JP2000064065A - Production equipment for etching product - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production equipment for etching products capable of extremely enhancing the production efficiency of the etching products. SOLUTION: This production equipment includes an etching device A, an etching product separating device B which is disposed on the downstream side of the etching device A and separates the etching products 12 from an etching product sheet subjected to the etching treatment, an etching product sheet transfer device C which transfers the etching product sheet from the etching device A to the etching product separating device B and an etching product ejecting device D which is disposed on the downstream side of the etching product separating device B and automatically discharges the etching product 12 separated from a supporting frame of the etching product sheet to the outside.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an etching process for forming an etching product sheet in which a plurality of etching products are arranged by etching a metal sheet on which a resist pattern of an etching product such as a semiconductor device lead frame is formed. The present invention relates to an etching product manufacturing facility including an apparatus and an etching product separating device that separates an etching product from an etching product sheet to manufacture an etching product.

[0002]

2. Description of the Related Art Generally, a lead frame for a semiconductor device, which is an example of an etching product, has a step (a) shown in FIG.
To (h). These steps (a)-
Briefly describing (h), first, the surface adjusting / coating step (a), the baking step (b), and the developing step (c).
Then, a photoresist pattern is formed on the surface of the etching material 200. After that, the etching processing material 200 is processed into an etching processing material sheet 201 having a predetermined size.
Disconnect. In the etching step (d), the etching product sheet 202 is manufactured by dissolving and removing unnecessary material parts from the etching processed material sheet 201 with a corrosive liquid, and then in the product taking step (e), the lead frame 203 which is an etching product. The support frame 204 (see FIG. 24)
In the plating step (f), the surface of the lead frame 203 is plated with gold, silver or the like. Then, after the lead frame 203 is taped in the taping step (g), a quality inspection is performed in the quality step (h), and the package is shipped in the packing step (i).

[0003]

However, the above-mentioned method for producing an etching product still has the following problems to be solved. That is, as shown in FIG. 24, the etching product sheet 202 usually has a support frame 204 in which a patterned lead frame 203 is formed, and the lead frame 203 and the support frame 204 are half-etched. The lead frame 203 is separated from the etching product sheet 202, but the work of bending the support frame 204 by hand is repeated several times to fatigue the half-etched connection tab 205. The process is performed in a manner that the lead frame 203 is destroyed and the lead frame 203 is pulled out from the support frame 204. Therefore, the surface preparation / coating process (a)-
Even if the etching process (d) is continuously performed to increase the manufacturing efficiency of the etching product, the product taking process (e)
However, since the continuity is interrupted, the manufacturing efficiency of the etching product could not be sufficiently increased. Further, in the product taking work by hand in the product taking process (e),
In the case of a lead frame 203 having a complicated pattern such as a large number of pins, unless the work is done with great care, the lead bend may be deformed or damaged, and dirt may be inevitable. As described above, the manual work has a drawback that the quality of the lead frame is deteriorated.

The present invention has been made in view of the above circumstances, and a one-step unit line is constituted by an etching processing device for forming an etching product sheet and an etching product separating device for separating an etching product from the etching product sheet. However, it is an object of the present invention to provide an etching product manufacturing facility capable of significantly increasing the manufacturing efficiency of the etching product without degrading the quality of the etching product.

[0005]

A method according to the above-mentioned object.
The manufacturing equipment for the etching product described is an etching processing device that forms an etching product sheet in which a plurality of etching products connected through a plurality of connecting tabs provided at required positions of a support frame are arranged, and the etching processing. An etching product separating device which is disposed on the downstream side of the device and separates the etching product from the supporting frame of the etching product sheet formed by the etching processing device, and between the etching processing device and the etching product separating device. Arranged, the etching product sheet transfer device for automatically transferring the etching product sheet formed by the etching processing device to the etching product separation device, and disposed on the downstream side of the etching product separation device, The etching product separated from the supporting frame of the etching product sheet is automatically carried. Comprising the etching product unloading device which constitutes a step unit line.

The etching product manufacturing equipment according to claim 2 is the etching product manufacturing equipment according to claim 1, wherein the etching product separating device is an etching product sheet transfer station for transferring the etching product sheet, An etching product sheet separating station for separating the etching product sheet from the etching product sheet, and further arranged reciprocally between the etching product sheet transferring station and the etching product sheet separating station, , An etching product sheet feeding carriage having an etching product sheet transfer stage having an etching product carry-out conveyor that carries out the etching product separated from the etching product sheet, and is arranged in a state of facing each other on both sides of the etching product sheet. , First etching product sheet support frame gripping means capable of gripping both sides of the support frame of the etching product sheet and the connecting tabs provided on the both sides, and a direction perpendicular to the first etching product sheet support frame gripping means. A first bending force for separating the etching product from the etching product sheet by fatigue breaking the connection base portion between the connection tab provided on the support frame and the etching product by repeatedly applying bending force to the etching product sheet. And means.

The etching product manufacturing equipment according to claim 3 is the etching product manufacturing equipment according to claim 1, wherein the etching product separating device is an etching product sheet transfer station for transferring the etching product sheet, An etching product sheet separating station for separating the etching product sheet from the etching product sheet, and further arranged reciprocally between the etching product sheet transferring station and the etching product sheet separating station, , An etching product sheet feeding carriage having an etching product sheet transfer stage having an etching product carry-out conveyor that carries out the etching product separated from the etching product sheet, and is arranged in a state of facing each other on both sides of the etching product sheet. , First etching product sheet support frame gripping means capable of gripping both sides of the support frame of the etching product sheet and the connecting tabs provided on the both sides, and a direction perpendicular to the first etching product sheet support frame gripping means. A first bending force for separating the etching product from the etching product sheet by fatigue breaking the connection base portion between the connection tab provided on the support frame and the etching product by repeatedly applying bending force to the etching product sheet. Means, and second etching product sheet support frame gripping means for gripping the central support frame of the etching product sheet in the etching product sheet separating station, and swing bending force for the second etching product sheet support frame gripping means. Is repeatedly applied to cause fatigue damage to the connection base between the connection tab provided on the central support frame and the etching product. And comprises a second folding force applying means for separating the etch products from the etched product sheets.

The etching product manufacturing facility according to claim 4 is the etching product manufacturing facility according to claim 2 or 3, wherein the etching product sheet separating station is a support for discharging a support frame from which the etching product is separated. Equipped with a frame ejection device.

An etching product manufacturing facility according to claim 5 is the etching product manufacturing facility according to any one of claims 2 to 4, wherein the etching product sheet transfer device is the etching processing device and the etching processing device. An etching product sheet that is provided between the etching product separating device and takes out the etching product sheet from the etching processing device and sends the etching product sheet to the etching product sheet transfer stage of the etching product sheet feeding carriage. And a conveyor.
The facility for manufacturing an etching product according to claim 6 is characterized in that
5. The etching product manufacturing facility according to any one of claims 1 to 4, wherein the etching product sheet transfer device removes the etching product sheet from the etching processing device, and the etching product from the sheet removal conveyor. A sheet transfer robot for transferring the etching product sheet to a sheet feeding carriage.

