JP2000162802A - Electrophotographic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an electrophotographic device capable of preventing cleaning defects and developer fusion or the uneven scraping of the surface layer and image flowing under any environment conditions. SOLUTION: This electrophotographic device has a means of rubbing the surface of a photoreceptive member 401 in an electrophotographic process to scrape and clean a developer of 5-8 μm average particle diameter with an elastic rubber blade 421 having 10-50% impact resilience. The surface layer of the photoreceptive member 401 used in the device is an amorphous fluorocarbon film, which ensures 0.1-100 Å abrasion loss after copying 10,000 sheets of A4 size transfer paper and has 10-500 kgf/mm2 dynamic hardness and 5-50 at.% fluorine atom content.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrophotographic apparatus, and more particularly, to an electrophotographic apparatus having an improved cleaning means and a light receiving member.

[0002]

2. Description of the Related Art Conventionally, many electrophotographic methods have been known as described in U.S. Pat. No. 2,297,692, Japanese Patent Publication No. 42-23910 and Japanese Patent Publication No. 43-24748. ing. Generally, using a light receiving member, an electric latent image is formed on the light receiving member by various means, and then the latent image is developed using a developer,
After transferring the developer image to a transfer material such as paper selected as necessary, the developer is fixed by heating, pressurizing, heating and pressurizing, solvent vapor or the like to obtain a copy.

In the above process, a residual developer remains on the surface of the light receiving member even after the transfer of the developer image to the transfer material. Therefore, a cleaning blade is brought into contact with the residual developer to remove the residual developer. Drained outside.

Various materials such as inorganic materials such as selenium, cadmium sulfide, zinc oxide, amorphous silicon (hereinafter referred to as a-Si), and organic materials have been proposed as materials for the light receiving member used in the electrophotographic photosensitive member. Have been. Among these, non-single-crystal deposited films containing silicon atoms typified by a-Si as main components, for example, hydrogen and / or
Amorphous films such as a-Si containing halogen (eg, fluorine, chlorine, etc.) (eg, compensating for hydrogen or dangling bonds) have been proposed as high performance, highly durable, pollution-free photoreceptors, some of which have been proposed. Has been put to practical use. JP-A-54-86341, USP 4.265.99
No. 1 discloses a technique of an electrophotographic photosensitive member in which a photoconductive layer is mainly formed of a-Si. Japanese Patent Laid-Open No. 60-
No. 12554 discloses a surface layer containing carbon and halogen atoms on the surface of a photoconductive layer made of amorphous silicon containing silicon atoms.
No. 62 discloses a photoreceptor in which a surface protective lubricating layer is provided on a-Si: H or a-CH: photosensitive layer.
Both are techniques for improving water repellency and abrasion resistance, and there is no description about the relationship between the electrophotographic process and the shaving property of the surface layer.

An a-Si photosensitive member represented by a-Si exhibits excellent sensitivity to long-wavelength light such as a semiconductor laser (700 nm to 800 nm), and exhibits little deterioration due to repeated use. Because it has a point,
For example, it is widely used as a photoconductor for electrophotography such as a high-speed copying machine and an LBP (laser beam printer).

As a method of forming a silicon-based non-single-crystal deposited film, there are a sputtering method, a method of decomposing a source gas by heat (thermal CVD method), a method of decomposing a source gas by light (photo CVD method), and a method of decomposing a source gas by plasma. Many methods are known, such as a method of decomposing gas (plasma CVD method). Above all, the plasma CVD method, that is, the raw material gas is decomposed by direct current or high frequency (RF, VHF) or glow discharge generated by using microwaves, and is made of glass, quartz, heat-resistant synthetic resin film, stainless steel, aluminum, etc. The method of forming a deposited film on a desired substrate is not limited to the method of forming an amorphous silicon deposited film for electrophotography and the like, and the method of forming a deposited film for other uses is currently in very practical use. Various devices have been proposed for this purpose.

As the light receiving member is required to have improved electrophotographic characteristics corresponding to high speed and to require finer image quality, recently, not only the characteristics of the photosensitive member but also the small particle size of the developer have been improved. The use of those having a weight average particle size of 5 to 8 μm as measured by a Coulter counter is often used.

[0008]

As a means for charging and discharging various conventional light receiving members including an a-Si based light receiving member, a wire electrode (such as a gold-plated tungsten wire of 50 to 100 μmφ, etc.) is used in most cases. Corona chargers (corotrons, scorotrons) mainly including a metal wire and a shield plate are used. That is, a high voltage (about 4 to 8 kv) is applied to the wire electrode of this corona charger.
Is applied to the photoreceptor member to cause charging and discharging of the photoreceptor member, and the corona charger is excellent in uniform charging and discharging.

However, a considerable amount of ozone (O ₃ ) is generated by corona discharge. This ozone oxidizes nitrogen in the air to produce nitrogen oxides (NOx). further,
This nitrogen oxide reacts with moisture in the air to produce nitric acid and the like.

[0010] Corona discharge products such as nitrogen oxides and nitric acid adhere to and accumulate on the surface of the light receiving member and peripheral equipment.
Since the corona discharge product has a strong hygroscopic property, when it is deposited on the surface of the light receiving member, the resistance of the corona discharge product due to moisture absorption is reduced, and the charge holding ability of the light receiving member is substantially or partially improved. As a result, an image defect called image deletion (a state in which the charge on the surface of the photoreceptor leaks in the surface direction and the electrostatic latent image pattern is broken or not formed) may occur.

Further, the corona discharge products adhering to the inner surface of the shield plate of the corona charger are volatilized and released not only during the operation of the electrophotographic apparatus but also during the stoppage of the apparatus at night or the like. By adhering to the surface of the corresponding light receiving member and absorbing moisture, the surface of the light receiving member is reduced in resistance.

As a result, in the first or several subsequent output images output first when the electrophotographic apparatus is restarted, image deletion is likely to occur in the area corresponding to the opening of the charger. Further, since the surface hardness of the a-Si light receiving member is much higher than that of other light receiving members, the corona discharge product adhered to the surface of the light receiving member is not removed in the ordinary cleaning step and remains on the surface of the light receiving member. It tends to be easy.

Therefore, conventionally, a heater for directly heating the light receiving member is provided, or warm air is blown to the light receiving member by a hot air blowing device to heat the light receiving member surface (30 to 5).
0 ° C.) to maintain a dry state, thereby preventing the corona discharge products adhering to the surface of the light receiving member from absorbing moisture and substantially reducing the resistance of the surface of the light receiving member, and causing an image deletion phenomenon. Measures have been taken to prevent In particular, a-Si
In the case of a system light receiving member, the heating and drying means is incorporated in an electrophotographic apparatus as indispensable.

Conventionally, such an electrophotographic apparatus is provided with a rotating cylindrical developer carrier having a movable magnet and the like built therein, and a developer, that is, a toner or a mixture of a toner and a carrier is thinned on the carrier. After forming the layer,
A system in which these are electrostatically transferred onto a light receiving member on which an electrostatic latent image is formed is widely used. JP-A-54-43
037, JP-A-58-144865, JP-A-60-74
51 and the like disclose these methods, and as a developer, a developer containing magnetic particles, that is, a mixture of a toner and a carrier, or a developer containing magnetite in a toner and containing no carrier is disclosed.

A drawback of such a developing method is that the portion of the rotating cylindrical developer carrier facing the light receiving member expands due to the heat of the light receiving member while the electrophotographic apparatus is at rest, and the rotating cylindrical developer carrier in the developer developing portion is not heated. The distance between the developer carrier and the light receiving member is reduced.

