JP2000108069A - Tray for carrying substrate - Google Patents

Tray for carrying substrate

Info

Publication number
JP2000108069A
JP2000108069A JP28133398A JP28133398A JP2000108069A JP 2000108069 A JP2000108069 A JP 2000108069A JP 28133398 A JP28133398 A JP 28133398A JP 28133398 A JP28133398 A JP 28133398A JP 2000108069 A JP2000108069 A JP 2000108069A
Authority
JP
Japan
Prior art keywords
substrate
glass substrate
tray
manufacturing process
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28133398A
Other languages
Japanese (ja)
Inventor
Ryosuke Yasui
亮輔 安井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP28133398A priority Critical patent/JP2000108069A/en
Publication of JP2000108069A publication Critical patent/JP2000108069A/en
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To unnecessitate a mechanism taking the bending of a glass substrate into consideration and to prevent the speed of a manufacturing process from being restricted by the bending of the glass substrate by providing a vacuum chuck for sucking and fixing the substrate on an upper surface of a tray for carrying substrate. SOLUTION: On an upper surface of a tray for carrying substrate 1, a vacuum chuck 8 constituted of an air suction hole 3, an air suction passage 4, a valve 5 and a nozzle 6 is provided. A glass substrate 2 is mounted on the upper surface of the tray 1 for carrying substrate, the valve 5 is opened by connecting the nozzle 6 with an air sucking device, air is sucked and the glass substrate 2 is sucked. Next, the valve 5 is closed, the connection of the nozzle 6 is removed and the glass substrate 2 is held on the upper surface of the tray for carrying substrate 1 in a sucking and fixing state. This glass substrate 2 is horizontally carried in a manufacturing process in a state that the glass substrate 2 is sucked and fixed on the upper surface of the tray for carrying substrate 1 and the glass substrate 2 is mounted on each device in the manufacturing process and is processed. At a point of time when all the processings are terminated, the valve 5 is opened, the sucking and fixing are released and the glass substrate 2 is removed from the tray for carrying substrate 1.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は液晶表示装置に用い
るカラーフィルタを製造する際の大サイズ基板の搬送に
関するものであり、特に、大サイズ基板を撓ますことな
く一枚づつ搬送する基板搬送用トレイに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the transport of large-sized substrates when manufacturing color filters used in liquid crystal display devices, and more particularly to the transport of large-sized substrates one by one without bending. About the tray.

【0002】[0002]

【従来の技術】液晶表示装置に用いるカラーフィルタを
製造する際、ガラス基板などの基板を製造工程内にて水
平に搬送する方法として、例えば、回転コロ上に基板を
載せて移動させるコロ搬送、移動するベルト上に基板を
載せて移動させるベルト搬送、或いは、ロボットアーム
にて基板の下面から保持して移動させるロボット搬送な
どが採用されているが、これらの方法は何れも基板の平
坦性は保たれるものの、基板の下面はコロ、ベルト、或
いは、ロボットアームなどと直接に接触するために、基
板の下面の表面に汚れや傷などが発生し易いものであ
る。
2. Description of the Related Art When a color filter used for a liquid crystal display device is manufactured, a method of horizontally transferring a substrate such as a glass substrate in a manufacturing process includes, for example, roller transfer in which the substrate is placed on a rotating roller and moved. Belt transfer in which a substrate is placed and moved on a moving belt, or robot transfer in which a robot arm holds and moves the lower surface of the substrate is employed. Although kept, the lower surface of the substrate is in direct contact with a roller, a belt, a robot arm, or the like, so that the surface of the lower surface of the substrate is liable to cause dirt and scratches.

【0003】一方、基板の進行方向に対し基板の左右両
端部を保持する保持具を用いた搬送方法は、基板の下面
はコロ、ベルト、或いは、ロボットアームなどと直接に
接触しないため、上記方法におけるような基板の下面の
表面に汚れや傷などは発生しにくいものである。しか
し、この基板の左右両端部を保持する保持具を用いた搬
送方法においては、基板が液晶表示装置に用いるカラー
フィルタのように可撓性のあるガラス基板である際に
は、その自重による撓みが発生し易いものである。
On the other hand, the transfer method using a holder for holding both right and left ends of the substrate with respect to the traveling direction of the substrate requires the above method because the lower surface of the substrate does not directly contact with a roller, a belt, a robot arm or the like. The dirt, scratches, and the like are unlikely to occur on the surface of the lower surface of the substrate as in the above. However, in the transfer method using the holders for holding the left and right ends of the substrate, when the substrate is a flexible glass substrate such as a color filter used in a liquid crystal display device, the substrate is bent by its own weight. Is easy to occur.

