JP2000114900A - Jig and method for sealing piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain simplification and improvement in production efficiency. SOLUTION: This method is provided with a first jig 30 for positioning and fixing a housing part 22 for housing a piezoelectric vibrator and a second jig 40, which is constituted attachable and detachable to the first jig 30, for positioning and fixing a lid part 23 for sealing the housing part 22 at the position corresponding to the housing part 22 positioned and fixed by the first jig 30 in the case of mounting on the first jig 30. In this case, the first jig 30 positioning and fixing the housing part 22 is arranged on the downside, the second jig 40 positioning and fixing the lid part 23 is mounted from the upside, the housing part 22 and lid part 23 are bonded and the piezoelectric vibrator is sealed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrating element sealed by joining a housing for accommodating a piezoelectric vibrating element and a lid for sealing the housing via a sealing material. The present invention relates to a jig and a method for sealing a piezoelectric vibrating element used when performing the method.

[0002]

2. Description of the Related Art FIG. 16 is a partially sectional perspective view showing an example of a general piezoelectric vibrator, and FIG. 17 is a side view thereof.

The piezoelectric vibrator 10 has a box-shaped base 12 having a space 12a for accommodating a plate-shaped piezoelectric vibration element 11, and a plate-like base 12 joined to the base 12 so as to seal the space 12a. Is provided. The other end of the piezoelectric vibrating element 11 is connected and fixed to an electrode 14 disposed in the space 12a via a conductive adhesive (not shown) so that one end is a free end. The outer dimension in the planar direction of the base 12 is formed to be larger than the outer dimension in the planar direction of the lid 13, and the contact surface between the base 12 and the lid 13 is joined via the sealing material 15. I have.
Here, for example, quartz is used as the material of the piezoelectric vibrating element 11, ceramic such as alumina is used as the material of the base 12, and metal such as Kovar or ceramic such as alumina is used as the material of the lid 13. Is used. In addition, as a material of the sealing material 15, low melting point glass, silver brazing, solder, or the like is used.

[0004] A method of sealing the piezoelectric vibrating element 11 of the piezoelectric vibrator 10 having such a configuration will be described below.

FIGS. 18A to 18C are views showing a first method of sealing a conventional piezoelectric vibrating element. The sealing jig 1 used in this sealing method is fixed to the base fixing plate 2 for fixing the base 12 and the base fixing plate 2, and is used for fixing the lid 13. It is composed of a lid fixing plate 3. The base fixing plate 2 includes a base 12
And a plurality of base fixing through-holes 2a (only one is shown in the figure for convenience) having substantially the same dimensions as the outer dimensions of the base 12 in the planar direction. The cover fixing plate 3 is made of a plate material thinner than the thickness of the cover 13, and the cover fixing through-hole 3 a having substantially the same dimension as the outer dimension in the planar direction of the cover 13 corresponds to the base fixing through-hole 2 a. A plurality (only one is shown for the sake of convenience) is provided. Therefore, when the base fixing plate 2 and the lid fixing plate 3 are tightly fixed, the base fixing through hole 2a and the lid fixing through hole 3a
Between steps a, a step 1a having a width corresponding to the difference in the outer dimensions of the base 12 and the lid 13 in the planar direction is formed.

[0006] The sealing jig 1 having such a configuration is used in FIG.
As shown in (A), the cover 3 is set on a table such that the cover fixing plate 3 faces downward. On the other hand, the sealing material 15 is fixed to the joining surface side of the lid 13 formed in a predetermined shape. When the sealing material 15 is a low melting point glass, the sealing material 15 is fused and fixed only to a joint portion between the lid 13 and the base 12. When the sealing material 15 is silver brazing or solder, it is fixed by rolling or plating on the entire surface of the lid 13 on the joining side. And
As shown in FIG. 18 (B), the lid 13 to which the sealing material 15 has been fixed is attached to the base fixing plate 2 from the side of the base fixing through hole 2a of the base fixing plate 2 so that the joining surface side faces upward. The plate 3 is fitted into the cover fixing through hole 3a. Next, as shown in FIG. 18C, the base 12 on which the piezoelectric vibrating element 11 is set is fixed to the base fixing plate 2 so that the space 12a faces the joint surface of the lid 13. Through hole 2a
And is placed on the lid 13. Then, a pressure is applied between the base 12 and the lid 13 with a weight or the like to apply the sealing material 1.
5, the sealing material 15 is heated by raising the temperature of the atmosphere in a belt furnace or the like, and the sealing material 15 is melted to join the base 12 and the lid 13. Finally, the joined base 12 and lid 13 are taken out of the base fixing plate 2 from the base fixing through hole 2a side, so that the piezoelectric vibration element 11
Can be obtained airtightly sealed.
Note that the sealing material 15 may be fixed to the base 12.

However, due to the pressurization and heating of the sealing material 15, the molten sealing material 15 protrudes from the joint between the base 12 and the lid 13 to a considerable extent. FIG.
As shown in the enlarged view of (C), a space formed by the step 1a is formed near the joint between the base 12 and the lid 13, and the space between the base 12 and the lid 13 which is the width of this space is formed. The difference in the outer dimension in the plane direction is small, and the difference in thickness between the lid 13 and the base fixing plate 2 which is the height of the space is also small.
Is very thin, so that the base fixing plate 2 cannot be made extremely thin. Therefore, the protruding sealing material 15 may adhere to the inner surface of the base fixing through hole 2 a of the base fixing plate 2 or the upper surface of the lid fixing plate 3. In such a case, the joined base 12 and lid 13
And the sealing jig 1 are integrated, so that the joined base 12 and lid 13 cannot be taken out from the base fixing through hole 2a side of the base fixing plate 2 or can be temporarily taken out. However, there is a problem that it is difficult to remove the sealing material 15 remaining on the sealing jig 1.

