JP2000119068A - Degreasing/burning implement for aluminum nitride molded form - Google Patents
Degreasing/burning implement for aluminum nitride molded formInfo
- Publication number
- JP2000119068A JP2000119068A JP10291863A JP29186398A JP2000119068A JP 2000119068 A JP2000119068 A JP 2000119068A JP 10291863 A JP10291863 A JP 10291863A JP 29186398 A JP29186398 A JP 29186398A JP 2000119068 A JP2000119068 A JP 2000119068A
- Authority
- JP
- Japan
- Prior art keywords
- degreasing
- boron nitride
- porosity
- aluminum nitride
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、窒化アルミニウム
の脱脂・焼成に用いられるセッター、容器等の器具に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to equipment such as setters and containers used for degreasing and firing aluminum nitride.
【０００２】[0002]
【従来の技術】セラミックス製品の作製プロセスは、成
形性を高めるために、通常は原料粉末にＰＶＡ（ポリビ
ニルアルコール）等の有機系バインダーを少量添加す
る。次いで、混合・造粒等の処理を行った後、加圧成
形、ドクターブレード等の成形方法で成形体を作製し、
有機系バインダーを除去するための脱脂工程を経て、高
温焼成が行われる。脱脂・焼成工程で用いられるセッタ
ー、容器等の器具（以下、単に「器具」という。）が具
備すべき特性としては、バインダー成分の除去のしやす
さ、化学的安定性（被焼成物と反応しないこと）、耐熱
衝撃性、軽量性等である。2. Description of the Related Art In a process for producing a ceramic product, a small amount of an organic binder such as PVA (polyvinyl alcohol) is usually added to raw material powder in order to enhance moldability. Then, after performing processing such as mixing and granulation, pressure molding, to produce a molded body by a molding method such as a doctor blade,
High-temperature baking is performed through a degreasing step for removing the organic binder. The characteristics of equipment such as setters and containers used in the degreasing / firing process (hereinafter, simply referred to as “equipment”) include ease of removal of the binder component, chemical stability (reaction with the material to be fired) No), thermal shock resistance, light weight, etc.
【０００３】従来、コンデンサー、圧電材料等に用いら
れるＰＺＴ、ＢａＴｉＯ3 等の酸化物セラミックスの器
具としては、アルミナ、ＳｉＯ2、ＺｒＯ2、ＭｇＯ等の
酸化物セラミックスが使用されており、種々の改良が加
えられている。例えば、コーディエライト質多孔体を用
いることによって、耐熱衝撃性と耐薬品性を改善したり
（特開昭５７−７０２０３号公報）、アルミナ、ＳｉＯ
2、ＺｒＯ2等からなる多孔質セラミックを用いることに
よって、脱脂工程で発生する分解ガスの透過性能を向上
させたり（特開平５−１７２６１号公報）している。Conventionally, oxide ceramics such as alumina, SiO 2 , ZrO 2 , and MgO have been used as devices for oxide ceramics such as PZT and BaTiO 3 used for capacitors, piezoelectric materials and the like. Has been added. For example, by using a cordierite porous material, thermal shock resistance and chemical resistance can be improved (Japanese Patent Application Laid-Open No. 57-70203), alumina, SiO 2
2, by using a porous ceramic made of ZrO 2 or the like, and or to improve the permeability of the decomposition gas generated in the degreasing step (JP-A-5-17261).
【０００４】また、焼成時に被焼成物との反応・融着を
抑制し、耐久性向上を図るため、器具の被焼成物との接
触面をパラジウム等の貴金属で被覆したり（特開平６−
２１９８７０号公報）、耐熱性及び熱衝撃性を改善する
ために、多孔質セラミックス焼結体にＣｒ化合物を含浸
させたり（特開昭６２−２９２６８１号公報）、被焼成
物中のバインダー成分の脱離性を向上させるために銅単
体を含浸させたり（特開平２−７１５８８号公報）して
いる。In order to suppress the reaction and fusion with the object to be fired during firing and to improve the durability, the contact surface of the appliance with the object to be fired is coated with a noble metal such as palladium (Japanese Patent Application Laid-Open No. Hei 6-1994).
