JP2000124767A - Substrate mounting method for saw filter chip and saw filter chip - Google Patents
Substrate mounting method for saw filter chip and saw filter chipInfo
- Publication number
- JP2000124767A JP2000124767A JP29192898A JP29192898A JP2000124767A JP 2000124767 A JP2000124767 A JP 2000124767A JP 29192898 A JP29192898 A JP 29192898A JP 29192898 A JP29192898 A JP 29192898A JP 2000124767 A JP2000124767 A JP 2000124767A
- Authority
- JP
- Japan
- Prior art keywords
- saw filter
- filter chip
- substrate
- chip
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、SAWフィルタチ
ップの基板実装方法及びSAWフィルタチップに関す
る。The present invention relates to a method for mounting a SAW filter chip on a substrate and a SAW filter chip.
【0002】[0002]
【従来の技術】SAWフィルタチップは表面にSAW
(弾性表面波)フィルタが形成されており、電子通信機
器等に広く使用されている。SAWフィルタチップは通
常封止体等に封入され、基板に実装される。SAWフィ
ルタは、SAWフィルタチップの表面に形成された櫛形
電極間を弾性表面波が伝搬することで電気特性を得るた
め、SAWフィルタチップを封入する場合、少なくとも
SAWフィルタが形成されている表面上には空間が必要
である。また、櫛形電極上にゴミや水分等が付着する
と、櫛形電極間に伝搬する弾性表面波の伝搬特性の変化
のために、SAWフィルタの特性が変化する。そのた
め、SAWフィルタが形成される表面上の空間は密閉空
間であることが望ましい。2. Description of the Related Art A SAW filter chip has a SAW filter surface.
(Surface acoustic wave) filters are formed and widely used in electronic communication devices and the like. The SAW filter chip is usually sealed in a sealing body or the like and mounted on a substrate. Since the SAW filter obtains electric characteristics by the surface acoustic wave propagating between the comb-shaped electrodes formed on the surface of the SAW filter chip, when the SAW filter chip is sealed, at least the surface of the SAW filter is formed on the surface on which the SAW filter is formed. Needs space. Further, when dust, moisture, or the like adheres to the comb-shaped electrodes, the characteristics of the SAW filter change due to a change in the propagation characteristics of the surface acoustic wave propagating between the comb-shaped electrodes. Therefore, it is desirable that the space on the surface on which the SAW filter is formed is a closed space.
【0003】図4に、従来使用されていたSAWフィル
タチップの封入方法と基板実装方法が示されている。図
4(a)において、SAWフィルタチップ1は、封止体
40内に封入されている。そして、封止体40内から引
き出された下部電極42が基板20上の導体パターン2
2に半田43で接続されることで、SAWフィルタチッ
プ1が封入された封止体40が基板20に実装される。
封止体40は、セラミック等でできているキャビティ部
46と、金属又はプラスチック等でできているリッド部
48から構成される。まず、リッド部48が無い状態
で、キャビティ部46の底面50に、チップ裏面が接着
材等で貼り付けられる。そして、SAWフィルタチップ
1上の電極4と下部電極42が、金属細線54で接続さ
れる。その後、リッド部48がキャビティ部46上に電
気溶接される。このようにして、SAWフィルタチップ
1は、SAWフィルタの形成された表面24を上にして
「フェイスアップ」で基板20に実装される。FIG. 4 shows a conventional method of enclosing a SAW filter chip and a method of mounting the same on a substrate. In FIG. 4A, the SAW filter chip 1 is sealed in a sealing body 40. Then, the lower electrode 42 drawn out of the sealing body 40 is connected to the conductor pattern 2 on the substrate 20.
The sealing body 40 in which the SAW filter chip 1 is sealed is mounted on the substrate 20 by being connected to the solder 2 with the solder 43.
