KR101905412B1 - Soft magnetic alloy, method for manufacturing thereof and magnetic materials comprising the same - Google Patents

Abstract

A soft magnetic alloy is provided. The soft magnetic alloy according to one embodiment of the present invention is represented by the empirical formula X _a B _b C _c Cu _d where X is at least one element selected from Fe, Co, and Ni, and a, b, c, d is atomic percent of the element in the alloy, and 78.5? a? 86.0, 13.5? b + c? 21, and 0.5? d? 1.5. According to the present invention, it is very easy to develop into a compact / lightweight component having high saturation magnetic flux density, excellent high frequency characteristics and low coercive force, high performance / high efficiency, low magnetostriction and excellent high frequency characteristics. In addition, since the manufacturing cost is relatively low and the components contained in the alloy are easily controlled in the manufacturing process of the alloy, the production of the alloy is easy and mass production is possible. Therefore, the high power laser, high frequency power supply, high speed pulse generator, High frequency filter, low loss high frequency transformer, high speed switch, wireless charging, and the like.

Description

TECHNICAL FIELD [0001] The present invention relates to a soft magnetic alloy, a method of manufacturing the same, and a magnetic part using the soft magnetic alloy,

More particularly, the present invention relates to a soft magnetic alloy which has a high saturation magnetic flux density and is suitable for implementation as a small and lightweight component, has a low magnetic loss and exhibits excellent magnetic performance, To an improved soft magnetic alloy, a method of manufacturing the same, and a magnetic component therefrom.

Soft magnetic materials are magnetic materials for various kinds of transformers, choke coils, various sensors, saturable reactors, magnetic switches and so on. They are used for various electric and electronic devices . Market demands for such electric and electronic devices are small and lightweight, high performance / high efficiency, and low product price. To meet this market demand, soft magnetic materials for magnetic cores should have high saturation flux density and low magnetic loss. Specifically, the output of the magnet core type voltage (E) = the magnetic flux density (B _m) × 4.44 frequency (f) × number of turns (N) × may be calculated by the magnetic core cross-sectional area (S), in order to increase the voltage (E) Each factor should be high. Of these factors, magnetic flux density (Bm) and frequency (f) depend on the magnetic material of the magnetic core. To increase the magnetic flux density, a material having a high saturation magnetic flux density and a low magnetic loss is required. The magnetic loss is calculated as the sum of hysteresis loss, eddy current loss and anomaly loss. In the case of the eddy current loss and the anomaly loss, it depends on the size of the magnetic core of the magnetic core material, the resistivity and the thickness of the magnetic core, The higher the thickness of the magnetic core, the better the magnetic loss. Further, in order to increase the frequency, the high frequency loss of the magnetic material should be small. However, since a circuit approach is required to raise the frequency f, there is a limit to the material approach.

On the other hand, an amorphous alloy containing Fe, which is known as a commercially available magnetic material having a high saturation magnetic flux density and a low loss at the same time, does not have crystal grains and therefore has no magnetocrystalline anisotropy and a low hysteresis loss And exhibits excellent soft magnetic properties, amorphous alloys containing Fe are attracting attention as energy saving materials.

The amorphous alloy is an element which forms an alloy. In addition to the transition metal such as Fe, a transition metal such as Si, B, and P which enhances the amorphous forming ability and a quasi- metal such as Cu, Nb, or Zr element serving as a diffusion barrier and / (metalloid). However, there is a problem that the saturation magnetic flux density of the alloy is lowered when the content of the metalloid is increased, and when the content of the metalloid is decreased, the amorphous state is not formed or the post- The magnitude of the crystal becomes remarkably large, and the coercive force and magnetic loss may increase. In addition, other problems may occur due to the inclusion of the metalloid element. Specifically, the soft amorphous alloy containing the element P, which is known to improve the amorphous forming ability, is difficult to handle as it is easily volatilized in the post- It is very difficult to carry out the post-treatment while suppressing the yield, and the productivity of the alloy is remarkably lowered in the post-process, which may be very disadvantageous to mass production. When the element B, which is known to have an amorphous forming ability, is included, the gap between the primary crystallization temperature and the secondary crystallization temperature of the produced alloy becomes very narrow, so that the post- There is a problem that the intermetallic compound (Ex. Fe-B) is generated and it is difficult to obtain crystals of a homogeneous transition metal. In addition, when a rare metal such as Nb is added, there is a problem that the production cost is remarkably increased as the unit price of the element is high, although it is advantageous in controlling the grain size control in the subsequent step.

KR 1988-0073499A

Disclosure of the Invention The present invention has been made in view of the above circumstances and provides a soft magnetic alloy having a high saturation magnetic flux density, a low magnetostriction, an excellent high frequency characteristic and a low coercive force, And to provide the above objects.

It is another object of the present invention to provide a soft magnetic alloy capable of exhibiting a high level of magnetic properties as a crystal phase is controlled, even though it does not contain a high-priced component such as a rare earth element.

Further, the present invention provides a method for producing a soft magnetic alloy which can easily produce an alloy by easily controlling the components of the alloy in the manufacturing process, and can exhibit the same or higher magnetic properties to be exhibited in spite of being mass- There is another purpose in providing.

It is another object of the present invention to provide magnetic parts of various electric and electronic devices including a soft magnetic alloy according to the present invention which can excellently perform energy supply and conversion functions.

In order to solve the above-mentioned problem, it is represented by the empirical formula X _a B _b C _c Cu _d ,

In the empirical formula, X includes at least one element selected from the group consisting of Fe, Co, and Ni, and a, b, c, and d are atomic percentages of the corresponding element in the alloy. 78.5? A? 86.0, c? 21, 0.5? d? 1.5.

According to an embodiment of the present invention, a is 82 to 86 at% in the empirical formula, b and c are in the range of 13.5 to 17.5 at%, and the value according to the following formula 1 may be 0.38 to 28.5. More preferably, the value according to the following formula (1) may be 0.65 to 16.1.

[Equation 1]

In the empirical formula, a and d may have a value according to the following equation (2): 2.92 to 3.70.

&Quot; (2) "

In the empirical formula, c may be 1.0 to 4.0 at%.

According to another embodiment of the present invention, in the empirical formula, a is less than 78.5 to less than 82.0 at%, b and c are more than 16.5 at% to 21 at%, and the value of the following equation , And more preferably 0.85 to 200.

&Quot; (3) "

Also, in the empirical formula, the values of a and d may be 8.3 to 12.8.

&Quot; (4) "

Further, X may be represented by Fe _m Co _n , m and n may be at% (atomic percent) of the corresponding element in X, 49 m 95, and 5 n 51, m and n may be 64? m? 92 and 8? n? 36. Further, the crystallized area value according to the following relational expression 1 may be 50 to 78%.

[Relation 1]

Here, the area refers to an integrated value of the crystalline region or the amorphous region measured by X-ray diffraction (XRD) analysis at 0 to 90 ° angle (2?) With respect to the soft magnetic alloy.

Alternatively, X may be represented by Fe _p Ni _q , p and q may be at% (atomic percent) of the corresponding element in X, and 70? P? 99 and 1? Q? More preferably, p and q may be 78? P? 99 and 1? Q? 22. In addition, the crystallized area value according to the relational expression 1 may be 50 to 70%.