In order to improve heat resistance and thermal shock resistance, a porous ceramic sintered body is impregnated with a Cr compound (Japanese Patent Application Laid-Open No. 62-292681), or a binder component in a material to be fired is removed. In order to improve the releasability, a simple substance of copper is impregnated (JP-A-2-71588).
【０００５】一方、窒化アルミニウム等の非酸化物セラ
ミックスに適用される器具については、酸化物セラミッ
クスの焼成とは異なり、２０００℃程度の高温で熱処理
が行われるため、上記のような酸化物セラミックスの多
孔質材料を用いることができず、被焼成物と同質材が用
いられたり、窒化硼素粉末を敷いたり、また窒化硼素焼
結体が用いられたり（特公平２−５１８６７号公報、特
公平２−５１８６８号公報）している。[0005] On the other hand, with respect to appliances applied to non-oxide ceramics such as aluminum nitride, heat treatment is performed at a high temperature of about 2000 ° C, unlike firing of oxide ceramics. A porous material cannot be used, and the same material as the object to be fired is used, a boron nitride powder is laid, or a boron nitride sintered body is used (Japanese Patent Publication No. 2-51867, Japanese Patent Publication No. -51868).
【０００６】特に、窒化硼素は、他のセラミックスと比
べて比重が小さいために軽量化を実現することができ、
また耐熱衝撃性及び化学的安定性にも優れているため、
２０００℃付近という高温での焼成が必要となる窒化ア
ルミニウム焼成用の器具として賞用されている。[0006] In particular, since boron nitride has a lower specific gravity than other ceramics, it is possible to reduce weight.
In addition, because it has excellent thermal shock resistance and chemical stability,
It has been awarded as a tool for firing aluminum nitride, which requires firing at a high temperature of around 2000 ° C.
【０００７】窒化アルミニウム焼結体は、半導体用冶具
用途等として、近年、需要が増大しており、しかも大型
化・厚肉化の傾向にある。大型化になればなる程、バイ
ンダー成分を均一に分解・脱離させることが困難とな
り、例えば、被焼成物が器具と接触している部分のバイ
ンダーを除去するには、相当な処理時間が必要となる
か、被焼成物を再配置してから再熱処理をする必要があ
る。また、厚肉部材では、被焼成物中のバインダー成分
が分解後に十分に脱離できずにカーボンとして残存した
り、バインダーの分解成分が揮発する際、被焼成物が割
れたりする問題があり、これを回避するにも相当な処理
時間と手間が必要であった。[0007] In recent years, the demand for an aluminum nitride sintered body for use as a jig for a semiconductor has been increasing, and there has been a tendency to increase the size and the wall thickness. As the size becomes larger, it becomes more difficult to uniformly decompose and desorb the binder component.For example, a considerable processing time is required to remove the binder in a portion where the object to be fired is in contact with the appliance. Or it is necessary to perform the heat treatment again after rearranging the object to be fired. Further, in the thick member, there is a problem that the binder component in the material to be fired is not sufficiently desorbed after decomposition and remains as carbon, or when the decomposition component of the binder volatilizes, the material to be fired is broken, To avoid this, considerable processing time and labor were required.
