JP2000073150A - Iron base soft magnetic alloy - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an Fe base soft magnetic alloy high in thermal stability, saturated magnetic flux density and permeability, low in coercive force and magnetostriction and exhibiting excellent soft magnetic properties. SOLUTION: This alloy is obtd. by rapidly cooling the molten metal of an alloy expressed by the formulae (I) and (II) to form into the amorphous one and thereafter executing heat treatment to precipitate Fe crystal grains of a bcc structure with <=30 nm average crystal grain size: formula I: (Fe1-aZa)bBxMyM'z and formula II: (Fe1-aZa)bBxMyM'zXt, where Z denotes one or two kinds of Co and Ni, M denotes one or more kinds among Ti, Zr, Hf, V, Nb and Mo, M' denotes one or more kinds among elements having >=180 mass number, X denotes one or more kinds of elements among Si, Al, Ge and Ga, and 0<=a<=0.2, 75<=b <=93 atomic %, 0.5<=x<=18 atomic %, 4<=y<=9 atomic %, z<=5 atomic % and 0<=t<=5 atomic % are satisfied.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a soft magnetic alloy used for a magnetic device such as a magnetic head, a transformer and a choke coil, and more particularly to an Fe-based soft magnetic material having a high saturation magnetic flux density and excellent soft magnetic characteristics. It is about alloys.

[0002]

2. Description of the Related Art In general, the characteristics required for a soft magnetic alloy used for a magnetic head core, a magnetic core of a pulse motor, or a magnetic device such as a transformer or a choke coil are high saturation magnetic flux density and high magnetic permeability. A low coercive force, an appropriate magnetic anisotropy energy can be imparted, a squareness ratio (Ir / Is) can be controlled, and magnetostriction is small. Therefore, in the development of soft magnetic alloys, material research is being conducted on various alloy systems from these viewpoints. Conventionally, Fe-S
i-Al alloy (Sendust), Fe-Ni alloy (Permalloy), crystalline alloys such as silicon steel, Fe-based, Co
A base amorphous alloy is used.

Recently, a soft magnetic alloy made of an Fe—Zr—B alloy in which a nanocrystalline phase is dispersed in an amorphous structure has been developed. This Fe-Zr-B-based alloy is manufactured, for example, as follows. First, a molten metal having a predetermined composition is quenched by a method such as a liquid quenching method to form an amorphous metal ribbon.
By precipitating nanocrystal grains mainly composed of, an Fe—Zr—B-based alloy in which a nanocrystal phase is dispersed can be obtained.

[0004]

SUMMARY OF THE INVENTION The above-mentioned Fe-Zr-B
The system alloy is an excellent soft magnetic alloy having a high saturation magnetic flux density, a high magnetic permeability and a high mechanical strength. However, the soft magnetic properties of this Fe-Zr-B-based alloy are greatly affected by the heat treatment conditions during manufacturing. That is, if heat treatment is insufficient, precipitation of crystal grains in the alloy is not sufficient, and excessive heat treatment enlarges crystal grains in the alloy, and in any case, the magnetic permeability of the Fe-Zr-B-based alloy And the coercive force increases. In addition, the aforementioned enlargement of crystal grains
It can also occur when the rate of temperature rise during heat treatment is low. Therefore, in order to impart a high magnetic permeability and a low coercive force to this alloy, it is necessary to increase the heating rate during heat treatment as fast as possible and maintain an optimal heat treatment temperature. There is a problem that it is difficult to maintain the heat treatment temperature. In addition, large-scale heat treatment furnaces must be used for mass production of alloys. In this case, the temperature distribution in the furnace becomes non-uniform and the heat treatment cannot be performed uniformly. There is also a problem that it becomes difficult to perform the heat treatment and the soft magnetic properties of the alloy deteriorate.

The inventors of the present invention have intensively studied means for solving the above-mentioned problems. As a result, if the thermal stability of the Fe-Zr-B-based alloy is improved, even if the heat treatment conditions are somewhat unstable, The present inventors have discovered that fine crystals can be sufficiently precipitated in the structure, and that the alloy can exhibit excellent soft magnetic characteristics, and the present invention has been achieved. That is, an object of the present invention is to provide an Fe-based soft magnetic alloy having high thermal stability, high saturation magnetic flux density and high magnetic permeability, low coercive force and low magnetostriction, and excellent soft magnetic properties. .

[0006]

The Fe-based soft magnetic alloy of the present invention is obtained by quenching a melt of an alloy represented by the following composition formula to be amorphous, and then performing a heat treatment at a temperature higher than a crystallization temperature. Bcc structure Fe having an average crystal grain size of 30 nm or less
Are precipitated.

(Fe ₁ -aZ _a ) _b B _x M _y M ′ _z where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, Nb , Mo are one or more elements, and M ′ has a mass number of 18
One or two or more elements of 0 or more elements, and a, b, x, y, and z indicating the composition ratio are 0 ≦ a ≦ 0.
2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦
18 atomic%, 4 atomic% ≦ y ≦ 9 atomic%, and z ≦ 5 atomic%.

Or (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z X _t where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf , V, Nb, and Mo are one or more elements, and M ′ has a mass number of 18
X is one or more of zero or more elements, and X is one or two of Si, Al, Ge, and Ga.
A, b, x, y,
z and t are 0 ≦ a ≦ 0.2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦ 18 atomic%, and 4 atomic% ≦ y ≦ 9
Atomic%, z ≦ 5 atomic%, 0 atomic% ≦ t ≦ 5 atomic%.

In the Fe-based soft magnetic alloy of the present invention, it is preferable that M ′ is one or more of W, Ta, a white metal element, and Au. Further, in the Fe-based soft magnetic alloy of the present invention, it is preferable that the M includes at least one of Zr and Nb.

[0010] Fe and the element Z impart magnetism to the Fe-based soft magnetic alloy of the present invention. If the added amount of Fe and the element Z is excessive, it is difficult to obtain an amorphous phase even by the liquid quenching method. When the addition amount of Fe and the element Z is small, the saturation magnetic flux density of the soft magnetic alloy decreases. Therefore, the composition ratio b of Fe and the element Z is set to be 75 atomic% or more and 93 atomic% or less.
Further, when the addition amount of the element Z is excessive, the magnetic permeability of the soft magnetic alloy decreases, so the composition ratio a of the element Z is set to 0.2 or less.

