JP2000070878A - Gas-liquid mixed jet type cleaning device for blind-hole cleaning - Google Patents

Gas-liquid mixed jet type cleaning device for blind-hole cleaning

Info

Publication number
JP2000070878A
JP2000070878A JP10284692A JP28469298A JP2000070878A JP 2000070878 A JP2000070878 A JP 2000070878A JP 10284692 A JP10284692 A JP 10284692A JP 28469298 A JP28469298 A JP 28469298A JP 2000070878 A JP2000070878 A JP 2000070878A
Authority
JP
Japan
Prior art keywords
nozzle
cleaning
gas
blind hole
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10284692A
Other languages
Japanese (ja)
Inventor
Haruyoshi Ishidate
治良 石館
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAIMEI SEISAKUSHO KK
Original Assignee
KAIMEI SEISAKUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAIMEI SEISAKUSHO KK filed Critical KAIMEI SEISAKUSHO KK
Priority to JP10284692A priority Critical patent/JP2000070878A/en
Publication of JP2000070878A publication Critical patent/JP2000070878A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To clean a blind-hole inner peripheral face by forming a plurality of auxiliary cleaning holes at intervals on a cylindrical wall of a nozzle end section and jetting a gas-liquid mixed cleaning liquid from auxiliary cleaning holes toward the blind-hole inner peripheral face when a nozzle tip jet opening is in the closed state or half-closed state on a blind-hole bottom face. SOLUTION: A nozzle 12 is formed of a narrow and long stainless cylindrical member of 1-3 mm diameter. When auxiliary cleaning holes 16 are formed at intervals in the peripheral direction on a cylindrical wall of the tip of the nozzle 12 and tip jet opening 17 of the nozzle 12 is set in the closed state or the half-closed state, a gas-liquid mixed cleaning liquid is jetted out of the auxiliary cleaning holes 16 to clean the blind-hole peripheral face. Namely, the auxiliary cleaning holes 16 are of the opening dimension of not jetting the cleaning liquid when the tip jet opening 17 is released and is preferably formed of an arc-shaped slit 16' extended in the peripheral direction of the cylindrical wall. The cleaning liquid can be utilized effectively not only on the blind-hole inner bottom face but also on the inner peripheral face by this arrangement.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、細長い円筒体から
成るノズルを袋穴内に挿入し、ノズルの先端噴射口から
気液混合洗浄液を噴射して、袋穴内底面及び内周面を洗
浄するようにした、袋穴洗浄用の気液混合噴射形洗浄装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning the inner bottom surface and inner peripheral surface of a blind hole by inserting a nozzle formed of an elongated cylindrical body into a blind hole and spraying a gas-liquid mixed cleaning liquid from a nozzle at a tip end of the nozzle. The present invention relates to a gas-liquid mixed jet type cleaning device for cleaning a blind hole.

【0002】[0002]

【従来の技術】従来のノズルの先端噴射口からの洗浄液
の噴射においては、袋穴内底面の洗浄は有効に行える
が、袋穴内周面に洗浄液を有効に作用させることが出来
ず、洗浄不良をきたす問題を有していた。
2. Description of the Related Art In the conventional spraying of a cleaning liquid from a tip end of a nozzle, the cleaning of the inner bottom surface of the blind hole can be effectively performed, but the cleaning liquid cannot be effectively applied to the inner peripheral surface of the blind hole, resulting in poor cleaning. Had a problem.

【0003】[0003]

【発明が解決しようとする課題】袋穴内底面のみなら
ず、袋穴内周面においても洗浄液を有効に作用させて、
洗浄不良の問題を解決しようというものである。
The cleaning liquid is made to act effectively not only on the inner bottom surface of the blind hole but also on the inner peripheral surface of the blind hole.
This is to solve the problem of poor cleaning.

【0004】[0004]