According to a seventh aspect of the present invention, there is provided the etching product producing facility according to the sixth aspect, wherein the sheet transfer robot includes a sheet posture changing mechanism for rotating the etching product sheet by 90 °. .
The facility for manufacturing an etching product according to claim 8 is the method according to claim 6.
Alternatively, in the etching product manufacturing facility described in item 7, the etching product sheet feeding carriage includes a sheet lifting mechanism capable of lifting and lowering a sheet mounting surface. An etching product manufacturing facility according to claim 9 is the etching product manufacturing facility according to claim 1, wherein the etching product sheet transfer device is interposed between the etching processing device and the etching product separating device. And a sheet conveying conveyor for taking out the etching product sheet from the etching processing device and sending the etching product sheet to the etching product separating device. Claim 10
The manufacturing facility for the etching product according to claim 1 is the manufacturing facility for the etching product according to any one of claims 1 to 9, wherein the etching products are separated from each other by the half etching portion provided on the connection tab and the etching product. This is done at the connecting base of the. The etching product manufacturing facility according to claim 11, wherein the etching product unloading device takes out the etching products in an aligned state in the etching product manufacturing facility according to any one of claims 1 to 10. It is equipped with.

An etching product manufacturing facility according to claim 12 is the etching product manufacturing facility according to any one of claims 1 to 11, wherein the etching product unloading device is a defective product among the etching products. It is equipped with a defective etching product payout mechanism for selecting. The etching product manufacturing facility according to claim 13 is the etching product manufacturing facility according to claim 1, wherein the etching processing device, the etching product separating device, the etching product sheet transfer device, and the etching product carry-out device. A control device for collectively controlling the device is provided.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Next, referring to the attached drawings, an embodiment in which the present invention is embodied will be described to provide an understanding of the present invention. (First Embodiment) As shown in FIGS. 1 to 3, an etching product manufacturing facility according to the present embodiment is arranged on the downstream side of an etching processing apparatus A to perform etching from an etched etching product sheet 10. An etching product separating device B for separating the lead frame 12 which is an example of the product is provided, and the etching product sheet 10 is automatically inserted from the etching processing device A between the etching processing device A and the etching product separating device B. An etching product sheet transfer device C for transferring to the separation device B is provided, and further, the lead frame 12 separated from the support frame 15 of the etching product sheet 10 is automatically externally provided on the downstream side of the etching product separation device B. It is characterized in that an etching product carrying-out device D for discharging to the above is provided. Then, the etching processing device A, the etching product sheet transfer device C, the etching product separation device B, and the etching product unloading device D
A one-step unit line is formed by and.

As shown schematically in FIG. 3, in the etching product sheet 10 processed in this embodiment, the inside of the support frame 15 is divided by the central support frame 21 to form a vertically long and symmetrical space. Then, a plurality of lead frames 12 are arranged therein, and half-etched thin connecting tabs 26 and 27 are integrally formed on both side portions 18 and 19 of the support frame 15 of the etching product sheet 10 and the central support frame 21. It is configured by connecting.

Next, with reference to FIGS. 1, 2 and 3 to 18, an etching processing apparatus A, an etching product separating apparatus B, and an etching product sheet which constitute the etching product manufacturing equipment according to the present embodiment. The configuration of each part of the transfer device C and the etching product unloading device D will be described in detail.
The etching processing apparatus A has a known structure, and includes a surface conditioning / coating apparatus, an etching solution injection apparatus, a resist stripping apparatus, a cleaning apparatus, and a drying apparatus, which are not shown.

Next, the etching product separating device B will be described. As shown in FIGS. 1, 2 and 8, the etching product separating apparatus B substantially includes an etching product sheet transfer station 11 for mounting the etching product sheet 10 on the upper surface and the etching product sheet 10 to the lead frame 12. In the etching product sheet separating station 13, the etching product sheet feeding carriage 14 is arranged so as to reciprocate between the etching product sheet separating station 13 and the etching product sheet separating station 13.
And a pair of first etching product sheet support frame gripping means 16 for holding the support frame 15 of the etching product sheet 10 while being arranged along both sides of 0 (that is, spaced apart so as to face each other in the width direction). In the etching product sheet separating station 13, a first folding process for repeatedly applying a bending force in the vertical direction to both side portions 18 and 19 of the support frame 15 of the etching product sheet 10 and the connecting tabs 26 provided on both side portions 18 and 19. The bending force imparting means 20 and the second etching product sheet support frame gripping means 21a for gripping the center support frame 21 of the support frame 15 in the etching product sheet separation station 13 and the center support frame 21 of the support frame 15 swing. A second bending force applying means 22 for repeatedly applying a bending force, and a support frame 15 in which the lead frame 12 is separated.
And a support frame discharging device 23 for discharging the.

Next, with reference to FIGS. 1, 2 and 5 to 16, the structure of each part of the etching product separating apparatus B will be described in more detail. As shown in FIGS. 1 and 2, the etching product sheet transfer station 11 and the etching product sheet separation station 13 are formed on a common vertically long rectangular frame 28, and the upper surface of the rectangular frame 28 has a longitudinal direction. Both ends of bearing 2
Ball screw 31 pivotally supported by 9, 30
The ball screw 31 is rotatably driven by a traveling motor 32.

As shown in FIGS. 1, 5 and 6, the etching product sheet feeding carriage 14 which can freely reciprocate between the etching product sheet transfer station 11 and the etching product sheet separating station 13 has a rectangular shape at its lower portion. The trolley body 33 includes a trolley body 33.
A pair of tubular nuts 3 are provided on the lower surface of the
4, 35 are attached and these tubular nuts 34, 35 are attached.
Is screwed onto the ball screw 31. With the above-described configuration, the traveling motor 32 is driven to rotate the ball screw 31 in the normal direction or the reverse direction so that the etching product sheet feeding carriage 14 is smoothly moved between the etching product sheet transfer station 11 and the etching product sheet separating station 13. Can reciprocate. Further, as shown in FIGS. 5 and 6, on the lower surface of the carriage main body 33, a pair of guide cylinders 33a are provided in parallel with the left and right sides of the cylindrical nuts 34, 35.
33b is attached, and the guide cylinders 33a and 33b
Is a pair of guide shafts 31 a, 31 mounted in parallel on the left and right sides of the ball screw 31 on the upper surface of the rectangular frame 28.
It is slidably mounted on b.