[0011] In B, the ability to form an amorphous phase is enhanced, the thermal stability of the amorphous phase remaining at the grain boundaries between the fine crystal grains to be precipitated is increased, and the crystal grains are prevented from becoming coarse. It is considered that there is an effect of suppressing the formation of a Fe-M-based compound phase that adversely affects the soft magnetic properties in the heat treatment. If the addition amount of B is small, the amorphous phase at the grain boundary becomes unstable, and the crystal grains become coarse, and a sufficient addition effect cannot be obtained. If the addition amount of B is excessive, B-M
And the tendency of forming Fe-B-based borides is increased, and heat treatment conditions for precipitating fine crystal grains are restricted, so that good soft magnetic characteristics cannot be obtained. Therefore, the composition ratio x of B is set to 0.5 atomic% or more and 18 atomic% or less.

[0012] The element M is considered to be an element that reduces the rate of generation of fine crystal grain nuclei in the structure and facilitates the formation of an amorphous phase. It is effective for miniaturization. If the addition amount of the element M is small, the nucleus growth rate increases, the grain size of the crystal grains becomes coarse, and good soft magnetic properties cannot be obtained. On the other hand, if the addition amount is excessive, the tendency of forming MB-based and Fe-M-based compounds after the heat treatment is increased, and the soft magnetic properties are reduced. Therefore, the composition ratio y of the element M is set to 4 at% to 9 at%. Of the elements M, Zr and Nb in particular have a high amorphous forming ability.
When at least one of Zr and Nb is added, the addition amount of the element M can be reduced, and the addition amount of Fe can be relatively increased to further increase the saturation magnetic flux density of the soft magnetic alloy.

The element M 'is an element having a mass number of 180 or more and a relatively heavy mass, so that it is difficult to thermally diffuse in the structure of the alloy even when heat-treated. Therefore, even if the Fe-based soft magnetic alloy to which the element M 'is added is subjected to the heat treatment under the same condition as the alloy to which the element M' is not added, the grain growth of the crystal grains is delayed. Further, these elements M 'mainly remain in the amorphous phase and have the effect of improving the thermal stability of the amorphous phase. Therefore, in the Fe-based soft magnetic alloy to which the element M ′ is added, even if the heat treatment is performed at a temperature higher than the optimum heat treatment temperature, the crystal grains are hardly coarsened, and the thermal stability of the amorphous phase is large. In addition, the alloy exhibits excellent soft magnetic properties without increasing the thermal stability of the alloy, thereby reducing the saturation magnetic flux density and magnetic permeability, and without increasing the coercive force and magnetostriction. Among the elements M ', W, Ta, a white metal element, and Au all improve the thermal stability of the soft magnetic alloy, so that at least one or two or more of these elements must be added. Is preferred. Further, as the above-mentioned white metal element, Ru,
Each element of Rh, Pd, Os, Ir, and Pt is illustrated.
If the composition ratio z of the element M ′ exceeds 5 atomic%, the decrease in magnetic permeability when the heat treatment temperature is increased is large, and the soft magnetic properties of the Fe-based soft magnetic alloy are undesirably reduced. The range of the composition ratio z is preferably z ≦ 5 atomic%,
It is more preferably 0.5 atomic% ≦ z ≦ 5 atomic%, still more preferably 1 atomic% ≦ z ≦ 3 atomic%, and still more preferably 1 atomic% ≦ z ≦ 2 atomic%.

The element X is known as a metalloid element, and these elements X form a solid solution in the Fe phase having the bcc structure.
Further, the electric resistance of the soft magnetic alloy is increased to reduce iron loss. If the addition amount of the element X is excessive, the saturation magnetic flux density or the magnetic permeability decreases, so the composition ratio t of the element X is set to 5 atomic% or less.

If the composition of the Fe-based soft magnetic alloy of the present invention is as described above, the magnetic permeability, coercive force, average grain size of grains, and thermal stability of magnetostriction with respect to changes in heat treatment temperature are further improved. An Fe-based soft magnetic alloy exhibiting excellent soft magnetic properties can be obtained.

The Fe-based soft magnetic alloy of the present invention has a magnetic permeability μ at 1 kHz after the heat treatment at 610 ° C.
And _610, when the ratio of the magnetic permeability mu ₇₆₀ in 1kHz when the above heat-treated at 760 ° C. and mu ₆₁₀ / mu _760,
0.1 ≦ μ ₆₁₀ / μ ₇₆₀ ≦ 100. More preferably, the above-mentioned ratio is 0.2 ≦ μ ₆₁₀ / μ ₇₆₀ ≦ 30. Although the permeability mu of the heat treatment temperature is too high Fe-based soft magnetic alloy tends to decrease, at least mu ₆₁₀
When / ₇₆₀ is within the above range, the magnetic permeability of the Fe-based soft magnetic alloy does not significantly decrease even if the heat treatment temperature changes in the range of 610 ° C to 760 ° C, and the magnetic permeability of the soft magnetic alloy does not decrease. Has a higher thermal stability. Also, it can be said that a higher crystallization temperature results in a soft magnetic alloy having higher thermal stability and less deterioration of magnetic properties due to heat. The crystallization temperature of the soft magnetic alloy according to the present invention is 525 ° C. or higher, and is excellent in thermal stability.

The Fe-based soft magnetic alloy of the present invention, the average crystal grain size D ₆₁₀ of the crystal grains of Fe bcc structure when heat-treated at 610 ° C., an average crystal grain of Fe in the case of heat treatment at 760 ° C. When the ratio to the crystal grain size D ₇₆₀ is D ₆₁₀ / D ₇₆₀ , 0.8 ≦ D ₆₁₀ / D ₇₆₀ ≦ 1. If the heat treatment temperature is too high, the grain size of the crystal grains precipitated in the structure of the soft magnetic alloy tends to become coarse.
If ₆₁₀ / D ₇₆₀ is in the above range, 610 ° C. to 760 ° C.
Even if the heat treatment temperature is changed in the range, the crystal grains do not become coarse, and the magnetic permeability and the thermal stability of the coercive force of the soft magnetic alloy are increased.

