JP2000158157A - Minute convex/concave shaped material, coating structural material using it, lining substrate, and powder fluid transferring member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a minute shaped material which has controlled uniform concave parts and performs stable performance by equipping the material with openings of a given dimension which are almost regularly arranged on the surface, and providing approximately constant dimension from an opening side to a bottom face side and a given surface open area ratio. SOLUTION: Size of an opening is 5-100 μm, and surface open area ratio is 40-95%. If the surface is abraded, an exposed area ratio of a coating material 101 adhered to a convex part 102 is kept constant and the original performance is maintained. Preferably, the coating structural material is composed by adhering a functional coating material to a concave part of the minute convex/concave shaped material, and also the lining substrate is used for forming a thick membrane of 500 μm or more on the surface of the minute convex/concave shaped material, wherein depth of the concave part is equal to or larger than the dimension of the opening. Additionally, a powder fluid transferring member clamps and transfers the powder fluid to the concave part of the minute convex/concave shape, and the functional coating material is adhered by 70 nm-4 μm to the entire face at the concave part depth of 5-50 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine irregular shape having a surface formed by irradiating a laser beam, a coating structure using the same, a lining substrate, and a powder fluid conveying member. About.

[0002]

2. Description of the Related Art Methods of forming fine irregularities of 100 μm or less on a substrate surface include dry blasting, wet honing, shot pinning, chemical etching, mold pressing, knurling, crack plating, and aluminum plating. There are an oxidation method, a particle-containing coating method, a metal or ceramic spraying method, and the like. These fine irregularities are used for various purposes such as an increase in frictional resistance, an improvement in slippage due to point contact, an improvement in adhesiveness of a coating material, and a retention of powder and liquid.

However, the surface shape of the fine unevenness formed by these methods is non-uniform, and the same shape cannot be formed with good reproducibility, resulting in a problem that the performance of the material to which this is applied varies. Was. In addition, in the method of shaving the surface when forming a fine irregular shape such as a dry blast method, or in a method in which a molten material swells on the surface such as a thermal spraying method, the initial base material size cannot be maintained, and these However, there is a problem that the fine unevenness formed by the above method is not suitable for applications requiring dimensional accuracy.
Further, in these methods, it is difficult to control the shape in the depth direction, and it is difficult to control the amount of powder or liquid held.

[0004] Therefore, in various applications, fine irregularities having regularly arranged and controlled uniform depressions, fine irregularities capable of maintaining the original substrate dimensions, depth direction The shape of the fine irregularities whose shape is controlled is
Was sought.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a fine uneven shape which can exhibit stable performance by a fine uneven shape having regularly arranged and controlled uniform concave portions. It is in. It is another object of the present invention to provide a fine uneven shape that can maintain the initial base material dimensions and is most suitable for applications requiring dimensional accuracy. Still another object of the present invention is to provide a coating structure, a lining substrate, and a powder fluid transport member using these fine irregularities.

[0006]

As a result of intensive studies, the inventors have found that the above-mentioned object can be solved by the following means, and have completed the present invention. That is, the fine uneven shape of the present invention is a fine uneven shape formed by forming a large number of fine recesses on the surface by irradiating a laser beam.
m, wherein the size of the openings is substantially constant from the opening side to the bottom side, is arranged substantially regularly on the surface, and has a surface aperture ratio of 40 to 95%.

[0007] The coating structure of the present invention is characterized in that a functional coating material is fixed to each of the concave portions formed in the fine unevenness of the present invention.

[0008] A lining substrate of the present invention is a lining substrate for providing a thick film having a thickness of 500 µm or more on the surface thereof using the fine unevenness of the present invention. Characterized in that it is equal to or larger than the size of.