FIGS. 19A to 19C are views showing a second method of sealing a conventional piezoelectric vibrating element which solves the above-mentioned problem. The sealing jig 4 used in this sealing method is fixed to the base fixing plate 5 for fixing the base 12 and the base fixing plate 5, and is used for fixing the lid 13. It is composed of a lid fixing plate 6. The base fixing plate 5 is made of a plate material that is thinner than the thickness of the base fixing plate 2 in FIG. 18, and has a plurality of base fixing through holes 5 a having substantially the same dimensions as the outer dimensions in the planar direction of the base 12 (one in FIG. Only shown). The cover fixing plate 6 includes a cover 13
And a plurality of grooves 6a (in the drawing, one for convenience) corresponding to the base fixing through-holes 5a, the groove 6a being larger than the thickness of the base fixing plate 5 in the planar direction. Only shown)
The dimensions are substantially the same as the outer dimensions of the lid 13 in the planar direction,
A plurality of lid fixing through holes 6b thinner than the thickness of the lid fixing plate 3 of FIG. 18 are provided at the bottom of the groove 6a so as to correspond to the base fixing through holes 5a (only one is shown in the figure for convenience). I have. Therefore, the base fixing plate 5 and the lid fixing plate 6
18 is formed between the base fixing through-holes 5a and the lid fixing through-holes 6b when the is fixedly adhered to the groove 6a, which is larger than the space formed by the step 1a in FIG.

[0009] The sealing jig 4 having the above-described structure is used in FIG.
As shown in (A), the lid 5 is set on a table such that the lid fixing plate 5 faces downward. On the other hand, the sealing material 15 is fixed to the joining surface side of the lid 13 formed in a predetermined shape. And
As shown in FIG. 19 (B), the lid 13 to which the sealing material 15 has been fixed is fixed to the base fixing plate 5 from the base fixing through-hole 5a side so that the joining surface side faces upward. The plate 6 is fitted into the cover fixing hole 6b. Next, as shown in FIG. 19C, the base 12 on which the piezoelectric vibration element 11 is set is fixed to the base fixing plate 5 with the space 12a facing the joint surface of the lid 13, as shown in FIG. Through hole 5a
And is placed on the lid 13. Then, a pressure is applied between the base 12 and the lid 13 with a weight or the like to apply the sealing material 1.
5, the sealing material 15 is heated by raising the temperature of the atmosphere in a belt furnace or the like, and the sealing material 15 is melted to join the base 12 and the lid 13. Finally, the joined base 12 and lid 13 are taken out from the base fixing plate 5 through the base fixing through-hole 5a, so that the piezoelectric vibration element 11
Can be obtained airtightly sealed.
Note that the sealing material 15 may be fixed to the base 12.

If the sealing is performed using such a sealing jig 4, a large space is formed by the groove 6a near the joint between the base 12 and the lid 13, so that FIG.
As shown in the enlarged view of (C), even if the sealing material 15 protrudes from the joint between the base 12 and the lid 13 due to the pressurization and heating of the sealing material 15, it protrudes. There is no possibility that the sealing material 15 adheres to the base fixing plate 5 or the lid fixing plate 6.

However, since the sealing jig 4 used in the above-described second sealing method of the conventional piezoelectric vibrating element has to form the groove 6a, the processing becomes smaller as the piezoelectric vibrator 10 becomes smaller and thinner. In addition, there is a problem in that it is very difficult to have the contradictory functions of forming the positioning portion of the lid 13 as the lid fixing through hole 6b and the escape portion of the sealing material 15 as the groove 6a. Lid 1
When fitting 3 into the lid fixing through-hole 6b of the lid fixing plate 6 from the side of the base fixing through-hole 5a of the base fixing plate 5, as shown by the one-dot chain line in FIG. There is a very high possibility that the cover 13 will slip into the groove 6a to cause a positional shift, and there is also a problem that manufacturing efficiency is reduced.
Further, as shown in the enlarged view of FIG. 19C, the sealing material 15 protruding from the joint portion between the base 12 and the lid 13 is
In some cases, the sealing material 15 protrudes from the side surface of the base 12 and gets caught in the base fixing through-hole 5 a of the base fixing plate 5. In addition, there is a problem that the lid 13 cannot be taken out from the base fixing through-hole 5a side of the base fixing plate 5.

On the other hand, the first of the above-described conventional piezoelectric vibrating elements
The sealing jigs 1 and 4 used in the second sealing method are both configured to be joined to the base 12 with the lid 13 having a slightly smaller outer dimension in the planar direction than the base 12 facing down. Therefore, a part of the sealing material 15 protruding from the joint between the base 12 and the lid 13 flows down to the lid 13 side. Therefore, it is not suitable for sealing a piezoelectric vibrator that requires higher reliability airtightness.

FIGS. 20 (A) to 20 (D) show a third sealing of a conventional piezoelectric vibrating element suitable for sealing a piezoelectric vibrator which is required to solve the above-mentioned problem and which requires more reliable airtightness. It is a figure showing a stop method. The sealing jig 7 used in this sealing method includes a base fixing plate 8 for fixing the base 12.
Can be detachably attached to the base fixing plate 8, and the lid 13
Is formed of a lid fixing plate 9 for fixing the cover. The base fixing plate 8 is made of a plate material that is thicker than the thickness of the base 12, and is provided with a plurality of base fixing through holes 8 a having substantially the same dimensions as the outer dimensions in the planar direction of the base 12 (only one is shown in the drawing for convenience). I have. The lid fixing plate 9 is made of a plate material thinner than the thickness of the lid 13, and the lid fixing through-hole 9 a having substantially the same external dimensions as the planar dimension of the lid 13 corresponds to the base fixing through-hole 8 a. A plurality (only one is shown for the sake of convenience) is provided.

