JP2000158620A - Printing apparatus and manufacture of printed wiring board, electron source and image displaying device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To print patterns of electrodes, wiring, color filters and others of an image display device by offset printing on a printing material of non- absorbing properties such as glass. SOLUTION: The humidity of a blanket 113 is regulated on the basis of an output of a sensor 12. A humidity regulating part has a structure wherein a humidity absorbing sheet 13 stretched in the shape of a belt is pressed on the blanket 113. The humidity absorbing sheet 13 is rotated by rollers 14a, 14b and 14c. In order to regulate the amount of impregnation of the blanket 11 with a solvent 3, a controller 17, fed back with the state of wetting of the blanket 113 with the ink solvent, controls a humidifying mechanism 16 for humidifying solvent ink and a drying mechanism 15 for drying the solvent ink. As the humidity absorbing sheet 13, nonwoven fabric, paper or the like having no dust producing property may also be used. As for a sensor head, it is also allowable that an ATR (total reflection) attachment fitted to an infrared absorption analyzing device is brought into close contact with the surface of the blanket.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printing apparatus, a printed circuit board using the same, an electron source, and a method for manufacturing an image display device. When manufacturing by printing,
The present invention relates to a printing device that prevents printing defects, and a method of manufacturing a printed circuit board, an electron source, and an image display device using the same.

[0002]

2. Description of the Related Art In recent years, a thin, flat image display has been drawing attention as an image display instead of a large and heavy cathode ray tube. Although a liquid crystal display device has been actively researched and developed as a flat panel image display device, problems such as a dark image and a narrow viewing angle still remain in the liquid crystal display device. As a substitute for the liquid crystal display device, there is a self-luminous display, that is, a display using an electron-emitting device such as a plasma display, a fluorescent display tube, and a surface conduction electron-emitting device. A self-luminous display can obtain a brighter image and has a wider viewing angle than a liquid crystal display device. On the other hand, recently, a cathode ray tube having a screen display section of 30 inches or more has been appearing, and further enlargement is desired. However, a CRT requires a large space when it is enlarged.

A self-luminous flat display is suitable for such a large and bright display. The present applicant has disclosed an image display device using an electron-emitting device among self-luminous type flat plate image display devices, and an M.P. I. (Radio.Eng.Electron.Phys., 10, 1290,
(1965) Attention has been paid to an image display device using a surface conduction electron-emitting device.

In a surface conduction electron-emitting device, electron emission occurs when a current flows through a small-area thin film formed on a substrate in parallel with the film surface. Examples of the surface conduction electron-emitting device include a device using an SnO ₂ thin film by Elinson et al. And a device using an Au thin film [G. Dittmer: Thin Solid Filtration].
ms, 9, 317 (1972)], using a thin film of In ₂ O ₃ / SnO ₂ [M. Hartwell and CGFonstad: IEEE Tran
s.ED Conf. , 519 (1975)], using a carbon thin film [Hisashi Araki et al .: Vacuum, Vol. 26, No. 1, 22]
1983).

FIG. 10 shows a typical example of these surface conduction electron-emitting devices described in the above-mentioned M.I. 1 schematically shows a device configuration of a Hartwell. In FIG. 10, reference numeral 1001 denotes a substrate. Reference numeral 1004 denotes a conductive thin film made of a metal oxide thin film or the like formed by sputtering in an H-shaped pattern, and an electron emitting portion 1005 is formed by an energization process called energization forming described later. It should be noted that the device electrode 100 in FIG.
The interval L of 2,1003 is, for example, 0.5 to 1 [m
m] and W ′ are about 0.1 [mm].

US Pat. No. 5,066,883 proposes a surface conduction electron-emitting device in which fine particles for emitting electrons are dispersed between a pair of device electrodes. This electron-emitting device can control the electron-emitting position in comparison with the above-mentioned conventional surface conduction electron-emitting device.

FIG. 11 shows a typical device configuration of this surface conduction electron-emitting device. FIG. 11A is a plan view of the element configuration, and FIG. 11B is a cross-sectional view of the element configuration. 110
1 is an insulating substrate, 1102 and 1103 are device electrodes for obtaining electrical connection, and 1104 is a conductive thin film. In this surface conduction electron-emitting device, the distance L between the pair of device electrodes is 0.01 μm to 100 μm, and a gap 1105 is formed in the conductive thin film 1104. The device electrode has a thickness d of 200 n in order to maintain electrical connection with the conductive thin film.
It is desirable to form the film to be thinner than m.

The present inventors are studying about increasing the area of an image display device in which many surface conduction electron-emitting devices are arranged on a substrate. Various methods are conceivable for producing an electron source substrate in which an electron-emitting device and a wiring are arranged on a substrate. As one of the methods, there is a method of producing a device electrode and a wiring by a photolithography method.

