JP2000111438A - Method and device for emergency draining of floor water leakage for clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform water drainage quickly without the effect of environment contamination, contamination of surrounding devices, corrosion damage and chemical-induced suffering on a worker by inspecting the kind of water leakage by an automatic identifying device and selecting the dedicated drainage system based on the kind of the water leakage. SOLUTION: When water leakage occurs from a production drain pipe 6 of a production device 5, the generation of the water leakage is detected by a water leakage detecting tape 2 attached to a floor surface 1. Warning is issued from a warning device provided in an emergency drainage control plate 7 and reported to a controller. At the same timer the leaked water is contained in a leaked water receiving tank 8 and sent to a leaked-water discharging pipe 9. The kind of the leaked water is automatically identified by an automatic identifier 10 for the kind of the leaked water, which is assembled in this water leakage pipe 9. The kind of the identified water leakage is displayed on the emergency drainage control plate 7. The emergency drainage control plate 7 selects the dedicated drain pipe, that is to say, any of emergency drain pipes 11a, 11b, 11c, and 11d and connects the valve to the drainage system. Thus, the work for investigating the component of chemical, which is leaked by the worker, can be saved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for emergency drainage of floor leaks for clean rooms, and more particularly to floor leaks for clean rooms for treating a chemical solution discharged to the floor due to an accident in a process such as semiconductor manufacturing. The present invention relates to an emergency drainage method and device.

[0002]

2. Description of the Related Art In a semiconductor or liquid crystal manufacturing process, H
_It is necessary to use special chemicals such as ₂ SO ₄ , HF, and isopropyl alcohol, and supply and drainage pipes for the chemicals are diversified. At this time, there is a danger that the chemical solution will be discharged to the floor due to an accident such as breakage of the piping or poor connection. Conventionally, regarding the detection of chemical water leakage, a water leakage detection tape 2 is attached to the floor surface 1 as shown in FIG.
When water leaks from the production drain pipe 6 of the production device 5, a system is adopted in which the occurrence of water leakage is detected by the water leakage detection tape 2 and an alarm is issued by the alarm device 3. Then, when there is a water leakage warning, the worker goes to the site, investigates the type of the chemical, and discharges the chemical contained in the water leakage receiving tank 4 to the drainage pipe of the same drainage system. When a plurality of types of leaked chemicals are mixed, a harmful gas may be generated due to a chemical reaction. In order to prevent this, it is required to switch the floor drainage system depending on the type of the chemical. However, the conventional method takes a lot of time to investigate the type of chemical solution, which causes environmental pollution in the clean room due to volatilization of the chemical solution, contamination of peripheral equipment and corrosion damage due to chemical solution contact, or exposure of workers to chemical damage. is there.

[0003]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, and does not cause environmental pollution in a clean room due to volatilization of a chemical solution, pollution and corrosion damage to peripheral equipment, and do not cause chemical damage to workers. It is an object of the present invention to provide an emergency drainage method and apparatus for floor leaks in a clean room that can quickly perform drainage treatment.

[0004]

The floor leakage emergency drainage method for a clean room according to the present invention detects the type of the water leakage by detecting the type of the water leakage by an automatic identification device for the type of the water leakage incorporated in the floor drainage pipe provided in the clean room. A special drainage system is selected according to the type, and an emergency drainage valve connected to the drainage system is automatically controlled.

[0005] The present invention further provides a water leakage receiving tank mounted on the floor, a water leakage discharge pipe attached to the bottom of the water leakage receiving tank,
A floor for a clean room characterized by having an automatic identification device for the type of water leakage incorporated in the water leakage discharge pipe, and an emergency drainage valve for selecting a dedicated drainage system according to the type of water leakage and connecting to the drainage system. It relates to a water leakage emergency drainage device.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION According to the emergency drainage method for floor leakage for clean rooms of the present invention, as described above, the type of water leakage is detected by an automatic identification device for the type of water leakage incorporated in the floor drainage pipe provided in the clean room. However, there is no particular limitation on the type of automatic identification of the type of water leakage, and a method of detecting the type of water leakage by identifying the characteristic components in consideration of the type of chemical used in the facility is adopted. can do. For example, in semiconductor manufacturing equipment, it is divided into acid / alkali wastewater, hydrogen fluoride wastewater, organic wastewater and general wastewater.

