JP2000108063A - Substrate conveying device and substrate conveying robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate conveying robot and a substrate conveying device, capable of achieving flexibility of alignment. SOLUTION: This conveying robot is constituted of a base 41 to be moved along Y axis, a moving plate 43 to be arranged on the base 41, and a robot main body 50 to be supported on the moving plate 43. The moving plate 43 is driven in a direction perpendicular to the Y-axis direction by a moving plate driving part 60 arranged on the base 41. Accordingly, a hand 56 of a robot 4 performs the X-axis movement in which the hand 56 itself is extended, the Y-axis movement in which the hand 56 is moved by the base 41, and the correcting X-axis movement in which the hand 56 is moved by the moving plate 43.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a transfer device for holding and transferring a glass substrate by a robot having a hand movable in X-axis and Y-axis directions.

[0002]

2. Description of the Related Art In general, a glass substrate is manufactured as a substrate for a liquid crystal display by performing various processes. Liquid crystal displays have entered a wide range of fields due to the spread of word processors, portable personal computers, various types of measuring instruments and navigators for vehicles, and have been required to have high precision and large size. Most of the glass substrate processing process and the transport process for it are automated,
Improvements have been made to meet the demand for larger sizes. Usually, glass substrates are stored in a multi-stage cassette in order to transport and process the glass substrates, and are taken out of the cassette by a robot and transported to the next step. However, the glass substrate stored in the cassette is usually rarely placed at a set regular position, and is placed at a position slightly inclined with respect to the regular position, or in the X-axis direction. (The direction in which the substrate is taken out of the hand), the Y-axis direction (the moving direction of the robot itself), or the θ-axis direction (horizontal inclination). Therefore, when the glass substrate is transported to the next process, the position of the side edge or the front edge of the glass substrate is detected by a sensor, and the position of the robot hand is corrected based on the detected result, and the glass substrate is transported.

Conventionally, a substrate transfer apparatus having an aligner for aligning a glass substrate is disclosed in Japanese Patent Application Laid-Open No.
As shown in Japanese Patent No. 69548, two first distance sensors are installed near the side surface of a glass substrate housed in a cassette. Then, when the cassette containing the glass substrates is mounted at a predetermined position, the two first distance sensors move up and down or move in a direction approaching and separating from the glass substrates, so that The distance is detected to detect the deviation of the glass substrate from the fixed position.

On the other hand, a robot for transporting a glass substrate is disposed at a position facing the front of the cassette, and a second distance sensor for measuring the position of the front end face of the glass substrate is attached to the robot. The second distance sensor measures the distance of the front end face of the glass substrate, so that the position of the glass substrate can be detected at three points with the first distance sensor. The detected current position of the glass substrate is compared with the regular position, and the hand portion of the robot is rotated by θ with respect to the machine base by an amount corresponding to the correction and moves to take out the glass substrate.

[0005]

However, in the conventional substrate transfer device, since the aligner is installed in the transfer device, the displacement of the substrate in the cassette is determined by the aligner and the sensor attached to the robot. It was possible to correct and transport the paper to a normal state. But,
In various substrate transfer lines, for example, for a robot installed so as to be movable in the Y-axis, a substrate in a processing device or a cassette which has flowed in a direction orthogonal to the Y-axis at a position upstream of the robot is taken out by hand, Substrates may be stored in a processing apparatus or cassette that flows in a direction orthogonal to the Y axis at a position downstream of the robot. In this case, the robot hand is arranged along the Y-axis direction by the θ rotation of the robot in order to face the front with respect to the upstream position or the downstream position. On the other hand, the substrate in the processing apparatus or cassette at the upstream position is not always arranged in a normal state. The shift cannot be corrected. That is, since this type of robot is configured so that the hand performs a linear movement passing on the center line of the robot machine base, the configuration is not made for the movement of the hand in a direction orthogonal to the linear movement.

Therefore, when the cassette or the processing device is arranged on an extension of the Y-axis direction of the robot, the hand cannot be corrected and moved in the direction orthogonal to the Y-axis, and the hand cannot be moved relative to the robot body. X-axis direction and Y
There has been a demand for a robot capable of correcting movement in the axial direction.

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and in order to be applied to various substrate transfer lines, a substrate transfer robot capable of correcting and moving a hand with respect to a robot body in an X-axis direction and a Y-axis direction, and its It is an object to provide a substrate transfer device including a substrate transfer robot.