【課題を解決するための手段】細長い円筒体から成るノ
ズルの先端部には、その筒壁に対して周方向に延在する
弧形スリット等からなる補助洗浄孔を、間隔をおいて複
数貫設する。この弧形スリットは、ノズルの軸線に対し
垂直または斜めに洗浄液を噴射できるように配向されて
おり、上記ノズルの先端噴射口を袋穴底面で閉鎖または
半閉鎖状態とした時に、このスリットから袋穴内周面へ
向けて気液混合洗浄液を噴射し、主として袋穴内周面を
洗浄することができ、ノズルの先端噴射口の解放時にお
いては、主として袋穴内底面を洗浄できる。
At the tip of a nozzle formed of an elongated cylindrical body, a plurality of auxiliary cleaning holes formed by an arc-shaped slit extending in the circumferential direction with respect to the cylindrical wall are provided at intervals. Set up. The arc-shaped slit is oriented so that the cleaning liquid can be jetted perpendicularly or obliquely to the axis of the nozzle, and when the nozzle at the tip of the nozzle is closed or semi-closed at the bottom of the bag hole, a bag is opened from this slit. By spraying the gas-liquid mixed cleaning liquid toward the inner peripheral surface of the hole, the inner peripheral surface of the blind hole can be mainly cleaned, and when the injection port at the tip of the nozzle is opened, the inner bottom surface of the blind hole can be mainly cleaned.

【0005】[0005]