As a result, the electric field becomes stronger and the developer is more easily transferred than usual. In addition, the area on the opposite side of this area becomes longer due to the influence of the influence, so that the electric field becomes smaller and the transfer of the developer becomes difficult. As a result, a problem such as partial image density unevenness may occur in the rotation cycle of the rotating cylindrical developer carrier, so that there is an electrophotographic apparatus in which image flow does not occur without heating the light receiving member. Was sought.

As a method of positively removing ozone products by providing means for rubbing the surface of the light receiving member, a roller is charged or transferred by applying a voltage to the conductive rubber roller and contacting the surface of the light receiving member. A method of reducing the amount of ozone and performing rubbing, or by providing an elastic rubber roller or a magnet roller in a cleaner in a cleaning step to collect a residual developer (hereinafter, referred to as a residual toner) and a surface of the light receiving member. Is used.

However, charging, exposure, development, transfer, separation,
In an electrophotographic apparatus in which each step of cleaning is sequentially repeated, the surface properties of the light receiving member surface may be changed by repeated rubbing, and the frictional resistance may gradually increase. When the frictional resistance on the surface of the light receiving member is increased, the deterioration of the cleaning blade is promoted, and the cleaning property of the residual toner is reduced, resulting in poor cleaning.

When the frictional resistance of the surface of the light receiving member increases, the deterioration of the elastic rubber roller used for roller charging, roller transfer, cleaning roller, and the like may be accelerated, resulting in poor charging, poor transfer and clearing. Failure may occur.

Further, when the elastic rubber roller that rubs the surface of the light receiving member deteriorates, a difference occurs in the rubbing force, which may cause uneven shaving on the surface of the light receiving member. When such shaving unevenness occurs, sensitivity unevenness occurs as an electrophotographic characteristic, and density unevenness occurs in an image.

In particular, this phenomenon becomes more remarkable as the particle size of the developer becomes smaller. However, in recent years, high image quality of image characteristics has been demanded, and under such circumstances, the particle size of the developer has been reduced.

If the frictional resistance of the surface of the light receiving member is high, the temperature rises due to frictional heat between the light receiving member and the cleaning blade, and the residual developer used for heat fixing causes the surface of the light receiving member to be heated by the frictional heat. May be caused to adhere firmly to the surface. In particular, this fusion phenomenon is remarkable in proportion to the reduction in the particle size of the developer, and is a minute substance that does not affect the image in the initial stage, but the fine fusion becomes a nucleus by repeated use. The image gradually grows and becomes an image defect in the form of a black stripe on the image.

A magnet roller or a cleaning roller made of urethane rubber or silicone rubber is provided as a countermeasure against such uneven shaving and fusion, so that the toner reaching the cleaning blade is uniformly dispersed, and the toner retention unevenness on the blade surface. In some cases, the magnet roller is slightly inferior to the elastic rubber roller in rubbing force. Therefore, depending on conditions such as the surface properties of the light receiving member, the electrophotographic process, or the use environment, the magnet roller may be partially provided. In some cases, the effect of rubbing may not be sufficiently exerted because image flow and fusion cannot be removed.

In recent years, miniaturization, low cost, and maintenance-free are important issues with the personal use of copiers and printers. Means for directly or indirectly heating the light receiving member from the viewpoint of energy saving and ecology. It is desirable that the design is not provided.

Under these circumstances, no image deletion occurs without the provision of a heating means. The light receiving member does not suffer from uneven shaving under any electrophotographic process conditions.
There is a demand for an electrophotographic apparatus capable of stably supplying high quality images without density unevenness and fusion for a long period of time.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to sequentially repeat the respective steps of charging, exposure, development, transfer, separation, and cleaning by a rubbing roller. In addition to providing a light receiving member that does not increase frictional resistance even after repeated use, suppresses deterioration of a friction roller, prevents poor cleaning, and prevents fusing, in an electrophotographic apparatus that rubs the surface of a light receiving member. By providing an electrophotographic apparatus capable of easily removing the corona discharge product even when the corona discharge product is difficult to adhere to, and even when the corona discharge product is attached, the photoreceptor member can be easily removed under any environment. An object of the present invention is to provide an electrophotographic apparatus capable of providing a high-quality image without image deletion for a long period of time without providing a heating unit.

[0027]

Means for Solving the Problems The present inventors have proposed an electrophotographic method.
Focus on the relationship between the process and the amount of wear on the surface layer of the light receiving member
And the water repellency of the light receiving member surface in the electrophotographic process
And to improve abrasion. As a result,
Ming electrophotography process and non-monocrystalline fluorinated carbon of the present invention
Combination of light receiving members using a base film as a surface layer of light receiving members
By adding fluorine atoms to the surface layer,
Improves the water repellency of the layer and prevents adhesion of corona discharge products
And the surface layer has a dynamic hardness of 10 to 500 k.
gf / mm ^TwoAnd a photoreceptor in one of the electrophotographic processes
A rubbing means for rubbing the surface of the material;
The amount of wear of the surface layer when transferring 10,000 sheets under certain conditions
By setting the thickness between 0.1 ° and 100 °, the fluorine on the outermost surface
Surface containing fluorine atoms at any time without leaving only element
And the surface layer contains fluorine.
Surface to reduce frictional resistance and improve slipperiness
When using an elastic rubber roller for the rubbing means
Even prevent the deterioration of this elastic rubber roller,
Uneven shaving of the surface layer, poor cleaning, and fusion
I do not live. In addition, under any environmental conditions,
Image flow without providing a heating means for the light receiving member such as
Found that this does not occur.

That is, the present invention is as follows.

1. Rotating the light receiving member, charging, exposing,
In an electrophotographic apparatus in which development, transfer, and cleaning steps are sequentially repeated, a rubbing means for rubbing the surface of the light receiving member is provided in any of the preceding steps, and the light receiving member has an average particle diameter of 5 to 5.
An electrophotographic apparatus in which an 8 μm developer is developed on the light receiving member, transferred to a transfer material, and the surface of the light receiving member after the transfer of the developer is scraped and cleaned with an elastic rubber blade having a rebound resilience of 10% to 50%. After the A4 size copying process was performed on 10,000 sheets of transfer paper, the amount of wear was 0.1 mm or more and 100 mm.
An electrophotographic apparatus characterized in that the surface layer is composed of the following non-single crystalline fluorinated carbon film.

2. 2. The electrophotographic apparatus according to claim 1, wherein the rubbing means is a cleaning roller including a rubber roller or a magnet roller provided in a cleaning step.

3. 3. The electrophotographic apparatus according to the above item 1 or 2, wherein the rubber roller provided in the cleaning step as the rubbing means is foamed.

4. 4. The electrophotographic apparatus according to any one of the above items 3 to 3, wherein the rubbing means is roller charging and / or roller transfer provided in a charging step.

5. The light-receiving member comprises a photoconductive layer composed of a non-single-crystal material having a silicon atom as a base and a surface layer composed of a non-single-crystal material on a conductive substrate. An electrophotographic apparatus according to the above.

6. The dynamic hardness of the surface layer is 10
The 1, characterized in that the ~500kgf / mm ²
6. The electrophotographic apparatus according to any one of items 1 to 5.

7. 7. The electrophotographic apparatus according to any one of the above 1 to 6, wherein the non-single crystalline fluorinated carbon film has a fluorine content ((F / (C + F)) of 5 to 50 atomic%.

8. 8. The method according to any one of the items 1 to 7, wherein the surface layer is formed by decomposing at least a hydrocarbon-based gas and / or a fluorine-based gas by a plasma CVD method using a high frequency of 1 to 450 MHz. Electrophotographic equipment.

9. The light receiving member is a charge injection blocking layer,
9. The electrophotographic apparatus according to any one of the above items 1 to 8, wherein the electrophotographic apparatus comprises three layers, a photoconductive layer and a surface layer.

10. The electrophotographic apparatus according to any one of the above items 1 to 9, wherein the light receiving member is composed of three layers: a charge transport layer, a charge generation layer, and a surface layer.