Further, the Fe-based soft magnetic alloy of the present invention
Coercive force Hc ₆₁₀ when the heat treatment is performed at 0 ° C. and 760
The ratio of the coercive force Hc ₇₆₀ when the heat treatment was performed at
When the _{610 / Hc 760, 0.03 ≦ Hc} 610 / Hc 760
≦ 3. Further, when the above ratio is 0.03 ≦ H
It is more preferable that c ₆₁₀ / Hc ₇₆₀ ≦ 2.5. If the heat treatment temperature is too high, the coercive force of the soft magnetic alloy tends to increase, but if at least Hc ₆₁₀ / Hc ₇₆₀ is in the above range, even if the heat treatment temperature changes in the range of 610 ° C. to 760 ° C., The coercive force does not increase significantly, and the thermal stability of the coercive force of the soft magnetic alloy increases. Thereby, the magnetic permeability, the coercive force, the average grain size of the crystal grains, and the thermal stability of the magnetostriction with respect to the change in the heat treatment temperature are further improved, and a soft magnetic alloy having excellent soft magnetic properties can be obtained.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. The Fe-based soft magnetic alloy of the present invention is obtained by quenching a melt of an alloy represented by the following composition formula to be amorphous, and then heat-treating the alloy at a temperature equal to or higher than the crystallization temperature to obtain a bcc having an average crystal grain size of 30 nm or less. It is formed by precipitation of Fe crystal grains having a structure.

(Fe ₁ -aZ _a ) _b B _x M _y M ′ _z where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, Nb , Mo, and W are one or more elements, and M ′ is one or more elements among elements having a mass number of 180 or more, and a, b, x , Y and z are 0 ≦ a ≦
0.2, 75 at% ≦ b ≦ 93 at%, 0.5 at% ≦
x ≦ 18 atomic%, 4 atomic% ≦ y ≦ 9 atomic%, and z ≦ 5 atomic%.

Or (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z X _t where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf , V, Nb, Mo, and W are one or more elements, M ′ is one or two or more elements having a mass number of 180 or more, and X is Si, Al , Ge, and Ga are one or more elements of a, b, x, y,
z and t are 0 ≦ a ≦ 0.2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦ 18 atomic%, and 4 atomic% ≦ y ≦ 9
Atomic%, z ≦ 5 atomic%, 0 atomic% ≦ t ≦ 5 atomic%.

The Fe-based soft magnetic alloy having these compositions has a crystalline phase composed of fine crystal grains mainly composed of Fe having a bcc structure (body-centered cubic structure) having an average crystal grain size of 30 nm or less, and an amorphous phase. And the subject.

In the composition system of the present invention, the main component F
e and the element Z are elements responsible for magnetism and are important for obtaining a high saturation magnetic flux density and excellent soft magnetic properties. If the composition ratio b, which indicates the total amount of Fe and the element Z, exceeds 93% by weight, it is difficult to obtain an amorphous phase even by the liquid quenching method, and as a result, the structure of the alloy obtained after the heat treatment is not good. It is not preferable because it becomes uniform and high magnetic permeability cannot be obtained. On the other hand, when b is less than 75 atomic%, the saturation magnetic flux density decreases, and it becomes impossible to obtain a saturation magnetic flux density (Bs) of 10 kG or more, which is not preferable. Therefore, the range of b is set to 75 atomic% ≦ b ≦ 93 atomic%. A part of Fe is Co or Ni (element Z) for adjusting magnetostriction and the like.
And in this case, preferably 20 of Fe
%, More preferably 5% or less. Outside this range, the magnetic permeability deteriorates. Accordingly, in the above composition formula, the composition ratio a of Co and Ni is preferably in the range of 0 ≦ a ≦ 0.2, and more preferably in the range of 0 ≦ a ≦ 0.05.

B has the effect of increasing the ability of the Fe-based soft magnetic alloy to form an amorphous phase, the effect of preventing the crystal structure from becoming coarse, and the effect of suppressing the formation of a compound phase that adversely affects magnetic properties in the heat treatment step. It is believed that there is.

Zr, Hf, and Nb are considered to hardly form a solid solution with α-Fe. However, by rapidly cooling the alloy to make it amorphous, Zr and Hf or Nb are dissolved in a supersaturated state. The heat treatment performed thereafter adjusts the solid solution amount of these elements to partially crystallize and precipitate as a fine crystal phase, thereby improving the soft magnetic properties of the obtained Fe-based soft magnetic alloy, It has the effect of reducing magnetostriction. Also,
In order to precipitate a fine crystal phase and to suppress the coarsening of the crystal grains of the fine crystal phase, it is considered necessary to leave an amorphous phase that may be an obstacle to crystal grain growth at the grain boundary. . Further, this grain boundary amorphous phase is formed by Mr such as Zr, Hf, and Nb discharged from α-Fe due to an increase in the heat treatment temperature.
Fe-M that degrades soft magnetic properties by dissolving elements
It is considered that the formation of a system compound is suppressed. Therefore, Fe
It is important to add B to a -Zr (Hf, Nb) -based alloy.

If x, which indicates the amount of B added, is less than 0.5 atomic%, the amorphous phase at the grain boundaries becomes unstable, and a sufficient effect of addition cannot be obtained. When x exceeds 18 atomic%, B
In the -M system and the Fe-B system, the tendency of boride formation is increased, heat treatment conditions for obtaining a fine crystal structure are restricted, and good soft magnetic properties cannot be obtained. By appropriately adding the amount of B in this manner, the average crystal grain size of the fine crystal phase to be precipitated can be adjusted to 30 nm or less.

Further, in order to easily obtain an amorphous phase,
It is preferable to include any of Zr, Hf, and Nb, which have a particularly high amorphous forming ability.
It can be replaced with any of Ti, V, and Mo among the A to 6A group elements. Further, among Zr, Hf, and Nb,
Since Hf is a very expensive element, it is more preferable to include either Zr or Nb in consideration of the raw material cost. Such an element M is a relatively slow diffusion species, and the addition of the element M has the effect of reducing the growth rate of fine crystal nuclei,
It is considered to have an ability to form an amorphous phase, and is effective for making the structure finer.

If y, which indicates the amount of the element M, is less than 4 atomic%, the effect of reducing the nucleus growth rate is lost, and the crystal grain size becomes coarse, so that good soft magnetism cannot be obtained. In the case of an Fe-Hf-B alloy, the average crystal grain size at Hf = 5 atomic% is 13n.
In contrast, when Hf = 3 at%, the particle size becomes 39 nm and becomes coarse. If the value of y, which indicates the amount of the element M, exceeds 9 atomic%, the tendency to form MB-based or Fe-M-based compounds increases, and good characteristics cannot be obtained. Becomes brittle, and it is difficult to work into a predetermined shape.

