JP2000108069A - Tray for carrying substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To unnecessitate a mechanism taking the bending of a glass substrate into consideration and to prevent the speed of a manufacturing process from being restricted by the bending of the glass substrate by providing a vacuum chuck for sucking and fixing the substrate on an upper surface of a tray for carrying substrate. SOLUTION: On an upper surface of a tray for carrying substrate 1, a vacuum chuck 8 constituted of an air suction hole 3, an air suction passage 4, a valve 5 and a nozzle 6 is provided. A glass substrate 2 is mounted on the upper surface of the tray 1 for carrying substrate, the valve 5 is opened by connecting the nozzle 6 with an air sucking device, air is sucked and the glass substrate 2 is sucked. Next, the valve 5 is closed, the connection of the nozzle 6 is removed and the glass substrate 2 is held on the upper surface of the tray for carrying substrate 1 in a sucking and fixing state. This glass substrate 2 is horizontally carried in a manufacturing process in a state that the glass substrate 2 is sucked and fixed on the upper surface of the tray for carrying substrate 1 and the glass substrate 2 is mounted on each device in the manufacturing process and is processed. At a point of time when all the processings are terminated, the valve 5 is opened, the sucking and fixing are released and the glass substrate 2 is removed from the tray for carrying substrate 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the transport of large-sized substrates when manufacturing color filters used in liquid crystal display devices, and more particularly to the transport of large-sized substrates one by one without bending. About the tray.

[0002]

2. Description of the Related Art When a color filter used for a liquid crystal display device is manufactured, a method of horizontally transferring a substrate such as a glass substrate in a manufacturing process includes, for example, roller transfer in which the substrate is placed on a rotating roller and moved. Belt transfer in which a substrate is placed and moved on a moving belt, or robot transfer in which a robot arm holds and moves the lower surface of the substrate is employed. Although kept, the lower surface of the substrate is in direct contact with a roller, a belt, a robot arm, or the like, so that the surface of the lower surface of the substrate is liable to cause dirt and scratches.

On the other hand, the transfer method using a holder for holding both right and left ends of the substrate with respect to the traveling direction of the substrate requires the above method because the lower surface of the substrate does not directly contact with a roller, a belt, a robot arm or the like. The dirt, scratches, and the like are unlikely to occur on the surface of the lower surface of the substrate as in the above. However, in the transfer method using the holders for holding the left and right ends of the substrate, when the substrate is a flexible glass substrate such as a color filter used in a liquid crystal display device, the substrate is bent by its own weight. Is easy to occur.

FIG. 5 is an explanatory view showing a bent state of the glass substrate. In FIG. 5, the glass substrate (11) shows a state in which the left and right ends of the substrate are held by holders (12) with respect to the traveling direction of the substrate. As shown in FIG. 5, the glass substrate (11) is bent (13) by its own weight.

[0005] As the size of the screen of the liquid crystal display device increases, the glass substrate (11) used in the production of the color filter, for example, has a screen diagonal of 10 inches to 12 inches,
As the size increases to inches, the size of the glass substrate (11) used for manufacturing a color filter also increases. For example, when the screen of the liquid crystal display device has a screen diagonal of 10 inches, a glass substrate (11) for producing a color filter is used.
Is a size (approximately 40 × 50 cm in size) in which four 10-inch large color filters are attached to each other.
In the case of inches, the size is about 45 × 55 cm, and in the case of a screen diagonal of 14 inches, the size is about 55 × 65 cm in size.

The amount of bending (13) of the glass substrate (11) shown in FIG. 5 is approximately 3 mm when the glass substrate is approximately 40 × 50 cm, approximately 4 mm when the glass substrate is approximately 45 × 55 cm, and approximately 5 mm.
The size is about 5 mm at the size of 5 × 65 cm, and about 8 at the size of about 100 × 100 cm for which practical use in the near future is being studied.
It is expected to reach 10 to 10 mm, and such bending of the glass substrate is not preferable in manufacturing a color filter.

That is, such bending of the glass substrate occurs every time the glass substrate is conveyed in the manufacturing process, for example, the glass substrate is taken out from one device in the manufacturing process, moved, and mounted on the next device. Since it returns to a flat state, taking out the above-mentioned substrate in consideration of bending of the glass substrate,
The speed of the manufacturing process pays attention to the mechanism of the movement, the mounting to the next device, and the bending, which hinders the production efficiency.

[0008]

SUMMARY OF THE INVENTION As described above, the present invention relates to a process for manufacturing a color filter, in which a large-size glass substrate is transported horizontally, for example, about 100 × 1.
It is an object of the present invention to provide a substrate transport tray which does not bend even with a large glass substrate having a size of 00 cm and reduces the occurrence of dirt and scratches on the lower surface of the glass substrate. By adopting this substrate transfer tray, a mechanism paying attention to the bending of the glass substrate becomes unnecessary, the speed of the manufacturing process is not restricted by the bending of the glass substrate, and defects such as dirt and scratches are reduced, This is a color filter manufacturing process with improved production efficiency.

[0009]

SUMMARY OF THE INVENTION The present invention relates to a substrate transfer tray, which is provided with a vacuum chuck for adsorbing and fixing a substrate on an upper surface thereof. According to the present invention, there is provided the substrate transfer tray according to the above invention, further comprising a packing for preventing liquid from entering the periphery of the vacuum chuck.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on one embodiment. FIG. 1 is a plan view showing one embodiment of a substrate carrying tray according to the present invention. FIG. 2 is a cross-sectional view showing the substrate transfer tray according to the present invention along the line XX ′ in FIG. In FIGS. 1 and 2, the glass substrate (2) adsorbed and fixed on the upper surface of the substrate transfer tray (1) is indicated by a dotted line.