The sealing body 40 includes a cavity 46 made of ceramic or the like, and a lid 48 made of metal or plastic. First, the back surface of the chip is attached to the bottom surface 50 of the cavity portion 46 with an adhesive or the like without the lid portion 48. Then, the electrode 4 on the SAW filter chip 1 and the lower electrode 42 are connected by a thin metal wire 54. Thereafter, the lid portion 48 is electrically welded onto the cavity portion 46. In this manner, the SAW filter chip 1 is mounted “face-up” on the substrate 20 with the surface 24 on which the SAW filter is formed facing upward.
【0004】また、図4(b)には、下部電極42と電
極4との接続にバンプを使用したSAWフィルタチップ
の封入方法及び基板実装方法が示されている。まず、S
AWフィルタチップ1の電極4上に、Au等でできたバ
ンプ6が形成される。そして、SAWフィルタチップ1
の表面24を、封止体40のキャビティ部46の底面5
0に対向させ、バンプ6と下部電極42とを超音波溶接
等で溶接し、SAWフィルタチップ1をキャビティ部4
6に固定すると共に、電極4と下部電極42とを接続す
る。その後、キャビティ部46上にリッド部48が電気
溶接される。このようにして、SAWフィルタチップ1
は、SAWフィルタの形成された表面24を下にして
「フェイスダウン」で基板20に実装される。FIG. 4B shows a method for encapsulating a SAW filter chip using bumps for connecting the lower electrode 42 and the electrode 4 and a method for mounting the substrate. First, S
A bump 6 made of Au or the like is formed on the electrode 4 of the AW filter chip 1. And the SAW filter chip 1
Of the cavity 24 of the sealing body 40
0, and the bump 6 and the lower electrode 42 are welded by ultrasonic welding or the like, and the SAW filter chip 1 is
6 and the electrode 4 and the lower electrode 42 are connected. Thereafter, the lid portion 48 is electrically welded onto the cavity portion 46. Thus, the SAW filter chip 1
Is mounted on the substrate 20 "face down" with the surface 24 on which the SAW filter is formed facing down.
【0005】また、図4(c)には、樹脂コートにSA
Wフィルタチップ1を封入し、基板に実装する方法が示
されている。まず、SAWフィルタチップ1の裏面がリ
ードフレーム62に接着剤等で貼り付けられ、SAWフ
ィルタチップ1がリードフレームに固定される。その
後、SAWフィルタチップ1上の電極4とリードフレー
ム62が金属細線54で接続される。そして、リードフ
レームの一部分と共に、表面24上に空間を持たせたま
ま、SAWフィルタチップ1が樹脂等で封入される。そ
の後、基板20上の導体パターン22とリードフレーム
62が半田64で接続されることで、電極4が導体パタ
ーン22と接続される。FIG. 4 (c) shows that the resin coat has a SA.
A method of enclosing the W filter chip 1 and mounting it on a substrate is shown. First, the back surface of the SAW filter chip 1 is attached to the lead frame 62 with an adhesive or the like, and the SAW filter chip 1 is fixed to the lead frame. After that, the electrode 4 on the SAW filter chip 1 and the lead frame 62 are connected by the thin metal wire 54. Then, the SAW filter chip 1 is sealed with a resin or the like while keeping a space on the surface 24 together with a part of the lead frame. Thereafter, the electrode 4 is connected to the conductor pattern 22 by connecting the conductor pattern 22 on the substrate 20 and the lead frame 62 with solder 64.
【0006】このように、従来は、SAWフィルタチッ
プ全体をセラミック等の封止体に封入した後、封止体を
基板に実装していた。As described above, conventionally, the entire SAW filter chip is sealed in a sealing body made of ceramic or the like, and then the sealing body is mounted on a substrate.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、従来の
方法では、封止体でSAWフィルタチップ全体を覆うた
め、封止体の寸法が大きくなってしまい、基板に実装し
たときの実装密度が低くなるという問題点があった。However, in the conventional method, since the entire SAW filter chip is covered by the sealing body, the size of the sealing body becomes large, and the mounting density when mounted on a substrate becomes low. There was a problem.