Also, the present invention is represented by the empirical formula X _a B _b C _c Cu _d where X is at least one element selected from the group consisting of Fe, Co, and Ni, and a, b, c, The atomic percent of the element is 78.5? A? 86.0, 13.5? B + c? 21, and 0.5? D? 1.5. And heat treating the soft magnetic initial alloy. The present invention also provides a method of manufacturing a soft magnetic alloy.

According to an embodiment of the present invention, the heat treatment may be performed at a heat treatment temperature of 200 to 410 캜 for 40 to 100 seconds, and more preferably at a heat treatment temperature of 280 to 410 캜.

Further, the heat treatment can be performed at a heating rate of 90 ° C / min or less up to the predetermined heat treatment temperature, and more preferably at a heating rate of 28 to 90 ° C / min.

The present invention also provides an electromagnetic wave shielding member comprising the soft magnetic alloy according to the present invention.

The present invention also provides a magnetic core comprising the soft magnetic alloy according to the present invention.

The present invention also relates to a magnetic core according to the present invention; And a coil part wound around the outside of the magnetic core.

Hereinafter, terms used in the present invention will be described.

As used herein, the term "initial alloy" refers to an alloy in which a process such as heat treatment is not performed for the purpose of changing the properties of the alloy produced.

As used in the present invention, "high frequency" means a frequency band of several tens of kHz to several tens of MHz.

According to the present invention, the soft magnetic alloy has a high saturation magnetic flux density, excellent high-frequency characteristics, low magnetostriction and low coercive force and is very easy to develop into a compact / lightweight component with high performance / high efficiency. Since the soft magnetic alloy does not use the expensive raw materials such as the rare earth element, the manufacturing cost is low, but the components contained in the normal alloy can be controlled so as not to be volatilized, It can be widely applied as a magnetic part of electric and electronic devices such as a power supply, a high-speed pulse generator, an SMPS, a high-frequency filter, a low-loss high-frequency transformer, a high-speed switch and a wireless charging.

FIGS. 1A to 1D are graphs showing XRD patterns of an initial alloy before heat treatment of a soft magnetic alloy prepared by varying the contents of Fe and Co as soft magnetic alloys according to various embodiments of the present invention,
Figures 2a-2d show XRD patterns of the soft magnetic alloy heat treated for the initial alloys of Figures 1a-1d,
FIGS. 3A to 3D are graphs showing XRD patterns of initial alloys before heat treatment of soft magnetic alloys prepared by varying the contents of Fe and Ni as soft magnetic alloys according to various embodiments of the present invention,
Figs. 4A-4C show XRD patterns of the soft magnetic alloy heat treated for the initial alloys of Figs. 1A-1C,
Figures 5A-D are VSM graphs for the initial alloys of Figures 1A-1D,
6a-6d are VSM graphs of the soft magnetic alloy heat treated for the initial alloys of Figs. 1a-1d,
Figures 7a-7d are VSM graphs for the initial alloys of Figures 3a-3d, and
Figures 8A-8C are VSM graphs of the soft magnetic alloy heat treated for the initial alloys of Figures 7A-7C.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein.

The soft magnetic alloy according to the present invention is an alloy represented by the following formula X _a B _b C _c Cu _d where a, b, c, and d are atomic percentages of the corresponding element in the alloy, , 13.5? B + c? 21, and 0.5? D? 1.5.

X includes one or more elements of Co and Ni and Fe. These elements are the main element of the alloy for expressing magnetism and X is contained in the alloy at 78.5at% or more for the purpose of improving the saturation magnetic flux density. If X is less than 78.5at%, the desired level of saturation flux density may not be achieved. Also, X is included in the alloy at 86at% or less, and if X is contained in excess of 86.0at% in the alloy, it may be difficult to prepare the crystalline phase of the initial alloy at the time of liquid quenching for the initial alloy, The generated crystals interfere with uniform crystal growth in a heat treatment process for changing characteristics, and the magnetic loss may increase due to an increase in the coercive force as the size of generated crystals excessively increases.

In the soft magnetic alloy according to an embodiment of the present invention, X may be expressed as Fe _m Co _n , where m and n are at% (atomic percent) of the corresponding element in X, 5? N? 51, and more preferably 64? M? 92 and 8? N? 36. That is, when Co is included as an element for expressing magnetism together with Fe in Co and Ni, the softness and corrosion resistance of the alloy to be produced can be improved at the same time, high frequency characteristics can be improved in a frequency band of 100 MHz or less, Distortion can be reduced, mechanical vibration or noise caused thereby can be reduced, and eddy current generation can be reduced. Further, it is easier to form an amorphous alloy together with the elements B, C, and Cu to produce a nanocrystalline alloy having a uniform particle size, to realize a saturation magnetic flux density at a desired level, and to reduce iron loss through low coercive force There is an advantage to be able to. If the m in X is less than 50 at%, the desired level of saturation magnetic flux density may not be achieved, and the content of Co may increase the production cost or increase the coercive force. If the m in X is more than 95 at%, the magnetism of the alloy may increase to increase vibration and noise, and the high-frequency characteristics may be deteriorated, and heat generation due to eddy current may be a problem.

In another embodiment of the present invention, X is represented by Fe _p Ni _q , p and q are at% (atomic percent) of the corresponding element in X, and 70? P? 99 and 1? Q? More preferably 78? P? 99, and 1? Q? 22. That is, Ni is included as an element for expressing magnetic properties together with Fe, thereby lowering the coercive force of the soft magnetic alloy to thereby reduce the magnetic loss, thereby exhibiting excellent magnetic properties and preventing oxidation of Fe .

If the p in X is less than 72 at%, the coercive force may be lowered, but the desired level of saturation magnetic flux density may not be realized. When the p in X is more than 99 at%, the effect of reducing the coercive force of the alloy through Ni may be insignificant.

Next, in the above empirical formula, B and C are amorphous forming elements. Through these elements, the initial alloy can be formed into an amorphous phase. In addition, the element C is combined with the element B, so that the particle size of the produced α-Fe, FeCo, and FeNi crystals can be easily controlled to a desired level compared with the case where only the element B is included, thereby improving the thermal stability of the initial alloy FeCo and FeNi crystals at the time of heat treatment. If the sum of element B and element C is less than 13.5 at% in the alloy, the initial alloy produced may be crystalline, and the crystals in the initial alloy make it difficult to uniformly grow the crystals produced during the heat treatment for the change in magnetic properties, Crystals with coarse grain size may be included, which may lead to an increase in magnetic loss. Further, when the sum of the C element and the B element in the alloy is more than 21 at%, the content of Cu element to be described later must be further increased to prepare the alloy of nanocrystalline after the heat treatment, The content of the element may be further lowered and thus the desired level of saturation magnetic flux density may not be realized. Further, in addition to the α-Fe, FeCo and FeNi crystals, it is easy to form a compound with B and / or C with any element belonging to X, and magnetic properties such as saturation magnetic flux density can be decreased as the amount of the compound formed increases

