JP2000003055A - Electrophotographic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrophotographic device which prevents cleaning failure, irregular scraping of the surface layer, melt sticking of a developer and an image flowing. SOLUTION: This electrophotographic device has a structure for scrape- cleaning with an elastic rubber blade having >=10% and <=50% impact resilience for a developer having 5 to 8 μm average particle size. A light-accepting member having an amorphous silicon carbide film as the surface layer 104 is used, and the surface layer has such properties that the wear amt. is 1 Å/10,000 sheets to 100 Å/10,000 sheets after the copying process for A4-size image is carried out on transfer sheets and that the film has 100 to 950 dynamic hardness and 5 to 90% carbon content.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrophotographic apparatus for performing scrape cleaning with a cleaning blade, and more particularly, to an electrophotographic apparatus in which the surface of a light receiving member is provided without a means for rubbing the surface of the light receiving member such as a cleaning roller. To provide a high-quality image that can be uniformly cut without uneven shaving and that can be used for a long period of time without image blurring or image deletion under any environment without providing a heating means for the light receiving member. The present invention relates to an electrophotographic apparatus using a light-receiving member capable of performing the following.

[0002]

2. Description of the Related Art A large number of electrophotographic methods have been known as described in U.S. Pat. No. 2,297,692, Japanese Patent Publication No. 42-23910 and Japanese Patent Publication No. 43-24748. I have. Generally, a light-receiving member is used to form an electric latent image on the light-receiving member by various means, and then the latent image is developed using a developer and, if necessary, developed on a transfer material such as paper. After electrically transferring the developer image, the image is fixed by heating, pressurizing, heating and pressurizing, or solvent vapor to obtain a copy.

In the above process, a residual developer remains on the surface of the light receiving member even after the transfer of the developer image to the transfer material. Therefore, as a means for removing the residual developer, a cleaning blade is brought into contact with the developer to remove the untransferred developer. Had been discharged outside.

Various materials such as inorganic materials such as selenium, cadmium sulfide, zinc oxide, amorphous silicon (hereinafter referred to as a-Si), and organic materials can be used as a material of a light receiving member used for an electrophotographic photosensitive member. Proposed. Among these, non-single-crystal deposited films containing silicon atoms typified by a-Si as main components, for example, hydrogen and / or
Or a-Si containing halogen (eg, fluorine, chlorine, etc.) (eg, to compensate for hydrogen or dangling bonds)
Are proposed as high-performance, high-durability, and non-polluting photoconductors, and some of them have been put to practical use. JP-A-54-86341, USP 4,26
No. 5,991 discloses a technique of an electrophotographic photosensitive member in which a photoconductive layer is mainly formed of a-Si. JP-A-60-12554 discloses a surface layer containing carbon and halogen atoms on the surface of a photoconductive layer made of amorphous silicon containing silicon atoms.
No. 111962 discloses that a-Si: H or a-Si: H
C: H Photoreceptors having a surface protective lubricating layer provided on a photosensitive layer are disclosed, but all of these are techniques for improving water repellency and abrasion resistance, and the relationship between the electrophotographic process and the shaving property of the surface layer. There is no statement about.

An a-Si type photoreceptor represented by a-Si exhibits excellent sensitivity to long wavelength light such as a semiconductor laser (770 nm to 800 nm) and has little deterioration due to repeated use. Because it has a point,
For example, it is widely used as a photoconductor for electrophotography such as a high-speed copying machine and an LBP (laser beam printer).

As a method of forming a silicon-based non-single-crystal deposited film, there are a sputtering method, a method of decomposing a source gas by heat (thermal CVD method), a method of decomposing a source gas by light (photo CVD method), and a method of decomposing a source gas by plasma. Many methods are known, such as a method of decomposing gas (plasma CVD method). Among them, the plasma CVD method, that is, the raw material gas is decomposed by direct current or high frequency, (RF, VHF) or glow discharge generated by using microwaves, glass, quartz, heat-resistant synthetic resin film, stainless steel, aluminum, etc. The method of forming a deposited film on a desired substrate of
Not only the method of forming an amorphous silicon deposited film for electrophotography, but also the method of forming a deposited film for other uses has been very much in practical use, and various apparatuses for this purpose have been proposed.

Further, in view of application to a light receiving member for electrophotography, in recent years, there has been a strong demand for improvement in film quality and processing ability, and various devices have been studied.

In particular, a plasma process using high-frequency power is used because of its various advantages, such as high discharge stability and its use in forming an insulating material such as an oxide film or a nitride film.

As the light receiving member is required to be improved in electrophotographic characteristics corresponding to high speed and to be required to have more vivid image quality, in recent years, not only the characteristics of the light receiving member but also the small particles of developer have been improved. The diameter has been advanced, and those having a weight average particle diameter of 5 to 8 μm by a Coulter counter or the like are often used.

[0010]

Since the surface hardness of the a-Si light receiving member is extremely higher than that of other photosensitive members, a blade type cleaning system having a high cleaning ability as a cleaning means is widely used. .

However, in such a blade-type cleaning system, the edge surface of the blade is damaged due to the repetition of the copying process for a long period of time due to the projections on the surface of the a-Si light receiving member, and black streaks are formed on the image. Cleaning failure sometimes occurred.

As a result of observing the cause of the protrusions generated on the surface of the a-Si light receiving member, circular protrusions (hereinafter referred to as “protrusions”) were formed on the surface of the light receiving member corresponding to the broken portions of the blade.
Spherical protrusions) were observed. When the deposited film of the spherical projections was cut together with the substrate and the cross section was observed with a microscope, there was a foreign substance having a size of several μm to several tens μm near the substrate or in the middle of the deposited film, and the foreign substance was directed toward the surface with the nucleus as a nucleus. It was found that columnar or inverted cone-shaped abnormal growth had begun. The height of the convex portion of the spherical projection varies depending on the size of the foreign matter serving as the nucleus of the spherical projection.
μm.

When blade cleaning is performed by covering the surface of the spherical projections with a film having high hardness, the projections are sometimes cracked and dent due to the hard surface.

Conventionally, in order to polish only the head of the spherical projection, a polishing tape coated with 10 to 20 μm crystalline silicon carbide powder was pressed against the surface of the light receiving member by a pressing roller, and the height of the spherical projection head was about 5 μm. Polishing was performed until it was about the extent.

However, the head of the spherical projection may be brittle and may be missing. When the head of the spherical projection is missing, a piece of the missing spherical projection may damage the light receiving member surface. If the surface of the light receiving member is damaged, the damaged portion may not be able to hold the electric charge and may appear as a white streak-like image defect on the image.