Among them, Nb and Mo have a small absolute value of free energy of oxide formation, are thermally stable, and do not easily form oxide. Therefore, adding these elements and adding Fe
When manufacturing a base soft magnetic alloy, supply the inert gas to the tip of the crucible nozzle used to quench the molten metal instead of the entire atmosphere during the manufacturing, instead of the inert gas atmosphere. Therefore, the manufacturing conditions can be simplified, and the Fe-based soft magnetic alloy can be manufactured at low cost.

The element M 'is an element having a mass number of 180 or more and a relatively heavy mass, so that even if the amorphous alloy is heat-treated, it is difficult to thermally diffuse in the structure. Therefore, in the Fe-based soft magnetic alloy to which the element M ′ is added, even if the heat treatment is performed under the same conditions as the alloy to which the element M ′ is not added, the growth of fine crystal grains is delayed. Therefore, even if the Fe-based soft magnetic alloy to which the element M ′ is added is heat-treated at a temperature higher than the optimum heat-treatment temperature, the crystal growth is difficult to proceed due to the slow grain growth, and the thermal stability is improved. As a result, excellent soft magnetic characteristics are exhibited without a decrease in saturation magnetic flux density and magnetic permeability and without an increase in coercive force and magnetostriction. Among the elements M ', W, Ta, a white metal element, and Au all improve the thermal stability of the soft magnetic alloy, so that at least one or two or more of these elements must be added. Is preferred. In addition, Ru, R
Each element of h, Pd, Os, Ir, and Pt is illustrated. If the composition ratio z of the element M ′ exceeds 5 atomic%, the magnetic permeability decreases significantly when the heat treatment temperature increases, and the soft magnetic characteristics of the Fe-based soft magnetic alloy deteriorate, which is not preferable. The range of the composition ratio z is preferably z ≦ 5 atomic%,
It is more preferably 0.5 atomic% ≦ z ≦ 5 atomic%, still more preferably 1 atomic% ≦ z ≦ 3 atomic%, and still more preferably 1 atomic% ≦ z ≦ 2 atomic%.

In addition, one of Si, Al, Ge, and Ga
It is preferable to contain at least 4 atomic% of a species or two or more elements X. These are known as metalloid elements and form a solid solution in a phase having a body-centered cubic structure (bcc structure) containing Fe as a main component. If the content of these elements exceeds 4 atomic%, the magnetostriction increases, the saturation magnetic flux density decreases,
It is not preferable because the magnetic permeability decreases.

The element X has the effect of increasing the electric resistance of the soft magnetic alloy and reducing iron loss, while Al has a large effect. Ge and Ga have the effect of reducing the size of crystal grains. Therefore, among Si, Al, Ge, and Ga, Al, Ge, and Ga have a particularly large effect.
It is more preferable to add l, Ge, and Ga alone or to add Al and Ge, Al and Ga, Ge and Ga, or Al, Ge, and Ga in combination.

In addition, in the Fe-based soft magnetic alloy having the above composition, even if unavoidable impurities such as H, N, O, and S are contained to such an extent that desired characteristics are not deteriorated, the Fe-based soft magnetic alloy used in the present invention is used. Needless to say, it can be regarded as the same as the composition of the magnetic alloy.

If the composition of the Fe-based soft magnetic alloy of the present invention is as described above, the magnetic permeability, coercive force, average grain size of grains and thermal stability of magnetostriction with respect to changes in the heat treatment temperature are further improved. An Fe-based soft magnetic alloy exhibiting excellent soft magnetic properties can be obtained.

The Fe-based soft magnetic alloy of the present invention is obtained by rapidly cooling an amorphous alloy or a crystalline alloy containing an amorphous phase having the above-mentioned composition from a molten metal, Can usually be obtained by a heat treatment step for forming For the quenching of the molten metal, for example, means such as a so-called liquid quenching method of jetting the molten metal toward a rotating cooling roll to obtain an amorphous ribbon can be used. By performing heat treatment on the amorphous alloy in a predetermined temperature range, a part of the amorphous phase is crystallized, and a structure in which the amorphous phase and fine crystal grains having an average crystal grain size of 30 nm or less are mixed is formed. can get.

The reason why a fine crystal phase structure having an average crystal grain size of 30 nm or less was precipitated by the heat treatment is that a rapidly cooled amorphous alloy or the like is mainly composed of an amorphous material. This is because, at a certain temperature or higher, a fine crystal phase composed of crystal grains having a body-centered cubic structure (bcc structure) containing Fe as a main component and having an average crystal grain size of 30 nm or less is precipitated. The temperature at which the fine crystal phase of Fe having the body-centered cubic structure precipitates is about 480 to 550 ° C., depending on the composition of the alloy.
The soft magnetic alloy of the present invention has a temperature of 525 ° C. or higher and has excellent thermal stability. At a temperature higher than the temperature at which the fine crystal phase of Fe precipitates, a compound phase that deteriorates the soft magnetic properties such as Fe ₃ B or Fe ₃ Zr when Zr is contained in the alloy precipitates. The temperature at which such a compound phase precipitates is about 740 to 810 ° C., depending on the composition of the alloy.
Therefore, in the present invention, the holding temperature at the time of heat treatment of the amorphous alloy ribbon or the like is in the range of 480 ° C. to 810 ° C., and a fine crystal phase mainly composed of Fe having a body-centered cubic structure is preferably precipitated and It is preferably set according to the composition of the alloy so that the compound phase is not precipitated.

The heating rate when the temperature is raised to the heat treatment temperature is preferably in the range of 20 to 200 ° C./min,
More preferably, the temperature is in the range of 200 ° C./min. If the heating rate is low, the production time will be long. Therefore, it is preferable that the heating rate is fast. However, the upper limit is about 200 ° C./min from the viewpoint of the performance of the heating device.

The time for holding the amorphous alloy ribbon or the like at the above holding temperature can be 0 to 60 minutes. Depending on the composition of the alloy, the time is 0 minute, that is, the temperature is lowered immediately after the temperature rise, and the holding time is reduced. Even without it, excellent soft magnetic characteristics can be obtained. Further, if the holding time is longer than 60 minutes, the soft magnetic properties are not improved, and the production time is prolonged and productivity is deteriorated, which is not preferable.