On the other hand, a method of producing an electron source substrate including the surface conduction electron-emitting device by a printing technique such as screen printing or offset printing is conceivable.

The printing method is suitable for forming a large-area pattern. A large number of surface conduction electron-emitting devices are formed on a substrate by forming device electrodes of the surface conduction electron-emitting device by a printing method. It becomes possible. It is also advantageous in terms of cost. In forming an element electrode by a printing method, an offset printing technique suitable for forming a thin film is suitable. An example in which this offset printing technique is applied to a circuit board is disclosed in JP-A-4-290295. In the substrate disclosed in this publication, the angles of a plurality of bonding electrodes connected to circuit components are changed in order to eliminate bonding defects due to variations in electrode pitch dimensions due to pattern expansion and contraction during printing. The publication describes that an electrode pattern is formed by offset printing.

In general, in offset printing, after intaglio having a desired pattern is filled with ink, a body called a blanket is brought into rotational contact with the intaglio to receive the ink on the blanket. By rotating the blanket, the desired pattern of ink is transferred onto the glass substrate surface.

As described above, from the viewpoint of the movement of the ink, one printing is completed by mainly three steps of filling, receiving, and transferring.

Here, the above printing ink can be appropriately selected according to the function of the pattern to be produced. That is, ink containing organic Au metal called Au resinate paste is mainly used for an electrode pattern of a recording thermal head or the like, and R, G, and B color pigments are used for a color filter used in a liquid crystal display device or the like. Dispersed inks, inks containing organic dyes, and the like are used. The solvent selected for these inks is an organic solvent such as terpineol or butyl carbitol.

When an organic solvent is used as a solvent for the ink as described above, when the ink pattern is transferred from the blanket to the glass substrate, the ink solvent penetrates into the blanket (mainly silicone rubber), and the cohesive force of the ink is increased. The mechanism has been considered in which the ink is easily transferred to the glass substrate by decreasing the interfacial tension between the ink pattern and the blanket. This is described in JP-A-7-156523.

At this time, when the printing medium has absorptivity such as paper, the ink solvent in the blanket penetrates to some extent into the printing medium to prevent excessive swelling of the blanket.

[0016]

However, when the printing medium is non-absorbent such as glass, the ink solvent gradually accumulates on the blanket to increase the density, and when no measures are taken, the ink solvent is not used. When the amount exceeds a certain value,
Poor transfer occurs, and defective products such as swelling of the blanket with the solvent and dimensional accuracy required for printed matter cannot be obtained.

In order to prevent a problem caused by such a blanket absorbing too much ink solvent, the printing process is stopped once, and hot air is blown to the organic solvent absorbed in the blanket to volatilize and dry. In some cases, measures such as restarting printing after cooling are taken. However, the continuous printing process is stopped once, and the work is performed in a badge process, which lowers productivity.

On the other hand, if the concentration of the ink solvent in the blanket is too low, the solvent in the received ink pattern is absorbed too much by the blanket rubber and solidifies on the blanket surface and adheres to transfer to the glass substrate. Even if it is performed, it may remain on the blanket surface, and may cause defective prints. In such a case, as shown in JP-A-8-48070, it is necessary to infiltrate the silicone rubber of the blanket with the ink solvent by some method before starting printing.

If the defective printed matter caused by the inappropriate amount of the ink solvent in the blanket as described above is inexpensive and easy to discard, such as paper, the defective printed matter should be discarded as it is. Can be done. However, in the case of printed materials such as electrodes, wiring, and color filters for image display devices, many structures are already formed in the process before offset printing, and the cost of the printed material itself is expensive, such as using special glass. Therefore, it cannot be easily discarded in many cases. Reproduction and reuse by some means also leads to an increase in cost.

Conventionally, a countermeasure is taken at the stage where a defective product occurs due to the phenomenon of overswelling or overdrying of the blanket, and as a result, a defective printed matter is generated. Further, in order to find a defective product, a process of checking all places of hundreds of thousands of ultra-high-definition patterns is required, thereby lowering the throughput and increasing the total cost.

Accordingly, an object of the present invention is to provide a printing apparatus capable of extremely reducing the occurrence of defective prints. Another object of the present invention is to provide a method of manufacturing a printed circuit board capable of forming a member having a desired pattern on a substrate with good reproducibility. It is another object of the present invention to provide a method of manufacturing an electron source capable of forming a plurality of electron-emitting devices on a substrate with good reproducibility. Another object of the present invention is to provide a method of manufacturing an image display device capable of manufacturing an image display device capable of displaying a high-quality image with good reproducibility. Another object of the present invention is to provide a printed circuit board, an electron source, and a method of manufacturing an image display device, which can significantly improve the yield.