【0008】また、従来の方法では、SAWフィルタチ
ップを封止体内に封入する工程の後に、基板へ実装する
工程があり、工程数が多く、製造コストが高いという問
題点があった。特に、図4(a)および図4(b)に示
した基板実装方法では、キャビティ部46にリッド部4
8を溶接する工程等が必要であるため、更に、製造コス
トが高くなっていた。また、図4(a)および図4
(b)に示した基板実装方法では、部品個数も多く、部
品コストが高いという問題があった。Further, in the conventional method, there is a step of mounting the SAW filter chip on a substrate after the step of enclosing the SAW filter chip in a sealing body, and there is a problem that the number of steps is large and the manufacturing cost is high. In particular, in the substrate mounting method shown in FIGS. 4A and 4B, the lid portion 4
Since a process of welding 8 is required, the manufacturing cost is further increased. 4A and FIG.
The board mounting method shown in (b) has a problem that the number of components is large and the component cost is high.
【0009】本発明は、上記課題に鑑みなされたもので
あり、基板実装密度が高く、且つ、低コストなSAWフ
ィルタチップの基板実装方法を提供することを目的とす
る。The present invention has been made in view of the above problems, and has as its object to provide a method of mounting a SAW filter chip on a substrate at a high density and at a low cost.
【0010】[0010]
【課題を解決するための手段】本発明は、SAWフィル
タチップの基板実装方法であって、SAWフィルタが一
主面に形成されたSAWフィルタチップの前記主面上
に、前記SAWフィルタを囲む封止壁を形成し、前記封
止壁を基板に密着させ、前記SAWフィルタチップをフ
ェイスダウンで前記基板に実装することを特徴とする。SUMMARY OF THE INVENTION The present invention relates to a method for mounting a SAW filter chip on a substrate, wherein the SAW filter chip has a SAW filter chip formed on one main surface. A stop wall is formed, the sealing wall is brought into close contact with the substrate, and the SAW filter chip is mounted face-down on the substrate.
【0011】また、本発明のSAWフィルタチップは、
SAWフィルタが一主面に形成されたSAWフィルタチ
ップであって、前記主面上に前記SAWフィルタを囲む
封止壁を有することを特徴とする。Further, the SAW filter chip of the present invention comprises:
The SAW filter is a SAW filter chip formed on one main surface, and has a sealing wall surrounding the SAW filter on the main surface.
【0012】このように、本発明においては、SAWフ
ィルタチップ上に形成された封止壁を基板に密着させる
ことで、封止壁と基板とSAWフィルタチップとで、S
AWフィルタ上に密閉空間を形成し、同時に、SAWフ
ィルタチップを基板に実装する。封止壁は、大きくても
SAWフィルタチップの大きさ程度で良いため、基板へ
の実装密度を高くすることが可能である。また、SAW
フィルタ上に密閉空間を形成する、すなわち、SAWフ
ィルタを封止すると同時に基板への実装を行うため、製
造工程数を削減することが可能である。また、基板とS
AWフィルタチップ自体を封止する部品として利用する
ため、部品個数を削減することが可能である。As described above, in the present invention, the sealing wall formed on the SAW filter chip is brought into close contact with the substrate, so that the sealing wall, the substrate, and the SAW filter chip form an SW filter chip.
A closed space is formed on the AW filter, and at the same time, a SAW filter chip is mounted on a substrate. Since the size of the sealing wall can be as large as the size of the SAW filter chip, the mounting density on the substrate can be increased. Also, SAW
Since a sealed space is formed on the filter, that is, the SAW filter is sealed and mounted on the substrate at the same time, the number of manufacturing steps can be reduced. Also, the substrate and S
Since the AW filter chip itself is used as a sealing component, the number of components can be reduced.