Further, as shown in FIGS. 1, 5 and 6,
An etching product sheet transfer stage is provided above the etching product sheet feeding carriage 14. The etching product sheet transfer stage can mount the etching product sheet 10 on the upper surface and also etches the lead frame 12 after separation. Product sheet separation station 13
An etching product unloading conveyor 36 is provided for transferring from the etching product unloading device D to the etching product unloading device D. That is, on the upper part of the carriage main body 33, lift cylinder devices 36a, 36 which are an example of a seat lift mechanism capable of lifting the seat mounting surface.
The lifting platform 37 is attached via the
Bearing stands 37a and 37b are erected on both ends in the longitudinal direction. The shafts 38 and 39 are rotatably supported by the bearings mounted on the upper ends of the bearing bases 37a and 37b. A plurality of rotary pulleys 40 and 41 are rotatably installed on the pivots 38 and 39 at intervals in the axial direction. Each pair of rotary pulleys 40, 41 corresponding to the longitudinal direction
A thin cord-shaped endless belt 42 is wound around each of the spaces. Further, a power transmission pulley 39a is attached to the pivot shaft 39 on the side of the etching product sheet separation station 13, and a motor side pulley 44 attached to the output shaft of the power transmission pulley 39a and the sheet transfer motor 44 transferred onto the carriage main body 33.
It is configured by interlocking and connecting a with a power transmission belt 44b.

With the above-described structure, the etching product sheet transfer station 11 can use the etching product sheet transfer device C to place the etching product sheet 10 on the etching product discharge conveyor 36 in a stopped state. The etching product sheet 10 can be fed to the etching product sheet separating station 13 together with the etching product sheet feeding carriage 14. Also, as will be described later, the lead frame 1 after separation
2 can be transferred from the etching product sheet separating station 13 to the etching product discharge device D. Further, in the present embodiment, as shown in FIGS. 6 and 7, in the etching product sheet feeding carriage 14, the number of the plurality of rotary pulleys 40 (the same applies to the rotary pulleys 41) is equal to the width of the etching product sheet 10. It can be changed according to the necessity, and 8 pieces can be attached in the case of the minimum width and 14 pieces can be attached in the maximum width.

Next, referring to FIGS. 2, 5, 6 and 8 to 12, the etching product sheet separating station 13 is shown.
In, a configuration of a pair of first etching product sheet support frame gripping means 16 arranged along both sides of the etching product sheet 10 and holding the support frame 15 of the etching product sheet 10 will be described. As shown in FIG. 6, in the etching product sheet separating station 13, L-shaped left and right side plates 47 and 48 are provided on the upper surface of the vertically long rectangular frame 28 so as to be contacted and separated from each other in synchronization with the longitudinal centerline 46. It is arranged. As shown in FIGS. 2, 5 and 6, the horizontal bases 47 a, 4 of the left and right side plates 47, 48 are shown.
Left and right rack plates 50 and 51 are attached to 8a, and the left and right racks formed on the inner surfaces of the left and right rack plates 50 and 51 mesh with the pinion 52, respectively. Therefore, by pushing or pulling one of the left and right rack plates 50, 51, the etching product sheet 1
According to the width of 0, the left and right rack plates 50 and 51 can be moved synchronously, and the width between the left and right side plates 47 and 48 can be adjusted quickly and accurately. Then, after that, the left and right side plates 47, 48 are moved to the adjusted positions by using a clamp device (not shown).
Can be fixed.

Next, the first bending force applying means 20 will be described. As shown in FIGS. 6, 8 and 9, the vertical portions 47b and 48b of the left and right side plates 47 and 48 are respectively provided on the top portions thereof. , A pair of folding rollers 47c, 47d, 48
c and 48d are rotatably attached, and swing clamp plates 53 and 54 having semicircular cross sections at both ends are provided on the upper surfaces of the folding rollers 47c, 47d, 48c and 48d.
Is placed. Then, the swing clamp plate 5
Swing clamp plates 53, 54 are provided on the upper surfaces of 3, 54.
In cooperation with the etching product sheet 10, both sides 18, 1
Upper clamp plates 55, 56 are provided on which the 9 can be detachably clamped.

As shown in FIGS. 8 to 10 and 12, the swing clamp plates 53, 54 and the left and right side plates 47, 48 are shown.
Return springs 53b and 54b are provided between the lower portions of the vertical portions 47b and 48b. On the upper clamp plates 55, 56, the upper clamp plates 55, 56 are brought closer to the swing clamp plates 53, 54 against the elastic force of the return springs 55a, 56a.
Clamping cylinders 53a, 54a for clamping both sides 18, 19 of the etched product sheet 10 are mounted. As shown in FIGS. 6 and 10, the swing clamp plates 53 and 54 swing together with the upper clamp plates 55 and 56 by the link mechanisms 58 and 59,
Both sides 1 of the clamped etching product sheet 10
It is possible to repeatedly apply a bending force directly to the connecting tab 26 via 8 and 19. 8 and 9, 53c and 54c are clamp guides.

As shown in FIGS. 6, 8 and 11, the link mechanisms 58 and 59 have the same structure except that they are bilaterally symmetric, and have a side bending motor 60 and a base portion. A rotary link 61 fixed to the output shaft 60a of the side bending motor 60, a swing bracket 62 having a base projecting from the outer side surfaces of the swing clamp plates 53 and 54, and a tip of the rotary link 61. And a connecting link 63 that connects the front end of the swing bracket 62.

Next, referring to FIGS. 1, 2, 5, 8, 13 and 14, in the etching product sheet separating station 13, the central support frame 21 of the support frame 15 of the etching product sheet 10 is moved. The second etching product sheet support frame gripping means 21a to be clamped and the center support frame 21 of the support frame 15 are repeatedly applied with a swing bending force.
The configuration of the bending force applying means 22 will be described. First,
The second etching product sheet support frame gripping means 21a will be described. As shown in FIGS. 2 and 6, on the right side of the etching product sheet separating station 13,
Bearings 65 and 66 are respectively attached to the etching product sheet separating station 13 at positions corresponding to both longitudinal ends of the etching product sheet separating station 13. Pivots 67 and 68 are rotatably supported on the bearings 65 and 66, respectively. The pivots 67 and 68 have a pair of vertical frames 69 and 70 and a horizontally movable clamp frame 71.
Both ends of a central pressing arm 72 formed of a gate form frame composed of and are integrally fixed. Further, a turning motor 73 is interlockingly connected to one pivot shaft 68. Then, when the turning motor 73 is driven and the central pressing arm 72 is turned 180 ° upward from the position shown in FIG. 2, the horizontally movable clamp frame 71 is moved to the etching product sheet separating station as shown in FIGS. 6 and 8. The etching product sheet 1 is located at the central portion of 13 and is integrated with the swing clamp frame 74 that forms a part of the etching product sheet feeding carriage 14.
The central support frame 21 of 0 can be clamped.

Next, the second bending force applying means 22 will be explained. As shown in FIGS. 2, 6, 8, 10, 12, and 13, both ends of the swing clamp frame 74 are Each of them is connected to pivots 28a and 28b which are rotatably supported by vertical columns 76a and 76b which are erected at intervals in the longitudinal direction at the center of the rectangular frame 28. Then, as shown in FIG. 5, FIG. 8 and FIG.
A plug 75 having a tapered taper is coaxially fixed to 8b.

On the other hand, as shown in FIGS. 8, 10 and 13, a pair of folding rollers 69a, 69b, 70a and 70b are provided at the front ends of the pair of vertical frames 69 and 70, respectively.
Roller boxes 69c, 70c rotatably attached to each other are connected in series, and folding rollers 69a, 69b, 7
Both ends of a horizontally movable clamp frame 71 whose both ends have a semicircular cross section are swingably abutted on the lower surfaces of 0a and 70b. As shown in FIGS. 8, 10 and 13, the roller boxes 69c and 70c include the horizontally movable clamp frame 7
1 for elastically bending rollers 69a, 69b, 70
a return spring 69d for contacting a and 70b,
70d is attached.