[0039]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The cleaning blade used in the electrophotographic apparatus of the present invention may be made of urethane rubber, silicon rubber, butadiene rubber, isoprene rubber, or the like.
There are nitrile rubber and natural rubber. In particular, urethane rubber and silicone rubber, which are generally widely used in electrophotographic apparatuses, are preferable from the viewpoint of hardness and ease of processing.

When the rebound resilience of a cleaning blade used in an electrophotographic apparatus is lower than 10%, the characteristic of the blade changes from a rubbery state to a glassy state, so that the material becomes brittle and the life of the blade is shortened. If the rebound resilience of the blade is more than 50%, the blade may be chattered and the cleaning property may be reduced, or the blade may be turned up and cause damage to the surface of the light receiving member. The elasticity is preferably from 10% to 50%.

On the other hand, in order to improve the cleaning property, a blade with a groove as described in JP-A-54-143149 and a blade with a projection as described in JP-A-57-124777 have been proposed. However, an electrophotographic apparatus using a developer having a small particle diameter and not providing a heating means for the light receiving member and an abrasion amount of the surface of the light receiving member provided with the amorphous fluorinated carbon film on the surface layer are compared. No mention is made of the relationship.

When the rubbing means is provided on the cleaner, a magnet roller or an elastic rubber roller is used. Silicon rubber,
Urethane rubber, butadiene rubber, isoprene rubber, nitrile rubber, natural rubber, and the like are generally used, and the roller may be a foamed sponge roller having a large gap.

When the rubbing means is in the form of a charging roller which also serves as a main charger and a transfer charger, the material of the roller is generally silicon rubber, urethane rubber, butadiene rubber, isoprene rubber, nitrile rubber, natural rubber, or the like. Used for

In the present invention, a
-C: The dynamic hardness of the F surface layer is 10 to 500 kg.
f / mm ² and dynamic hardness is 10 kgf / m
When the value is smaller than m ² , the mechanical hardness is impaired, and when the value of dynamic hardness is larger than 500 kgf / mm _{2, the} amount of wear of the surface layer is reduced, so that the surface layer is hardly abraded and the corona discharge product is removed. May be reduced and image deletion may occur. Further, the amount of fluorine contained in the surface layer film is 5/50 atomic% in F / (C10F), preferably 10% to 30%. If the fluorine content is less than 5%, water repellency and abrasion may not be maintained. Also 50%
If it exceeds, the adhesion and densification of the film may be impaired, and the mechanical strength may be impaired.

In the above range of the fluorine atom content and the dynamic hardness, the surface layer has an abrasion loss after the A4 plate copying process is performed on 10,000 sheets of transfer paper (hereinafter referred to as an abrasion loss of only 10,000 sheets). ) Is within the range of 0.1 ° to 100 ° to reduce blade chatter due to friction.
Since partial stress on the blade surface and deterioration of the rubbing roller are suppressed, partial stagnation of the developer is reduced.
As a result, the surface layer is uniformly worn without uneven shaving,
It has been found that it is excellent in cleaning properties and that it is possible to prevent fusion by the effect of scraping. Further, even when a magnet roller having a smaller sliding force than the elastic rubber roller is used as the sliding means, the friction of the surface layer of the light receiving member can be made uniform, and the surface of the light receiving member is adhered. It has been found that since the corona discharge product can be efficiently scraped off evenly, no image deletion occurs under any environmental conditions without providing a means for heating the light receiving member.

When the wear amount of the surface layer of the light receiving member used in the present invention exceeds 10,000 °, the mechanical strength may be impaired. When the wear amount is less than 0.1 °, the surface layer may be worn. In some cases, the effect of scraping off corona discharge products is reduced, and image deletion may occur.

The optimum thickness of the surface layer used in the light receiving member of the present invention can be determined from the relationship between the amount of wear of the surface layer and the life of the electrophotographic apparatus.
0 μm, preferably in the range of 0.1 μm to 1 μm. If the thickness of the surface layer is less than 0.01 μm, the mechanical strength is impaired, and if it exceeds 10 μm, the residual potential may be increased.

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIGS. 1A and 1B are examples of schematic cross-sectional views of a light receiving member according to the present invention. FIG. 1A shows a single layer in which a photoconductive layer is a single layer having no functional separation. The type light receiving member (B) is a function-separated type light receiving member in which a photoconductive layer is separated into a charge generation layer and a charge transport layer.

The a-Si light receiving member shown in FIG. 1A is made of a conductive substrate 101 such as aluminum and a conductive substrate 10.
The charge injection blocking layer 102, the photoconductive layer 103, and the surface layer 104 are sequentially laminated on the surface of the substrate 1. Here, the charge injection blocking layer 102 is formed from the conductive substrate 101 to the photoconductive layer 103.
This is to prevent the injection of electric charge into the device, and is provided as needed. The photoconductive layer 103 is made of an amorphous material containing at least silicon atoms, and has photoconductivity. The surface layer 104 is made of an amorphous material containing at least carbon atoms and fluorine atoms, and has a capability of maintaining a visible image in an electrophotographic apparatus.

In the following, the charge injection blocking layer 10 is used except when the effect differs depending on the presence or absence of the charge injection blocking layer 102.
2 will be described as being present.

The a-Si light receiving member shown in FIG. 1B has a charge transport layer 106 in which the photoconductive layer 103 is made of an amorphous material containing at least silicon atoms and carbon atoms.
This is a function-separated type light receiving member having a configuration in which a charge generation layer 105 made of a non-quality material containing at least silicon atoms is sequentially stacked. When the light receiving member is irradiated with light, carriers mainly generated in the charge generation layer 105 pass through the charge transport layer 106 and reach the conductive substrate 101. As a film forming gas for the surface layer 104, CF ₄ , C ₂ F ₆ , CH
Fluorine gas such as F ₃ , CH ₂ F ₂ , CH ₃ F, H ₂ and C
Hydrocarbon gases such as H ₄ , C ₂ H ₆ , C ₃ H ₈ and C ₄ H ₁₀ can be used effectively. Further, these source gases for supplying fluorine may be diluted with an inert gas such as He, Ar, Ne or the like, if necessary.

FIG. 2 shows a plasma CVD method [PCVD method].
FIG. 1 is a view schematically showing an example of a general deposition device for a light receiving member according to the present invention.

This apparatus is roughly classified into a deposition apparatus 210
0, a source gas supply device 2200, and an exhaust device (not shown) for reducing the pressure inside the reaction vessel 2110. A cylindrical deposition substrate 2112 connected to the ground, a heater 2113 for heating the cylindrical deposition substrate, a source gas introduction pipe 2 are provided in a reaction vessel 2110 in the deposition apparatus 2100.
114, and a high-frequency matching box 2
A high frequency power supply 2120 is connected via 115.
The raw material gas supply device 2200 includes SiH ₄ , CH ₄ , NO,
Raw material gas cylinders 2221 to 2226 such as B ₂ H ₆ and CF ₄
And valves 2231 to 2236, 2241 to 2246, and 2
251-2256 and mass flow controller 221
Each of the constituent gas cylinders is connected to a gas introduction pipe 2 in the reaction vessel 2110 via a valve 2260.
114 is connected.

The cylindrical film-forming substrate 2112 is connected to the ground by being placed on the conductive support 2123.

An example of a procedure of a method for forming a light receiving member using the apparatus shown in FIG. 2 will be described below.