【0013】また、本発明は、SAWフィルタチップの
一主面に形成されたSAWフィルタを囲む形状を有する
封止壁を基板上に形成し、前記封止壁を前記SAWフィ
ルタチップの主面に密着させ、前記SAWフィルタチッ
プをフェイスダウンで前記基板に実装することを特徴と
する。The present invention also provides a sealing wall having a shape surrounding a SAW filter formed on one main surface of a SAW filter chip on a substrate, and the sealing wall is formed on a main surface of the SAW filter chip. The SAW filter chip is mounted face down on the substrate.
【0014】このように、封止壁を基板上に形成し、封
止壁をSAWフィルタチップに密着させることで、封止
壁と基板とSAWフィルタチップとで、SAWフィルタ
上に密閉空間を形成し、同時に、SAWフィルタチップ
を基板に実装してもよい。Thus, by forming the sealing wall on the substrate and bringing the sealing wall into close contact with the SAW filter chip, a closed space is formed on the SAW filter by the sealing wall, the substrate and the SAW filter chip. At the same time, the SAW filter chip may be mounted on the substrate.
【0015】前記基板実装方法においては、前記SAW
フィルタチップと前記基板とをバンプで接続してもよ
い。In the above-mentioned substrate mounting method, the SAW
The filter chip and the substrate may be connected by bumps.
【0016】また、本発明は、SAWフィルタチップの
基板実装方法であって、SAWフィルタが一主面に形成
されたSAWフィルタチップの前記主面上に、前記SA
Wフィルタを囲む封止壁を形成し、前記SAWフィルタ
チップを覆う封止体の内面に前記封止壁を密着させ、前
記SAWフィルタチップを前記封止体内に封入し、前記
封止体を基板に実装することを特徴とする。The present invention also relates to a method of mounting a SAW filter chip on a substrate, wherein the SAW filter chip has a SAW filter formed on one main surface thereof.
A sealing wall surrounding the W filter is formed, the sealing wall is brought into close contact with an inner surface of a sealing body covering the SAW filter chip, the SAW filter chip is sealed in the sealing body, and the sealing body is mounted on a substrate. Is implemented.
【0017】このように、本発明では、SAWフィルタ
チップを封止体内に封入する場合でも、従来使用されて
いた封止体と比較すると、リッド部が不要であるため、
部品個数を削減することが可能である。As described above, according to the present invention, even when the SAW filter chip is sealed in the sealed body, the lid portion is not required as compared with the conventionally used sealed body.
It is possible to reduce the number of parts.
【0018】前記基板実装方法においては、前記SAW
フィルタチップと前記封止体とをバンプで接続してもよ
い。In the substrate mounting method, the SAW
The filter chip and the sealing body may be connected by a bump.
【0019】[0019]
【発明の実施の形態】以下、本発明の実施の形態(以下
実施形態という)を、図面に従って説明する。Embodiments of the present invention (hereinafter referred to as embodiments) will be described below with reference to the drawings.
【0020】図1(a)に本実施形態での、表面に封止
壁が形成されたSAWフィルタチップの平面図を示し、
図1(b)にその側面図を示す。SAWフィルタチップ
1上には、櫛形電極2が形成されている。櫛形電極2か
ら金属配線が引き出され、その先端には、電極4が形成
されている。電極4上には、高さ100μm程度のAu
等でできているバンプが形成されている。本実施形態の
SAWフィルタは、電極4に信号を入力し、櫛形電極2
間に弾性表面波が伝搬することで電気的特性を得る。FIG. 1A is a plan view of a SAW filter chip having a sealing wall formed on a surface according to the present embodiment.
FIG. 1B shows a side view thereof. On the SAW filter chip 1, a comb-shaped electrode 2 is formed. A metal wire is led out from the comb-shaped electrode 2, and an electrode 4 is formed at the tip thereof. Au having a height of about 100 μm is formed on the electrode 4.