The base fixing plate 8 of the sealing jig 7 having such a configuration is set on a table as shown in FIG. Subsequently, the base 12 on which the piezoelectric vibration element 11 is set is fitted into the base fixing through hole 8a of the base fixing plate 8 so that the space 12a faces upward as shown in FIG. Put in. Then, as shown in FIG. 20 (C), the lid fixing plate 9 is placed on the base fixing plate 8 while positioning the base fixing through hole 8a and the lid fixing through hole 9a so as to correspond to each other. Place. On the other hand, the sealing material 15 is fixed to the joining surface side of the lid 13 formed in a predetermined shape. Then, the lid body 13 to which the sealing material 15 is fixed is
As shown in (D), the joint surface side is the space 1 of the base 12.
The cover 9 is fitted into the cover fixing through hole 9a of the cover fixing plate 9 so as to face the 2a side, and is placed on the base 12. Then, a pressure is applied between the base 12 and the lid 13 with a weight or the like to press the sealing material 15, and the temperature of the atmosphere is increased by a belt furnace or the like to heat the sealing material 15, and the sealing material 15 is heated. The base 15 and the lid 13 are joined by melting the base 15. Finally, the cover fixing plate 9 is removed from the base fixing plate 8, and the joined base 12 and the cover 13 are removed from the base fixing through hole 8 a of the base fixing plate 8. The hermetically sealed piezoelectric vibrator 10 can be obtained. Note that the sealing material 15 may be fixed to the base 12.

If sealing is performed using such a sealing jig 7, it is not necessary to form the groove 6a as shown in FIG. 19, so that the processing of the sealing jig 7 is facilitated. Lid 1
It is possible to prevent the displacement of the base 3 and the lid 13 from being taken out of the groove 6a and the displacement of the base 12 and the lid 13 from being removed. Furthermore, since it is configured so that the base 12 is joined to the lid 13 with the base 12 down, a part of the sealing material 15 protruding from the joint between the base 12 and the lid 13 can remain on the base 12. Therefore, it is suitable for sealing a piezoelectric vibrator that requires more reliable airtightness.

[0016]

As described above, in the sealing jig 7 used in the third conventional sealing method of the piezoelectric vibrating element, the base 12 whose outer dimension in the plane direction is slightly larger than the lid 13 is used. Is configured so as to be joined to the lid 13 with the side facing downward. For this reason, at the time of joining, first, it is necessary to set the base fixing plate 8 and fit the base 12, and then to set the lid fixing plate 9 and fit the lid 13. After completion of the joining, the lid 12 must be removed after removing the lid fixing plate 9. Therefore, there is a problem that it takes time and production efficiency is low.

Although this problem can be solved by making the outer dimensions of the base 12 and the lid 13 in the plane direction the same, a problem of adhesion of the sealing material 15 to the sealing jig arises.

An object of the present invention is to solve the above-mentioned problems and to provide a simple and high-efficiency sealing jig and method for sealing a piezoelectric vibrating element.

[0019]

According to a first aspect of the present invention, a storage portion for storing a piezoelectric vibrating element and a lid portion for sealing the storage portion are joined via a sealing material. A jig used for sealing the piezoelectric vibrating element, the first jig for positioning and fixing the storage portion, and the jig is configured to be detachable from the first jig. A second jig for positioning and fixing the lid portion at a position corresponding to the storage portion which is positioned and fixed to the first jig when attached to the jig; The first jig whose part is positioned and fixed is arranged on the lower side, the second jig whose lid is fixed and mounted is mounted from above, and the storage part and the lid are joined. And a sealing jig for the piezoelectric vibration element.

According to the first aspect of the present invention, it is possible to set the storage section and the lid section in separate jigs and then to join and seal the two sections together, so that the setting of the storage section and the lid section can be performed simultaneously. It can be advanced, and the lid can be joined from the upper side with the storage section on the lower side.

According to a second aspect of the present invention, in the configuration according to the first aspect, the first jig is configured to store and position and fix the storage portion so that a joint surface of the storage portion protrudes. A sealing jig for a piezoelectric vibrating element having a pocket and having a pocket for storing and positioning and fixing the lid so that the joint surface of the lid protrudes; .

According to the second aspect of the present invention, since a large space is formed in the vicinity of the joint surface between the storage portion and the lid portion, the sealing material does not adhere to the jig even if it protrudes from the joint surface. Also, there is no effect on the removal after joining. In addition, since the positioning and fixing are performed using the pocket, the positioning accuracy is improved.

According to a third aspect of the present invention, in the configuration according to the first or second aspect, the second jig has a magnetic attraction means for magnetically attracting and positioning and fixing the lid. Is a sealing jig.

According to the third aspect of the present invention, when the lid is made of a magnetic material, positioning and fixing can be easily performed, and the lid can be joined from the upper side with the storage section on the lower side.

According to a fourth aspect of the present invention, in the configuration according to the first or second aspect, the second jig has a vacuum suction means for positioning and fixing the lid by vacuum suction. Is a sealing jig.

According to the fourth aspect of the present invention, when the lid is made of a non-magnetic material, the positioning and fixing can be easily performed, and the lid can be joined from the upper side with the storage section on the lower side.

According to a fifth aspect of the present invention, in the configuration according to any one of the first to fourth aspects, a guide means for attaching and detaching the second jig to and from the first jig is provided. This is a jig for sealing a piezoelectric vibration element.

According to the fifth aspect of the present invention, it is easy to set the storage portion and the lid portion on separate jigs and then to combine the two, so that the joint surfaces of the storage portion and the lid portion can be reliably brought into contact. it can.