A powder fluid transporting member according to the present invention is a powder fluid transporting member for carrying a powder fluid in a concave portion thereof and transporting the fine fluid using the fine uneven shape of the present invention.
５０50 μm. It is preferable that the powdery fluid conveying member is formed by fixing a functional coating material with a thickness of 70 nm to 4 μm on the inner wall surface of the concave portion or the entire surface of the fine uneven shape.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION The fine concave-convex shaped body of the present invention has a large number of fine concave portions formed on its surface by irradiating a laser beam. Laser light can oscillate ON and OFF as calculated by pulse and Q switch,
An automatic focusing mechanism for the workpiece, a two-dimensional or three-dimensional precision digital moving mechanism for the focal point or the processing point can be used to irradiate a predetermined position, so that the recesses are regularly arranged and controlled, and are uniform. Can be formed. In addition, since a necessary portion of the workpiece can be instantaneously melted and scattered by strong energy, a concave portion can be formed while maintaining the original base material size, which is optimal for surface treatment of precision parts. In addition, the laser light has straightness, and can form a columnar concave portion whose shape in the depth direction is controlled.

As the laser used for forming the fine irregularities of the present invention, a carbon dioxide laser having a large energy capacity,
YAG lasers and excimer lasers are preferred.

The substrate can be used without limitation as long as it absorbs laser light. For example, paper, wood, stone, various plastics, rubber, metal, glass, and ceramics can be used. In the case of a material having a low laser light absorption or a high reflectance, a similar fine unevenness can be formed by irradiating a laser after providing a layer for absorbing the laser light on the surface.

When irradiating the laser, it is preferable to apply a chemical heating substance such as oxygen gas or air to the molten portion in order to shorten the processing time. Preheating the workpiece is also effective. In addition, in order to avoid the cooling and fixing of the molten evaporant on the surface, a method of performing a surface treatment in advance to facilitate the removal of the adhered matter on the surface of the workpiece, and high-speed injection of gas to the focal point to melt the evaporate. Is preferably employed.

(Coating Structure) Conventionally, lubricating materials such as silicone and fluororesin
Fix a functional coating material such as non-stick material,
Various coating structures provided with lubricating performance and non-adhesive performance have been proposed. These are used for members exposed to friction, such as sliding members, and are intended to prevent abrasion due to friction by lowering frictional resistance and to prevent adhesion of substances by lowering surface resistance. However, in a coating structure using a conventional substrate roughened by a blast method or the like, the initial lubrication performance,
There was a problem that non-adhesive performance could not be maintained. FIG.
2 shows cross-sectional views of a conventional coating structure before and after abrasion. FIG. 13A shows a state before abrasion, and FIG. 13B shows a state after abrasion. 100 is a substrate, 101 is a coating material, 102
Is a concave portion. In a conventional coating structure, FIG.
As shown in the figure, since the concave portion 102 of the base material 100 becomes narrower as it goes downward, the exposed area ratio of the lubricating material and the non-adhesive material 101 decreases with the surface wear, and the lubricating performance and the non-adhesive performance decrease. Is what you do.

The present invention has been made in view of the above problems, and a coating structure of the present invention has a coating structure in which a functional coating material is fixed to each of concave portions formed in a fine uneven shape. The concave portion formed in the fine uneven shape body has a size of each opening of 5 to 100 μm, and the size of the opening is substantially constant from the opening side to the bottom side, and the size of the opening is They are arranged almost regularly and have a surface aperture ratio of 40 to 95%.

The concave portion may be groove-shaped or column-shaped. When the concave portion is formed, the cross-sectional shape may be any of a circle, an ellipse, a polygon, and the like, but the size of the opening is substantially constant from the opening side to the bottom side. You need to be. FIG. 1 is a sectional view showing a coating structure of the present invention before and after abrasion. FIG. 1A shows a state before wear, and FIG. 1A shows a state after wear. 100 is a substrate, 1
01 is a coating material and 102 is a concave portion. With such a configuration, as shown in FIG. 1, even if the surface is worn, the exposed area ratio of the functional material 101 fixed to the concave portion 102 is kept constant, and the initial performance can be maintained. it can. Note that the size of the opening can be made substantially constant from the opening side to the bottom side by controlling the focal position of the laser beam. Further, the depth of the concave portion can be adjusted by changing the irradiation time of laser light and the number of pulse oscillations.