Are formed. The SAW filter of this embodiment inputs a signal to the electrode 4 and
Electrical characteristics are obtained by surface acoustic waves propagating between them.
【0021】SAWフィルタチップ1上には封止壁8及
び10が形成されている。封止壁8及び10は、紫外線
硬化樹脂をSAWフィルタチップ1上に50μm程度の
厚みで全面に塗布し、その後、フォトリゾグラフィ技術
を用いて、櫛形電極2を囲む形状に形成される。これ
は、後述する工程で櫛形電極2上、つまりSAWフィル
タ上に密閉空間を形成するためである。なお、封止壁8
及び10は、SAWフィルタチップ1上に、ディスペン
サ等で櫛形電極2を囲む形状に塗布されたシリコン樹脂
で形成しても良い。On the SAW filter chip 1, sealing walls 8 and 10 are formed. The sealing walls 8 and 10 are formed by applying an ultraviolet curable resin to the entire surface of the SAW filter chip 1 with a thickness of about 50 μm, and then using photolithography technology to form a shape surrounding the comb electrode 2. This is because a closed space is formed on the comb-shaped electrode 2, that is, on the SAW filter in a process described later. In addition, the sealing wall 8
And 10 may be formed of silicon resin applied on the SAW filter chip 1 so as to surround the comb electrode 2 with a dispenser or the like.
【0022】なお、バンプの高さhは、図1(b)に示
されているように、封止壁8及び10の厚みtより大き
いことが望ましい。これは、後述する工程で、バンプ6
が封止壁8及び10より低いと、基板20上の導体パタ
ーン22にバンプを超音波溶接できないためである。It is desirable that the height h of the bump is larger than the thickness t of the sealing walls 8 and 10, as shown in FIG. This is a step which will be described later.
If the height is lower than the sealing walls 8 and 10, the bumps cannot be ultrasonically welded to the conductor pattern 22 on the substrate 20.
【0023】SAWフィルタチップ1上に封止壁8及び
10が形成された後、バンプ6が基板20上の導体パタ
ーン22に超音波溶接され、封止壁8及び10が導体パ
ターン22に密着させられる。その結果、図2に示され
るように、櫛形電極2上、すなわち、SAWフィルタ上
に、基板20と封止壁10とSAWフィルタチップ1と
で密閉空間が形成され、同時に、SAWフィルタチップ
1がチップの表面24を下にして、フェイスダウンで基
板20に実装される。After the sealing walls 8 and 10 are formed on the SAW filter chip 1, the bumps 6 are ultrasonically welded to the conductor pattern 22 on the substrate 20, and the sealing walls 8 and 10 are brought into close contact with the conductor pattern 22. Can be As a result, as shown in FIG. 2, a closed space is formed on the comb-shaped electrode 2, that is, on the SAW filter by the substrate 20, the sealing wall 10, and the SAW filter chip 1, and at the same time, the SAW filter chip 1 The chip is mounted on the substrate 20 face down with the surface 24 of the chip facing down.
【0024】このように、本実施形態では、基板20と
封止壁10とSAWフィルタチップ1とで、SAWフィ
ルタ上に密閉空間が形成され、同時に、SAWフィルタ
チップ1が基板20に実装される。よって、従来の封止
した後実装する方法と比較すると、製造工程数を減らす
ことができ、製造コストを抑えることが可能である。As described above, in the present embodiment, a closed space is formed on the SAW filter by the substrate 20, the sealing wall 10, and the SAW filter chip 1, and at the same time, the SAW filter chip 1 is mounted on the substrate 20. . Therefore, as compared with the conventional method of mounting after sealing, the number of manufacturing steps can be reduced and the manufacturing cost can be reduced.
