

Further, the evaluation results of uneven scraping, fusion, and cleaning failure described in Example 1 are shown in Table 17, and the evaluation of image deletion is shown in Table 18.

[0112]

[Table 17]

[0113]

[Table 18] As shown in these tables, none of the light-receiving members G to I had any streak-like image defects caused by uneven shaving even after the durability of 100,000 sheets. No defects occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

Comparative Example 3 In the same manner as in Example 3, the lower blocking layer, the charge transport layer and the charge generation layer were laminated on the cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. Later, Table 19
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members G ′ to I ′.

[0115]

[Table 19] Further, G ′ was also placed on a 7059 glass substrate under the conditions shown in Table 19.
AC: F surface layer samples of ~ I 'were prepared, and
The amount of fluorine and the dynamic hardness of the surface layers G ′ to I ′ were measured in the same manner as described above.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members D ′ to F ′ were as shown in Table 20.

[0117]

[Table 20] Next, the light receiving members G ′ to I ′ were mounted on a modified copy machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the mobility speed of the light receiving member is 200 mm / sec, and the blade 421 has a rebound resilience of 8 mm.
% Silicone rubber blade was used. Table 20 shows the abrasion loss of the surface layer after the durability.

Further, Table 21 shows the evaluation results of uneven shaving, fusion, and cleaning failure described in Example 1, and Table 22 shows the evaluation of image deletion.

[0119]

[Table 21]

[0120]

[Table 22] As shown in these tables, in the aC: F film in which the abrasion amount is a value larger than 100 ° / 10,000 sheets, the fusion after 100,000 sheets of durability, and furthermore, the image deletion is at a level at which there is no practical problem. However, the mechanical strength was low, and uneven scraping or white streaks were sometimes generated as image defects.

Example 4 In the same manner as in Example 3, a lower blocking layer, a charge transport layer and a charge generation layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. Later, Table 23
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light-receiving members J to L.

[0122]

[Table 23] Further, J to J on the 7059 glass substrate under the conditions shown in Table 23.
Samples of the L aC: F surface layer were prepared, and the fluorine content and the dynamic hardness of the surface layers J to L were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members J to L were as shown in Table 24.

[0124]

[Table 24] Next, the light receiving members J to L are connected to a Canon copier NP.
This was mounted on a modified model of -6085, and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member is 50
The blade 421 was a silicon rubber blade having a rebound resilience of 50% at 0 mm / sec. Table 24 shows the abrasion loss of the surface layer after the durability.

Further, Table 17 shows the evaluation results of uneven shaving, fusion, and cleaning failure described in Example 1, and Table 18 shows the evaluation of image deletion.

As shown in these tables, the light receiving members J to
In each of the light receiving members L, even after 100,000 sheets had been used, no streak-like image defects occurred due to uneven shaving, and no image defects such as poor cleaning and fusion occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

Comparative Example 4 In the same manner as in Example 3, a lower blocking layer, a charge transport layer and a charge generation layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. Later, Table 25
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members J ′ to L ′.

[0128]

[Table 25] Further, J ′ was also applied on a 7059 glass substrate under the conditions shown in Table 25.
~ L 'aC: F surface layer samples were prepared. The amount of fluorine and the dynamic hardness of the surface layers J ′ to L ′ were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members J ′ to L ′ were as shown in Table 26.

[0130]

[Table 26] Next, the light receiving members J ′ to L ′ were mounted on a modified copy machine NP-6085 made by Canon, and durability evaluation was performed under the same conditions as in Example 1. However, the moving speed of the light receiving member is 500 mm / sec, and the blade 421 has a rebound resilience of 55 mm.
% Silicone rubber blade was used. Table 26 shows the abrasion loss of the surface layer after the durability.

Further, Table 21 shows the evaluation results of uneven shaving, fusion, and cleaning failure described in Example 1, and Table 22 shows the evaluation of image deletion.

As shown in these tables, in the aC: F film in which the abrasion loss of 10,000 sheets shows a value smaller than 1 °, 10
It has been found that fusing and image deletion may occur due to the endurance of 10,000 sheets.

[0133]

As described above in detail, the present invention relates to an electrophotographic apparatus having a constitution in which a developer having an average particle size of 5 to 8 μm is scraped and cleaned with an elastic rubber blade having a rebound resilience of 10% or more and 50% or less. The amount of wear after performing the copying process on 10,000 sheets of transfer paper is 0.1% to 100%, the fluorine content is 5% to 50% by atom, and the dynamic hardness is 10% to 50%. 500kg
By using a light receiving member constituting a surface layer with a non-single crystalline fluorinated carbon film having a range of f / mm ^2, the surface layer can be uniformly worn, and an image generated by uneven shaving can be obtained. It is possible to prevent density unevenness and fusion of the developer.