The size of the opening of each concave portion is 5 to 100 μm, preferably 10 to 80 μm. If the size of the opening exceeds 100 μm, the area occupied by each concave portion becomes large, and microscopic uniformity is lost. On the other hand, the size of the opening is limited to 5 μm. here,
The “size of the opening” is the size of the opening in the horizontal cross section of each concave portion, which means the width when the concave portion is groove-shaped, and the diameter when the concave portion is column-shaped. Also, oval,
In the case of a polygon, the aperture means the maximum diameter passing through the center point.

The arrangement of the concave portions is not particularly limited as long as it has a substantially constant regularity. FIG. 2 shows an example of a regular array. As shown in FIG. 2A, the concave portions may be arranged at predetermined intervals so as to be located at the vertices of a square.
As shown in (B), the concave portions may be arranged at predetermined intervals so as to be located at the vertices of a triangle.

FIG. 3 shows a specific example of the fine uneven shape body. In the fine irregularities shown in FIG. 3A, columnar concave portions are almost regularly arranged on the surface of the roll-shaped substrate. r is the diameter of the recess, and d is the depth of the recess. FIG.
In the fine uneven shape body of (B), groove-shaped concave portions are almost regularly arranged on the surface of the roll-shaped substrate. w is the groove width of the recess, and d is the depth of the recess.

The surface opening ratio of the fine unevenness is 40 to 95.
%, Preferably in the range of 50 to 90%. 40
%, The function of the coating material is not exhibited, and
%, The dimensional accuracy of the substrate itself cannot be maintained. Here, the surface aperture ratio of the fine unevenness refers to (total area of the opening per unit surface area / unit surface area before opening). For example, as shown in FIG. 4, when the perfect circles are densely aligned, the surface aperture ratio is 90.7%. The shape may be an equilateral triangle, a square, a pentagon, or a hexagon, and the sides may be close to each other.

Functional coating materials include non-adhesive materials, abrasion resistant materials, antifouling materials, hydrophilic materials, heat conductive materials, water repellent materials, antibacterial materials, lubricating materials, and antistatic materials. Materials. These materials can be used in the form of powder, fluid (water or solvent dispersion type), semi-solid, and elastomer. Among these, examples of the non-adhesive material include a silicone polymer, a mixture of a silicone polymer containing up to 10% of silicone oil, and a fluororesin represented by polytetrafluoroethylene.

The functional coating material is applied to the fine irregularities of the fine irregularities, baked, cured, etc.
Fix it. Spray coating, electrostatic coating,
It is performed by dip coating, pouring, or the like. In the case of a powdery material, electrostatic coating is preferred, and in the case of a liquid material, pouring or spray coating is preferred.

There are four modes of fixing the functional coating material as shown in FIGS. 5A to 5D, and can be appropriately selected according to the purpose. The coating thickness of the coating material can be appropriately changed according to the purpose. For example, in the case of use of non-adhesive and abrasion resistance, FIG.
As shown in FIG. 5A, the functional coating material may be fixed only to the bottom of the concave portion, and as shown in FIG. 5B, the functional coating material may be fixed to the entire inner wall surface of the concave portion. Is also good. The coating thickness in that case is 70 nm to 4 μm
It is. When used as a sliding member, as shown in FIG. 5C, it is preferable to fill the entire concave portion with a functional coating material so as to fill the concave portion. FIG.
As shown in (D), the entire concave portion may be filled with a functional coating material, and the functional coating material may be further fixed so as to cover the entire surface of the fine unevenness. In this case, the coating thickness is 5 to 30 μm, preferably 1 to 30 μm.
0 to 25 μm.

(Lining Substrate) A so-called lining in which an organic polymer compound or the like is coated on a metal substrate in a thick film is formed by coating the lining material with the metal substrate when heating and cooling are repeated if the lining layer is too thick. Because the lining layer is easily peeled off due to the difference in the coefficient of thermal expansion between
Conventionally, the thickness is set to about 500 μm, but the permeability of a substance causing metal corrosion such as water or oxygen decreases in inverse proportion to the thickness of the lining layer. For the purpose of improving corrosion resistance, a lining of a thicker film is desired. But,
250-400 ° C for surface roughening treatment with caustic soda
However, the blasting process has a problem that a sufficient adhesive strength between the thick film lining material and the metal base material cannot be obtained.