As shown in FIG. 14, a vertical frame 76c is provided upright on the front of the rectangular frame 28,
A swing shaft 78 is rotatably supported by a bearing 77 on the top of the vertical frame 76c. And the swing shaft 7
A driven-side link 79 is fixed to the outer peripheral surface of 8,
The driven link 79 is interlockingly connected to the output shaft 80a of the center support frame bending motor 80 via an intermediate link. In addition, a plug fitting hole 80b is formed in the rear portion of the swing shaft 78 for fitting and fixing when the etching product sheet feeding carriage 14 is transferred to the etching product sheet separating station 13.

With this structure, after the central support frame 21 of the etching product sheet 10 is clamped by the above-mentioned horizontal movable clamp frame 71 and the swing clamp frame 74,
By rotating the center support frame bending motor 80,
The swing shaft 78 can be swung via the driven side link 79. Therefore, the plug 75 that is integral with the swing shaft 78
Also, the swing clamp frame 74 can swing, and by this swing, the central support frame 2 of the etching product sheet 10 is moved.
It is possible to repeatedly apply an oscillating bending force to only one to cause fatigue failure and cut the connection tab 27.

Next, with reference to FIGS. 1, 2, 15 and 16, the structure of the support frame discharge device 23 for discharging the support frame 15 from which the lead frame 12 is separated will be described.
As shown in the figure, an engaging claw mounting plate 23a is installed between the vertical frames 69 and 70 at a position inside the horizontal movable clamp frame 71 by a predetermined distance. Engaging claw mounting plate 23
The engaging claw rotation motor 81 is provided at a with a space in the length direction,
82 is attached. Engaging claw rotation motors 81, 82
Output shafts 83 and 84 extend toward the horizontally movable clamp frame 71, and a pair of L-shaped engaging claws ( 85 in total (four pieces in total) are fixed in a symmetrical manner.

With the above configuration, the L-shaped engaging claws 85 to 85 are driven by driving the engaging claw rotation motors 81 and 82.
By swinging 88 at a predetermined angle, the lead frame 12 can be engaged with the reinforcing lateral rib 10a of the etched product sheet 10 after being separated. afterwards,
By driving the turning motor 73 to turn the central pressing arm 72 by 180 ° from the etching product sheet clamp position to the position shown in FIG. 2, the support frame 15 from which the lead frame 12 is separated can be easily discharged to a chute or the like. You can

Next, with reference to FIGS. 1 and 2, the structure of the etching product sheet transfer device C for automatically transferring the etching product sheet 10 from the etching processing device A to the etching product separating device B will be described. . As shown in FIG. 1, on the etching processing apparatus side of the etching product separating apparatus B, a predetermined height H from the floor 90 supporting the rectangular frame 28 on which the etching product separating apparatus B is placed.
A raised floor surface 91 that is raised only upward is formed. A sheet takeout conveyor 92 driven by a drive motor 92a is installed on the raised floor surface 91, and its upstream end is connected to the sheet outlet of the etching apparatus A. On the other hand, the other end of the sheet takeout conveyor 92 extends to the end of the raised floor surface 91.

As shown in FIGS. 1 and 4, a sheet transfer robot 93 having the following configuration is arranged above the sheet take-out conveyor 92 and the etching product sheet transfer station 11 of the etching product separating apparatus B. ing. That is, above the sheet take-out conveyor 92 and the etching product sheet transfer station 11 of the etching product separating apparatus B, a pair of traveling platform support rails 93a extending in the same direction as the conveying direction of the sheet take-out conveyor 92 are attached. . The traveling platform support rail 93a includes a traveling platform 9 having a rectangular frame formed of upper and lower plates 94a and 94b.
4 is attached by a traveling drive mechanism so as to be reciprocally movable along a traveling platform support rail 93a. In the present embodiment, the traveling drive mechanism is a pair of traveling platform support rails 9.
A ball screw shaft 93b is extended between 3a in the same direction as that of the sheet take-out conveyor 92, and a pair of cylindrical nuts 93c provided on the lower surface of the upper plate 94a of the traveling base 94 are screwed onto the ball screw shaft 93b. A traveling table reciprocating motor 93d is interlockingly connected to one end of the ball screw shaft 93b.

An elevating shaft 95 is attached to the center of the traveling base 94 via an elevating shaft guide tube 95a so as to be able to move up and down.
A revolving frame 97, which is an example of a seat posture changing mechanism including the No. 6, is attached. Here, as shown in FIG. 4, an elevating shaft swivel groove 95b is provided on the outer peripheral surface of the elevating shaft 95, in which an upper straight groove and a lower straight groove are connected by an intermediate slant groove. A guide protrusion (not shown) provided on the inner surface of the lifting shaft guide cylinder 95a is slidably fitted in the groove 95b.

A pair of lift guide racks 95d having rack teeth 95c on one side are provided on both sides of the lift shaft 95 so as to penetrate the upper plate 94a of the traveling base 94, and the lift guide racks 95d. The lower end of is fixedly connected to the lower plate 94b of the traveling base 94. On the other hand, a pair of pinions 95e that mesh with the rack teeth 95c of the elevating guide rack 95d are placed on the upper surface of the upper plate 94a of the traveling table 94. Then, these pinions 95e are attached to the rotary shaft 9
The pulley 95g fixed to both ends of the 5f and fixed to the central portion of the rotary shaft 95f is a power transmission belt 95h.
Is connected to a pulley fixed to the output shaft of the elevating motor 95i.

With the above structure, the drive motor 92a
Of the etching product sheet 1 conveyed from the etching processing apparatus A onto the sheet take-out conveyor 92 by driving
0 is sucked by the sheet suction pad 96, and then the lifting shaft 95
, And the sheet suction pad 96 together with the traveling table 94 are moved to a position directly above the etching product sheet transfer station 11, and then the elevating shaft 95 is lowered to move the etching product sheet 10 to the etching product separating device. To automatically transfer the etching product sheet 10 from the etching processing device A to the etching product separating device B by placing it on the upper surface of the etching product carry-out conveyor 36 of B and releasing the suction of the sheet suction pad 96. You can Thereafter, the elevating shaft 95 is raised again, and the traveling platform 94 is moved from directly above the etching product sheet transfer station 11 to just above the sheet take-out conveyor 92, and the next etching product sheet 10 is etched from the etching processing apparatus A to etching products. It can be transferred to the separating device B. Further, in the present embodiment, the revolving frame 97
Can be rotated by 90 °, so that the orientation of the etching product sheet 10 can be easily aligned in a direction suitable for the etching product separating operation in the etching product separating apparatus B.