According to a sixth aspect of the present invention, the housing for accommodating the piezoelectric vibrating element and a lid for sealing the accommodating section are joined via a sealing material to seal the piezoelectric vibrating element. In the method, when the storage portion is positioned and fixed to a first jig and a second jig configured to be detachable from the first jig is mounted on the first jig. And the first
The lid is positioned and fixed at a position corresponding to the storage portion that is positioned and fixed to the jig, and the first jig is disposed on the lower side, and the second jig is mounted from above. A bonding surface of the housing portion and a bonding surface of the lid portion are brought into close contact with each other, the sealing material is heated and pressed to melt, and the storage portion and the lid portion are bonded to each other. This is a sealing method.

According to the sixth aspect of the present invention, the storage portion and the lid portion are set on separate jigs and then combined and sealed by combining them, so that the storage portion can be set downward without increasing the number of steps. The lid can be joined from above.

According to a seventh aspect of the present invention, there is provided a method for sealing a piezoelectric vibrating element according to the sixth aspect, wherein the lid is magnetically attracted and positioned and fixed.

According to the seventh aspect of the present invention, when the lid is made of a magnetic material, the positioning and fixing can be easily performed, and the lid can be easily joined from the upper side with the storage section on the lower side. Can be.

An eighth aspect of the present invention is a method for sealing a piezoelectric vibrating element according to the sixth aspect, wherein the lid is positioned and fixed by vacuum suction.

According to the eighth aspect of the invention, when the lid is made of a non-magnetic material, the positioning and fixing can be easily performed, and the lid can be easily joined from the upper side with the storage section being on the lower side. be able to.

[0035]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing a piezoelectric vibrator manufactured by the method for sealing a piezoelectric vibrating element of the present invention.

The piezoelectric vibrator 20 is joined to a box-shaped base (housing portion) 22 in which a space 22a for accommodating a plate-shaped piezoelectric vibration element 21 is formed, and to the base 22 so as to seal the space 22a. Provided in the form of a plate-shaped lid (lid portion) 23. The piezoelectric vibrating element 21 has an electrode 24 whose other end is disposed in the space 22a such that one end is a free end.
It is connected and fixed thereto via a conductive adhesive 28. The outer dimension in the planar direction of the base 22 is formed to be larger than the outer dimension in the planar direction of the lid 23, and the contact surface between the base 22 and the lid 23 is joined via the sealing material 25. I have. Here, for example, quartz is used as the material of the piezoelectric vibration element 21, ceramic such as alumina is used as the material of the base 22, and the linear expansion coefficient of the ceramic such as alumina is used as the material of the lid 23. A metal such as near Kovar or a ceramic such as alumina is used. Further, as a material of the sealing material 25, low melting point glass, silver brazing, solder, or the like is used. When the sealing material 25 is silver brazing or solder, the joining surface of the base 22 is subjected to tungsten metallization, nickel plating is applied thereon, and gold plating is applied thereon. I have. Nickel plating or gold plating is applied to the joint surface of the lid 23, and the sealing material 25 is fused thereon.

FIGS. 2 and 3 are exploded perspective views showing an embodiment of a jig for sealing a piezoelectric vibrating element according to the present invention. The jig shown in FIG. 2 is a jig 30 for holding the base 22, and the jig shown in FIG. 3 is a jig 4 for holding the lid 23.
0. In this sealing jig, the base holding jig 30 and the lid holding jig 40 are configured to be detachable from each other, the base holding jig 30 is arranged on the lower side, and the lid holding jig 40 is Used by mounting from above.

The base holding jig 30 has a rectangular plate-shaped base jig main body 31 for mounting the base 22 thereon and a rectangular shape substantially the same as the base jig main body 31 for positioning the base 22. A base positioning plate 35 having a plate shape smaller than the thickness of the base 22 is provided. The base-side jig main body 31 has a circular lid-side guide pin through-hole 33 for passing a lid-side guide pin 42 provided in a lid-side holding jig 41 described later, in this example, near the opposing side surface. And two base positioning plates.
Guide pin 3 for base positioning plate for guiding 5
In this example, 4 are provided in the vicinity of other opposing side surfaces, respectively. The base positioning plate 35 is provided with a rectangular base positioning through hole 36 for housing and positioning the base 22 and a lid side guide pin 42 provided in a lid side holding jig 41 described later. A circular guide hole 37 for guiding the lid side is provided so as to correspond to each through hole 33 for the guide pin on the lid side, and a circular shape for passing the guide pin 34 for the base positioning plate. The base positioning plate guide pin through holes 38 are provided so as to correspond to the respective base positioning plate guide pins 34.

The lid holding jig 40 is substantially the same as the lid-side jig main body 41 for mounting the lid 23 and a lid-side jig main body 41 for positioning the lid 23. A lid-shaped positioning plate 45 having a rectangular shape and a thickness smaller than the thickness of the lid 23 is provided. The lid-side jig main body 41 includes a lid-side guide pin 42 for guiding the base holding jig 30.
However, in this example, the base holding jig 3
0, a through hole 33 for each lid side guide pin provided in
37, and one guide pin 43 for the lid positioning plate for guiding the lid positioning plate 45 is provided in the vicinity of the other facing side in this example. . Further, the lid-side jig body 41 includes:
Lid 2 housed in lid positioning through hole 46 to be described later
A high-temperature, for example, samarium-based or cerium-based magnet 44 in the form of a rectangular plate for magnetically attracting 3 is exchangeably embedded and fixed to the inner surfaces of the guide pins 42, 43. The lid positioning plate 45 has a rectangular lid positioning through hole 46 for receiving and positioning the lid 23.
Are provided so as to correspond to the respective base positioning through holes 36 provided in the base positioning plate 35, and a circular cover body side guide pin through hole 47 for passing the cover body side guide pin 42 is provided. A circular lid is provided to correspond to each of the lid side guide pin through holes 33 and 37 provided in the base holding jig 30, and further has a circular lid for passing the guide pin 43 for the lid positioning plate. The positioning plate guide pin through holes 48 are provided so as to correspond to the respective cover body positioning plate guide pins 43. Incidentally, the entire lid side jig main body 41 may be formed of a high temperature resistant magnet such as a samarium-based or cerium-based magnet.