Next, in the empirical formula, Cu is an element serving as a nucleation site capable of generating α-Fe, FeCo, and FeNi crystals in an alloy, so that an initial alloy of an amorphous phase is easily realized as a nanocrystalline alloy. The Cu element is an amorphous crystalline phase of the initial alloy, and the crystal produced after the heat treatment is a nanocrystalline grains. The Cu element is contained in an amount of 0.5 to 1.5 at% in the alloy for the purpose of remarkably expressing the desired physical properties, at%. If the Cu element is contained less than 0.5 at% in the alloy, the resistivity of the alloy to be produced may be greatly reduced, resulting in a large magnetic loss due to eddy currents, and the formation of α-Fe nanocrystals at the desired level in the heat- And the grain size control of the generated crystal may not be easy when crystals are generated. In addition, if the Cu element is contained in an amount exceeding 1.5 at% in the alloy, the crystalline phase of the prepared initial alloy may be crystalline, and crystals already produced in the initial alloy may cause the grain size of crystals produced during the heat treatment to be uneven, Crystals grown to a level greater than the level may be included in the alloy, which may result in an inability to exhibit the desired level of magnetic properties, such as increased magnetic loss. In addition, as the content of the above-mentioned X, B and C elements is relatively decreased, the effect due to the element can be reduced.

On the other hand, the composition of the soft magnetic alloy according to the present invention does not include Si elements generally included in conventional soft magnetic alloys. The Si element improves the amorphous forming ability of the soft magnetic alloy and also helps to equalize grain sizes of the produced? -Fe, FeCo and FeNi crystals. However, when the Si is contained in the alloy, there is a problem that the content of quasi metals, for example, B, C, and Cu, or the content of X, including Fe, must be reduced, and the decrease in the content of X is caused by a high saturation magnetic flux density Of the soft magnetic alloy. Accordingly, the soft magnetic alloy of the present invention does not contain Si but implements a high saturation density by increasing the content of X element including Fe. However, since the Si element is not included, it is very difficult to control the grain size of the crystal in the alloy The disadvantage that the production of an alloy having a uniform particle diameter is not very easy is also present at the same time. In order to solve such a disadvantage, the present invention can produce an Fe-C compound at an appropriate level during the heat treatment of an initial alloy produced by appropriately adjusting the element B and element C according to the content of iron in the alloy, The grain size control of? -Fe, FeCo and FeNi crystals can be achieved at a desired level even though Si elements are not included.

However, in the above empirical formula, the relationship between the sum of contents of b and c may be different from the sum of contents of b and c in the case where a is 82at%, that is, the content of X including Fe in the alloy. , The sum of b and c may be 13.5 to 17.5 at%, and the value according to the following equation (1) may be 0.38 to 28.5. In the empirical formula, when a is less than 82 at%, that is, a is less than 78.5 to 82.0 at%, the sum of b and c is more than 16.5 at% to 21 at%, and the value of the following formula 3 may be 0.67 or more.

First, in the above empirical formula, when a is 82 to 86at%, if a is 82 to 86at%, if the sum of b and c exceeds 17.5at%, the value of d, which is the content of Cu, Even if the prepared initial alloy is made into an amorphous phase, there is a fear that the produced initial alloy has a small particle diameter and hardly produces uniform crystals upon heat treatment, and thus the magnetic loss of the produced soft magnetic alloy may become large.

In addition, when a is 82 to 86 at%, b and c may have a sum of 13.5 to 17.5 at% and a value according to the following formula 1 may be 0.38 to 28.5, The content of intermetallic compounds formed between at least one of the elements belonging to? -Fe, FeCo and FeNi crystals and X in the crystal in the alloy produced after heat treatment and the element of at least one of B, C and Cu is suitably It is possible to exhibit a high saturation magnetic flux density and a low magnetic loss such as a coercive force to exhibit a high efficiency magnetic property and to exhibit an excellent magnetic property at a high frequency.

[Equation 1]

If the value according to Equation (1) is less than 0.38, the crystalline phase of the prepared initial alloy may be crystalline, and in this case, a coarse crystal can easily be formed during the heat treatment, and the magnetic loss may become large. There is an increasing concern. Further, even if the initial alloy is not crystalline, the magnetic properties may be lowered as the amount of an element belonging to X and an intermetallic compound in C among the crystals produced after the heat treatment becomes excessively large. If the value according to Equation 1 exceeds 28.5, the thermal stability of the initial alloy is lowered as the content of C is relatively decreased as compared with the content of B in the alloy, and α-Fe, FeCo and / or FeNi The formation of an element belonging to X and an intermetallic compound of B may be remarkably increased, so that the control of the heat treatment process may be very difficult, and the saturation magnetic flux density of the initial alloy or the alloy after the heat treatment may decrease, And it may be difficult to control the particle size of the produced? -Fe, FeCo and / or FeNi crystals to a desired level, so that a magnetic material including crystals having a uniform particle size may not be produced .

The value according to Equation 1 may be more preferably 0.65 to 16.1. If the value according to Equation 1 is less than 0.65, it may be impossible to form an amorphous phase, which may result in loss of characteristics of the soft magnetic material. have.

Also, when the value according to Equation 1 exceeds 16.1, it may be difficult to produce the initial alloy as an amorphous phase, and even when the initial alloy is realized as an amorphous phase, crystals produced after the heat treatment can be coarsened, You can lose traits.

Further, when a is 82 to 86 at%, the C element may be contained in an amount of 1 to 4 at% in the alloy. If the C element is contained in an amount of 1 at% or less in the alloy, it is difficult to produce the initial alloy as an amorphous phase. If the element B is increased, the secondary stability of the initial alloy may be lowered. In addition, it is difficult to control the particle size of the? -Fe crystal produced during the heat treatment of the prepared initial alloy, and it may not be possible to produce a magnetic material having α-Fe, FeCo and / or FeNi crystals having a uniform particle size. Also, if the C element is contained in an amount exceeding 4 at%, the content of B relatively decreases, so that α-Fe, FeCo and / or FeNi crystals having a particle diameter of 30 nm or more in the initial alloy can be produced. The same initial alloy crystals have a problem that it is difficult to control the particle size of? -Fe, FeCo and / or FeNi crystals in a heat treatment process. In addition, an intermetallic compound between an element belonging to X and an element belonging to X in the initial alloy may be generated, so that the amount of the alloy of? -Fe, FeCo and / or FeNi crystals produced during the heat treatment may be smaller than the desired level. In addition, since the coercive force is increased and the magnetic loss is large, the desired level of magnetic properties can not be expressed, so that it may be difficult to apply the material as a miniaturized magnetic material.

Also, when a is 82 to 86 at%, the values a and d in the empirical formula may be 2.92 to 3.70 according to the following formula (2), whereby the initial alloy may be an amorphous phase, It is advantageous for the crystal to be a nanocrystal and to have a uniform particle size distribution. If the value according to the following formula (2) is less than 2.92, crystals are generated in the initial alloy, and it becomes difficult to obtain a uniform grain size determination after the heat treatment. Coarse crystals can be produced, And can not express the desired level of magnetic properties. If the value according to the following formula (2) is more than 3.70, the resistivity of the alloy to be produced may be greatly reduced and the magnetic loss due to the eddy current may become large, and the α-Fe, FeCo and / or The nanocrystal of the FeNi crystal is not produced, and when the crystal is generated, the control of the grain size of the generated crystal may not be easy.