【０００８】このような問題を解消するため、従来は、
酸化物セラミックスの多孔質部材からなる器具を用い
て、先ず低温の脱脂処理を行い、次いで窒化硼素焼結体
の器具に載せ替えて高温の焼成処理をすることが行われ
ている。しかしながら、脱脂後の窒化アルミニウム成形
体は極めて脆いので、焼成容器に載せ替える際に破損し
やすく、歩留まりが低下した。また、焼成用の器具とし
て使用されている窒化硼素焼結体は気孔率が４０％未満
であり、しかも貫通孔（すなわち器具の一方の面から他
方の面に連通している気孔）の存在割合の程度を示す空
気透過係数１．１×１０-9ｍｏｌ・ｍ／ｍ2・ｓ・Ｐａ
よりも低いため、それを大型成形物の脱脂処理の器具と
して使用すると、バインダー成分の脱離が十分なされ
ず、カーボン成分が残留してしまうという問題があっ
た。そこで、脱脂処理が可能となるように、窒化硼素焼
結体の気孔率を高め、しかも空気透過係数を大きくした
ものを使用すると、今度は器具の機械的強度が著しく低
下し、使用時に欠けたり破損したりする問題があった。
このように、従来は、窒化アルミニウム焼結体の大型形
状品の作製において、脱脂から焼成までを一貫して行え
る器具はなく、その出現が待たれていた。In order to solve such a problem, conventionally,
First, a low-temperature degreasing treatment is performed by using an appliance made of a porous member made of an oxide ceramic, and then a high-temperature sintering treatment is performed by replacing the device with a boron nitride sintered body. However, since the aluminum nitride molded body after degreasing is extremely brittle, the aluminum nitride molded body was easily damaged when replaced in a firing container, and the yield was reduced. The boron nitride sintered body used as a firing device has a porosity of less than 40%, and the existence ratio of through holes (ie, pores communicating from one surface of the device to the other surface). Air permeability coefficient 1.1 × 10 -9 mol · m / m 2 · s · Pa
When used as an apparatus for degreasing a large molded product, the binder component is not sufficiently removed, and the carbon component remains. Therefore, if the porosity of the boron nitride sintered body is increased and the air permeability coefficient is increased so that the degreasing treatment can be performed, the mechanical strength of the equipment will be significantly reduced, and the porosity will be reduced during use. There was a problem of breakage.
As described above, in the past, in the production of a large-sized aluminum nitride sintered body, there was no apparatus capable of performing all steps from degreasing to firing, and its appearance has been awaited.
【０００９】[0009]
【発明が解決しようとする課題】本発明の目的は、上記
に鑑みてなされたものであり、窒化アルミニウム成形体
の脱脂を均一に行うことができ、しかも焼成工程までを
一貫して行うことのできる器具を提供することである。SUMMARY OF THE INVENTION An object of the present invention has been made in view of the above, and it is an object of the present invention to uniformly perform degreasing of an aluminum nitride molded article and to consistently perform a firing step. It is to provide equipment that can do it.
【００１０】[0010]
【課題を解決するための手段】すなわち、本発明は、気
孔率４０〜６０体積％、曲げ強さ２０ＭＰａ以上、空気
透過係数１．１〜２．０×１０-9ｍｏｌ・ｍ／ｍ2・ｓ
・Ｐａである多孔質構造の窒化硼素焼結体からなること
を特徴とする窒化アルミニウム成形体の脱脂・焼成用器
具である。That is, the present invention provides a porosity of 40 to 60% by volume, a bending strength of 20 MPa or more, and an air permeability coefficient of 1.1 to 2.0 × 10 -9 molm / m 2 · m. s
-An appliance for degreasing and firing an aluminum nitride molded body, comprising a boron nitride sintered body having a porous structure of Pa.
【００１１】[0011]
【発明の実施の形態】以下、本発明について更に詳しく
説明する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in more detail.
【００１２】本発明の器具は、多孔質構造の六方晶窒化
硼素焼結体からなるものであり、その気孔率は４０〜６
０体積％である。気孔率は、水銀ポロシメーター法によ
って測定することができる。また、貫通孔は、器具の一
方の面より他方の面に気体を通過させる機能を有する気
孔であり、その程度は空気透過係数を測定することによ
って行うことができる。本発明においては、ＪＩＳ Ｋ
７１２６に記載されたＡ法（差圧法）に準じ、室温下に
おいて器具の片面を大気圧に置き、他面を減圧下に晒し
てその圧力差を１．０１×１０5Ｐａに設定したとき
に、測定された空気透過係数が１．１〜２．０×１０-9
ｍｏｌ・ｍ／ｍ2・ｓ・Ｐａの範囲である多孔質構造体
が使用される。The device of the present invention comprises a porous hexagonal boron nitride sintered body having a porosity of 40 to 6%.
0% by volume. The porosity can be measured by a mercury porosimeter method. Further, the through-hole is a pore having a function of allowing gas to pass from one surface of the device to the other surface, and the degree can be determined by measuring an air permeability coefficient. In the present invention, JIS K
According to the method A (differential pressure method) described in No. 7126, when one side of the instrument is placed at atmospheric pressure at room temperature and the other side is exposed to reduced pressure and the pressure difference is set to 1.01 × 10 5 Pa. The measured air permeability coefficient is 1.1 to 2.0 × 10 -9
A porous structure having a range of mol · m / m 2 · s · Pa is used.
