JP2000161920A - Light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent an optical fiber which even has low flexibility from breaking by setting so that a lamp portion fixed at a holder portion and the tip point of the fiber do not relatively move and placing a control portion at a place other than a holder portion for connecting the control portion and the lamp portion with a cable. SOLUTION: A bed 11 is mounted on a base 10, a mounted face 12 for a measured object is placed on the mounting face of the bed 11, and a rail is built in both sides of the face 12 in a two dimensional measuring machine. An arm 14 moving freely reciprocatingly along the rail in the Y-direction is erected and a holder portion 2 moving freely reciprocatingly along the rail in the X-direction is placed. A CCD camera is placed at the holder portion 2 and a lamp portion 3 is set at the holder 2. The tip point of a quartz fiber 4 is fixed at the holder portion 2 similarly to the camera and the lamp portion 3. The lamp portion 3 is connected to a control portion 5 placed in the base 10 via a cable 30, and the cable 30 is wired through cable bears 15, 16.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, an imaging camera which is attached to a measuring machine for measuring two-dimensional coordinates by moving in an XY direction or a visual inspection machine for obtaining a defect of a measured object and its coordinates. The present invention relates to a light source device that irradiates light to an imaging location from an end of an optical fiber fixed to a holder unit to which a camera is attached.

[0002]

2. Description of the Related Art A conventional light source device of this type includes at least a lamp portion having a lamp and a control portion for supplying power to the lamp and controlling light emission. The light source device is fixed to a portion other than the holder portion. In addition, the fixed lamp portion of the light source device and the holder portion moving in the X and Y directions are connected by an optical fiber having excellent flexibility. In the lamp section, 400n
Light having a relatively long wavelength of m or more is irradiated, and the light is guided to the holder through a plastic optical fiber.

[0003]

In the above conventional device, the wavelength of the light emitted from the lamp portion is relatively long, so that the light is hardly attenuated even through a plastic optical fiber. There is a case where it is desired to irradiate an imaged portion with light having a short length. However, as the wavelength becomes shorter, the light is more likely to be attenuated while passing through the optical fiber, and a plastic optical fiber cannot emit a sufficient amount of light from the tip of the optical fiber. In such a case, a quartz fiber or a liquid fiber having a high transmittance may be used instead of the plastic optical fiber.However, since the optical fiber having a high transmittance has low flexibility, it is bent and stretched every time the holder is moved. If it is done, it will break immediately. When the light source device is mounted on a movable holder, the light source device also moves when the holder is moved, so that the optical fiber is not bent or stretched. However, a wide space for mounting the light source device on the holder must be secured. In addition, since the mass of the light source device is added to the movable part, the driving force and the braking force on the holder part increase, which is not practical.

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a light source device that does not break the optical fiber even if an optical fiber having low flexibility is used without increasing the mass of the holder. And

[0005]

According to the present invention, there is provided a light source device having at least a lamp unit having a lamp and a control unit for supplying power to the lamp and controlling light emission. An optical fiber having a tip fixed to a movable holder is attached to a lamp, and light from a lamp is emitted from the tip of the optical fiber through the optical fiber. And the tip of the optical fiber do not relatively move, and the control unit is installed in a place other than the holder unit, and the control unit and the lamp unit are connected by a cable.

