JP2000092815A - Stage device and aligner using the same - Google Patents
Stage device and aligner using the sameInfo
- Publication number
- JP2000092815A JP2000092815A JP10274409A JP27440998A JP2000092815A JP 2000092815 A JP2000092815 A JP 2000092815A JP 10274409 A JP10274409 A JP 10274409A JP 27440998 A JP27440998 A JP 27440998A JP 2000092815 A JP2000092815 A JP 2000092815A
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- stage
- refrigerant
- stage device
- flow direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、加工対象物を高精
度に位置決めするためのステージ装置に関し、特に半導
体露光装置等に用いられるリニアモータ駆動方式のステ
ージ装置、および該ステージ装置を用いた露光装置に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage device for positioning a workpiece with high precision, and more particularly to a stage device of a linear motor drive system used for a semiconductor exposure device and the like, and an exposure using the stage device. It concerns the device.
【０００２】[0002]
【従来の技術】半導体集積回路、液晶表示素子、撮像素
子（ＣＣＤ）などの製造に使用される露光装置には、ウ
エハやガラスプレートを高精度に位置決めするためのス
テージ装置が用いられており、ステージ装置における位
置計測には、レーザ干渉計が使用され、また、駆動機構
としては、高速かつ非接触に駆動するために最近はリニ
アモータが使用されている。そして、その位置決め精度
はナノメートル（ｎｍ）のオーダーが要求され、レ−ザ
干渉計光路における空気温度の変化に伴う屈折率変化や
ステージ部材の温度変化に伴う熱膨張収縮が、位置決め
精度に敏感に影響するため、リニアモータ部の発熱対策
が必須になっている。2. Description of the Related Art A stage device for positioning a wafer or a glass plate with high accuracy is used in an exposure apparatus used for manufacturing a semiconductor integrated circuit, a liquid crystal display device, an image pickup device (CCD), and the like. A laser interferometer is used for position measurement in the stage device, and a linear motor is recently used as a driving mechanism for high-speed and non-contact driving. The positioning accuracy is required to be on the order of nanometers (nm), and a change in the refractive index due to a change in the air temperature in the optical path of the laser interferometer and a thermal expansion and contraction due to a change in the temperature of the stage member are sensitive to the positioning accuracy. Therefore, it is necessary to take measures against the heat generation of the linear motor.
【０００３】図３はこの種のステージ装置の従来例を示
す概略図であり、１０１は位置決め対象物を載置するス
テージ、１０２はリニアモータの可動子となる磁石、１
０３は磁石ホルダー、１０４はリニアモータの固定子と
なるコイル、１０５はコイルホルダー、１０６はコイル
１０４とコイルホルダー１０５との間の冷媒流路、１０
７は冷却装置、１０８および１０９は冷媒を通す供給配
管および排出配管、１１０はレーザ干渉計、１１１はレ
ーザ干渉計光路、１１２はステージ１に固定された反射
ミラーである。FIG. 3 is a schematic view showing a conventional example of this type of stage device, wherein 101 is a stage on which a positioning object is mounted, 102 is a magnet serving as a movable element of a linear motor, and 1
03 is a magnet holder, 104 is a coil serving as a stator of a linear motor, 105 is a coil holder, 106 is a refrigerant flow path between the coil 104 and the coil holder 105, 10
7 is a cooling device, 108 and 109 are supply pipes and discharge pipes through which the refrigerant passes, 110 is a laser interferometer, 111 is an optical path of the laser interferometer, and 112 is a reflection mirror fixed to the stage 1.
【０００４】図３に図示する構成において、ステージ１
０１はレーザ干渉計１１０により計測された位置情報に
基づき、コイル１０４に適宜通電することにより、図面
左右方向（矢印１１３）に駆動され位置決めされる。こ
のときコイル１０４に発生する熱は冷媒により回収され
る。すなわち、冷却装置１０７から供給配管１０８を通
してコイル１０４の回りの冷媒流路１０６に冷媒が供給
され、熱を吸収した冷媒は排出配管１０９を通って再び
冷却装置１０７に戻される。[0004] In the configuration shown in FIG.