【００１３】本発明のように、所定の貫通孔で構成され
てなる多孔質構造の六方晶窒化硼素焼結体を、窒化アル
ミニウム成形体の脱脂・焼成用の器具とすることによっ
て、被焼成物である窒化アルミニウム成形体が大型・厚
肉のものであっても、被焼成物の割れを防止して、均一
なバインダーの分解・脱離処理を行うことができ、カー
ボンの残留も起こらない。貫通孔の平均気孔径として
は、１μｍ以下であることが望ましい。According to the present invention, a porous hexagonal boron nitride sintered body composed of predetermined through-holes is used as an appliance for degreasing and firing an aluminum nitride molded article, thereby obtaining a material to be fired. Even if the aluminum nitride molded article is a large-sized and thick-walled one, cracking of the object to be fired can be prevented, uniform decomposition and desorption treatment of the binder can be performed, and no carbon remains. The average pore diameter of the through holes is desirably 1 μm or less.
【００１４】本発明において、気孔率が４０体積％未満
では、窒化アルミニウム成形体中の脱脂が十分できなく
なり、また６０体積％をこえると、器具の強度が低下し
てしまい、大型成形品の保持・運搬を行う際に破損する
恐れがある。同様に、空気透過係数が上記範囲以外であ
ると、上記と同様な不都合が生じる。In the present invention, if the porosity is less than 40% by volume, the aluminum nitride molded article cannot be sufficiently degreased. If the porosity exceeds 60% by volume, the strength of the device is reduced, and the holding of a large molded product. -There is a risk of damage during transportation. Similarly, if the air permeability coefficient is out of the above range, the same disadvantages as described above occur.
【００１５】更に、本発明の器具は、室温における３点
曲げ強さが２０ＭＰａ以上でなければならない。この値
よりも曲げ強さが小さいと、上記と同様に大型成形品の
保持・運搬を行う際に破損してしまう恐れがあり、取扱
いに不便を来す。本発明のように、その曲げ強さを２０
ＭＰａ以上とすることによって、脱脂処理後の窒化アル
ミニウム成形体を器具に載せた状態で運搬が可能とな
り、しかもそのまま焼成処理に移ることができる。Further, the device of the present invention must have a three-point bending strength at room temperature of 20 MPa or more. If the flexural strength is smaller than this value, the large molded product may be damaged when the large molded product is held and transported as described above, and the handling is inconvenient. As in the present invention, the flexural strength is 20
By setting the pressure to MPa or more, the aluminum nitride molded body after the degreasing treatment can be transported in a state of being mounted on an appliance, and can be directly transferred to the firing treatment.
【００１６】本発明の器具のように、従来の窒化硼素焼
結体に比べて、高気孔率で、空気透過係数が高く、高強
度を保持したものとするには、適正化された六方晶窒化
硼素粉末原料を用い、常圧焼結法によって焼成すること
によって行うことができる。In order to maintain a high porosity, a high air permeability coefficient and a high strength as compared with the conventional boron nitride sintered body as in the case of the device of the present invention, an optimized hexagonal crystal is required. It can be carried out by firing using a boron nitride powder raw material by a normal pressure sintering method.
【００１７】すなわち、本発明に用いる六方晶窒化硼素
粉末は、平均粒径１０μｍ以下、酸素含有量が１．５〜
３重量％で、しかも酸化硼素含有量が０．３重量％以下
のものである。酸化硼素成分は、窒化硼素粉末をメタノ
ール中に分散させ、その溶出量から測定することができ
る。六方晶窒化硼素粉末原料の成形は、金型プレス、冷
間静水圧プレス、押し出し成形などのいずれでもよく、
焼結体中の気孔率が４０〜６０体積％となるように成形
圧力が調整される。また、焼成は、Ｎ2、Ａｒなどの不
活性雰囲気下、温度１８００〜２３００℃、特に１９０
０〜２２００℃の常圧下で行われる。これを、加圧焼結
をしたり、焼成温度を上記範囲を逸脱させたりすると、
目的とする気孔率、空気透過係数、室温曲げ強さを有す
る窒化硼素焼結体を製造することができなくなる。That is, the hexagonal boron nitride powder used in the present invention has an average particle size of 10 μm or less and an oxygen content of 1.5 to 1.5 μm.