[0022]

According to the present invention, there is provided an offset printing apparatus for transferring an ink pattern to a printing medium via a blanket, wherein the amount of the ink solvent impregnated in the blanket is determined. It has a detecting means for detecting.

[0023]

Embodiments of the present invention will be described below with reference to the drawings.

First, the printed circuit board in the present invention is:
It is a substrate on which the components of the above-mentioned electric / electronic device are patterned, for example, a color filter substrate of a liquid crystal display or a substrate on which driving electrodes of various displays such as a liquid crystal display, a plasma display, and an electron beam display are patterned, The components of the electron source include a patterned substrate and the like.

FIG. 1 is a partial schematic top view of the printing apparatus according to the present embodiment. Reference numeral 101 denotes an ink kneading table for developing the ink 107 by an ink roller 104;
It is a plate base plate for fixing 05. Reference numeral 103 denotes a work surface plate for fixing a work 106 which is a printing medium, and is fixedly arranged on a main body frame 108. Two rack gears 109, 1 are provided on both sides of the three platens arranged in a row.
10 and a blanket 11 in which gears 111 and 112 are engaged on rack gears 109 and 110, respectively.
3 are arranged. The axis of the blanket 113 is fixed by carriages 114 and 115 at both ends. The carriages 114 and 115 are moved forward and backward by a crank operation of a crank arm (not shown) from the lower part of the main body. 105, and sequentially slides on the work 106. Blanket 113
The surface has rubber-like blanket rubber attached.

FIG. 2 is a process chart of the transfer of the ink pattern to the work 106 as the printing medium via the blanket 113 by the printing apparatus described above. Reference numeral 101 denotes an ink mixing table; 105, an intaglio; and 106, a glass substrate serving as a work serving as a printing medium, which is arranged in series on the same plane.

As shown in FIG. 2A, reference numeral 104 denotes an ink roll, and an ink 107 kneaded on an ink kneading table 101.
Is fed onto the intaglio 105.

Next, as shown in FIG. 2B, reference numeral 117 denotes a doctor blade. Of the ink 107 fed by sliding on the upper surface of the intaglio 105, the recess 105 is filled with ink while excluding the recess. Remove the ink.

Next, as shown in FIG. 2C, reference numeral 113 denotes a blanket, which receives the ink filled in the concave portions of the intaglio 105 by rotatingly contacting the upper surface of the intaglio 105 and the upper surface of the glass substrate 106 in order.

Next, as shown in FIG. 2D, the ink 1 is formed on a glass substrate 106 in a pattern having the intaglio 105.
Transfer 07.

As described above, from the viewpoint of the movement of the ink, one-time printing is completed by three main steps of filling, receiving, and transferring.

Here, the printing ink 107 can be appropriately selected depending on the function of the pattern to be produced.

That is, an ink containing an organic Au metal called an Au resinate paste is mainly used for a conductive member pattern such as an electrode, and R, G, and B colors are used for a color filter used in a liquid crystal display device or the like. And inks containing organic pigments and the like. The solvent selected for these inks is an organic solvent such as terpineol or butyl carbitol.

Further, the printing apparatus of the present embodiment shown in FIG. 1 further includes a mechanism shown in FIG.

FIG. 3 is a conceptual diagram of a part of the printing apparatus of the present embodiment. The printing apparatus according to the present embodiment shown in this figure detects the amount of the ink solvent in the blanket 113 and controls the amount of the ink solvent. As shown in FIG. 3, the printing apparatus of this embodiment includes a blanket 113, a sensor 12 for detecting a state of the blanket, and a humidity control unit for adjusting the humidity of the blanket 113. That is, the humidity of the blanket 113 is adjusted based on the output of the sensor.

The above-mentioned humidity control part is formed in a belt shape by the moisture absorbing sheet 1.
3 and has a structure for pressing it against the blanket 113. The moisture absorbing sheet 13 is rotated by the rollers 14a, 14b, 14c. Then, in order to adjust the amount of solvent impregnated in the blanket 113, the controller 17 controls the humidifying mechanism 16 for humidifying the solvent ink and the drying mechanism 15 for drying the solvent ink in response to the feedback of the wet state of the blanket 113 with the ink solvent. I do.

Here, as the moisture-absorbing sheet 13, non-woven fabrics and papers having no dust generation, such as Zavina (manufactured by Kanebo Gosen Co., Ltd.) and Technicros 2 (manufactured by TEXWIPE) are suitable.