【0004】図5は、ガラス基板の撓み状態を示す説明
図である。図5において、ガラス基板(11)は基板の
進行方向に対し基板の左右両端部が保持具(12)によ
り保持された状態を示している。図5に示すように、ガ
ラス基板(11)には、その自重による撓み(13)が
発生している。
FIG. 5 is an explanatory view showing a bent state of the glass substrate. In FIG. 5, the glass substrate (11) shows a state in which the left and right ends of the substrate are held by holders (12) with respect to the traveling direction of the substrate. As shown in FIG. 5, the glass substrate (11) is bent (13) by its own weight.

【0005】カラーフィルタを製造する際のガラス基板
(11)は、液晶表示装置の画面が大サイズになるに従
い、例えば、画面対角10インチから12インチ、14
インチへと大サイズになるに従い、カラーフィルタを製
造する際のガラス基板(11)も大サイズになってい
る。例えば、液晶表示装置の画面が画面対角10インチ
の際は、カラーフィルタを製造するガラス基板(11)
は、10インチ大カラーフィルタを4面付けした大きさ
(約40×50cm大)のものであるが、画面対角12
インチの際は、約45×55cm大、画面対角14イン
チの際は、約55×65cm大と順次に大サイズになっ
ている。
[0005] As the size of the screen of the liquid crystal display device increases, the glass substrate (11) used in the production of the color filter, for example, has a screen diagonal of 10 inches to 12 inches,
As the size increases to inches, the size of the glass substrate (11) used for manufacturing a color filter also increases. For example, when the screen of the liquid crystal display device has a screen diagonal of 10 inches, a glass substrate (11) for producing a color filter is used.
Is a size (approximately 40 × 50 cm in size) in which four 10-inch large color filters are attached to each other.
In the case of inches, the size is about 45 × 55 cm, and in the case of a screen diagonal of 14 inches, the size is about 55 × 65 cm in size.

【0006】このようなガラス基板(11)の図5に示
す撓み(13)量は、ガラス基板が約40×50cm大
にて略3mm,約45×55cm大にて略4mm,約5
5×65cm大にて略5mm程度であり、近い将来の実
用が検討されている約100×100cm大にては略8
〜10mmに達するものと予想され、このようなガラス
基板の撓みはカラーフィルタの製造上好ましいものでは
ない。
The amount of bending (13) of the glass substrate (11) shown in FIG. 5 is approximately 3 mm when the glass substrate is approximately 40 × 50 cm, approximately 4 mm when the glass substrate is approximately 45 × 55 cm, and approximately 5 mm.
The size is about 5 mm at the size of 5 × 65 cm, and about 8 at the size of about 100 × 100 cm for which practical use in the near future is being studied.
It is expected to reach 10 to 10 mm, and such bending of the glass substrate is not preferable in manufacturing a color filter.

【0007】すなわち、このようなガラス基板の撓みは
製造工程における搬送、例えば、製造工程内のある装置
からガラス基板を取り出し、移動し、次の装置への装着
をおこなう毎に、その撓みが発生し平坦な状態に戻るの
で、ガラス基板の撓みに留意した上記基板の取り出し、
移動、次の装置への装着の機構、及び、撓みに留意した
製造工程の速度となってしまい、生産効率を阻害するも
のとなる。
That is, such bending of the glass substrate occurs every time the glass substrate is conveyed in the manufacturing process, for example, the glass substrate is taken out from one device in the manufacturing process, moved, and mounted on the next device. Since it returns to a flat state, taking out the above-mentioned substrate in consideration of bending of the glass substrate,
The speed of the manufacturing process pays attention to the mechanism of the movement, the mounting to the next device, and the bending, which hinders the production efficiency.