It is 3% by weight and has a boron oxide content of 0.3% by weight or less. The boron oxide component can be measured by dispersing boron nitride powder in methanol and eluted. The molding of the hexagonal boron nitride powder raw material may be any of mold pressing, cold isostatic pressing, extrusion molding, and the like.
The molding pressure is adjusted so that the porosity in the sintered body is 40 to 60% by volume. The firing is performed under an inert atmosphere such as N 2 or Ar at a temperature of 1800 to 2300 ° C., particularly 190 ° C.
It is performed under normal pressure of 0 to 2200 ° C. When this is pressure-sintered or the firing temperature is deviated from the above range,
This makes it impossible to produce a boron nitride sintered body having the desired porosity, air permeability coefficient, and room-temperature bending strength.
【００１８】すなわち、上記適正化された六方晶窒化硼
素粉末を用い、成形後、特定温度で常圧焼結することに
よって、気孔率４０〜６０体積％、空気透過係数１．１
〜２．０×１０-9ｍｏｌ・ｍ／ｍ2・ｓ・Ｐａ、室温３
点曲げ強さ２０ＭＰａ以上の窒化硼素焼結体の製造が可
能となる。なお、窒化硼素焼結体の純度としては、９９
重量％以上であることが好ましく、低純度の器具では窒
化アルミニウム焼結体に不純物が混入する恐れが高ま
る。That is, the above-mentioned optimized hexagonal boron nitride powder is compacted and sintered at normal pressure at a specific temperature to obtain a porosity of 40 to 60% by volume and an air permeability coefficient of 1.1.
~ 2.0 × 10 -9 mol · m / m 2 · s · Pa, room temperature 3
It is possible to produce a boron nitride sintered body having a point bending strength of 20 MPa or more. The purity of the boron nitride sintered body is 99
It is preferable that the content is not less than% by weight, and in a low-purity tool, there is a high possibility that impurities are mixed into the aluminum nitride sintered body.
【００１９】[0019]
【実施例】以下、実施例と比較例をあげて更に具体的に
本発明を説明する。The present invention will be described more specifically below with reference to examples and comparative examples.
【００２０】実施例１〜４ 比較例１〜２ 平均粒子径、酸素含有量及び酸化硼素含有量が表１であ
る六方晶窒化硼素粉末を用い、４ＭＰａで金型成形後、
実施例１〜４及び比較例１では１００ＭＰａのＣＩＰ処
理を、また比較例２では５０ＭＰａのＣＩＰ処理をそれ
ぞれを行った。次いで、これらのＣＩＰ成形体を窒素雰
囲気中、温度２０００℃で６０分間焼成処理を行い、貫
通孔を有する多孔質構造の窒化硼素焼結体（長さ３００
ｍｍ、幅２００ｍｍ、厚み５ｍｍ）を作製した。Examples 1-4 Comparative Examples 1-2 A hexagonal boron nitride powder having an average particle diameter, an oxygen content and a boron oxide content shown in Table 1 was used to form a mold at 4 MPa.
In Examples 1 to 4 and Comparative Example 1, a CIP process of 100 MPa was performed, and in Comparative Example 2, a CIP process of 50 MPa was performed. Next, these CIP compacts are baked in a nitrogen atmosphere at a temperature of 2000 ° C. for 60 minutes to obtain a porous boron nitride sintered body having through holes (length 300 mm).
mm, width 200 mm, thickness 5 mm).
【００２１】比較例３〜４ 平均粒子径、酸素含有量及び酸化硼素含有量が表１であ
る六方晶窒化硼素粉末を用い、ホットプレス法にて圧力
１５ＭＰａ、温度２０００℃で６０分間焼成処理を行
い、多孔質構造の窒化硼素焼結体（長さ３００ｍｍ、幅
２００ｍｍ、厚み５ｍｍ）を作製した。Comparative Examples 3 and 4 A hexagonal boron nitride powder having an average particle size, oxygen content and boron oxide content shown in Table 1 was calcined by hot pressing at a pressure of 15 MPa and a temperature of 2000 ° C. for 60 minutes. Then, a porous boron nitride sintered body (length 300 mm, width 200 mm, thickness 5 mm) was produced.