01 is driven and positioned in the left-right direction of the drawing (arrow 113) by appropriately energizing the coil 104 based on the position information measured by the laser interferometer 110. At this time, the heat generated in the coil 104 is recovered by the refrigerant. That is, the refrigerant is supplied from the cooling device 107 to the refrigerant channel 106 around the coil 104 through the supply pipe 108, and the refrigerant that has absorbed the heat is returned to the cooling device 107 again through the discharge pipe 109.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、図３に
図示するような従来のステージ装置では、コイル１０４
の回りを流れる冷媒の流れ方向が一定であるため、コイ
ルホルダー１０５の表面温度に勾配が生じる。つまり、
冷媒の流れの上流側では低温になり、下流側では高温に
なる。このため、レーザ干渉計光路１１１の空気温度に
ムラが生じ、計測誤差の原因となる。また、ステージ１
０１が可動範囲のどの位置にいるかによって、コイルホ
ルダー１０５からステージ１０１へ単位時間当たりに流
入する熱量が異なり、ステージ１０１の移動によってス
テージ部材の温度が変動する。その結果、ステージ部材
の熱変形が生じ、位置決め精度に悪影響を及ぼすという
欠点があった。However, in the conventional stage apparatus as shown in FIG.
Is constant, the surface temperature of the coil holder 105 has a gradient. That is,
The temperature is low on the upstream side of the flow of the refrigerant and high on the downstream side. Therefore, the air temperature of the laser interferometer optical path 111 becomes uneven, which causes a measurement error. Stage 1
The amount of heat flowing from the coil holder 105 to the stage 101 per unit time varies depending on where the position 01 is in the movable range, and the movement of the stage 101 changes the temperature of the stage member. As a result, there is a disadvantage that the stage member is thermally deformed, which adversely affects the positioning accuracy.
【０００６】そこで、本発明は、上記の従来技術の有す
る未解決の課題に鑑みてなされたものであって、コイル
ホルダーの表面温度勾配を低減し、位置決め精度への悪
影響を除去することができるステージ装置および該ステ
ージ装置を用いた露光装置を提供することを目的とする
ものである。The present invention has been made in view of the above-mentioned unsolved problems of the prior art, and can reduce a surface temperature gradient of a coil holder and remove an adverse effect on positioning accuracy. It is an object of the present invention to provide a stage device and an exposure apparatus using the stage device.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するた
め、本発明のステージ装置は、可動ステージと、該可動
ステージを所定方向に駆動するリニアモータと、該リニ
アモータに配管系を介して冷媒を循環させて該リニアモ
ータから生じる熱を回収する冷却装置とを備えたステー
ジ装置において、前記リニアモータを循環する冷媒の流
れ方向を正逆反転させる流れ方向切替手段を有すること
を特徴とする。In order to achieve the above object, a stage device according to the present invention comprises a movable stage, a linear motor for driving the movable stage in a predetermined direction, and a refrigerant connected to the linear motor via a piping system. And a cooling device that circulates the refrigerant to recover heat generated from the linear motor, characterized in that the stage device includes a flow direction switching unit that reverses the flow direction of the refrigerant circulating in the linear motor.
【０００８】本発明のステージ装置においては、流れ方
向切替手段は、所定の周期をもってリニアモータを循環
する冷媒の流れ方向を正逆反転させることが好ましい。In the stage device of the present invention, the flow direction switching means preferably reverses the flow direction of the refrigerant circulating in the linear motor at a predetermined cycle.
【０００９】また、本発明のステージ装置は、少なくと
もリニアモータの可動方向両端部近傍にそれぞれ配設し
た温度センサーと演算制御装置とを有し、前記演算制御
装置は、前記温度センサーから得られる温度情報に基づ
いて流れ方向切替手段に指令を出し、前記リニアモータ
を循環する冷媒の流れ方向を制御することが好ましい。Further, the stage device of the present invention has a temperature sensor and an arithmetic and control unit disposed at least near both ends of the linear motor in the movable direction, respectively, and the arithmetic and control unit is configured to control the temperature obtained from the temperature sensor. Preferably, a command is issued to the flow direction switching means based on the information to control the flow direction of the refrigerant circulating in the linear motor.