In order to polish only the head of the spherical projection using the polishing means, it is not efficient in terms of time and cost. Therefore, an electrophotographic apparatus using a light-receiving member capable of providing a high-quality image for a long period of time even when used for an electrophotographic layer without performing the step of polishing the head of the spherical projection by the above-described polishing means is required. I was

If the copying process is repeated in such a state, the residual developer and the fine particles of the external additives (strontium titanate, silica, etc.) contained in the residual developer are scattered in the corona charger to cause corona charging. It may adhere to the wire electrode of the charger (hereinafter, referred to as a charger wire) and cause uneven discharge. If discharge unevenness occurs due to contamination of the charger wire, in normal development (a method of developing a non-exposed portion on the surface of the light receiving member), a streak-like white spot on an image, a scale-like black haze spreading over the entire image, and a period. In some cases, black spots (0.1 to 0.3 mmφ) or the like which are locally generated without causing the image quality may be reduced.

Also, when the charger wire becomes dirty,
An abnormal discharge is induced between the contaminated portion and the light receiving member, which may destroy the surface of the light receiving member and cause image defects.

Further, in the blade-type cleaning method, the amount of the developer remaining on the blade surface may vary due to the difference in the character pattern of the document chart, and the surface layer of the receiving member may be shaved and uneven. When such shaving unevenness occurs, the sensitivity becomes uneven as an electrophotographic characteristic, and the unevenness occurs in the image.

In particular, this development is more remarkable as the particle size of the developer is smaller.

However, in recent years, there has been a demand for higher image quality of image characteristics, and under such circumstances, the particle size of the developer has been reduced. The reduction in the particle size of the developer improves the image quality, but tends to increase the rubbing force. The increase in the rubbing force causes slippage of the residual developer (toner) due to chattering of the cleaning blade. In some cases, black streak-like cleaning failure may occur.

Further, when the frictional resistance is high, the frictional heat increases between the light receiving member and the cleaning blade, and the residual developer used for heat fixing adheres firmly to the surface of the light receiving member due to the frictional heat. Symptoms may occur.
In particular, this fusion phenomenon is remarkable in proportion to the decrease in the particle size of the developer, and is small enough not to affect the image in the initial stage. The image gradually grows and becomes an image defect in the form of a black stripe on the image.

As a solution to such a situation, there are a method of increasing the pressing pressure of the cleaning blade, a measure of increasing the hardness of the elastic rubber blade in order to improve a force for scraping the developer adhered to the surface of the light receiving member, and the like. However, increasing the hardness of the blade is a characteristic of the blade that changes from a rubbery state to a glassy state, so that the material becomes brittle and the life of the blade is shortened. Since the frictional force with the surface of the receiving member is in the upward direction, there is a high possibility that uneven shaving of the surface layer is deteriorated.

As a countermeasure against such unevenness scraping, conventionally, a magnet roller or a cleaning roller made of urethane rubber, silicon rubber or the like is provided to uniformly disperse the developer reaching the cleaning blade, thereby alleviating the unevenness of the developer remaining on the blade surface. It was essential to provide a means for doing so.

The corona discharge product has a strong hygroscopic property, and the surface of the light receiving member that has caused the adsorption has a substantially full charge holding ability due to the low resistance of the light receiving member surface due to the moisture absorption of the attached corona discharge product. Or a partial decrease, causing an image defect called image deletion (the surface charge of the photoreceptor leaks in the surface direction and the electrostatic latent image pattern is broken or not formed).

As a countermeasure for preventing this image deletion phenomenon, a heater for heating the light receiving member is provided in combination with the rubbing means such as the cleaning roller, or the warm air is blown by the warm air blowing device. And a means for heating the surface of the light receiving member to about 30 ° C. to 50 ° C. This heating means lowers the relative humidity and volatilizes the corona discharge products adhering to the surface of the light receiving member and the water adsorbed by the corona discharge products, thereby suppressing a substantial reduction in the resistance of the surface of the light receiving member. This was an essential condition in the design of electrophotographic devices.

Further, the corona discharge products adhering to the inner surface of the shield plate of the corona charger are volatilized and released not only during the operation of the electrophotographic apparatus but also during the stoppage of the apparatus at night or the like. Adhere to the surface of the light receiving member corresponding to.
This corona discharge product absorbs moisture and lowers the resistance of the surface of the light receiving member. The image flow referred to as the trace of the charger tends to occur on the surface of the light receiving member corresponding to the opening area of the charger. Therefore, the heating means is turned off even at night, even when the copying process is stopped.
I couldn't.

The problem of this heating means is that when the diameter of the light receiving member is reduced and the thickness of the conductive base of the light receiving member is reduced in accordance with the reduction in size and cost of the electrophotographic apparatus, the rotating cylindrical developing device is required. In some cases, the image density unevenness occurs in a portion where the image density is high and a portion where the image density is low in the rotation cycle of the agent carrier. This is because the rotating cylindrical developer carrier expands due to the heat of the light receiving member while the apparatus is at rest, and the distance between the rotating cylindrical developer carrier and the light receiving member facing portion is shortened, so that the developer is more easily transferred than usual. That's why.

In recent years, miniaturization, low cost, and maintenance-free are important issues with the personal use of copiers and printers.

The provision of the cleaning roller and the heating means for the light-receiving member described above can reduce the size of the electrophotographic apparatus.
This is a very difficult situation for cost reduction and maintenance-free, and is an important issue to be overcome in the design stage of an electrophotographic apparatus. Further, from the viewpoints of energy saving and ecology, it is desirable that the light receiving member be designed without a means for directly heating the light receiving member.

Further, in addition to the problem of image deletion, the demand for copied images has been increasing in recent years, and there is an urgent need for a technique for stably supplying high image quality. As the use of copiers has shifted from text-based copy originals to images such as photographs, and the need for half-tone copy originals has increased as market needs, strict standards for density stability will be required more than before. It has become

Under such circumstances, a light receiving member which does not cause image deletion without providing a heating means, and a high image quality free from uneven shavings and density unevenness under any electrophotographic process conditions can be stably provided. There is a need for an electrophotographic device that can be supplied in a vacuum.

The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a light receiving member having a spherical projection having a height of 1 to 50 μm on its surface.
The purpose is to suppress damage to the blade edge portion.
Another object of the present invention is to prevent scattering of toner and leak spots caused by poor cleaning.

Another object of the present invention is to provide a light-receiving member of the present invention in an electrophotographic process using a cleaning method in which development is performed with a developer having a small particle size and no rubbing means such as a cleaning roller is provided. An object of the present invention is to provide an electrophotographic apparatus in which the developer is prevented from being scattered, and the wire of the charger is not stained, the cleaning is poor, and the fusion is not generated. Further, by providing an electrophotographic apparatus which does not cause image defects such as image deletion in a high humidity environment without providing a means for heating the light receiving member and a means for rubbing the surface of the light receiving member, the design of the electrophotographic apparatus is provided. Is to greatly expand the latitude of

[0035]

The present inventors have paid attention to the relationship between the electrophotographic process and the amount of wear of the surface layer of the light receiving member, and have studied the abrasion of the surface of the light receiving member in the electrophotographic process, which is severe in uneven shaving. Tried to improve. As a result, the electrophotographic process of the present invention and the a-Si
C: When the surface layer of the light-receiving member is shaved by the blade by the combination of the light-receiving member using the H film as the surface layer of the light-receiving member, the convex portion of the spherical projection has a higher pressure than the smooth normal portion. And the surface layer of the spherical protrusion is shaved and reaches the photoconductive layer immediately. The shaving amount of the photoconductive layer is generally 1 μm / 10,000 sheets, and it has been found that damage to the blade can be reduced, and occurrence of cleaning failure due to damage to the blade can be reduced.