【0008】[0008]

【発明が解決しようとする課題】本発明は、上記のよう
に、カラーフィルタの製造工程において、大サイズのガ
ラス基板を水平に搬送する際に、例えば、約100×1
00cm大の大サイズのガラス基板であっても撓みが発
生することのない、また、ガラス基板の下面の表面への
汚れや傷などの発生を低減させる基板搬送用トレイを提
供するものである。この基板搬送用トレイを採用するこ
とにより、ガラス基板の撓みに留意した機構は不要なも
のとなり、製造工程の速度はガラス基板の撓みに制約さ
れないものとなり、汚れや傷などの不良が低減し、生産
効率が向上したカラーフィルタの製造工程となる。
SUMMARY OF THE INVENTION As described above, the present invention relates to a process for manufacturing a color filter, in which a large-size glass substrate is transported horizontally, for example, about 100 × 1.
It is an object of the present invention to provide a substrate transport tray which does not bend even with a large glass substrate having a size of 00 cm and reduces the occurrence of dirt and scratches on the lower surface of the glass substrate. By adopting this substrate transfer tray, a mechanism paying attention to the bending of the glass substrate becomes unnecessary, the speed of the manufacturing process is not restricted by the bending of the glass substrate, and defects such as dirt and scratches are reduced, This is a color filter manufacturing process with improved production efficiency.

【0009】[0009]

【課題を解決するための手段】本発明は、基板搬送用ト
レイであって、その上面に基板を吸着固定するバキュー
ムチャックを具備することを特徴とする基板搬送用トレ
イである。また、本発明は、上記発明の基板搬送用トレ
イにおいて、前記バキュームチャックの周辺部に液体の
侵入を防ぐためのパッキングを設けることを特徴とする
基板搬送用トレイである。
SUMMARY OF THE INVENTION The present invention relates to a substrate transfer tray, which is provided with a vacuum chuck for adsorbing and fixing a substrate on an upper surface thereof. According to the present invention, there is provided the substrate transfer tray according to the above invention, further comprising a packing for preventing liquid from entering the periphery of the vacuum chuck.

【0010】[0010]

【発明の実施の形態】本発明を一実施の形態に基づいて
以下に説明する。図1は、本発明による基板搬送用トレ
イの一実施例を示す平面図である。図2は本発明による
基板搬送用トレイを図1におけるX−X’断面で示した
断面図である。図1、及び図2において、基板搬送用ト
レイ(1)の上面に吸着固定されたガラス基板(2)は
点線にて示している。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on one embodiment. FIG. 1 is a plan view showing one embodiment of a substrate carrying tray according to the present invention. FIG. 2 is a cross-sectional view showing the substrate transfer tray according to the present invention along the line XX ′ in FIG. In FIGS. 1 and 2, the glass substrate (2) adsorbed and fixed on the upper surface of the substrate transfer tray (1) is indicated by a dotted line.

【0011】図1、及び図2に示すように、本発明によ
る基板搬送用トレイ(1)の大きさは搬送するガラス基
板(2)の大きさより小さなものである。基板搬送用ト
レイ(1)の上面には、エアー吸引孔(3)、エアー吸
引通路(4)、バルブ(5)、ノズル(6)などで構成
される、ガラス基板(2)を吸着固定するバキュームチ
ャック(8)が設けられている。
As shown in FIGS. 1 and 2, the size of the substrate transfer tray (1) according to the present invention is smaller than the size of the glass substrate (2) to be transferred. On the upper surface of the substrate transfer tray (1), a glass substrate (2) composed of an air suction hole (3), an air suction passage (4), a valve (5), a nozzle (6) and the like is fixed by suction. A vacuum chuck (8) is provided.

【0012】ガラス基板(2)は、バキュームチャック
(8)によって基板搬送用トレイ(1)の上面に吸着固
定されたままの状態でカラーフィルタの製造工程を水平
に搬送され、製造工程中の各々の装置に装着され、各々
の装置にて処理され、各々の装置から取り出されるもの
である。
The glass substrate (2) is horizontally transported in the color filter manufacturing process while being held by suction on the upper surface of the substrate transport tray (1) by the vacuum chuck (8). Are processed by each device and taken out from each device.