The present invention has been made in view of the above problems, and the lining substrate of the present invention is a lining substrate for providing a thick film having a thickness of 500 μm or more on its surface. Particularly suitable for thick film linings.

The size of the opening of each recess formed in the substrate is 5 to 100 μm, and the size of the opening is substantially constant from the opening side to the bottom side, and the recesses are substantially regular on the surface. The surface aperture ratio is 40 to 95%,
The depth of the concave portion is a fine uneven shape having a size equal to or larger than the size of the opening.

The size of the opening of each recess is 5 to 100 μm, preferably 10 to 80 μm, as in the case of the coating structure. When the diameter exceeds 100 μm,
Since the area occupied by each concave portion increases and the number of contact points decreases, the adhesive strength between the lining material and the substrate becomes insufficient. On the other hand, the size of the opening is limited to 5 μm.

The size of the opening of the recess needs to be substantially constant from the opening side to the bottom side, as in the case of the coating structure. With this configuration, the lining material and the substrate are firmly bonded. Further, the depth of the concave portion is 5 to 100 μm, more preferably 10 to 80 μm. If the depth of the concave portion is less than 5 μm, the adhesive strength between the lining material and the substrate becomes insufficient, and if it exceeds 100 μm, it becomes difficult to finish the processed lining surface smoothly.

The surface aperture ratio of the fine uneven shape is also in the range of 40 to 95% as in the case of the coating structure.
A range of 50 to 90% is preferred. If it is less than 40%, the number of contact points is reduced, so that the adhesive strength between the lining material and the substrate becomes insufficient. If it exceeds 95%, the surface strength of the substrate itself is reduced, which is not preferable.

The sectional shape of the concave portions and the arrangement of the concave portions are the same as in the case of the coating structure. Further, as the lining material, the same material as the functional coating material of the coating structure can be used.

(Powder Fluid Conveying Member) In an electrophotographic copying machine or printer using a magnetic developer, a magnet roller for conveying the developer to a photosensitive member while rotating the developer is used. The magnet roller is a metal drum made of aluminum or the like having a fine irregular surface on its surface. By incorporating a magnet, the developer is applied mainly by magnetic force to form a photoconductor on which an electrostatic latent image is formed. The developer is transported to the surface.
The developed image visualized by the developer is transferred to a recording medium such as paper and fixed by a heat roller or the like to obtain a copy.

However, in a conventional magnet roller roughened by a blast method or the like, since the unevenness of the surface is not uniform, the developer cannot be uniformly transported over the entire surface of the photosensitive member.
There is a problem that image quality defects easily occur. In addition, in these magnet rollers, the surface is generally coated with a release material to prevent the accumulation of the developer. However, when the coating is applied on the conventional saw-toothed uneven shape, the uneven shape is obtained. There is a problem that the structure itself does not get caught and the developer carrying ability is reduced.

The present invention has been made in view of the above problems, and a powder fluid transport member of the present invention is a powder fluid transport member for carrying and transporting a powder fluid in a concave portion of a fine uneven shape. The size of each opening of the concave portion formed in the fine uneven shape is 5 to 100 μm, and the size of the opening is substantially constant from the opening side to the bottom side, and is substantially regularly formed on the surface. Are arranged, and the surface aperture ratio is 40-95%
Wherein the depth of the concave portion is 5 to 50 μm.

The size of the opening of each concave portion is 5 to 100 μm, preferably 10 to 80 μm, as in the case of the coating structure. When the diameter exceeds 100 μm, the area occupied by each concave portion increases, and microscopic uniformity is lacking. For this reason, the powder fluid carrying amount per minute unit area is biased. On the other hand, the size of the opening is limited to 5 μm.

The size of the opening of the concave portion needs to be substantially constant from the opening side to the bottom side as in the case of the coating structure. With such a configuration, it is possible to increase the powder fluid transfer capacity. The depth of the concave portion is 5 to 50 μm, and more preferably 10 to 40 μm. If the depth of the recess is less than 5 μm, the powder fluid carrying capacity becomes insufficient, and if it exceeds 50 μm, the recess may be clogged.