The Fe-based soft magnetic alloy of the present invention has a ratio of the magnetic permeability μ _{610 at} 1 kHz when heat-treated at a heat treatment temperature of 610 ° C. to the magnetic permeability μ _{760 at} 1 kHz at 760 ° C. of μ _610. / Μ ₇₆₀ ,
Those _satisfying 0.1 ≦ μ ₆₁₀ / μ ₇₆₀ ≦ 100 are preferable.
More preferably, the above-mentioned ratio is 0.2 ≦ μ ₆₁₀ / μ ₇₆₀ ≦ 30. When the heat treatment temperature is increased, the crystal grains in the structure are coarsened and the magnetic permeability μ of the Fe-based soft magnetic alloy is reduced. However, if at least μ ₆₁₀ / μ ₇₆₀ is within the above range, the range of 610 ° C. to 760 ° C. even the heat treatment temperature is increased in, since no mu _{7 60} against mu ₆₁₀ is greatly reduced, the thermal stability of the magnetic permeability of the Fe-based soft magnetic alloy is increased. In particular, since the crystallization temperature of the Fe-based soft magnetic alloy of the present invention is 525 ° C. or higher, the thermal stability of the Fe-based soft magnetic alloy is improved, and the soft magnetic properties (permeability, coercive force, etc.) are improved.
Thermal stability is improved.

The Fe-based soft magnetic alloy of the present invention
Fe with bcc structure when heat-treated at a heat treatment temperature of 0 ° C
When the ratio of the average crystal grain size D ₆₁₀ of the crystal grains of D to the average crystal grain size D ₇₆₀ of the Fe crystal grains when heat-treated at 760 ° C. is D ₆₁₀ / D ₇₆₀ , 0.8 ≦ D ₆₁₀ / D ₇₆₀ ≦ 1 is preferred. When the heat treatment temperature is increased, the crystal grains precipitated in the structure of the Fe-based soft magnetic alloy are coarsened and the average grain size is increased. However, if at least D ₆₁₀ / D ₇₆₀ is within the above range, the temperature is 610 ° C. to 760 ° C. even the heat treatment temperature is changed in a range, since no D ₇₆₀ is greatly increased relative to D ₆₁₀ without the magnetic permeability of the soft magnetic alloy is greatly reduced, the thermal stability of the magnetic permeability of the Fe-based soft magnetic alloy The nature becomes high.

Further, the Fe-based soft magnetic alloy of the present invention
Coercive force Hc ₆₁₀ when heat-treated at a temperature of 0 ° C .;
The ratio of the coercive force Hc ₇₆₀ when heat-treated at 0 ° C. to Hc ₆₁₀
/ When the _{Hc 760, ≦ 0.03 ≦ Hc 610} / Hc 760
3 is preferable, and 0.03 ≦ Hc ₆₁₀ / Hc ₇₆₀
It is more preferred that ≦ 2.5. When the heat treatment temperature is increased, the crystal grains precipitated in the structure of the Fe-based soft magnetic alloy become coarse and the coercive force increases, but at least Hc ₆₁₀ / Hc _760.
Is in the above range, even if the heat treatment temperature is changed in the range of 610 ° C. to 760 ° C., Hc ₇₆₀ does not increase significantly with respect to Hc ₆₁₀ , so that the coercive force of the Fe-based soft magnetic alloy Thermal stability increases.

The above-mentioned Fe-based soft magnetic alloy is represented by the following composition formula and is formed by precipitation of Fe crystal grains having a bcc structure with an average crystal grain size of 30 nm or less, and delays the grain growth of the crystal grains. Since the element M ′ to be added is added, even if the heat treatment is performed at a temperature higher than the optimum heat treatment temperature, the crystal grains are hardly coarsened, the saturation magnetic flux density and the magnetic permeability are not reduced, and the coercive force and the magnetostriction are reduced. The thermal stability of the soft magnetic properties of the Fe-based soft magnetic alloy can be increased without increasing. (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, Nb, Mo One or more of these elements, and M ′ has a mass number of 18
One or two or more elements of 0 or more elements, and a, b, x, y, and z indicating the composition ratio are 0 ≦ a ≦ 0.
2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦
18 atomic%, 4 atomic% ≦ y ≦ 9 atomic%, and z ≦ 5 atomic%. Or (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z X _t where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, One or more elements of Nb and Mo, and M ′ has a mass number of 18
X is one or more of zero or more elements, and X is one or two of Si, Al, Ge, and Ga.
A, b, x, y,
z and t are 0 ≦ a ≦ 0.2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦ 18 atomic%, and 4 atomic% ≦ y ≦ 9
Atomic%, z ≦ 5 atomic%, 0 atomic% ≦ t ≦ 5 atomic%.

The above-mentioned Fe-based soft magnetic alloy has a magnetic permeability μ _{610 at} 1 kHz when the heat treatment is performed at 610 ° C.,
The ratio of the magnetic permeability mu _{7 60} at 1kHz when the above heat-treated at 760 ° C. when the _{μ 610 / μ 760, 0.1 ≦} μ
₆₁₀ / μ ₇₆₀ ≦ 100, so that even if the heat treatment temperature changes, the magnetic permeability of the Fe-based soft magnetic alloy does not significantly decrease, and the thermal stability of the magnetic permeability of the Fe-based soft magnetic alloy does not decrease. Can be higher.

The above-mentioned Fe-based soft magnetic alloy is 610
Average of Fe crystal grains with bcc structure when heat treated at ℃
Grain size D₆₁₀And Fe when heat-treated at 760 ° C.
Average grain size D₇₆₀And the ratio to D₆₁₀/ D₇₆₀When
When 0.8 ≦ D₆₁₀/ D ₇₆₀≦ 1
Therefore, even if the heat treatment temperature is increased,
The magnetic permeability decreases significantly without coarsening
Heat of the magnetic permeability and coercive force of Fe-based soft magnetic alloy
Stability can be increased.

The above Fe-based soft magnetic alloy is 610
Coercive force Hc ₆₁₀ when the above heat treatment was performed at 760 ° C.
The in ratio of the coercive force Hc ₇₆₀ upon the heat treatment Hc ₆₁₀
/ When the _{Hc 760, ≦ 0.03 ≦ Hc 610} / Hc 760
Therefore, even if the heat treatment temperature is changed, the coercive force of the Fe-based soft magnetic alloy does not increase significantly, and the thermal stability of the coercive force of the Fe-based soft magnetic alloy can be increased. it can.