[0008]

SUMMARY OF THE INVENTION A substrate transfer apparatus according to the present invention is configured as follows to solve the above-mentioned problems. That is, a substrate transport device including a cassette for storing substrates, a robot having a hand for holding and transporting the substrate, and a processing device for processing the substrate transported by the robot, wherein the hand of the robot is Performing an X-axis movement that moves in a direction of moving back and forth with respect to the cassette and the processing apparatus, and performing a Y-axis movement in which the robot itself moves in a direction in which the substrate is transported. It is characterized in that it can be corrected and moved in a direction orthogonal to the Y-axis moving direction.

Preferably, the hand is provided with two first detection sensors for detecting the inclination of the board, and the hand is provided with the first detection sensor in a direction orthogonal to the Y-axis movement of the robot. At least one second detection sensor for position correction may be fixedly supported on the floor near the processing device.

Further, the robot has a main body having a hand and a hand driving section, and the main body is supported by a moving plate movably disposed on a base movable in the Y-axis direction. It is more preferable that the moving plate is configured to be movable in a direction orthogonal to the Y-axis direction of the robot by a driving unit disposed on the base.

Further, a substrate transfer robot according to the present invention is provided with a robot main body having a hand means configured to hold a substrate and be capable of turning with respect to a machine base and extendable to move the substrate in and out. A base that moves together with the robot body to transfer a substrate held by the hand means, a moving plate movably disposed on the base, and a movement that is disposed on the base and drives the moving plate. Plate driving means, wherein the robot body is supported by the moving plate and is configured to be movable together with the moving plate in a direction orthogonal to the moving direction of the base. Things.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

The substrate transfer apparatus M of this embodiment holds and transfers a cassette 2 (two in this embodiment) in which glass substrates (hereinafter, referred to as substrates) W are stored in multiple stages on a gantry 1. A robot 4 having a hand 56 to be described later and movable in parallel along the two cassettes 2 arranged side by side;
And an upstream processing device 5 (or a downstream processing device 6) disposed on both sides on the extension of the moving direction of the robot 4 for processing the substrate W. In the present embodiment, the upstream processing device 5 (or the downstream processing device 6) is moved along a direction orthogonal to the movement of the robot 4 itself, and the robot 4 moves the substrate W in the processing device 5 (or 6). Is stopped at a position facing the robot 4. Further, a detection device 7 (or 8) supported on the gantry 1 is installed near the upstream processing device 5 (or the downstream processing device 6). Further, the number of cassettes 2 in the transport device 1 is not limited to two, but may be one, or three or more.

In the following description, the movement of the hand 56 of the robot 4 in the direction of moving back and forth with respect to the cassette 2 and the processing device 5 is called X-axis movement.
The substrate W stored in the cassette 2 is taken out, the hand 56 moves forward and backward to insert the substrate W into the cassette 2, and the substrate W is moved to the processing device 5 (or 6).
Refers to a movement in which the hand 56 moves back and forth in order to carry in and out.

The movement of the robot 4 with respect to the upstream processing device 5 (or the downstream processing device 6) disposed so as to face the robot 4 is called Y-axis movement, and the robot 4 moves in the Y-axis direction. Correction movement in a direction orthogonal to the above is referred to as correction X-axis movement.

The cassette 2 is formed so as to store rectangular substrates W in multiple stages in the vertical direction, and to open the side facing the robot 4 so that the front edge of the substrate W can be detected by a sensor of the robot 4. .

As shown in FIGS. 2 to 4, the robot 4 has a U-shaped robot base (hereinafter referred to as a “bottom”) with a lower part opened.
A movable plate 43 disposed on the base 41 and a movable plate 43 movable on the base 41 by a correction X-axis via two linear guides 42 arranged side by side on the base 41.
And a robot body 50 supported by the movable plate 43.

The base 41 has a box-shaped guide 44 on both front and rear sides.
Are attached, and two rails 45 supported by the gantry 1 are attached to the respective guides 44 for Y-axis movement. One of the two rails 45 is one of the rails 45
Is mounted with a drive unit (not shown) for moving the base 41 in the Y-axis. Therefore, the base 41 is supported by the two rail bodies 45 and can perform the Y-axis movement.
Further, a robot main body 50 is inserted into the upper surface of the base 41 and a long hole 41 formed in a long shape in the correction X-axis direction.
a so that the robot body 50 can move in the corrected X-axis in the elongated hole 41a. On both sides of the elongated hole 41, linear guides 42, 42 for movably supporting the moving plate 43 are attached.