【0013】先ず、基板搬送用トレイ(1)の上面にガ
ラス基板(2)を載せ、エアー吸引装置(図示せず)に
バキュームチャック(8)のノズル(6)を連結しバル
ブ(5)を開けて、エアー吸引孔(3)、エアー吸引通
路(4)を経てエアーを吸引しガラス基板(2)を吸着
固定する。
First, a glass substrate (2) is placed on the upper surface of a substrate transfer tray (1), a nozzle (6) of a vacuum chuck (8) is connected to an air suction device (not shown), and a valve (5) is opened. After opening, the air is sucked through the air suction hole (3) and the air suction passage (4) to suck and fix the glass substrate (2).

【0014】次に、バルブ(5)を閉じ、エアー吸引装
置(図示せず)とノズル(6)の連結を外す。このよう
にしてガラス基板(2)を基板搬送用トレイ(1)の上
面に吸着固定の状態に保つものである。このガラス基板
(2)が基板搬送用トレイ(1)の上面に吸着固定され
たままの状態で、カラーフィルタの製造工程を水平に搬
送され、製造工程中の各々の装置に装着され、各々の装
置にて処理され、各々の装置から取り出される操作が繰
り返され、製造工程の全処理が終了した時点で、バルブ
(5)を開けて吸着固定を解除しガラス基板(2)を基
板搬送用トレイ(1)から取り外す。
Next, the valve (5) is closed, and the connection between the air suction device (not shown) and the nozzle (6) is disconnected. In this way, the glass substrate (2) is maintained in a state of being adsorbed and fixed on the upper surface of the substrate transport tray (1). While the glass substrate (2) is being suction-fixed to the upper surface of the substrate transfer tray (1), it is horizontally transferred in the color filter manufacturing process, and is mounted on each apparatus in the manufacturing process. The processing performed by the apparatus and the operation of taking out from each apparatus are repeated, and when the entire processing of the manufacturing process is completed, the valve (5) is opened to release the suction and fixation, and the glass substrate (2) is transferred to the substrate transfer tray. Remove from (1).

【0015】図3は、本発明による基板搬送用トレイの
他の例を示す平面図である。図4は図3におけるX−
X’断面を示した断面図である。図3、及び図4に示す
ように、本発明による基板搬送用トレイ(21)のバキ
ュームチャック(8)の周辺部には液体の侵入を防ぐた
めのパッキング(7)が設けられている。
FIG. 3 is a plan view showing another example of the substrate transfer tray according to the present invention. FIG. 4 is a cross-sectional view of FIG.
It is sectional drawing which showed X 'cross section. As shown in FIGS. 3 and 4, a packing (7) for preventing intrusion of liquid is provided around the vacuum chuck (8) of the substrate transfer tray (21) according to the present invention.

【0016】このような基板搬送用トレイ(21)は、
カラーフィルタの製造工程にて液相処理を行う際に基板
搬送用トレイ(21)の上面のバキュームチャック
(8)とガラス基板(2)との隙間からの液体の侵入を
防ぐことができるものとなる。
The substrate transfer tray (21) is
One that can prevent liquid from entering through a gap between the vacuum chuck (8) on the upper surface of the substrate transfer tray (21) and the glass substrate (2) when performing liquid phase processing in the color filter manufacturing process. Become.

【0017】上記のように、本発明による基板搬送用ト
レイ(1)、(21)を採用することにより、例えば、
約100×100cm大の大サイズのガラス基板を水平
に搬送してもガラス基板に撓みが発生することはなく、
また、ガラス基板の下面の表面への汚れや傷などの発生
を低減させるものとなる。従って、ガラス基板の撓みに
留意した機構は不要なものとなり、製造工程の速度はガ
ラス基板の撓みに制約されないものとなり、汚れや傷な
どの不良が低減し、生産効率が向上したカラーフィルタ
の製造工程となる。
As described above, by employing the substrate transfer trays (1) and (21) according to the present invention, for example,
Even if a large glass substrate of about 100 × 100 cm is transported horizontally, the glass substrate does not bend,
Further, the occurrence of dirt, scratches, and the like on the surface of the lower surface of the glass substrate is reduced. Therefore, a mechanism that pays attention to the deflection of the glass substrate becomes unnecessary, and the speed of the manufacturing process is not limited by the deflection of the glass substrate. Process.