【発明の実施の形態】この袋穴洗浄用の気液混合噴射形
洗浄装置の実施の形態を図面に追いながら説明する。図
1は、ノズル装置部(1)を気泡混合器(2)と接続し
て、この袋穴洗浄用の気液混合噴射形洗浄装置を使用可
能な状態にする時の斜視図である。図2は、本発明の作
用に関わる部分の配管図を模した実施例である。吸入チ
ューブ(4)先端の吸入口(3)を通じて、洗浄槽
(5)から吸入された洗浄液(6)は、吸入チューブ
(4)を接続した気液混合器の主管(7)内へ導入さ
れ、主管(7)の出口端にオーバーフロー調整弁(8)
を介して設けた分岐管(9)(10)に分流され、一方
の分岐管(9)に流入した洗浄液(6)は、該分岐管
(9)に接続したノズル接続チューブ(11)を通じ
て、ノズル装置(1)へ供給され、ノズル(12)から
噴射されるようになっている。他方分岐管(10)に流
入されたオーバーフロー洗浄液(6)は、該分岐管(1
0)に接続した環流チューブ(13)を通じ、洗浄槽
(5)内へ環流される。更に上記主管(7)には、気泡
供給管(14)が接続され、気液混合された洗浄液
(6)が、前記分岐管(9)を経てノズル装置(1)に
供給される。ノズル(12)は、口径が1ミリ〜3ミリ
の細長いステンレス製の円筒体から成り、ノズル(1
2)と握り部(15)との間には90度〜160度の角
度を持たせた金属製のパイプが接続されている。図3乃
至図7に示すように、上記ノズル(12)先端部の筒壁
に補助洗浄孔(16)を周方向に間隔をおいて複数貫設
し、上記ノズル(12)の先端噴射口(17)を袋穴底
面で閉鎖または半閉鎖状態とした時、上記補助洗浄孔
(16)から気液混合洗浄液を噴射し、袋穴内周面を洗
浄する構成とした。即ち、補助洗浄孔(16)は、先端
噴射口(17)が解放されている時には洗浄液を噴射し
ない開口寸法を有する洗浄孔であり、その好ましい例示
としての上記複数の補助洗浄孔(16)は、筒壁の周方
向に延在する弧形スリット(16´)で形成されてい
る。図4ABは、ノズル(12)により袋穴(18)を
洗浄している状態を示す断面図であり、図4Aは袋穴内
底面の洗浄状態を示し、図4Bは袋穴内周面の洗浄状態
を示している。袋ネジに代表される被洗浄物(19)
を、洗浄槽(5)に侵着し、ノズル(12)を同洗浄槽
(5)内において袋穴(18)に差し入れる。図4Aに
示すように、ノズル内を流れる気液混合の洗浄液(6)
は、ノズルの先端噴射口(17)から噴射され、袋穴内
を洗浄しながら袋穴内底面に達し、主として袋穴内底面
を洗浄する。気液混合器(2)から送られてくる洗浄液
(6)は、先端噴射口(17)に代わる出口を求めて、
ノズル先端部に複数貫設された弧形スリット(16´)
から噴射され、袋穴内周面を洗浄する。この作業を数次
繰り返すことによって、洗浄槽(5)内の被洗浄物(1
9)の袋穴(18)内では、噴射と同時に次々に破裂す
る気泡(20)を加えた、気液混合形の洗浄液(6)
が、ノズル先端部の筒壁に、周方向に間隔をおいて複数
貫設された弧形スリット(16´)によって多方向に噴
射され、袋穴内底面のみならず、袋穴内周面をも洗浄す
る。図5は、ノズル先端部の中間を省略して示す拡大図
である。図6のABCは、図5におけるA−A線断面図
であり、弧形スリット(16´)配向例をそれぞれ示す
ものである。図6Aは上記弧形スリット(16´)を、
ノズルの軸線に対し垂直に洗浄液(6)を噴射できるよ
うに配向した例であり、図6B及び図6Cはノズルの軸
線に対し斜めに洗浄液(6)を噴射できるように配向し
た例である。図7は、図5におけるB−B線断面図であ
る。ノズル先端部の弧形スリット(16´)の周長はノ
ズルの円周面の3分の1となる。即ち、角度Wは120
度の拡がりを持って形成されている。また、図5におけ
るP寸法に示すように、ノズル先端部の筒壁の周方向に
延在する弧形スリット(16´)と、他の弧形スリット
(16´)との間には、少なくとも3ミリ以上の間隔が
とられる構成となっている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a gas-liquid mixing / injection type cleaning apparatus for cleaning a blind hole will be described with reference to the drawings. FIG. 1 is a perspective view when the nozzle device (1) is connected to the bubble mixer (2) to make the gas-liquid mixing / injection type cleaning device for cleaning the blind hole clean available. FIG. 2 is an embodiment simulating a piping diagram of a portion related to the operation of the present invention. The cleaning liquid (6) sucked from the cleaning tank (5) through the suction port (3) at the tip of the suction tube (4) is introduced into the main pipe (7) of the gas-liquid mixer to which the suction tube (4) is connected. , Overflow control valve (8) at outlet end of main pipe (7)
The washing liquid (6) that has been diverted to the branch pipes (9) and (10) provided through the nozzle and flows into one of the branch pipes (9) passes through the nozzle connection tube (11) connected to the branch pipe (9). It is supplied to the nozzle device (1) and is jetted from the nozzle (12). On the other hand, the overflow cleaning liquid (6) flowing into the branch pipe (10) is supplied to the branch pipe (1).
It is refluxed into the washing tank (5) through a reflux tube (13) connected to (0). Further, a bubble supply pipe (14) is connected to the main pipe (7), and a gas-liquid mixed cleaning liquid (6) is supplied to the nozzle device (1) via the branch pipe (9). The nozzle (12) is made of a slender stainless steel cylinder having a diameter of 1 mm to 3 mm.
A metal pipe having an angle of 90 to 160 degrees is connected between 2) and the grip portion (15). As shown in FIGS. 3 to 7, a plurality of auxiliary cleaning holes (16) are provided in the cylindrical wall at the tip of the nozzle (12) at intervals in the circumferential direction so as to penetrate the nozzle (12). When 17) is closed or semi-closed on the bottom surface of the blind hole, a gas-liquid mixed cleaning liquid is injected from the auxiliary cleaning hole (16) to clean the inner peripheral surface of the blind hole. That is, the auxiliary cleaning hole (16) is a cleaning hole having an opening dimension that does not spray the cleaning liquid when the tip injection port (17) is open, and the plurality of auxiliary cleaning holes (16) as a preferred example are , Are formed by arc-shaped slits (16 ') extending in the circumferential direction of the cylindrical wall. FIG. 4AB is a cross-sectional view showing a state where the blind hole (18) is being cleaned by the nozzle (12). FIG. 4A shows a cleaned state of the inner bottom surface of the blind hole, and FIG. Is shown. Items to be cleaned typified by cap screws (19)
Penetrates into the washing tank (5), and the nozzle (12) is inserted into the blind hole (18) in the washing tank (5). As shown in FIG. 4A, a cleaning liquid for gas-liquid mixing flowing in the nozzle (6)
Is sprayed from the tip injection port (17) of the nozzle, reaches the bottom surface of the blind hole while cleaning the inside of the blind hole, and mainly cleans the bottom surface of the blind hole. The cleaning liquid (6) sent from the gas-liquid mixer (2) seeks an outlet instead of the tip injection port (17),
Multiple arc-shaped slits (16 ') provided at the nozzle tip
And is used to clean the inner peripheral surface of the blind hole. By repeating this operation several times, the object to be cleaned (1) in the cleaning tank (5) is
In the bag hole (18) of (9), a gas-liquid mixed type cleaning liquid (6) to which bubbles (20) that burst one after another simultaneously with the injection are added.
Is sprayed in multiple directions by a plurality of arc-shaped slits (16 ') provided in the cylinder wall at the tip of the nozzle at intervals in the circumferential direction so as to wash not only the inner bottom surface of the blind hole but also the inner circumferential surface of the blind hole. I do. FIG. 5 is an enlarged view showing a state in which a middle portion of the nozzle tip is omitted. ABC in FIG. 6 is a cross-sectional view taken along the line AA in FIG. 5, and shows an example of an arc-shaped slit (16 ') orientation. FIG. 6A shows the arc-shaped slit (16 '),
FIGS. 6B and 6C show examples in which the cleaning liquid (6) is oriented so as to be able to eject the cleaning liquid (6) obliquely with respect to the axis of the nozzle. FIG. 7 is a sectional view taken along line BB in FIG. The circumference of the arc-shaped slit (16 ') at the nozzle tip is one third of the circumference of the nozzle. That is, the angle W is 120
It is formed with a degree of expansion. Further, as shown by the dimension P in FIG. 5, at least a gap between the arc-shaped slit (16 ') extending in the circumferential direction of the cylinder wall at the nozzle tip and another arc-shaped slit (16') is provided. The configuration is such that an interval of 3 mm or more is provided.