The moving plate 43 is attached to the movable portion of the linear guide 42, has a support surface 43a for supporting the robot body 50 formed on the upper surface, and has a hole 43b (see FIG. 3) is formed, and the moving body 63 of the moving plate driving unit 60 is attached to one side surface. The moving plate driving unit 60 is not limited to the structure as long as it moves the moving plate 43 in the corrected X-axis direction. In this embodiment, the moving plate driving unit 60 uses a ball screw. Two ball screw receiving portions 6 attached to the upper surface of the base 41
A moving body 63 attached to a moving plate 43 at the center of the ball screw 62 with a ball screw 62 attached to 1 and 61
Is installed. One end of the ball screw 62 is projected through one of the ball screw receiving portions 61, and a pulley 64 is mounted on the projected end. The pulley 64 is connected to another pulley 66 via a belt 65, and the pulley 66 is connected to the base 41.
It is mounted on a shaft 68 connected to a motor 67 fixed above. Therefore, by operating the motor 67, the ball screw 62 is pulled through the pulleys 64 and 66 and the belt 65.
Is rotated in one direction, and the moving body 63 mounted on the ball screw 62 moves linearly along the axis of the ball screw 62, so that the moving plate 43 moves in the correction X-axis direction.

The robot body 50 includes a machine base 51 (FIGS. 3 and 4).
), And a robot hand 52 disposed above the machine base 51. The machine 51 is arranged below the base 41 and moves the robot hand 52 in the vertical direction (Z-axis direction). And the robot hand unit 52 with the machine base 5
A drive unit (not shown) that rotates (θ rotation) with respect to the drive unit 1 is housed inside.

The robot hand unit 52 includes a moving plate 43
An arm base 53 disposed thereon, and an arm base 53
First arm 54 disposed above and pivoting with respect to machine base 51
A second arm 55 pivotally connected to the distal end of the first arm 54 with respect to the first arm 54;
5 has a hand 56 pivotally connected to the second arm 55. The first arm 54 is driven to rotate by a motor (not shown) built in the arm base 53. The arm base 53 is attached to and supported on the upper surface of the moving plate 43.
Is moved in the correction X-axis direction. As a configuration for driving the hand 56, a conventionally well-known one (for example, JP-A-2-172687) is used, and the hand 56 is driven so as to move linearly while facing in a certain direction.

The hand 56 is formed in a fork shape, and has two front end position sensors 57, 57 as first detection sensors embedded in the tip end thereof. When the hand 56 approaches the substrate W and is positioned below the front edge of the substrate W, the front end position sensor 57 detects the position of the light projected from the front end position sensor 57 by being reflected by the front edge of the substrate W and receiving the light. I do. When the two front end position sensors 57, 57 detect the positions of the front end edges of the substrate W, the difference between the positions causes the inclination on the horizontal plane with respect to the preset normal position of the substrate W. Can be detected, and the hand 56 is rotated by the angle θ for the correction.

The upstream processing apparatus 5 (or the downstream processing apparatus 6) is configured to mount the substrate W transferred by the robot 4 from above the upstream processing apparatus 5 (or the downstream processing apparatus 6). In the present embodiment, the specific processing contents of the upstream processing apparatus 5 (or the downstream processing apparatus 6) are not particularly shown, and for example, a cassette for storing the substrates W may be used.

The position detection sensor 7 (or 8)
To move the substrate W taken out of the upstream processing apparatus 5 (or housed in the downstream processing apparatus 6) in the corrected X-axis direction,
As a detection sensor, it is attached to a support (not shown) via a sensor support (not shown) near the upstream processing device 5 (or the downstream processing device 6). The detection sensor 7 (or 8) is not particularly limited to a sensor type (for example, a reflection type or a transmission type), but in the present embodiment, a transmission type sensor having a light projecting unit and a light receiving unit is used. You. The transmissive sensor detects the position when the light that has been received by the light receiving unit by projecting light from the light projecting unit below or above the edge of the substrate W is blocked by the substrate W, By detecting the position of the edge of the substrate W taken out of the upstream processing apparatus 5 (or stored in the downstream processing apparatus 6) by the hand 56 of the robot 4, the center of the substrate processing apparatus and the center of the substrate W are detected. The position shift amount is detected, and the position data of the substrate W is sent to the control device in order to match the respective centers.