【００１０】本発明のステージ装置においては、演算制
御装置は、温度センサーから得られる温度情報に基づい
て、冷却装置が循環させる冷媒の温度をも制御するよう
に構成することが好ましい。[0010] In the stage device of the present invention, it is preferable that the arithmetic and control unit is configured to also control the temperature of the refrigerant circulated by the cooling device based on the temperature information obtained from the temperature sensor.
【００１１】そして、本発明の露光装置は、請求項１な
いし４のいずれか１項に記載のステージ装置を用いるこ
とを特徴とする。An exposure apparatus according to the present invention uses the stage apparatus according to any one of claims 1 to 4.
【００１２】[0012]
【作用】本発明によれば、ステージ装置におけるリニア
モータ部を循環する冷媒の流れ方向を正逆反転させる流
れ方向切替手段を設け、所定の周期をもって冷媒の流れ
方向を正逆反転させることにより、リニアモータ部に生
じる温度勾配を低減でき、位置決め精度への悪影響を除
去することができる。According to the present invention, a flow direction switching means for reversing the flow direction of the refrigerant circulating in the linear motor section of the stage device is provided, and the flow direction of the refrigerant is reversed at a predetermined cycle. The temperature gradient generated in the linear motor can be reduced, and the adverse effect on the positioning accuracy can be eliminated.
【００１３】また、リニアモータの可動方向両端部近傍
に温度センサーを設け、温度センサーの温度情報に基づ
き冷媒の流れ方向を制御することにより、リニアモータ
部に生じる温度勾配を所定の範囲内に制御でき、位置決
め精度への悪影響を確実に除去することができ、さら
に、温度センサーの温度情報に基づき冷媒の温度をも制
御でき、よりきめの細かい環境温度制御が可能となる。A temperature sensor is provided in the vicinity of both ends of the linear motor in the movable direction, and the flow direction of the refrigerant is controlled based on the temperature information of the temperature sensor to control the temperature gradient generated in the linear motor within a predetermined range. As a result, adverse effects on the positioning accuracy can be reliably removed, and the temperature of the refrigerant can be controlled based on the temperature information of the temperature sensor, so that finer environmental temperature control can be performed.
【００１４】[0014]
【発明の実施の形態】本発明の実施の形態を図面に基づ
いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００１５】（実施例１）図１の（ａ）ないし（ｃ）
は、本発明に係るステージ装置の第１の実施例を図示す
る概略図である。(Embodiment 1) FIGS. 1 (a) to 1 (c)
FIG. 1 is a schematic view illustrating a first embodiment of a stage device according to the present invention.
【００１６】図１の（ａ）において、１は位置決め対象
物を載置するステージ、２はリニアモータの可動子とな
る磁石、３は磁石ホルダー、４はリニアモータの固定子
となるコイル、５はコイルホルダー、６はコイル４とコ
イルホルダー５との間の冷媒流路、７は冷却装置、８お
よび８ａ、８ｂは、冷媒を冷媒流路６へ供給する流路を
形成する供給配管およびその分岐配管であり、９および
９ａ、９ｂは、冷媒を冷媒流路６から排出する流路を形
成する排出配管およびその分岐配管であり、１０はレー
ザ干渉計、１１はレーザ干渉計光路、１２はステージ１
に固定された反射ミラーであり、また、２１は供給配管
８に設けられた流路切替弁であり、供給配管８の流れを
分岐配管８ａと８ｂのいずれかへ連通させるために流路
を切り替えうるように構成され、２２は排出配管９に設
けられた流路切替弁であり、排出配管９の流れを分岐配
管９ａと９ｂのいずれかへ連通させるために流路を切り
替えうるように構成されている。２３、２５はＴ形継手
であり、２４、２６は冷媒流路６の両端部にそれぞれ接
続された配管である。そして、２０は流路切替弁２１、
２２を制御する演算制御装置である。In FIG. 1A, reference numeral 1 denotes a stage on which an object to be positioned is placed, 2 denotes a magnet serving as a mover of a linear motor, 3 denotes a magnet holder, 4 denotes a coil which serves as a stator of the linear motor, 5 Is a coil holder, 6 is a refrigerant flow path between the coil 4 and the coil holder 5, 7 is a cooling device, 8 and 8a and 8b are supply pipes forming a flow path for supplying a refrigerant to the refrigerant flow path 6, and Branch pipes, 9 and 9a, 9b are discharge pipes forming a flow path for discharging refrigerant from the refrigerant flow path 6 and branch pipes thereof, 10 is a laser interferometer, 11 is a laser interferometer optical path, and 12 is a laser interferometer. Stage 1