【0006】[0006]

【発明の効果】袋穴内底面のみならず、袋穴内周面にお
いても洗浄液を有効に作用させて、袋穴の洗浄不良の問
題を解決することができる。このような洗浄方法は、袋
ネジの奥やネジのピッチの谷部に付着した切り粉の除去
に適している。
According to the present invention, the problem of poor cleaning of the blind hole can be solved by effectively applying the cleaning liquid not only on the inner bottom surface of the blind hole but also on the inner peripheral surface of the blind hole. Such a cleaning method is suitable for removing cutting chips attached to the back of the cap screw or the valley of the pitch of the screw.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本洗浄装置の斜視図FIG. 1 is a perspective view of the present cleaning apparatus.

【図2】図1における配管図FIG. 2 is a piping diagram in FIG.

【図3】ノズル装置の斜視図FIG. 3 is a perspective view of a nozzle device.

【図4】ABはノズル拡大縦断面図であり、Aはノズル
先端面の噴射口が解放されている図、Bはノズル先端面
の噴射口が袋穴底面で閉鎖または半閉鎖状態とした時の
図。
FIG. 4 is an enlarged vertical cross-sectional view of the nozzle, where A is a view in which the nozzle at the tip of the nozzle is open, and B is when the nozzle at the tip of the nozzle is closed or semi-closed at the bottom of the blind hole. Figure.

【図5】ノズル先端の一部を省略して示す拡大縦断面図FIG. 5 is an enlarged vertical sectional view showing a part of a nozzle tip omitted.

【図6】A、B、Cは、ノズルにおけるスリットの配向
例を示す拡大縦断面図。
FIGS. 6A, 6B, and 6C are enlarged longitudinal sectional views illustrating examples of slit orientation in a nozzle.

【図7】上記ノズルの拡大横断面図FIG. 7 is an enlarged cross-sectional view of the nozzle.

【符号の説明】[Explanation of symbols]

1 はノズル装置部 2 は気泡混合器 3 は吸入口 4 は吸入チューブ 5 は洗浄槽 6 は洗浄液 7 は主管 8 はオーバーフロー調整弁 9 は分岐管 10は分岐管 11はノズル接続チューブ 12はノズル 13は環流チューブ 14は気泡供給管 15は握り部 16は補助洗浄孔 16´は弧形スリット 17は先端噴射口 18は袋穴 19は被洗浄物 20は気泡 1 is a nozzle device section 2 is a bubble mixer 3 is a suction port 4 is a suction tube 5 is a cleaning tank 6 is a cleaning liquid 7 is a main pipe 8 is an overflow regulating valve 9 is a branch pipe 10 is a branch pipe 11 is a nozzle connecting tube 12 is a nozzle 13 Is a reflux tube 14 is a bubble supply tube 15 is a gripping portion 16 is an auxiliary cleaning hole 16 ′ is an arc-shaped slit 17 is a tip injection port 18 is a bag hole 19 is an object to be cleaned 20 is a bubble