Next, with reference to FIGS. 1, 2, 17, and 18, an etching product carrying-out apparatus D for taking out the lead frame 12 in an aligned state will be described. As shown in the figure, the etching product carrying-out apparatus D is
The rear end is located at substantially the same level as the upper surface of the etching product carry-out conveyor 36 of the etching product sheet feeding carriage 14, and the front end is inclined downward toward the front and is transferred from the etching product carry-out conveyor 36. The inclined conveyer 99 that receives 10 and the lead frame 12 that is connected to the front end of the inclined conveyer 99 and separated
Is arranged in an aligned state and is arranged on a plurality of vertically movable aligning stands 100 and 101, and an aligning and ejecting means 105 is provided.

17 and 18 in the above configuration
As shown in FIG.
Is a vertical pillar 1 that is erected on the inclined conveyor support stand 106.
It is supported on the tops of 06a and 106b. The pivots 107 rotatably attached to both ends of the body frame 99a
A plurality of rotary pulleys 109 and 110 are attached to the shaft 08 at intervals in the axial direction. In addition, as shown in FIG. 17, the endless belt 11 in the form of a thin cord is provided between each pair of rotary pulleys 109 and 110 corresponding to the longitudinal direction.
1 is wound. Further, as shown, the pivot 1
The pulley separately attached to 08 is interlocked with the motor side pulley attached to the output shaft of the transfer motor 114. As shown in FIGS. 1 and 17, above the tip of the inclined conveyor 99, a detection sensor 99b for detecting whether the passing lead frame 12 is a good product or a defective product is attached.

Further, as shown in FIGS. 17 and 18, the alignment take-out means 105 is arranged on the extension line of the inclined conveyor 99 at the same inclination as that of the inclined conveyor 99 so that the sliding guide shaft 1 is provided.
16, a moving machine frame 117 is attached to the sliding guide shaft 116 so as to be slidable in the longitudinal direction, and a plurality of forks 118 that move forward and backward toward the inclined conveyor 99 are provided on the moving machine frame 117 at parallel intervals in the width direction. In addition, each of them is attached so as to be rotatable around its axis.

In the above structure, the sliding guide shaft 11
A fork advancing / retreating motor 119 is attached to the front end portion of 6, and an output shaft of the fork advancing / retreating motor 119 is
One end of a link mechanism composed of the first and second links 120 and 121 is pivotally connected, while the other end of the link mechanism is pivotally connected to the moving machine frame 117. With this configuration, the moving machine frame 117 and the fork 11 that is integral with the moving machine frame 117 are driven by the fork advancing / retreating motor 119.
8 can be periodically moved forward and backward, and the lead frames 12 from the inclined conveyor 99 can be dropped one by one and loaded on the alignment tables 100 and 101 intermittently.

Further, the moving machine frame 117 is provided with a defective etching product payout mechanism 122 which is an example of defective product selecting means for rotating a plurality of forks 118 around the axis. That is, the defective etching product dispensing mechanism 122 is
A worm wheel 1 in which a rotary shaft 123 is arranged in a direction orthogonal to the base of the fork 118, and worm wheels 124 provided on the base of the fork 118 are attached to the rotary shaft 123.
25, and a pulley fixed to one end of the rotary shaft 123 is interlocked by a power transmission belt with a pulley mounted on the output shaft of the defective product delivery motor 126 mounted on the upper surface of the moving machine frame 117. is doing. With the above-described configuration, the defective product delivery motor 126 is driven to rotate all the forks 118 around the axis, thereby delivering the defective lead frame 12 transferred from the inclined conveyor 99 to the lateral side. be able to.

Further, in the present embodiment, as shown in FIG. 1, the etching processing apparatus A, the etching product separating apparatus B, the etching product sheet transfer apparatus C, and
A control device 130 for collectively controlling the etching product discharge device D is provided.

Next, the step of separating the lead frame 12 from the etching product sheet 10 by using the etching device manufacturing equipment having the above-mentioned configuration by using the control device 130 will be described with reference to the flowchart shown in FIG. To do. The operation switch is turned on to drive the sheet take-out conveyor 92 to convey the etching product sheet 10 from the etching processing apparatus A to the leading end of the sheet take-out conveyor 92 (step S1). The sheet transfer robot 93 is driven to transfer the etching product sheet 10 from the sheet take-out conveyor 92 to the etching product sheet feeding carriage 14 in the etching product sheet transfer station 11 (step S2). The sheet transfer motor 44 is driven to send the etching product sheet 10 together with the etching product sheet feeding carriage 14 from the etching product sheet transfer station 11 to the etching product sheet separating station 13 (step S3). The clamping cylinders 53a and 54a are driven to clamp both side portions 18 and 19 of the etching product sheet 10 (step S4).

The central pressing arm 72 is rotated to clamp the central support frame 21 of the etching product sheet 10 by the horizontally movable clamp frame 71 and the swing clamp frame 74 (step S5). The central supporting frame bending motor 80 is driven to apply a bending force to the central supporting frame 21 a predetermined number of times (for example, 20 to 40 times).
Repeatedly applied to cause fatigue failure in the connecting tab 27,
One end of the lead frame 12 is separated from the support frame 15 (step S6). The half-etched portion of the connecting tab 27 and the connecting base portion of the lead frame 12 are separated from each other. The side bending motor 60 is driven to apply a bending force to both side portions 18 and 19 a predetermined number of times (for example, 20 to 40).
It is repeatedly applied to cause fatigue damage to the connection tab 26, and the other end of the lead frame 12 is separated from the support frame 15 (step S7). The half-etched portion of the connecting tab 26 and the connecting base portion of the lead frame 12 are separated from each other.

After driving the elevating cylinder devices 36a and 36b to lower the etching product carry-out conveyor 36 by a predetermined distance, the height of the upper surface of the etching product carry-out conveyor 36 is made equal to the height of the rear end of the inclined conveyor 99. , Support frame 1
The lead frame 12 is completely separated from 5 (step S8). The etching product carry-out conveyor 36 and the tilt conveyor 99 are driven to transfer the lead frame 12 from the etching product carry-out conveyor 36 to the tilt conveyor 99 (step S9). The inclined conveyor 99 is driven until the next lead frame 12 is detected by the detection sensor 99b, and is transferred to the alignment table 100 (step S10). If the lead frame 12 is a non-defective product, the fork advancing / retreating motor 119 is driven to intermittently pull the fork 118 to drop the lead frame 12 on the alignment table 100 and supply it in an aligned state (step S11).

When the lead frame 12 reaches the set number, the supply of the lead frame 12 is stopped, and then the alignment table 1
00 is lowered (step S12). After the alignment table 100 is moved backward and the next alignment table 101 is moved to the alignment position (step S13), the alignment table 101 moves up (step S14). Further, in parallel with the operation in step S10 described above, the engaging claw rotation motors 81 and 82 composed of rotating solenoids are driven to engage the L-shaped engaging claws 85 to 88 with the reinforcing lateral rib 10a of the support frame 15. Matching and gripping (step S15).