The humidity control section shown in FIG. 3 is merely an example, and the present invention is not limited to this. For example, a humidification method in which an ink solvent is impregnated into a hygroscopic sheet may be used. Further, the hygroscopic sheet 13 may be appropriately replaced according to the amount of the blanket swelling ink solvent.

That is, the printing apparatus of this embodiment is an offset printing apparatus for transferring an ink having a pattern formed on an intaglio or planographic plate to a printing medium via a blanket. And a mechanism that non-destructively senses parameters that affect the transferability from the blanket to the printing medium, such as the amount of the ink or the degree of swelling of the blanket.

A blanket humidity control mechanism is provided which can feed back a parameter indicating transferability from the blanket to the printing medium and can control the parameter to fall within a preset range.

The above-described mechanism for non-destructively monitoring the parameters affecting the transferability from the blanket to the printing medium does not need to measure the absolute amount of the ink solvent contained in the blanket. It suffices if the amount of the solvent that gradually impregnates the blanket as the number of prints increases can be relatively sensed.

As the method, for example, a micro Raman method can be used. In addition, there is also a method in which a solvent is dropped vertically on a blanket surface and the contact angle is measured.
It is also possible to attach an ATR (total reflection) attachment to the infrared absorption spectrometer and make it adhere to the blanket surface.

In particular, infrared absorption analysis is a very common chemical analysis means, and various attachments are prepared according to the sample form. Specifically, a total reflection absorption measurement method ATR (Attenuated Total Ref)
selection) may be used. The principle and measurement method of the ATR method are described in detail in "Basic and Actual of FT-IR" by Mitsuo Tasumi, Tokyo Chemical Dojinsha, pp. 67-72. Further, in order to actually apply the ATR method to the present invention, for example, an FT-IR measuring device (FTS-135) manufactured by BIO-RAD is used for ATR NEEDLE PRO.
It is good to attach BE. In this case, the spectral crystal is ZeSe
It is.

FIG. 4 is a sectional view of a sensor head according to the ATR method. As shown in FIG. 4, the sensor head is an ATR probe 21 provided with a spectral crystal 22. The tip of the ATR probe 21 is cut diagonally, and the outside is covered with stainless steel. A laser beam 29 including an infrared region emitted by a laser oscillator enters the ATR crystal from the glass fiber 28, enters the ATR crystal from the blanket surface by a depth d, and is totally reflected. The total reflection (ATR) spectrum can be obtained by measuring the wavelength dependence of the energy of the reflected light. This data is taken in and Fourier transformed to perform data processing. Then, the processed data is input to the controller 17 shown in FIG.

For the identification of the ink solvent in the ATR spectrum, for example, a peak at about 1730 cm @ -1 can be used in the absorption of the ketone moiety of dibutyl phthalic acid in the solvent. The internal reference peak for quantification is
For example, a peak at a position of about 1260 cm -1 in the absorption of dimethyl silicone of the blanket 11 can be used.

As shown in FIG. 3, the blanket humidity control section of the printing apparatus of this embodiment has a structure in which a suction sheet is stretched in a belt shape and pressed against the blanket 11. Further, in order to adjust the amount of solvent impregnated in the blanket, the controller has a mechanism for controlling a mechanism for humidifying the solvent ink and a drying mechanism in response to feedback of the wet state of the blanket with the ink solvent.

Further, as a method of reducing the amount of the ink solvent in the blanket, it is easily possible by performing a transfer operation using a blanket on a hygroscopic sheet instead of a glass substrate. As the sheet having a hygroscopic property, nonwoven fabrics and papers having no dust generation, such as Zavina (manufactured by Kanebo Gosen Co., Ltd.) and Technicros 2 (manufactured by TEXWIPE), are suitable. Also, if the ink solvent is impregnated in advance into the hygroscopic sheet, it is suitable as a humidification method,
It is possible to use the blanket swelling ink as a blanket humidity control section by appropriately replacing the hygroscopic sheet according to the solvent amount of the blanket swelling ink.

FIG. 5 is a partial conceptual view showing a printing apparatus according to another embodiment of the present invention.

The sensor 12 for detecting the state of the blanket 113 is different from the above-described printing apparatus shown in FIG. The sensor 12 of the printing apparatus shown in FIG. 5 can sequentially detect the state of the blanket 113 without contacting the blanket 113. For example, the sensor 12 is a laser displacement meter, and the height of the surface of the blanket 113 is sequentially monitored using the laser displacement meter.

In the printing apparatus shown in FIG. 5, the data from the laser displacement meter is compared with the previously prepared data on the amount of solvent absorbed into the blanket and the change in the height of the blanket, and further on the printability at that time. Then, the solvent impregnation amount of the blanket is controlled based on the output of the comparison result. Here, the control of the solvent impregnation amount of the blanket is performed by controlling the humidifying mechanism 16 and the drying mechanism 15 of the blanket by the controller 12 similarly to the above-described printing apparatus shown in FIG.