The base-side jig main body 31 having the above-described configuration.
By combining the base jig body 31 with the base positioning plate 35, the base positioning through hole 36
However, it is formed as a pocket for housing and positioning and fixing the base 22 so that the joint surface of the base 22 protrudes. Further, the lid side jig body 41 and the lid positioning plate 45
The surface of the magnet 44 and the lid positioning through hole 46 are formed as pockets for housing and positioning and fixing the lid 23 so that the joint surface of the lid 23 projects. As a result, the base 22 and the lid 23 are respectively connected to the base holding jig 30 and the lid holding jig 40.
When the lid 23 is made of a magnetic material, it can be magnetically attracted by the magnet 44 to easily perform the positioning and fixing. Lid 2 placed below
3 can be joined and sealed from above. Further, since the sliding after the combination of the base holding jig 30 and the lid holding jig 40 is guided by the lid side guide pin 42, the base 22 and the lid 23 can be brought into contact with high accuracy. Further, by providing the lid holding jig 40 on the upper side with a necessary and sufficient weight, a special jig component required for pressurizing a weight or the like becomes unnecessary. In addition, since a large space (part A in FIG. 7) is formed near each joint surface between the base 22 and the lid 23, even if the sealing material 25 protrudes from the joint surface, the base holding jig 30 and the lid Bonding and sealing can be performed without adhering to the holding jig 40 and without affecting removal after bonding. Furthermore, there is no need to newly provide a relief for the sealing material 25 in the base holding jig 30 or the lid holding jig 40, and the jig structure can be greatly simplified. Further, the base-side jig main body 31, the base positioning plate 35, the guide pin 34 for the base positioning plate, the lid-side jig main body 41, the lid positioning plate 45, the lid-side guide pin 42, the guide pin 43 for the lid positioning plate, Since the magnet 44 is formed as a separate body, it can be partially replaced according to the state of deterioration.

FIGS. 4 to 8 are views showing an embodiment of a method of sealing a piezoelectric vibrating element according to the present invention, using a base holding jig 30 and a lid holding jig 40 shown in FIGS. Figure 1
This is a method for sealing the piezoelectric vibrating element 21 of the piezoelectric vibrator 20 shown in FIG. 4 (B) and FIG. 5 (B) correspond to FIG.
FIG. 6A is a cross-sectional side view taken along line AA shown in FIG. 5A and FIG. First, a plate made of Kovar is press-processed, the cover 23 is punched and formed, nickel plating or gold plating is applied to the joint surface of the cover 23, and a sealing material 25 is fused thereon. On the other hand, a base 22 made of alumina is formed, and when the sealing material 25 is silver brazing, solder, or the like, a tungsten metallizing is performed on the bonding surface, a nickel plating is performed thereon, and a gold plating is further performed thereon. Apply. Then, an end of the piezoelectric vibrating element 21 made of quartz is connected and fixed to the electrode 24 disposed in the space 22 a of the base 22 via the conductive adhesive 28.

Next, as shown in FIG. 2, the base positioning plate 35 is placed above the base-side jig body 31 placed on the base.
And the guide pins 34 for each base positioning plate of the base jig main body 31 are passed through the corresponding through holes 38 for the base positioning plate guide pins of the base positioning plate 35, so that the base jig main body 31 The base positioning plate 35 is brought into close contact. Then, as shown in FIG.
The base 22 on which 1 is set is inserted into each base positioning through hole 36 of the base positioning plate 35 with the joining surface side facing upward, and two orthogonal sides of the base 22 are inserted into the base positioning through hole 36. Positioning is performed by abutting two orthogonal side surfaces.

On the other hand, as shown in FIG. 3, the lid positioning plate 45 is transported above the lid jig body 41 placed on the pedestal, and each lid guide pin 42 of the lid jig body 41 is moved. The guide pins 43 of the lid positioning plate 45 are passed through the corresponding through holes 47 for the respective guide pins of the lid side, and the guide pins 43 of the lid positioning plate of the jig main body 41 are respectively connected to the corresponding lids of the lid positioning plate 45. The lid-side jig body 41 and the lid positioning plate 45 are brought into close contact with each other by passing through the positioning plate guide pin through-holes 48. Then, as shown in FIG. 5, the lid 23 is inserted into each of the lid positioning through holes 46 of the lid positioning plate 45 so that the joining surface side faces upward, and the two orthogonal side surfaces of the lid 23 are inserted. Are brought into contact with two orthogonal side surfaces of the through hole 46 for positioning the lid, and the positioning is performed. At this time, each lid 23
Is magnetically attracted and fixed by a magnet 44 embedded in the lid-side jig main body 41.

Thereafter, as shown in FIG. 6, the lid holding jig 40 is turned over by 180 ° and transported above the base holding jig 30, and the lid side guide pins 42 of the lid holding jig 40 are used as bases. The joining surfaces of the lids 23 are brought into contact with the joining surfaces of the bases 22 by passing through the corresponding through holes 33 and 37 for the guide pins on the lid side of the holding jig 30, and the lids 23 are brought into contact with the bases 2.
2 Then, as shown in FIG. 7, pressure is applied downward from the upper portion of the lid holding jig 40 to apply the sealing material 2.
5, the temperature of the lid holding jig 40 and the base holding jig 30 is increased, and the sealing material 25 is set at 330 ° C. ±
Heat to 10 ° C. to melt the sealing material 25 and
2 and each lid 23 are joined. For this pressurization, the weight of the lid holding jig 40 may be used, or a weight or a spring made of a metal having high heat resistance may be used. Thereafter, as shown in FIG. 8, the lid holding jig 40 is raised and separated from the base holding jig 30, and the joined bases 22 and lids 23 are joined together.
From the lid holding jig 40. As described above, the piezoelectric vibrator 20 in which the piezoelectric vibrating element 21 is hermetically sealed is
You can get

According to the above sealing method, the base 2
Since the setting of the cover 2 and the cover 23 can proceed simultaneously, the sealing with the cover 23 facing upward can be performed without increasing the number of steps. Accordingly, the flow direction of the sealing material 25 is in the direction of the bonding surface suitable for hermetic sealing.
The reliability of the airtightness can be improved.