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】細長い円筒体から成るノズルを袋穴内に挿
入し、ノズルの先端噴射口から気液混合洗浄液を噴射し
て、袋穴内底面及び内周面を洗浄するようにした袋穴洗
浄用の気液混合噴射形洗浄装置において、上記ノズル先
端部の筒壁に補助洗浄孔を周方向に間隔をおいて複数貫
設し、上記ノズルの先端噴射口を、袋穴底面で閉鎖また
は半閉鎖状態とした時に上記補助洗浄孔から気液混合洗
浄液を噴射し、袋穴内周面を洗浄する構成としたことを
特徴とする、袋穴洗浄用の気液混合噴射形洗浄装置。
1. A nozzle for cleaning a blind hole in which a nozzle formed of an elongated cylindrical body is inserted into a blind hole, and a gas-liquid mixed cleaning liquid is sprayed from an injection port at the tip of the nozzle to wash the inner bottom surface and inner peripheral surface of the blind hole. In the gas-liquid mixed-injection type washing apparatus, a plurality of auxiliary washing holes are provided in the cylinder wall at the tip end of the nozzle at intervals in the circumferential direction, and the tip injection port of the nozzle is closed or semi-closed at the bottom of the blind hole. A gas-liquid mixed cleaning liquid for the blind hole cleaning, wherein a gas-liquid mixed cleaning liquid is sprayed from the auxiliary cleaning hole when the state is in a state to clean the inner peripheral surface of the blind hole.
【請求項2】 好ましい例示として、上記複数の補助洗
浄孔を、筒壁の周方向に延在する弧形スリットで形成
し、該弧形スリットを、ノズルの軸線方向に位置をずら
せて配置したことを特徴とする、請求項1記載の袋穴洗
浄用の気液混合噴射形洗浄装置。
2. As a preferred example, the plurality of auxiliary cleaning holes are formed by arc-shaped slits extending in the circumferential direction of the cylinder wall, and the arc-shaped slits are arranged so as to be displaced in the axial direction of the nozzle. The gas-liquid mixed jet type cleaning apparatus for bag hole cleaning according to claim 1, characterized in that:
【請求項3】 上記弧形スリットを、ノズルの軸線に対
し斜めに洗浄液を噴射できるように配向したことを特徴
とする、請求項2記載の袋穴洗浄用の気液混合噴射形洗
浄装置。
3. The gas-liquid mixed jet type cleaning apparatus for cleaning a blind hole according to claim 2, wherein the arc-shaped slit is oriented so that the cleaning liquid can be jetted obliquely with respect to the axis of the nozzle.
【請求項4】 上記弧形スリットを、ノズルの軸線に対
し垂直に洗浄液を噴射できるように配向したことを特徴
とする請求項2記載の袋穴洗浄用の気液混合噴射形洗浄
装置。
4. A gas-liquid mixed jet type cleaning apparatus for cleaning a blind hole according to claim 2, wherein the arc-shaped slit is oriented so as to be able to jet the cleaning liquid perpendicularly to the axis of the nozzle.
JP10284692A 1998-09-01 1998-09-01 Gas-liquid mixed jet type cleaning device for blind-hole cleaning Pending JP2000070878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10284692A JP2000070878A (en) 1998-09-01 1998-09-01 Gas-liquid mixed jet type cleaning device for blind-hole cleaning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10284692A JP2000070878A (en) 1998-09-01 1998-09-01 Gas-liquid mixed jet type cleaning device for blind-hole cleaning

Publications (1)

Publication Number Publication Date
JP2000070878A true JP2000070878A (en) 2000-03-07

Family

ID=17681751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10284692A Pending JP2000070878A (en) 1998-09-01 1998-09-01 Gas-liquid mixed jet type cleaning device for blind-hole cleaning

Country Status (1)

Country Link
JP (1) JP2000070878A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009142752A (en) * 2007-12-14 2009-07-02 Hitachi Plant Technologies Ltd In-place cleaning method of pipeline
DE102007063526A1 (en) * 2007-12-27 2009-07-02 Adolf Würth GmbH & Co. KG Apparatus and method for cleaning boreholes
JP2013085982A (en) * 2011-10-13 2013-05-13 Mitsubishi Electric Corp Blind hole cleaning apparatus and blind hole cleaning method
CN114618821A (en) * 2021-09-27 2022-06-14 杭州大和江东新材料科技有限公司 Method for cleaning ceramic product for semiconductor atomic layer deposition equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009142752A (en) * 2007-12-14 2009-07-02 Hitachi Plant Technologies Ltd In-place cleaning method of pipeline
DE102007063526A1 (en) * 2007-12-27 2009-07-02 Adolf Würth GmbH & Co. KG Apparatus and method for cleaning boreholes
JP2013085982A (en) * 2011-10-13 2013-05-13 Mitsubishi Electric Corp Blind hole cleaning apparatus and blind hole cleaning method
CN114618821A (en) * 2021-09-27 2022-06-14 杭州大和江东新材料科技有限公司 Method for cleaning ceramic product for semiconductor atomic layer deposition equipment

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