In the reaction vessel 2110, the cylindrical film-forming substrate 2
112 is installed, and an exhaust device (not shown) (not shown)
Evacuates the reaction vessel 2110. Subsequently, the temperature of the cylindrical film-forming substrate 2112 is controlled to 20 ° C. to 5 ° C. by the heater 2113 for heating the cylindrical film-forming substrate and a control device (not shown).
Control at 00 ° C. ← desired temperature. Next, in order to allow the source gas for forming the light receiving member to flow into the reaction vessel 2110, the valves 2231 to 2236 of the gas cylinder and the leak valve 2117 of the reaction vessel are closed, and the inflow valves 2241 to 2246 and the outflow valve 2251 to 22
56, After confirming that the auxiliary valve 2260 is open, open the main valve 2118 and exhaust the inside of the reaction vessel 2110 and the gas supply pipe 2116.

Thereafter, the reading of the vacuum gauge 2119 becomes 0.7 P
a, the auxiliary valve 2260 and the outflow valve 22
Close 51-2256. Then the gas cylinder 2221
From 2226, each gas is introduced by opening valves 2231 to 2236, and each gas pressure is adjusted to 1.96 × 10 ⁵ Pa by pressure regulators 2261 to 2266. Next, inflow valve 2
241-2246 is gradually opened to introduce each gas into the mass flow controllers 2211-2216. After the preparation for film formation is completed by the above procedure, first, a photoconductive layer is formed on the cylindrical film-formed substrate 2112.

That is, when the temperature of the cylindrical film-forming substrate 2112 reaches a desired temperature, each of the outflow valves 2251-2
The necessary one of the 256 and the auxiliary valve 2260 are gradually opened, and a desired raw material gas is supplied from each of the gas cylinders 2221 to 2226 through the gas introduction pipe 2114 to the reaction vessel 211.
Introduce into 0. Next, each mass flow controller 2
According to 211 to 2216, each raw material gas is adjusted so as to have a desired flow rate. At this time, the inside of the reaction vessel 2110 is 1
The vacuum gauge 211 is set to a desired pressure of 33 Pa or less.
9 while adjusting the opening of the main valve 2118.
When the internal pressure is stabilized, the high frequency power supply 2120 is set to a desired power, for example, a high frequency power of a frequency of 1 MHz to 450 MHz, and supplied to the cathode electrode 2111 through the high frequency matching box 2115 to generate a high frequency glow discharge. This discharge energy causes the reaction vessel 2
Each source gas introduced into 110 is decomposed, and a photoconductive layer mainly composed of desired silicon atoms is deposited on cylindrical deposition substrate 2112. After the desired film thickness is formed, the supply of the high-frequency power is stopped, and each of the outflow valves 2251 to
By closing 2256, the flow of each source gas into the reaction vessel 2110 is stopped, and the formation of the photoconductive layer is completed.

Known compositions and film thicknesses of the photoconductive layer can be applied. In the case of forming a surface layer on the photoconductive layer, the above operation may be basically repeated.

FIG. 3 shows a plasma CV using a high frequency power supply.
It is the figure which showed typically another example of the deposition apparatus of the light receiving member by the D method. This device is roughly classified into a deposition device 31
00, source gas supply device 3200, reaction vessel 3110
It is composed of an exhaust device (not shown) for reducing the pressure inside. A cylindrical deposition substrate 3112 connected to the ground, a heater 3113 for heating the cylindrical deposition substrate, and a source gas introduction pipe 3114 are installed in a reaction vessel 3110 in the deposition apparatus 3100. The high frequency power supply 3120 is connected via the.

The raw material gas supply device 3200 includes SiH ₄ ,
_{H 2, CH 4, NO,} B 2 H 6, a raw material gas cylinder such as CF ₄ 3221 to 3226 and the valve 3231～3236,32
41-3246, 3251-256, and mass flow controllers 3211-216. The constituent gas pumps are connected via a valve 3260 to the reaction vessel 311.
0 is connected to the gas introduction pipe 3114.

The cylindrical substrate 3112 is connected to the ground by being placed on the conductive support 3123. The cathode electrode 3111 is made of a conductive material, and is insulated by the insulating material 3121.

The conductive material used for the conductive pedestal 3123 includes copper, aluminum, gold, silver, silver, lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and materials of these materials. More than two types of composite materials can be used.

As insulating materials for insulating the cathode electrode 3111, ceramics, Teflon (registered trademark),
Mica, glass, quartz, silicone rubber, polyethylene, polypropylene and the like can be used.

The matching box used is 3115
Any structure can be suitably used as long as it can match the load with the high frequency power supply 3120. As a method for obtaining the matching, automatic adjustment is preferable, but even if it is adjusted manually, the effect of the present invention is not affected at all.

Cathode electrode 31 to which high-frequency power is applied
Materials of 11 include copper, aluminum, gold, silver, platinum,
Lead, nickel, cobalt, iron, chromium, molybdenum, titanium, stainless steel, and composite materials of two or more of these materials can be used. The shape is preferably a cylindrical shape, but an elliptical shape or a polygonal shape may be used if necessary.

The cathode electrode 3111 may be provided with a cooling means if necessary. As a specific cooling medium, water, air, liquid nitrogen Peltier element or the like is used as needed.

The cylindrical substrate 3112 used in the present invention.
May have any material or shape according to the purpose of use. For example, the shape is preferably cylindrical when an electrophotographic photoreceptor is manufactured, but may be flat or another shape if necessary. The material is copper, aluminum, gold, silver, silver, lead, nickel, cobalt,
Iron, chromium, molybdenum, titanium, stainless steel and composite materials of two or more of these materials, as well as polyester, polyethylene, polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, glass, quartz, ceramics, An insulating material such as paper coated with conductivity can be used.

An example of a procedure of a method for forming a light receiving member using the apparatus shown in FIG. 3 will be described below.

In the reaction vessel 3110, the cylindrical film-forming substrate 3
112 is installed, and an exhaust device (not shown) (not shown)
To exhaust the reaction vessel 3110. Subsequently, the temperature of the cylindrical film-forming substrate 3112 is raised to 20 ° C. to 50 ° C. by the heater 3113 for heating the cylindrical film-forming substrate and a control device (not shown).
Control to a predetermined temperature of 0 ° C.

The raw material gas for forming the light receiving member is supplied to the reaction vessel 3
To allow the gas to flow into 110, the valve 3231 of the gas cylinder is used.
3236, that the leak valve 2117 of the reaction vessel is closed, and that the inflow valves 3241 to 246
After confirming that the outflow valves 3251 to 256 and the auxiliary valve 3260 are opened, the main valve 3118 is opened to exhaust the inside of the reaction vessel 3110 and the gas supply pipe 3116.

Next, when the reading of the vacuum gauge 3119 becomes 0.7 Pa, the auxiliary valve 3260 and the outflow valve 3251
Close ~ 2256. Then gas cylinders 3221-32
26, each gas is introduced by opening valves 3231 to 236, and each gas pressure is adjusted to 2 by pressure regulators 3261 to 3266.
Adjust to kg / cm ² . Next, the inflow valves 3241 to 3241
246 is gradually opened to introduce each gas into the mass flow controllers 3211 to 3216. After the preparation for film formation is completed by the above procedure, a photoconductive layer is formed on the cylindrical film-formed substrate 3112.

When the temperature of the cylindrical substrate 3112 reaches a predetermined temperature, a necessary one of the outflow valves 3251 to 256 and the auxiliary valve 3260 are gradually opened.
A predetermined source gas is introduced from each of the gas cylinders 3221 to 226 into the reaction vessel 3110 via the gas introduction pipe 3114. Next, each of the mass flow controllers 3211 to 3211
In step 216, each source gas is adjusted to have a predetermined flow rate. At this time, the opening of the main valve 3118 is adjusted while watching the vacuum gauge 3119 so that the inside of the reaction vessel 3110 has a predetermined pressure of 133 Pa or less. When the internal pressure is stabilized, the high frequency power supply 3120 is set to a desired power, for example, a high frequency power of a frequency of 1 MHz to 450 MHz, and supplied to the cathode electrode 3111 through the high frequency matching box 3115 to generate a high frequency glow discharge. The respective source gases introduced into the reaction vessel 3110 are decomposed by the discharge energy, and the cylindrical substrate 3
A deposited film mainly containing predetermined silicon atoms is formed on 112. After the formation of the desired film thickness, the supply of the high-frequency power is stopped, the outflow valves 3251 to 256 are closed to stop the flow of the source gases into the reaction vessel 3110, and the formation of the deposited film is completed.