Further, even in an electrophotographic apparatus which is strictly resistant to uneven shaving, uneven shaving does not occur, and cleaning failure and fusion do not occur. In addition, it has been found that image deletion does not occur under any environmental conditions without providing a heating means for the light receiving member.

According to the present invention, there is provided an electrophotographic apparatus in which charging, exposure, development, transfer, and cleaning are sequentially repeated on a light receiving member, and a developer having an average particle size of 5 to 8 μm is developed on the light receiving member. After the A4 plate copying process is performed on transfer paper with an electrophotographic apparatus that scrapes and cleans the surface of the light receiving member after transfer of the developer and the developer is transferred with an elastic rubber plate having a rebound resilience of 10% to 50%. Quantity 1
An electrophotographic apparatus characterized by using a light-receiving member having a surface layer of a non-single-crystal silicon carbide film having a thickness of Å / 10,000 or more and 100 Å / 10,000 or less, In the electrophotographic apparatus, in which charging, exposure, development, transfer, and cleaning are sequentially repeated, the electrophotographic apparatus does not include a rubbing cleaning unit using a cleaning roller and does not include a unit that directly heats the light receiving member. The receiving member is a photoconductive layer composed of a non-single-crystal material having a silicon atom as a base material on a conductive substrate and a light-receiving member composed of a surface layer composed of a non-single-crystal material; Dynamic hardness is 100 to 950, the carbon content (C / Si + C) of the non-single-crystalline silicon carbide film is 5% to 90%, and the surface layer is Depositing a film by decomposing at least a silane-based gas and a hydrocarbon-based gas by a plasma CVD method using a high frequency of 1 to 450 MHz, wherein the light receiving member is a charge injection blocking layer, a photoconductive layer, The light receiving member includes three layers, that is, a charge transport layer, a charge generation layer, and a surface layer.

The rebound resilience of the cleaning blade used in the electrophotographic apparatus of the present invention is preferably from 10% to 50%, and when the rebound resilience of the blade is lower than 10%, the characteristics of the blade are changed from a rubbery state to a glassy state. , The material becomes brittle and the life of the blade is shortened, and the rebound resilience of the cleaner blade is 50%.
When the value exceeds the above, there may be a problem that the blade is chattered, the cleaning property is reduced, and the blade is rolled up to damage the surface of the light receiving member.

On the other hand, in order to improve the cleaning performance, a blade with a groove as described in JP-A-54-143149, a blade with a projection as described in JP-A-57-124777, and the like have been devised. However, an electrophotographic apparatus using a developer having a small particle size, not providing a rubbing means such as a cleaning roller, and further not providing a heating means for a light receiving member, and an amorphous carbonized silicon film as a surface layer. Does not describe the relationship with the amount of wear on the surface of the light receiving member provided in the above.

In the present invention, a
The dynamic hardness of the SiC: H surface layer is 100 to 95;
When the dynamic hardness is less than 0 and the dynamic hardness is less than 100, the mechanical hardness is impaired, and the dynamic hardness becomes 95.
If it is larger than 0, the abrasion amount of the surface layer is reduced, so that the surface layer is hardly abraded, the effect of scraping off the corona discharge product is reduced, and image deletion may occur. The amount of carbon contained in the surface layer film is 5% to 9 in C / (Si + C).
0%, preferably 45% to 80% is suitable. If the carbon content is less than 5%, it may not be sensitively suitable for an electrophotographic apparatus. If it exceeds 90%, the densification of the film is impaired, and the mechanical strength is impaired.

Within the above ranges of the carbon content and the dynamic hardness, the surface layer has an abrasion loss of not less than 1 angstroms / 10,000 sheets and not more than 100 angstroms / 10,000 sheets after the copying process of the A4 plate is performed on the transfer paper. By selecting the range, chattering of the blade due to friction is reduced, and partial stress on the blade surface is suppressed, so that partial stagnation of the developer is reduced. As a result, it has been found that since the surface layer is uniformly worn without uneven shaving, the cleaning property is excellent, the toner is not scattered, the wire is stained, and the fusion can be prevented by the shaving effect. . In addition, since the surface layer is uniformly worn, the corona discharge products attached to the surface of the light receiving member are efficiently scraped off evenly, so that the means for heating the light receiving member and the surface of the light receiving member are rubbed. It has been found that, even if no means is provided, no image deletion occurs under any environmental conditions.

When the wear amount of the surface layer of the light receiving member used in the present invention is more than 100 Å / 10,000 sheets, the mechanical strength may be impaired, and when the wear amount is less than 1 Å / 10,000 sheets. The surface layer is less likely to be worn, and the effect of scraping off corona discharge products is reduced, which may cause image deletion.

Further, the optimum thickness of the surface layer used in the light receiving member of the present invention can be determined from the relationship between the wear amount of the surface layer and the life of the electrophotographic apparatus.
The range is preferably from 01 μm to 10 μm, more preferably from 0.1 μm to 1 μm. When the thickness of the surface layer is 0.01 μm or less, the mechanical strength is impaired, and when it is 10 μm or more, the residual potential may increase.

[0044]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings.

FIGS. 1A and 1B are examples of schematic cross-sectional views of a light receiving member according to the present invention. In FIG. 1, FIG. 1A shows a single layer in which the photoconductive layer is not functionally separated. It is a single-layer light receiving member. (B) is a function-separated light-receiving member in which a photoconductive layer is separated into a charge generation layer and a charge transport layer.

The a-Si light receiving member shown in FIG. 1A is made of a conductive substrate 101 such as aluminum and a conductive substrate 10.
The charge injection blocking layer 102, the photoconductive layer 103, and the surface layer 104 are sequentially laminated on the surface of the substrate 1. Here, the charge injection blocking layer 102 is formed from the conductive substrate 101 to the photoconductive layer 103.
This is to prevent the injection of electric charge into the device, and is provided as needed. In addition, the photoconductive layer 103 is made of an amorphous material containing at least silicon atoms and has photoconductivity. Further, the surface layer 104 is made of an amorphous material containing at least silicon atoms and carbon atoms and hydrogen atoms, and has a capability of maintaining a visible image in an electrophotographic apparatus.

In the following, the charge injection blocking layer 10 is used except when the effect differs depending on the presence or absence of the charge injection blocking layer 102.
2 will be described as being present.

The a-Si light receiving member shown in FIG. 1B has a charge transport layer 106 in which the photoconductive layer 103 is made of an amorphous material containing at least silicon atoms and carbon atoms.
This is a function-separated type light receiving member having a configuration in which charge generation layers 105 made of an amorphous material containing at least silicon atoms are sequentially stacked. When the light receiving member is irradiated with light, carriers mainly generated in the charge generation layer 105 pass through the charge transport layer 106 and reach the conductive substrate 101.