As shown in FIGS. 1 and 2, the size of the substrate transfer tray (1) according to the present invention is smaller than the size of the glass substrate (2) to be transferred. On the upper surface of the substrate transfer tray (1), a glass substrate (2) composed of an air suction hole (3), an air suction passage (4), a valve (5), a nozzle (6) and the like is fixed by suction. A vacuum chuck (8) is provided.

The glass substrate (2) is horizontally transported in the color filter manufacturing process while being held by suction on the upper surface of the substrate transport tray (1) by the vacuum chuck (8). Are processed by each device and taken out from each device.

First, a glass substrate (2) is placed on the upper surface of a substrate transfer tray (1), a nozzle (6) of a vacuum chuck (8) is connected to an air suction device (not shown), and a valve (5) is opened. After opening, the air is sucked through the air suction hole (3) and the air suction passage (4) to suck and fix the glass substrate (2).

Next, the valve (5) is closed, and the connection between the air suction device (not shown) and the nozzle (6) is disconnected. In this way, the glass substrate (2) is maintained in a state of being adsorbed and fixed on the upper surface of the substrate transport tray (1). While the glass substrate (2) is being suction-fixed to the upper surface of the substrate transfer tray (1), it is horizontally transferred in the color filter manufacturing process, and is mounted on each apparatus in the manufacturing process. The processing performed by the apparatus and the operation of taking out from each apparatus are repeated, and when the entire processing of the manufacturing process is completed, the valve (5) is opened to release the suction and fixation, and the glass substrate (2) is transferred to the substrate transfer tray. Remove from (1).

FIG. 3 is a plan view showing another example of the substrate transfer tray according to the present invention. FIG. 4 is a cross-sectional view of FIG.
It is sectional drawing which showed X 'cross section. As shown in FIGS. 3 and 4, a packing (7) for preventing intrusion of liquid is provided around the vacuum chuck (8) of the substrate transfer tray (21) according to the present invention.

The substrate transfer tray (21) is
One that can prevent liquid from entering through a gap between the vacuum chuck (8) on the upper surface of the substrate transfer tray (21) and the glass substrate (2) when performing liquid phase processing in the color filter manufacturing process. Become.

As described above, by employing the substrate transfer trays (1) and (21) according to the present invention, for example,
Even if a large glass substrate of about 100 × 100 cm is transported horizontally, the glass substrate does not bend,
Further, the occurrence of dirt, scratches, and the like on the surface of the lower surface of the glass substrate is reduced. Therefore, a mechanism that pays attention to the deflection of the glass substrate becomes unnecessary, and the speed of the manufacturing process is not limited by the deflection of the glass substrate. Process.

[0018]

The present invention relates to a substrate transport tray,
Since a vacuum chuck for adsorbing and fixing the substrate is provided on the upper surface thereof, when a color filter is manufactured, for example, a large-sized glass substrate of about 100 × 100 cm may be bent even if it is transported horizontally. This is a substrate transfer tray that is not provided and that reduces the occurrence of dirt and scratches on the lower surface of the glass substrate. Therefore, by adopting the substrate transfer tray according to the present invention, a mechanism paying attention to the bending of the glass substrate becomes unnecessary, and the speed of the manufacturing process is not limited by the bending of the glass substrate, and the defect such as dirt or scratches is eliminated. And the production process of a color filter with reduced production efficiency.

Further, according to the present invention, since the packing for preventing liquid from entering the periphery of the vacuum chuck for sucking and fixing the substrate is provided on the upper surface of the tray for transferring the substrate, the present invention is suitable for manufacturing a color filter. For example, even if a large-sized glass substrate of about 100 × 100 cm is horizontally transferred, no bending occurs, and even if liquid-phase processing is performed, a gap between the vacuum chuck on the upper surface of the substrate transfer tray and the glass substrate is reduced. This prevents the intrusion of the liquid, and reduces the occurrence of dirt and scratches on the surface of the lower surface of the glass substrate. Therefore, by adopting the substrate transfer tray according to the present invention, a mechanism paying attention to the bending of the glass substrate becomes unnecessary, and the speed of the manufacturing process is not limited by the bending of the glass substrate, and the defect such as dirt or scratches is eliminated. Is reduced and the production process of the color filter is improved.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a substrate carrying tray according to the present invention.

FIG. 2 is a cross-sectional view of the substrate transfer tray according to the present invention, taken along the line XX ′ in FIG. 1;

FIG. 3 is a plan view showing another example of the substrate transport tray according to the present invention.

FIG. 4 is a sectional view showing a section taken along line XX ′ in FIG. 3;

FIG. 5 is an explanatory diagram showing a bent state of a glass substrate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 21 ... Tray for board | substrate conveyance 2, 11 ... Glass substrate 3 ... Air suction hole 4 ... Air suction passage 5 ... Valve 6 ... Nozzle 7 ... Packing 8 ... Vacuum chuck 12 ... Holder 13 ... Deflection

Claims (2)

[Claims] 1. A substrate transport tray, comprising: a vacuum chuck for adsorbing and fixing a substrate on an upper surface thereof. 2. The substrate transfer tray according to claim 1, wherein a packing is provided around the vacuum chuck to prevent liquid from entering.