In addition, by uniformly abrading the surface layer in the above range, image defects such as image deletion can be effectively prevented without providing a means for directly heating the surface of the light receiving member under any environment. It is possible to prevent.

Furthermore, the type of developer that can be used and the latitude in designing an electrophotographic apparatus, such as downsizing of the electrophotographic apparatus and cost reduction, can be greatly expanded.

[0136] The present invention can be appropriately performed within the scope of the gist.
It goes without saying that a modified combination can be made, and the present invention is not limited to the above embodiments.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing an example of a light receiving member according to the present invention.

FIG. 2 is a schematic configuration diagram illustrating an example of a deposition apparatus used for manufacturing a light receiving member by a PCVD method applicable to the present invention.

FIG. 3 is a schematic configuration diagram showing another example of a deposition apparatus used for manufacturing a light receiving member by a PCVD method applicable to the present invention.

FIG. 4 is a schematic sectional view illustrating an example of an electrophotographic apparatus.

[Explanation of symbols]

Reference Signs List 101 conductive substrate 102 charge injection blocking layer 103 photoconductive layer 104 surface layer 105 charge generation layer 106 charge transport layer 2100, 3100 deposition device 2110, 3110 reaction vessel 2111, 3111 cathode electrode 2112, 3112 conductive substrate 2113, 3113 substrate heating Heater 2114, 3114 Gas inlet pipe 2115, 3115 High frequency matching box 2116, 3116 Gas pipe 2117, 3117 Leak valve 2118, 3118 Main valve 2119, 3119 Vacuum gauge 2120, 3119 High frequency power supply 2121, 3121 Insulating material 3122 Insulating shield plate 2123 3123 Receiver 2200, 3200 Gas supply device 2211-2216, 3211-216 Mass flow controller 2221-2226, 32 21-2226 Cylinders 2231-2236, 3231-2236 Valves 2241-2246, 3241-3246 Inflow valve 2251-2256, 3251-256 Outflow valve 2260, 3260 Auxiliary valve 2261-2266, 3261-3266 Pressure regulator 401 Light receiving member 402 Main charger 403 Electrostatic latent image forming portion 404 Developing device 405 Transfer paper supply system 406 Transfer charger 407 Separator charger 408 Transport system 409 Static elimination light source 410 Halogen lamp 411 Document table 412 Document 413 Mirror 414 Mirror 415 Mirror 416 Mirror 417 Lens Unit 418 Lens 419 Paper feed guide 420 Blank exposure LED 421 Cleaning blade 422 Registration roller 423 Planar heater 424 Fixer 425 Clear Ner

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G03G 9/08 G03G 9/08 (72) Inventor Ryuji Okamura 3-30-2 Shimomaruko, Ota-ku, Tokyo Non-corp. F term (reference) 2H005 AA00 EA05 2H068 DA04 DA05 DA23 DA43 DA44 DA51 EA24 FA01 FA03

Claims (7)

[Claims] 1. An electrophotographic apparatus in which a light receiving member is rotated and charging, exposure, development, transfer and cleaning are sequentially repeated, wherein the light receiving member applies a phenomenon agent having an average particle size of 5 to 8 μm to the light receiving portion. The copying process of the A4 plate is performed by an electrophotographic apparatus in which the photoreceptor member surface after development and transfer to a transfer material and the developer is transferred is scraped and cleaned with an elastic rubber blade having a rebound resilience of 10% to 50%. An electrophotographic apparatus comprising a non-single-crystalline fluorinated carbon film having a surface layer having a wear amount of not less than 0.1 ° and not more than 100 ° after being subjected to every 10,000 sheets. 2. The light-receiving member comprises a photoconductive layer formed of a non-single-crystal material mainly composed of silicon atoms and a surface layer formed of a non-single-crystal material on a conductive substrate. The electrophotographic apparatus according to claim 1. 3. The dynamic hardness of the surface layer is 10 to 3.
500kgf / mm ^Two 2. The method according to claim 1, wherein
Or the electrophotographic apparatus according to 2. 4. The electrophotographic apparatus according to claim 1, wherein the amount of fluorine ((F / (C + F)) of the non-single crystalline fluorinated carbon film is 5 to 50 atomic%. . 5. The method according to claim 1, wherein the surface layer is formed by decomposing at least a hydrocarbon-based gas and / or a fluorine-based gas by a plasma CDV method using a high frequency of 1 to 450 MHz. 5. The electrophotographic apparatus according to 4. 6. An electrophotographic apparatus according to claim 1, wherein said light receiving member is composed of a charge injection blocking layer, a photoconductive layer and a surface layer. 7. The electrophotographic apparatus according to claim 1, wherein the light receiving member is composed of three layers: a charge transport layer, a charge generation layer, and a surface layer.