Is a reflection mirror fixed to the supply pipe 21, and 21 is a flow path switching valve provided in the supply pipe 8, and switches a flow path to connect the flow of the supply pipe 8 to one of the branch pipes 8a and 8b. Reference numeral 22 denotes a flow path switching valve provided in the discharge pipe 9, which is configured to switch a flow path in order to connect the flow of the discharge pipe 9 to one of the branch pipes 9 a and 9 b. ing. Reference numerals 23 and 25 denote T-shaped joints, and reference numerals 24 and 26 denote pipes respectively connected to both ends of the refrigerant channel 6. And 20 is a flow path switching valve 21,
22 is an arithmetic and control unit that controls the control unit 22.
【００１７】図１に図示するステージ装置の構成におい
て、ステージ１の駆動位置決め方法は図３に図示する従
来例と同様であり、ステージ１は、レーザ干渉計１０に
より計測された位置情報に基づき、コイル４に適宜通電
することにより、図面左右方向に駆動され位置決めされ
る。コイル４の冷却方法は、従来例と異なり、演算制御
装置２０の指令に基づき、流路切替弁２１、２２を作動
させて、コイル４とコイルホルダー５との間の冷媒流路
６を流れる冷媒の流れ方向を所定の周期をもって反転さ
せることにより行なうものである。図１の（ｂ）および
（ｃ）に冷媒の流れを正逆反転させた状態の流れを示
す。In the configuration of the stage apparatus shown in FIG. 1, the method of driving and positioning the stage 1 is the same as that of the conventional example shown in FIG. 3, and the stage 1 is based on position information measured by the laser interferometer 10. By appropriately energizing the coil 4, it is driven and positioned in the left-right direction in the drawing. The method of cooling the coil 4 differs from the conventional example in that the flow path switching valves 21 and 22 are operated based on a command from the arithmetic and control unit 20 to operate the refrigerant flowing through the refrigerant flow path 6 between the coil 4 and the coil holder 5. By reversing the flow direction at a predetermined cycle. FIGS. 1B and 1C show flows in a state where the flow of the refrigerant is reversed.
【００１８】すなわち、図１の（ｂ）において、供給配
管８の流路切替弁２１は、供給配管８の流れを分岐配管
８ａへ連通するように開き、分岐配管８ｂへの連通を閉
じるように作用し、そして、排出配管９の流路切替弁２
２は、排出配管９と分岐配管９ａの連通を閉じ、排出配
管９と分岐配管９ｂを連通するように開いている。その
結果、冷却装置７から供給配管８を通して供給される冷
媒は、流路切替弁２１を介して分岐配管８ａを通り、Ｔ
形継手２３を経て、配管２４の方からコイル４の回りの
冷媒流路６に流入し、そして、冷媒流路６において熱を
吸収した冷媒は、配管２６からＴ形継手２５を経て排出
配管９の分岐配管９ｂを通り、流路切替弁２２を介し
て、排出配管９から再び冷却装置７に戻される。That is, in FIG. 1B, the flow path switching valve 21 of the supply pipe 8 opens so as to communicate the flow of the supply pipe 8 to the branch pipe 8a, and closes the communication to the branch pipe 8b. Actuates and the flow switching valve 2 of the discharge pipe 9
Numeral 2 closes the communication between the discharge pipe 9 and the branch pipe 9a and opens so as to connect the discharge pipe 9 and the branch pipe 9b. As a result, the refrigerant supplied from the cooling device 7 through the supply pipe 8 passes through the branch pipe 8a via the flow path switching valve 21, and
The refrigerant that has flowed into the refrigerant flow path 6 around the coil 4 from the pipe 24 via the joint 23 and that has absorbed heat in the refrigerant flow path 6 is discharged from the pipe 26 through the T-shaped joint 25 to the discharge pipe 9. And is returned to the cooling device 7 from the discharge pipe 9 via the flow path switching valve 22.