The change in the height of the blanket is caused by the change in the volume of the blanket due to the absorption of the ink solvent, and there is a correlation between the amount of the ink solvent absorbed by the blanket and the change in the height of the blanket, and the reproducibility is high. Is also good. Therefore, the amount of the ink solvent impregnated in the blanket can be detected by monitoring the change in the height of the blanket, and the humidity control section of the blanket having the above-described humidifying mechanism and drying mechanism is controlled based on the detection result. This makes it possible to adjust the amount of the impregnated ink solvent in the blanket and to prevent the occurrence of defective printed matter due to poor ink transfer. Further, the measurement of the surface height of the blanket may be performed by a stylus method. In particular, when the above laser displacement meter is used, the measurement can be performed in a non-contact state with the blanket, so that there is no need to worry about contamination or deformation of the surface of the blanket.

The means of the ink solvent amount detection method and the blanket humidity control method are not limited to the above-mentioned methods.

[0053]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the embodiments described below, the printing apparatus shown in FIG. 1 was used. Here, reference numeral 105 denotes an intaglio plate of soda lime glass, and the pattern of the concave portions is 150 μm in width and 30 μm in length.
0μm, 8.0μm deep rectangular pad pattern, horizontal 7
There are 20 pieces and 240 pieces vertically. The ink used was a paste containing organic platinum (manufactured by NE Chemcat). As the solvent for diluting the ink, terpineol, D
BP (dibutylphthalic acid) was used.

As the blanket, a commercially available blanket having dimethyl silicone rubber as a surface layer was used.

(Embodiment 1) In the printing apparatus shown in FIG. 1, a sensor 12 shown in FIG.
Was set, and 50 sheets of continuous printing were performed on a blue plate glass with a tact time of about 70 seconds using the above-described ink, intaglio, and blanket. At that time, every two prints, the F shown in FIG.
The surface of the ATR probe of the T-IR was pressed perpendicularly to the blanket, and the manner in which the blanket was impregnated with the ink solvent was monitored.

After the printing was completed, the pattern of the printed body was observed in detail. After about the 20th sheet, the thickness of the ink in the rectangular portion near the center of the entire surface of the pattern gradually decreased. The distortion of the straight line part has come to be seen. This tendency is most remarkable on the 50th sheet, and the printing state seems to deteriorate as the ink solvent swells into the blanket.

FIG. 6 shows FT- which was actually monitored at this time.
3 shows an IR profile. It can be seen that the peak near 1730 cm -1, which was hardly detected in the third sheet, is clearly seen in the twentieth sheet, and is considerably large in the fifty sheet. By calculating the ratio of the peak area of this part to the peak area of dimethyl silicone near 1260 cm -1 as the internal standard, it is possible to determine how long the ink solvent must be impregnated into the blanket before printing failures begin to occur. It is possible to anticipate a defective product before it occurs, and to take some measures.

(Embodiment 2) The sensor 12, the controller 17, and the blanket humidity control section shown in FIG. 3 are set in the printing apparatus shown in FIG. 1, and 100 sheets are continuously printed in the same manner as in Embodiment 1. Was. FT-IR for blanket humidity control
Enter the degree of ink wetting calculated from the data of the above, solvent ink humidifying mechanism so that the value is in an appropriate range,
The controller controls the drying mechanism.

After the printing was completed, all the printed materials were inspected. As a result, there was almost no unevenness in the ink film thickness over the entire surface, and a printed material having good pattern linearity was obtained.

At this time, the ink solvent humidifying mechanism was not operated, but the blanket may be excessively dried depending on the type of ink solvent, the takt time, the opening ratio of the pattern, and the material of the blanket. A solvent humidification mechanism is also required.

(Embodiment 3) Hereinafter, a method of manufacturing an image display device in which device electrodes of electron-emitting devices formed by offset printing are formed will be described.

A pair of device electrodes (see 1102 and 1103 in FIG. 11) constituting the electron-emitting device were formed by printing on the glass substrate by the printing apparatus described in the above embodiment.
In this embodiment, the ink uses a Pt resinate paste (manufactured by NE Chemcat Corporation) made of an organic metal. About 80 ink transferred onto the glass substrate
After drying at ℃ for 10 minutes, it can be used as a device electrode mainly composed of Pt by baking at about 550 ° C. The thickness of the transferred ink on the glass substrate after printing and drying is about 3 μm. Further, the thickness of the fired Pt electrode was as thin as about 500 angstroms. Here, the device electrodes had a device electrode interval L as shown in FIG. 11, and the size was set to about 20 μm.