The base 22 can be set on the base holding jig 30 by transferring the jig (pallet or the like) from the previous process using an automatic machine. When setting the lid 23 on the lid holding jig 40, it is necessary to determine the front and back of the lid 23. However, the difference in the material of the portion where the sealing material 25 is attached, for example, Metal part and sealing material 2
It is possible to determine by reading the difference in the reflectance of the five portions using a sensor or the like.

FIGS. 9 and 10 are exploded perspective views showing another embodiment of a jig for sealing a piezoelectric vibrating element according to the present invention.
The jig shown in FIG. 9 is a jig 50 for holding the base 22.
The jig shown in FIG. 10 is a jig 60 for holding the lid 23. This sealing jig is also used as the base holding jig 5.
The base holding jig 50 is arranged on the lower side, and the lid holding jig 60 is attached from above to be used.

The base holding jig 50 has a rectangular plate-like base-side jig body 51 for mounting the base 22 and a rectangular shape substantially the same as the base-side jig body 51 for positioning the base 22. In addition, a plate-shaped base positioning plate 55 that is thinner than the thickness of the base 22 is provided. The base side jig body 51 has a circular cover side guide pin through hole 53 for passing a cover side guide pin 62 provided in a cover side holding jig body 61 described later. Two guide pins 54 are provided in the vicinity, and one guide pin 54 for the base positioning plate for guiding the base positioning plate 55 is provided in the vicinity of the other facing side in this example. The base positioning plate 55 is a base 2
A rectangular base positioning through hole 56 for accommodating and positioning the base 2 is provided, and a lid side guide pin 62 provided on a lid side holding jig 61 described later.
Through hole 57 for circular guide pin on lid side for passing through
Are provided so as to correspond to the through holes 53 for the guide pins for the lid side, and a through hole 58 for the guide pins for the base positioning plate having a circular shape for passing the guide pins 54 for the base positioning plate is provided. Guide pin 5 for positioning plate
4 is provided.

The lid holding jig 60 has substantially the same shape as the rectangular plate-shaped lid-side jig main body 61 for mounting the lid 23 and the lid-side jig main body 61 for positioning the lid 23. A lid positioning plate 65 having a rectangular shape and a thickness smaller than the thickness of the lid 23 is provided. The lid-side jig body 61 includes a lid-side guide pin 62 for guiding the base holding jig 50.
However, in this example, the base holding jig 5 is provided near the opposing side surface.
0, each cover body side guide pin through hole 53,
In this example, one guide pin 63 for the lid positioning plate for guiding the lid positioning plate 65 is provided in the vicinity of the other opposing side surface. . Further, the lid-side jig main body 61 includes:
Circular lid fixing through holes 64 for fixing the placed lid 23 by vacuum suction are provided in a matrix of 5 × 4 in this example. Lid positioning plate 65
Is provided with a rectangular lid positioning through hole 66 for accommodating and positioning the lid 23 so as to correspond to each base positioning through hole 56 provided in the base positioning plate 55. At the same time, a circular cover-side guide pin through hole 67 for passing the cover-side guide pin 62 is provided.
It is provided so as to correspond to each of the lid side guide pin through holes 53 and 57 provided in the base holding jig 50.

The base-side jig main body 51 having the above-described configuration.
The base positioning jig main body 51 and the base positioning through hole 56
However, it is formed as a pocket for housing and positioning and fixing the base 22 so that the joint surface of the base 22 protrudes. Also, the lid-side jig body 61 and the lid positioning plate 65
By combining these, the surface of the lid-side jig main body 61 and the lid positioning through hole 66 are formed as pockets for storing and positioning and fixing the lid 23 so that the joint surface of the lid 23 projects. . Thereby, the base 22 and the lid 23 can be positioned and fixed with high precision using the pockets of the base holding jig 50 and the lid holding jig 60, respectively, and the lid 23 is made of a non-magnetic material. In this case, the positioning and fixing can be easily performed by vacuum suction by the cover fixing through hole 64 and a nozzle such as a vacuum pump (not shown) inserted into the hole 64, and the base 22 can be disposed on the lower side. The lid 23 can be joined and sealed from above. Further, since the slide after the combination of the base holding jig 50 and the lid holding jig 60 is guided by the lid side guide pin 62, the base 22 and the lid 23 can be brought into contact with high accuracy. Furthermore, the lid holding jig 6 that comes to the upper side
By providing the necessary and sufficient weight to zero, special jig parts necessary for pressurizing a weight or the like become unnecessary. Also, base 2
A large space portion (FIG. 14)
Is formed, the sealing material 25 does not adhere to the base holding jig 50 and the lid holding jig 60 even if the sealing material 25 protrudes from the joining surface, and further affects the removal after joining. It is possible to perform the bonding and sealing without any problem. Further, the sealing material 2 is attached to the base holding jig 50 and the lid holding jig 60.
It is not necessary to newly provide a relief portion of No. 5, and the jig structure can be greatly simplified. Also, the base-side jig body 5
1, base positioning plate 55, base positioning plate guide pin 54, lid side jig main body 61, lid positioning plate 65,
Lid side guide pin 62, lid positioning plate guide pin 6
3 is formed separately, so that it can be partially replaced according to the state of deterioration.