【００１９】図１の（ｃ）において、供給配管８の流路
切替弁２１は、供給配管８と分岐配管８ｂを連通するよ
うに開き、供給配管８と分岐配管８ａの連通を閉じるよ
うに作用し、そして、排出配管９の流路切替弁２２は、
排出配管９と分岐配管９ａの連通を開き、排出配管９と
分岐配管９ｂの連通を閉じるように作用している。その
結果、冷却装置７から供給配管８を通して供給される冷
媒は、流路切替弁２１を介して分岐配管８ｂを通り、Ｔ
形継手２５を経て、配管２６の方からコイル４の回りの
冷媒流路６に流入し、そして、冷媒流路６において熱を
吸収した冷媒は、配管２４からＴ形継手２３を経て分岐
配管９ａを通り、流路切替弁２２を介して排出配管９か
ら再び冷却装置７に戻される。In FIG. 1C, the flow path switching valve 21 of the supply pipe 8 is opened so as to connect the supply pipe 8 and the branch pipe 8b and closes the communication between the supply pipe 8 and the branch pipe 8a. And the flow path switching valve 22 of the discharge pipe 9
The connection between the discharge pipe 9 and the branch pipe 9a is opened, and the communication between the discharge pipe 9 and the branch pipe 9b is closed. As a result, the refrigerant supplied from the cooling device 7 through the supply pipe 8 passes through the branch pipe 8 b via the flow path switching valve 21,
The refrigerant that has flowed into the refrigerant flow path 6 around the coil 4 from the pipe 26 through the joint 25 and that has absorbed the heat in the refrigerant flow path 6 passes from the pipe 24 through the T-joint 23 to the branch pipe 9a. And is returned to the cooling device 7 from the discharge pipe 9 via the flow path switching valve 22 again.
【００２０】このように冷媒の流れ方向を反転させる際
の反転の周期は、冷媒をステップ状に供給開始したとき
のコイルホルダー５の表面温度変化の飽和時間から決ま
る時定数以下にすれば、コイルホルダー５の表面温度は
平均化され、温度勾配を低減できる。If the reversal cycle when reversing the flow direction of the refrigerant is set to be equal to or less than the time constant determined by the saturation time of the surface temperature change of the coil holder 5 when the supply of the refrigerant is started in a stepwise manner, The surface temperature of the holder 5 is averaged, and the temperature gradient can be reduced.
【００２１】また、冷却効率の観点からは、冷媒が一巡
する周期以上にするのが望ましく、さらには、図１の
（ｂ）における分岐配管８ｂ、そして、図１の（ｃ）に
おける分岐配管８ａへ僅かにリークさせ、流れ方向反転
時に直ちに低温の冷媒がコイル回りの冷媒流路６に流入
するようにすると、冷却効率を向上させることができ
る。Further, from the viewpoint of cooling efficiency, it is desirable to set the cycle to be longer than the cycle in which the refrigerant makes one cycle. Further, the branch pipe 8b in FIG. 1B and the branch pipe 8a in FIG. When the flow direction is reversed, a low-temperature refrigerant immediately flows into the refrigerant flow path 6 around the coil, whereby the cooling efficiency can be improved.
【００２２】（実施例２）図２は本発明に係るステージ
装置の第２の実施例を図示する概略図である。(Embodiment 2) FIG. 2 is a schematic view illustrating a second embodiment of the stage apparatus according to the present invention.