The surface aperture ratio of the fine unevenness is also in the range of 40 to 95% as in the case of the coating structure.
A range of 50 to 90% is preferred. If it is less than 40%, it becomes difficult to uniformly support the powdery fluid, and if it exceeds 95%, the surface strength of the substrate itself decreases, which is not preferable. The cross-sectional shape of the concave portions and the arrangement of the concave portions are the same as those of the above-mentioned fine uneven shape body.

The non-adhesive material may be fixed to the surface of the powdery fluid conveying member of the present invention. The fixation may be performed only on the inner wall surface of the concave portion as shown in FIG.
May be performed on the entire surface as shown in FIG. By fixing the non-adhesive material, it is possible to prevent the accumulation of the granular material in the concave portion.Furthermore, by fixing the non-adhesive material, the inner volume of the concave portion is adjusted, and the amount of the granular material carried is reduced. Can be adjusted. The thickness of the non-adhesive material is 70 nm to 4 μm, preferably 0.1 to 3 μm.

As the non-adhesive material, all conventionally known non-adhesive materials can be used, and examples thereof include fluororesin-based materials, silicone resin-based materials, and blended materials thereof. The method of fixing the non-tacky material is the same as that of the coating structure.

[0039]

Examples Examples and comparative examples of the coating structure are shown below. Example 1 (Scissors) Scissors bases 101 and 202 in which a concave portion having a diameter and a surface aperture ratio shown in Table 1 were formed on a cutting edge portion of a commercially available scissors using a Q-switch YAG laser processing machine (manufactured by HOYA Containium). , 203 were produced. The scissor base manufactured by laser processing maintained the dimensions before processing. Further, a scissor base 204 having a recess formed by blast processing using No. 60 abrasive material "FUJI RANDOM" manufactured by Fuji Manufacturing Co., Ltd. was produced. The dimensions of the scissor base produced by blasting were different from those before processing.

On the obtained substrate, a non-adhesive paint “L-6541GY” manufactured by Tokyo Silicone Co., Ltd. was spray-coated to a thickness of 2 μm, and the paint adhering to portions other than the concave portions was wiped off, followed by baking. To obtain non-stick scissors. Using the obtained scissors, a commercially available cloth gum tape (Nichiban Co., Ltd.) was cut 60,000 times, and the sharpness during the cut was sensory evaluated.
Table 1 shows the evaluation results.

[0041]

[Table 1]

As can be seen from Table 1, the substrate 10 of the present invention
The scissors using No. 1 were able to stably maintain the performance (non-adhesive performance) from the beginning of production until after cutting 60,000 times. On the other hand, the scissors of the comparative example using the base 201 having a small surface aperture ratio, the base 202 having a large diameter of each concave portion, and the base 203 manufactured by blasting were inferior in performance (non-adhesive performance).

Example 2 (Sliding Member) Using a Q-switch YAG laser beam machine (manufactured by HOYA Containium), a mirror-finished aluminum metal plate (60 mm × 100 mm × 2 mm) was used. Sample plate 1 having concave portions with surface aperture ratio formed
02, 103, 204 and 205 were produced. FIG. 7 is a schematic view showing a processing portion of the laser processing machine. In FIG. 7, 2 is a sample plate, 3 is an XY table, 4 is a reflecting mirror,
Reference numeral 6 denotes a lens, and 8 denotes a concave portion. In this laser processing machine,
The light passing through the lens 6 is reflected by the reflecting mirror 4 and the sample plate 2
XY table 3 is set to focus on
Are moved in the X and Y directions under NC control, so that the concave portions are formed on the sample plate 2 in a regular arrangement. The sample plate manufactured by the laser processing substantially maintained the dimension before the processing in the thickness direction. In addition, a commercially available aluminum metal plate 206 having a surface with irregularities formed by sandblasting was prepared for comparison.

A paint "L-4111BKM" made by Tokyo Silicone Co., Ltd., containing molybdenum disulfide and polytetrafluoroethylene as main components, was spray-coated on each sample plate until the recesses were completely filled. After the adhered paint was wiped off, baking was performed at 280 ° C. for 30 minutes to obtain a coating structure.