FIGS. 11 to 15 are views showing another embodiment of the method of sealing the piezoelectric vibrating element of the present invention. The base holding jig 50 and the lid holding jig 60 shown in FIGS. 9 and 10 are shown. This is a method of sealing the piezoelectric vibrating element 21 of the piezoelectric vibrator 20 shown in FIG. 11 (B) and FIG.
FIG. 11B is a cross-sectional view taken along the line AA shown in FIGS.
It is a line sectional side view.

First, a plate material made of Kovar is pressed, the cover 23 is punched and formed, nickel plating or gold plating is applied to the joint surface of the cover 23, and a sealing material 25 is placed thereon.
Is fused. On the other hand, a base 22 made of alumina is formed, and when the sealing material 25 is silver brazing, solder, or the like, a tungsten metallizing is performed on the bonding surface, a nickel plating is performed thereon, and a gold plating is further performed thereon. Apply. Then, an end of the piezoelectric vibrating element 21 made of quartz is connected and fixed to the electrode 24 disposed in the space 22 a of the base 22 via the conductive adhesive 28.

Next, as shown in FIG. 9, the base positioning plate 55 is placed above the base-side jig body 51 placed on the base.
And the guide pins 54 for each base positioning plate of the base jig main body 51 are passed through the corresponding through holes 58 for the base positioning plate guide pins of the base positioning plate 55, and the base jig main body 51 The base positioning plate 55 is brought into close contact. Then, as shown in FIG. 11, the base 22 on which the piezoelectric vibrating element 21 is set is inserted into each base positioning through hole 56 of the base positioning plate 55 so that the joining surface side faces upward, and The two orthogonal side surfaces are brought into contact with the orthogonal two side surfaces of the base positioning through hole 56 for positioning.

On the other hand, as shown in FIG. 10, the lid positioning plate 65 is transported above the lid-side jig main body 61 placed on the pedestal, and each lid-side guide pin 62 of the lid-side jig main body 61 is moved.
Is passed through the corresponding through hole 67 for the guide pin on the lid side of the lid positioning plate 65, and the guide pin 63 for the lid positioning plate of the jig body 61 on the lid side is moved to the corresponding lid of the lid positioning plate 65. The lid-side jig main body 61 and the lid positioning plate 65 are brought into close contact with each other by passing through the through hole 68 for the body positioning plate guide pin. Then, as shown in FIG. 12, the lid 23 is set so that the joining surface side faces upward, and the lid positioning plate 65
The lid 23 is inserted into each of the lid positioning through holes 66, and the two orthogonal sides of the lid 23 are brought into contact with the orthogonal two sides of the lid positioning through hole 66 for positioning. Then, each lid fixing through hole 64 of the lid side jig main body 61 is connected to a vacuum pump or the like, and the lid 23 is fixed by vacuum suction.

Thereafter, as shown in FIG. 13, the lid holding jig 60 is turned over by 180 ° and transported above the base holding jig 50, and each lid side guide pin 62 of the lid holding jig 60 is moved.
Are passed through the corresponding through holes 53 and 57 for the guide pin on the lid side of the base holding jig 50 so that the joining surface of each lid 23 is brought into contact with the joining surface of each base 22, and each lid 23 is attached to each base. 22. Then, as shown in FIG. 14, the sealing material 25 is pressed by applying pressure downward from above the lid holding jig 60, and the temperatures of the lid holding jig 60 and the base holding jig 50 are reduced. Raise the sealing material 25 by 330 °
Heat to C ± 10 ° C. to melt the sealing material 25 and join each base 22 and each lid 23. This pressurization may use the own weight of the lid holding jig 60, or may use a weight or spring made of metal or the like having high heat resistance. Then, FIG.
As shown in FIG. 5, after the vacuum pump or the like is stopped to release the vacuum suction of the lid 23, the lid holding jig 60 is raised and separated from the base holding jig 50, and the joined bases 22 are removed.
Then, each lid 23 is taken out from the base holding jig 50. As described above, the piezoelectric vibrator 2 in which the piezoelectric vibrating element 21 is hermetically sealed
You can get 20 zeros at a time.

According to the above sealing method, the base 2
Since the setting of the cover 2 and the cover 23 can proceed simultaneously, the sealing with the cover 23 facing upward can be performed without increasing the number of steps. Accordingly, the flow direction of the sealing material 25 is in the direction of the bonding surface suitable for hermetic sealing.
The reliability of the airtightness can be improved.

The base 22 can be set on the base holding jig 50 by transferring the jig (pallet or the like) from the previous process using an automatic machine. Further, when setting the lid 23 on the lid holding jig 60, it is necessary to determine the front and back of the lid 23, but the material of the portion where the sealing material 25 is attached, for example, Metal part and sealing material 2
It is possible to determine by reading the difference in the reflectance of the five portions using a sensor or the like.

[0059]

According to the first aspect of the present invention, since the setting of the storage section and the lid section can be made to proceed simultaneously, the efficiency of the sealing operation can be improved. In addition, since the lid can be joined from the upper side with the storage section on the lower side, it is possible to seal the piezoelectric vibrating element that requires more reliable airtightness.

According to the second aspect of the present invention, even if the sealing material protrudes from the joining surface, it does not adhere to the jig and does not affect the removal after joining.
The reliability of sealing the piezoelectric vibration element can be improved. In addition, since the positioning accuracy between the storage section and the lid section is increased, the storage section and the lid section can be securely joined.

According to the third aspect of the present invention, when the lid is made of a magnetic material, the positioning and fixing can be easily performed, so that the sealing work efficiency is improved and the cost is significantly reduced. Can be.

According to the fourth aspect of the present invention, the positioning and fixing can be easily performed even when the lid is made of a non-magnetic material, so that the sealing work efficiency is improved and the cost is significantly reduced. Can be planned.