Next, the operation of the substrate transfer apparatus M configured as described above will be described mainly with reference to FIGS.
In this operation description, (1) the substrate W is taken out from the upstream processing apparatus 5 and stored in one of the cassettes 2, and (2) the substrate W is taken out from the cassette 2 newly mounted on the gantry 1. This is for separately describing the form of storage in the downstream processing device 6. The substrate W is taken out of the upstream processing device 5, temporarily stored in the cassette 2, and then stored in the downstream processing device 6 from the cassette 2. Although a form may occur, a detailed description is omitted here.

(1) When a substrate W is transported from the upstream processing apparatus 5 to the cassette 2 (see FIGS. 5 to 12), in FIG. This shows a state where the robot hand 56 has been moved and stopped on the upstream extension line in the moving direction, and has been rotated to a position facing the front of the processing device 5. Processing device 5
The substrate W accommodated in is not always at the proper position, but is tilted in the horizontal direction or misaligned.

In this state, as shown in FIG.
6 is extended in the X-axis direction and moved downward of the substrate W. At this time, the position sensor 5 attached to the hand 56
7 and 57 pass the front edge of the substrate W, the position sensor 5
The positions of two points on the substrate W are detected by the light projected from the substrates 7 and 57, and the position difference is calculated to calculate the position of the substrate W.
Can be measured.

As shown in FIG. 7, the hand 56 that has moved below the substrate W makes a .theta. Rotation in accordance with the inclination of the substrate W, and at the same time, the substrate W detected by the position sensors 57, 57.
Are slightly moved in the X-axis direction and the corrected X-axis direction from the position. The slight X-axis movement and the corrected X-axis movement correspond to a difference in position caused by tilting the hand 56 by an angle θ with respect to the originally set position of the hand 56, and the substrate W
Is corrected in a state of inclination. In this state, the center of the hand 56 and the center of the substrate W are parallel but not coincident.

Thereafter, the hand 56 is lifted to hold the substrate W by suction, and the position is corrected by rotating the substrate W by θ, moving the X axis, and correcting the X axis to a preset position as shown in FIG. . As a result, the substrate W is
Are arranged in parallel with the Y-axis direction.

Next, the substrate W corrected in parallel to the Y-axis direction
As shown in FIG. 9, the hand 56 is taken out of the processing device 5 by moving the hand 56 in the X-axis direction and returning to the position of FIG.

Thereafter, the hand 56 holding the substrate W by suction is held.
Is moved in the direction of the correction X axis, and the center of the substrate W and the hand 5 are moved.
The edge of the substrate W is moved below the detection sensor 7 in order to detect the amount of deviation from the center of the substrate 6. FIG. 10 shows that after the position of the edge of the substrate W is detected by the detection sensor 7, the hand 56 is corrected by X so that the amount of deviation from the center with respect to the hand 56 is corrected and the substrate W is arranged at a proper position. This shows a state where the correction movement has been performed in the axial direction.

The robot 4 which has corrected the substrate W to a regular position.
As shown in FIG. 11, the hand 56 is rotated by 90 ° to face the front of the cassette 2. At this time, in order to match the center of the substrate W with the center of the cassette 2, Y
The robot 4 is corrected and moved in the axial direction. Then, as shown in FIG. 12, the hand 56 is extended and the substrate W is stored in the cassette 2 in a state where the substrate W is adjusted to the regular position, and only the hand 56 returns to the original position.

(2) When transferring a substrate W from the cassette 2 to the downstream processing apparatus 6 (FIGS. 13 to 20), FIG. 13 shows that the cassette 2 containing the substrate W is mounted on the gantry 1 and the robot 4 3 shows a state in which the hand 56 is rotated and moved so as to face the front of the cassette 2. The substrate W accommodated in the cassette 2 is not always at a proper position, but is tilted in the horizontal direction or is displaced.