After the center pressing arm 72 is rotated to return to the original position shown in FIG. 2 (step S16), the engaging claw rotating motors 81 and 82 are driven to discharge the support frame 15 to a chute (not shown) (step S16). S17). Further, in parallel with the operation in step S10 described above, after raising the etching product unloading conveyor 36 (step S1
8), the etching product sheet feeding carriage 14 is moved to the etching product sheet transfer station 11 which is the origin position (step S19). On the other hand, if the lead frame 12 is a defective product, the process proceeds from step S10 to step 20, and all the forks 118 can be rotated around the axis to discharge the defective product laterally (step 20). Then, the above-mentioned steps S1 to
By repeating S19, the set number of lead frames 12 can be similarly aligned on the alignment table 101.

As described above, in this embodiment, the etching product sheet 10 can be automatically transferred from the etching processing device A to the etching product separating device B by using the etching product sheet transfer device C. Moreover, since the lead frame 12 can be automatically separated from the etching product sheet 10 in the etching product separating device B, the manufacturing efficiency of the lead frame 12 can be improved. Particularly, in this embodiment, the support frame 1
By repeatedly applying a bending force to both side portions 18 and 19 of 5 and the central support frame 21, the connecting tabs 26,
By directly applying the bending force only to 27, it is possible to reliably and automatically separate the etching product without causing fatigue fracture in these portions and causing a dent in the etching product. Further, in the above-described embodiment, the support frame 15 in the etching product sheet 10 has the central support frame 21 in the central portion thereof, but the etching product sheet 10 has the central support frame 2.
In some cases, there is no 1. In such a case, the second bending force applying means 22 for repeatedly applying the swing bending force to the central support frame 21 of the support frame 15 in the direction orthogonal to the longitudinal direction can be eliminated.

(Second Embodiment) FIG. 20 shows the structure of an etching product manufacturing facility according to the second embodiment.
As shown in the figure, in the present embodiment, the etching product sheet transfer device 131 is arranged at the same level as the etching product carry-out conveyor 36 mounted on the etching product sheet feeding carriage 14 in the etching product separating device B. It is characterized in that it is constituted by only the sheet conveying conveyor 132. The etching product sheet conveyor 132 is driven by a drive motor 133. With the above configuration, the etching product sheet 10 can be automatically transferred from the etching processing device A to the etching product separating device B by using the etching product sheet transferring device 131, and the etching product separating device B can be automatically transferred. Since the lead frame 12 can be automatically separated from the etched product sheet 10 in step 1, the manufacturing efficiency of the lead frame 12 can be improved. Further, the etching product sheet transfer device 131 can be manufactured at low cost.

(Third Embodiment) FIG. 21 shows the configuration of an etching product manufacturing facility according to the third embodiment.
As shown in the figure, in this embodiment, the etching product separating apparatus 134 includes an etching product sheet feeding carriage 136 including an elevating device 135, instead of the etching product sheet feeding carriage 14 according to the first embodiment. It is characterized by doing. With the above-described configuration, the etching product sheet 10 can be automatically transferred from the etching processing device 1 to the etching product separating device 134 by using the etching product sheet transferring device C, and the etching product separating device 134 can also be transferred. Automatically etching product sheet 10 to lead frame 12 at
Therefore, the manufacturing efficiency of the lead frame 12 can be improved. Further, by driving the elevating mechanism 135, the etching product sheet feeding carriage 13
Since the sheet conveying conveyor 137 of No. 6 can move up to pick up the etching product sheet 10, the stroke of the elevating mechanism of the etching product sheet transfer device C can be shortened, and the etching product sheet transfer device C has a compact structure. Can be In FIG. 21, the etching product separating device 134 and the etching product unloading device 1 are shown.
Reference numeral 38 has substantially the same configuration as the etching product separating apparatus B and the etching product carrying-out apparatus D in the first embodiment, but the description is simplified.

(Fourth Embodiment) FIG. 22 shows the construction of an etching product manufacturing facility according to a fourth embodiment of the present invention. As shown in the figure, in the present embodiment, the etching product sheet transfer device 139 is installed in the sheet conveying conveyor 14
0, and is directly connected to the etching product separating device 141 which has no constituent member corresponding to the etching product sheet feeding carriage 14 in the first embodiment, and the height of the sheet conveying conveyor 140 is set to the etching position. It is characterized in that the level is the same as that of the swing clamp plate 142 and the swing clamp frame 143 in the etching product sheet separating station of the product separating device 139. Even with the above-mentioned configuration, the etching product sheet 1
0 can be automatically transferred from the etching processing device A to the etching product separating device 141 by using the etching product sheet transferring device 139, and the etching product sheet 10 is automatically transferred from the etching product sheet 10 in the etching product separating device 141. Since the lead frame 12 can be separated, the manufacturing efficiency of the lead frame 12 can be improved. Further, since the etching product separation device 141 can be simply constructed, it can be manufactured at low cost.
Note that, in FIG. 22, the etching product separation device 141
The etching product carry-out device 144 and the etching product carry-out device 144 have substantially the same configuration as the etching product separating device B and the etching product carry-out device D in the first embodiment.
The description is simplified.

Although the present invention has been described above with reference to some embodiments, the present invention is not limited to the configurations described in the above embodiments, and the scope of the claims is not limited thereto. It also includes other embodiments and modifications that are conceivable within the scope of the matters described. For example, the control for surely separating the connecting tabs described above is the folding back number control, but a sensor detects whether or not the connecting tabs are completely separated, and based on this detected value, the next step is performed. You can also proceed.

[0052]

In the facility for manufacturing etching products according to claims 1 to 13, the etching product sheet is automatically transferred from the etching processing device to the etching product separating device by using the etching product sheet transfer device. Moreover, since the etching product can be automatically separated from the etching product sheet by the etching product separating device, the production efficiency of the etching product can be improved without degrading the quality of the etching product.

In the etching product manufacturing facility according to the second aspect of the present invention, the etching product is substantially supported by repeatedly applying bending force to both sides of the support frame using the first bending force applying means. By directly applying the bending force only to the connection tabs connected to the frame, it is possible to reliably and automatically separate the etching product without causing the etching product to move.

In the etching product manufacturing facility according to claim 3, the bending force is repeatedly applied to both side portions of the support frame by using the first and second bending force applying means, thereby substantially etching. By directly applying the swinging bending force only to the connecting tab connecting the product to the supporting frame and the central supporting frame, it is possible to reliably and automatically separate the etching product without causing the etching product. it can. In the etching product manufacturing facility according to the fourth aspect, the support frame from which the etching product has been separated can be quickly and reliably discharged using the support frame discharge device. In the etching product manufacturing facility according to claim 5, by using an etching product sheet conveying conveyor from the etching processing device to the etching product separation device, the etching product sheet transfer stage of the etching product sheet feeding cart can be easily and reliably carried out. Can be sent to.

In the etching product manufacturing facility according to claim 6, the etching product sheet transfer device comprises a sheet take-out conveyor for taking out the etching product sheet from the etching processing device and an etching product sheet for an etching product separating device from the sheet taking-out conveyor. Since it is composed of a sheet transfer robot that transfers the etching product sheet to the feeding carriage, even if the height of the surface of the etching product sheet taken out from the etching processing device and the etching product sheet feeding carriage of the etching product separating device do not match. Therefore, the etching product sheet can be smoothly transferred from the etching processing device to the etching product separating device.