The film forming gas for the surface layer 104 is as follows.
Silicon hydrides such as SiH ₄ , Si ₂ H ₆ , Si ₃ H ₈ , Si ₄ H ₁₀ and gases such as CH ₄ , C ₂ H ₆ , C ₃ H ₈ , C ₄ H ₁₀ and hydrocarbons which can be gasified Are effectively used. Further, these raw material gases for supplying carbon may be diluted with a gas such as H ₂ , He, Ar, Ne or the like as necessary.

FIG. 2 is a diagram schematically showing an example of a general apparatus for depositing a light receiving member by a plasma CVD method.

This apparatus is roughly classified into a deposition apparatus 210
0, a source gas supply device 2200, and an exhaust device (not shown) for reducing the pressure inside the reaction vessel 2110. A cylindrical deposition substrate 2112 connected to the ground, a heater 2113 for heating the cylindrical deposition substrate, a source gas introduction pipe 2 are provided in a reaction vessel 2110 in the deposition apparatus 2100.
114, and a high-frequency matching box 2
A high frequency power supply 2120 is connected via 115.

The raw material gas supply device 2200 includes SiH ₄ ,
H ₂ , CH ₄ , NO, B ₂ H ₆ , CF _4, etc. source gas cylinders 2221-2226 and valves 2231-2236,
2241 to 2246, 2251 to 2256 and mass flow controllers 2211 to 2216, and the cylinders for the respective constituent gases are supplied to the reaction vessel 2 via a valve 2260.
It is connected to a gas introduction pipe 2114 in 110.

The cylindrical film-forming substrate 2112 is connected to the ground by being placed on the conductive support 2123.

An example of a procedure of a method for forming a light receiving member using the apparatus shown in FIG. 2 will be described below.

In the reaction vessel 2110, the cylindrical substrate 2 is formed.
The reactor 112 is installed, and the inside of the reaction vessel 2110 is exhausted by an exhaust device (not shown) (for example, a vacuum pump). Subsequently, the temperature of the cylindrical substrate 2112 is controlled to a desired temperature of 20 ° C. to 500 ° C. by the heater 2113 for heating the cylindrical substrate. Next, in order to allow the source gas for forming the light receiving member to flow into the reaction vessel 2110, the valves 2231 to 2236 of the gas cylinder and the leak valve 2117 of the reaction vessel are used.
Is closed and the inlet valve 2241
2246, the outflow valves 2251 to 2256, and the auxiliary valve 2260 are opened, the main valve 2118 is opened, and the reaction vessel 2110 and the gas supply pipe 2 are opened.
Exhaust 116.

Thereafter, the gauge 2119 reads 0.7P
a, the auxiliary valve 2260 and the outflow valve 22
Close 51-2256. Then the gas cylinder 2221
From 2226, each gas is introduced by opening valves 2231 to 2236, and each gas pressure is adjusted to ² kg / cm ² by pressure regulators 2261 to 2266. Next, the inflow valve 2241
2246 are gradually opened to introduce each gas into the mass flow controllers 2211 to 2216.

After the preparation for film formation is completed by the above procedure, a photoconductive layer is first formed on the cylindrical substrate 2112 for film formation.

That is, when the temperature of the cylindrical substrate 2112 reaches a desired temperature, each of the outflow valves 2251 to 2251
The necessary one of the 256 and the auxiliary valve 2260 are gradually opened, and a desired raw material gas is supplied from each of the gas cylinders 2221 to 2226 through the gas introduction pipe 2114 to the reaction vessel 211.
Introduce into 0. Next, each mass flow controller 2
According to 211 to 2216, each raw material gas is adjusted so as to have a desired flow rate. At this time, the inside of the reaction vessel 2110 is 1
Vacuum gauge 211 so as to be at a desired pressure of 33 Pa or less.
9 while adjusting the opening of the main valve 2118.
When the internal pressure is stabilized, the high-frequency power supply 2120 is set to a desired power, for example, at a frequency of 1 MHz to 450 MHz.
Is supplied to the cathode electrode 2111 through the high frequency matching box 2115 to generate a high frequency glow discharge. This discharge energy causes the reaction vessel 21
Each of the source gases introduced into 10 is decomposed, and a photoconductive layer mainly composed of desired silicon atoms is deposited on cylindrical deposition substrate 2112. After the desired film thickness is formed, the supply of the high-frequency power is stopped, and each of the outflow valves 2251 to
By closing 2256, the flow of each source gas into the reaction vessel 2110 is stopped, and the formation of the photoconductive layer is completed.

Known compositions and thicknesses of the photoconductive layer can be used.

When the surface layer is formed on the photoconductive layer, basically, the above operation may be repeated.

FIG. 3 shows a plasma CV using a high frequency power supply.
It is the figure which showed typically another example of the deposition apparatus of the light receiving member by the D method.

This apparatus is roughly classified into a deposition apparatus 310
0, a source gas supply device 3200, and an exhaust device (not shown) for reducing the pressure inside the reaction vessel 3110. A cylindrical film-forming substrate 3112 connected to the ground, a heater 3113 for heating the cylindrical film-forming substrate, and a source gas introducing pipe 31 in a reaction vessel 3110 in the deposition apparatus 3100.
14, and a high-frequency matching box 31
A high-frequency power supply 3120 is connected via the power supply 15.

The raw material gas supply device 3200 includes SiH ₄ ,
Raw material gas cylinders 3221 to 226 such as H ₂ , CH ₄ , NO, B ₂ H ₆ , CF _4, etc.
3241 to 3246, 3251 to 256, and mass flow controllers 3111 to 216, and the reaction vessel 3 via a cylinder valve 3260 for each constituent gas.
It is connected to a gas introduction pipe 3114 in 110.

The cylindrical film-forming substrate 3112 is connected to the ground by being placed on the conductive support 3123. In addition, the cathode electrode 3111 is made of a conductive material, and is insulated by the insulating material 3121.

Examples of the conductive material used for the conductive support 3123 include copper, aluminum, gold, silver, platinum, lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and two or more of these materials. Can be used.

As an insulating material for insulating the cathode electrode 3111, an insulating material such as ceramics, Teflon, mica, glass, quartz, silicone rubber, polyethylene and polypropylene can be used.

As the matching box 3115, any structure can be suitably used as long as it can match the load with the high frequency power supply 3120.
Further, as a method for obtaining the matching, it is preferable that the adjustment is performed automatically. However, even if the adjustment is performed manually, the effect of the present invention is not affected at all.

Cathode electrode 31 to which high-frequency power is applied
Materials of 11 include copper, aluminum, gold, silver, platinum,
Lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and composite materials of two or more of these materials can be used. The shape is preferably a cylindrical shape, but an elliptical shape or a polygonal shape may be used if necessary.

The cathode electrode 3111 may be provided with a cooling means if necessary. As a specific cooling means, cooling with water, air, liquid nitrogen, a Peltier element or the like is used as necessary.