[0045] The resulting coating structure was measured dynamic friction coefficient mu _K using Rhesca friction tester (KK Rhesca). Using a thrust abrasion tester “Thrust Abrasion Tester” manufactured by Tokyo Silicone Co., Ltd.
The wear amount of each coating structure was measured under the condition that the V value was 93 kg / cm sec. Table 2 shows the evaluation results. Also shows the time course of the dynamic friction coefficient mu _K in FIG.

[0046]

[Table 2]

[0047] As can be seen from 2 and 8 Metropolitan table, sample plate 102 of the coating structure using the present invention, not only less wear, it was possible to maintain the dynamic friction coefficient mu _K lower after abrasion . On the other hand, the coating structure of the comparative example using the sample plate 204 having a small surface aperture ratio and the sample plate 205 having a large diameter of each concave portion,
The coefficient of kinetic friction μ _K was large from the beginning, and the wear was fast. The coating structure of the comparative example using the sample plate 206 produced by blasting had good initial performance (dynamic friction coefficient μ _K , wear amount), but had a dynamic friction coefficient μ _K after abrasion.
Is high, indicating that the performance could not be maintained.

Embodiment 3 (Precision Sliding Pin) In a servo mechanism of an optical disk reproducing apparatus, a diameter of 1.5 to 2.0 m is used as a support shaft for a moving lens.
m, a length of 10 to 12 mm, a roundness of 0.005 and a cylindricity of 0.01 mm, using a Q switch YAG laser processing machine (manufactured by HOYA Containium) on the sliding part of a stainless steel precision pin. A regular hexagonal screen is placed between the light-emitting device and a concave part having a cross-sectional shape shown in FIG. , 207 and 208 were obtained. When the outer diameter before and after the processing of the substrate manufactured by laser processing was measured, the change in the outer diameter before and after the processing was only 2-3 μm. In addition, a substrate 209 having a recess formed by blasting using No. 60 abrasive material “FUJI RANDOM” manufactured by Fuji Manufacturing Co., Ltd. was produced. The base made by blasting is 5 μm in size before processing
It was different.

A coating “L-4111BKM” made by Tokyo Silicone Co., Ltd. containing molybdenum disulfide and polytetrafluoroethylene as main components was spray-coated on the base of the obtained precision pin until the recess was completely filled. After wiping off the paint adhering to the other parts, baking was performed at 200 ° C. for 30 minutes to obtain precision pins for sliding.

With respect to the obtained precision pin for sliding, 120
The sliding characteristics after use for a long time were evaluated. The evaluation was performed by using a servo mechanism of an actual optical disc reproducing apparatus, using a modified lens for forcibly operating the lens, and measuring a force required for moving the lens. Table 3 shows the results.

[0051]

[Table 3]

As can be seen from Table 3, the substrate 10 of the present invention
The precision pin for sliding using 4, 105 uses a substrate 207 having a very small force (mg) required to move the lens even after use for 120 hours, a substrate 207 having a small surface aperture ratio, and a substrate 208 having a large diameter of each concave portion. It was less than half of the precision pin of the comparative example used and the precision pin of the comparative example using the substrate 209 produced by blasting, and the performance (sliding characteristics) could be maintained even after long-term use.

Examples for thick film lining substrates,
Comparative examples are shown below. Example 4 (Substrate for thick film lining) A mild steel sample plate (60 mm x 100 mm x 2) was measured using a pulsed carbon dioxide laser beam machine (manufactured by Mitsubishi Electric Corporation).
mm), metal plates 106, 107, 210, 211, and 21 each having a concave portion having a diameter and a surface aperture ratio shown in Table 4.
2 was produced. The sample plate manufactured by the laser processing substantially maintained the dimension before the processing in the thickness direction. In addition, a sample plate 213 in which a concave portion was formed by blasting using the No. 60 abrasive material “FUJI RANDOM” manufactured by Fuji Manufacturing Co., Ltd. was formed on the same mild steel sample plate.
The dimensions of the sample plate produced by blasting were different from those before processing.