【００２３】本実施例は、図１に図示する第１の実施例
に対して、コイルホルダー５の両端部近傍に温度センサ
ー３１、３２を付加し、これらの温度センサー３１、３
２は検出される温度情報を演算制御装置２０に入力する
ように接続しており、その他の構成は同じであって詳細
な説明は省略する。This embodiment is different from the first embodiment shown in FIG. 1 in that temperature sensors 31, 32 are added near both ends of the coil holder 5, and these temperature sensors 31, 3 are provided.
Reference numeral 2 is connected to input the detected temperature information to the arithmetic and control unit 20, and the other configuration is the same, and the detailed description is omitted.
【００２４】図２に図示するステージ装置の構成におい
て、温度センサー３１、３２からの温度情報Ｔ１、Ｔ２
は、演算制御装置２０に入力され、演算制御装置２０
は、例えば温度差（Ｔ１−Ｔ２）を計算し、その温度差
が所定の一定値を越えると流路切替弁２１、２２に指令
信号を出し、冷媒の流れ方向を反転させる。その結果、
コイルホルダー５の温度勾配を所定の範囲内に制御する
ことができる。In the configuration of the stage device shown in FIG. 2, temperature information T1 and T2 from temperature sensors 31 and 32 are provided.
Is input to the arithmetic and control unit 20 and the arithmetic and control unit 20
Calculates, for example, a temperature difference (T1-T2), and when the temperature difference exceeds a predetermined constant value, issues a command signal to the flow path switching valves 21 and 22 to reverse the flow direction of the refrigerant. as a result,
The temperature gradient of the coil holder 5 can be controlled within a predetermined range.
【００２５】本実施例においては、さらには、演算制御
装置２０において、例えば、平均温度（Ｔ１＋Ｔ２）／
２を計算し、冷却装置７から出る冷媒の温度や、コイル
ホルダー５の両端部の温度を制御することもでき、より
きめの細かい環境温度制御が可能である。In this embodiment, the arithmetic and control unit 20 further calculates, for example, the average temperature (T1 + T2) /
2 can be calculated to control the temperature of the refrigerant flowing out of the cooling device 7 and the temperature of both ends of the coil holder 5, so that finer environmental temperature control is possible.
【００２６】[0026]
【発明の効果】以上説明したように、本発明によれば、
リニアモータ部分を循環する冷媒の流れ方向を正逆反転
させる流れ方向切替手段を設け、所定の周期をもって冷
媒の流れ方向を正逆反転させることにより、リニアモー
タ部分に生じる温度勾配を低減でき、位置決め精度への
悪影響を除去することができる。As described above, according to the present invention,
A flow direction switching means for reversing the flow direction of the refrigerant circulating in the linear motor portion is provided, and by reversing the flow direction of the refrigerant in a predetermined cycle, the temperature gradient generated in the linear motor portion can be reduced, and positioning can be performed. An adverse effect on accuracy can be eliminated.
【００２７】さらに、リニアモータ部分の両端部近傍に
設けた温度センサーの情報に基づき冷媒の流れ方向を制
御することにより、リニアモータ部分に生じる温度勾配
を所定の範囲内に制御でき、位置決め精度への悪影響を
確実に除去することができる。Further, by controlling the flow direction of the refrigerant based on information of temperature sensors provided near both ends of the linear motor portion, the temperature gradient generated in the linear motor portion can be controlled within a predetermined range, and the positioning accuracy can be improved. Can be reliably removed.
【００２８】また、本発明によれば、ステージ装置本体
を格別変更することなく、冷媒を循環させる配管系の簡
単な変更のみで、位置決め精度の向上が望めるという利
点がある。Further, according to the present invention, there is an advantage that the positioning accuracy can be improved only by a simple change of the piping system for circulating the refrigerant without specially changing the stage device main body.
【図１】（ａ）は本発明に係るステージ装置の第１の実
施例を図示する概略図であり、（ｂ）はステージ装置に
おける冷媒の流れ方向（正方向）を示す図であり、
（ｃ）はステージ装置における冷媒の他の流れ方向（逆
方向）を示す図である。FIG. 1A is a schematic diagram illustrating a first embodiment of a stage device according to the present invention, FIG. 1B is a diagram illustrating a flow direction (forward direction) of a refrigerant in the stage device,
(C) is a diagram showing another flow direction (reverse direction) of the refrigerant in the stage device.