The cylindrical substrate 3112 used in the present invention.
May have any material or shape according to the purpose of use. For example, the shape is preferably cylindrical when an electrophotographic photoreceptor is manufactured, but may be flat or another shape if necessary. In addition, in the material, copper, aluminum, gold, silver, platinum, lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and two or more composite materials of these materials, further, polyester, polyethylene, Polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, glass,
An insulating material such as quartz, ceramics, paper or the like coated with a conductive material can be used.

An example of a procedure of a method for forming a light receiving member using the apparatus shown in FIG. 3 will be described below.

A cylindrical film-forming substrate 3 is placed in a reaction vessel 3110.
The reactor 112 is installed, and the inside of the reaction vessel 3110 is evacuated by an exhaust device (not shown) (for example, a vacuum pump). Subsequently, the temperature of the cylindrical substrate 3112 is controlled to a predetermined temperature of 20 ° C. to 500 ° C. by the heater 3113 for heating the cylindrical substrate.

The raw material gas for forming the light receiving member is supplied to the reaction vessel 3
To allow the gas to flow into 110, the valve 3231 of the gas cylinder is used.
3236, and confirmed that the leak valve 2117 of the reaction vessel was closed.
46, outflow valves 3251 to 256, auxiliary valve 32
Check that 60 is open, and
8 to open the reaction vessel 3110 and the gas supply pipe 3116
Exhaust.

Next, the reading of the vacuum system 3119 is 5 × 10 ⁻⁶ T.
When it reaches orr, the auxiliary valve 3260 and the outflow valves 3251 to 256 are closed. Then gas cylinder 322
Each gas is introduced from 1 to 3226 by opening valves 3231 to 236, and each gas pressure is adjusted to ² kg / cm ² by pressure regulators 3261 to 2266. Next, the inflow valve 32
The gas is introduced into the mass flow controllers 3211 to 216 by gradually opening the ports 41 to 246.

After the preparation for film formation is completed by the above procedure, a photoconductive layer is formed on the cylindrical substrate 3112 for film formation.

When the temperature of the cylindrical substrate 3112 reaches a predetermined temperature, a necessary one of the outflow valves 3251 to 256 and the auxiliary valve 3260 are gradually opened.
A predetermined source gas is introduced from each of the gas cylinders 3221 to 226 into the reaction vessel 3110 via the gas introduction pipe 3114. Next, each of the mass flow controllers 3211 to 3211
In step 216, each source gas is adjusted to have a predetermined flow rate. At this time, the opening of the main valve 3118 is adjusted while watching the vacuum gauge 3119 so that the inside of the reaction vessel 3110 has a predetermined pressure of 133 Pa or less. When the internal pressure is stabilized, the high-frequency power supply 3120 is set to a desired power, and high-frequency power having a frequency of 1 MHz to 45 MHz is supplied to the cathode electrode 3111 through the high-frequency matching box 3115 to generate a high-frequency glow discharge. Each source gas introduced into the reaction vessel 3110 is decomposed by this discharge energy, and the cylindrical substrate 3112 is formed.
A deposited film mainly containing predetermined silicon atoms is formed thereon. After the desired film thickness is formed, the supply of the high-frequency power is stopped, the outflow valves 3251 to 256 are closed to stop the flow of the source gases into the reaction vessel 3110, and the formation of the deposited film is completed.

Further, when the surface layer of the present invention is formed, the above operation may be basically repeated.

Specifically, each of the outflow valves 3251 to 325
6 and the auxiliary valve 3260 are gradually opened, and the raw material gas required for the surface layer is supplied from the gas cylinders 3221 to 226 via the gas introduction pipe 2114 to the reaction vessel 2.
Introduced into 110. Next, each of the mass flow controllers 3211 to 216 adjusts each of the raw material gases to a predetermined flow rate. At this time, the vacuum system 3 is controlled so that the inside of the reaction vessel 3110 has a predetermined pressure of 133 Pa or less.
The opening of the main valve 3118 is adjusted while looking at 119. When the internal pressure is stabilized, the high-frequency power supply 3120 is supplied with high-frequency power of a frequency of 1 MHz to 450 MHz set to a desired power to the cathode electrode 3111 through the high-frequency matching box 3115 to generate a high-frequency glow discharge. The discharge energy causes the reaction vessel 3110
Each raw material gas introduced therein is decomposed to form a surface layer. After the formation of the desired film thickness, the supply of the high-frequency power is stopped, the outflow valves 3251 to 256 are closed to stop the flow of the respective raw materials into the reaction vessel 3110, and the formation of the surface layer is completed.

During the film formation, the cylindrical substrate 3112 may be rotated at a predetermined speed by a driving device (not shown).

FIG. 4 is a schematic view showing an example of an electrophotographic apparatus for explaining an example of an image forming process of the electrophotographic apparatus. The light receiving member 401 is controlled in temperature by a sheet heater 423 provided inside. It is enabled and rotates in the direction of arrow X as needed. Around the light receiving member 401, a main charger 402, an electrostatic latent image forming portion 403,
Developing device 404, transfer material supply system 405, transfer charger 406
(A), a separation charger 406 (b), a cleaner 425,
A transport system 408, a static elimination light source 409, and the like are provided as needed.

Hereinafter, an example of the image forming process will be described more specifically. The light receiving member 401 is uniformly charged by the main charger 402 to which a high voltage of +6 to 8 kV is applied. The light emitted from the lamp 410 is reflected on the document 412 placed on the platen glass 411 at the portion of the electrostatic latent image, passes through the mirrors 413, 414, 415, and forms an image by the lens 418 of the lens unit 417. Then, the light is guided through the mirror 416, projected as light carrying information, and an electrostatic latent image is formed on the light receiving member 401. A developer having a negative polarity is supplied from the developing device 404 for the latent image to form a developer image. In this exposure, the original is 412
Regardless of the reflection from the LED array or laser beam,
Alternatively, light carrying information may be scanned and exposed using a liquid crystal shutter or the like.

On the other hand, a transfer material P such as paper is transferred to a transfer material supply system 40.
5, the leading end supply timing is adjusted by the registration roller 422, and the leading end is supplied toward the light receiving member 401. The transfer material P is applied with a positive electric field having a polarity opposite to that of the developer from the back surface in the gap between the transfer charger 406 (a) to which the high voltage of +7 to 8 kV is applied and the light receiving member 401, whereby the surface of the light receiving member is Is transferred to the transfer material P. Then, 12-14 kVp-p, 300
Separation charger 40 to which high-voltage AC voltage of ~ 600 Hz is applied
6 (b), it is separated from the light receiving member 401. Subsequently, the transfer material P passes through the transfer conveyance system 408 and is fixed to the fixing device 42.
Then, the developer image is fixed and is carried out of the apparatus.

The developer remaining on the light receiving member 401 is collected by a cleaning roller 407 of a cleaner 425 and a cleaning blade 421 made of an elastic material such as silicone rubber or urethane rubber. Will be erased by

Reference numeral 420 denotes a blank exposure LED, which is a light receiving member as necessary so that unnecessary developer does not adhere to a non-image area such as a portion exceeding the width of the transfer material P of the light receiving member 401 and a blank portion. It is provided for exposing 401.

Hereinafter, the present invention will be described specifically with reference to Examples, but the present invention is not limited thereto.