Next, as shown in FIG. 14, the hand 56 is extended in the X-axis direction and moved downward of the substrate W.
At this time, the position sensor 57 attached to the hand 56,
When the 57 passes through the front edge of the substrate W, the inclination of the substrate W can be measured by the position sensors 57, 57 as in the above-described embodiment.

As shown in FIG. 15, the hand 56 moved below the substrate W makes a .theta. Rotation in accordance with the inclination of the substrate W and, at the same time, moves X from the position of the substrate W detected by the position sensors 57 and 57. A slight correction movement is performed in the axial direction and the Y-axis direction. In this state, the center of the hand 56 and the substrate W
Are parallel but not coincident.

Thereafter, the hand 56 is lifted to hold the substrate W by suction, and the position is corrected by rotating the substrate W by θ, X-axis and Y-axis to a preset position as shown in FIG. . As a result, the substrate W is
Are arranged in parallel with the X-axis direction.

Next, the substrate W corrected in parallel to the X-axis direction
By moving the hand 56 in the X-axis direction and returning to the position shown in FIG. 13 as shown in FIG.
Remove from When the hand 56 returns to the original position, as shown in FIG. 18, the robot 4 rotates the hand 56 holding the substrate W by suction to a position facing the front side of the downstream processing device 6 side.

Thereafter, Y is moved toward the downstream processing device 6 side.
The shaft moves, and temporarily stops at a position immediately before the downstream processing device 6. Then, the hand 56 holding the substrate W by suction is corrected X
In order to move in the axial direction and detect the amount of displacement between the center of the substrate W and the center of the hand 56, the edge of the substrate W is moved below the detection sensor 8 installed near the processing device 6. FIG. 19 shows that the position of the edge of the substrate W is detected by the detection sensor 8 and then the amount of deviation from the center with respect to the hand 56 is corrected so that the substrate W is arranged at a regular position.
This shows a state in which the hand 56 has been corrected and moved in the correction X-axis direction.

Then, as shown in FIG.
Is moved in the X-axis direction to extend it, and the substrate W
Is stored in a state where it is adjusted to the proper position, and only the hand 56 returns to the original position.

As described above, the transfer device is not limited to the embodiments (1) and (2). For example, the hand 5 that takes out the substrate W from the upstream processing unit 5 in the state of FIG.
After rotating by 180 ° to a position facing the front of the downstream processing device 6, the device 6 moves to the state of FIG. 19 in the form of (2), and the detecting device 8 extends the substrate W in the extended X-axis direction. The operation may be performed in such a manner that the positional deviation is detected and corrected and stored in the downstream processing device 6.

It should be noted that the substrate transfer apparatus or robot of the present invention is not limited to the above-described embodiment unless it goes beyond the gist of the present invention. For example, there may be two sets of robot hand units provided on the robot body, or a robot shown in Japanese Patent Application Laid-Open No. 4-171747 instead of a link type.

The base is not limited to the above-described embodiment as long as the base is configured so that the robot body can be moved in the Y-axis and the X-axis by mounting the moving plate. In addition, the position of the moving plate is not limited to the upper surface of the base, and the moving plate driving unit may be another generally known driving means, for example, a cylinder means or a rack and pinion driving means, as long as the moving plate can move the corrected X axis. You may.

[0043]

According to the present invention, a substrate transfer apparatus includes a cassette for storing a substrate, a robot having a hand for holding and transferring the substrate, and a processing apparatus for processing the substrate transferred by the robot. A hand of the robot performs an X-axis movement that moves in a direction of moving forward and backward with respect to the cassette and the processing apparatus, and a Y-axis movement that moves in a direction in which the robot itself transfers a substrate. And the hand can be corrected and moved in a direction perpendicular to the Y-axis movement direction of the robot. Therefore, when the hand extends in the Y-axis direction, the hand can be corrected in a direction orthogonal to the Y-axis direction. For example, if a processing device is arranged at the tip of the robot in the Y-axis direction, even if the center position of the substrate held by the robot hand and the set center position of the processing device are shifted, the correction is performed. The alignment can be made flexible.

The hand is provided with two first detection sensors for detecting the inclination of the substrate, and the position of the substrate is corrected in a direction orthogonal to the Y-axis movement of the robot. At least one second detection sensor is fixedly supported on the floor in the vicinity of the processing device, so that the set substrate can be corrected in position and stored in the processing device or cassette. it can.