【0025】また、基板20と封止壁10とSAWフィ
ルタチップ1とで密閉空間が形成されるので、従来必要
だった封止体の部品、すなわち、図4(a)、(b)、
(c)の封止体40のキャビティ部26とリッド部4
8、及び、封止体66が不必要となる。そのため、部品
個数を減らすことができ、部品コストを低く抑えること
が可能である。Further, since a closed space is formed by the substrate 20, the sealing wall 10, and the SAW filter chip 1, the parts of the sealing body which have been conventionally required, that is, FIGS. 4 (a), (b),
The cavity 26 and the lid 4 of the sealing body 40 shown in FIG.
8, and the sealing body 66 becomes unnecessary. Therefore, the number of components can be reduced, and the cost of components can be reduced.
【0026】また、封止壁8及び10は、櫛形電極2を
囲む程度の大きさでよいので、大きくてもSAWフィル
タチップ1程度の大きさでよい。そのため、従来のSA
Wフィルタチップ全体を封止体で封入する方法と比較す
ると、基板への実装密度を高めることが可能である。Since the sealing walls 8 and 10 may have a size that surrounds the comb-shaped electrode 2, they may be as large as the SAW filter chip 1. Therefore, the conventional SA
Compared with the method of enclosing the entire W filter chip with a sealing body, it is possible to increase the mounting density on the substrate.
【0027】なお、本実施形態では、封止壁8及び10
は基板20上の導体パターン22に密着されたが、封止
壁8及び10は、基板20上の導体パターンが無い箇所
に密着させてもよい。この場合、バンプの高さh及び封
止壁の厚さtは、バンプを導体パターン22上に接合す
ることができるように、適宜選択しないければならな
い。In this embodiment, the sealing walls 8 and 10
Is sealed to the conductor pattern 22 on the substrate 20, but the sealing walls 8 and 10 may be adhered to a portion of the substrate 20 where there is no conductor pattern. In this case, the height h of the bump and the thickness t of the sealing wall must be appropriately selected so that the bump can be bonded onto the conductive pattern 22.
【0028】また、封止壁は、基板20とSAWフィル
タチップ1と共に、密閉空間を形成できればよいので、
封止壁8又は封止壁10のどちらか一方だけでもよい。Further, the sealing wall is only required to form a closed space together with the substrate 20 and the SAW filter chip 1.
Only one of the sealing wall 8 and the sealing wall 10 may be used.
【0029】また、本実施形態では、SAWフィルタチ
ップ1に封止壁を形成したが、基板20上に封止壁を形
成し、SAWフィルタチップ1に封止壁を密着させても
よい。In the present embodiment, the sealing wall is formed on the SAW filter chip 1. However, the sealing wall may be formed on the substrate 20, and the sealing wall may be adhered to the SAW filter chip 1.
【0030】また、図3に示すように、バンプ6を封止
体30の内壁に形成された引き出し電極32に接合し、
引き出し電極32と基板20上の導体パターン22を半
田36で接合することにより、SAWフィルタチップ1
をフェイスアップで基板20上に実装してもよい。この
とき、バンプ6と引き出し電極32は超音波溶接で接続
される。この実装方法では、図4(a)及び図4(b)
と比較すると、リッド部48が不要となり、部品個数を
減らし、部品コストを少なくすることが可能である。Further, as shown in FIG. 3, the bump 6 is joined to a lead electrode 32 formed on the inner wall of the sealing body 30,
By joining the lead electrode 32 and the conductor pattern 22 on the substrate 20 with solder 36, the SAW filter chip 1
May be mounted on the substrate 20 face up. At this time, the bump 6 and the extraction electrode 32 are connected by ultrasonic welding. In this mounting method, FIGS. 4A and 4B
As compared with the above, the lid portion 48 becomes unnecessary, and it is possible to reduce the number of parts and the cost of parts.