&Quot; (2) "

Next, the case where a is less than 78.5 to 82.0 at% in the empirical formula will be described. When a is less than 78.5 to less than 82.0at%, the sum of b and c may be greater than 16.5at% to 21at%. If the sum of b and c is less than 16.5at%, the initial alloy may be crystalline, The crystals that have already been produced can cause the grain size of the crystals produced during the heat treatment to be uneven, and crystals grown to the desired level or larger can be included in the alloy, thereby exhibiting the desired level of magnetic properties I can not. In addition, as the content of the above-mentioned X, B and C elements is relatively decreased, the effect due to the element can be reduced.

The value of the following equation (3) may be 0.67 or more, more preferably 0.85 to 200, and it may be advantageous for the initial alloy produced through the heat treatment to be amorphous, the grain size after the heat treatment to be uniform, The content of Fe, FeCo and / or FeNi crystals and the content of any element belonging to X and the content of the intermetallic compound can be appropriately maintained, so that it is possible to exhibit excellent magnetic properties through low coercive force even if the content of X is somewhat low.

&Quot; (3) "

If the value of Equation (3) is less than 0.67, the content of an element belonging to X in the initial alloy or the alloy after the heat treatment may increase rapidly, and it may be difficult to produce a crystal having a uniform particle size distribution after the heat treatment Which may result in a decrease in the saturation magnetic flux density and / or an increase in the coercive force, thereby deteriorating the magnetic characteristics. However, if the value of Equation (3) exceeds 200, the thermal stability of the initial alloy is lowered so that the generation of an intermetallic compound between B and an element belonging to X other than? -Fe, FeCo and / There is a problem that the control of the heat treatment process may be very difficult and the saturation magnetic flux density of the initial alloy or the alloy after the heat treatment may be decreased or the magnetic loss may be increased. Is not easy to control to the desired level and thus it may be difficult to produce an? -Fe crystal having a uniform grain size.

Also, when a is less than 78.5 to 82.0 at%, the values of a and d in the empirical formula may be 8.3 to 12.8. As a result, the initial alloy may be an amorphous phase, and the crystals produced after the heat treatment of the initial alloy are advantageous to have nanocrystalline and uniform particle size distribution. If the value according to Equation (4) is less than 8.3, crystals may be generated in the initial alloy, and it is difficult to obtain a uniform grain size determination after the heat treatment, and coarsened crystals may be produced, May not be able to manifest the desired level of magnetic properties, for example, increase in thickness. Also, when the value according to Equation (4) is more than 12.8, even if the prepared initial alloy is made into an amorphous phase, the resistivity of the alloy to be produced may be greatly reduced, so that the magnetic loss due to the eddy current may become large. It is difficult to control the grain size of the produced crystals when the crystals are generated, and it is difficult to produce uniform crystals because the particle diameter is small. There is a concern that the magnetic loss of the soft magnetic alloy may become large.

&Quot; (4) "

The soft magnetic alloy according to one embodiment of the present invention may be amorphous or crystalline in crystalline phase, or may have a heterogeneous atomic arrangement including both amorphous and crystalline regions.

At this time, the soft magnetic alloy having the amorphous phase may be an initial alloy which is not heat-treated. Further, the soft magnetic alloy having the crystalline phase may be an alloy after heat-treating the initial alloy, and the crystalline phase may be a nanocrystal, and the average grain size of the nanocrystalline grains is 30 nm or less, preferably 27 nm or less Preferably from 18 to 27 nm. In addition, the heterogeneous atomic arrangement may be an initial alloy or a structure of an alloy after heat treatment. At this time, when the hetero atom array structure is in the initial alloy state, the crystalline compound may have a fine particle size with an average particle diameter of 10 nm or less. When the heterogeneous atomic arrangement is annealed, the crystalline phase may be nanocrystalline. The average grain size of the nanocrystalline grains is 30 nm or less, preferably 27 nm or less, more preferably 18 to 27 nm .

The shape of the soft magnetic alloy may be powder, strip, or ribbon before heat treatment, but may be suitably modified in consideration of the shape of the final magnetic material, the heat treatment process, and the like. In addition, the soft magnetic alloy may have a shape after heat treatment, such as a ribbon or a rod, and the cross section of the rod may be polygonal, circular or elliptical, but is not limited thereto.

According to an embodiment of the present invention, the soft magnetic alloy containing Fe and Co as X may have a crystallized area value of 50 to 78%, more preferably 58 to 78% have.

[Relation 1]

Here, the area refers to an integrated value of the crystalline region or the amorphous region measured by X-ray diffraction (XRD) analysis at 0 to 90 ° angle (2?) With respect to the soft magnetic alloy.

Since the crystallized area value satisfies 50 to 78%, crystals of? -Fe, FeCo, Fe or Co and other intermetallic compounds such as Fe-C based compound are produced at an appropriate ratio, It can be more advantageous to satisfy. If the crystallized area value is less than 50%, it may be difficult to exhibit excellent magnetic properties, such as a low saturation magnetic flux density or a slight improvement in magnetostrictive properties, and there is a fear that the magnetic properties may be changed during manufacturing of magnetic parts using alloys have. If the crystallized area value exceeds 78%, the formation of compound crystals between Fe or Co and other metals such as Fe-C based compounds is greatly increased, the saturation magnetic flux density is lowered, and the magnetic loss such as coercive force is increased So that the desired level of physical properties may not be exhibited.

According to another embodiment of the present invention, as the X, the soft magnetic alloy containing Fe and Ni may have a crystallized area value of 50 to 70%, more preferably 60 to 70% Lt; / RTI > If the crystallized area value is less than 50%, the saturation magnetic flux density is lowered and the magnetic properties can be reduced. If the crystallized area value exceeds 70%, the effect of lowering the coercive force may be insignificant.

The soft magnetic alloy according to one embodiment of the present invention may have a saturation magnetic flux density of 1.7 T or more in the initial alloy state and may be 1.8 T or more after suitably heat treatment and have a coercive force of 300 A / It is possible to reduce the size of the component.

The soft magnetic alloy included in one embodiment of the present invention may be manufactured by a manufacturing method described below, but is not limited thereto.

The soft magnetic alloy according to the present invention is prepared in one step by preparing a soft magnetic initial alloy having an empirical formula according to the present invention and then performing heat treatment on the soft magnetic initial alloy produced in two steps.

First, as a first step, the soft magnetic initial alloy is represented by the empirical formula FX _a B _b C _c Cu _d , where X is at least one element of Fe, Co, and Ni, and a, b, c, d is an atomic percent of the corresponding element in the alloy, and is made such that 78.5? a? 86.0, 13.5? b + c? 21, and 0.5? d? 1.5.