According to the fifth aspect of the present invention, the joining surfaces of the storage section and the lid section can be reliably brought into contact with each other.
The housing and the lid are securely joined to each other, and the sealing reliability of the piezoelectric vibrating element can be improved.

According to the sixth aspect of the present invention, the lid can be joined from the upper side with the storage section on the lower side without increasing the number of steps, so that the manufacturing cost and the like can be reduced, and It is possible to seal a piezoelectric vibrating element that requires highly reliable airtightness.

According to the seventh aspect of the present invention, when the lid is made of a magnetic material, it is easy to join the lid from the upper side with the storage part on the lower side, so that the manufacturing cost and the like can be further reduced. In addition to this, it is possible to seal the piezoelectric vibrating element that requires more reliable airtightness.

According to the eighth aspect of the present invention, even when the lid is made of a non-magnetic material, it is easy to join the lid from the upper side with the storage section on the lower side, so that the manufacturing cost and the like can be reduced. Further, it is possible to seal the piezoelectric vibrating element which is required to have further reduced airtightness.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a piezoelectric vibrator manufactured by a method for sealing a piezoelectric vibrating element of the present invention.

FIG. 2 is an exploded perspective view showing an embodiment of a jig for sealing a piezoelectric vibration element of the present invention.

FIG. 3 is an exploded perspective view showing an embodiment of a jig for sealing a piezoelectric vibration element of the present invention.

FIG. 4 is a first view showing an embodiment of a method for sealing a piezoelectric vibrating element of the present invention.

FIG. 5 is a second diagram showing an embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 6 is a third view showing an embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 7 is a fourth diagram showing an embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 8 is a fifth diagram showing an embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 9 is an exploded perspective view showing another embodiment of the jig for sealing the piezoelectric vibration element of the present invention.

FIG. 10 is an exploded perspective view showing another embodiment of the jig for sealing the piezoelectric vibration element of the present invention.

FIG. 11 is a first diagram showing another embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 12 is a second diagram showing another embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 13 is a third diagram showing another embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 14 is a fourth diagram showing another embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 15 is a fifth diagram showing another embodiment of the method for sealing a piezoelectric vibration element of the present invention.

FIG. 16 is a partial cross-sectional perspective view showing an example of a general piezoelectric vibrator.

FIG. 17 is a side view of the piezoelectric vibrator shown in FIG. 16;

FIG. 18 is a view showing a conventional method for sealing a piezoelectric vibration element.

FIG. 19 is a view showing another sealing method of a conventional piezoelectric vibration element.

FIG. 20 is a view showing still another sealing method for a conventional piezoelectric vibration element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 20 Piezoelectric vibrator 21 Piezoelectric vibrating element 22 Base (storage part) 22a Space part 23 Lid (Lid part) 24 Electrode 25 Sealing material 28 Conductive adhesive 30, 50 Base holding jig 31, 51 Base side jig main body 33, 53 Through-holes for lid-side guide pins 34, 54 Guide pins for base positioning plate 35, 55 Base-positioning plates 36, 56 Through-holes for base positioning 37, 57 Through-holes for lid-side guide pins 38, 58 For base positioning plate Guide pin through hole 40, 60 Lid holding jig 41, 61 Lid side jig body 42, 62 Lid side guide pin 43, 63 Lid positioning pin guide pin 44 Magnet 45, 65 Lid positioning plate 46, 66 Lid positioning through holes 47, 67 Lid-side guide pin through holes 48, 68 Lid positioning pin guide pin through holes 64 Lid Fixing through hole

Claims (8)

[Claims] A storage unit for storing a piezoelectric vibration element, and a lid for sealing the storage unit, which are joined via a sealing material to seal the piezoelectric vibration element. A first jig for positioning and fixing the storage section; and a detachable with respect to the first jig. When the first jig is attached to the first jig, A second jig for positioning and fixing the lid portion at a position corresponding to the storage portion that is positioned and fixed to the first jig, wherein the first storage portion is positioned and fixed. Disposing the jig on the lower side, mounting the second jig on which the lid is positioned and fixed, from the upper side, joining the housing and the lid, and sealing the piezoelectric vibration element. A jig for sealing a piezoelectric vibration element. 2. The apparatus according to claim 1, wherein the first jig has a pocket for storing and positioning and fixing the storage section such that a joint surface of the storage section protrudes, and the second jig includes the pocket. 2. The jig for sealing a piezoelectric vibration element according to claim 1, further comprising a pocket for accommodating and positioning and fixing the lid so that a joint surface of the lid protrudes. 3. 3. The jig for sealing a piezoelectric vibrating element according to claim 1, wherein said second jig has magnetic attraction means for magnetically attracting and positioning and fixing said lid. 4. The jig for sealing a piezoelectric vibrating element according to claim 1, wherein the second jig has vacuum suction means for positioning and fixing the lid by vacuum suction. 5. The piezoelectric vibrating element sealing jig according to claim 1, further comprising guide means for attaching and detaching said second jig to and from said first jig. Utensils. 6. A method for sealing a piezoelectric vibrating element by joining a housing for accommodating a piezoelectric vibrating element and a lid for sealing the housing via a sealing material. A second jig which is configured so that the storage portion is positioned and fixed to one jig and is detachably attached to the first jig;
When the jig is mounted on the first jig, the lid is positioned and fixed at a position corresponding to the storage portion fixed and positioned on the first jig; Is placed on the lower side, the second jig is mounted from above, and the joining surface of the storage portion and the joining surface of the lid are brought into close contact with each other, and the sealing material is heated and pressed to melt, A method for sealing a piezoelectric vibrating element, comprising joining the housing and the lid. 7. The method for sealing a piezoelectric vibrating element according to claim 6, wherein the lid is magnetically attracted and positioned and fixed. 8. The method for sealing a piezoelectric vibrating element according to claim 6, wherein the lid is positioned and fixed by vacuum suction.