An electron source substrate can be manufactured by forming a conductive film composed of wiring and Pd fine particles on the element electrode formed as described above.

FIG. 8 shows an electron source substrate 401 and an acceleration electrode 4.
19, a substrate 415 on which a phosphor and a metal back are formed
FIG. 4 is a cross-sectional view of an image display device including:

Reference numeral 401 denotes an electron source substrate made of soda lime glass;
Reference numerals 402, 403, and 404 denote element electrodes formed by offset printing according to the present invention (formed in parallel to the paper surface in the vertical direction). 407, 408, 409 is Ag
This is a printed wiring having a thickness of about 7 μm obtained by screen printing and baking paste ink (formed parallel to the paper surface in a vertical direction). Device electrodes 402, 403, 4
Reference numeral 04 is connected to the printed wirings 407, 408, and 409, respectively. Reference numerals 405 and 406 denote conductive films (corresponding to 1104 in FIG. 11) made of Pd fine particles having a thickness of about 200 angstroms obtained by coating and baking an organic metal solution. The Cr thin film was patterned by a reverse etch method so as to be arranged. 410, 411, and 412 are plating wirings, which are formed on the printed wirings 407, 408, and 409 by Cu plating having a thickness of about 50 microns and a width of 400 microns.

Reference numeral 415 denotes a glass substrate made of soda lime glass, which faces the electron source substrate 401 at a distance of 5 mm. Phosphors 416 and 417 are arranged on the substrate 415 and are formed at positions corresponding to the electrode gaps composed of the device electrodes 402, 403, and 404 arranged on the opposing electron source substrate 401. Phosphor 416, 4
Reference numeral 17 denotes a slurry in which a photosensitive resin is mixed with a phosphor to form a slurry, which is coated and dried, and then patterned by photolithography. Reference numeral 418 denotes a metal back obtained by performing a filming process on the phosphors 416 and 417, forming an Al thin film having a thickness of about 30 nm by vacuum vapor deposition, and firing this to burn off the film layer. . The above phosphor and metal back are attached to the glass substrate 41.
The one formed on 5 is called a face plate.

Reference numeral 419 denotes a grid electrode disposed between the element substrate and the face plate.

After arranging the above in a vacuum envelope, a voltage is applied between the plating wirings 410, 411, and 412 to conduct the conduction of the conductive films 405, 406.
The gap portions 413 and 414 (1105 in FIG. 11)
). Thereafter, an electron extraction voltage of 5 kV is applied using the metal back 418 as an anode electrode, and the element electrode 4 is passed between the plating wirings 410, 411, and 412.
When a voltage of 14 V was applied from 02 and 403 to the conductive film 405, electrons were emitted. The emitted electrons were modulated by changing the voltage of the grid 419, and the amount of emitted electrons applied to the phosphor 418 could be adjusted. As a result, the phosphor 416 was able to emit light arbitrarily.

Similarly, when a voltage of 14 V was applied from the device electrodes 403 and 404 to the conductive film 406, electrons were emitted. The emitted electrons were modulated by changing the voltage of the grid 419, and the amount of emitted electrons applied to the phosphor 417 could be adjusted. Thereby, the phosphor 4
17 was able to emit light arbitrarily.

Although only two display pixels are shown in FIG. 8 for simplicity, a large number of pixels are formed by forming wirings and grids in a matrix and arranging and driving a large number of electron-emitting devices. Any image can be displayed by the display pixels.

There was no crosstalk between fluorescent luminescent spots caused by misalignment of a large number of electron-emitting devices and phosphors.
In addition, it is considered that there is little variation in luminance over the entire display region, which means that there is little variation in the shape and characteristics of the element electrodes formed by the offset printing method according to the present invention.

(Embodiment 4) Hereinafter, a printing apparatus and a printing method of the present invention and an image display apparatus of another form using the same will be described with reference to the following embodiments.

The operation will be described below with reference to FIG.

FIG. 9 is a top view showing a process for manufacturing a surface conduction electron-emitting device substrate of an image display device formed by using the manufacturing apparatus of the present invention. 9E, three electron-emitting devices were placed on a blue glass substrate (not shown).
In this example, a total of nine pieces are formed together with wirings in a matrix. In the figure, reference numeral 501 denotes an element electrode formed by the offset printing. In this embodiment, one electrode having a gap of 2 μm is 500 μm × 150 μm, and the other electrode is 350 μm × 20.
A pair of 0-μm rectangular electrodes are arranged in a matrix. Reference numeral 502 denotes a lower printed wiring formed by firing the printed Ag paste, and reference numeral 503 denotes a strip-shaped insulating layer orthogonal to the lower printed wiring formed by firing the printed glass paste. The insulating layer 503 has a cutout opening 504 at one electrode position of the pair of element electrodes 501. Reference numeral 505 denotes an upper printed wiring formed by baking the printed Ag paste, which is disposed in a strip shape on the insulating layer 503, and electrically connected to an electrode on one side of the element electrode 501 at an opening 504 of the insulating layer 503. Connected. The lower wiring 502, the insulating layer 503, and the upper wiring 505 are all formed by a screen printing method. 509 is P
This is a thin film composed of d fine particles, and wiring is formed on the element electrode 501 and the electrode interval.