Basically, the above operation may be repeated including the case where the surface layer of the present invention is formed. Specifically, a necessary one of the outflow valves 3251 to 256 and the auxiliary valve 3260 are gradually opened, and the respective gas cylinders 3221 to 322 are opened.
From 26, the raw material gas necessary for the surface layer is supplied to the gas introduction pipe 2114.
Through the reaction vessel 3110. Next, each of the mass flow controllers 3211 to 216 adjusts each of the raw material gases to a predetermined flow rate. that time,
The main valve 31 is monitored while watching the vacuum gauge 3119 so that the inside of the reaction vessel 3110 has a predetermined pressure of 133 Pa or less.
Adjust 18 openings. When the internal pressure is stabilized, the high frequency power supply 3120 is switched to a desired power, for example, a frequency of 1 MHz to 4 MHz.
High-frequency power of 50 MHz is set and supplied to the cathode electrode 3111 through the high-frequency matching box 3115 to generate high-frequency glow discharge. Each source gas introduced into the reaction vessel 3110 is decomposed by the discharge energy, and a surface layer is formed. After the desired film thickness is formed, the supply of high-frequency power is stopped, and each outflow valve 325 is turned off.
By closing 1-356, the flow of each source gas into the reaction vessel 3110 is stopped, and the formation of the surface layer is completed.

During the film formation, the cylindrical substrate 3112 may be rotated at a predetermined speed by a driving device (not shown).

FIG. 4 shows an electrophotographic apparatus. FIG. 2 is a schematic view illustrating an example of an electrophotographic apparatus for explaining an example of an image forming process, and includes a light receiving member 40 formed on a conductive substrate 423;
1 rotates in the arrow X direction as required. In the vicinity of the light receiving member 401, a main charger 402, an electrostatic latent image forming portion 403, a developing device 404, a transfer material supply system 405, a transfer charger 406, a separation charger 407, a cleaner 425, a transport system 408, and a charge removing device A light source 409 and the like are provided as needed.

Next, an example of the image forming process will be specifically described. The light receiving member 401 is uniformly charged by the main charger 402 to which a high voltage of +6 to 8 kv is applied. The light emitted from the lamp 410 is reflected on the document 412 placed on the platen glass 411 at the portion of the electrostatic latent image,
13, 414, 415, and the lens unit 417
An image is formed by a lens 418, guided through a mirror 416, projected as light carrying information, and an electrostatic latent image is formed on the light receiving member 401. A developer having a negative polarity is supplied to the latent image from the developing device 404 to form a developer image. This exposure does not depend on the reflection from the original 412,
Light carrying information may be scanned and exposed using an LED array, a laser beam, a liquid shutter, or the like.

On the other hand, the transfer material P such as paper is transferred to the transfer material supply system 40.
5, the leading end supply timing is adjusted by the registration roller 422, and the leading end is supplied toward the light receiving member 401. The transfer material P is applied with a positive electric field having a polarity opposite to that of the developer from the back surface in the gap between the transfer charger 406 to which the high voltage of +7 to 8 kv is applied and the light receiving member 401, whereby the negative polarity of the surface of the light receiving member is applied. The developer image is transferred to the transfer material P. Then, 12-14 kVp-p, 300-60
The light is separated from the light receiving member 401 by a separation charger 407 to which a high AC voltage of 0 Hz is applied. Then, transfer material P
Reaches the fixing device 424 through the transfer / conveyance system 408, where the developer image is fixed and carried out of the device.

The developer remaining on the light receiving member 401 is recovered by a magnet roller of the cleaner 425 or a cleaning roller 426 made of an elastic material such as silicone rubber or urethane rubber, and a cleaning blade 421 made of an elastic material such as silicone rubber or urethane rubber. The remaining electrostatic latent image is erased by the charge eliminating light source 409.

Reference numeral 420 denotes a blank exposing LED, which is a light receiving member as necessary so that unnecessary developer does not adhere to a non-image area such as a portion exceeding the width of the transfer material P and a blank portion of the light receiving member 401. It is provided for exposing 401.

Hereinafter, the present invention will be described specifically with reference to Examples, but the present invention is not limited thereto.

[0083]

Example 1 A lower blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG. 2 under the conditions shown in Table 1 and then under the conditions shown in Table 2 (F). A light receiving member was manufactured by depositing a 0.5 μm surface layer.

[0084]

Table 1 Manufacturing conditions of light receiving member Lower blocking layer: SiH ₄ 300 scc H ₂ 500 scc NO 8 scc B ₂ H ₆ 2000 ppm Power 100 w (13.56 MHz) Internal pressure 53.2 Pa Film thickness 1 μm Photoconductive layer ······· SiH ₄ 500scc H ₂ 500scc power 400 w (13.56 MHz) pressure 66.5Pa thickness 20μm

[0085]

[Table 2] Further, as a sample for measuring the fluorine content of the surface layer, a 0.5 μm surface layer was deposited on a 7059 glass substrate under the conditions shown in Table 2 (F) to prepare an aC: F surface layer sample.

The surface layer sample was measured for the fluorine content F / (C × F) by ESCA analysis. As a result, the fluorine content was 50 atomic%. Further, the dynamic hardness was measured with a dynamic ultra-fine hardness tester (DUH-201) manufactured by Shimadzu Corporation. However, the indenter used for the dynamic hardness measurement was a triangular cone indenter with a 115 ° edge-to-edge angle (radius of curvature of the tip is 0.1 μm or less), and the dynamic hardness when the indenter was pushed until the load reached 0.1 gf was obtained. , 10kg
A value of f / mm ² was obtained.

Next, the light receiving member was changed to a Canon copier N
The photoreceptor was mounted on a remodeled machine of P-6085, and the moving speed of the light receiving member was 400 mm / sec. The cleaning roller 426 shown in FIG. 4 uses a magnet roller, and the elastic rubber blade 421 uses a urethane rubber blade having a rebound resilience of 10%. As for the developer to be used, the smaller the particle size of the developer, the more easily the developer is worn.
In order to further promote abrasion, an external additive used for the developer was added by 10% more.

The method for evaluating the uneven wear will be described with reference to FIG. The charging current of the main charger 402 is adjusted so that the dark portion potential of the light receiving member 401 at the position of the developing device 404 becomes 400 V, and the original 412 provided with the solid black vertical line and the solid white line is placed on the original platen 411. ,
By providing a portion where the developer always intervenes and a portion where the developer does not intervene in the generatrix direction on the surface of the light receiving member, a portion that is rubbed with the developer and a portion that is not rubbed are provided. When the thickness of the surface layer of the light receiving member in the solid white portion has been worn down to 50% of the initial thickness, the difference from the surface layer thickness in the solid black portion is measured to determine the unevenness in wear.

The amount of abrasion of the surface layer after durability was measured by a reflection spectroscopic interferometer according to the above evaluation method. As a result, the difference in film thickness between the solid white portion and the solid black portion was 2%. .

Comparative Example 1 The cleaning roller 425 shown in FIG.
In the same manner as in Example 1 except that only the blade 421 was not provided, the preparation of the photoreceptor agent and the evaluation of uneven wear were performed.
A value with a film thickness difference of 10% was obtained.

From the results of Example 1 and Comparative Example 1 described above,
It has been found that in the case where the rubbing means is provided in the electrophotographic process, it is possible to suppress the occurrence of abrasion unevenness and to achieve uniform wear, as compared with the configuration in which the rubbing means is not provided in the electrophotographic process.