If the lamp and the tip of the optical fiber are not moved relatively, the optical fiber is not bent or stretched even if the holder is moved, so that the breakage of the optical fiber can be prevented. Further, by installing the control unit at a place other than the holder unit, the load loaded on the holder unit can be reduced as much as possible. The lamp unit and the control unit are connected by a cable, but since the cable is excellent in flexibility, it does not break even if it is bent or stretched by the movement of the holder unit.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. 1, reference numeral 1 denotes a two-dimensional coordinate measuring machine for inspecting a pattern of a printed circuit board or a grid plate used for a plasma display by capturing an image from above. The two-dimensional measuring machine 1 has a bed 11 mounted on a base 10. A mounting surface 12 on which a work (not shown) to be measured is mounted on the upper surface of the bed 11.
A rail covered by a rail cover 13 is provided on both left and right sides of the mounting surface 12.
An arch 14 which can reciprocate in the Y direction, which is the front and rear direction, is provided along the rail. A longitudinal rail (not shown) is built in the arch 14 in the left-right direction.
A holder 2 that can reciprocate in the X direction along the rail is attached. A CCD camera 21 for capturing an image of a work is attached to the holder 2. Further, a lamp unit 3 having a built-in lamp for generating illumination light for irradiating an image pickup position of the CCD camera 21 is attached to the holder unit 2. The light generated by the lamp unit 3 is applied to an imaging location via two quartz fibers 4 made of quartz glass. Therefore, the tip of the quartz fiber 4 is fixed to the holder 2 as in the CCD camera 21 and the lamp 3. The CCD camera 21 is connected to a cable (not shown), and the lamp unit 3 is connected to the control unit 5 mounted in the base 10 via a cable 30. The cable 30 is a cable bear 15 and a cable bear 16
It is wired through. The lamp unit 3 and the control unit 5 constitute the light source device of the present invention.

Referring to FIG. 2, 400 is provided in lamp section 3.
Discharge type lamp 31 for generating light having a wavelength shorter than nm
Are held by the mirror holder 31a. The lamp 31
Is connected to a high-voltage starter 32 for applying a high voltage. A shutter plate 33a opened and closed by a rotary solenoid and a diaphragm plate 36 manually adjusted by a knob 36a are mounted in front of the lamp 31. The light that has passed through the shutter plate 33a and the aperture plate 36 is converted into a light guide 37 to which the quartz fibers 4 are attached.
To reach. Reference numeral 34 denotes a shutter sensor for detecting the open / closed state of the shutter plate 33a, and reference numeral 35 denotes an air cooling fan for ventilating the inside of the lamp unit 3.

On the other hand, a noise filter 57 is mounted in the control unit 5 so that noise does not leak to the power supply line, and power is supplied to the lamp power supply 52 via the noise filter 57. The lamp power supply 52 is connected to a control board 53, and the control board 53 is connected to an operation panel 54 which is mounted on the control unit 5 so as to be exposed to the outside. The control board 53 controls the rotary solenoid 33 to open and close the shutter plate 33a, and the shutter sensor 34 feeds back the open / closed state of the shutter plate 33a. Further, it controls the driving of the air-cooling fan 35 and controls the blinking of the lamp 31 via the lamp power supply 52. Accordingly, the rotary solenoid 33, the shutter sensor 34, and the air cooling fan 35 are connected to the control board 53, and the high voltage starter 32 is connected to the lamp power supply 52. These connection cords are combined into one cable 30. An external control terminal 55 is connected to the control board 53, and is controlled by a signal from an operation device (not shown) in addition to the operation panel 54.

In the above embodiment, a quartz fiber is used as an optical fiber, but a plastic optical fiber having high flexibility may be used. In the case of a plastic optical fiber, there is no danger of breakage, but according to the present invention, the length of the optical fiber can be shortened, so that the light attenuation rate in the optical fiber can be reduced.

[0011]

As is apparent from the above description, according to the present invention, since the lamp portion and the tip of the optical fiber do not relatively move, the optical fiber is not bent and stretched, and the optical fiber has low flexibility. The optical fiber does not break even when the optical fiber is used. Further, since the light source device is divided into a lamp unit and a control unit, and the control unit is attached to a place other than the holder unit, the load placed on the holder unit is reduced as much as possible.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an embodiment of the present invention.

FIG. 2 is a block diagram illustrating a structure of a light source device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 2D coordinate measuring machine 2 Holder part 3 Lamp part 4 Quartz fiber (optical fiber) 5 Control part 21 CCD camera 15 Cable bear 16 Cable bear

Claims (1)

[Claims] 1. A light source device comprising at least a lamp unit having a lamp and a control unit for supplying power to the lamp and controlling light emission, wherein an optical fiber having a tip fixed to a movable holder unit is a lamp. A light source for irradiating the light of a lamp from the tip of the optical fiber through the optical fiber. The lamp part is fixed to a holder so that the lamp and the tip of the optical fiber do not relatively move. A light source device, wherein the control unit is installed in a place other than the holder unit, and the control unit and the lamp unit are connected by a cable.