In the etching product manufacturing facility according to claim 7, since the sheet transfer robot is provided with a sheet posture changing mechanism for rotating the etching product sheet by 90 °, the direction of the etching product sheet is changed to the etching product separating device. Can be easily aligned in a direction suitable for the etching product separation operation in. In the etching product manufacturing facility according to claim 8, since the etching product sheet feeding carriage is provided with a sheet lifting mechanism capable of raising and lowering the sheet mounting surface, the etching product carrying conveyor of the etching product sheet feeding carriage is raised. The etching product sheet transfer device can be picked up, the stroke of the lifting mechanism of the etching product sheet transfer device can be shortened, and the etching product sheet transfer device can have a compact structure.

In the etching product manufacturing facility according to claim 9, the etching product sheet transfer device is provided between the etching processing device and the etching product separating device, and the etching product sheet is taken out from the etching processing device and the etching product sheet is removed. Since it is configured by interposing the sheet conveying conveyer for sending the sheet to the etching product separating device, the whole structure of the etching product sheet transferring device can be simplified and can be manufactured at low cost. In the etching product manufacturing facility according to claim 10, the separation of the etching product is performed more reliably because the separation of the etching product is performed at the connection base of the half etching portion provided on the connection tab and the etching product. It can be carried out. In the etching product manufacturing facility according to the eleventh aspect, the etching product separated from the etching product sheet can be taken out in an aligned state by using the aligning and taking out means. In the etching product manufacturing facility according to the twelfth aspect, by providing the defective etching product payout mechanism, it is possible to reliably select and exclude defective products from the etching products. In the etching product manufacturing facility according to claim 13,
Since the control device controls the etching processing device, the etching product separating device, the etching product sheet transfer device, and the etching product unloading device collectively, the etching product can be automatically and smoothly manufactured. it can.

[Brief description of drawings]

FIG. 1 is a side view of essential parts of an etching product manufacturing facility according to a first embodiment of the present invention.

FIG. 2 is a plan view of the same.

FIG. 3 is a schematic perspective view of an etching product sheet to which the etching product manufacturing facility according to the first embodiment of the present invention is applied.

FIG. 4 is a perspective view of a sheet transfer robot.

FIG. 5 is an explanatory view showing a state in which an etching product sheet feeding carriage is fed to the etching product sheet separating station.

6 is a cross-sectional view taken along the line I-I of FIG.

7 is a sectional view taken along line II-II in FIG.

FIG. 8 is a perspective view of first and second bending force applying means that form a main part of the etching product manufacturing facility according to the first embodiment of the present invention.

FIG. 9 is a side view of a first bending force applying unit that is a main part of the etching product manufacturing facility according to the first embodiment of the present invention.

10 is a cross-sectional view taken along the line III-III in FIG.

FIG. 11 is an enlarged front view of the link mechanism of the first bending force applying means.

FIG. 12 is an enlarged explanatory view of a main part of a first bending force applying unit.

FIG. 13 is an enlarged explanatory view of a main part of a second bending force applying unit.

FIG. 14 is an enlarged explanatory view of a main part of a second bending force applying unit.

FIG. 15 is a front view of an L-shaped engagement claw and an engagement claw rotation motor that form the support frame discharge device.

FIG. 16 is a side view of an L-shaped engagement claw and an engagement claw rotation motor that form the support frame discharge device.

FIG. 17 is a side view of the etching product carrying-out device.

FIG. 18 is an enlarged explanatory view of a main part of the same aligning and taking out means.

FIG. 19 is a flowchart showing steps of an etching product separating operation by the etching product manufacturing facility according to the first embodiment of the present invention.

FIG. 20 is a side view of a main part of an etching product manufacturing facility according to a second embodiment of the present invention.

FIG. 21 is a side view of essential parts of an etching product manufacturing facility according to a third embodiment of the present invention.

FIG. 22 is a side view of a main part of an etching product manufacturing facility according to a fourth embodiment of the present invention.

FIG. 23 is a process explanatory diagram of a conventional method for producing an etched product.

FIG. 24 is a plan view of a general etching product sheet used for explaining the prior art.

[Explanation of symbols]

A Etching processing device B Etching product separation device C Etching product sheet transfer device D Etching product discharge device H Height 10 Etching product sheet 10a Reinforcing lateral rib 11 Etching product sheet transfer station 12 Lead frame 13 Etching product sheet separation station 14 Etching Product sheet feeding cart 15 Support frame 16 First etching product sheet support frame gripping means 18 Side part 19 Side part 20 First bending force applying means 21 Central support frame 21a Second etching product sheet support frame gripping means 22 Bending force application means 23 23 Support frame discharge device 23a Engaging claw mounting plate 26 Connecting tab 27 Connecting tab 28 Rectangular frame 28a Axis 28b Axis 29 Bearing 30 Bearing 31 Ball screw 31a Guide shaft 31b Guide shaft 32 Travel motor 33 units Main body 33a Guide cylinder 33b Guide cylinder 34 Cylindrical nut 34a Guide cylinder 35 Cylindrical nut 36 Etching product unloading conveyor 36a Elevating cylinder device 36b Elevating cylinder device 37 Elevating platform 37a Bearing platform 37b Bearing platform 38 Axis 39 Axis 39a Power transmission pulley 40 Rotation Pulley 41 Rotating pulley 42 Endless belt 44 Sheet transfer motor 44a Motor side pulley 44b Power transmission belt 46 Longitudinal centerline 47 Left side plate 47a Horizontal base 47b Vertical part 47c Bending roller 47d Bending roller 48 Right side plate 48a Horizontal base 48b Vertical Portion 48c Bending roller 48d Bending roller 50 Left rack plate 51 Right rack plate 52 Pinion 53 Swing clamp plate 53a Clamp cylinder 53b Return spring 53c Clamp guide 4 Swing Clamp Plate 54a Clamping Cylinder 54b Return Spring 54c Clamp Guide 55 Upper Clamp Plate 55a Return Spring 56 Upper Clamp Plate 56a Return Spring 58 Link Mechanism 59 Link Mechanism 60 Side Bending Motor 60a Output Shaft 61 Rotation Link 62 Swing Dynamic bracket 63 Connection link 65 Bearing 66 Bearing 67 Axis 68 Axis 69 Vertical frame 69a Bending roller 69b Bending roller 69c Roller box 69d Return spring 70 Vertical frame 70a Bending roller 70b Folding roller 70c Roller box 70d Return spring 71 Horizontally movable Clamp frame 72 Central pressing arm 73 Slewing motor 74 Swing clamp frame 75 Plug 76a Vertical column 76b Vertical column 76c Vertical frame 7 Bearing 78 Swing shaft 79 Driven side link 80 Central support frame bending motor 80a Output shaft 80b Plug fitting hole 81 Engaging claw rotating motor 82 Engaging claw rotating motor 83 Output shaft 84 Output shaft 85 L-shaped engaging claw 86 L-shaped engaging claw 87 L-shaped engaging claw 88 L-shaped engaging claw 90 Floor surface 91 Raised floor surface 92 Sheet take-out conveyor 92a Drive motor 93 Sheet transfer robot 93a Travel base support rail 93b Ball screw shaft 93c Cylindrical nut 93d Traveling base reciprocating motor 94 Traveling base 94a Upper plate 94b Lower plate 95 Lifting shaft 95a Lifting shaft guide cylinder 95b Lifting shaft turning groove 95c Rack tooth 95d Lifting guide rack 95e Pinion 95f Rotating shaft 95g Pulley 95h Power transmission belt 95i Lifting motor 96 Sheet suction pad 97 Swivel frame 99 Inclined conveyor 99a Main body frame Form 99b Detection sensor 100 Alignment platform 101 Alignment platform 105 Alignment and extraction means 106 Inclined conveyor support platform 106a Vertical column 106b Vertical column 107 Axis 108 Axis 109 Rotation pulley 110 Rotation pulley 111 Endless belt 114 Transfer motor 116 Sliding guide axis 117 Mobile device frame 118 Fork 119 Fork advancing / retreating motor 120 First link 121 Second link 122 Defective etching product delivery mechanism 123 Rotation shaft 124 Worm wheel 125 Worm 126 Defective product delivery motor 130 Control device 131 Etching product sheet transfer device 132 Etching Product Sheet Conveyor 133 Drive Motor 134 Etching Product Separating Device 135 Elevating Device 136 Etching Product Sheet Feeding Cart 137 Sheet Conveying Conveyor 138 Packaging product unloading device 139 etched product sheet transfer device 140 the sheet conveyor 141 etching product separator 142 swings the clamping plate 143 swings the clamp frame 144 etching product unloading device