Example 2 A lower blocking layer and a photoconductive layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 1 using the plasma CVD apparatus shown in FIG. .5 μm deposited and AC
Was manufactured.

[0093]

[Table 3] Further, as a sample for measuring the fluorine content of the surface layer, a surface layer of 0.5 μm was deposited on a 7059 glass substrate under the conditions shown in Table 3 to prepare aC: F surface layer samples A to C.

The fluorine content and the dynamic hardness of the surface layers laminated on the light receiving members A to C were measured in the same manner as in Example 1, and the values shown in Table 4 were obtained.

[0095]

[Table 4] Next, the light receiving members A to C are connected to a Canon copier NP-6.
No. 085 was mounted on the remodeled machine, and the moving speed of the light receiving member 401 was 200 mm / sec. The cleaning roller 426 used a magnet roller, and the elastic rubber blade 421 used a urethane rubber blade having a rebound resilience of 10%. The developer used had a particle size of 6.5 μm because the smaller the particle size of the developer, the easier the fusion was to occur. Further, by controlling the surface temperature of the light receiving member to 60 ° C., conditions were set such that fusion was easily generated.

Table 4 shows the amount of wear of the surface layer after durability. The wear amount of the surface layer is obtained by measuring the thickness of the surface layer before and after the endurance using a reflection spectroscopic interferometer, and converting the change in the thickness of the surface layer into a wear amount per 10,000 sheets from this value.

Further, 100,000 sheets of the photoreceptors A to C were durable in an environment of 35 ° C. and a relative humidity of 90% without providing a heating means, and the image deletion was evaluated. However, a magnet roller was used as the cleaning roller 426, a urethane rubber blade having a rebound resilience of 10% was used as the elastic rubber blade 421, and the blade was set so as to perform scrape cleaning at a pressing pressure of 50% of normal pressure.

Table 5 shows the evaluation results of the image deletion.

[0099]

[Table 5] Next, a method for evaluating unevenness scraping, a method for evaluating fusion, and a method for evaluating defective cleaning will be described with reference to FIG. (Method of Evaluating Uneven Shaving) The amount of charging current of the main charger 402 is adjusted so that the potential of the dark portion at the position of the developing device 404 becomes 400 V, and the document 412 provided with a solid black vertical line is placed on the document table 411. After providing a portion that is always rubbed with the developer and a portion that is not rubbed in the generatrix direction on the surface of the receiving member to perform durability, the dark portion potential at the position of the developing device 404 becomes 4
After adjusting the charging current amount of the main charger 402 to be 00 V, the solid white document 412 is placed on the document table 411, and the lighting voltage of the halogen lamp 410 is adjusted so that the bright portion potential becomes 50 V. An original 412 having a density of 0.3 is placed.
The potential unevenness at this time is measured, and the percentage of the potential of the portion where unevenness is reduced with respect to the potential of the normal portion is evaluated. ......: Good image without sensitivity unevenness. Δ: There is potential unevenness of 2.5% or less, but the image is at a level that does not cause any practical problem. X: Potential unevenness exceeding 2.5% occurred, and streak-like density unevenness occurred in the image. (Fusing evaluation method) The charging current amount of the main charger 402 is adjusted so that the dark portion potential at the position of the developing device 404 becomes 400 V, the solid white document 412 is placed on the platen 411, and the bright portion potential becomes 50 V. The lighting voltage of the halogen lamp 410 is adjusted so that an A3-sized solid white image is created. The image is used to observe black spots generated by the fusion of the developer, and the surface of the light receiving member is observed using a microscope. ......: Good image without fusing. Δ: No black spots appear on the image, but microscopic fusion of 10 μm or less is observed by microscopic observation (no problem in practical use). × ......... Black spots appear on the image. (Cleaning defect evaluation method) The amount of charging current of the main charger 402 is adjusted so that the potential of the dark portion at the position of the developing device 404 becomes 400 V, the document 412 having a reflection density of 0.3 is placed on the platen 411, and the potential of the bright portion is The lighting voltage of the halogen lamp 410 is adjusted so that the value becomes 200 V, and an A3-size halftone image is created. This image is used to evaluate a cleaning defect that occurs in the form of a stripe. ......: Good image with no poor cleaning. Δ: No cleaning failure within 1 mm in width and 1 cm in length, but no problem in practical use. ×: Three or more cleaning defects within 1 mm in width and 1 cm in length occurred. Or, a cleaning failure exceeding 1 mm in width and 1 cm in length occurs.

Table 6 shows the results obtained by the above evaluation methods.

As shown in Table 6, none of the light receiving members A, B, and C had any image defects in the form of black stripes caused by uneven scraping even after 100,000 sheets had been used. No image defects occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

[0102]

[Table 6] Further, as a result of observing the edge portion of the urethane rubber blade after the endurance with a metallographic microscope, no damage such as a scratch was observed, and the initial state was maintained.

Comparative Example 2 In the same manner as in Example 1, a lower blocking layer was formed on a cylindrical conductive substrate by using the plasma CVD apparatus shown in FIG.
After laminating the photoconductive layer, the surface layer was 0.5 μm thick under the conditions shown in Table 7.
Thus, light receiving members A ′ to C ′ were manufactured. In addition, 7
AC of A 'to C' on a 059 glass substrate under the conditions of Table 7:
F surface layer samples were prepared, and the fluorine content and the dynamic hardness of the surface layers A ′ to C ′ were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members A ′ to C ′ were the values shown in Table 8.

[0105]

[Table 7]

[0106]

[Table 8] Next, the light receiving members A ′ to C ′ are copied to a Canon copier N
It was mounted on a modified model of P-6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 42
6 uses a magnet roller and further includes a light receiving member 4
01 is set to 200 mm / sec and the blade 421 is moved.
Used a urethane rubber blade having a rebound resilience of 8%. Table 8 shows the amount of wear of the surface layer after the durability.

Further, Table 9 shows the evaluation results of uneven shaving, fusion, and cleaning failure described in Example 2, and Table 10 shows the evaluation of image deletion.

[0108]

[Table 9]

[0109]

[Table 10] As shown in these tables, fusing by 100,000 sheets durability,
Cleaning failure occurred. Further, with respect to image deletion, there is a case where image deletion occurs in durability under the condition that the heating means of the light receiving member is not provided.

Further, as a result of observing the edge of the urethane rubber blade after the endurance with a metallographic microscope, damage such as a scratch was recognized.

Example 3 In the same manner as in Example 1, a lower blocking layer was formed on a cylindrical conductive substrate using the plasma CVD apparatus shown in FIG.
After laminating the photoconductive layer, the surface layer was 0.5 μm under the conditions shown in Table 2.
Thus, light receiving members D to F were manufactured. In addition, 70
A-C: F of DF under the conditions of Table 2 on a 59 glass substrate
Surface layer samples were prepared, and the amounts of slime and dynamic hardness of the surface layers D to F were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members DF were the values shown in Table 11.

[0113]

[Table 11] Next, the light receiving members DF are connected to a Canon copying machine NP.
It was mounted on a modified model of -6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 426
Used a foaming urethane roller, the moving speed of the light receiving member 401 was 300 mm / sec, and the blade 421 was a urethane rubber blade having a rebound resilience of 25%. Table 11 shows the amount of wear of the surface layer after the durability.

Table 6 shows the results obtained in the evaluation of uneven scraping, fusion, and defective cleaning described in Example 2.

Further, 100,000 sheets of the light receiving members D to F were subjected to endurance in an environment of 35 ° C. and a relative humidity of 90% without providing a heating means, and the image deletion was evaluated. However, a urethane roller in the form of a foam was used as the cleaning roller 426, and the blade was set so that the scrape cleaning was performed at a pressing pressure of 50% of the normal pressure. Table 5 shows the evaluation results of the image deletion.