【図２】本発明に係るステージ装置の第２の実施例を図
示する概略図である。FIG. 2 is a schematic view illustrating a second embodiment of the stage device according to the present invention.
【図３】従来例のステージ装置を図示する概略図であ
る。FIG. 3 is a schematic view illustrating a conventional stage device.
１ ステージ ２ 磁石（可動子） ３ 磁石ホルダー ４ コイル（固定子） ５ コイルホルダー ６ 冷媒流路 ７ 冷却装置 ８ 供給配管 ８ａ、８ｂ 分岐配管 ９ 排出配管 ９ａ、９ｂ 分岐配管 １０ レーザ干渉計 １１ レーザ干渉計光路 １２ 反射ミラー ２０ 演算制御装置 ２１、２２ 流路切替弁 ２３、２５ Ｔ形継手 ２４、２６ 配管 ３１、３２ 温度センサー Reference Signs List 1 stage 2 magnet (movable element) 3 magnet holder 4 coil (stator) 5 coil holder 6 refrigerant flow path 7 cooling device 8 supply pipe 8a, 8b branch pipe 9 discharge pipe 9a, 9b branch pipe 10 laser interferometer 11 laser interference Metering path 12 Reflecting mirror 20 Arithmetic control unit 21, 22 Flow path switching valve 23, 25 T-shaped joint 24, 26 Piping 31, 32 Temperature sensor
Claims (5)
方向に駆動するリニアモータと、該リニアモータに配管
系を介して冷媒を循環させ該リニアモータから生じる熱
を回収する冷却装置とを備えたステージ装置において、
前記リニアモータを循環する冷媒の流れ方向を正逆反転
させる流れ方向切替手段を有することを特徴とするステ
ージ装置。1. A movable stage, a linear motor that drives the movable stage in a predetermined direction, and a cooling device that circulates a refrigerant through a piping system to the linear motor and collects heat generated from the linear motor. In stage equipment,
A stage device comprising a flow direction switching means for reversing the flow direction of the refrigerant circulating in the linear motor in the forward and reverse directions.
てリニアモータを循環する冷媒の流れ方向を正逆反転さ
せることを特徴とする請求項１記載のステージ装置。2. The stage device according to claim 1, wherein the flow direction switching means reverses the flow direction of the refrigerant circulating in the linear motor at a predetermined cycle.
部近傍にそれぞれ配設した温度センサーと演算制御装置
とを有し、前記演算制御装置は、前記温度センサーから
得られる温度情報に基づいて流れ方向切替手段に指令を
出し、リニアモータを循環する冷媒の流れ方向を制御す
ることを特徴とする請求項１記載のステージ装置。3. A temperature sensor and an arithmetic and control unit respectively disposed at least in the vicinity of both ends of the linear motor in the movable direction, wherein the arithmetic and control unit switches the flow direction based on temperature information obtained from the temperature sensor. 2. The stage device according to claim 1, wherein a command is issued to the means to control a flow direction of the refrigerant circulating in the linear motor.
れる温度情報に基づいて、冷却装置が循環させる冷媒の
温度をも制御することを特徴とする請求項３記載のステ
ージ装置。4. The stage device according to claim 3, wherein the arithmetic and control unit also controls the temperature of the refrigerant circulated by the cooling device based on the temperature information obtained from the temperature sensor.
のステージ装置を用いることを特徴とする露光装置。5. An exposure apparatus using the stage device according to claim 1. Description:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10274409A JP2000092815A (en) | 1998-09-10 | 1998-09-10 | Stage device and aligner using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10274409A JP2000092815A (en) | 1998-09-10 | 1998-09-10 | Stage device and aligner using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000092815A true JP2000092815A (en) | 2000-03-31 |
Family
ID=17541278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10274409A Pending JP2000092815A (en) | 1998-09-10 | 1998-09-10 | Stage device and aligner using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000092815A (en) |
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