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Toshihiko Ezaki             2-10-1 Komine, Hachiman Nishi-ku, Kitakyushu City, Fukuoka Prefecture               Mitsui High-Tech Co., Ltd. F-term (reference) 4K057 WC10 WK06 WK10 WM11 WM18                       WN01                 5F067 BA06 DA01 DA13 DA16 DB05                       DB06 DC11 DC17

Claims (13)

[Claims] 1. An etching processing apparatus that forms an etching product sheet in which a plurality of etching products connected through a plurality of connecting tabs provided at required positions of a support frame are arranged, and a downstream side of the etching processing apparatus. And an etching product separating device for separating the etching product from the supporting frame of the etching product sheet formed by the etching processing device, and arranged between the etching processing device and the etching product separating device, An etching product sheet transfer device that automatically transfers the etching product sheet formed by the etching processing device to the etching product separating device, and the etching product sheet is disposed on the downstream side of the etching product separating device. Etching product that automatically carries out the etching product separated from the support frame of An etching product manufacturing facility, which is equipped with a carry-out device and constitutes one process unit line. 2. The etching product separating device includes an etching product sheet transferring station for transferring the etching product sheet, and an etching product sheet separating station for separating the etching product from the etching product sheet. , Etching provided with an etching product carry-out conveyer for carrying out the etching product separated from the etching product sheet, which is reciprocally arranged between the etching product sheet transfer station and the etching product sheet separating station An etching product sheet feeding carriage provided with a product sheet transfer stage, and arranged on both sides of the etching product sheet so as to face each other, and the connecting tabs provided on both sides of the supporting frame of the etching product sheet and on both sides thereof. First that can be held A vertical bending force is repeatedly applied to the etching product sheet support frame gripping means and the first etching product sheet support frame gripping means to form a connection base portion between the connection tab and the etching product provided on the support frame. The facility for producing an etching product according to claim 1, further comprising a first bending force applying unit that separates the etching product from the etching product sheet by fatigue failure. 3. The etching product separating device includes an etching product sheet transferring station for transferring the etching product sheet, and an etching product sheet separating station for separating the etching product from the etching product sheet. , Etching provided with an etching product carry-out conveyer for carrying out the etching product separated from the etching product sheet, which is reciprocally arranged between the etching product sheet transfer station and the etching product sheet separating station An etching product sheet feeding carriage provided with a product sheet transfer stage, and arranged on both sides of the etching product sheet so as to face each other, and the connecting tabs provided on both sides of the supporting frame of the etching product sheet and on both sides thereof. First that can be held A vertical bending force is repeatedly applied to the etching product sheet support frame gripping means and the first etching product sheet support frame gripping means to form a connection base portion between the connection tab and the etching product provided on the support frame. A first bending force applying means for fatigue-breaking to separate the etching product from the etching product sheet; and the etching product sheet separating station,
Second for holding the central support frame of the etching product sheet
Of the etching product sheet supporting frame and the second etching product sheet supporting frame gripping device are repeatedly applied with a swinging bending force to connect the connecting tab provided on the central supporting frame with the etching product. 2. A facility for producing an etching product according to claim 1, further comprising a second bending force applying means for fatigue-breaking the product to separate the etching product from the etching product sheet. 4. The etching product manufacturing facility according to claim 2, wherein the etching product sheet separating station comprises a supporting frame discharging device for discharging the supporting frame from which the etching product is separated. 5. The etching product sheet transfer device comprises:
It is interposed between the etching processing device and the etching product separating device, takes out the etching product sheet from the etching processing device, and transfers the etching product sheet to the etching product sheet of the etching product sheet feeding carriage. An etching product manufacturing facility according to any one of claims 2 to 4, further comprising: an etching product sheet conveying conveyer that sends the etching product sheet to a stage. 6. The etching product sheet transfer device comprises:
It is characterized by further comprising: a sheet take-out conveyor for taking out the etched product sheet from the etching processing apparatus; and a sheet transfer robot for transferring the etched product sheet to the etching product sheet feeding carriage from the sheet take-out conveyor. Item 4. Equipment for producing an etching product according to any one of Items 2 to 4. 7. The etching product manufacturing facility according to claim 6, wherein the sheet transfer robot includes a sheet posture changing mechanism for rotating the etching product sheet by 90 °. 8. The etching product manufacturing facility according to claim 6, wherein the etching product sheet feeding carriage includes a sheet lifting mechanism capable of lifting a sheet mounting surface. 9. The etching product sheet transfer device comprises:
A sheet conveyer is provided between the etching processing device and the etching product separating device, and the sheet conveying conveyer takes out the etching product sheet from the etching processing device and sends the etching product sheet to the etching product separating device. Claim 1 characterized by the above.
Manufacturing equipment for the etching products described. 10. The separation of the etching product is performed at a connection base portion of the half etching portion provided on the connection tab and the etching product. Equipment for manufacturing etching products described in. 11. The etching product manufacturing facility according to claim 1, wherein the etching product carry-out device includes an aligning and taking-out means for taking out the etching product in an aligned state. 12. The etching product carry-out device comprises a defective etching product payout mechanism for selecting a defective product from the etching products.
11. The manufacturing facility for etching products according to any one of 11. 13. A control device for collectively controlling the etching processing device, the etching product separating device, the etching product sheet transfer device, and the etching product unloading device. 1. Manufacturing equipment for etching products according to 1.