The soft magnetic initial alloy included in one embodiment of the present invention is a soft magnetic alloy forming composition or a soft magnetic master alloy in which raw materials containing respective elements are weighed and mixed so as to have an empirical formula of the above soft magnetic alloy, Followed by solidification. The shape of the soft magnetic initial alloy produced according to the specific method used in the quenching and solidifying step may vary. The method used for the quenching and solidifying can be carried out by a known method, so that the present invention is not particularly limited thereto. However, as a non-limiting example, the quenching and coagulation is performed in a powdery state through a high pressure gas (Ex. Ar, N ₂ , He, etc.) and / or high pressure water through which molten parent alloy or soft magnetic alloy- A centrifugal separation method in which a powder phase is produced by using a disk rotating rapidly a molten metal, and a melt spinning method in which a ribbon is produced by a roll rotating at a high speed, and the like. The shape of the shape of the soft magnetic initial alloy formed through these methods may be powder, strip, or ribbon. In addition, the atomic arrangement in the soft magnetic initial alloy may be an amorphous phase.

On the other hand, the shape of the soft magnetic initial alloy may be bulk. When the shape of the soft magnetic initial alloy is bulk, the powder of the amorphous soft magnetic alloy formed by the above-described methods can be made into a bulk amorphous alloy through conventionally known methods, such as coalescence and solidification. Methods such as shock consolidation, explosive forming, powder sintering, hot extrusion and hot rolling may be used as a non-limiting example of the above coalescing method. In the impact-combining method, impact waves are transmitted along the particle boundary by applying shock waves to the powder alloy polymer, and energy absorption occurs at the particle interface. At this time, the absorbed energy forms a fine molten layer on the particle surface To produce a bulk amorphous alloy. The resulting molten layer should be cooled fast enough to maintain the amorphous state through heat transfer into the particles. With this method, a bulk amorphous alloy having a filling density of up to 99% of the original density of the amorphous alloy can be manufactured, and sufficient mechanical properties can be obtained. The hot extrusion and rolling method utilizes the fluidity of the amorphous alloy at a high temperature. The amorphous alloy powder is heated to a temperature near Tg, rolled, quenched after rolling, and thereby a bulk amorphous alloy having sufficient density and strength is manufactured . On the other hand, the above solidification method may include copper mold casting, high pressure die casting, arc melting, unidirectional melting, squeez casting, strip casting, and the like And the respective methods may employ known methods and conditions, and thus the present invention is not limited thereto. For example, the copper alloy mold casting method uses a suction method in which a molten metal is injected into a copper mold having high cooling ability by using a pressure difference between the inside and the outside of the mold, A molten metal which is injected into a copper mold at a high speed by pressurization or suction is solidified by metal so that an amorphous soft initial alloy having a certain bulk shape can be produced.

Next, as a two-step process according to the present invention, the produced soft magnetic initial alloy is subjected to heat treatment.

The second step is a step of transforming the atomic arrangement of the soft magnetic initial alloy from amorphous to crystalline, and through the heat treatment, nanocrystals including elements belonging to X can be produced. However, since the size of crystals generated according to the temperature, temperature-raising rate, and / or treatment time in the second step can be increased to a desired level or more, the control of the heat treatment conditions is very important in controlling the grain size. In particular, the composition of the soft magnetic initial alloy according to the present invention does not contain elements such as Nb, which function as a barrier to prevent growth of crystal size, so that it can be used at a desired level for ordinary heat treatment conditions, It is very difficult to control the grain size of the nanocrystal to be 27 nm or less, and mass production may be difficult.

Specifically, the heat treatment may be performed at a heat treatment temperature of 200 to 410 ° C, more preferably, a heat treatment temperature of 280 to 410 ° C for 40 to 100 seconds. The heat treatment temperature may vary depending on the composition, , Nanocrystalline grains may not be produced or may be generated in a small amount. In this case, a soft magnetic alloy having a low magnetic property may be produced. If the annealing temperature is higher than 410 ° C, the grain size of crystals produced in the alloy can be increased and the grain size distribution of the produced crystals becomes very wide to decrease the uniformity of the grain size. Or the FeNi crystal, an excessive amount of crystals of an element belonging to X and an intermetallic compound other than X is excessively generated and the content of? -Fe and FeCo or FeNi crystals is decreased, and the resultant crystal is a uniform nanocrystalline soft magnetic alloy It may be absent.

According to an embodiment of the present invention, the rate of temperature rise up to the heat treatment temperature also greatly influences the grain size control of the produced nanocrystalline grains. For example, the rate of temperature increase from room temperature to the heat treatment temperature is 90 ° C / min or less And preferably 28 to 80 ° C / min or less. It is generally known that the rate of temperature rise in a heat treatment process for transforming an amorphous alloy to a crystalline alloy is advantageous in obtaining a crystal having a small and uniform particle size at a high temperature elevation, for example, 100 ° C / min or more. The magnetic alloy may be advantageously produced uniformly in such a manner that the grain size of the produced crystal is close to the average grain size unless the temperature is slowly raised at a heating rate of 90 DEG C / min or less and then the annealing is performed at the desired annealing temperature . If the heating rate up to the temperature during the heat treatment exceeds 90 ° C / min, the particle size distribution of crystals produced may not be controlled to a desired level. However, when the heating rate is too low, the time required for the heat treatment process is prolonged, and crystals may be coarsened as the time for crystal formation and growth is prolonged.

Meanwhile, when the temperature is raised to a high temperature, the soft magnetic alloy according to the present invention can contribute to the formation of uniform nano-grains such as Si elements in the composition. The grain size control may not be very easy because it does not contain Nb elements that act as barriers of elements or crystal growth. Accordingly, it may be preferable to raise the temperature to 90 [deg.] C / min or less as compared with the elevated temperature, and by controlling the crystal size of Fe and FeCo or FeNi crystals, -Fe and FeCo or FeNi crystals having a uniform particle size. In addition, as the temperature is raised at a low temperature, it can be more suitable for mass production, and the manufacturing cost is advantageously reduced.

In addition, the heat treatment time in the state where the heat treatment temperature is maintained at the second step may be 40 to 100 seconds. The heat treatment time may be varied depending on the heat treatment temperature to be performed. However, if the heat treatment is performed for less than 40 seconds, the transformation into the crystalline state may not be achieved to the desired level. If the heat treatment is performed for more than 100 seconds, There is a problem that the particle size of the particles is coarsened.

Meanwhile, the second step may be performed by adding a pressure and / or a magnetic field in addition to the heat. Through such additional processing, a crystal having magnetic anisotropy in a specific direction can be generated. The degree of the applied pressure or magnetic field may vary depending on the degree of desired physical properties, so that the present invention is not particularly limited thereto and may be carried out by employing known conditions.

The Fe-based soft magnetic alloy according to one embodiment of the present invention may be implemented as a magnetic core such as a lobed core, a laminated core, and a pressure-sensitive core, or may be implemented as an electromagnetic wave shielding member.

In addition, the magnetic core may be implemented as a coil part together with a coil wound on the outside of the magnetic core to perform a magnetic core function, and the coil part may be applied to components such as a laser, a transformer, an inductor, a motor, .

The present invention will now be described more specifically with reference to the following examples. However, the following examples should not be construed as limiting the scope of the present invention, and should be construed to facilitate understanding of the present invention.