As shown in these tables, the light receiving members D to
F, no streak-like image defect caused by uneven shaving was found even after 100,000 sheets of the photoreceptor had run out, and no image defect such as poor cleaning or fusion occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

When the edge of the urethane rubber blade after the endurance was observed with a metallographic microscope, no damage such as scratches was observed, and the initial state was maintained.

Comparative Example 3 In the same manner as in Example 1, a lower blocking layer was formed on a cylindrical conductive substrate by using the plasma CVD apparatus shown in FIG.
After laminating the photoconductive layer, the surface layer was 0.5
The light receiving members of D ′ to F ′ were manufactured by depositing μm.

[0119]

[Table 12] Furthermore, D ′ was also applied on a 7059 glass substrate under the conditions shown in Table 12.
Samples of the aC: F surface layer of F ′ to F ′ were prepared, and the fluorine content and the dynamic hardness of the surface layers of D ′ to F ′ were measured in the same manner as in Example 1. As a result, the light receiving members D 'to F'
The fluorine content and the dynamic hardness of the surface layer were as shown in Table 13.

[0120]

[Table 13] Next, the light receiving members D 'to F' are transferred to a Canon copier N
It was mounted on a modified model of P-6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 42
No. 6 uses a silicon rubber roller, and the moving speed of the light receiving member 401 is set to 300 mm / sec.
No. 1 used a urethane rubber blade having a rebound resilience of 5%.
Table 13 shows the wear amount of the surface layer after the durability.

Further, Table 9 shows the results of evaluation of uneven scraping, fusion, and poor cleaning described in Example 2, and Table 10 shows the evaluation of image deletion.

As shown in these tables, there was no practical problem with respect to fusing and image deletion.
In some cases, streak-like image defects due to abrasion and uneven scraping may occur due to the durability of all sheets.

When the edge of the urethane rubber blade after the endurance was observed with a metallographic microscope, damage such as a scratch was observed.

Example 4 In the same manner as in Example 1, the plasma CVD shown in FIG.
After the lower blocking layer, the charge transport layer and the charge generation layer were laminated on the cylindrical conductive substrate under the conditions shown in Table 14 using the apparatus, a surface layer was deposited at a thickness of 0.5 μm under the conditions shown in Table 15 and the light of G to I was applied. A receiving member was manufactured.

[0125]

Table 14 Table 14 Manufacturing conditions of light receiving member Lower blocking layer: SiH ₄ 300 scc H ₂ 500 scc B ₂ H ₆ 2000 ppm Power 100 w (105 MHz) Internal pressure 26.6 Pa Film thickness 1 μm Charge transport layer _{··· SiH 4 500scc H 2 500scc CH} 4 50scc power 300w (105 MHz) pressure 26.6Pa thickness 15μm charge generation layer ······ SiH ₄ 500scc H ₂ 500scc power 300w (105 MHz) pressure 26.6Pa thickness 5 μm

[0126]

[Table 15] Further, G to G on a 7059 glass substrate under the conditions shown in Table 15.
A sample of the aC: F surface layer of I was prepared, and the fluorine content and the dynamic hardness of the surface layers of G to I were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members GI were as shown in Table 16.

[0128]

[Table 16] Next, the light receiving members G to I are connected to a Canon copier NP.
It was mounted on a modified model of -6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 426
Used a magnet roller. The main charger 402 and the separation charger 407 have a configuration of roller charging and roller transfer of silicon rubber. Further, the moving speed of the light receiving member 401 is set to 100 mm / sec, and the blade 421 has a rebound resilience of 3 mm.
A 5% silicone rubber blade was used. Table 16 shows the amount of wear of the surface layer after the durability.

Further, the results of evaluation of uneven shaving, fusion, and cleaning failure described in Example 2 are shown in Table 17, and the evaluation of image deletion is shown in Table 18.

[0130]

[Table 17]

[0131]

[Table 18] As shown in these tables, none of the light-receiving members G to I had any streak-like image defects caused by uneven shaving even after the durability of 100,000 sheets. No defects occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

Further, as a result of observing the edge portion of the silicon rubber blade after the endurance with a metallographic microscope, no damage such as a flaw was observed, and the initial state was maintained.

Comparative Example 4 In the same manner as in Example 4, a lower blocking layer, a charge transport layer, and a charge generation layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. Later, Table 19
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members G ′ to I ′.

[0134]

[Table 19] Further, G ′ was also placed on a 7059 glass substrate under the conditions shown in Table 19.
Samples of the aC: F surface layer of the samples I to I ′ were prepared, and the fluorine content and the dynamic hardness of the surface layers G ′ to I ′ were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members D ′ to F ′ were as shown in Table 20.

[0136]

[Table 20] Next, the light receiving members G ′ to I ′ are transferred to a Canon copier N
It was mounted on a modified model of P-6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 42
6 uses a magnet roller and further has a main charger 40
The second charging device 407 and the separation charging device 407 were configured to perform roller charging of silicon rubber and roller transfer. Also, the light receiving member 401
And the blade 421 was a silicon rubber blade having a rebound resilience of 8%. Table 20 shows the amount of wear of the surface layer after the durability.

Further, Table 21 shows the evaluation results of uneven shaving, fusion, and cleaning failure described in Example 2, and Table 22 shows the evaluation of image deletion.

[0138]

[Table 21]

[0139]

[Table 22] As shown in these tables, in the aC: F film in which the abrasion amount is a value larger than 100 ° / 10,000 sheets, the fusion after 100,000 sheets of durability and the image deletion are at a level at which there is no practical problem. However, there was a case where the mechanical strength was low and uneven scraping or white streaks were found as image defects.

Further, as a result of observing the edge of the silicon rubber blade after the endurance with a metallographic microscope, damage such as a scratch was recognized.

Example 5 Similarly to Example 4, a lower blocking layer, a charge transport layer and a charge generation layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 by using the plasma CVD apparatus shown in FIG. Table 23
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light-receiving members J to L.

[0142]

[Table 23] Further, J to J on the 7059 glass substrate under the conditions shown in Table 23.
Samples of L aC: F surface layer were prepared, and the fluorine content and the dynamic hardness of the surface layers J to L were measured in the same manner as in Example 1.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members J to L were as shown in Table 24.

[0144]

[Table 24] Next, the light receiving members J to L are transferred to a Canon copying machine NP.
It was mounted on a modified model of -6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 426
Uses a urethane rubber roller, and the main charger 40
2 and the separation charger 407 were configured to perform roller charging of urethane rubber and roller transfer. Also, the light receiving member 401
The moving speed was 400 mm / sec, and a silicon rubber blade having a rebound resilience of 50% was used as the blade 421. Table 24 shows the amount of wear of the surface layer after the durability.

Further, Table 17 shows the evaluation results of uneven shaving, fusing, and cleaning failure described in Example 2, and Table 18 shows the evaluation of image deletion.

As shown in these tables, the light receiving members J to J
In each of the light receiving members L, even after 100,000 sheets had been used, no streak-like image defects occurred due to uneven shaving, and no image defects such as poor cleaning and fusion occurred. Further, with respect to image deletion, good image characteristics were obtained without providing a heating means for the light receiving member.

When the edge of the silicon rubber blade after the endurance was observed with a metallographic microscope, no damage such as a flaw was observed, and the initial state was maintained.

Comparative Example 5 In the same manner as in Example 4, a lower blocking layer, a charge transport layer and a charge generation layer were laminated on a cylindrical conductive substrate under the conditions shown in Table 14 using the plasma CVD apparatus shown in FIG. Later, Table 25
Under the conditions described above, a surface layer was deposited to a thickness of 0.5 μm to produce light receiving members J ′ to L ′.