[0046]

EXAMPLES (Experimental Example 1) Fe, B, Zr, W, and Ta were weighed and mixed in predetermined amounts as raw materials, and were melted using an arc melting furnace under a reduced-pressure Ar atmosphere to produce an ingot of the composition. did. The ingot was put into a crucible, melted by high-frequency induction heating, and melted was spouted onto a cooling roll (single roll) made of copper rotating under a reduced-pressure Ar atmosphere to quench the Fe _90-x M ′ _x. A quenched ribbon having a composition of Zr ₇ B ₃ (where M ′ = W, Ta and x = 0, 1, 2, 3) was obtained. The obtained quenched ribbon was subjected to crystal structure analysis by X-ray diffraction. The results are shown in FIG. Note that the X-ray diffraction measurement of the quenched ribbon was performed on a surface (roll surface) where the ribbon was in contact with the cooling roll and on a surface (free surface) opposite to the roll surface.

As shown in FIG. 1, Fe _90-x W _x Zr ₇ B ₃
(Where x = 1, 2, 3) X of the quenched ribbon having the composition
In the line diffraction pattern, only a broad halo pattern was observed on any of the free surface and the roll surface, and no diffraction peak indicating the presence of a crystal phase was observed. In general, in the production of a quenched ribbon by single-roll quenching, the free surface side of the quenched ribbon does not directly contact the cooling roll, so that a crystal phase tends to precipitate, but as shown in FIG. And the diffraction pattern on the roll side did not differ greatly. The X-ray diffraction pattern was the same for Fe _90-x W _x Zr ₇ B ₃ (x = 1, 2, 3). Therefore, even if W (element M ') is added to the FeZrB-based alloy, no crystalline phase appears,
It was found that a quenched ribbon having an amorphous phase as a main phase was obtained.

(Experimental example 2) Fe _90-x obtained in Experimental example 1
M ′ _x Zr ₇ B ₃ (where M ′ = W, Ta and x =
0, 1, 2, 3).
Differential scanning calorimetry (DSC) was performed. The results are shown in FIGS. FIG. 2 shows Fe _90-x W _x Zr ₇ B ₃ (where x
= 0, 1, 2, 3) shows the results of DSC measurement of the quenched ribbon. As shown in FIG. 3, an exothermic peak due to crystallization of the amorphous phase is confirmed. The temperature at the rising portion of the exothermic peak indicates the crystallization temperature (T _x ) of each quenched ribbon.
As is apparent from FIG. 2, the crystallization temperature (T _x ) increases with an increase in the amount of W. This is presumed to be due to the fact that the thermal diffusion of W is slow, so that the generation rate of crystal grains is slow, the crystallization energy of the quenched ribbon is increased, and the crystallization temperature (T _x ) is increased. In particular, when W is 1 atomic% or more, the crystallization temperature (T _x ) becomes 527 ° C. or more,
It can be seen that the temperature was higher than 25 ° C. Also, FIG.
e _90-x M ′ _x Zr ₇ B ₃ (where M ′ = W and Ta,
The relationship between the amount of X and the crystallization temperature (T _x ) of a quenched ribbon having a composition of x = 0, 1, 2, 3) is shown. As is clear from FIG. 3, it is found that Ta has a higher crystallization temperature (T _x ) than W. Therefore, it is understood that if Ta is selected as the element M ′, it is possible to increase the crystallization temperature and increase the thermal stability of the Fe-based soft magnetic alloy even if the addition amount of the element M ′ is small. .

(Experimental Example 3) Fe _90-x obtained in Experimental Example 1
A quenched ribbon having a composition of W _x Zr ₇ B ₃ (where x = 0, 1, 2, 3) was heated at a rate of 180 ° C./min, a heat treatment temperature of 610 to 760 ° C., and a holding time of 5 minutes. To form a soft magnetic alloy ribbon. The obtained soft magnetic alloy ribbon was subjected to crystal structure analysis by X-ray diffraction measurement, measurement of average crystal grain size of crystal grains by transmission electron microscope, measurement of magnetic properties, and crystal structure analysis by X-ray diffraction measurement. .
Note that a vibration sample magnetometer (VSM) was used for measuring the magnetic characteristics. X-ray diffraction results are shown in FIGS. 8 to 10 show the measurement results of the average crystal grain size and the magnetic properties.

As shown in FIGS. 4 to 7, Fe _90-x W _x Z
Each quenched ribbon of r ₇ B ₃ (x = 0, 1, 2, 3) was subjected to 610 ° C.
In the X-ray diffraction pattern of the soft magnetic alloy ribbon obtained by heat treatment at ~ 760 ° C, only the diffraction peak of Fe having a bcc structure was confirmed, and fine crystal grains of Fe were found in this soft magnetic alloy ribbon. It was confirmed that they were dispersed and precipitated.

FIG. 8 shows the relationship between the heat treatment temperature of the soft magnetic alloy ribbon, the magnetic properties, and the average crystal grain size. As shown in FIG. 8, the composition of Fe _90-x W _x Zr ₇ B ₃ (x = 2, 3) has a magnetic permeability (μ) and a coercive force (Hc) in the heat treatment temperature range of 610 ° C. to 760 ° C. ) Shows no significant change, indicating that the magnetic permeability (μ) and the thermal stability of the coercive force (Hc) are high. Further, regarding the crystal grain size (D), Fe
The composition of _90-x W _x Zr ₇ B ₃ (x = 1, 2, 3)
In each case, no significant change was observed in the heat treatment temperature range of 610 ° C. to 760 ° C., and no W was added (Fe _90-x W _x
Compared with Zr ₇ B ₃ (x = 0)), the change in D is small, and it can be seen that the coarsening of crystal grains is suppressed by W.

The magnetostriction (λ) is expressed by Fe _90-x W
_{x Zr 7 B 3 (x =} 1,2,3) of the composition of those are all significant change is not observed in the range of heat treatment temperature 610 ° C. to 760 ° C., that of W not added (Fe _90-x W _x Zr ₇ B
₃ (x = 0)), the change in magnetostriction (λ) is small.
This is because when the Fe crystal grains are coarsened, the magnetostriction (λ) of the soft magnetic alloy ribbon changes in the minus direction, but the amorphous phase that changes the magnetostriction (λ) in the plus direction by the addition of W is formed. Since it becomes stable and the coarsening of the Fe crystal grains is suppressed, the crystalline phase and the amorphous phase due to the Fe crystal grains exist in a well-balanced manner, and the change in magnetostriction (λ) is reduced. It is estimated that it has become smaller. According to the results of FIG. 8, the optimum heat treatment temperature of this soft magnetic alloy ribbon is 610 ° C.
~ 710 ° C.