【0031】[0031]
【発明の効果】以上説明したように、本発明では、封止
壁と基板とSAWフィルタチップとで、SAWフィルタ
上に密閉空間を形成し、同時に、SAWフィルタチップ
を基板に実装する。そのため、基板への実装時、SAW
フィルタチップの専有面積が小さくなり、実装密度を高
くすることが可能である。また、部品個数が少なくなる
ので、部品コストを低くすることが可能であり、製造コ
ストも低くすることが可能である。As described above, in the present invention, a sealed space is formed on a SAW filter by a sealing wall, a substrate, and a SAW filter chip, and at the same time, the SAW filter chip is mounted on the substrate. Therefore, when mounting on a board, SAW
The occupied area of the filter chip is reduced, and the mounting density can be increased. Also, since the number of parts is reduced, the cost of parts can be reduced, and the manufacturing cost can be reduced.
【図1】 本実施形態のSAWフィルタチップの概略図
である。FIG. 1 is a schematic diagram of a SAW filter chip according to an embodiment.
【図2】 本実施形態のSAWフィルタチップの基板実
装方法を示した図である。FIG. 2 is a diagram illustrating a method for mounting a SAW filter chip on a substrate according to the embodiment;
【図3】 他の実施形態のSAWフィルタチップの基板
実装方法を示した図である。FIG. 3 is a diagram illustrating a method for mounting a SAW filter chip on a substrate according to another embodiment.
【図4】 従来のSAWフィルタチップの基板実装方法
を示した図である。FIG. 4 is a view showing a conventional SAW filter chip substrate mounting method.
2 櫛形電極、4 電極、6 バンプ、8,10 封止
壁、20 基板、22導体パターン、24 チップ表
面、30,40,66 封止体、32 引き出し電極、
36,43,64 半田、42 下部電極、46 キャ
ビティ部、48リッド部、54 金属細線、62 リー
ドフレーム。2 comb electrodes, 4 electrodes, 6 bumps, 8, 10 sealing walls, 20 substrates, 22 conductor patterns, 24 chip surfaces, 30, 40, 66 sealing bodies, 32 extraction electrodes,
36, 43, 64 Solder, 42 Lower electrode, 46 Cavity, 48 Lid, 54 Fine metal wire, 62 Lead frame.
Claims (6)
AWフィルタチップの前記主面上に、前記SAWフィル
タを囲む封止壁を形成し、 前記封止壁を基板に密着させ、 前記SAWフィルタチップをフェイスダウンで前記基板
に実装することを特徴とするSAWフィルタチップの基
板実装方法。1. An SW filter having a SAW filter formed on one main surface.
A sealing wall surrounding the SAW filter is formed on the main surface of the AW filter chip, the sealing wall is brought into close contact with the substrate, and the SAW filter chip is mounted face down on the substrate. A method for mounting a SAW filter chip on a substrate.
AWフィルタチップであって、 前記主面上に前記SAWフィルタを囲む封止壁を有する
ことを特徴とするSAWフィルタチップ。2. An SW filter having a SAW filter formed on one main surface.
An AW filter chip, comprising: a sealing wall surrounding the SAW filter on the main surface.
れたSAWフィルタを囲む形状を有する封止壁を基板上
に形成し、 前記封止壁を前記SAWフィルタチップの主面に密着さ
せ、 前記SAWフィルタチップをフェイスダウンで前記基板
に実装することを特徴とするSAWフィルタチップの基
板実装方法。3. A sealing wall having a shape surrounding the SAW filter formed on one main surface of the SAW filter chip is formed on the substrate, and the sealing wall is brought into close contact with the main surface of the SAW filter chip, A method of mounting a SAW filter chip on a substrate, wherein the SAW filter chip is mounted face down on the substrate.
ィルタチップの基板実装方法であって、 前記SAWフィルタチップと前記基板とをバンプで接続
することを特徴とするSAWフィルタチップの基板実装
方法。4. The method for mounting a SAW filter chip on a substrate according to claim 1, wherein the SAW filter chip and the substrate are connected by bumps. Method.