[0149]

[Table 25] Further, J ′ was also applied on a 7059 glass substrate under the conditions shown in Table 25.
Samples of the aC: F surface layer of L ′ to L ′ were prepared, and the fluorine content and the dynamic hardness of the surface layers of J ′ to L ′ were measured in the same manner as in Example 2.

As a result, the fluorine content and the dynamic hardness of the surface layers of the light receiving members J ′ to L ′ were as shown in Table 26.

[0151]

[Table 26] Next, these light receiving members J 'to L' are
It was mounted on a modified model of P-6085, and the durability was evaluated under the same conditions as in Example 2. However, the cleaning roller 42
6 uses a silicon rubber roller and further has a main charger 4
02 and the separation charger 407 were configured to perform roller charging and roller transfer of urethane rubber. Also, the light receiving member 401
And the blade 421 used was a silicone rubber blade having a rebound resilience of 55%. Table 26 shows the amount of wear of the surface layer after the durability.

The results obtained in the evaluation of uneven scraping, fusing, and cleaning failure described in Example 2 are shown in Table 21.
Table 22 shows the evaluation of image deletion.

As shown in these tables, the amount of wear was 0.1.
In the aC: F film showing a value smaller than Å / 10,000 sheets, 1
It has been found that, due to the durability of 100,000 sheets, defective cleaning and image deletion may occur.

Further, as a result of observing the edge of the silicon rubber blade after the endurance with a metallographic microscope, damage such as a scratch was recognized.

[0155]

As described in detail above, the present invention provides any one of the electrophotographic processes having a constitution in which a developer having an average particle size of 5 to 8 μm is scraped and cleaned with an elastic rubber blade having a rebound resilience of 10% to 50%. In an electrophotographic apparatus provided with a means for rubbing the surface of a light-receiving material, the amount of abrasion after performing the copying process of A4 size paper on 10,000 sheets of transfer paper is 0.1 mm or more.
00% or less and the fluorine content is 5% to 50%
Or less, and the dynamic hardness is 10 to 500 k
By using a light-receiving member constituting a surface layer with a non-single-crystalline fluorinated carbon film having a range of gf / mm ^2, the surface layer can be uniformly worn, and an image generated by uneven shaving can be obtained. It is possible to prevent density unevenness and fusion of the developer.

In addition, by uniformly abrading the surface layer in the range of 0.1 ° to 100 ° per 10,000 transfer sheets, there is no need to provide a means for directly heating the surface of the light receiving member under any environment. It is possible to effectively prevent image defects such as image deletion.

Furthermore, the type of developer that can be used, and the latitude in designing an electrophotographic apparatus, such as downsizing of the electrophotographic apparatus and cost reduction, can be greatly expanded.

The present invention may be appropriately performed within the scope of the gist.
It goes without saying that a modified combination can be made, and the present invention is not limited to the above embodiments.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing an example of a light receiving member according to the present invention.

FIG. 2 is a schematic configuration diagram illustrating an example of a deposition apparatus used for manufacturing a light receiving member by a PCVD method applicable to the present invention.

FIG. 3 is a schematic configuration diagram showing another example of a deposition apparatus used for manufacturing a light receiving member by a PCVD method applicable to the present invention.

FIG. 4 is a schematic sectional view illustrating an example of an electrophotographic apparatus.

[Explanation of symbols]

REFERENCE SIGNS LIST 101 conductive substrate 102 charge injection blocking layer 103 photoconductive layer 104 surface layer 105 charge generation layer 106 charge transport layer 401 light receiving member 402 main charger 403 electrostatic latent image forming site 404 developer 405 transfer paper supply system 406 transfer charging Device 407 Separator charger 408 Transport system 409 Static elimination light source 410 Halogen lamp 411 Document table 412 Document 413 Mirror 414 Mirror 415 Mirror 416 Mirror 417 Lens unit 418 Lens 419 Feed guide 420 Blank exposure LED 421 Cleaning blade 422 Resist roller base 423 424 Fixing device 425 Cleaner 426 Cleaning roller 2100, 3100 Deposition device 2110, 3110 Reaction vessel 2111, 3111 Cathode electrode 2112, 3112 Conductivity Substrate 2113, 3113 Substrate heating heater 2114, 3114 Gas inlet tube 2115, 3115 High frequency matching box 2116, 3116 Gas pipe 2117, 3117 Leak valve 2118, 3118 Main valve 2119, 3119 Vacuum gauge 2120, 3119 High frequency power supply 2121, 3121 Insulating material 3122 Insulation shield plate 2123, 3123 Receiving stand 2200, 3200 Gas supply device 2211 to 2216, 3211 to 3216 Mass flow controller 2221 to 2226, 3221 to 2226 Cylinder 2231 to 2236, 3231 to 2236 Valve 2224 to 2246, 3241 to 3246 Inflow valve 2251 Outflow valve 2260,3260 Auxiliary valve 2261-226 , 3261 to 3266 pressure regulator

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification code FI Theme coat ゛ (Reference) G03G 9/08 G03G 9/08 21/10 21/00 312 318 (72) Inventor Ryuji Okamura Ota-ku, Tokyo Shimomaruko 3-chome 30-2 Canon Inc. F-term (reference) 2H005 AA00 EA05 2H034 AA02 BC03 BF02 2H068 DA04 DA05 DA23 DA43 DA44 DA51 EA24 FA01 FA03 FC01 FC08 FC15

Claims (10)

[Claims] 1. An electrophotographic apparatus in which a light receiving member is rotated and charging, exposure, development, transfer, and cleaning steps are sequentially repeated, and a rubbing means for rubbing the surface of the light receiving member is provided in any of the steps. The light receiving member has an average particle size of 5 to 8 μm.
m of the developer on the light receiving member and transferred to a transfer material, and the surface of the light receiving member after the developer is transferred has a rebound resilience of 10%.
An electrophotographic apparatus that scrapes and cleans with an elastic rubber blade of 50% or less and the A4 size copying process is performed on transfer paper 1
An electrophotographic apparatus characterized in that the surface layer is composed of a non-single crystalline fluorinated carbon film having an abrasion amount of at least 0.1 mm and not more than 100 mm after being subjected to every 10,000 sheets. 2. An electrophotographic apparatus according to claim 1, wherein said rubbing means is a cleaning roller comprising a rubber roller or a magnet roller provided in a cleaning step. 3. The electrophotographic apparatus according to claim 1, wherein the rubber roller provided in the cleaning step as the rubbing means is foamed. 4. An electrophotographic apparatus according to claim 1, wherein said rubbing means is roller charging and / or roller transfer provided in a charging step. 5. The light receiving member comprises a photoconductive layer composed of a non-single-crystal material mainly composed of silicon atoms and a surface layer composed of a non-single-crystal material on a conductive substrate. An electrophotographic apparatus according to claim 1. 6. The dynamic hardness of the surface layer is 10 to 10.
500kgf / mm ^Two2. The method according to claim 1, wherein
6. The electrophotographic apparatus according to any one of items 1 to 5. 7. The electrophotographic apparatus according to claim 1, wherein the amount of fluorine ((F / (C + F)) of the non-single crystalline fluorinated carbon film is 5 to 50 atomic%. 8. The method according to claim 1, wherein the surface layer is formed by decomposing at least a hydrocarbon gas and / or a fluorine gas by a plasma CDV method using a high frequency of 1 to 450 MHz. 8. The electrophotographic apparatus according to 7. 9. The electrophotographic apparatus according to claim 1, wherein said photoreceptor comprises three layers: a charge injection blocking layer, a photoconductive layer, and a surface layer. 10. The electrophotographic apparatus according to claim 1, wherein the photoreceptor comprises three layers: a charge transport layer, a charge generation layer, and a surface layer.