【００２２】上記で得られた窒化硼素焼結体から３ｍｍ
×３ｍｍ×３ｍｍ形状の試験片を切り出し、水銀ポロシ
メーター（島津製作所社製）により気孔率を測定した。
また、３ｍｍ×４ｍｍ×４０ｍｍ形状の試験片を切り出
し、室温における３点曲げ強さを測定した。更に、直径
５５ｍｍ×厚さ５ｍｍの試験片を切り出し、ＪＩＳＫ７
１２６に記載されたＡ法（差圧法）に準じ、室温におい
て、片面を大気圧、他面を減圧下に晒し、その圧力差を
１．０１×１０5Ｐａにして空気透過係数を測定した。3 mm from the boron nitride sintered body obtained above
A test piece having a shape of 3 mm x 3 mm was cut out, and the porosity was measured with a mercury porosimeter (manufactured by Shimadzu Corporation).
Further, a test piece having a shape of 3 mm × 4 mm × 40 mm was cut out, and the three-point bending strength at room temperature was measured. Further, a test piece having a diameter of 55 mm and a thickness of 5 mm was cut out and subjected to JISK7.
In accordance with the method A (differential pressure method) described in No. 126, one side was exposed to atmospheric pressure and the other side under reduced pressure at room temperature, and the pressure difference was set to 1.01 × 10 5 Pa, and the air permeability coefficient was measured.
【００２３】次に、窒化アルミニウム粉末に少量のイッ
トリア粉末を混合し、更にバインダーとしてポリビニル
ブチラールを添加し、金型プレス法にて大きさ２５０ｍ
ｍ×１５０ｍｍ×１０ｍｍの成形体を成形した。この成
形体を、実施例１〜４及び比較例１〜４で得られた窒化
硼素焼結体からなるセッターに載せ、温度５５０℃で１
０時間、空気雰囲気中で脱脂処理を行い、脱脂体の割れ
・クラックの有無を目視観察すると共に、得られた脱脂
体の一部を切り出し、残存カーボンの有無をＬＥＣＯ社
製「ＣＳ−３４４」を用い、高周波加熱燃焼赤外吸収分
析法により測定した。Next, a small amount of yttria powder is mixed with the aluminum nitride powder, and polyvinyl butyral is further added as a binder.
A molded body of mx 150 mm x 10 mm was molded. The compact was placed on a setter composed of the boron nitride sintered bodies obtained in Examples 1 to 4 and Comparative Examples 1 to 4,
Degreasing treatment was performed in an air atmosphere for 0 hour, and the presence or absence of cracks and cracks in the degreased body was visually observed. A part of the obtained degreased body was cut out to determine whether or not residual carbon was present. Was measured by high-frequency heating combustion infrared absorption analysis.
【００２４】次いで、脱脂体をセッターに載せたまま、
六方晶窒化硼素製の容器に収納し、温度１９００℃で３
時間焼成を行い、窒化アルミニウム焼結体を製造した。
得られた焼結体を中央部より切断し、切断面の色調の均
一性を目視観察した。これらの結果を表２に示す。Next, with the degreased body placed on the setter,
Stored in a container made of hexagonal boron nitride,
After firing for a time, an aluminum nitride sintered body was manufactured.
The obtained sintered body was cut from the center, and the uniformity of the color tone of the cut surface was visually observed. Table 2 shows the results.
【００２５】[0025]
【表１】 [Table 1]
【００２６】[0026]
【表２】 [Table 2]
【００２７】[0027]
【発明の効果】本発明の窒化アルミニウム成形体の脱脂
・焼成用器具によれば、大型・厚肉形状の窒化アルミニ
ウム成形体の脱脂処理を均一かつ迅速に行うことがで
き、しかも脱脂体を載せたまま焼成処理を行うことがで
きるので、大型・厚肉形状の均質な窒化アルミニウム焼
結体を容易に製造することができる。According to the apparatus for degreasing and firing an aluminum nitride molded article of the present invention, a large and thick aluminum nitride molded article can be uniformly and quickly degreased, and the degreased article can be placed thereon. Since the sintering process can be performed as it is, a large-sized and thick-walled homogeneous aluminum nitride sintered body can be easily manufactured.