AWフィルタチップの前記主面上に、前記SAWフィル
タを囲む封止壁を形成し、 前記SAWフィルタチップを覆う封止体の内面に前記封
止壁を密着させ、前記SAWフィルタチップを前記封止
体内に封入し、 前記封止体を基板に実装することを特徴とするSAWフ
ィルタチップの基板実装方法。5. An SW filter having a SAW filter formed on one main surface.
A sealing wall surrounding the SAW filter is formed on the main surface of the AW filter chip, and the sealing wall is brought into close contact with an inner surface of a sealing body covering the SAW filter chip, thereby sealing the SAW filter chip. A method for mounting a SAW filter chip on a substrate, wherein the method is enclosed in a body and the sealing body is mounted on a substrate.
の基板実装方法であって、 前記SAWフィルタチップと前記封止体とをバンプで接
続することを特徴とするSAWフィルタチップの基板実
装方法。6. The method for mounting a SAW filter chip on a substrate according to claim 5, wherein the SAW filter chip and the sealing body are connected by bumps.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29192898A JP2000124767A (en) | 1998-10-14 | 1998-10-14 | Substrate mounting method for saw filter chip and saw filter chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29192898A JP2000124767A (en) | 1998-10-14 | 1998-10-14 | Substrate mounting method for saw filter chip and saw filter chip |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000124767A true JP2000124767A (en) | 2000-04-28 |
Family
ID=17775290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29192898A Pending JP2000124767A (en) | 1998-10-14 | 1998-10-14 | Substrate mounting method for saw filter chip and saw filter chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000124767A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001244785A (en) * | 2000-02-29 | 2001-09-07 | Kyocera Corp | Surface acoustic wave device |
JP2002261582A (en) * | 2000-10-04 | 2002-09-13 | Matsushita Electric Ind Co Ltd | Surface acoustic wave device, its manufacturing method, and circuit module using the same |
WO2003103142A1 (en) * | 2002-06-03 | 2003-12-11 | 株式会社 村田製作所 | Surface acoustic wave device |
US6710682B2 (en) | 2000-10-04 | 2004-03-23 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device, method for producing the same, and circuit module using the same |
JP2006112886A (en) * | 2004-10-14 | 2006-04-27 | Oki Electric Ind Co Ltd | Acceleration sensor chip package and its manufacturing method |
US9543268B2 (en) | 2011-07-25 | 2017-01-10 | Murata Manufacturing Co., Ltd. | Electronic component, method of manufacturing same, composite module including electronic component, and method of manufacturing same |
-
1998
- 1998-10-14 JP JP29192898A patent/JP2000124767A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001244785A (en) * | 2000-02-29 | 2001-09-07 | Kyocera Corp | Surface acoustic wave device |
JP4510982B2 (en) * | 2000-02-29 | 2010-07-28 | 京セラ株式会社 | Surface acoustic wave device |
JP2002261582A (en) * | 2000-10-04 | 2002-09-13 | Matsushita Electric Ind Co Ltd | Surface acoustic wave device, its manufacturing method, and circuit module using the same |
US6710682B2 (en) | 2000-10-04 | 2004-03-23 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device, method for producing the same, and circuit module using the same |
WO2003103142A1 (en) * | 2002-06-03 | 2003-12-11 | 株式会社 村田製作所 | Surface acoustic wave device |
US7034434B2 (en) | 2002-06-03 | 2006-04-25 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
DE10392158B4 (en) * | 2002-06-03 | 2011-10-27 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
JP2006112886A (en) * | 2004-10-14 | 2006-04-27 | Oki Electric Ind Co Ltd | Acceleration sensor chip package and its manufacturing method |
JP4683897B2 (en) * | 2004-10-14 | 2011-05-18 | Okiセミコンダクタ株式会社 | Acceleration sensor chip package and manufacturing method thereof |
US9543268B2 (en) | 2011-07-25 | 2017-01-10 | Murata Manufacturing Co., Ltd. | Electronic component, method of manufacturing same, composite module including electronic component, and method of manufacturing same |
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