[0086]

Example 1 A blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 1 using the plasma CVD apparatus shown in FIG. To 0.
Light receiving members A to C were manufactured by depositing 5 μm. However,
In order to generate spherical projections, a deposited film was formed in a state where dust was previously attached to the surface of the cylindrical conductive substrate.

Further, as a sample for measuring the carbon content of the surface layer, a 0.5 μm surface layer was deposited on a 7059 glass substrate under the conditions shown in Table 2 to prepare a-C a-SiC: H surface layer samples. did.

For the surface layer samples A to C, S
After measuring the carbon content C / (Si + C) by IMS, a dynamic ultra-micro hardness tester (DUH manufactured by Shimadzu Corporation)
-201) was used to measure the dynamic hardness. However, the indenter used for the dynamic hardness measurement had an edge-to-edge angle of 11
This is the value when the indenter is pushed down to a load of 0.1 gf using a 5 ° triangular indenter (tip radius of curvature 0.1 μm or less). As a result, the carbon content and the dynamic hardness of the surface layers laminated on the light receiving members A to C were the values shown in Table 3.

Next, the light receiving members A to C are mounted on a modified machine of a copying machine NP-6085 manufactured by Canon Inc., and the moving speed of the light receiving members is 300 mm / sec.
The cleaning performance was evaluated by performing 100,000 sheets. However, the cleaning conditions were set so that the cleaning roller 407 was not provided, and the scrape cleaning was performed using only the elastic rubber blade 421. The elastic rubber blade 421 used has a rebound resilience of 10%. The smaller the particle size of the developer, the easier the fusion occurs. It was used. Further, by controlling the surface temperature of the light receiving member to 60 ° C., conditions were set such that fusion was easily generated.

Table 8 shows the results obtained by the above evaluation.
Table 3 shows the amount of wear of the surface layer after durability. The abrasion amount of the surface layer is obtained by measuring the thickness of the surface layer before and after the endurance with a reflection spectroscopic interferometer and converting the value into the abrasion amount per 10,000 sheets.

Further, as a result of observing the surface after endurance with a metallographic microscope, the height of the tip of each spherical projection was 5 μm or less. Further, as a result of observing the blade edge portion, slight damage was recognized corresponding to the portion where the spherical projections were present, but the damage was slight enough that no cleaning failure occurred.

Further, 100,000 sheets of the photoreceptors A to C were durable in an environment of 35 ° C. and 90% relative humidity without providing a heating means, and the image deletion was evaluated. However, the cleaning condition was such that only the elastic rubber blade 421 was cleaned without providing the cleaning roller 407, and the blade was set so that the scrape cleaning was performed at a pressure of 80% of the normal pressure.

Table 9 shows the results obtained by the above evaluation.

As a result, in any of the light receiving members A, B, and C, even after the endurance of 100,000 sheets, there is no black streak-like image defect caused by uneven shaving, and the image defect such as defective cleaning or fusion is not observed. Not at all. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

(Method for Evaluating Uneven Shaving) Hereinafter, a method for evaluating uneven shaving will be described with reference to FIG.

The dark portion potential at the position of the developing device 404 is 40
The amount of the charging current of the main charger 402 is adjusted so as to be 0 V, and the original 41 having a solid black vertical line
2 in the generatrix direction on the surface of the light receiving member, a portion always rubbed with the developer and a portion not rubbed are provided for durability.
V, the charging current of the main charger 402 is adjusted
Place the solid white original 412 on the original platen 411 and set the bright area potential to 5
After adjusting the lighting voltage of the halogen lamp 410 so as to be 0 V, place the original 412 having a reflection density of 0.3. Measure the potential unevenness at this time. % Is changed.

・ ・ ・: Good image without sensitivity unevenness Δ: Potential unevenness of 2.5% or less, but an image poses a practical problem X: Potential unevenness of 2.5% or more Occurrence of streaks in image density

(Method of Evaluating Fusion) A method of evaluating fusion will be described below with reference to FIG.

The dark portion potential at the position of the developing device 404 is 40
The charging current amount of the main charger 402 is adjusted so as to be 0 V, the solid white document 412 is placed on the document table 411, and the lighting voltage of the halogen lamp 410 is adjusted so that the bright portion potential becomes 50 V. A solid white image was created. Observing black spots generated by the fusion of the developer with this image,
Further, the surface of the light receiving member is observed with a microscope.

○: good image without fusing △: no black spots on the image, but 1
Fine fusion of 0 μm or less is observed (no problem in practical use) ×: Black spots appear on the image

(Method of Evaluating Cleaning Failure) A method of evaluating a cleaning failure will be described below with reference to FIG.

The dark portion potential at the position of the developing device 404 is 40
The charging current amount of the main charger 402 is adjusted so as to be 0 V, the document 412 having a reflection density of 0.3 is placed on the document table 411, and the halogen lamp 4 is set so that the bright portion potential becomes 200 V.
The lighting voltage of No. 10 was adjusted, and an A3-size halftone image was created. The image is used to observe streaky density unevenness caused by wire contamination.

・ ・ ・: Good image with no defective cleaning Δ: Level of 2 or less cleaning defects within 1 mm in width and 1 cm in length but no problem in practical use X: within 1 mm in width and 1 cm in length Cleaning failure occurs in two or more places

[0104]

[Table 1]

[0105]

[Table 2]

[0106]

[Table 3]

[Comparative Example 1] As in Example 1, a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG. Under the conditions of 4, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members A ′ to C ′. Further, a-SiC surface layer samples A 'to C' were prepared on the 7059 substrate under the conditions shown in Table 4, and the carbon content and the dynamic hardness of the surface layers A 'to C' were obtained in the same manner as in Example 1. Was measured.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members A ′ to C ′ were the values shown in Table 5.

Next, the light receiving members A ′ to C ′ were mounted on a modified machine of a copying machine NP-6085 manufactured by Canon, and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member was 300 mm / sec, and the blade used had a rebound resilience of 8%. Table 5 shows the wear amount of the surface layer after the durability.

Further, as a result of observing the spherical projections on the drum surface with a metallographic microscope, it was found that the heads of the spherical projections were missing, a number of depressions were generated, and the depressions were fused to the nuclei. Further, damage was observed at the blade edge corresponding to the dent.

Tables 12 and 13 show the results obtained by the above evaluation.

As a result, a streak-like image defect due to uneven scraping was generated during the durability of 100,000 sheets. Further, with respect to image deletion, there is a case where image deletion occurs in durability under the condition that the heating means of the light receiving member and the cleaning roller are not provided.

[0113]

[Table 4]

[0114]

[Table 5]

Example 2 As in Example 1, a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG. Under the conditions of 6, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members D to F. Further, a-SiC: H surface layer samples of DF were prepared on a 7059 glass substrate under the conditions shown in Table 6, and the carbon content and dynamic hardness of the DF surface layer were determined in the same manner as in Example 1. It was measured.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members DF were the values shown in Table 7.