フロントページの続き (72)発明者 吉野 信行 福岡県大牟田市新開町１ 電気化学工業株 式会社大牟田工場内 Ｆターム(参考） 4G001 BA09 BA35 BA36 BA71 BA73 BB09 BB35 BB36 BB71 BB73 BC13 BC34 BC62 BD04 BD07 BD14 BD36 BD38 BE33 BE34 4G019 FA13 FA15 Continuation of the front page (72) Inventor Nobuyuki Yoshino 1 Shinkaicho, Omuta-shi, Fukuoka F-term in the Omuta Plant of Electrochemical Industry Co., Ltd. 4G001 BA09 BA35 BA36 BA71 BA73 BB09 BB35 BB36 BB71 BB73 BC13 BC34 BC62 BD04 BD07 BD14 BD36 BD38 BE33 BE34 4G019 FA13 FA15
Claims (1)
ＭＰａ以上、空気透過係数１．１〜２．０×１０-9ｍｏ
ｌ・ｍ／ｍ2・ｓ・Ｐａである多孔質構造の窒化硼素焼
結体からなることを特徴とする窒化アルミニウム成形体
の脱脂・焼成用器具。1. A porosity of 40 to 60% by volume and a flexural strength of 20
MPa or more, air permeability coefficient 1.1 to 2.0 × 10 -9 mo
An apparatus for degreasing and firing an aluminum nitride molded body, comprising a boron nitride sintered body having a porous structure of l · m / m 2 · s · Pa.
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|---|---|---|---|
| JP29186398A JP4073558B2 (en) | 1998-10-14 | 1998-10-14 | Method for producing sintered boron nitride |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29186398A JP4073558B2 (en) | 1998-10-14 | 1998-10-14 | Method for producing sintered boron nitride |
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| JP4073558B2 JP4073558B2 (en) | 2008-04-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007176788A (en) * | 2005-11-29 | 2007-07-12 | Gako Imai | Composition for porous ceramic, porous ceramic using the same and method for manufacturing the same |
| CN111825465A (en) * | 2020-06-01 | 2020-10-27 | 福州派尔盛陶瓷有限公司 | Preparation method of high-purity boron nitride for sintering aluminum nitride substrate |
| WO2022210555A1 (en) * | 2021-03-31 | 2022-10-06 | デンカ株式会社 | Setter for ceramic firing |
| WO2023190525A1 (en) * | 2022-03-31 | 2023-10-05 | デンカ株式会社 | Sintered boron nitride object, production method therefor, setter, and vessel |
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|---|---|---|---|---|
| CN104071760B (en) * | 2014-07-08 | 2016-02-03 | 河北工业大学 | The preparation method of the bar-shaped hexagonal boron nitride stupalith of a kind of porous |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007176788A (en) * | 2005-11-29 | 2007-07-12 | Gako Imai | Composition for porous ceramic, porous ceramic using the same and method for manufacturing the same |
| JP4540656B2 (en) * | 2005-11-29 | 2010-09-08 | 雅興 今井 | Composition for porous ceramics, porous ceramics using the same, and method for producing the same |
| CN111825465A (en) * | 2020-06-01 | 2020-10-27 | 福州派尔盛陶瓷有限公司 | Preparation method of high-purity boron nitride for sintering aluminum nitride substrate |
| CN111825465B (en) * | 2020-06-01 | 2022-11-22 | 福州派尔盛陶瓷有限公司 | Preparation method of high-purity boron nitride for sintering aluminum nitride substrate |
| WO2022210555A1 (en) * | 2021-03-31 | 2022-10-06 | デンカ株式会社 | Setter for ceramic firing |
| JPWO2022210555A1 (en) * | 2021-03-31 | 2022-10-06 | ||
| JP7333486B2 (en) | 2021-03-31 | 2023-08-24 | デンカ株式会社 | Setter for firing ceramics |
| WO2023190525A1 (en) * | 2022-03-31 | 2023-10-05 | デンカ株式会社 | Sintered boron nitride object, production method therefor, setter, and vessel |
| JP7378690B1 (en) | 2022-03-31 | 2023-11-13 | デンカ株式会社 | Boron nitride sintered body, its manufacturing method, setter, and container |
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|---|---|
| JP4073558B2 (en) | 2008-04-09 |
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