【0018】[0018]

【発明の効果】本発明は、基板搬送用トレイにおいて、
その上面に基板を吸着固定するバキュームチャックを具
備しているので、カラーフィルタを製造する際に、例え
ば、約100×100cm大の大サイズのガラス基板を
水平に搬送しても撓みが発生することのない、また、ガ
ラス基板の下面の表面への汚れや傷などの発生を低減さ
せる基板搬送用トレイとなる。従って、本発明による基
板搬送用トレイを採用することにより、ガラス基板の撓
みに留意した機構は不要なものとなり、製造工程の速度
はガラス基板の撓みに制約されないものとなり、汚れや
傷などの不良が低減し、生産効率が向上したカラーフィ
ルタの製造工程となる。
The present invention relates to a substrate transport tray,
Since a vacuum chuck for adsorbing and fixing the substrate is provided on the upper surface thereof, when a color filter is manufactured, for example, a large-sized glass substrate of about 100 × 100 cm may be bent even if it is transported horizontally. This is a substrate transfer tray that is not provided and that reduces the occurrence of dirt and scratches on the lower surface of the glass substrate. Therefore, by adopting the substrate transfer tray according to the present invention, a mechanism paying attention to the bending of the glass substrate becomes unnecessary, and the speed of the manufacturing process is not limited by the bending of the glass substrate, and the defect such as dirt or scratches is eliminated. And the production process of a color filter with reduced production efficiency.

【0019】また、本発明は、基板搬送用トレイにおい
て、その上面に基板を吸着固定するバキュームチャック
の周辺部に液体の侵入を防ぐためのパッキングを設けて
いるので、カラーフィルタを製造する際に、例えば、約
100×100cm大の大サイズのガラス基板を水平に
搬送しても撓みが発生せず、液相処理を行っても基板搬
送用トレイの上面のバキュームチャックとガラス基板と
の隙間からの液体の侵入を防ぐことができ、また、ガラ
ス基板の下面の表面への汚れや傷などの発生を低減させ
る基板搬送用トレイとなる。従って、本発明による基板
搬送用トレイを採用することにより、ガラス基板の撓み
に留意した機構は不要なものとなり、製造工程の速度は
ガラス基板の撓みに制約されないものとなり、汚れや傷
などの不良が低減し、生産効率が向上したカラーフィル
タの製造工程となる。
Further, according to the present invention, since the packing for preventing liquid from entering the periphery of the vacuum chuck for sucking and fixing the substrate is provided on the upper surface of the tray for transferring the substrate, the present invention is suitable for manufacturing a color filter. For example, even if a large-sized glass substrate of about 100 × 100 cm is horizontally transferred, no bending occurs, and even if liquid-phase processing is performed, a gap between the vacuum chuck on the upper surface of the substrate transfer tray and the glass substrate is reduced. This prevents the intrusion of the liquid, and reduces the occurrence of dirt and scratches on the surface of the lower surface of the glass substrate. Therefore, by adopting the substrate transfer tray according to the present invention, a mechanism paying attention to the bending of the glass substrate becomes unnecessary, and the speed of the manufacturing process is not limited by the bending of the glass substrate, and the defect such as dirt or scratches is eliminated. Is reduced and the production process of the color filter is improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による基板搬送用トレイの一実施例を示
す平面図である。
FIG. 1 is a plan view showing an embodiment of a substrate carrying tray according to the present invention.

【図2】本発明による基板搬送用トレイを図1における
X−X’断面で示した断面図である。
FIG. 2 is a cross-sectional view of the substrate transfer tray according to the present invention, taken along the line XX ′ in FIG. 1;

【図3】本発明による基板搬送用トレイの他の例を示す
平面図である。
FIG. 3 is a plan view showing another example of the substrate transport tray according to the present invention.

【図4】図3におけるX−X’断面を示した断面図であ
る。
FIG. 4 is a sectional view showing a section taken along line XX ′ in FIG. 3;

【図5】ガラス基板の撓み状態を示す説明図である。FIG. 5 is an explanatory diagram showing a bent state of a glass substrate.