Hereinafter, a method for manufacturing the element substrate will be described in order with reference to FIG.

As shown in FIG. 9A, in the first and second embodiments,
Prepare a 40 cm square electron source substrate on which a large number of paired device electrodes are formed by using the offset printing method described in the above.

Next, as shown in FIG. 9B, first, a first wiring (lower wiring) is formed on the substrate. Using a silver paste as the conductive paste, printing and baking are performed by a screen printing method to form a lower wiring having a width of 100 μm and a thickness of 12 μm.

Next, as shown in FIG. 9C, an interlayer insulating film is formed by a screen printing method in a direction orthogonal to the lower wiring. The paste material is a glass paste obtained by mixing a glass binder and a resin with lead oxide as a main component.
This glass paste is repeatedly printed and fired twice by a screen printing method to form interlayer insulation in a stripe shape.

Next, as shown in FIG. 9D, a second wiring (upper wiring) is formed on the interlayer insulation. An upper layer wiring having a width of 100 μm and a thickness of 12 μm is formed by a screen printing method in the same manner as the lower wiring, and a matrix wiring in which the stripe-shaped lower layer wiring and the stripe-shaped upper layer wiring are orthogonal to each other via an interlayer insulating film is formed.

Next, as shown in FIG. 9E, a conductive film is formed. First, organic palladium is applied on a substrate on which element electrodes and wirings are formed by an inkjet method, and then 300 p.
A heat treatment is performed at 10 ° C. for 10 minutes to form a conductive film made of PdO. Its thickness is 10 nm. The fine particle film here is a film in which a plurality of fine particles are aggregated, and not only a state in which the fine particles are individually dispersed and arranged, but also a state in which the fine particles are adjacent to each other or overlapped (including an island shape).
And the particle diameter refers to the diameter of the fine particles recognizable in the above state. Through the above steps, the electron source substrate before the forming is completed.

The 480 × 480 electron-emitting devices are arranged in a matrix on a 40-cm-square substrate with an electron source substrate, and a face plate having phosphors corresponding to R, G, and B is surrounded by a vacuum. Placed in the vessel. Thereafter, the electron-emitting device was energized to form a gap in the conductive film and an electron-emitting portion in the conductive film. An arbitrary voltage signal of 14 V was sequentially applied to the upper printed wiring of this element substrate, and a potential of 0 V was applied to the lower printed wiring for scanning. The other lower printed wiring was set to a potential of 7 V. When an anode voltage of 5 kV was applied to the metal back of the face plate,
Arbitrary images could be displayed. Further, as in the case of Example 3, there was little luminance variation over the entire element region.

(Embodiment 5) In the printing apparatus shown in FIG. 1, the sensor 12 which is a laser displacement meter for detecting the state of the blanket shown in FIG. 5 is set, and the above-described ink, intaglio and blanket are used. Then, 50 sheets were continuously printed on a blue sheet glass with a tact time of about 180 seconds. At that time, the surface height of the blanket corresponding to the substantially central portion of the print pattern was measured with a laser displacement meter every five printings. FIG.
Is a graph showing the relationship between the surface height of the blanket and the number of printed sheets, where the standard of the surface height of the blanket is set to zero immediately before printing the first sheet and the direction in which the surface is raised is set to +.

After the printing was completed, the printed pattern of the printed body was observed in detail. As a result, poor transfer of ink began to appear from the 22nd sheet, and the amount of transfer failure gradually increased. I confirmed that it would go.

As a result, it was found that, under the printing conditions in the present embodiment, the threshold at which the printing failure occurred due to the swelling of the blanket was a measured surface height of the blanket of about 15 microns.

(Embodiment 6) The sensor 12, the controller 17, and the blanket humidity controller shown in FIG. 5 are set in the printing apparatus of FIG. 1, and 100 sheets are continuously printed in the same manner as in Embodiment 5. Was. In the blanket humidity control section, input the degree of ink wetting calculated from the data of the surface height of the blanket, and control the humidifying mechanism and the drying mechanism of the blanket with the controller 17 so that the surface height of the blanket falls within 10 microns or less. did.