≪ Example 1 >

The raw materials of Fe, Co, B, C and Cu were weighed so as to produce the parent alloy represented by the empirical formula (Fe ₈₀ Co ₂₀ ) _{85. 3} B ₁₃ C ₁ Cu _{0 .7 and} then the parent alloy was produced by arc melting . Then, the parent alloy was melted and rapidly cooled at a speed of 10 ⁶ K / sec through melt spinning at a rate of 60 m / s in an Ar atmosphere to form a soft magnetic initial alloy having a thickness of about 20 μm and a width of about 2 mm .

The resulting soft magnetic initial alloy was heat-treated at a temperature elevation rate of 80 ° C / min at room temperature and then heat-treated at 350 ° C for 1 minute to produce a soft magnetic alloy as shown in Table 1 below.

≪ Examples 2 to 47 >

And the composition of the empirical formula was changed as shown in Tables 1 to 5 to prepare soft magnetic initial alloys and soft magnetic alloys as shown in Tables 1 to 5 below.

≪ Comparative Examples 1 to 10 &

And the composition of the empirical formula was changed as shown in Table 6 below to prepare soft magnetic initial alloys and soft magnetic alloys as shown in Table 6 below.

<Experimental Example 1>

With respect to the composition of the initial alloy and the post-annealed alloy prepared in Examples 1 to 47, the following expressions (1) and (2) or (3) and (4) were calculated according to the content of X, Are shown in Tables 1 to 5.

(1) In the empirical formula, when a is from 82 to 86 atomic%, Equations 1 and 2

[Equation 1]

&Quot; (2) &quot;

(2) In the empirical formula, when a is less than 78.5 to 82.0 at%, equations (3) and

&Quot; (3) &quot;

&Quot; (4) &quot;

<Experimental Example 2>

The following properties were evaluated for the initial alloys and the heat-treated alloys prepared in Examples 1 to 47 and Comparative Examples 1 to 10, respectively, and are shown in Tables 1 to 6 below.

1. Crystal structure analysis

The XRD pattern and TEM were analyzed to determine the average grain size and the crystallized area value of the crystalline phase and the generated crystal for the prepared initial alloy and the alloy after the heat treatment.

Among the analyzed results, the XRD patterns of the initial alloys for Examples 1, 37, 38 and 39 are shown in Figs. 1A to 1D. In these Examples, the XRD patterns of the heat- 2a to 2d.

The XRD patterns of the initial alloys for Examples 42, 43, 46 and 47 are shown in Figs. 3a to 3d. The XRD patterns of the soft magnetic alloys heat-treated in Examples 42, 43 and 46 are shown in Figs. 4A to 4C.

At this time, the crystallized area value was calculated by the following relational expression 1.

[Relation 1]

The average particle diameter was derived from the Scherrer formula as shown in the following equation (2).

[Relation 2]

Where D is the average grain diameter of the crystal,? Is the half width of the peak having the maximum intensity, and? Is the angle having the peak of the maximum intensity.

As can be seen from FIGS. 1A to 1D, it can be seen that Embodiments 1, 37, 38 and 39 implement an amorphous initial alloy.

As can be seen from FIGS. 3A to 3D, in Example 42, Example 43, Example 46, and Example 47, it can be seen that Example 47 is an initial alloy in which crystalline and amorphous materials are mixed.

2. Evaluation of magnetic property

The coercivity and saturation magnetization values were calculated at 800k A / m through a vibrating sample magnetometer (VSM).

VSM graphs of the initial alloys of Examples 1, 37, 38 and 39 are shown in Figs. 5A to 5D, respectively. The VSM graphs of the soft magnetic alloys after the heat treatment are shown in Figs. 6A To 6d.

The VSM graphs of the initial alloys of Examples 42, 43, 46 and 47 are shown in FIGS. 7a to 7d, respectively. The VSM graphs of the soft magnetic alloys after the heat treatment of these Examples are shown in the graphs 8a to 8d.

The VSM results of the initial alloys of FIGS. 5A to 5D with X containing Fe and Co indicate that the initial magnetic alloy before the heat treatment had excellent magnetic properties with a saturation magnetic flux density of 1.8T (FIG. 5D) to 1.923T (FIG. 5B) It is possible to confirm that an alloy which exhibits a high melting point is realized.

Also, through the VSM results of the alloys in which they were heat-treated, the results of the VSM of the alloys exhibit improved magnetic properties over the initial alloys, with a saturation magnetic flux density of 1.869T (FIG. 6d) to 2.009T (FIG. 6a) And the like.

Further, the results of VSM in the initial alloys of Figs. 7A to 7D, in which X is Fe and Ni, show that in Example 42 and Example 43 in which the content (at%) ratio of Fe and Ni is 90:10 and 80:20 7A) and 1.734T (FIG. 7B) in the initial alloys before the heat treatment, but the nickel content in the case of Examples 46 and 47 was excessive, and the saturation magnetic flux density in the initial alloy before heat treatment was 1.489T (Fig. 7C) and 1.255T (Fig. 7D). The saturated magnetic flux density was improved to 1.829T (FIG. 8A) and 1.753T (FIG. 8B) in Examples 42 and 43, respectively, after the heat treatment, but in Example 46, the saturation magnetic flux density was 1.416T (FIG. 8c), which is lower than that of the initial alloy.

Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Example 9 Example 10 Initial alloy Empirical formula
X _a B _b C _c Cu _d m / n
(Fe _m Co _n ) 80/20 a (at%) 85.3 85.3 85.3 85.3 85.3 79.3 79.3 79.3 79.3 79.3 b (at%) 13 12 11 10 9 14 12 10 8 6.67 c (at%) One 2 3 4 5 6 8 10 12 13.33 d (at%) 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 b + c
(at%) 14 14 14 14 14 20 20 20 20 20 Equation 1 13 4.24 2.12 1.25 0.80 - - - - - Equation 2 3.32 3.32 3.32 3.32 3.32 - - - - - Equation 3 - - - - - 4.76 2.65 1.85 0.96 0.68 Equation 4 - - - - - 10.64 10.64 10.64 10.64 10.64 Crystalline phase Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Bs (T) 1.923 1.924 1.919 1.920 1.904 1.701 1.713 1.721 1.708 1.714 Hc (A / m) 146.3 135.2 132.3 142.5 137.4 122.6 126.8 131.8 129.4 127.8 Heat treatment temperature (° C) / Heat treatment time (sec) / Heating rate (° C / m) 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 Alloy after heat treatment Crystalline phase Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Crystal average particle diameter (nm) 26.3 26.4 25.7 26.1 26.0 24.3 23.7 23.2 24.1 24.0 Crystallization area value (%) 59.4 60.4 59.8 61.2 60.2 62.3 62.4 61.9 62.0 62.2 Bs (T) 1.992 2.002 1.972 1.989 2.014 1.894 1.882 1.901 1.904 1.910 Hc (A / m) 83.1 85.2 84.7 85.0 84.7 82.4 82.9 82.5 82.4 82.6