Next, the light receiving members D to F were mounted on a modified machine of a copying machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member was 400 mm / sec, and the blade used had a rebound resilience of 17%. Table 7 shows the wear amount of the surface layer after the durability.

Further, as a result of observing the surface after durability with a metallographic microscope, the tip height of each of the spherical projections was 5 μm or less. Further, as a result of observing the blade edge portion, slight damage was recognized corresponding to the portion where the spherical projections were present, but the damage was slight enough that no cleaning failure occurred.

Table 8 shows the results obtained in the above evaluation.

Further, 100,000 sheets of the light receiving members D to F were subjected to durability in an environment of 35 ° C. and a relative humidity of 90% without providing a heating means, and the image deletion was evaluated. However, the cleaning condition was such that only the elastic rubber blade 421 was cleaned without providing the cleaning roller 407, and the blade pressing pressure was set so as to perform scrape cleaning at a normal pressure of 80%.

Table 9 shows the results obtained by the above evaluation.

As a result, no streak-like image defects caused by uneven shaving were found in any of the light-receiving members D to F even after 100,000 sheets of paper had been used, and image defects such as poor cleaning and fusion were found. Did not occur at all.
Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

[0123]

[Table 6]

[0124]

[Table 7]

[0125]

[Table 8]

[0126]

[Table 9] ・ ・ ・: Good image with no image bleeding ラ イ ン: 7 lines / mm line is not visible, but 6 lines / mm line is visible and has no practical problem. Image flow occurs so that lines cannot be seen

Comparative Example 2 In the same manner as in Example 1, a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 1 using the plasma CVD apparatus shown in FIG. Under conditions of 10, the surface layer was deposited to a thickness of 0.5 μm to produce light receiving members D ′ to F ′. Further, Table 1 is also shown on a 7059 glass substrate.
Under the condition of 0, samples of the a-SiC: H surface layer of D ′ to F ′ were prepared, and the carbon content and the dynamic hardness of the surface layer of D ′ to F ′ were measured in the same manner as in Example 1.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members D ′ to F ′ were as shown in Table 11.

Next, the light receiving members D ′ to F ′ were mounted on a modified machine of a copying machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member was 400 mm / sec, and the blade used had a rebound resilience of 55%. Table 11 shows the wear amount of the surface layer after the durability.

Tables 12 and 13 show the results obtained by the above evaluation.

As a result, fusing and image bleeding were at levels where there was no problem in practical use. However, there were cases where 100,000 sheets were used, and scratches and stripe-like image defects due to uneven scraping were generated.

[0132]

[Table 10]

[0133]

[Table 11]

[0134]

[Table 12]

[0135]

[Table 13] ・ ・ ・: Good image with no image bleeding ラ イ ン: 7 lines / mm line is not visible, but 6 lines / mm line is visible and has no practical problem. Image flow occurs so that lines cannot be seen

Example 3 In the same manner as in Example 1, after a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. ,
Under the conditions shown in Table 15, a surface layer was deposited to a thickness of 0.5 μm to produce GI light-receiving members. Further, Table 15 is also provided on the 7059 substrate.
A-SiC: H surface layer samples of GI were prepared under the conditions described above, and the carbon content and dynamic hardness of the GI surface layers were measured in the same manner as in Example 1.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members GI were the values shown in Table 16.

Next, the light receiving members GI were mounted on a modified machine of a copying machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member was 500 mm / sec, and the blade used had a rebound resilience of 30%. Table 16 shows the abrasion loss of the surface layer after the durability.

When the surface after durability was observed with a metallographic microscope, the tip height of each of the spherical projections was 5 μm or less. Further, as a result of observing the blade edge portion, slight damage was recognized corresponding to the portion where the spherical projections were present, but the damage was slight enough that no cleaning failure occurred.

Tables 21 and 22 show the results obtained by the above evaluation.

As a result, no streak-like image defect caused by uneven scraping was found in any of the light-receiving members G to I even after the 100,000-sheet durability, and image defects such as poor cleaning and fusion were observed. Did not occur at all.
Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

[0142]

[Table 14]

[0143]

[Table 15]

[0144]

[Table 16]

[Comparative Example 3] As in Example 1, a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. 17
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members G ′ to I ′. Further, a-SiC: H surface layer samples of G ′ to I ′ were prepared on the 7059 substrate under the conditions shown in Table 17, and the amount of carbon in the surface layers of G ′ to I ′ and The dynamic hardness was measured.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members G ′ to I ′ were as shown in Table 18.

Next, the light receiving members G ′ to I ′ were mounted on a modified machine of a copying machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member was 500 mm / sec, and the blade used had a rebound resilience of 8%. Table 18 shows the wear amount of the surface layer after the durability.

Further, as a result of observing the spherical projections on the drum surface with a metallurgical microscope, the spherical projections were fused to the nuclei because the heads of the spherical projections were not shaved and the initial state was maintained. Breakage was observed at the blade edge corresponding to the protrusion.

Tables 25 and 26 show the results obtained by the above evaluation.

As a result, the amount of wear was 1 angstrom /
In an a-SiC: H film showing a value smaller than 10,000 sheets, 1
It has been found that fusing and image deletion may occur due to the endurance of 100,000 sheets.

[0151]

[Table 17]

[0152]

[Table 18]

Example 4 In the same manner as in Example 1, a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. 19
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light-receiving members J to L. Further, Table 19 is also provided on a 7059 glass substrate.
Under the conditions described above, J-L a-SiC: H surface layer samples were prepared, and the carbon content and dynamic hardness of the J-L surface layer were measured in the same manner as in Example 1.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members J to L were as shown in Table 20.

Next, the light receiving members J to L were mounted on a modified copy machine NP-6085 manufactured by Canon Inc., and the durability was evaluated under the same conditions as in Example 1. However, the moving speed of the light receiving member was 200 mm / sec, and the blade used had a rebound resilience of 50%. Table 20 shows the abrasion loss of the surface layer after the durability.

When the surface after durability was observed with a metallographic microscope, the tip height of each of the spherical projections was 5 μm or less. Further, as a result of observing the blade edge portion, slight damage was recognized corresponding to the portion where the spherical projections were present, but the damage was slight enough that no cleaning failure occurred.

Tables 21 and 22 show the results obtained by the above evaluation.

As a result, none of the light receiving members J to L had any streak-like image defects caused by uneven shaving even after the durability of 100,000 sheets. Did not occur at all.
Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

[0159]

[Table 19]

[0160]

[Table 20]

[0161]

[Table 21]

[0162]

[Table 22] ・ ・ ・: Good image with no image bleeding ラ イ ン: 7 lines / mm line is not visible, but 6 lines / mm line is visible and has no practical problem. Image flow occurs so that lines cannot be seen

[Comparative Example 4] In the same manner as in Example 1, a blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG. 23
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members J ′ to L ′. Further, a-SiC: H surface layer samples of J ′ to L ′ were also prepared on the 7059 substrate under the conditions shown in Table 23, and the amount of carbon in the surface layers of J ′ to L ′ and The dynamic hardness was measured.

As a result, the carbon content and the dynamic hardness of the surface layers of the light receiving members J ′ to L ′ were as shown in Table 24.