After the printing was completed, all the printed matters were inspected. As a result, printed matters having almost no unevenness of the ink film thickness over the entire surface and good linearity of the pattern were obtained.

Note that using the printing apparatuses of Embodiments 5 and 6,
The image display devices of the third and fourth embodiments were created.
And 4, similar results were obtained.

[0088]

According to the present invention described above, it is possible to provide a printing apparatus capable of extremely reducing the occurrence of defective prints. Further, according to the present invention, it is possible to provide a method of manufacturing a printed circuit board capable of forming a member having a desired pattern on a substrate with good reproducibility. Further, according to the present invention, it is possible to provide a method of manufacturing an electron source capable of forming a plurality of electron-emitting devices on a substrate with good reproducibility. According to the present invention,
It is possible to provide a method for manufacturing an image display device capable of manufacturing an image display device capable of displaying a high-quality image with high reproducibility. Further, according to the present invention, it is possible to provide a method of manufacturing a printed circuit board, an electron source, and an image display device, which can significantly improve the yield.

[Brief description of the drawings]

FIG. 1 is a partial top view of a printing apparatus according to the present invention.

FIG. 2 is a side view illustrating a printing process performed by the printing apparatus in FIG. 1;

FIG. 3 is a partial conceptual view of a printing apparatus according to the present invention.

FIG. 4 is a cross-sectional view of an FT-IR ATR probe.

FIG. 5 is another conceptual diagram of the printing apparatus of the present invention.

FIG. 6 is a chart showing an example of an ATR spectrum.

FIG. 7 is a diagram showing an example of the number of prints and the degree of swelling of a blanket.

FIG. 8 is a cross-sectional view illustrating an image display device according to a third embodiment of the present invention.

FIG. 9 is a top view illustrating an image forming apparatus according to a fourth embodiment of the present invention.

FIG. 10 is a top view showing a surface conduction electron-emitting device.

FIG. 11 is a top view showing a surface conduction electron-emitting device.

DESCRIPTION OF SYMBOLS 12 Sensor 13 Moisture absorbing sheet 14a, 14b, 14c Roller 15 Drying mechanism 16 Humidifying mechanism 17 Controller 21 Sensor head 22 ATR crystal 28 Optical fiber 29 Laser light 101 Inking station 104 Ink roller 105 Intaglio 106 Work (printing) Body) 113 blanket

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H05K 3/12 630 B41F 31/02 S // B41F 13/08 33/14 Z

Claims (11)

[Claims] 1. An offset printing apparatus for transferring an ink pattern to a printing medium via a blanket, the printing apparatus comprising: a detecting unit for detecting an amount of an ink solvent impregnated in the blanket. 2. The printing apparatus according to claim 1, wherein said detecting means includes means for detecting reflected light from said blanket. 3. The printing apparatus according to claim 1, wherein said detecting means includes means for measuring a thickness of said blanket. 4. The printing apparatus according to claim 1, further comprising control means for controlling an amount of the ink solvent impregnated in the blanket based on an output of the detection means. . 5. The printing apparatus according to claim 4, wherein said control means includes means for maintaining an amount of an ink solvent impregnated in said blanket within a desired range. 6. A method for manufacturing a printed circuit board, wherein a member of a desired pattern is formed on a substrate by printing, wherein the printing is performed by using the printing apparatus according to claim 1. A method for producing a printed circuit board. 7. A method of manufacturing a printed circuit board, wherein a conductive member having a desired pattern is formed on a substrate by printing, wherein the printing is performed by using the printing apparatus according to claim 1. A method of manufacturing a printed circuit board, wherein the method is performed using the method. 8. A method for manufacturing an electron source, comprising: a plurality of electron-emitting devices on a substrate; and wirings for connecting the plurality of electron-emitting devices, wherein the plurality of electron-emitting devices are provided. A method for manufacturing an electron source, comprising manufacturing using the printing apparatus described in any one of the above. 9. A plurality of electron-emitting devices each including a pair of electrodes, a conductive film having an electron-emitting portion between the pair of electrodes, and wiring for connecting the plurality of electron-emitting devices are formed on a substrate. A method of manufacturing an electron source comprising: a pair of electrodes of the plurality of electron-emitting devices;
A method of manufacturing an electron source, wherein the method is performed by using the printing apparatus described in any one of the above. 10. The method according to claim 8, wherein the wiring of the electron source is formed using a screen printing method. 11. An electron source having, on a substrate, a plurality of electron-emitting devices, wiring for connecting the plurality of electron-emitting devices, and a phosphor that emits light by receiving electrons emitted from the electron source. A method for manufacturing an image display device, comprising: manufacturing the electron source by the method according to claim 8.