Example 11 Example 12 Example 13 Example 14 Example 15 Example 16 Example 17 Example 18 Example 19 Example 20 \ Initial Alloy Empirical formula
X _a B _b C _c Cu _d m / n
(Fe _m Co _n ) 80/20 a (at%) 85.1 85.6 82.5 84.5 85.8 83.3 82.3 82.51 82.01 82.2 b (at%) 7.1 6.6 9 8 8 10 16.0 16 16 16.6 c (at%) 7.1 7.1 8 7 5.5 6 1.0 0.99 0.99 0.7 d (at%) 0.7 0.7 0.5 0.5 0.7 0.7 1.0 0.5 1.0 0.5 b + c
(at%) 14.2 13.7 17 15 13.5 16 17 16.99 16.99 17.3 Equation 1 0.375 0.349 0.397 0.431 0.62 0.68 16.0 16.24 16.24 28.34 Equation 2 3.32 3.33 3.58 3.61 3.32 3.30 3.29 3.58 3.00 3.58 Equation 3 - - - - - - Equation 4 - - - - - - Crystalline phase Crystal + amorphous Crystal + amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Bs (T) 2.047 2.054 1.869 1.894 1.921 1.895 1.887 1.864 1.862 1.848 Hc (A / m) 225.1 226.3 146.3 164.2 130.1 170.6 154.2 143.2 144.4 114.2 Heat treatment temperature (° C) / Heat treatment time (sec) / Heating rate (° C / m) 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 Alloy after heat treatment Crystalline phase Crystalline Crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Crystal average particle diameter (nm) 28.6 29.4 25.2 25.5 24.9 24.2 24.0 24.1 23.9 24.1 Crystallization area value (%) 60.2 61.1 60.5 62.0 61.7 59.9 60.4 60.1 60.9 62.2 Bs (T) 2.12 2.12 1.92 1.94 2.08 1.93 1.91 1.92 1.91 1.92 Hc (A / m) 524.3 562.2 347.5 327.1 317.2 268.2 255.2 300.1 294.2 299.3

Example 21 Example 22 Example 23 Example 24 Example 25 Example 26 Example 27 Example 28 Example 29 Example 30 Initial alloy Empirical formula
X _a B _b C _c Cu _d m / n
(Fe _m Co _n ) 80/20 a (at%) 82.0 83.8 82.9 85.51 78.7 78.6 78.5 79.0 78.51 81.9 b (at%) 16.8 14 13 13 6.8 7 7.8 8 20.3 17.1 c (at%) 0.7 One 3 0.99 14 13.9 13.2 12.5 0.69 0.5 d (at%) 0.5 1.2 1.1 0.5 0.5 0.5 0.5 0.5 0.5 0.5 b + c
(at%) 17.5 15 16 13.99 20.8 20.9 21 20.5 20.99 17.6 Equation 1 28.69 14 2.50 13.19 - - - - - - Equation 2 3.58 2.89 2.94 3.62 - - - - - - Equation 3 - - - - 0.65 0.675 0.813 0.905 177.09 241.83 Equation 4 - - - - 12.55 12.54 12.53 12.57 12.53 12.79 Crystalline phase Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Bs (T) 1.894 1.907 1.902 1.927 1.709 1.704 1.704 1.714 1.707 1.844 Hc (A / m) 127.6 119.2 121.3 127.4 117.6 118.0 117.5 119.4 120.7 121.9 Heat treatment temperature (° C) / Heat treatment time (sec) / Heating rate (° C / m) 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 Alloy after heat treatment Crystalline phase Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Crystal average particle diameter (nm) 29.2 23.3 23.6 24.4 24.3 24.4 24.4 24.2 24.1 24.8 Crystallization area value (%) 62.4 61.5 63.3 67.7 59.2 60.6 62.2 61.1 64.2 66.3 Bs (T) 2.012 2.074 2.068 2.122 1.842 1.840 1.840 1.857 1.841 1.968 Hc (A / m) 343.1 193.5 134.3 142.1 140.9 125.3 126.7 124.1 125.5 155.8

Example 31 Example 32 Example 33 Example 34 Example 35 Example 36 Example 37 Example 38 Example 39 Example 40 Initial alloy Empirical formula
X _a B _b C _c Cu _d m / n
(Fe _m Co _n ) 80/20 97 /
3 94 /
6 90 /
10 65 /
35 50 /
50 48 /
52 a (at%) 81.9 78.5 78.5 81.9 85.3 85.3 85.3 85.3 85.3 85.3 b (at%) 8 7.4 19.4 16 13 13 13 13 13 13 c (at%) 8.9 13 One 1.6 One One One One One One d (at%) 1.2 1.1 1.1 0.5 0.7 0.7 0.7 0.7 0.7 0.7 b + c
(at%) 20.4 20.4 20.4 17.6 14 14 14 14 14 14 Equation 1 - - - - 13 13 13 13 13 13 Equation 2 - - - - 3.32 3.32 3.32 3.32 3.32 3.32 Equation 3 1.51 0.79 97 39.5 - - - - - - Equation 4 8.26 8.45 8.45 12.79 - - - - - - Crystalline phase Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Bs (T) 1.842 1.811 1.792 1.832 1.901 1.893 1.871 1.868 1.800 1.798 Hc (A / m) 62.1 64.2 64.3 68.2 72.6 80.6 83.0 64.2 66.7 76.2 Heat treatment temperature (° C) / Heat treatment time (sec) / Heating rate (° C / m) 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 Alloy after heat treatment Crystalline phase Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Crystal average particle diameter (nm) 21.8 22.0 21.1 20.9 21.3 22.3 20.8 22.4 28.7 29.1 Crystallization area value (%) 64.2 68.4 67.2 70.1 72.2 71.1 68.8 73.4 67.9 68.0 Bs (T) 1.942 1.892 1.884 1.921 2.017 2.013 2.009 1.959 1.869 1.857 Hc (A / m) 139.3 102.6 97.2 87.3 139.7 104.2 83.2 90.5
284.3 388.6

Example 41 Example 42 Example 43 Example 44 Example 45 Example 46 Example 47 Initial alloy Empirical formula
X _a B _b C _c Cu _d p / q
(Fe _p Ni _q ) 98 /
2 90 /
10 80 /
20 76 /
24 71 /
29 65 /
35 50 /
50 a (at%) 85.3 85.3 85.3 85.3 85.3 85.3 85.3 b (at%) 13 13 13 13 13 13 13 c (at%) One One One One One One One d (at%) 0.7 0.7 0.7 0.7 0.7 0.7 0.7 b + c
(at%) 14 14 14 14 14 14 14 Equation 1 13 13 13 13 13 13 13 Equation 2 3.32 3.32 3.32 3.32 3.32 3.32 3.32 Equation 3 - - - - - - - Equation 4 - - - - - - - Crystalline phase Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous Amorphous + crystal Bs (T) 1.692 1.740 1.743 1.624 1.555 1.489 1.255 Hc (A / m) 42.2 41.2 43.2 45.6 48.2 56.2 53.1 Heat treatment temperature (° C) / Heat treatment time (sec) / Heating rate (° C / m) 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 Alloy after heat treatment Crystalline phase Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Amorphous + crystalline Crystal average particle diameter (nm) 21.2 21.4 25.5 25.7 26 29.2 29.4 Crystallization area value (%) 63.3 61.3 58.0 60.4 62.7 68.9 70.2 Bs (T) 1.817 1.829 1.753 1.707 1.624 1.416 1.189 Hc (A / m) 77.2 79.8 64.7 65.4 70.2 170.5 188.2

Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 Comparative Example 7 Comparative Example 9 Comparative Example
9 Comparative Example
10 Initial alloy Empirical formula
X _a B _b C _c Cu _d m / n
(Fe _m Co _n ) 80 /
20 80 /
20 80 /
20 80 /
20 80 /
20 80 /
20 80 /
20 80 /
20 80 /
20 100/0 a (at%) 86.3 86.3 86.0 87.3 86.2 78.2 85.6 84.4 78.5 85.3 b (at%) 11.0 12.0 10.0 11 8.7 15.0 9.0 9 18.9 13 c (at%) 2.0 1.0 3.0 1.0 4.6 6.3 5.0 15 One One d (at%) 0.7 0.7 1.0 0.7 0.5 0.5 0.4 1.6 1.6 0.7 b + c
(at%) 13 13 13 12 13.3 21.3 14 24 19.9 14 Crystalline phase Crystalline Crystalline Crystalline Crystalline Crystalline Amorphous Amorphous Crystalline Crystalline Amorphous Heat treatment temperature (° C) / Heat treatment time (sec) / Heating rate (° C / m) 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 300/60 /
80 Alloy after heat treatment Crystalline phase Crystalline Crystalline Crystalline Crystalline Crystalline Amorphous + crystalline Amorphous + crystalline Crystalline Crystalline Amorphous + crystalline Crystal average particle diameter (nm) 29.3 27.1 30.6 29.4 32.4 21.2 26.8 35.2 30.3 17 Bs (T) 2.107 2.118 2.102 2.122 2.172 1.697 2.092 2.082 1.889 1.87 Hc (A / m) 442.1 392.4 471.6 452.3 501.2 67.2 135.7 543.2 482.6 64.27

It can be seen from Tables 1 to 6 that the soft magnetic alloy according to the embodiments exhibits a higher magnetic flux density and / or a lower coercive force than the soft magnetic alloy according to the comparative example, and thus has excellent magnetic properties.

In Examples 11 to 24 in which the value of a was in the range of 82 to 86 at% in the empirical formula, crystals were formed in the initial alloy due to the value of Equation 1 being less than 0.38 in Examples 11 and 12, As a result, it can be seen that the coercive force is increased in comparison with Examples 13 to 20, which satisfy Equation (1), and it can be seen that the coercive force is remarkably increased especially after the heat treatment. In addition, it can be confirmed that the grain size of the crystals produced is more than 30 nm and becomes coarse. In the case of Example 21 in which the value of Equation 1 exceeds 28.5, an amorphous alloy was realized in the initial alloy, but it can be confirmed that the coercive force after the heat treatment is remarkably increased. It can be seen that the grain size control is not easy when the content of B in the alloy is excessive.

In the case of Example 22 in which the value of Equation (2) is less than 2.92, it can be expected that the coercive force is large and the magnetic loss increases as compared with Example 23. [

In Examples 25 to 34 in which the value of a is less than 78.5 to 82.0 at% in the empirical formula, it can be seen that the coercive force of Example 25 having a value of less than 0.67 is larger than that of Example 26 .

In the case of Example 31 in which the value of the formula (4) was less than 8.3, crystals were generated in the initial alloy as compared with Examples 32 to 34, and it was confirmed that the coercive force was remarkably large after the heat treatment.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (20)

In the above empirical formula, X represents at least one element selected from the group consisting of Fe, Co, and Ni, and a, b, c, and d are atomic percentages of the corresponding element in the alloy. ) Or the condition (2), and the soft magnetic alloy containing no Si:
* Condition (1)
B + c? 17.5, 0.5? D? 1.5, and a value according to the following equation (1) is 0.38 to 28.5:
[Equation 1]

* Condition (2)
In the empirical formula, 78.5? A <82.0, 16.5 <b + c? 21, 0.5? D? 1.5, and a value according to Equation 3 is 0.67-200.
&Quot; (3) &quot;

The method according to claim 1,
Wherein X is represented by Fe _m Co _n , m and n are at% (atomic percent) of the corresponding element in X, and 49? M? 95 and 5? N? The method according to claim 1,
Wherein X is represented by Fe _p Ni _q , p and q are at% (atomic percent) of the corresponding element in X, and 70? P? 99 and 1? Q? delete The method according to claim 1,
In the above condition (1), a and d of the empirical formula are values of 2.92 to 3.70 according to the following formula (2).
&Quot; (2) &quot;

The method according to claim 1,
Wherein the value according to Equation (1) is 0.65 to 16.1. The method according to claim 1,
In the above condition (1), c of the empirical formula is 1.0 to 4.0 at%. delete The method of claim 1, wherein
In the condition (2), a and d of the empirical formula are values of the following formula (4): 8.3 to 12.8.
&Quot; (4) &quot;

The method according to claim 1,
Wherein the value of the formula (3) is 0.85 to 200. 3. The method of claim 2,
Wherein m and n are 64? M? 92 and 8? N? 36, respectively. The method of claim 3,
P and q satisfy 78? P? 99 and 1? Q? 22, respectively. 3. The method of claim 2,
Wherein the soft magnetic alloy is a soft magnetic alloy having a crystallized area value of 50 to 78% according to the following relational expression:
[Relation 1]

Here, the area refers to an integrated value of the crystalline region or the amorphous region measured by X-ray diffraction (XRD) analysis at 0 to 90 ° angle (2?) With respect to the soft magnetic alloy. The method of claim 3,
Wherein the soft magnetic alloy is a soft magnetic alloy having a crystallized area value of 50 to 70% according to the following relational expression 1:
[Relation 1]

Here, the area refers to an integrated value of the crystalline region or the amorphous region measured by X-ray diffraction (XRD) analysis at 0 to 90 ° angle (2?) With respect to the soft magnetic alloy. In the empirical formula XaBbCcCud indicates that X includes at least one of Fe, Co, and Ni, and a, b, c, and d in the empirical formula are at% (atomic percent) Preparing a soft magnetic initial alloy that satisfies condition (1) or (2) and does not contain Si; And
And heat treating the soft magnetic initial alloy.
* Condition (1)
B + c? 17.5, 0.5? D? 1.5, and a value according to the following equation (1) is 0.38 to 28.5:
[Equation 1]

* Condition (2)
In the empirical formula, 78.5? A <82.0, 16.5 <b + c? 21, 0.5? D? 1.5, and a value according to Equation 3 is 0.67-200.
&Quot; (3) &quot;

16. The method of claim 15,
Wherein the heat treatment is performed at a heat treatment temperature of 200 to 410 캜 for 40 to 100 seconds. 17. The method of claim 16,
Treated at a heating rate of 90 DEG C / min or less up to the predetermined heat treatment temperature. An electromagnetic wave shielding member comprising the soft magnetic alloy according to any one of claims 1 to 3, 5 to 7, and 9 to 14. A magnetic core comprising a soft magnetic alloy according to any one of claims 1 to 3, 5 to 7 and 9 to 14. The core as claimed in claim 19; And
And a coil for winding the outside of the magnetic core.

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