FIGS. 9 and 10 show the W of the soft magnetic alloy ribbon.
The relationship between the amount of (element M ') added, magnetic properties and average crystal grain size is shown. It can be seen that the differences in permeability (μ), average crystal grain size (D), magnetostriction (λ), and coercive force (Hc) due to the heat treatment temperature decreased with an increase in the amount of W added. Therefore, it can be seen that the addition of W improves the thermal stability of the soft magnetic alloy ribbon. In particular, when the W amount exceeds 2 atomic%, the difference between the characteristic values of all the soft magnetic alloy ribbons at the heat treatment temperature of 610 ° C to 760 ° C is extremely small.

Further, Fe _90-x W _x Zr ₇ B ₃ (x = 1,
The W amount (x) in the composition of 2, 3) and the heat treatment temperature 61
The ratio of each characteristic value at 0 ° C. and 760 ° C. (μ ₆₁₀ /
μ _760, D _{61 0} / Table 1 the relation D _760, Hc ₆₁₀ / Hc ₇₆₀
Shown in Note that μ ₆₁₀ / μ ₇₆₀ , D ₆₁₀ / D ₇₆₀ and Hc ₆₁₀
/ Hc ₇₆₀ means that the closer the respective value is to 1.0, the smaller the change in each property (magnetic permeability, average crystal grain size, coercive force) due to the heat treatment temperature, and the thermal stability of the soft magnetic alloy ribbon Is high.

“Table 1” x (atomic%) μ ₆₁₀ / μ ₇₆₀ D ₆₁₀ / D ₇₆₀ Hc ₆₁₀ / Hc ₇₆₀ 0 160 0.609 0.025 1.0 24 1.0 0.03 2.0 1. 25 1.0 0.75 3.0 0.29 1.0 2.5

Μ ₆₁₀ / μ ₇₆₀ is in the range of 0.29 to 24 when x is in the range of 1 to 3 atomic%, and is closer to 1 than in the case where W is not added (x = 0). Has become. D ₆₁₀
For / D ₇₆₀ , x is substantially 1 when x is in the range of 1 to 3 atomic%, and is closer to 1.0 than when W is not added (x = 0). For Hc ₆₁₀ / Hc ₇₆₀ , 0.09 to 5.0 when x is in the range of 1 to 3 atomic%.
Hc ₆₁₀ / Hc ₇₆₀ increases with an increase in x, and is closest to 1.0 when x is 2 atomic%.

[0057]

The Fe-based soft magnetic alloy of the present invention is represented by the following composition formula, and has a bcc having an average grain size of 30 nm or less.
It is formed by precipitation of Fe crystal grains having a structure, and an element M ′ that delays the grain growth of the crystal grains is added, so that the crystal grains are coarsened even when heat-treated at a temperature higher than the optimal heat treatment temperature. And the thermal stability of the soft magnetic properties of the Fe-based soft magnetic alloy can be increased without reducing the saturation magnetic flux density and magnetic permeability and without increasing the coercive force and magnetostriction. (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, Nb, Mo One or more of these elements, and M ′ has a mass number of 18
One or two or more elements of 0 or more elements, and a, b, x, y, and z indicating the composition ratio are 0 ≦ a ≦ 0.
2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦
18 atomic%, 4 atomic% ≦ y ≦ 9 atomic%, and z ≦ 5 atomic%. Or (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z X _t where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, One or more elements of Nb and Mo, and M ′ has a mass number of 18
X is one or more of zero or more elements, and X is one or two of Si, Al, Ge, and Ga.
A, b, x, y,
z and t are 0 ≦ a ≦ 0.2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦ 18 atomic%, and 4 atomic% ≦ y ≦ 9
Atomic%, z ≦ 5 atomic%, 0 atomic% ≦ t ≦ 5 atomic%.

The Fe-based soft magnetic alloy of the present invention has a magnetic permeability μ at 1 kHz after the heat treatment at 610 ° C.
And _610, when the ratio of the magnetic permeability mu ₇₆₀ in 1kHz when the above heat-treated at 760 ° C. and mu ₆₁₀ / mu _760,
Since 0.1 ≦ μ ₆₁₀ / μ ₇₆₀ ≦ 100,
Even if the heat treatment temperature changes, the magnetic permeability of the Fe-based soft magnetic alloy does not significantly decrease, and the thermal stability of the magnetic permeability of the Fe-based soft magnetic alloy can be increased.

The Fe-based soft magnetic alloy of the present invention
The average crystal grain size D ₆₁₀ of the crystal grains of the bcc structure Fe when heat-treated at 0 ° C. and F
The ratio of the crystal grain of e to the average grain size D ₇₆₀ is D ₆₁₀ / D _760.
In this case, since 0.8 ≦ D ₆₁₀ / D ₇₆₀ ≦ 1, even if the heat treatment temperature is increased, the crystal grains are not largely coarsened, and the magnetic permeability and the coercive force are greatly increased. Therefore, the thermal stability of the magnetic permeability and coercive force of the Fe-based soft magnetic alloy can be increased.

The Fe-based soft magnetic alloy of the present invention
Coercive force Hc ₆₁₀ when the heat treatment is performed at 0 ° C. and 760
The ratio of the coercive force Hc ₇₆₀ when the heat treatment was performed at
When the _{610 / Hc 760, 0.03 ≦ Hc} 610 / Hc 760
≦ 3, so that even if the heat treatment temperature changes, the coercive force of the Fe-based soft magnetic alloy does not increase significantly and the thermal stability of the coercive force of the Fe-based soft magnetic alloy is increased. Can be.

[Brief description of the drawings]

FIG. 1 is a diagram showing an X-ray diffraction pattern of a quenched ribbon having a composition of Fe _90-x W _x Zr ₇ B ₃ (x = 1, 2, 3).

FIG. 2. Fe _90-x W _x Zr ₇ B ₃ (x = 0, 1, 2,
It is a figure which shows the result of DS measurement of the quenched ribbon of 3).