The hand is provided with two first detection sensors for detecting the inclination of the substrate, and the position of the substrate is corrected in a direction orthogonal to the Y-axis movement of the robot. At least one second detection sensor is fixedly supported on the floor in the vicinity of the processing apparatus, so that it is not necessary to newly install an aligner having a complicated configuration, thereby reducing costs. it can.

Further, the robot has a main body having a hand and a hand drive, and the main body is supported by a movable plate movably disposed on a base movable in the Y-axis direction, The moving plate is configured to be movable in a direction orthogonal to the Y-axis direction of the robot by a driving unit disposed on the base. Therefore, when the hand extends in the Y-axis direction, the hand can be corrected in a direction orthogonal to the Y-axis direction.

Also, the substrate transfer robot of the present invention is configured to hold a substrate and be rotatable with respect to a machine base, and to have a robot body having a hand means configured to be extendable and contractable for taking out the substrate. A base that moves together with the robot main body to transfer the substrate held by the hand means, a moving plate movably disposed on the base, and a moving plate drive disposed on the base and driving the moving plate Means, and the robot main body is supported by the moving plate, and is configured to be movable together with the moving plate in a direction orthogonal to a moving direction of the base. Therefore, when the hand means of the robot extends in the moving direction of the base, the center position of the substrate held by the hand means can be corrected, and the alignment can be made flexible.

[Brief description of the drawings]

FIG. 1 is a plan view of a substrate transfer device according to one embodiment of the present invention.

FIG. 2 is an overall perspective view of a transfer robot showing one embodiment of the present invention.

FIG. 3 is a partial front sectional view of the transfer robot of FIG. 2;

4 is a sectional view taken along line IV-IV in FIG.

FIG. 5 is a diagram showing an operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 6 is a view showing the operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 7 is a view showing the operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 8 is a view showing the operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 9 is a diagram showing an operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 10 is a diagram showing the operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

11 is a view showing the operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 12 is a view showing the operation of the first embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 13 is a view showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 14 is a view showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 15 is a diagram showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 16 is a diagram showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 17 is a view showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 18 is a view showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 19 is a view showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

FIG. 20 is a view showing the operation of the second embodiment of the substrate transfer apparatus of FIG. 1;

[Explanation of symbols]

 M ... Substrate transfer device 1 ... Base 2 ... Cassette 4 ... Robot 5 ... Upstream processing device 6 ... Downstream processing device 7 ... Detection device 8 ... Detection device 41 ... Base 43 ... Movement plate 45 ... Rail body 50 ... Robot body 51 ... machine stand 52 ... robot hand unit (hand means) 54 ... first arm 55 ... second arm 56 ... hand 57 ... front end position sensor 60 ... moving plate drive unit

Claims (4)

[Claims] 1. A substrate transport apparatus comprising: a cassette for storing substrates; a robot having a hand for holding and transporting the substrates; and a processing device for processing the substrates transported by the robots, wherein the robot Performs an X-axis movement that moves in a direction to move forward and backward with respect to the cassette and the processing apparatus, and performs a Y-axis movement that moves in a direction in which the robot itself conveys the substrate. A substrate transfer apparatus characterized in that it can be corrected and moved in a direction orthogonal to the Y-axis movement direction of the robot. 2. The hand is provided with two first detection sensors for detecting an inclination of the substrate,
At least one second detection sensor for correcting the position of the substrate in a direction orthogonal to the Y-axis movement of the robot is fixedly supported on a floor near the processing device. 2. The substrate transfer device according to claim 1, wherein: 3. The robot has a main body having a hand and a hand drive, the main body being supported by a moving plate movably disposed on a base movable in the Y-axis direction, 2. The substrate transport apparatus according to claim 1, wherein the movable plate is configured to be movable in a direction orthogonal to a Y-axis direction of the robot by a driving unit disposed on the base. 4. A robot body having a hand means configured to hold a substrate and to be pivotable with respect to a machine base and extendable to move the substrate in and out; and a substrate held by the hand means. A base that moves together with the robot body to convey the moving object, a moving plate that is movably disposed on the base, and moving plate driving means that is disposed on the base and drives the moving plate. The substrate transport robot, wherein the robot main body is supported by the moving plate and is configured to be movable together with the moving plate in a direction orthogonal to a moving direction of the base.