Next, the light receiving members J ′ to L ′ were mounted on a modified machine of a copying machine NP-6085 manufactured by Canon, and durability evaluation was performed under the same conditions as in Example 1. However, the moving speed of the light receiving member was 200 mm / sec, and the blade used had a rebound resilience of 55%. Table 24 shows the abrasion loss of the surface layer after the durability.

Tables 25 and 26 show the results obtained by the above evaluation.

As a result, in the a-SiC: H film showing the abrasion amount larger than 100 angstroms / 10,000 sheets, it was fused by the endurance of 100,000 sheets, and the image flow was at a level causing no practical problem. However, the mechanical strength was low, and uneven scraping and white streaks were sometimes found as image defects.

[0168]

[Table 23]

[0169]

[Table 24]

[0170]

[Table 25]

[0171]

[Table 26] ・ ・ ・: Good image with no image bleeding ラ イ ン: 7 lines / mm line is not visible, but 6 lines / mm line is visible and has no practical problem. Image flow occurs so that lines cannot be seen

[0172]

As described above in detail, the present invention relates to an electrophotographic apparatus having a construction in which a developer having an average particle size of 5 to 8 μm is scraped and cleaned with an elastic rubber blade having a rebound resilience of 10% to 50%. After the plate copying process is performed on the transfer paper, the amount of wear is 1 Å / 10,000 to 100 Å / 10,000 sheets, the carbon content is 5% to 90%, and the dynamic hardness is By using a light receiving member constituting a surface layer with a non-single crystalline silicon carbide film having a thickness in the range of 100 to 950, cleaning can be performed even when spherical protrusions having a height of 1 to 50 μm are present on the surface of the light receiving member. Since the head of the spherical projection is selectively polished by the blade, breakage of the blade can be prevented.

Further, the surface layer can be uniformly worn without providing a means for rubbing the surface layer with a cleaning roller, thereby preventing image density unevenness caused by uneven shaving and fusion of the developer. It became possible.

In addition, by uniformly abrading the surface layer in the range of 1 Å / 10,000 to 100 Å / 10,000 sheets, no means for directly heating the surface of the light receiving member under any environment is provided. In addition, it is possible to effectively prevent image defects such as image deletion and image blur.

Further, the latitude of the design of the electrophotographic apparatus, such as the types of developers that can be used and the compactness and cost reduction of the electrophotographic apparatus, can be greatly expanded.

Incidentally, it is needless to say that various combinations can be made within the scope of the gist of the present invention, and the present invention is not limited to the above embodiments.

[Brief description of the drawings]

FIGS. 1A and 1B are schematic sectional views showing an example of a light receiving member according to the present invention.

FIG. 2 is a schematic configuration diagram showing an example of a deposition apparatus used for manufacturing a light receiving member by a PCVD method applicable to the present invention.

FIG. 3 is a schematic configuration diagram illustrating an example of a deposition apparatus used for manufacturing a light receiving member by a PCVD method applicable to the present invention.

FIG. 4 is a schematic sectional view illustrating an example of an electrophotographic apparatus.

[Explanation of symbols]

Reference Signs List 101 conductive substrate 102 charge injection blocking layer 103 photoconductive layer 104 surface layer 105 charge generation layer 106 charge transport layer 2100, 3100 deposition device 2110, 3110 reaction vessel 2111, 3111 cathode electrode 2112, 3112 conductive substrate 2113, 3113 substrate heating Heater 2114, 3114 Gas inlet pipe 2115, 3115 High frequency matching box 2116, 3116 Gas pipe 2117, 3117 Leak valve 2118, 3118 Main valve 2119, 3119 Vacuum gauge 2120, 3120 High frequency power supply 2121, 3121 Insulating material 3122 Insulating shield plate 2123 3123 Receiver 2200, 3200 Gas supply device 2211-2216, 3211-216 Mass flow controller 2221-2226, 32 21-2226 Cylinders 2231-2236, 3231-6236 Valves 2241-2246, 3241-3246 Inflow valve 2251-2256, 3251-256 Outflow valve 2260, 3260 Auxiliary valve 2261-2266, 3261-3266 Pressure regulator 401 Light receiving member 402 Main charging device 403 Electrostatic latent image forming portion 404 Developing device 405 Transfer paper supply system 406 (a) Transfer charging device 406 (b) Separation charging device 407 Cleaning roller 408 Transport system 409 Static elimination light source 410 Halogen lamp 411 Document table 412 Document 413 Mirror 414 Mirror 415 Mirror 416 Mirror 417 Lens unit 418 Lens 419 Feed guide 420 Blank exposure LED 421 Cleaning blade 422 Register roller 42 3 Sheet heater 424 Fixer 425 Cleaner

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Makoto Aoki 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term (reference) 2H068 DA05 DA14 DA17 DA23 DA41 DA51 EA24 EA31 FA16 FA30 FC15

Claims (8)

[Claims] 1. An electrophotographic apparatus in which charging, exposure, development, transfer and cleaning are sequentially repeated on a light receiving member, wherein a developer having an average particle size of 5 to 8 μm is developed on the light receiving member and transferred to a transfer material. Then, the surface of the light receiving member after the developer is transferred is scraped and cleaned with an elastic rubber plate having a rebound resilience of 10% or more and 50% or less.
A photoreceptor member having a surface layer made of a non-single-crystal silicon carbonized film, which has a wear amount of 1 angstrom / 10,000 sheets or more and 100 angstrom / 10,000 sheets or less after a four-plate copying process is performed on transfer paper. An electrophotographic apparatus characterized by using: 2. An electrophotographic apparatus in which charging, exposure, development, transfer, and cleaning are sequentially repeated, in which a rubbing cleaning unit using a cleaning roller is not provided and a unit for directly heating a light receiving member is not provided. The electrophotographic apparatus according to claim 1. 3. The light-receiving member according to claim 1, wherein the light-receiving member comprises a photoconductive layer made of a non-single-crystal material mainly composed of silicon atoms and a surface layer made of a non-single-crystal material on a conductive substrate. The electrophotographic apparatus according to claim 1 or 2. 4. The dynamic hardness of the surface layer is 10
The electrophotographic apparatus according to any one of claims 1 to 3, wherein the number is 0 to 950. 5. The non-single-crystal silicon carbide film has a carbon content (C / Si + C) of 5% to 90%.
13. The electrophotographic apparatus according to claim 1. 6. The method according to claim 1, wherein the surface layer is formed by decomposing at least a silane-based gas and a hydrocarbon-based gas by a plasma CVD method using a high frequency of 1 to 450 MHz. The electrophotographic apparatus according to claim 1. 7. The light receiving member according to claim 7, wherein the light receiving member is a charge injection blocking layer,
The electrophotographic apparatus according to any one of claims 1 to 6, comprising three layers: a photoconductive layer and a surface layer. 8. The light-receiving member according to claim 1, wherein the light-receiving member comprises three layers: a charge transport layer, a charge generation layer, and a surface layer.
13. The electrophotographic apparatus according to claim 1.