FIG. 3 shows Fe _90-x M ′ _x Zr ₇ B ₃ (M ′ = W, Ta,
It is a diagram showing a relationship between x = 0, 1, 2, 3) comprising the x value of the melt spun ribbon of the composition and the crystallization temperature (T _x).

FIG. 4: Fe _90-x W _x Zr ₇ B ₃ (x = 0, 1, 2,
It is a figure which shows the X-ray-diffraction pattern of the soft magnetic alloy ribbon obtained by heat-treating each quenched ribbon of 3) at 610 degreeC.

FIG. 5: Fe _90-x W _x Zr ₇ B ₃ (x = 0, 1, 2,
It is a figure which shows the X-ray-diffraction pattern of the soft magnetic alloy ribbon obtained by heat-treating each quenched ribbon of 3) at 660 degreeC.

FIG. 6: Fe _90-x W _x Zr ₇ B ₃ (x = 0, 1, 2,
It is a figure which shows the X-ray-diffraction pattern of the soft-magnetic-alloy ribbon obtained by heat-processing each quenched ribbon of 3) at 71O <0> C.

FIG. 7: Fe _90-x W _x Zr ₇ B ₃ (x = 0, 1, 2,
It is a figure which shows the X-ray-diffraction pattern of the soft magnetic alloy ribbon obtained by heat-processing each quenched ribbon of 3) at 760 degreeC.

FIG. 8 shows a heat treatment temperature (T), a magnetic permeability (μ), a coercive force (Hc), and an average of a soft magnetic alloy ribbon having a composition of Fe _90-x W _x Zr ₇ B ₃ (x = 2, 3). It is a figure which shows the relationship between a crystal grain size (D) and magnetostriction ((lambda)).

FIG. 9 shows an x value indicating a W amount of a soft magnetic alloy ribbon having a composition of Fe _90-x W _x Zr ₇ B ₃ (x = 2, 3), a magnetic permeability (μ), and an average crystal grain size (D FIG. 7 is a diagram showing a relationship between the relationship between the skew angle and the magnetostriction (λ).

FIG. 10 shows an x value indicating a W amount of a soft magnetic alloy ribbon having a composition of Fe _90-x W _x Zr ₇ B ₃ (x = 2, 3), and a saturation magnetic flux density (Bs) and a coercive force (Hc). FIG.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kinshiro Takadate 1-7 Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akinobu Kojima 1-7 Yukitani-Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihiro Makino 1-7, Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihisa Inoue 35 Kawachimoto Hasekura, Aoba-ku, Sendai, Miyagi Housing 11-806 (72) Inventor Ken Masumoto 3-8-22 Uesugi, Aoba-ku, Sendai, Miyagi Prefecture

Claims (10)

[Claims] 1. A melt of an alloy represented by the following composition formula is quenched to be amorphous, and then heat-treated at a temperature equal to or higher than a crystallization temperature to obtain a bcc-structure Fe crystal having an average crystal grain size of 30 nm or less. F, characterized in that grains are precipitated
e-based soft magnetic alloy. (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, Nb, Mo One or more of these elements, and M ′ has a mass number of 18
One or two or more elements of 0 or more elements, and a, b, x, y, and z indicating the composition ratio are 0 ≦ a ≦ 0.
2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦
18 atomic%, 4 atomic% ≦ y ≦ 9 atomic%, and z ≦ 5 atomic%. 2. A melt of an alloy represented by the following composition formula is quenched to be amorphous, and then heat-treated at a temperature equal to or higher than the crystallization temperature to obtain a bcc-structure Fe crystal having an average crystal grain size of 30 nm or less. F, characterized in that grains are precipitated
e-based soft magnetic alloy. (Fe ₁ -aZ _a ) _b B _x M _y M ′ _z X _t where Z is one or two elements of Co and Ni, and M is Ti, Zr, Hf, V, Nb, Mo is one or more elements, and M ′ has a mass number of 18
X is one or more of zero or more elements, and X is one or two of Si, Al, Ge, and Ga.
A, b, x, y,
z and t are 0 ≦ a ≦ 0.2, 75 atomic% ≦ b ≦ 93 atomic%, 0.5 atomic% ≦ x ≦ 18 atomic%, and 4 atomic% ≦ y ≦ 9
Atomic%, z ≦ 5 atomic%, 0 atomic% ≦ t ≦ 5 atomic%. 3. M ′ is W, Ta, a white metal element, Au
The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy is at least one element selected from the group consisting of: 4. The Fe-based soft magnetic alloy according to claim 1, wherein M includes at least one of Zr and Nb. 5. 1 kHz when the heat treatment is performed at 610 ° C.
Permeability μ at z ₆₁₀And heat-treated at 760 ° C.
Magnetic permeability μ at 1 kHz₇₆₀And the ratio to μ₆₁₀/ Μ
₇₆₀0.1 ≦ μ₆₁₀/ Μ₇₆₀≦ 100
5. The Fe group according to claim 1, wherein:
Soft magnetic alloy. 6. The Fe-based soft magnetic alloy according to claim 1, wherein the crystallization temperature is 525 ° C. or higher. 7. The b when the heat treatment is performed at 610 ° C.
The average crystal grain size D ₆₁₀ of Fe crystal grains having a cc structure is 76
0 When the ratio of the bcc average crystal grain size D ₇₆₀ crystal grains of the Fe in the structure when the heat treatment at ℃ was D ₆₁₀ / D _760, it is _{0.8 ≦ D 610 / D 760 ≦} 1 The Fe-based soft magnetic alloy according to claim 1, wherein: 8. The coercive force Hc ₆₁₀ at the time of the heat treatment at 610 ° C. and the coercive force Hc at the time of the heat treatment at 760 ° C.
When the ratio to c ₇₆₀ is Hc ₆₁₀ / Hc ₇₆₀ , 0.03
8. The Fe-based soft magnetic alloy according to claim 1, wherein ≦ Hc ₆₁₀ / Hc ₇₆₀ ≦ 3. 9. z representing the composition ratio of the composition formula is 0.5
2. The method according to claim 1, wherein atomic% ≦ z ≦ 5 atomic%.
The Fe-based soft magnetic alloy according to claim 2. 10. The method according to claim 1, wherein z representing the composition ratio of the composition formula is 1 atomic% ≦ z ≦ 3 atomic%.
10. The Fe-based soft magnetic alloy according to any one of items 2 and 9.