【符号の説明】[Explanation of symbols]

1、21…基板搬送用トレイ 2、11…ガラス基板 3…エアー吸引孔 4…エアー吸引通路 5…バルブ 6…ノズル 7…パッキング 8…バキュームチャック 12…保持具 13…撓み DESCRIPTION OF SYMBOLS 1, 21 ... Tray for board | substrate conveyance 2, 11 ... Glass substrate 3 ... Air suction hole 4 ... Air suction passage 5 ... Valve 6 ... Nozzle 7 ... Packing 8 ... Vacuum chuck 12 ... Holder 13 ... Deflection

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】基板搬送用トレイであって、その上面に基
板を吸着固定するバキュームチャックを具備することを
特徴とする基板搬送用トレイ。
1. A substrate transport tray, comprising: a vacuum chuck for adsorbing and fixing a substrate on an upper surface thereof.
【請求項2】前記バキュームチャックの周辺部に液体の
侵入を防ぐためのパッキングを設けることを特徴とする
請求項1記載の基板搬送用トレイ。
2. The substrate transfer tray according to claim 1, wherein a packing is provided around the vacuum chuck to prevent liquid from entering.
JP28133398A 1998-10-02 1998-10-02 Tray for carrying substrate Pending JP2000108069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28133398A JP2000108069A (en) 1998-10-02 1998-10-02 Tray for carrying substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28133398A JP2000108069A (en) 1998-10-02 1998-10-02 Tray for carrying substrate

Publications (1)

Publication Number Publication Date
JP2000108069A true JP2000108069A (en) 2000-04-18

Family

ID=17637654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28133398A Pending JP2000108069A (en) 1998-10-02 1998-10-02 Tray for carrying substrate

Country Status (1)

Country Link
JP (1) JP2000108069A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103522743A (en) * 2012-07-04 2014-01-22 雅马哈发动机株式会社 Conveyor jig and substrate manufacturing method
CN112536740A (en) * 2019-09-20 2021-03-23 Scm集团公司 Machining tool with improved system for locking workpieces

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103522743A (en) * 2012-07-04 2014-01-22 雅马哈发动机株式会社 Conveyor jig and substrate manufacturing method
KR101531583B1 (en) * 2012-07-04 2015-06-25 야마하하쓰도키 가부시키가이샤 Transfer jig and method of manufacturing board
CN112536740A (en) * 2019-09-20 2021-03-23 Scm集团公司 Machining tool with improved system for locking workpieces
CN112536740B (en) * 2019-09-20 2022-08-05 Scm集团公司 Machining tool with improved system for locking workpieces

Similar Documents

Publication Publication Date Title
JPH10316242A (en) Substrate conveying device and method
JP2008010606A (en) Substrate cassette holding device, and substrate cassette holding and storing method thereof
JP4041267B2 (en) Substrate transport apparatus and substrate transport method
JP3695971B2 (en) Film forming apparatus and film forming method
JP2003243483A (en) Plate conveying mechanism and dicing device equipped with the conveying mechanism
JP4096359B2 (en) Manufacturing equipment for manufacturing objects
JP2000108069A (en) Tray for carrying substrate
JP2002233808A (en) Liquid treatment apparatus
KR100586111B1 (en) Single wafer conveying apparatus and method
JP3766177B2 (en) Substrate processing apparatus and substrate cleaning apparatus
JPH09266166A (en) Aligner
JPH11170188A (en) Vacuum sucking pad
JP2003118834A (en) Glass board carrying device
JP2889449B2 (en) Cleaning equipment
JP3421358B2 (en) Transport method
JPH06143177A (en) Substrate conveying device
JP2000049206A (en) Substrate treating apparatus
JPH08141966A (en) Handling mechanism of glass base plate
JP2001326272A (en) Tray for conveying base plate
JPH07153816A (en) Substrate transferring method and equipment
JPH09115996A (en) Method for carrying and storing cassette and carrying device used for it
JP2513261Y2 (en) Loading / unloading device
JPH05253879A (en) Transfer method and device
JPH1092306A (en) Manufacturing device for plasma display panel and manufacture thereof
JP2000195920A (en) Substrate carrying system and device for manufacturing semiconductor