A lining layer (coating film) was formed on each sample plate by applying a corrosion-resistant powder coating material “Teflon PFA” manufactured by Mitsui Fluoro Dupont Co., Ltd. to a thickness of 0.8 mm by electrostatic powder coating. Thus, a composite structure was obtained. The adhesive strength between the sample plate and the thick film lining layer was evaluated based on the peel strength of the thick film lining layer from the sample plate. The evaluation was performed on a composite structure on which a thick film lining layer was formed after giving a heat history by repeating a cycle of 30 minutes at normal temperature and 30 minutes at 250 ° C. ten times.

Each position (5) on the surface of the composite structure shown in FIG.
The peel strength was measured for the hatched portions).
FIG. 11 shows the peel strength measuring apparatus used. In FIG. 11, reference numeral 10 denotes a composite structure, 12 denotes a coating film, 14 denotes an end of the peeled coating film, 16 denotes a clamp, and 18 denotes a spring.
At each position shown in FIG. 10 on the composite structure 10, a cut is made in the coating 12 with a width of 10 mm, and the end 14 of the coating which has been partially peeled is fixed to the clamp 16, and
, The spring 18 is pulled up in the direction perpendicular to the composite structure 10 (in the direction of arrow A), and the peeling of the coating film is continuous, and the spring 18 is peeled at a stable speed. Was read, and this was taken as the peel strength. Table 4 shows the results.

[0056]

[Table 4]

As can be seen from Table 4, the composite structure using the sample plates 106 and 107 of the present invention has excellent adhesive strength between the sample plate and the thick lining layer. A composite structure of a comparative example using a sample plate 210 having a short depth of each recess, a sample plate 211 having a small surface aperture ratio, and a sample plate 212 having a large aperture of each recess,
It can be seen that the adhesive strength of the composite structure of the comparative example using the sample plate 213 manufactured by blasting is about half.

Examples and comparative examples of the powder fluid conveying member are shown below. Example 5 (Powder fluid conveying member) A mirror-finished aluminum sample plate (60 mm × 90 mm) was prepared in the same manner as in Example 2 using a Q-switch YAG laser processing machine (manufactured by HOYA Containium).
× 2 mm), sample plates 108, 109, 214, 21 each having a concave portion having a diameter and a surface aperture ratio shown in Table 5.
5, 216 were produced. The sample plate manufactured by the laser processing substantially maintained the dimension before the processing in the thickness direction. Also, on the same aluminum sample plate,
80 of Fuji random, an abrasive manufactured by Fuji Manufacturing Co., Ltd.
Sample plates 217 and 218 having recesses formed by blasting using No. 120 were manufactured. The dimensions of the sample plate produced by blasting were different from those before processing.

Using these sample plates, the developer carrying capacity and the carrying accuracy were evaluated. Figure 1 shows how to evaluate the transfer capacity
2 will be described. In FIG. 12, reference numeral 20 denotes a sample plate, 22 denotes a container, and 24 denotes a toner for a copying machine. The obtained sample plate 20 is placed on a toner for a copying machine (manufactured by Sharp Corporation) 24 placed in a container 22 with the laser processing surface facing upward.
The insertion was performed at an angle of 0 to 70 degrees, this was lifted at a constant speed, the toner on the sample plate 20 was collected, and the weight was measured. The evaluation of the transport accuracy was performed by measuring the weight of the toner transported by the same method five times for each sample plate, and taking the difference between the maximum value and the minimum value. The smaller the difference, the better the transport accuracy.

[0060]

[Table 5]

From Table 5, it can be seen that the sample plates 108, 1
It can be seen that the powder fluid transporting member using No. 09 has not only excellent transporting ability but also excellent transporting accuracy. In the powder fluid conveying member of the comparative example using the sample plate 214 in which the depth of each recess is insufficient and the sample plate 215 having a small surface aperture ratio, the sample plate 216 having a low carrying capacity and a large diameter of each recess was used. The powder-fluid conveying member of the comparative example has the conveying ability but the conveying accuracy is low, and the conveying ability and the conveying accuracy are not compatible with the powder-fluid conveying member of the comparative example using the sample plates 217 and 218 manufactured by blasting. I understand.