[0007] Also in the present invention, a water leakage detection tape is stuck on the floor surface to detect the occurrence of water leakage.
A method of issuing an alarm with an alarm device can also be used in combination.

[0008]

Next, the present invention will be described in more detail with reference to the drawings. FIG. 1 is a system diagram of a floor leakage emergency drainage device for a clean room showing one embodiment of the present invention. In the emergency drainage device for water leakage according to the present invention, when water leakage occurs from the production drainage pipe 6 of the production device 5, the occurrence of water leakage is detected by the water leakage detection tape 2 attached to the floor 1, and the emergency drainage control panel 7 is provided. A warning is issued by the alarm device provided to notify the administrator, and the leak is stored in a leak receiving tank 8 and sent to a leak discharging pipe 9 attached to the bottom thereof, and the leak is incorporated in the leak discharging pipe 9. Automatic type identification device 10
Thus, the type of water leakage is automatically identified, and the type of the identified water leakage is displayed on the emergency drainage control panel 7.

The emergency drainage control panel 7 has a dedicated drainage system according to the type of water leakage, that is, the emergency drainage valves 11a and 11b.
Select b, 11c or 11d and connect to its drainage system. The emergency drain valve is an emergency drain valve for acid / alkali drain.
1a, an emergency drainage valve 11b for HF drainage, an emergency drainage valve 11c for organic drainage, and an emergency drainage valve 11d for general drainage are set. When the emergency drain valve 1
1a is opened and discharged from the control solenoid valve 12 to, for example, a tank dedicated to acid / alkali drainage. For other types of waste water, the respective emergency drain valves are similarly opened and discharged to a dedicated tank or the like.

[0010]

According to the method and the apparatus of the present invention, when leakage of a chemical solution occurs in a clean room, the labor for investigating the components of the leaked chemical solution can be omitted, and the method can be performed quickly in accordance with the components of the chemical solution. Can take emission measures,
The generation of harmful gas due to mixing of leaked chemicals can be prevented, environmental pollution in clean rooms due to volatilization of chemicals,
Wastewater treatment can be performed promptly without causing pollution, corrosion damage to peripheral equipment, or chemical damage to workers.

[Brief description of the drawings]

FIG. 1 is a system diagram of a floor leak emergency drainage device for a clean room showing one embodiment of the present invention.

FIG. 2 is a system diagram of a conventional floor leakage emergency drainage device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Floor surface 2 Leakage detection tape 3 Alarm device 4 Leakage receiving tank 5 Production equipment 6 Production drainage pipe 7 Emergency drainage control panel 8 Leakage receiving tank 9 Leakage discharge pipe 10 Leakage type automatic identification device 11a Emergency drainage valve 11b Emergency drainage valve 11c Emergency drainage Valve 11d Emergency drain valve 12 Solenoid valve for control

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G067 AA01 BB07 BB11 BB13 BB14 CC02 3L058 BE02 BF07 BG04

Claims (2)

[Claims] 1. A type of water leakage is detected by an automatic identification device for the type of water leakage incorporated in a floor drainage pipe provided in a clean room, a dedicated drainage system is selected according to the type of water leakage, and the drainage system is selected. An emergency drainage method for floor leaks in a clean room, characterized by automatically controlling an emergency drainage valve to be connected. 2. A water leakage receiving tank mounted on a floor, a water leakage discharge pipe attached to the bottom of the water leakage receiving tank, an automatic identification device for the type of water leakage incorporated in the water leakage discharging pipe, and a dedicated drainage according to the type of water leakage. An emergency drain valve for selecting a system and connecting to the drain system.