Example 6 (Magnet Roller) Using a Q-switch YAG laser beam machine (manufactured by HOYA Continuum Co.), a mirror-finished aluminum metal drum (diameter 20 mm, length 210 mm) has a diameter of 10 μm and a depth of 10 μm. A 5 μm concave portion was formed at a surface aperture ratio of 85%, and a non-adhesive paint “L4101GN” manufactured by Tokyo Silicone Co., Ltd. was applied to the entire surface of the obtained substrate to produce a magnet roller. This magnet roller was mounted on an electrophotographic copying machine manufactured by Fuji Xerox Co., Ltd. to form a line image. There was no deviation in the amount of toner adhering between the central portion and the peripheral portion of the recording paper. Also, the magnet roller did not show any toner accumulation or solidification even after long-term use, and was excellent in mold release performance. On the other hand, when a line image was similarly formed using a commercially available magnet roller,
Insufficient amount of toner, line image is missing around the recording paper,
Thinning was seen.

[0063]

According to the present invention, there is provided a fine unevenness which can exhibit a stable performance by a fine unevenness having regularly arranged and controlled uniform concave portions. In addition, it is possible to maintain the initial base material dimensions, and to provide a fine concave-convex shape body most suitable for applications requiring dimensional accuracy.
Further, a coating structure, a lining substrate, and a powder-fluid conveying member using these fine irregularities are provided.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a surface state of a coating structure of the present invention before and after abrasion.

FIG. 2 is a diagram showing an example of arrangement of concave portions.

FIG. 3 is a perspective view showing a specific example of a fine uneven shape body.

FIG. 4 is a diagram showing an example of arrangement of concave portions.

FIG. 5 is a cross-sectional view showing a mode of fixing a functional coating material to a coating structure.

FIG. 6 is a cross-sectional view showing a state in which a non-adhesive material is fixed to a powder fluid transport member.

FIG. 7 is a schematic view showing a processing portion of the laser processing machine.

8 is a graph showing time course of the dynamic friction coefficient mu _K.

FIG. 9 is a view showing a sectional shape of a concave portion provided in a sliding portion of the precision pin.

FIG. 10 is a view showing a measurement position of a coating film peeling strength of the composite structure.

FIG. 11 is a schematic diagram showing a configuration of a peel strength measuring device.

FIG. 12 is a schematic diagram for explaining a method for evaluating a transfer capability.

FIG. 13 is a cross-sectional view showing a surface state of a conventional coating structure before and after abrasion.

[Explanation of symbols]

 Reference Signs List 2 Sample plate 3 XY table 4 Lens 6 Reflector 8 Depression 10 Composite structure 12 Coating 14 End of peeled coating 16 Clamp 18 Spring balance 20 Sample plate 22 Container 24 Copier toner 100 Base material 101 Coating material 102 Recess

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4E068 AH00 AJ04 DA00 DA02 4F100 AA09B AB10A AK17B BA02 CC00B DD07A DE01B EJ52A GB71 JK09 JK16

Claims (6)

[Claims] 1. A fine unevenness formed by irradiating a laser beam with a large number of fine recesses on the surface, wherein each of the recesses has a size of 5 to 100 μm. A fine irregular shape characterized in that the height is substantially constant from the opening side to the bottom side, is arranged substantially regularly on the surface, and has a surface aperture ratio of 40 to 95%. 2. A coating structure, wherein a functional coating material is fixed to each of the recesses formed in the fine unevenness according to claim 1. 3. A lining base for providing a thick film having a thickness of 500 μm or more on the surface thereof using the fine uneven shape body according to claim 1, wherein the depth of the recess is equal to the size of the opening. A lining substrate characterized by being more than that. 4. A powder fluid transporting member for carrying a powder fluid in a recess thereof using the fine uneven shape body according to claim 1, wherein the depth of the recess is 5 to 50 μm. Characterized powder fluid conveying member. 5. The powder-fluid conveying member according to claim 4, wherein a functional coating material having a thickness of 70 nm to 4 μm is fixed to an inner wall surface of the concave portion. 6. The powder-fluid conveying member according to claim 4, wherein a functional coating material having a thickness of 70 nm to 4 μm is fixed on the entire surface of the fine uneven shape.